JP2004216318A - Liquid drop ejection apparatus, method for producing electro-optical device, electro-optical device, and electronic instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid drop ejection apparatus wherein the difference between the level of the nozzle surface of a functional liquid drop ejection head and the level of the liquid surface of a functional liquid held in a functional liquid tank is predetermined, and the functional liquid tank can be arranged near the functional liquid drop ejection head, to provide a method for producing an electro-optical device, to provide an electro-optical device, and to provide an electronic instrument. <P>SOLUTION: The apparatus is provided with movement mechanisms (3 and 4) that relatively move a mount table 41 on which a workpiece W is mounted and a carriage 6 equipped with the functional liquid drop ejection head 21 and the functional liquid tank 7 that is mounted on the carriage 6 and feeds the functional liquid and is characterized in that the mount table 41 is slanted in relation to the horizontal plane, the functional liquid tank 7 is disposed on the slanted mount table 41 in a position lower than that of the head 21 so as to realize the difference between the nozzle surface 28 and the level of the liquid surface of the functional liquid held in the tank 7. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention is directed to a droplet discharge device and an electro-optical device in which the height difference between the nozzle surface of the functional droplet discharge head and the liquid surface of the functional liquid stored in the functional liquid tank, that is, the head difference between the two, is predetermined. The present invention relates to a manufacturing method, an electro-optical device, and an electronic device.
[0002]
[Prior art]
In a conventionally known ink jet printer as a kind of a droplet discharge device, an ink pack (functional liquid tank) for supplying ink (functional liquid) to an ink jet head (functional droplet discharge head) is provided to prevent ink dripping. It is arranged at a position lower than the inkjet head. Then, printing is performed on the print target (work) by relatively moving the inkjet head and the print target mounted horizontally in the main scanning direction and the sub-scanning direction. (For example, refer to Patent Document 1).
[0003]
In such an ink jet printer, it is assumed that the supply of ink from the ink pack to the ink jet head is performed under atmospheric pressure. Therefore, in order to ensure the quantitative stability of the ink droplets ejected from each nozzle formed in the ink jet head, the ink jet printer is designed to accurately maintain the head difference between the ink jet head and the ink pack.
[0004]
[Patent Document 1]
JP-A-2002-248784 (pages 7 to 8, FIG. 1)
[0005]
[Problems to be solved by the invention]
By the way, in the droplet discharge device for industrial application, by narrowing the gap (gap) between the nozzle surface of the functional droplet discharge head and the work, the flying of the functional droplet discharged from the functional droplet discharge head can be prevented. The effect is compensated and high ejection performance is secured. However, if the gap between the functional droplet discharge head and the work is narrowed, and the functional liquid tank is arranged lower than (the nozzle surface of) the functional droplet discharge head, relative to the functional droplet discharge head, Since the functional liquid tank must be arranged so as to avoid the scanning area of the work to be scanned, there is a problem that the installation space is not flexible and the whole apparatus is enlarged.
[0006]
Further, since the functional liquid tank must be provided so as to avoid the scanning area of the work, the functional liquid tank cannot be provided near the functional liquid droplet ejection head. Accordingly, the function liquid flow path from the function liquid droplet ejection head to the function liquid tank becomes longer, and there arises a problem that a supply pressure of the function liquid supplied from the function liquid tank to the function liquid droplet ejection head is lost.
[0007]
Therefore, the present invention provides a droplet discharge device in which a height difference between a nozzle surface of a functional droplet discharge head and a liquid surface of a functional liquid stored in a functional liquid tank is predetermined, wherein a function near a functional droplet discharge head is provided. It is an object of the present invention to provide a droplet discharge device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic device in which a liquid tank can be provided.
[0008]
[Means for Solving the Problems]
According to the present invention, a functional liquid ejecting head having a nozzle row is moved from a functional liquid ejecting head having a nozzle row while relatively moving a work mounted on a mounting table and a functional liquid ejecting head mounted on a carriage in a main scanning direction and a sub-scanning direction. In a droplet discharge apparatus that discharges liquid and draws on a work, a moving mechanism that relatively moves the functional droplet discharge head and the work via a mounting table and a carriage, and a functional liquid mounted on the carriage A functional liquid tank for supplying a functional liquid to the droplet discharge head, the mounting table is inclined with respect to a horizontal plane, and the functional liquid tank is provided with a predetermined nozzle surface of the functional droplet discharge head. It is arranged at a lower position on the inclined mounting table than the functional liquid droplet ejection head so as to satisfy a height difference from the liquid level of the functional liquid stored in the functional liquid tank. To.
