JP2004126133A - Function liquid droplet discharging head and liquid droplet discharging device equipped with the same, electro-optical device, method of manufacturing electro-optical device, and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid droplet discharging head in such a shape that a nozzle surface hardly comes into contact with a work even when a work gap is narrowed and a liquid droplet discharging device equipped with the same. <P>SOLUTION: The function liquid droplet discharging head 30 which has a nozzle array 95 formed on the nozzle surface 88 by arraying many nozzles 95a is characterized in that an intermediate part longitudinal section 111 of the nozzle surface 88 where at least the nozzle array 95 is formed is projected toward a couple of circumferential part longitudinal sections 112 and 112 positioned on both the sides of the intermediate part longitudinal section 111. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a functional liquid droplet ejection head typified by an ink jet head of an ink jet printer, a liquid droplet ejection device including the same, an electro-optical device, a method for manufacturing an electro-optical device, and an electronic apparatus.
[0002]
[Prior art]
A functional droplet discharge head (inkjet head) mounted on a droplet discharge device such as an inkjet printer includes a head body having a large number of nozzles, a head holder having three connection needles and holding the head body, It is composed of three head substrates connected to a head holder (for example, see Patent Document 1). The head body includes an actuator unit accommodating a plurality of piezoelectric elements, a flow path unit having a plurality of pressure chambers, a head plate having a nozzle array formed of a large number of nozzles (nozzle openings), and a head plate having a frame shape. And a head cover that covers the head.
The head cover has a thickness of about 0.3 mm to 0.4 mm, electromagnetically shields the functional liquid droplet ejection head, and prevents the paper fluff on the recording paper surface from adhering to the nozzle surface when moving.
[0003]
[Patent Document 1]
JP-A-11-207979 (page 3, FIG. 2)
[0004]
[Problems to be solved by the invention]
By the way, in the functional droplet discharge head, a gap between the surface of the work and the nozzle surface of the functional droplet discharge head, that is, a work gap (paper gap), in order to accurately control the flight deflection and landing diameter of the functional droplet. It is preferable to manage the data as narrowly and accurately as possible.
However, in the above-mentioned conventional functional droplet discharge head, since the head cover projects in a frame shape with respect to the nozzle surface which is the surface of the head plate, when the functional droplet discharge head is brought closer to the work in order to narrow the work gap, The head cover may come into contact with the work. Therefore, there is a problem that the work gap cannot be sufficiently narrowed structurally.
[0005]
The present invention relates to a functional droplet discharge head having a shape in which a nozzle surface is hardly in contact with a workpiece even when a work gap is narrowed, a droplet discharge device including the same, an electro-optical device, a method of manufacturing an electro-optical device, and an electronic device. The task is to provide equipment.
[0006]
[Means for Solving the Problems]
The functional liquid droplet ejection head of the present invention is characterized in that, in a functional liquid droplet ejection head in which a nozzle row is formed by arranging a large number of nozzles on a nozzle surface, at least an intermediate vertical section area where a nozzle row is formed on the nozzle surface, A pair of peripheral longitudinal sections located on both sides of the intermediate longitudinal section are projected.
[0007]
According to this configuration, since at least the middle vertical section where the nozzle row is formed is made to protrude with respect to the pair of peripheral vertical sections, the work gap formed between the nozzle surface and the workpiece is the nozzle gap. It is configured between the work and the intermediate vertical section surrounding the row. That is, by setting only the minimum region where the nozzle row is formed as the region constituting the work gap, the other region (peripheral vertical section region) can be sufficiently separated from the work.
[0008]
In this case, it is preferable that each peripheral vertical region is inclined outward.
[0009]
According to this configuration, the edge of the nozzle surface that is more easily in contact with the work can be reliably separated from the work in each of the peripheral vertical sections.
[0010]
In these cases, it is preferable that a step is formed between the intermediate vertical section and each peripheral vertical section.
[0011]
According to this configuration, each peripheral vertical region of the nozzle surface that is more easily in contact with the work can be reliably separated from the work.
[0012]
In this case, it is preferable that the step portion is formed by thinly etching a portion corresponding to each peripheral vertical region of the head plate constituting the nozzle surface.
[0013]
Similarly, it is preferable that the step portion is formed by removing a portion corresponding to each peripheral vertical region of the head plate constituting the nozzle surface.
[0014]
According to these configurations, a step between the intermediate vertical section and each peripheral vertical section can be easily and accurately formed.
[0015]
Another functional droplet discharge head according to the present invention is a functional droplet discharge head in which a nozzle row is formed by arranging a large number of nozzles on a nozzle surface. Are projected from the peripheral region.
[0016]
According to this configuration, at least the central region in which the nozzle row is formed is projected from the peripheral region, so that the work gap formed between the nozzle surface and the work surrounds the nozzle row. It is configured between the central area and the work. That is, by setting only the minimum region where the nozzle row is formed as the region constituting the work gap, the other region (peripheral region) can be sufficiently separated from the work.
