JP2004200383A5 - - Google Patents

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Publication number
JP2004200383A5
JP2004200383A5 JP2002366674A JP2002366674A JP2004200383A5 JP 2004200383 A5 JP2004200383 A5 JP 2004200383A5 JP 2002366674 A JP2002366674 A JP 2002366674A JP 2002366674 A JP2002366674 A JP 2002366674A JP 2004200383 A5 JP2004200383 A5 JP 2004200383A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002366674A
Other versions
JP2004200383A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002366674A priority Critical patent/JP2004200383A/ja
Priority claimed from JP2002366674A external-priority patent/JP2004200383A/ja
Publication of JP2004200383A publication Critical patent/JP2004200383A/ja
Publication of JP2004200383A5 publication Critical patent/JP2004200383A5/ja
Pending legal-status Critical Current

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JP2002366674A 2002-12-18 2002-12-18 位置合わせ方法 Pending JP2004200383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002366674A JP2004200383A (ja) 2002-12-18 2002-12-18 位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002366674A JP2004200383A (ja) 2002-12-18 2002-12-18 位置合わせ方法

Publications (2)

Publication Number Publication Date
JP2004200383A JP2004200383A (ja) 2004-07-15
JP2004200383A5 true JP2004200383A5 (ja) 2005-10-27

Family

ID=32763806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002366674A Pending JP2004200383A (ja) 2002-12-18 2002-12-18 位置合わせ方法

Country Status (1)

Country Link
JP (1) JP2004200383A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4950779B2 (ja) * 2007-06-22 2012-06-13 東京エレクトロン株式会社 プローブカードの登録方法及びこのプログラムを記録したプログラム記録媒体
KR101420597B1 (ko) * 2009-03-16 2014-07-18 가부시키가이샤 니혼 마이크로닉스 웨이퍼 얼라인먼트 장치 및 웨이퍼 얼라인먼트 방법
JP2010245508A (ja) * 2009-03-16 2010-10-28 Micronics Japan Co Ltd ウェハアライメント装置及びウェハアライメント方法
CN104655886B (zh) * 2015-03-20 2018-07-27 合肥京东方光电科技有限公司 手动探针结构
JP7458161B2 (ja) * 2019-09-24 2024-03-29 東京エレクトロン株式会社 検査装置の制御方法および検査装置

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