JP2004193359A5 - - Google Patents
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- Publication number
- JP2004193359A5 JP2004193359A5 JP2002359877A JP2002359877A JP2004193359A5 JP 2004193359 A5 JP2004193359 A5 JP 2004193359A5 JP 2002359877 A JP2002359877 A JP 2002359877A JP 2002359877 A JP2002359877 A JP 2002359877A JP 2004193359 A5 JP2004193359 A5 JP 2004193359A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002359877A JP4160823B2 (ja) | 2002-12-11 | 2002-12-11 | ラジカル支援ドライエッチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002359877A JP4160823B2 (ja) | 2002-12-11 | 2002-12-11 | ラジカル支援ドライエッチング装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004193359A JP2004193359A (ja) | 2004-07-08 |
| JP2004193359A5 true JP2004193359A5 (ja) | 2006-03-30 |
| JP4160823B2 JP4160823B2 (ja) | 2008-10-08 |
Family
ID=32759143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002359877A Expired - Fee Related JP4160823B2 (ja) | 2002-12-11 | 2002-12-11 | ラジカル支援ドライエッチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4160823B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5328685B2 (ja) * | 2010-01-28 | 2013-10-30 | 三菱電機株式会社 | プラズマ処理装置及びプラズマ処理方法 |
| JP6726010B2 (ja) * | 2016-03-29 | 2020-07-22 | 芝浦メカトロニクス株式会社 | 大気圧プラズマ発生装置 |
| CN113366604A (zh) * | 2019-02-06 | 2021-09-07 | 瑞士艾发科技 | 产生离子的方法和装置 |
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2002
- 2002-12-11 JP JP2002359877A patent/JP4160823B2/ja not_active Expired - Fee Related