[0017]
In this case, the peripheral region is preferably inclined outward.
[0018]
According to this configuration, in the peripheral region, the edge of the nozzle surface that is more easily in contact with the work can be reliably separated from the work.
[0019]
In these cases, it is preferable that a step is formed between the central region and the peripheral region.
[0020]
According to this configuration, the peripheral region of the nozzle surface that is more easily in contact with the work can be reliably separated from the work.
[0021]
In this case, it is preferable that the step is formed by thinly etching a portion corresponding to a peripheral region of the head plate constituting the nozzle surface.
[0022]
Similarly, the step is preferably formed by removing a portion corresponding to a peripheral region of the head plate constituting the nozzle surface.
[0023]
According to this configuration, the step between the central region and the peripheral region can be easily and accurately formed.
[0024]
A droplet discharge device of the present invention includes the above-described functional droplet discharge head, and a moving mechanism that moves the functional droplet discharge head relative to a work in synchronization with driving of the functional droplet discharge head. It is characterized by having.
[0025]
According to this configuration, since the functional droplet discharge head can be provided as close as possible to the workpiece due to the structure of the functional droplet discharge head, the functional droplets can be discharged onto the workpiece (strictly, landing) with extremely high accuracy. Can be.
[0026]
According to another aspect of the invention, there is provided an electro-optical device including the above-described droplet discharge device, wherein a functional droplet is discharged from a functional droplet discharge head onto a workpiece to form a film forming unit.
[0027]
Similarly, a method of manufacturing an electro-optical device according to the present invention is characterized in that a functional droplet is discharged from a functional droplet discharging head onto a work using the above-described droplet discharging device to form a film forming section. .
[0028]
According to these configurations, the electro-optical device in which the film forming unit is formed with high accuracy is manufactured because the device is manufactured using the liquid droplet discharging device capable of accurately discharging the functional liquid droplet by the functional liquid droplet discharging head. Can be manufactured. In addition, as the electro-optical device, a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, an electrophoretic display device, and the like are considered. The electron emission device is a concept including a so-called FED (Field Emission Display) device. Further, as the electro-optical device, devices for forming a metal wiring, forming a lens, forming a resist, and forming a light diffuser can be considered.
[0029]
According to still another aspect of the invention, an electronic apparatus includes the above-described electro-optical device or an electro-optical device manufactured by the above-described method for manufacturing an electro-optical device.
[0030]
In this case, as the electronic device, various electric products other than a mobile phone and a personal computer equipped with a so-called flat panel display correspond thereto.
[0031]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing the appearance of a droplet discharge device to which the present invention is applied, FIG. 2 is a front view of the droplet discharge device to which the present invention is applied, and FIG. 3 is the right side of the droplet discharge device to which the present invention is applied. FIG. As will be described in detail later, this droplet discharging apparatus introduces a functional liquid such as a special ink or a luminescent resin liquid into a functional droplet discharging head, and forms a film forming unit using a functional droplet on a work such as a substrate. Is formed.
[0032]
As shown in FIGS. 1 to 3, the droplet discharge device 1 includes a discharge unit 2 for discharging a functional liquid, a maintenance unit 3 that performs maintenance of the discharge unit 2, and supplies a functional liquid to the discharge unit 2. A functional liquid supply / recovery means 4 for recovering the unnecessary functional liquid and an air supply means 5 (pressurizing means) for supplying compressed air for driving and controlling each means are provided. These units are controlled by a control unit (not shown) in association with each other. Although illustration is omitted, in addition to the above, a work recognition camera that recognizes the position of the work (substrate) W, a head recognition camera that confirms the position of the head unit 31 (described later) of the ejection unit 2, various indicators, and the like. Ancillary devices are provided, and these are also controlled by the control means.
[0033]
As shown in FIGS. 1 to 3, a flushing unit 23 (described later) of the discharge unit 2 and the maintenance unit 3 is mounted on a stone platen 12 fixed to an upper portion of a gantry 11 formed by assembling angle materials in a rectangular shape. Most of the functional liquid supply / recovery means 4 and the air supply means 5 are incorporated in a machine base 13 attached to the gantry 11. The machine base 13 is formed with two large and small storage chambers 14 and 15. The larger storage chamber 14 stores the tanks of the functional liquid supply / recovery means 4, and the smaller storage chamber 15 has air. The main part of the supply means 5 is accommodated.
[0034]
Further, on the machine base 13, a tank base 17 on which a liquid supply tank (intermediate tank) 16 of the functional liquid supply / recovery means 4, which will be described later, is placed and the machine base 13 are slidable in the longitudinal direction (ie, the X-axis direction). A supported moving table 18 is provided, and a common base 19 on which a suction unit 21 (described later) and a wiping unit 22 (described later) of the maintenance unit 3 are mounted is fixed on the moving table 18.