[0009]
According to this configuration, by utilizing the height difference of the mounting table caused by inclining the mounting table on which the work is mounted with respect to the horizontal plane, the nozzle surface of the predetermined function droplet ejection head and the function are determined. The functional liquid tank can be arranged at a position lower than the functional liquid droplet ejection head so as to satisfy a height difference from the liquid level of the functional liquid stored in the liquid tank. Therefore, it is possible to dispose the functional liquid tank above the mounting table without interfering with the (relatively moving) mounting table. In addition, since the functional liquid tank can be arranged within the moving range of the mounting table, the functional liquid tank can be arranged near the functional liquid droplet discharge head, and the functional liquid tank and the functional liquid droplet discharge head are connected. The supply tube can be shortened. This reduces the pipeline resistance of the functional liquid at the time of supplying the functional liquid, enables the functional liquid to be stably supplied from the functional liquid tank to the functional liquid droplet ejection head, and the amount of the functional liquid remaining in the supply tube. And the functional fluid can be used efficiently. Further, since the mounting table is inclined, the work mounting space can be reduced as compared with the case where the mounting table is horizontally arranged.
[0010]
In this case, it is preferable that the moving mechanism moves the mounting table in the main scanning direction and moves the carriage in the sub-scanning direction, and the mounting table is inclined in the main scanning direction.
[0011]
According to this configuration, since the mounting table is inclined in the main scanning direction, the height of each nozzle formed on the functional liquid droplet ejection head can be made uniform. Therefore, the head difference between each nozzle of the functional droplet discharge head and the functional liquid tank can be maintained in the same manner, and the head difference between the functional liquid droplet discharge head and the functional liquid tank can be secured with high accuracy. In addition, since the mounting table moves in the main scanning direction via the moving table, the function liquid discharge tank does not move together with the function liquid discharge head during the main scanning for discharging the function liquid droplets. , It is possible to stably discharge the functional droplets. That is, when the functional liquid tank is moved during the main scan, the functional liquid surface stored in the functional liquid tank fluctuates particularly at the start and end of the movement, so that the functional liquid discharge head does not discharge the functional liquid. Such a problem does not occur because the mounting table is configured to be moved in the main scanning direction, though it is likely to be stable.
[0012]
In this case, the functional liquid tank is preferably supported such that the bottom surface of the functional liquid tank is substantially parallel to the inclined table.
[0013]
According to this configuration, since the functional liquid tank is supported such that the bottom surface of the functional liquid tank is substantially parallel to the inclined mounting table, the inclined mounting table and the bottom surface of the functional liquid tank (ie, the lower surface) Can be arranged close to each other. And, compared to the case where the functional liquid tank is supported so that the bottom surface of the functional liquid tank is horizontal, the functional liquid tank is further disposed near the functional liquid droplet ejection head while maintaining a predetermined head difference. And the amount of functional liquid stored in the functional liquid tank can be increased.
[0014]
In these cases, the upstream end of the supply pipe for supplying the functional liquid to the functional droplet discharge head is preferably immersed in the deepest part of the inclined functional liquid tank.
[0015]
According to this configuration, since the upstream end of the supply pipe is immersed in the deepest portion of the inclined functional liquid tank, it is possible to use the functional liquid stored in the functional liquid tank until the functional liquid tank becomes empty. So that expensive functional fluids are not wasted.
[0016]
In these cases, the apparatus further includes a support for supporting the carriage and the mounting table via a moving mechanism, and the support has an angle adjusting unit capable of adjusting an inclination angle of the carriage and the mounting table with respect to a horizontal plane. Is preferred.
[0017]
According to this configuration, the head difference according to the functional liquid introduced into the functional droplet discharge head can be managed by adjusting the inclination angles of the carriage and the mounting table using the angle adjusting unit. Also, by changing the head difference, it is possible to change the amount of the functional liquid ejected from the functional droplet ejection head. Further, since the inclination angle of the mounting table can be adjusted, the mounting table can be adjusted to an angle with good operability and workability when replacing the work. Therefore, at the time of work replacement, the workability and operability at the time of work replacement can be improved, for example, by adjusting the mounting table horizontally. Furthermore, it is possible to change the head difference according to the change in the atmospheric pressure.
