JP2004230520A - Centrifugal barrel polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide centrifugal barrel polishing device which effectively bevels a piezoelectric element plate that is decreased in size and increased in frequency, in a short period of time, and inexpensively provides an electric component such as a piezoelectric oscillator using the piezoelectric element plate in a short period of time. <P>SOLUTION: The centrifugal barrel polishing device 11 comprises: a revolution plate 13 fixed to a revolution shaft 14 provided in a vertical direction to an installing surface; a rotation shaft 16 provided on the revolution plate 13, and being vertical to the device installing surface or having a certain tilting angle in the revolution shaft side; a container holder 15 fixed to the rotation shaft 16 to rotate; a machining container 17 fixed and held by the container holder 15, and arranged with polishing machining particles in an inner wall thereof; and a driving motor and a driving rotation mechanism rotating the revolution shaft 14 and the rotation shaft 16 individually or together, and controlling a rotation direction, rotation speed, and rotation time. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centrifugal barrel polishing apparatus used for beveling a piezoelectric element such as a quartz plate, and more particularly to a centrifugal barrel polishing apparatus provided with a revolving shaft perpendicular to an installation surface of the apparatus. The present invention relates to a barrel polishing apparatus.
[0002]
2. Description of the Related Art With the miniaturization of electronic components such as piezoelectric vibrators and oscillators, it is necessary to reduce the size of the piezoelectric element constituting the piezoelectric vibrating plate mounted therein, and at the same time, to increase the frequency of the oscillation frequency. Because of the progress of thinning, it has become necessary to reduce the thickness of the piezoelectric element plate.
[0003]
For example, in a quartz plate, which is one of piezoelectric materials, the crystal impedance (hereinafter, referred to as CI) increases as the size of the quartz plate increases, and a problem occurs in starting the oscillation of the quartz plate. Therefore, by beveling the outer shape of the piezoelectric element, the "energy trapping" effect of the electrode film formed on the main surface of the crystal plate can be increased, and the vibration of the crystal plate can be easily started. Becomes lower.
[0004]
For this reason, as a device for beveling a piezoelectric element plate, a plurality of cylindrical processing containers having a length longer than a diameter of both ends closed are arranged, and a quartz piece and an abrasive are placed in the drum. The processing vessel is revolved around a revolving axis parallel to the ground plane, and the processing vessel itself is further parallel to the revolving axis with a central axis passing through the center of the cross section at both ends or an axis passing obliquely through the cross sections at both ends. 2. Description of the Related Art A centrifugal barrel device that bevels the outer shape of a piezoelectric element by rotating the piezoelectric element placed in the processing container by frictional motion with an inner wall of the processing container, a crystal piece, and an abrasive is used.
[0005]
For the centrifugal barrel device as described above, the following documents are disclosed.
[0006]
[Patent Document 1]
JP 2000-354947 A [Patent Document 2]
JP-A-2002-120141
The applicant has not found any prior art documents related to the present invention other than the prior art documents specified in the above-mentioned prior art document information by the time of filing the present application.
[0008]
[Problems to be solved by the invention]
In a conventional centrifugal barrel device, without adding an abrasive, arranging abrasive particles on the inner wall of the processing container and polishing the piezoelectric element plate have been performed, but as a processing container constituting the device, A large processing container having a diameter of 50 to 200 mm and a length of about 300 to 600 mm is used, and the processing container is polished using the entire inner wall of the container. Therefore, the polishing particles must be formed on the entire inner wall of the container, which increases the price of the processing container.
[0009]
Further, in the conventional centrifugal barrel device, even if a large motor is used, the revolving speed of the processing container can be obtained only up to about one hundred and several tens rpm at the highest speed. The rotation motion of the processing container is generated in order to maintain the state of the processing container as it is along with the revolving motion, and is rotating at the same speed in a direction opposite to the revolving speed. In other words, since the rotation speed depends on the revolution speed, it is difficult to further improve the machining efficiency in the conventional centrifugal barrel device having the revolution speed, and the beveling process currently takes several tens of hours.
[0010]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has a revolving plate fixed to a revolving shaft provided in a direction perpendicular to an installation surface, and a revolving plate provided on the revolving plate. A rotating shaft that is provided and has a certain inclination angle that is perpendicular or on the revolving axis side with respect to the apparatus installation surface, a container holder that is fixed to the rotating shaft and rotates, and abrasive particles fixed to and held by the container holder and on the inner wall thereof A centrifugal barrel polishing apparatus is provided with a processing vessel in which is disposed, a drive motor and a drive rotation mechanism for rotating the revolution axis and the rotation axis independently or in conjunction with each other, and controlling the rotation direction, the number of rotations and the rotation time.
