JP2004270003A - Washing apparatus for continuous plating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing apparatus for a continuous plating apparatus, which is short in the dimensions in a longitudinal direction, can efficiently perform the washing and can reduce the volume of draining. <P>SOLUTION: A rinse tank 1 is compartmentalized by partitions, successively from an inlet side for works, to a first shower rinse tank 2, a draining tank 3, an immersion rinse tank 4, and a second shower rinse tank 5. End walls on both sides of the rinse tank 1 and the respective partitions are provided with openings 6, 10, 7, 8, and 9 for work passage. The first shower rinse tank 2 and the second shower rinse tank 5 are provided with showers 16, 16 and 17, 17 whose nozzles are opposed toward the works. Liquid leakage prevention mechanisms 11 and 12 of a short gushing distance and high liquid leakage preventability are attached to the openings 8 and 9 on the wok inlet side and outlet side of the immersion rinse tank 4 and simple liquid leakage prevention mechanisms 13, 14 and 15 are attached to the end walls on both sides of the rinse tank and to the openings 6, 7 and 8 between the first shower rinse tank and the draining tank. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a rinsing apparatus in a continuous plating apparatus for performing a rinsing process on a work in a continuous plating apparatus that performs plating while transporting a flat work in a vertical position.
[0002]
[Prior art]
[Patent Document 1] Japanese Patent Application Laid-Open No. 9-505638 [Patent Document 2] Japanese Patent Application Laid-Open No. Hei 10-204691 [0003]
As a device for plating a flat work such as a printed circuit board, a jig is not required, and there is an advantage that high-speed plating can be performed by equipping with a bath liquid jet mechanism. In many cases, a continuous plating apparatus that continuously transfers in a vertical position is used. In a continuous plating apparatus that continuously transfers such a flat work in a vertical position, the flat work enters and exits from the side of the processing tank below the processing liquid level, so that the processing liquid leaks from the entrance of the work. This is a problem, and for example, a processing apparatus having a mechanism for preventing the leakage of a processing liquid as disclosed in Japanese Patent Publication No. 9-505638 has been considered.
[0004]
Japanese Unexamined Patent Application Publication No. 9-505638 discloses that a pair is formed in a processing bath loosely in a vertical direction corresponding to a slit for allowing a workpiece provided on an end wall of a processing tank to pass therethrough. The arranged rollers and the like are arranged as a seal, and these rollers and the like are pressed against each other or the end wall of the processing tank by hydraulic pressure with respect to each other or each time. Japanese Patent Laid-Open Publication No. Hei 10-204691 discloses a similar liquid leakage prevention mechanism in which a pair of rolls are brought into close contact to close a product passage groove.
[0005]
However, with such a liquid leakage prevention mechanism, when a flat work enters between the seal rollers, the processing liquid in the processing tank is prevented from spouting horizontally between the work and the seal rollers along the work surface. However, since the dimension of the work in the height direction was always shorter than the length of the seal roller, it was not possible to prevent the treatment liquid from leaking from the lower part of the seal roller without the work. Therefore, in such a continuous plating apparatus, a certain liquid leak is unavoidable and a liquid receiving tank for receiving the leaked liquid is provided, and the leaked liquid is returned to the processing tank by a pump. The length of the liquid receiving tank receiving the liquid was determined in accordance with the distance from which the processing liquid was jetted.
[0006]
In order to guarantee plating quality, it is preferable to perform sufficient water washing between processing steps, and in order to perform sufficient water washing efficiently, it is advantageous to perform multi-stage water washing and reduce the amount of washing water used. Countercurrent rinsing, in which immersion rinsing is performed in two stages, is often used. In order to further improve the efficiency of the water washing, for example, a three-stage water washing tank is used as a shower water washing before and after immersion water washing. However, these water washing tanks also have a liquid leakage prevention device and a liquid receiving tank. The same configuration as that of a general treatment tank provided with a washing tank is used, and when a large number of such washing tanks are installed, there is a problem that the length of the entire apparatus is further increased and a large installation area is required.
[0007]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has been made to provide a water washing apparatus in a continuous plating apparatus that has a short length dimension, can be efficiently washed, and can reduce the amount of wastewater. It is.