[0018]
In this case, a liquid level detecting means for continuously detecting the liquid level of the functional liquid stored in the functional liquid tank, which decreases with the driving of the functional liquid droplet ejection head, and a control means for controlling the angle adjusting means, Further, the control means adjusts the angle based on the detection result of the liquid level detection means so that the height difference between the nozzle surface of the functional liquid droplet ejection head and the liquid surface of the functional liquid stored in the functional liquid tank is constant. It is preferred to control the means.
[0019]
According to this configuration, even if the functional liquid stored in the functional liquid tank decreases with the driving of the functional liquid droplet ejection head, the nozzle surface of the functional liquid droplet ejection head is adjusted based on the detection result of the liquid level detecting unit. Since the angle adjusting means is controlled so that the level difference between the liquid level of the functional liquid stored in the functional liquid tank and the liquid level is constant, the head difference between the two does not change due to the decrease in the functional liquid. Therefore, even if the amount of the functional liquid in the functional liquid tank decreases, the functional liquid can be stably ejected from the functional droplet ejection head.
[0020]
According to a second aspect of the invention, there is provided a method of manufacturing an electro-optical device, wherein a film forming unit using functional liquid droplets is formed on a work using the above-described liquid droplet discharging apparatus.
[0021]
Further, an electro-optical device according to the present invention is characterized in that a film forming unit using functional droplets is formed on a work using the above-described droplet discharging device.
[0022]
According to these configurations, on the assumption that the functional liquid is supplied at atmospheric pressure, the functional liquid tank is manufactured using a droplet discharge device that can be provided in the vicinity of the functional droplet discharge head. An optical device can be manufactured efficiently. In addition, as the electro-optical device (device), a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron-emitting device, a PDP (Plasma Display Panel) device, an electrophoretic display device, and the like can be considered. The electron emission device is a concept including a so-called FED (Field Emission Display) device. Further, as the electro-optical device, a device including formation of a metal wiring, formation of a lens, formation of a resist, formation of a light diffuser, and the like can be considered.
[0023]
An electronic apparatus according to another aspect of the invention includes the electro-optical device described above.
[0024]
In this case, as the electronic device, various electric products other than a mobile phone and a personal computer equipped with a so-called flat panel display correspond thereto.
[0025]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. As shown in FIG. 1, the droplet discharge device 1 includes a head unit 2 on which a functional droplet discharge head 21 for discharging a functional liquid is mounted, and a mounting table 41 on which a work W is mounted. An X-axis table 3 for moving the workpiece W in the X-axis direction (main scanning direction) via the table 41, and a Y-axis for moving the head unit 2 in the Y-axis direction (sub-scanning direction) orthogonal to the X-axis table 3. And a table 4.
[0026]
As shown in FIG. 2, the droplet discharge device 1 includes a rectangular parallelepiped machine base 11, and the machine base 11 has an inclination angle θ. ₀ A tilt table 5 is provided which is tilted (in the main scanning direction) with respect to the horizontal plane. That is, the machine stand 11 and the tilt table 5 constitute a support stand referred to in the claims. The X-axis table 3 is directly supported on the tilt table 5, and the work W is set in a tilted state. Further, the tilt table 5 is provided with a Y-axis stand 12 erected perpendicularly to the tilt table 5 so as to straddle the X-axis table 3. Further, the tilt table 5 incorporates an angle adjusting mechanism 53 for adjusting the tilt angle of the tilt table 5.
[0027]
As shown in the figure, both ends of a Y-axis table 4 are supported on a Y-axis stand 12, and the head unit 2 is supported on the Y-axis table 4 via a carriage 6. The carriage 6 is provided with a function liquid tank 7 for supplying a function liquid to the function liquid droplet ejection head 21 and a tank carriage 75. In the droplet discharge device 1 of the present embodiment, on the assumption that the functional liquid is supplied under the atmospheric pressure, the head of the discharge nozzle 29 of the functional droplet discharge head 21 and the liquid level of the functional liquid stored in the functional liquid tank 7 The difference (height difference) is defined in advance, and the functional liquid tank 7 is supported by a tank carriage 75 so as to satisfy the height difference.