[0011]
Further, the above-mentioned centrifugal barrel polishing apparatus is characterized in that the polishing particles are fixed to the inner wall of the processing container by electrodeposition, metal bond or resin bond.
[0012]
Further, the above-mentioned centrifugal barrel polishing apparatus is characterized in that the polished particles are collected and solidified into a container shape that fits into the wall shape in the processing container, and the polished particles are arranged and fixed in the processing container. is there.
[0013]
Further, the abrasive particles are arranged on the bottom surface of the inner wall of the processing container and, on the inner wall side surface of the processing container, in a range of a height equal to or greater than the radius R of the curved surface between the inner wall side surface and the inner wall bottom surface. The above-described centrifugal barrel polishing apparatus.
[0014]
By using such a processing container in a centrifugal barrel polishing apparatus, more efficient beveling can be performed as compared with a case where an abrasive is added. In particular, in the centrifugal barrel device of the present invention in which the revolving shaft is provided in the direction perpendicular to the installation surface of the device, since the size and weight of the processing container are reduced, the rotation speed of the processing container can be increased. Efficiency can be improved.
[0015]
In addition, since anything other than the workpiece is not added to the processing container as much as possible, the process of separating the workpiece after beveling and the workpiece other than the workpiece can be simplified and shortened.
[0016]
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing an example of a centrifugal barrel polishing apparatus according to the present invention. It should be noted that the dotted frame is a schematic cross-sectional view for clarifying the form of the components constituting the device in the frame. FIG. 2 is a cross-sectional view showing one embodiment of the processing container shown in FIG. FIG. 3 is a sectional view showing another embodiment of the processing container shown in FIG. FIG. 4 is a cross-sectional configuration diagram illustrating one manufacturing mode of the processing container illustrated in FIG. 1. In FIGS. 1 to 4, a part of the structure is not shown for clarity, and the dimensions are partially exaggerated.
[0017]
That is, the revolving plate 13 constituting the centrifugal barrel polishing device 11 accommodated in the case 12 rotates around the revolving axis 14 formed in a direction perpendicular to the installation surface of the centrifugal barrel polishing device 11, and the revolving plate 13 The container holder 15 mounted around the both ends of the revolving plate 13 rotates around the rotation axis 16 with the orbital axis of rotation as a symmetric axis.
[0018]
Thus, the container holder 15 and the processing container 17 fixed and held by the container holder 15 revolve around the rotation axis 16 while revolving around the rotation axis 14. The rotation direction of the revolving shaft and the rotation direction of the rotation shaft may be either forward or reverse.
[0019]
In this embodiment, the rotation axis 16 is inclined by 45 ° with respect to the revolution axis 14 with respect to the revolution axis 14. As a result, the acceleration generated from the orbital motion is applied from the bottom surface of the processing container 17 to a lateral side perpendicular to the revolving axis, so that the thickness of the wall of the processing container can be partially reduced, and the revolving speed can be further reduced. The processing container 17 is prevented from coming off the container holder 15 due to the centrifugal force, and the workpiece 19 such as the piezoelectric element plate in the processing container 17 is prevented from spilling. In the embodiment, the revolving plate 13 has a structure in which one processing vessel is mounted on one, but a structure in which a plurality of revolving plates are formed and the processing vessel is mounted on each revolving plate may be adopted. Alternatively, one of the two processing containers mounted on one revolving plate may be removed, and a balancer may be mounted instead, so that one revolving plate can be used as one processing container.
[0020]
As a specific mechanism for rotating the processing container 17 around the rotation axis 16 while revolving around the rotation axis 14, a rotation drive motor and a rotation drive motor are separately provided, and each of them drives independently. It may be a mechanism. Further, a mechanism may be used in which a drive motor that is commonly used for revolving and rotating is used, and the rotational motion of the motor is divided into revolving and revolving by a belt and a pulley or a planetary gear device. Further, a control mechanism for controlling the start / stop of these drive motors, the number of rotations, the rotation time, and the like is also provided. This control mechanism can be accessed from a control panel or the like provided outside the case 12, and can be automatically controlled by a program or the like. You can also control. In FIG. 1, the driving motor for revolution and its control mechanism are built in a structure 18.
[0021]
A processing container 17 used in the centrifugal barrel device shown in FIG. 1 is shown in FIGS. That is, the processing container 17 includes a bottomed cylindrical main body 21 and a lid 22, and the main body 21 is formed of metal. The lid 21 is structured so as not to come off the main body 21 when the processing container 17 revolves and rotates. The lid 22 is used to prevent a workpiece or the like in the processing container from scattering to the outside. If the workpiece does not scatter outside due to the manner of movement of the processing container, the lid 22 is necessarily required. Not something.