[0008]
[Means for Solving the Problems]
A water washing apparatus in the continuous plating apparatus of the present invention made to solve the above-mentioned problem is a water washing apparatus in a continuous plating apparatus for performing three-stage washing of shower, immersion, and shower, wherein a washing tank is separated by a partition wall. From the inlet side of the work, a first shower rinsing tank, a drain tank, a immersion rinsing tank, and a second shower rinsing tank are provided, and openings for passing the work are provided on both end walls and each partition of the rinsing tank. In the first shower tub and the second shower tub, showers with injection holes facing the work are provided so as to face each other. A liquid leakage prevention device with a short horizontal jet distance was installed, and a simple liquid leakage prevention device was mounted on the end walls on both sides of the washing tank and the opening between the first shower washing tank and the drain tank. It is an feature.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, an embodiment of a water washing apparatus in the continuous plating apparatus of the present invention will be specifically described with reference to the drawings.
FIG. 1 and FIG. 2 basically show a three-stage rinsing with shower rinsing before and after immersion rinsing. The rinsing tank 1 is separated by a partition wall and the first shower rinsing from the inlet side of the work. The tank 2, the drain tank 3, the immersion rinsing tank 4, and the second shower rinsing tank 5 are arranged. In the drawing, the work is transferred from right to left as shown by the arrow in FIG. 1, and in the following description, the front of the plate-shaped work in the traveling direction, that is, the left of each drawing is the front, with respect to the work surface. The orthogonal direction is expressed as a lateral direction.
[0010]
An opening 6 is provided on the end wall of the washing tank 1 on the work inlet side, an opening 7 is provided on a partition wall between the first shower washing tank 2 and the drain tank 3, and between the drain tank 3 and the immersion washing tank 4. An opening 8 is provided in the partition wall, an opening 9 is provided in the partition wall between the immersion rinsing tank 4 and the second shower rinsing tank 5, and an opening 10 is provided in an end wall of the washing tub 1 on the work outlet side, respectively. The openings 8 and 9 are provided with liquid leakage prevention devices 11 and 12 each having a pair of seal rollers, and the openings 6 and 7 and 10 are provided with liquid leakage prevention devices 13 and 14 made of brushes and synthetic resin sheets. 15 are attached respectively.
[0011]
The total length of the first shower rinsing tub 2 and the drain tub 3 and the length of the second shower rinsing tub 5 are determined in accordance with the distance that the liquid is leaked from the liquid leakage prevention devices 11 and 12 in the horizontal direction. The length is the same as the length of the conventional liquid receiving tank. Showers 16, 16, 17, and 17, each having an injection hole directed at right angles to the work, are provided in the first shower tub 2 and the second shower tub 5 so as to face each other. Drain outlets 18, 19 and 20 are provided at the bottoms of the second shower rinsing tank 5 and the drain tank 3 respectively.
[0012]
FIGS. 3 and 4 show an example of the liquid leakage prevention device 11, which is mainly composed of a pair of seal roller cases 21, 21 attached to the opening 8 and forming a slit through which a work passes. . Seal roller housings 22 and 22 are provided on opposing surfaces of the seal roller cases 21 and 21. The seal roller housings 22 and 22 house column-shaped seal rollers 23 and 23, respectively. It is in a state where it can be moved in the horizontal direction within a range slightly exceeding the thickness. Water guide gutters 24, 24 are provided at the upper portions of the seal roller cases 21, 21 to guide cleaning water taken in from the sides of the seal roller housings 22, 22, and to work behind the seal roller housings 22, 22, respectively. It is made to fall at right angles to the surface.
[0013]
Brushes 25, 25 are provided at the rear end portions of the seal roller cases 21, 21 so that their bristle ends face the work side. Are sufficient to pass through. The base end portions of the synthetic resin sheets 26, 26 are fixed to the rear end surfaces of the base portions of the brushes 25, 25, respectively, and the synthetic resin sheets 26, 26 are formed so that the surfaces thereof become vertical surfaces orthogonal to the workpiece. In a flat state, the tips overlap each other. It is preferable that the mutually overlapping length is about 5 to 20 mm.