[0028]
The droplet discharge device 1 is provided with a controller 8 for controlling the entire device, and the controller 8 controls each unit. The controller 8 drives the X-axis table 3 and the Y-axis table 4 to move the head unit 2 and the work W relatively, while driving the functional droplet discharge head 21 to selectively use the functional liquid. , The drawing is performed on the workpiece W (see FIG. 1).
[0029]
Hereinafter, each part of the droplet discharge device 1 will be described. The head unit 2 includes a functional droplet discharge head 21 and a carriage plate 74 of the carriage 6 described below. As shown in FIG. 1, the functional droplet ejection head 21 has a large number (180) of ejection nozzles 29 (described later), and the large number of ejection nozzles 29 are arranged so as to be continuous in the sub-scanning direction. Have been. If all the ejection nozzles 29 are continuous in the sub-scanning direction, the number and arrangement of the functional droplet ejection heads 21 are not limited to those described above, but are arbitrary.
[0030]
Although not shown, the functional liquid droplet ejection head 21 includes a functional liquid introduction unit that continuously receives the supply of the functional liquid from the functional liquid tank 7, a head substrate connected to the functional liquid introduction unit, and a functional liquid introduction unit below the functional liquid introduction unit. And a head main body in which an in-head channel filled with a functional liquid is formed. The head body has a pump unit (piezoelectric element), not shown, and a nozzle plate 26 on which a number of discharge nozzles 29 are formed. The functional droplet discharge head 21 discharges by the action of the pump unit. The functional droplets are ejected from the nozzle 29. The lower surface of the nozzle plate 26 is a nozzle surface 27, and a single nozzle row 28 is formed on the nozzle surface 27. The nozzle row 28 includes 180 discharge nozzles 29 arranged at equal intervals.
[0031]
The X-axis table 3 is provided along with an X-axis air slider (not shown) that is supported by the mounting table 41 and the tilt table 5 and that slidably supports the mounting table 41 in the X-axis direction. An X-axis linear motor (not shown). The Y-axis table 4 is fixed to a Y-axis stand 12 erected on the tilt table 5. Although not shown, the Y-axis table 4 slidably supports the head unit 2 and the functional liquid tank 7 via a carriage 6. It has a slider, a Y-axis ball screw that moves the Y-axis slider in the Y-axis direction, and a Y-axis motor that is composed of a servomotor and that rotates the Y-axis ball screw forward and reverse.
[0032]
As shown in FIGS. 2 and 3, the tilt table 5 has a support base 51 fixed to the machine base 11 and one end rotatably fixed to the support base 51, directly supporting the X-axis table 3 and Y axis. A support table 52 on which the shaft stand 12 is erected, an angle adjusting mechanism 53 for adjusting the inclination angle of the mounting table 41 via the support table 52 by rotating the support table 52, and a rotation of the support table 52 And a movement guide 54 for guiding the
[0033]
As shown in FIG. 2, the support table 52 is formed of a substantially rectangular thick plate, and one end (base) of the support table 52 that coincides with the Y-axis direction is rotatably fixed to the support base 51. . Then, the support table 52 has a tilt angle θ in advance. ₀ (In the X-axis direction), and the mounting table 41 is tilted at an inclination angle θ. ₀ We support in. Although not shown, a sliding piece (not shown) that slides in the guide groove of the moving guide 54 is provided on the other side of the support table 52 that is not fixed to the support base 51. The movement guide 54 is for stably rotating the support table 52 in the vertical direction, and includes a pair of left and right guide members 55 fixed to the support base 51. Although not shown, the guide member 55 has an arc-shaped guide groove formed along the trajectory when the support table 52 is rotated and guiding the sliding piece of the support table 52 (FIG. 3).
[0034]
As shown in FIG. 3, the angle adjustment mechanism 53 has a jack-up mechanism 61 composed of a diamond-shaped screw mechanism, one end of which is rotatably attached to the support table 52 and the other end of which is attached to the support base 51, and a jack. And a geared motor 65 connected to a lead screw 62 of the up mechanism 61. The jack-up mechanism 61 is formed by connecting an inverted “V” -shaped upper link 63 and a “V” -shaped lower link 64 with two female screws. By deforming the rhombic shape via the screw 62, the support table 52 is vertically rotated with respect to the support base 51. Thus, the support table 52 is tilted via the fixed base-side hinge and adjusted in angle.
