JP2004214458A5 - - Google Patents
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- Publication number
- JP2004214458A5 JP2004214458A5 JP2003000485A JP2003000485A JP2004214458A5 JP 2004214458 A5 JP2004214458 A5 JP 2004214458A5 JP 2003000485 A JP2003000485 A JP 2003000485A JP 2003000485 A JP2003000485 A JP 2003000485A JP 2004214458 A5 JP2004214458 A5 JP 2004214458A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003000485A JP4264533B2 (ja) | 2003-01-06 | 2003-01-06 | 不揮発性磁気メモリ装置及びその製造方法 |
| US10/751,747 US6958503B2 (en) | 2003-01-06 | 2004-01-05 | Nonvolatile magnetic memory device |
| TW093100239A TWI255458B (en) | 2003-01-06 | 2004-01-06 | Nonvolatile magnetic memory device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003000485A JP4264533B2 (ja) | 2003-01-06 | 2003-01-06 | 不揮発性磁気メモリ装置及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004214458A JP2004214458A (ja) | 2004-07-29 |
| JP2004214458A5 true JP2004214458A5 (ja) | 2005-09-08 |
| JP4264533B2 JP4264533B2 (ja) | 2009-05-20 |
Family
ID=32708778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003000485A Expired - Fee Related JP4264533B2 (ja) | 2003-01-06 | 2003-01-06 | 不揮発性磁気メモリ装置及びその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6958503B2 (ja) |
| JP (1) | JP4264533B2 (ja) |
| TW (1) | TWI255458B (ja) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3906139B2 (ja) * | 2002-10-16 | 2007-04-18 | 株式会社東芝 | 磁気ランダムアクセスメモリ |
| US7397077B2 (en) * | 2004-09-02 | 2008-07-08 | Samsung Electronics Co., Ltd. | Magnetic memory devices having patterned heater layers therein that utilize thermally conductive sidewall materials to increase heat transfer when writing memory data |
| KR101124504B1 (ko) * | 2005-09-22 | 2012-03-15 | 삼성전자주식회사 | ＡＬＤ 공정에 의한 비정질 ＮｉＯ 박막의 제조방법 및상기 비정질 ＮｉＯ 박막을 이용한 비휘발성 메모리 소자 |
| US7799637B2 (en) * | 2006-06-26 | 2010-09-21 | Sandisk Corporation | Scaled dielectric enabled by stack sidewall process |
| TWI402980B (zh) * | 2007-07-20 | 2013-07-21 | Macronix Int Co Ltd | 具有緩衝層之電阻式記憶結構 |
| JP5277629B2 (ja) * | 2007-12-21 | 2013-08-28 | ソニー株式会社 | 磁気抵抗効果を有するメモリ素子及びその製造方法、並びに、不揮発性磁気メモリ装置 |
| US7829923B2 (en) * | 2008-10-23 | 2010-11-09 | Qualcomm Incorporated | Magnetic tunnel junction and method of fabrication |
| US8796041B2 (en) * | 2009-08-28 | 2014-08-05 | International Business Machines Corporation | Pillar-based interconnects for magnetoresistive random access memory |
| JP2012069630A (ja) * | 2010-09-22 | 2012-04-05 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
| KR101919040B1 (ko) | 2012-08-13 | 2018-11-15 | 삼성전자주식회사 | 반도체 기억 소자 |
| JP6053819B2 (ja) * | 2012-11-26 | 2016-12-27 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法 |
| JP5865858B2 (ja) * | 2013-03-22 | 2016-02-17 | 株式会社東芝 | 磁気抵抗効果素子及び磁気抵抗効果素子の製造方法 |
| US9123879B2 (en) * | 2013-09-09 | 2015-09-01 | Masahiko Nakayama | Magnetoresistive element and method of manufacturing the same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5940319A (en) * | 1998-08-31 | 1999-08-17 | Motorola, Inc. | Magnetic random access memory and fabricating method thereof |
| JP2003086775A (ja) * | 2001-09-07 | 2003-03-20 | Canon Inc | 磁気メモリ装置およびその製造方法 |
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2003
- 2003-01-06 JP JP2003000485A patent/JP4264533B2/ja not_active Expired - Fee Related
-
2004
- 2004-01-05 US US10/751,747 patent/US6958503B2/en not_active Expired - Fee Related
- 2004-01-06 TW TW093100239A patent/TWI255458B/zh not_active IP Right Cessation