[0035]
The maintenance unit 3 maintains the functional droplet discharge head 30 so that the functional droplet discharge head 30 can appropriately discharge the functional liquid. The maintenance unit 3 includes a suction unit 21, a wiping unit 22, and a flushing unit 23. I have.
[0036]
The suction unit 21 has a function of a flushing box that forcibly sucks the functional liquid from the functional droplet discharge head 30 and receives the discharge of the functional liquid from all the nozzles of the functional droplet discharge head 30. The suction unit 21 is provided with a cap unit 25 incorporating twelve caps corresponding to the twelve functional droplet discharge heads 30 so as to be able to move up and down. The head unit 31 (of the functional droplet discharge head 30) When filling the functional liquid into the liquid droplets or when removing the functional liquid having increased viscosity in the functional liquid droplet discharge head 30, the caps are brought into close contact with the functional liquid droplet discharge heads 30 and pump suction is performed. In addition, when suspending the discharge of the functional liquid, such as when replacing the work, each cap is slightly separated from each functional liquid droplet discharge head 30 to perform flushing (preliminary discharge).
[0037]
The wiping unit 22 is for wiping the nozzle surface of each functional droplet discharge head 30 to which the functional liquid adheres and is contaminated by suction (cleaning) of the functional droplet discharge head 30 or the like. The wiping unit 22 is provided with a wiping sheet that can be fed and wound up freely, and wipes the nozzle surface of the functional liquid droplet ejection head 30 while feeding the fed wiping sheet.
[0038]
The flushing unit 23 receives functional liquids sequentially discharged by the flushing operation (preliminary discharge) of a plurality (12) of the functional droplet discharge heads 30 at the time of discharging the liquid droplets (to the work W). The flushing unit 23 includes a pair of flushing boxes 26, 26 (only one side is shown) fixed to a θ table 43 with a suction table 42 of an X-axis table 41 described later interposed therebetween. The flushing operation is sequentially performed on the flushing box 26 starting from the functional liquid discharge head 30 facing the flushing box 26.
[0039]
On the other hand, a discharge unit 2 serving as a main body of the droplet discharge device 1 includes a head unit 31 having a plurality of functional droplet discharge heads 30 for discharging a functional liquid, a main carriage 32 supporting the head unit 31, and a work W. And an X / Y moving mechanism 33 for scanning the work W relative to the functional liquid droplet ejection head 30.
[0040]
As shown in FIGS. 1 to 3, the XY moving mechanism 33 is fixed to the stone surface plate 12, performs main scanning of the work W (in the X-axis direction), and moves the head unit 31 via the main carriage 32. Sub-scanning (Y-axis direction) is performed. The XY moving mechanism 33 includes an X-axis table 41 fixed with its axis aligned with the center line along the long side of the stone surface plate 12, and extends along the short side of the stone surface plate 12 across the X-axis table 41. A Y-axis table 51 whose axis coincides with the center line.
[0041]
The X-axis table 41 includes a suction table 42 that suction-sets the work W by air suction, a θ table 43 that supports the suction table 42, and an X-axis air slider 44 that supports the θ table 43 slidably in the X-axis direction. , An X-axis linear motor (not shown) for moving the work W on the suction table 42 in the X-axis direction via the θ table 43, and an X-axis linear scale 45 attached to the X-axis air slider 44. . In the main scanning of the functional droplet discharge head 30, the suction table 42 and the θ table 43 that have sucked the work W reciprocate in the X-axis direction by guiding the X-axis air slider 44 by driving the X-axis linear motor. Is performed by
[0042]
The Y-axis table 51 includes a bridge plate 52 for suspending the main carriage 32, a pair of Y-axis sliders 53, 53 that support the bridge plate 52 slidably in the Y-axis direction, and a Y-axis slider 53. A Y-axis linear scale 54, a Y-axis ball screw 55 for guiding the pair of Y-axis sliders 53, 53 to move the bridge plate 52 in the Y-axis direction, and a Y-axis for rotating the Y-axis ball screw 55 forward and reverse. And a motor (not shown). The Y-axis motor is composed of a servomotor. When the Y-axis motor rotates forward and backward, a bridge plate 52 screwed to the Y-axis motor guides a pair of Y-axis sliders 53, 53 via a Y-axis ball screw 55. To move in the Y-axis direction. That is, with the movement of the bridge plate 52, the main carriage 32 (head unit 31) reciprocates in the Y-axis direction, and the sub-scan of the functional liquid droplet ejection head 30 is performed.
[0043]
Here, a series of operations of the ejection unit 2 will be briefly described. First, as a preparation before discharging the functional liquid, the position of the head unit 31 is corrected by the head recognition camera, and then the position of the work W set on the suction table 42 is corrected by the work recognition camera. Next, the work W is reciprocated in the main scanning (X-axis) direction by the XY moving mechanism 33 (X-axis table 41), and the plurality of function liquid droplet ejection heads 30 are driven to move the function liquid to the work W. Is selectively performed.