[0014]
The synthetic resin sheets 26, 26 are bent forward with the front end side to cover the bristle tips of the brushes 25, 25. The front end portions of the synthetic resin sheets 26, 26 support their elasticity and support the brushes 25, 25. Therefore, when the workpiece does not exist, the workpiece contacts each other, and when the workpiece exists, the workpiece contacts the workpiece. Further, work guides 27, 27 are attached to the rear end sides of the seal roller housings 22, 22, and the work guides 27, 27 are formed into a shape having a wider rear side space between the seal rollers 23, 23 of the work. It is designed to guide the entry of
[0015]
FIGS. 5 and 6 show an example of the liquid leakage prevention device 12, which mainly includes a pair of seal roller cases 28, 28 attached to the opening 9 having a structure similar to that of the liquid leakage prevention device 11. It is. The seal roller cases 28, 28 are provided with seal roller housings 29, 29, in which seal rollers 30, 30 are housed, respectively. The washing water taken in from the side is dropped to the front side of the seal roller housing portions 29, 29 at right angles to the work surface.
[0016]
The base ends of the synthetic resin sheets 32 and 32 similar to the synthetic resin sheets 26 and 26 are fixed to the front end portions of the seal roller cases 28 and 28, respectively, and the brushes 33 and 33 are further in front thereof. The hair tips are provided so as to face each other with the tip facing the work. The synthetic resin sheets 32, 32 are bent forward so as to cover the bristle tips of the brushes 33, 33, and the ends of the synthetic resin sheets 32, 32 are supported by their elasticity and the support of the brushes 33, 33. When the work does not exist, they come into contact with each other, and when the work exists, they come into contact with the work. Work guides 34, 34 similar to the work guides 27, 27 are attached to the rear end sides of the seal roller housings 29, 29 so as to guide the work to enter between the seal rollers 30, 30. is there.
[0017]
The liquid leakage prevention devices 13, 14, and 15 are composed of a brush and a synthetic resin sheet. The brush 25 and the synthetic resin sheet 26 in the liquid leakage prevention device 11 or the brush 33 and the synthetic resin in the liquid leakage prevention device 12 are used. The configuration is the same as that of the seat 32. Each of the liquid leakage prevention devices 13, 14, and 15 is attached to the openings 6, 7, and 10, respectively, with the synthetic resin sheet on the rear side and the brush on the front side, and the liquid leakage prevention devices 13, 14 are the first of the openings 6 and 7, respectively. It is preferable to attach the liquid leakage prevention device 15 to the second shower tub 5 side of the opening 10 on the side of the shower tub 2.
[0018]
In the drawing, reference numerals 35, 36, 37, and 38 denote ribs provided in the first shower rinsing tank 2, the drain tank 3, the immersion rinsing tank 4, and the second shower rinsing tank 5, respectively. , 36 and 38 and a gap is provided between the bottom and the tank bottom. It is preferable that the surfaces of the seal rollers 23, 23 and 30, 30 are made of an elastic material which increases sealing performance and does not damage the workpiece and has excellent chemical resistance, and is divided into a plurality of pieces in the length direction. , 26 and 32 and 32 and the synthetic resin sheets constituting the liquid leakage prevention devices 13, 14 and 15 are preferably those having excellent chemical resistance such as polyimide resin.
[0019]
FIG. 7 shows a piping system, in which cleaning water discharged from the drainage ports 19 and 20 is led to a storage tank 39, and the cleaning water accumulated in the storage tank 39 is pumped out by a pump 40, and the immersion water cleaning tank 4 and the shower 16 To be supplied. The pump supplied to the immersion washing tank 4 and the pump supplied to the shower 16 may be separate and dedicated pumps. Fresh water is supplied to the shower 17, and the washing water discharged from the drain 18 is discarded. Prior to disposal, it is needless to say that the cleaning water to be disposed of is guided to a wastewater treatment device (not shown) for treatment, or it can be concentrated and returned to the treatment tank in the preceding process.
