JP2004214645A5 - - Google Patents

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Publication number
JP2004214645A5
JP2004214645A5 JP2003419731A JP2003419731A JP2004214645A5 JP 2004214645 A5 JP2004214645 A5 JP 2004214645A5 JP 2003419731 A JP2003419731 A JP 2003419731A JP 2003419731 A JP2003419731 A JP 2003419731A JP 2004214645 A5 JP2004214645 A5 JP 2004214645A5
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JP
Japan
Prior art keywords
layer
substrate
film
manufacturing
semiconductor device
Prior art date
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Granted
Application number
JP2003419731A
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English (en)
Japanese (ja)
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JP2004214645A (ja
JP4731809B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003419731A priority Critical patent/JP4731809B2/ja
Priority claimed from JP2003419731A external-priority patent/JP4731809B2/ja
Publication of JP2004214645A publication Critical patent/JP2004214645A/ja
Publication of JP2004214645A5 publication Critical patent/JP2004214645A5/ja
Application granted granted Critical
Publication of JP4731809B2 publication Critical patent/JP4731809B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003419731A 2002-12-17 2003-12-17 半導体装置の作製方法 Expired - Fee Related JP4731809B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003419731A JP4731809B2 (ja) 2002-12-17 2003-12-17 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002365566 2002-12-17
JP2002365566 2002-12-17
JP2003419731A JP4731809B2 (ja) 2002-12-17 2003-12-17 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2004214645A JP2004214645A (ja) 2004-07-29
JP2004214645A5 true JP2004214645A5 (zh) 2007-02-08
JP4731809B2 JP4731809B2 (ja) 2011-07-27

Family

ID=32828730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003419731A Expired - Fee Related JP4731809B2 (ja) 2002-12-17 2003-12-17 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP4731809B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7872356B2 (en) 2007-05-16 2011-01-18 Qualcomm Incorporated Die stacking system and method
US8232598B2 (en) * 2007-09-20 2012-07-31 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing the same
JP5665020B2 (ja) 2009-12-22 2015-02-04 国立大学法人九州工業大学 配線用電子部品の製造方法
WO2012029638A1 (en) * 2010-09-03 2012-03-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0714982A (ja) * 1993-06-21 1995-01-17 Hitachi Ltd 半導体集積回路装置及びその製造方法
JP4085459B2 (ja) * 1998-03-02 2008-05-14 セイコーエプソン株式会社 ３次元デバイスの製造方法

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