[0044]
After the work W is moved back, the head unit 31 is moved in the sub-scanning (Y-axis) direction by the XY moving mechanism 33 (Y-axis table 51), and the work W is reciprocated again in the main scanning direction. And the functional droplet discharge head 30 is driven. In the present embodiment, the work W is moved in the main scanning direction with respect to the head unit 31, but the head unit 31 may be moved in the main scanning direction. Further, the head unit 31 may be fixed, and the work W may be moved in the main scanning direction and the sub-scanning direction.
[0045]
The main carriage 32 includes a hanging member 61 having an external appearance “I” fixed to the bridge plate 52 from below, a θ table 62 attached to the lower surface of the hanging member 61, and a hanging member 61 below the θ table 62. And a carriage main body 63 mounted to be installed. The carriage body 63 has a rectangular opening into which the head unit 31 is loosely fitted, and the head unit 31 is positioned and fixed. The carriage main body 63 is provided with a work recognition camera for recognizing the work W.
[0046]
As shown in FIGS. 4 and 5, the head unit 31 includes a plurality of (twelve) functional droplet discharge heads 30, a sub-carriage 71 on which the plurality of functional droplet discharge heads 30 are mounted, and each functional droplet discharge head. A plurality of (12) head holding members 72 for attaching the nozzle surface (nozzle forming surface) 88 of the head 30 to the sub-carriage 71 by projecting the lower surface thereof are provided.
[0047]
The twelve functional droplet discharge heads 30 are divided into six, and are arranged on the sub-carriage 71 at a predetermined angle in order to secure a sufficient application density of the functional liquid to the work W. The six divided functional droplet discharge heads 30 are disposed so as to be displaced from each other in the sub-scanning direction (Y-axis direction), and the nozzles 95a of the functional droplet discharge heads 30 are arranged in the sub-scanning direction. Are continuous (partially overlapped). If the function liquid ejection head 30 can be made of a dedicated component and a sufficient application density of the function liquid to the work W can be secured, it is not necessary to intentionally set the function droplet ejection head 30 to be inclined. Absent.
[0048]
As shown in FIG. 4, the sub-carriage 71 includes a body plate 74 partially cut away, a pair of left and right reference pins 75, 75 provided at intermediate positions in the long side direction of the body plate 74, and a body plate 74. And a pair of left and right support members (see FIG. 5 (b)) attached to both long side portions. The pair of reference pins 75, 75 serve as references for positioning (position recognition) the sub-carriage 71 (head unit 31) in the X-axis, Y-axis, and θ-axis directions on the premise of image recognition.
[0049]
Each support member 76 is a fixing portion when fixing the head unit 31 to the main carriage 32. Further, the sub-carriage 71 is provided with a pipe joint 77 for connecting the function liquid droplet discharge head 30 and the liquid supply tank 16 by pipe. The pipe joint 77 is connected at one end to a head side pipe member from a pipe adapter 78 connected to (the connection needle 33 of) each functional droplet discharge head 30, and is connected at the other end to the apparatus side from the liquid supply tank 16. It has twelve sockets 79 for connecting piping members. That is, the functional liquid is supplied to the liquid supply tank 16 from a main tank (not shown) provided in the above-mentioned functional liquid supply / recovery means 4, branched off from the liquid supply tank 16, and supplied to each functional liquid droplet ejection head 30. You.
[0050]
Here, the functional droplet discharge head 30 will be described in detail with reference to FIGS. As shown in FIG. 5, the functional liquid droplet ejection head 30 is of a so-called two-unit type, and includes a functional liquid introducing unit (head holder) 82 having two connecting needles 81, 81, and a functional liquid introducing unit 82. The head body 83 includes two continuous head substrates 83 and a head main body 84 that extends below the functional liquid introduction unit 82 and has an in-head channel filled with the functional liquid therein.
[0051]
Each connection needle 31 is connected to the liquid supply tank 16 of the functional liquid supply / recovery means 4 via the pipe adapter 78 described above, and the functional liquid introduction unit 82 receives the supply of the functional liquid from each connection needle 81. It has become. A pair of connectors 86, 86 protrude from the head substrate 83, and a head driver of control means is connected to the connector 86 via an intermediate substrate (both are not shown).
[0052]
As shown in FIGS. 5 and 6, the head body 84 incorporates an actuator unit 91 containing a plurality of piezoelectric elements and a flow path unit 92 forming a plurality of pressure chambers 93 connected to the actuator unit 91. A stainless steel head plate 94 having a nozzle array 95 formed of a number of nozzles (nozzle openings) 95a is fixed to the lower surface (the upper surface in FIG. 6) of the road unit 92. That is, the head plate 94 forms the nozzle surface 88 of the functional droplet discharge head 30 in which the two discharge nozzle rows 95, 95 are formed.
