JP2004251789A5 - - Google Patents
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- Publication number
- JP2004251789A5 JP2004251789A5 JP2003043210A JP2003043210A JP2004251789A5 JP 2004251789 A5 JP2004251789 A5 JP 2004251789A5 JP 2003043210 A JP2003043210 A JP 2003043210A JP 2003043210 A JP2003043210 A JP 2003043210A JP 2004251789 A5 JP2004251789 A5 JP 2004251789A5
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- substrate
- adjustment stage
- dimensional
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 238000009529 body temperature measurement Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003043210A JP2004251789A (ja) | 2003-02-20 | 2003-02-20 | 温度測定装置及び被処理基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003043210A JP2004251789A (ja) | 2003-02-20 | 2003-02-20 | 温度測定装置及び被処理基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004251789A JP2004251789A (ja) | 2004-09-09 |
| JP2004251789A5 true JP2004251789A5 (https=) | 2005-06-02 |
Family
ID=33026278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003043210A Pending JP2004251789A (ja) | 2003-02-20 | 2003-02-20 | 温度測定装置及び被処理基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004251789A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007178253A (ja) * | 2005-12-28 | 2007-07-12 | Tokyo Electron Ltd | 温度測定装置および温度測定方法 |
| JP4904822B2 (ja) * | 2006-01-16 | 2012-03-28 | 東京エレクトロン株式会社 | 温度測定機能を有する装置 |
| NL2002964A1 (nl) | 2008-06-16 | 2009-12-17 | Asml Netherlands Bv | Lithographic Apparatus, a Metrology Apparatus and a Method of Using the Apparatus. |
| JP2011109040A (ja) * | 2009-11-20 | 2011-06-02 | Nikon Corp | 半導体基板ホルダ及び温度検出装置 |
| JP5846969B2 (ja) * | 2012-03-05 | 2016-01-20 | 株式会社日立ハイテクノロジーズ | 温度計測方法 |
| FR3030889B1 (fr) * | 2014-12-19 | 2017-01-27 | Commissariat Energie Atomique | Capteur differentiel de temperature. |
-
2003
- 2003-02-20 JP JP2003043210A patent/JP2004251789A/ja active Pending
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