[0035]
As shown in FIG. 2, the carriage 6 includes a carriage main body 71 attached to the Y-axis slider of the Y-axis table 4 on the back surface, a head carriage 72 supported by the carriage main body 6 and supporting the head unit 2, And a tank carriage 75 supported by the carriage main body 71 and supporting the functional liquid tank 7.
[0036]
The head carriage 72 includes a θ table 73 for performing position correction in the θ direction (of the head unit 2 via the carriage plate 74), and a carriage plate 74 provided below the θ table 73 and constituting the head unit 2. , Is composed. The carriage plate 74 has a rectangular opening for loosely fitting the functional droplet discharge head 21, and positions and fixes the functional droplet discharge head 21. The θ table 73 and the carriage plate 74 are disposed substantially parallel to the support table 52 (the mounting table 41), and the nozzle surface 27 of the mounted functional liquid droplet ejection head 21 is made parallel and close to the work W. Can be held. On the other hand, the tank carriage 75 has a fixed portion (not shown) having one end fixed to the carriage body 71, an arm portion 76 extending in the X-axis direction from the fixed portion, and the other end of the arm portion 76. And a tank support portion 77 for supporting the tank 7. The tank carriage 75 is connected to the functional liquid tank 7 and the functional droplet discharge head 21, and a liquid supply tube (supply pipe) for supplying a functional liquid from the functional liquid tank 7 to the functional droplet discharge head 21. ) 81 is fixed.
[0037]
As shown in FIG. 2, the functional liquid tank 7 is disposed at a lower position of the tilt table 5 than the head unit 2 (functional droplet discharge head 21) by utilizing the tilt of the tilt table 5. The head difference between the liquid surface of the functional liquid stored in the functional liquid tank 7 and the nozzle surface 27 of the functional liquid droplet ejection head 21 is maintained at a specified value. The functional liquid tank 7 includes a tank main body 91 that stores a functional liquid to be supplied to the functional liquid droplet ejection head 21, a liquid level detector 92 that continuously detects the liquid level of the functional liquid stored in the tank main body 91, and , Is provided.
[0038]
As shown in the figure, the tank body 91 is provided with a tilt angle θ of the tilt table 5 (support table 52). ₀ The tank body is formed so that the bottom surface of the tank body 91 is close to the inclined table 5 (mounting table 41) and the bottom surface of the tank body 91 is substantially parallel to the support table 52. Reference numeral 91 is provided. Thereby, the functional liquid can be efficiently stored by effectively utilizing the space on the mounting table 41. The above-described liquid supply tube 81 is connected to the upper surface of the tank main body 91, and one end of the liquid supply tube 81 immersed in the functional liquid is located at the lowest position (the deepest part) of the tank main body 91. are doing. Therefore, the functional liquid in the tank main body 91 can be supplied to the functional liquid droplet ejection head 21 without remaining, and the functional liquid stored in the tank main body 91 can be efficiently used.
[0039]
As described above, in the droplet discharge device 1 of the present embodiment, the functional liquid droplet discharge head 21 and the functional liquid tank 7 are used by utilizing the height difference of the mounting table 41 caused by tilting the mounting table 41. By disposing the functional liquid tank 7 with the head unit 2 (functional droplet discharge head 21) without satisfying the prescribed head difference and without interfering with the mounting table 41 moving in the X-axis direction. It is movable. In addition, this allows the functional liquid tank 7 to be disposed within the movement range of the mounting table 41, so that the functional liquid tank 7 can be disposed near the head unit 2. Then, the supply tube 81 connecting the functional liquid tank 7 and the head unit 2 can be shortened. Further, since the functional liquid tank 7 moves together with the head unit 2, the liquid supply tube 81 can be supported in a fixed state, and the functional liquid is stably supplied from the functional liquid tank 7 to the functional droplet discharge head 21. It is possible to do.
[0040]
By the way, in the droplet discharge device 1 of the present embodiment, even if the functional liquid stored in the functional liquid tank 7 decreases with the driving of the functional droplet discharge head 21, the controller 8 controls the head difference to be constant. Is controlled. This will be specifically described with reference to FIGS. The above-mentioned liquid level detector 92 is connected to the controller 8, and the controller 8 adjusts the inclination angle of the inclination table 5 based on the detection result of the liquid level detector 92 to keep the head difference constant. I keep it.