[0053]
More specifically, the head main body 84 is bonded to the actuator unit 91 via a resin film with a silicon cavity 97 serving as a main body of the flow path unit 92, and a nozzle formed on the silicon cavity 97 via a seal film 98. A head plate 94 in which (nozzle openings) 95a are formed is fixed, and a number of cavities 97a of the silicon cavities 97 and a head plate 94 for closing the same form a number of pressure chambers 93 connected to each nozzle 95a. Have been. A water-repellent (liquid-repellent) plating layer 99 is formed on the surface of the head plate 94, and a depression 100 is formed along the nozzle row 95. That is, the nozzle 95a is open at the bottom of the groove of the recess 100 (see FIG. 7).
[0054]
As shown in FIGS. 6 and 7, the head plate 94 of the embodiment has, on its surface (nozzle surface 88), an intermediate longitudinal section 111 in which two nozzle rows 95, 95 and its depression 100 are formed. It has a form slightly projecting from a pair of peripheral longitudinal sections 112, 112 located on both sides of the intermediate longitudinal section 111. That is, each of the middle vertical section 111 and the pair of peripheral vertical sections 112, 112 has a rectangular nozzle surface 88 running in parallel in the longitudinal direction. A pair of peripheral vertical regions 112, 112 in which the plate 94 is formed to be thin are connected via a step 113. The pair of peripheral vertical regions 112 may be formed at the same time as the formation of the depression 100 by, for example, etching or the like, or after plating the nozzle surface 88 (after forming the plating layer 99). ) May be formed separately from the recess 100.
[0055]
FIGS. 8 and 9 show a first modified example and a second modified example of the functional liquid droplet ejection head 30 of the first embodiment, respectively. In the functional droplet discharge head 10 of the first modified example shown in FIG. 8, portions corresponding to both peripheral vertical sections 112, 112 of the head plate 94 constituting the nozzle surface 88 are removed, and both side edges of the silicon cavity 97 are removed. (Excluding the cavity forming portion) 97b, 97b is in an exposed form. That is, in this case, the head plate 94 is only a portion corresponding to the intermediate vertical region 111, and the nozzle surface 88 is formed on both sides of the head plate 94 and the silicon cavity 97 that are exposed through the step 113. 97b, 97b.
[0056]
Further, in the functional droplet discharge head 30 of the second modified example shown in FIG. 9, in addition to the above basic form, both side edges 97b, 97b of the silicon cavity 97 corresponding to the both peripheral vertical sections 112, 112 are formed on the outside. It is inclined toward. Preferably, the side edges 97b, 97b of the inclined silicon cavity 97 are formed at the same time when the cavity 97a is formed (etched).
[0057]
As described above, according to the functional liquid droplet ejection head 30 of the first embodiment, only the middle longitudinal section 111 of the nozzle surface 88, that is, the portion necessary for ejecting the functional liquid droplet is projected. In addition, the area of the portion of the nozzle surface 88 that is close to and confronts the workpiece W can be reduced to the maximum. This makes it particularly difficult for the peripheral portion of the nozzle surface 88 to come into contact with the workpiece W, and the work gap between the nozzle surface 88 and the surface of the workpiece W can be reduced as much as possible, thereby improving the discharge accuracy of the functional liquid. Can be done.
[0058]
FIG. 10 shows a functional droplet discharge head 30 according to the second embodiment. In the functional liquid droplet ejection head 10, the nozzle surface 88 has a configuration in which the central region 115 in which the two nozzle rows 95 and 95 and the depression 100 are formed slightly protrudes from the other peripheral region 116. Have. That is, in the nozzle surface 88 having a rectangular shape in a plan view, the peripheral region 116 is defined so as to surround the central region 115 of the oval plane, and the head plate 94 is made thinner with respect to the central region 115 slightly protruding. Are connected to each other via a step 117.
[0059]
Also in this case, similarly to the first embodiment, it is preferable to form the peripheral region 116 by etching or the like. Also in the second embodiment, as in the first and second modifications, a portion corresponding to the peripheral region 116 of the head plate 94 is removed, and the peripheral portion (cavity) of the silicon cavity 97 is removed. The portion excluding the formation portion) may be exposed.
[0060]
As described above, according to the functional droplet discharge head 30 of the second embodiment, as in the first embodiment, only the central region 115 of the nozzle surface 88, that is, only the portion necessary for discharging the functional liquid droplets Since the nozzle surface 88 is made to protrude, the area of the portion of the nozzle surface 88 that is close to and confronts the workpiece W can be minimized. This makes it particularly difficult for the peripheral portion of the nozzle surface 88 to come into contact with the work W, and the work gap between the nozzle surface 88 and the surface of the work W can be reduced as much as possible, thereby improving the discharge accuracy of the functional liquid. Can be done.