[0020]
A plurality of washing tanks 1 configured as described above are arranged at required positions between processing tanks (not shown) linearly arranged in accordance with the processing steps to form a plating line, and a transfer device (not shown) for transferring the work W. Is provided. A conventionally known configuration can be used for the transfer device. Each processing tank is filled with a necessary processing liquid according to the processing step, circulated and agitated as necessary, and power is supplied to the electroplating tank. The workpiece W that has passed through the processing bath in the previous step is washed from the first shower rinsing tank 2 through the draining tank 3, the immersion rinsing tank 4 and the second shower rinsing tank 5 as shown by the arrow, and is washed in the next step. Transferred to processing tank.
[0021]
In the first shower tub 2, the cleaning water sprayed from the shower 16 rinses the processing liquid of the previous process that has adhered to the work W, and the cleaning water from which the processing liquid has been rinsed is discharged from the drain port 18. Since the first shower tub 2 is not filled with cleaning water, there is no water pressure, and the cleaning water does not leak even if the liquid leakage prevention devices 13 and 14 have a simple configuration. The work W that has passed through the first shower rinsing tank 2 passes through the drain tank 3, enters the immersion rinsing tank 4 from the liquid leakage prevention device 11, and enters the second shower rinsing tank 5 from the liquid leakage prevention device 12. Go. When the liquid leakage prevention devices 11 and 12 are configured as described above, the work W is guided to the work guides 27, 27 or 34, 34 when the work W enters between the seal rollers 23, 23 or 30, 30, respectively. Being moved smoothly.
[0022]
Until the work W enters, the seal rollers 23, 23 are provided on the rear end surfaces of the seal roller housing portions 22, 22 by the water pressure of the washing water in the immersion water washing tank 4, and the seal rollers 30, 30 are arranged in the seal roller housing portions. It is the same as the conventional liquid leakage prevention device that is pressed against the front end surfaces of the 29 and 29 and is in close contact with each other to suppress the leakage of the cleaning water. Liquid leakage is suppressed when the work W exists between the seal rollers 23, 23 or 30, 30, and when the work W enters between the seal rollers 23, 23 or 30, 30, the work W is sealed. The washing water in the immersion washing tank 4 is spouted in the horizontal direction along the surface of the work W from between the rollers 23, 23 or 30, 30. The flushing of the washing water in the horizontal direction from the gap in the portion where the workpiece W does not exist is the same as in the conventional liquid leakage prevention device.
[0023]
At this time, since the washing water falls at right angles to the work surface from the water guiding gutters 24, 24 to the rear side of the seal roller housings 22, 22, and from the water guiding gutters 31, 31 to the front side of the seal roller housings 29, 29, respectively. The falling washing water hits the workpiece and flows down vertically. The washing water jetting in the horizontal direction hits the flowing washing water, and the direction of the washing water is changed downward, so that the distance of the jetting of the washing water in the horizontal direction is shortened. Flows. Since the synthetic resin sheets 26, 26 and 32, 32 are in contact with the moving workpiece W, when a small amount of cleaning water is transmitted on the surface of the workpiece W, the cleaning water is sucked to the workpiece W by surface tension, and The washing water leaking from the immersion washing tank 4 through W is suppressed.
[0024]
When the pressure of the cleaning water is increased and a large amount of the cleaning water is transmitted on the surface of the work W, the work W is separated from the synthetic resin sheets 26, 26, 32, and 32, and the effect of suppressing the outflow of the cleaning water. The brushes 25, 25 and 33, 33 support the synthetic resin sheets 26, 26, 32, 32 from the back, and keep the gaps between the work W and the synthetic resin sheets 26, 26, 32, 32 small. Therefore, the washing water leaking from the immersion washing tank 4 is suppressed. The synthetic resin sheets 26, 26 and 32, 32 are in contact with the work W, and do not damage the surface of the work W.
[0025]
Since the synthetic resin sheets 26, 26, 32, and 32 are supported from the back by the brushes 25, 25, and 33, 33, the synthetic resin sheets 26 are not supported on the part without the work W unlike the case where the whole is supported by an integral elastic body. , 26 or 32, 32 contact each other. As a result, the cleaning water leaking from the portion of the lower part of the seal rollers 23, 23 where there is no work is blocked by the synthetic resin sheets 26, 26, 32, 32, which is also suppressed. In this way, the washing water leaking from the immersion washing tank 4 is suppressed, and the distance of the washing water jetted in the horizontal direction is reduced. In this embodiment, the length of the liquid draining tank 3 is shorter than that of the conventional liquid receiving tank. Is prevented by the liquid leakage prevention device 13.