[0041]
That is, when the liquid level of the functional liquid tank 7 decreases and the liquid level of the functional liquid decreases, the head difference increases. Therefore, the geared motor 65 of the angle adjusting mechanism 53 is driven to continuously adjust the inclination angle of the support table 52. To θ ₀ From θ ₁ (However, θ ₀ > Θ ₁ ). Thereby, the height position of the head unit 2 can be lowered and the height position of the functional liquid tank can be raised. Therefore, the relative position between the discharge nozzle 29 (nozzle row 28) and the liquid surface of the functional liquid tank 7 can be increased. The height difference between the two can be maintained and the head difference between the two can be kept constant.
[0042]
In the droplet discharge device 1 of the present embodiment, the functional liquid tank 7 employs a cartridge type, and the functional liquid stored in the functional liquid tank 7 becomes empty, and the functional liquid tank 7 is replaced. Then, the geared motor 65 is driven again to change the inclination angle of the support table 52 to θ. ₀ And the head value is appropriately maintained. Instead of a cartridge type, a sub-tank type in which the functional liquid is continuously supplied from a main tank storing a large amount of the functional liquid may be adopted. In this case, when the functional liquid is ejected from the functional liquid droplet ejection head 21, the functional liquid is not replenished from the main tank to the functional liquid tank 7 in order to stabilize the ejection. , The inclination angle of the support table 52 is set to θ ₀ From θ ₁ When the functional fluid is supplied to the functional fluid tank 7 and the amount of the functional fluid stored in the functional fluid tank increases, the inclination angle of the support table 52 is determined based on the detection result of the fluid level detector 92. To θ ₁ From θ ₀ Adjust to.
[0043]
In the droplet discharge device 1 of the present embodiment, the tilt angle of the tilt table 5 is adjusted based on the detection result by the liquid level detector 92 in order to keep the head difference constant. A mechanism for raising and lowering the nozzle 7 relative to (the nozzle surface 27 of) the functional droplet discharge head 21 may be used. In this case, based on the detection result of the liquid level detector 92, the functional liquid tank 7 itself is moved up and down within a range that does not interfere with the work W, so that the head difference between the functional liquid droplet ejection head 21 and the functional liquid tank 7 is kept constant. Can be kept.
[0044]
Next, a case where the above-described droplet discharge device 1 is applied to the manufacture of a liquid crystal display device will be described. FIG. 4 illustrates a cross-sectional structure of the liquid crystal display device 301. As shown in the figure, the liquid crystal display device 301 is composed of an upper substrate 311 and a lower substrate 312 having a transparent conductive film (ITO film) 322 and an alignment film 323 formed on the opposing surface mainly of a glass substrate 321; A large number of spacers 331 interposed between the upper and lower substrates 311 and 312, a sealing material 332 for sealing between the upper and lower substrates 311 and 312, and a liquid crystal 333 filled between the upper and lower substrates 311 and 312 are provided. A phase substrate 341 and a polarizing plate 342 a are stacked on the back surface of the substrate 311, and a polarizing plate 342 b and a backlight 343 are stacked on the back surface of the lower substrate 312.
[0045]
In a normal manufacturing process, the upper substrate 311 and the lower substrate 312 are separately manufactured by patterning the transparent conductive film 322 and applying the alignment film 323, respectively, and then the spacer 331 and the sealing material 332 are formed on the lower substrate 312. In this state, the upper substrate 311 is attached. Next, the liquid crystal 333 is injected from the inlet of the sealant 332, and the inlet is closed. After that, the phase substrate 341, the polarizing plates 342a and 342b, and the backlight 343 are stacked.
[0046]
The above-described droplet discharge device 1 can be used, for example, for forming the spacer 331 and for injecting the liquid crystal 333. Specifically, a spacer material (for example, an ultraviolet curable resin or a thermosetting resin) or a liquid crystal that forms a cell gap is introduced as a functional liquid, and these are uniformly discharged (applied) to predetermined positions. First, the lower substrate 312 on which the sealing material 332 is printed in a ring shape is set on a suction table, and the spacer material is discharged onto the lower substrate 312 at coarse intervals, and the spacer material is solidified by irradiating ultraviolet rays. Next, a predetermined amount of liquid crystal 333 is uniformly discharged and injected into the inside of the sealing material 332 of the lower substrate 312. Thereafter, the separately prepared upper substrate 311 and the lower substrate 312 coated with a predetermined amount of liquid crystal are introduced into a vacuum and bonded together.