[0022]
On the inner wall of the main body 21 of the processing container, polishing particles such as diamond, dissolved alumina or silicon carbide are arranged by electrodeposition, metal bond or resin bond, and a polishing surface 24 is formed. A plurality of workpieces such as strip-shaped piezoelectric plates are put into the processing container, and the processing container is revolved at a high speed, whereby the polishing surface 24 and the workpiece are appropriately rubbed, so that the processing is performed. Beveling is performed on the surface of the object.
[0023]
In addition, as shown in FIG. 4, the abrasive particles are aggregated and solidified into a container shape that fits into the shape of the inner wall surface of the processing container to form an abrasive particle body 41. The polished surface 24 may be formed in the processing container by arranging such a polished particle 41 in the processing container and fixing it to the inner wall of the processing container.
[0024]
In the centrifugal barrel device as shown in FIG. 1, the shape of the processing container can be made small and very lightweight, so that the revolving ability of the processing container can be remarkably improved, and the processing time can be greatly reduced. Further, the interaction between the revolution and the rotation facilitates the free movement and mixing of the workpieces in the processing container, and the workpiece can be uniformly applied to the entire workpiece subjected to beveling. In order to further improve the processing efficiency by applying the processing pressure to the workpiece and promoting the free movement of the workpiece in the processing container, a processing aid such as a medium may be appropriately added to the processing container. Good.
[0025]
By using the processing container 17 as disclosed in FIGS. 2 to 4, a processing pressure can be effectively applied to a friction point between a workpiece and a polished surface, and efficient processing can be performed. Also, unlike the conventional method, there is no need to process the abrasive by putting it in the processing container, and the process of separating the processed material from the additives such as the used abrasive becomes extremely simple and in a short time. .
[0026]
In the processing apparatus according to the present invention, since the centrifugal force generated by the rotation of the processing container is utilized, the beveling processing area on the inner surface of the processing container is limited to the inner bottom surface of the processing container and the inner wall surface around the bottom surface. Since the inner wall surface of the upper portion of the processing container is not used for beveling, the polishing surface is formed on the inner wall of the processing container from the bottom surface of the processing container as shown in FIG. If the height is not less than the height R (three times the height of R in FIG. 3), there is no problem in the beveling process. By not forming a polished surface on the upper part of the inner wall of the processing container, the production cost of the processing container is reduced.
[0027]
According to the centrifugal barrel polishing apparatus of the present invention, it is possible to efficiently bevel the piezoelectric element which has been miniaturized and made high frequency in a short time and efficiently. The electronic component can be provided at low cost in a short time.
[Brief description of the drawings]
FIG. 1 is a structural view (a partial cross-sectional view) schematically showing a centrifugal barrel polishing apparatus according to the present invention.
FIG. 2 is a cross-sectional view of one embodiment of the processing container shown in FIG.
FIG. 3 is a sectional view of another embodiment of the processing container shown in FIG. 1;
FIG. 4 is a cross-sectional view showing one manufacturing mode of the processing container shown in FIG.
[Explanation of symbols]
11, centrifugal barrel polishing device 13, revolving plate 14, revolving axis 15, container holder 16, rotation axis 17, processing container 18, structure 41, polishing particles

Claims (4)

A revolving plate fixed to a revolving shaft provided in a direction perpendicular to the device installation surface, a revolving shaft provided on the revolving plate and having a certain inclination angle perpendicular to or on the revolving axis side with respect to the device installation surface; A container holder that is fixed to a shaft and rotates, a processing container fixed and held by the container holder and arranging abrasive particles on its inner wall, and the orbital shaft and the rotation shaft are rotated independently or in conjunction with each other, and a rotation direction, A centrifugal barrel polishing apparatus including a drive motor and a drive rotation mechanism for controlling the number of rotations and the rotation time. 2. A centrifugal barrel polishing apparatus according to claim 1, wherein said polished particles are fixed to an inner wall of said processing vessel by electrodeposition, metal bond or resin bond. The abrasive particles are formed into a solidified abrasive particle body having a container shape that fits into the inner wall surface shape of the processing container, and the abrasive particle body is disposed and fixed in the processing container. The centrifugal barrel polishing apparatus according to claim 1, wherein The abrasive processing particles, the bottom surface of the inner wall of the processing container, of the inner wall side surface of the processing container, the height of not less than the radius R of the curved surface between the inner wall side surface and the inner wall bottom surface from the innermost bottom surface in the processing container 4. The centrifugal barrel polishing apparatus according to claim 1, wherein the apparatus is arranged in a range.

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