[0026]
In the second shower tank 5, the washing water sprayed from the shower 17 rinses the washing water of the immersion washing tank 4 attached to the work W, and the washing water is discharged from the drain port 20 and guided to the storage tank 39. The treatment liquid component in the pre-process of the washing water in the immersion washing tank 4 for immersing and washing the work W washed in the first shower washing tank 2 is sufficiently diluted, but is washed with fresh water jetted from the shower 17. Therefore, the processing liquid component in the previous step adhering to the work W is sufficiently removed. Since the second shower tub 5 is not filled with the washing water, there is no water pressure, and the washing water injected from the shower 17 does not leak even if the liquid leakage prevention device 15 has a simple configuration. In addition, since the length of the second shower rinsing tank 5 is equivalent to the length of the conventional liquid receiving tank which is determined according to the distance of the horizontal jet from the liquid leakage preventing device 12, the liquid leakage preventing device 12 The washing water leaked from the liquid does not leak from the liquid leakage prevention device 15.
[0027]
When the cleaning water is supplied as the piping system as described above, only the cleaning water having a high concentration of the processing liquid, which has been washed out of the processing liquid of the previous process sprayed from the shower 16 and adhered to the work W, is discharged from the drain port 18. There is an advantage that the amount of washing water that is discarded and discarded is small. By supplying the same amount of washing water as the washing water jetted from the shower 16 to the shower 17, the amount of washing water in the storage tank 39 is kept constant. The work W is efficiently washed by a three-stage water washing including a first shower water washing in the first shower water washing tank 2, a immersion water washing in the next immersion water washing tank 4, and a shower water washing in the last second shower water washing tank 5 with fresh water. Is done.
[0028]
8 and 9 show another example of the liquid leakage prevention device 11, and FIGS. 10 and 11 show another example of the liquid leakage prevention device 12. Basically, they are the same as those shown in FIGS. 3 and 4, and those shown in FIGS. 5 and 6, and are denoted by the same reference numerals. 8 to 11 show the seal roller housings 22, 22, 29, 29, brushes 25, 25, 33, 33, and synthetic resin sheets 26, 26, 32, 32 of those shown in FIGS. Are inclined, and seal rollers 23, 23 and 30, 30 are accommodated in seal roller accommodating portions 22, 22, 29, 29, respectively. It is preferable that the inclination direction is such that each upper end is rearward, and the inclination angle is 1 to 5 degrees with respect to the vertical line. Also, the work guides 27, 27 and 34, 34 can be similarly inclined.
[0029]
In such a configuration, the leakage of the processing liquid is suppressed by the seal rollers 23, 23 and 30, 30 until the work W enters, and the work W is not sealed by the seal rollers 23, 23, 30, 30. Suppression of liquid leakage when present between them is the same as that shown in FIGS. When the work W enters between the seal rollers 23, 23 or 30, 30, first, the upper portion of the work W enters between the seal rollers 23, 23, 30, 30, and the entire length in the height direction gradually increases. , 23 or 30, 30. Therefore, since the entire length in the height direction of the work W does not enter at a time between the seal rollers 23, 23 or 30, 30, there is no great resistance, and the work W is not detached or inclined from the chuck. There is.
[0030]
【The invention's effect】
According to the present invention described above, three stages of shower, immersion, and shower can be performed in a washing tank having a length dimension equivalent to that of one processing tank provided with a conventional liquid leakage prevention device. There is an advantage that cleaning can be performed efficiently with the dimension in the direction. In addition, the last stage shower washing is performed with fresh water, and the washing water used for the last stage shower washing and the washing water leaking and overflowing from the immersion washing tank are returned to the immersion washing tank and used for the first stage shower washing. In this case, there is an advantage that the supply of fresh water may be small and the amount of drainage can be reduced. Therefore, it is extremely significant to contribute to the industry as to provide a water washing apparatus in a continuous plating apparatus that solves all the conventional problems.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of the present invention.
FIG. 2 is a longitudinal sectional view showing an embodiment of the present invention.