[0047]
As described above, since the liquid crystal 333 is uniformly applied (filled) in the cell before the upper substrate 311 and the lower substrate 312 are bonded to each other, the liquid crystal 333 does not spread to details such as corners of the cell. Can be solved.
[0048]
By using an ultraviolet curable resin or a thermosetting resin as the functional liquid (material for the sealant), the above-described sealant 332 can be printed by the droplet discharge device 1. Similarly, by introducing a polyimide resin as the functional liquid (alignment film material), the alignment film 323 can be formed by the droplet discharge device 1.
[0049]
The above-described droplet discharge device 1 can move the functional liquid tank together with the head unit 2 and perform drawing with high accuracy on the work W, so that the liquid crystal display device 301 can be manufactured efficiently. In addition, by inclining the mounting table 41 on which the work W is mounted, the installation area of the work W can be reduced, the space of the apparatus can be reduced, and the liquid crystal display device 301 can be manufactured efficiently. .
[0050]
By the way, the above-described droplet discharge device 1 can be used for manufacturing various electro-optical devices (devices) in addition to the above-described liquid crystal display device 301 mounted on an electronic device such as a mobile phone or a personal computer. . That is, the present invention can be applied to the manufacture of an organic EL device, an FED device, a PDP device, an electrophoretic display device, and the like, and these can be efficiently manufactured.
[0051]
An example in which the above-described droplet discharge device 1 is applied to the manufacture of an organic EL device will be briefly described. As shown in FIG. 5, the organic EL device 401 includes a substrate 421, a circuit element portion 422, a pixel electrode 423, a bank portion 424, a light emitting element 425, a cathode 426 (a counter electrode), and a sealing substrate. An organic EL element 411 composed of a wiring 427 and a wiring of a flexible substrate (not shown) and a driving IC (not shown) are connected. The circuit element portion 422 is formed on the substrate 421, and the plurality of pixel electrodes 423 are arranged on the circuit element portion 422. A bank 424 is formed between the pixel electrodes 423 in a lattice pattern, and a light emitting element 425 is formed in a concave opening 431 formed by the bank 424. The cathode 426 is formed over the entire upper surface of the bank portion 424 and the light emitting element 425, and a sealing substrate 427 is stacked on the cathode 426.
[0052]
In the manufacturing process of the organic EL device 401, after the bank portion 424 is formed at a predetermined position on the circuit element portion 422 and the substrate 421 (work W) on which the pixel electrode 423 is formed, the light emitting element 425 is appropriately Is performed, and then a light emitting element 425 and a cathode 426 (a counter electrode) are formed. Then, the sealing substrate 427 is laminated on the cathode 426 and sealed to obtain the organic EL element 411. Then, the cathode 426 of the organic EL element 411 is connected to the wiring of the flexible substrate and connected to the driving IC. The organic EL device 401 is manufactured by connecting the wiring of the circuit element portion 422.
[0053]
The droplet discharge device 1 is used for forming the light emitting element 425. Specifically, a light emitting element material (functional liquid) is introduced into the functional droplet discharge head 31, and the light emitting element material is discharged corresponding to the position of the pixel electrode 423 on the substrate 421 on which the bank portion 424 is formed. By drying this, the light emitting element 425 is formed. In the formation of the pixel electrode 423 and the cathode 426 described above, the liquid crystal material can be formed by using the liquid material corresponding to each of them.
[0054]
As other electro-optical devices, devices including the above-described preparations in addition to metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), it is possible to efficiently manufacture various electro-optical devices.