[0061]
In the above embodiment, the functional droplet discharge head 30 having two nozzle rows 95 has been described as an example. However, the present invention provides a functional droplet discharge head having one or three or more nozzle rows 95. The present invention is applicable to the head 30 and is also applicable to the functional droplet discharge head 30 in which the nozzle row 95 extends in the transverse direction. In both embodiments, the boundary portions between the intermediate vertical region 111 and the central region 115 and the peripheral vertical region 112 and the peripheral region 116 are steps 113 and 117, respectively. Without being provided, the peripheral portion vertical region 112 and the peripheral portion region 116 may be formed as gentle slopes continuous with the intermediate portion vertical region 111 and the central portion region 115, respectively. Furthermore, the plane shapes of the intermediate section longitudinal region 111 and the central region 115 are arbitrary, and it is sufficient that at least a portion forming the nozzle row 95 protrudes from other portions.
[0062]
Here, a case where the above-described droplet discharge device 1 is applied to the manufacture of a liquid crystal display device will be described. FIG. 11 illustrates a cross-sectional structure of the liquid crystal display device 301. As shown in the figure, the liquid crystal display device 301 is composed of an upper substrate 311 and a lower substrate 312 having a transparent conductive film (ITO film) 322 and an alignment film 323 formed on the opposing surface mainly of a glass substrate 321; A large number of spacers 331 interposed between the upper and lower substrates 311 and 312, a sealing material 332 for sealing between the upper and lower substrates 311 and 312, and a liquid crystal 333 filled between the upper and lower substrates 311 and 312 are provided. A phase substrate 341 and a polarizing plate 342 a are stacked on the back surface of the substrate 311, and a polarizing plate 342 b and a backlight 343 are stacked on the back surface of the lower substrate 312.
[0063]
In a normal manufacturing process, the upper substrate 311 and the lower substrate 312 are separately manufactured by patterning the transparent conductive film 322 and applying the alignment film 323, respectively, and then the spacer 331 and the sealing material 332 are formed on the lower substrate 312. In this state, the upper substrate 311 is attached. Next, the liquid crystal 333 is injected from the inlet of the sealant 332, and the inlet is closed. After that, the phase substrate 341, the polarizing plates 342a and 342b, and the backlight 343 are stacked.
[0064]
The droplet discharge device 1 of the embodiment can be used, for example, for forming the spacer 331 and for injecting the liquid crystal 333. Specifically, a spacer material (for example, an ultraviolet curable resin or a thermosetting resin) or a liquid crystal that forms a cell gap is introduced as a functional liquid, and these are uniformly discharged (applied) to predetermined positions. First, the lower substrate 312 on which the sealing material 332 is printed in a ring shape is set on the suction table 42, and the spacer material is discharged onto the lower substrate 312 at coarse intervals, and the spacer material is solidified by irradiating ultraviolet rays. Next, a predetermined amount of liquid crystal 333 is uniformly discharged and injected into the inside of the sealing material 332 of the lower substrate 312. Thereafter, the separately prepared upper substrate 311 and the lower substrate 312 coated with a predetermined amount of liquid crystal are introduced into a vacuum and bonded together.
[0065]
As described above, since the liquid crystal 333 is uniformly applied (filled) in the cell before the upper substrate 311 and the lower substrate 312 are bonded to each other, the liquid crystal 333 does not spread to details such as corners of the cell. Can be solved.
[0066]
By using an ultraviolet curable resin or a thermosetting resin as the functional liquid (material for the sealant), the above-described sealant 332 can be printed by the droplet discharge device 1. Similarly, by introducing a polyimide resin as the functional liquid (alignment film material), the alignment film 323 can be formed by the droplet discharge device 1.
[0067]
As described above, in the manufacture of the liquid crystal display device 301, it is assumed that various types of functional liquids are introduced. However, in the above-described droplet discharge device 1, the functional liquid is precisely dispensed by the special form of the functional droplet discharge head 30. Since the liquid crystal display device 301 can be discharged (landed), the liquid crystal display device 301 can be manufactured accurately and stably.
[0068]
By the way, the above-described droplet discharge device 1 can be used for manufacturing various electro-optical devices (devices) in addition to the above-described liquid crystal display device 301 mounted on an electronic device such as a mobile phone or a personal computer. . That is, the droplet discharge device 1 of the present embodiment can be applied to the manufacture of an organic EL device, an FED device (electron emission device), a PDP device, an electrophoretic display device, and the like.
[0069]
An example in which the above-described droplet discharge device 1 is applied to the manufacture of an organic EL device will be briefly described. As shown in FIG. 12, the organic EL device 401 includes a substrate 421, a circuit element portion 422, a pixel electrode 423, a bank portion 424, a light emitting element 425, a cathode 426 (a counter electrode), and a sealing substrate. An organic EL element 411 composed of a wiring 427 and a wiring of a flexible substrate (not shown) and a driving IC (not shown) are connected. The circuit element portion 422 is formed on the substrate 421, and the plurality of pixel electrodes 423 are arranged on the circuit element portion 422. A bank 424 is formed between the pixel electrodes 423 in a lattice pattern, and a light emitting element 425 is formed in a concave opening 431 formed by the bank 424. The cathode 426 is formed over the entire upper surface of the bank portion 424 and the light emitting element 425, and a sealing substrate 427 is stacked on the cathode 426.