FIG. 3 is a plan view showing an example of a liquid leakage prevention device.
FIG. 4 is a longitudinal sectional view showing an example of a liquid leakage prevention device.
FIG. 5 is a plan view showing an example of a liquid leakage prevention device.
FIG. 6 is a longitudinal sectional view showing an example of a liquid leakage prevention device.
FIG. 7 is a system diagram showing a system of piping.
FIG. 8 is a plan view showing another example of the liquid leakage prevention device.
FIG. 9 is a longitudinal sectional view showing another example of the liquid leakage prevention device.
FIG. 10 is a plan view showing another example of the liquid leakage prevention device.
FIG. 11 is a longitudinal sectional view showing another example of the liquid leakage prevention device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Rinse tub 2 First shower rinsing tub 3 Drain tub 4 Immersion rinsing tub 5 Second shower rinsing tub 6, 7, 8, 9, 10 Opening 11, 12 Liquid leakage prevention device 13, 14, 15 Liquid leakage prevention Apparatus 16, 17 Shower 18, 19, 20 Drain 21 Seal roller case 22 Seal roller housing 23 Seal roller 24 Water guide gutter 25 Brush 26 Synthetic resin sheet 27 Work guide 28 Seal roller case 29 Seal roller housing 30 Seal roller 31 Water guide Gutter 32 Synthetic resin sheet 33 Brush 34 Work guide 35, 36, 37, 38 Rib 39 Storage tank 40 Pump W Work

Claims (6)

A washing apparatus in a continuous plating apparatus for performing three-stage washing of shower, immersion, and shower, wherein the washing tank is divided by a partition wall, and a first shower washing tank, a drain tank, an immersion washing tank, In addition to the shower tub 2, the end walls on both sides of the tub and the openings for the passage of the workpieces are provided on the partition walls, and the first shower tub and the second shower tub have jet holes directed toward the workpiece. The immersion rinsing tank is provided with a liquid leakage prevention device with high liquid leakage prevention capability and a short squirting distance in the horizontal direction at the work inlet and outlet openings of the immersion rinsing tank. A water washing apparatus in a continuous plating apparatus, wherein a simple liquid leakage prevention device is attached to a wall and an opening between a first shower water washing tank and a drain tank. A liquid leakage prevention device having a high liquid leakage prevention capability prevents liquid leakage by a set of two seal rollers disposed close to a vertical slit through which a work passes. A brush is provided on the outer side of each of the brushes in parallel with each seal roller with the bristle point toward the work, and the leading end portion of the synthetic resin sheet having the base end fixed to the base of each brush on the rear side in the traveling direction of the work is applied to the work. The method according to claim 1, wherein the processing liquid leaks through the work by controlling the tip of the synthetic resin sheet to contact the work by bending the brush tip of the brush by bending forward in the traveling direction. A washing device in the continuous plating apparatus as described in the above. The washing apparatus in the continuous plating apparatus according to claim 2, wherein the seal roller, the base of the brush, and the base end of the synthetic resin sheet are inclined from a vertical direction in a plane parallel to the work surface. 4. A washing apparatus in a continuous plating apparatus according to claim 2, wherein a liquid supply mechanism for dropping the liquid from above is provided outside the seal portion of the seal roller. A simple liquid leakage prevention device comprises a set of two brushes each having a bristle point directed to a work, and a synthetic resin sheet having a base portion fixed to a base portion of each of the brushes at a rear side in a traveling direction of the work. The tip of the resin sheet is bent forward in the traveling direction of the work to cover the bristles of the brush, and the tip of the synthetic resin sheet is brought into contact with the work to suppress the processing liquid leaking through the work. The water washing apparatus in the continuous plating apparatus according to any one of claims 1 to 4, wherein: Fresh water is supplied to the shower of the second shower tub, and the wash water used for rinsing by the shower of the second shower tub and the wash water leaking and overflowing from the immersion rinsing tank are returned to the immersion rinsing tank and the first water is returned to the first rinsing tub. 6. A continuous line according to any one of claims 1 to 5, further comprising a piping system for supplying water to the shower of the shower tub and discarding washing water used for rinsing by the shower of the first shower tub. Washing device in the plating system.

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