JP2004265916A5 - - Google Patents
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- Publication number
- JP2004265916A5 JP2004265916A5 JP2003029529A JP2003029529A JP2004265916A5 JP 2004265916 A5 JP2004265916 A5 JP 2004265916A5 JP 2003029529 A JP2003029529 A JP 2003029529A JP 2003029529 A JP2003029529 A JP 2003029529A JP 2004265916 A5 JP2004265916 A5 JP 2004265916A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003029529A JP2004265916A (ja) | 2003-02-06 | 2003-02-06 | 基板のプラズマ酸化処理方法 |
PCT/JP2004/001122 WO2004070815A1 (ja) | 2003-02-06 | 2004-02-04 | プラズマ酸化処理方法及び半導体基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003029529A JP2004265916A (ja) | 2003-02-06 | 2003-02-06 | 基板のプラズマ酸化処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004265916A JP2004265916A (ja) | 2004-09-24 |
JP2004265916A5 true JP2004265916A5 (ja) | 2006-04-06 |
Family
ID=32844237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003029529A Pending JP2004265916A (ja) | 2003-02-06 | 2003-02-06 | 基板のプラズマ酸化処理方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2004265916A (ja) |
WO (1) | WO2004070815A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4149427B2 (ja) * | 2004-10-07 | 2008-09-10 | 東京エレクトロン株式会社 | マイクロ波プラズマ処理装置 |
JP2006244891A (ja) * | 2005-03-04 | 2006-09-14 | Tokyo Electron Ltd | マイクロ波プラズマ処理装置 |
JP5082229B2 (ja) | 2005-11-29 | 2012-11-28 | 東京エレクトロン株式会社 | プラズマ処理装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11279773A (ja) * | 1998-03-27 | 1999-10-12 | Tomoo Ueno | 成膜方法 |
JP4713752B2 (ja) * | 2000-12-28 | 2011-06-29 | 財団法人国際科学振興財団 | 半導体装置およびその製造方法 |
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2003
- 2003-02-06 JP JP2003029529A patent/JP2004265916A/ja active Pending
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2004
- 2004-02-04 WO PCT/JP2004/001122 patent/WO2004070815A1/ja active Application Filing