[0070]
In the manufacturing process of the organic EL device 401, after the bank portion 424 is formed at a predetermined position on the circuit element portion 422 and the substrate 421 (work W) on which the pixel electrode 423 is formed, the light emitting element 425 is appropriately Is performed, and then a light emitting element 425 and a cathode 426 (a counter electrode) are formed. Then, the sealing substrate 427 is laminated on the cathode 426 and sealed to obtain the organic EL element 411. Then, the cathode 426 of the organic EL element 411 is connected to the wiring of the flexible substrate and connected to the driving IC. The organic EL device 401 is manufactured by connecting the wiring of the circuit element portion 422.
[0071]
The droplet discharge device 1 is used for forming the light emitting element 425. Specifically, a light-emitting element material (functional liquid) is introduced into the functional droplet discharge head 30, and the light-emitting element material is discharged corresponding to the position of the pixel electrode 423 on the substrate 421 on which the bank 424 is formed. By drying this, the light emitting element 425 is formed. In the formation of the pixel electrode 423 and the cathode 426 described above, the liquid crystal material can be formed by using the liquid material corresponding to each of them.
[0072]
In addition, for example, in the method of manufacturing an electron emission device, a fluorescent material of each color of R, G, and B is introduced into the plurality of functional droplet discharge heads 30, and the plurality of functional droplet discharge heads 30 perform main scanning and sub-scanning to obtain fluorescent light. A material is selectively discharged to form a large number of phosphors on the electrodes.
[0073]
In the method of manufacturing the PDP device, fluorescent materials of R, G, and B colors are introduced into the plurality of functional droplet discharge heads 30, and the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned to selectively use the fluorescent material. To form phosphors in a large number of concave portions on the rear substrate.
[0074]
In the method of manufacturing the electrophoretic display device, the electrophoretic material of each color is introduced into the plurality of functional droplet discharge heads 30, the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned, and the electrophoretic material is selectively selected. By discharging, a phosphor is formed in each of the many concave portions on the electrode. The electrophoretic body composed of the charged particles and the dye is preferably encapsulated in a microcapsule.
[0075]
Further, as other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation can be considered. The droplet discharge device 1 of the present embodiment is also applicable to these various manufacturing methods. Applicable.
[0076]
For example, in the metal wiring forming method, a liquid metal material is introduced into a plurality of functional droplet discharge heads 30, and the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned to selectively discharge the liquid metal material. Then, a metal wiring is formed on the substrate. For example, these devices can be manufactured by applying the present invention to a metal wiring connecting the driver and each electrode in the above-described liquid crystal display device and a metal wiring connecting the TFT and the like to each electrode in the organic EL device. It goes without saying that the present invention can be applied to general semiconductor manufacturing techniques other than this kind of flat panel display.
[0077]
In the method of forming a lens, a lens material is introduced into the plurality of functional droplet discharge heads 30, the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned, and the lens material is selectively discharged to form a lens on the transparent substrate. A number of microlenses are formed on the substrate. For example, the present invention can be applied to the case where a device for beam convergence in the FED apparatus is manufactured. Further, the present invention is also applicable to various optical device manufacturing techniques.
[0078]
In the lens manufacturing method, a translucent coating material is introduced into the plurality of functional droplet discharge heads 30, and the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned to selectively discharge the coating material. Then, a coating film is formed on the surface of the lens.
[0079]
In the resist forming method, a resist material is introduced into the plurality of functional droplet discharge heads 30, the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned, and the resist material is selectively discharged onto the substrate. A photoresist having a shape is formed. For example, the present invention can be widely applied to the application of a photoresist in a photolithography method which is a main body of a semiconductor manufacturing technique, in addition to the formation of a bank in the above-described various display devices.
[0080]
In the light diffuser forming method, a light diffusion material is introduced into the plurality of functional droplet discharge heads 30, the plurality of functional droplet discharge heads 30 are main-scanned and sub-scanned, and the light diffusion material is selectively discharged. A number of light diffusers are formed on a substrate. Also in this case, it is needless to say that the present invention can be applied to various optical devices.
[0081]
As described above, there is a possibility that various types of functional liquids may be introduced into the droplet discharge device 1. However, by using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), the The optical device can be manufactured accurately and stably.