[0055]
【The invention's effect】
As described above, according to the droplet discharge device of the present invention, by tilting the mounting table on which the work is mounted, the functional liquid droplet discharging head is utilized by utilizing the height difference of the tilted mounting table. The function liquid tank can be arranged lower than the head unit (function droplet discharge head) while maintaining the head difference between the function liquid droplet discharge head and the liquid surface of the function liquid tank at a specified predetermined water head difference. The function liquid tank can be moved together with the head). In addition, since the functional liquid tank does not interfere with the mounting table and the functional liquid tank can be disposed in the moving area of the mounting table, the functional liquid tank is disposed near the head unit. The liquid supply tube connecting the functional liquid tank and the head unit (functional droplet discharge head) can be shortened. Therefore, the amount of the functional liquid stored in the liquid supply tube can be reduced, the functional liquid can be used efficiently, and the effect of frictional resistance when the functional liquid is sent can be reduced. It is possible to supply the functional liquid to the Furthermore, since the functional liquid tank moves together with the head unit, the curvature of the liquid supply tube does not change due to the movement of the head unit, and the liquid supply tube can be held in a constant state. This makes it possible to supply the functional liquid to the functional droplet discharge head in a more stable state, and to stably discharge the functional liquid from the functional droplet discharge head.
[0056]
Further, according to the method for manufacturing an electro-optical device, the electro-optical device, and the electronic apparatus of the present invention, since the electro-optical device is manufactured using the above-described droplet discharge device, they can be manufactured efficiently.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of a functional droplet discharge device according to an embodiment.
FIG. 2 is a schematic diagram of the functional droplet discharge device according to the present embodiment when viewed from the side.
FIG. 3 is a schematic diagram around an angle adjusting mechanism.
FIG. 4 is a sectional view of a liquid crystal display device manufactured by using the manufacturing method of the present invention.
FIG. 5 is a cross-sectional view of an organic EL device manufactured using the manufacturing method of the present invention.
[Explanation of symbols]
1 droplet discharge device 2 head unit
3 X axis table 4 Y axis table
5 Tilt table 6 Carriage
7 Functional liquid tank 8 Controller
21 Functional Droplet Discharge Head 29 Discharge Nozzle
41 mounting table 52 support table
53 Angle adjustment mechanism 81 Liquid supply tube
92 Liquid level detector

Claims (9)

While relatively moving the work mounted on the mounting table and the functional liquid discharge head mounted on the carriage in the main scanning direction and the sub-scanning direction, the functional liquid is discharged from the functional liquid droplet discharging head having the nozzle row. In a droplet discharge apparatus that performs drawing on the work,
A moving mechanism that relatively moves the functional droplet discharge head and the work via the placement table and the carriage;
A functional liquid tank mounted on the carriage and supplying a functional liquid to the functional liquid droplet ejection head,
The placing table described above is inclined with respect to the horizontal plane,
The functional liquid tank is defined in advance so as to satisfy a height difference between a nozzle surface of the functional liquid droplet discharge head and a liquid surface of the functional liquid stored in the functional liquid tank, A droplet discharge device, which is disposed at a low position on an inclined placement table. The moving mechanism moves the placing table in the main scanning direction, and moves the carriage in the sub-scanning direction,
2. The droplet discharge device according to claim 1, wherein the placement table is inclined in the main scanning direction. 3. The droplet discharge device according to claim 1, wherein the functional liquid tank is supported such that a bottom surface of the functional liquid tank is substantially parallel to the inclined table. 4. 4. The droplet discharge device according to claim 3, wherein an upstream end of a supply pipe that supplies the functional liquid to the functional droplet discharge head is immersed in a deepest portion of the inclined functional liquid tank. 5. Further comprising a support table for supporting the carriage and the placing table via the moving mechanism,
4. The droplet discharge device according to claim 2, wherein the support table has an angle adjustment unit that can adjust an inclination angle of the carriage and the mounting table with respect to a horizontal plane. 5. A liquid level detecting unit that continuously detects the liquid level of the functional liquid stored in the functional liquid tank, which decreases with the driving of the functional liquid droplet ejection head,
Control means for controlling the angle adjusting means, further comprising:
The control unit controls the height difference between the nozzle surface of the functional liquid droplet ejection head and the liquid surface of the functional liquid stored in the functional liquid tank based on the detection result of the liquid level detecting unit. 6. The droplet discharging apparatus according to claim 5, wherein said angle adjusting means is controlled. 7. A method for manufacturing an electro-optical device, comprising: forming a film-forming portion using functional droplets on the work using the droplet discharge device according to claim 1. An electro-optical device, comprising: a film-forming portion formed of functional liquid droplets on the work using the liquid droplet discharge device according to claim 1. An electronic apparatus comprising the electro-optical device according to claim 8.

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