[0082]
【The invention's effect】
As described above, according to the functional liquid droplet ejection head of the present invention, since the work gap is formed by the minimum area including the nozzle row, the other area (peripheral vertical section area) is sufficiently separated from the work. Even if the work gap is sufficiently narrowed, it is possible to make the nozzle surface, particularly the edge of the nozzle surface hard to contact the work. That is, the work gap can be made as narrow as possible due to the structure of the nozzle surface.
[0083]
Further, according to the droplet discharge device of the present invention, the discharge of functional droplets onto the workpiece (strictly, landing) can be performed with extremely high accuracy, so that the reliability of the device can be improved.
[0084]
On the other hand, according to the electro-optical device, the manufacturing method of the electro-optical device, and the electronic device of the present invention, the reliability of the resulting electro-optical device, the manufacturing method thereof, and the electronic device are increased via the droplet discharge device. Can be.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a droplet discharge device according to an embodiment.
FIG. 2 is a front view of the droplet discharge device according to the embodiment.
FIG. 3 is a right side view of the droplet discharge device according to the embodiment.
FIG. 4 is a plan view of a head unit.
5A is a perspective view of the appearance of a functional droplet discharge head, and FIG. 5B is a cross-sectional view when the functional droplet discharge head is mounted on a pipe adapter.
FIG. 6 is a structural diagram of a functional droplet discharge head according to the first embodiment.
FIG. 7 is an enlarged view of a head main body of the functional liquid droplet ejection head according to the first embodiment.
FIG. 8 is an enlarged view of a head main body of a functional liquid droplet ejection head according to a first modification of the first embodiment.
FIG. 9 is an enlarged view of a head main body of a functional liquid droplet ejection head according to a second modification of the first embodiment.
FIG. 10 is a structural diagram of a functional liquid droplet ejection head according to a second embodiment.
FIG. 11 is a cross-sectional view of a liquid crystal display device manufactured by the droplet discharge device of the present invention.
FIG. 12 is a cross-sectional view of an organic EL device manufactured by the droplet discharge device of the present invention.
[Explanation of symbols]
1 droplet discharge device 2 discharge means
30 Functional Liquid Discharge Head 31 Head Unit
32 main carriage 33 XY moving mechanism
41 X-axis table 51 Y-axis table
71 Sub-carriage 82 Functional liquid introduction section
83 head substrate 84 head body
88 Nozzle surface 93 Pressure chamber
94 Head plate 95 Nozzle row
95a nozzle 97 silicon cavity
97a cavity 97b side edge
100 Depressed part 111 Middle part longitudinal area
112 Peripheral vertical section 113 Step
115 Central area 116 Peripheral area
117 Steps W Work (substrate)

Claims (14)

In a functional droplet discharge head in which a nozzle row formed by arranging a large number of nozzles on a nozzle surface,
A functional liquid droplet ejection head characterized in that at least a middle vertical section of the nozzle surface on which the nozzle row is formed is projected from a pair of peripheral vertical sections located on both sides of the middle vertical section. 2. The functional droplet discharge head according to claim 1, wherein each of the peripheral vertical sections is inclined outward. The functional droplet discharge head according to claim 1, wherein a step portion is formed between the intermediate portion vertical region and each of the peripheral portion vertical regions. 4. The functional liquid droplet according to claim 3, wherein the step portion is formed by thinly etching a portion corresponding to each of the peripheral vertical sections of the head plate forming the nozzle surface. Discharge head. 4. The functional droplet discharge head according to claim 3, wherein the step portion is formed by removing a portion corresponding to each of the peripheral vertical sections of the head plate forming the nozzle surface. 5. . In a functional droplet discharge head in which a nozzle row formed by arranging a large number of nozzles on a nozzle surface,
A functional liquid droplet ejection head, wherein at least a central area of the nozzle surface where the nozzle row is formed is protruded from a peripheral area. 7. The functional droplet discharge head according to claim 6, wherein the peripheral region is inclined outward. 8. The functional droplet discharge head according to claim 6, wherein a step is formed between the central region and the peripheral region. 9. The functional droplet discharge head according to claim 8, wherein the step portion is formed by thinly etching a portion corresponding to the peripheral region of a head plate constituting the nozzle surface. . 9. The functional droplet discharge head according to claim 8, wherein the step is formed by removing a portion corresponding to the peripheral region of a head plate constituting the nozzle surface. A functional droplet ejection head according to any one of claims 1 to 10,
A moving mechanism for moving the functional droplet discharge head relative to the workpiece in synchronization with the driving of the functional droplet discharge head. An electro-optical device using the droplet discharge device according to claim 11, wherein a functional droplet is discharged from the functional droplet discharge head onto a work to form a film forming unit. A method for manufacturing an electro-optical device, comprising: using the droplet discharge device according to claim 11, discharging a functional droplet from the functional droplet discharge head onto a workpiece to form a film forming unit. An electronic apparatus comprising the electro-optical device according to claim 12 or an electro-optical device manufactured by the method for manufacturing an electro-optical device according to claim 13.

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