JP2004177964A - ファイバ・グレーティング製造用の回折格子および位相マスクの作成方法 - Google Patents
ファイバ・グレーティング製造用の回折格子および位相マスクの作成方法 Download PDFInfo
- Publication number
- JP2004177964A JP2004177964A JP2003396444A JP2003396444A JP2004177964A JP 2004177964 A JP2004177964 A JP 2004177964A JP 2003396444 A JP2003396444 A JP 2003396444A JP 2003396444 A JP2003396444 A JP 2003396444A JP 2004177964 A JP2004177964 A JP 2004177964A
- Authority
- JP
- Japan
- Prior art keywords
- phase
- diffraction grating
- equation
- resist
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/001—Phase modulating patterns, e.g. refractive index patterns
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
- G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/0208—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response
- G02B6/02085—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response characterised by the grating profile, e.g. chirped, apodised, tilted, helical
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/34—Phase-edge PSM, e.g. chromeless PSM; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Optical Integrated Circuits (AREA)
Abstract
【解決手段】本発明によれば、有効に位相変調される、あるいは振幅が急速に変調される蓄積露光を提供することができる多重走査露光を提供することにより、回折格子位相マスクの製造が改善される。本出願人らは、それぞれ位相が変調されることなく振幅が変調されるように露光走査を選択することができることを確認しているが、多重走査による蓄積露光は位相が変調され、かつ/または振幅が変調されている。この改良型方法を使用して、超格子回折格子などの精巧な光ファイバ・グレーティングを製造するための位相マスクを作成することができる。
【選択図】図1
Description
i. ビーム・パワーが緩やかに変化する単一ビーム露光
ii. ビーム・パワーが緩やかに変化する2重ビーム露光
iii.(a)マスクを1/8回折格子周期(〜125nm)だけ移動させた、(b)ビーム・パワーが緩やかに変化する2重ビーム露光
1.位相超格子回折格子の生成
位相超格子回折格子を生成する場合の方程式1の位相Φ(x)の形態は次の通りである。
Pは超格子の周期である。周期的な強度変化は、長周期振幅マスクを使用することによって達成される。回折格子の対応する周期変化は、
2.微小回折格子周期リプルの相関
方程式5にP=2cmを当てはめると、提案技法を使用して予測される可能相関の範囲は、±0.02nmに等しい。
Claims (12)
- 基板を供給する工程と、
基板にレジストを塗布する工程と、
光回折格子を表す方程式の展開項に従って、レジストを複数の空間ホログラフィック照射工程で露光する工程と、
レジストを現像する工程と、
基板にエッチングを施す工程とを含む、位相マスクを製造するための方法。 - 複数の照射工程によって、位相が変調され、かつ/または振幅が変調される蓄積露光が生成される、請求項1に記載の方法。
- レジストを露光する工程が、光回折格子を表す方程式の3つの展開項に従って、レジストを3つのホログラフィック照射に露光する工程を含む、請求項1に記載の方法。
- 照射工程が、振幅変調源による照射からなり、マスク基板をホログラフィック・パターンに対して移動させることにより、少なくとも1つの照射に対する位相偏移が達成される、請求項1に記載の方法。
- 光回折格子を表す方程式の5つの展開項に従って、レジストを5つのホログラフィック照射に露光する工程を含む、請求項1に記載の位相マスクを製造する方法。
- 位相偏移π/4、−π/4および−π/2が、マスク基板をホログラフィック・パターンに対して移動させることによって達成される、請求項6に記載の方法。
- 基板を供給する工程が水晶基板を提供する工程を含む、請求項1に記載の位相マスクを製造する方法。
- 感光性領域を備えた光媒体を提供する工程と、
光回折格子を表す方程式の展開項に従って、感光性領域を複数のホログラフィック照射工程で露光する工程とを含む、回折格子を光媒体に書き込む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42955502P | 2002-11-27 | 2002-11-27 | |
US10/701,585 US7081323B2 (en) | 2002-11-27 | 2003-11-05 | Method of making gratings and phase masks for fiber grating fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004177964A true JP2004177964A (ja) | 2004-06-24 |
JP4008409B2 JP4008409B2 (ja) | 2007-11-14 |
Family
ID=32397207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003396444A Expired - Fee Related JP4008409B2 (ja) | 2002-11-27 | 2003-11-27 | ファイバ・グレーティング製造用の回折格子および位相マスクの作成方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7081323B2 (ja) |
JP (1) | JP4008409B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8227150B2 (en) | 2004-01-07 | 2012-07-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Holographic reticle and patterning method |
CN103576225B (zh) * | 2013-11-08 | 2016-01-20 | 无锡英普林纳米科技有限公司 | 位相掩膜光刻制备占空比可调的纳米周期光栅的方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998021629A2 (en) * | 1996-11-15 | 1998-05-22 | Diffraction, Ltd. | In-line holographic mask for micromachining |
JP4281041B2 (ja) * | 2001-10-01 | 2009-06-17 | セイコーエプソン株式会社 | 位相格子マスク |
-
2003
- 2003-11-05 US US10/701,585 patent/US7081323B2/en active Active
- 2003-11-27 JP JP2003396444A patent/JP4008409B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20040106050A1 (en) | 2004-06-03 |
US7081323B2 (en) | 2006-07-25 |
JP4008409B2 (ja) | 2007-11-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2111808C (en) | Method for forming a bragg grating in an optical medium | |
US5413884A (en) | Grating fabrication using electron beam lithography | |
CA2502121A1 (en) | Fabrication of waveguides and bragg gratings with uv-irradiation | |
JP5133954B2 (ja) | マスター光学拡散体の作成方法 | |
CA1290601C (en) | Method for generating a lattice structure with a phase shift on the surface of a substrate | |
JPH1172631A (ja) | 光ファイバー加工用位相マスク及びその製造方法 | |
US5730888A (en) | Bragg gratings in waveguides | |
US6483965B1 (en) | Method of writing a bragg diffraction grating | |
JP4008409B2 (ja) | ファイバ・グレーティング製造用の回折格子および位相マスクの作成方法 | |
KR970066764A (ko) | 주기적 패턴을 홀로그래픽으로 기록하는 방법 및 장치 | |
US6466714B1 (en) | Method of producing phase mask for fabricating optical fiber and optical fiber with bragg's diffraction grating produced by using the phase mask | |
WO2003046628A8 (en) | Method for fabricating chirped fiber bragg gratings | |
CN114509916B (zh) | 激光干涉光刻设备和方法 | |
US6434300B1 (en) | Grating writing method and apparatus | |
JP2004045575A (ja) | 回折格子形成用の位相マスクとその製造方法、および回折格子の形成用方法 | |
US20060098566A1 (en) | Method for generating a circular periodic structure on a basic support material | |
JP2001242313A (ja) | 光ファイバー加工用位相マスクの製造方法及びその光ファイバー加工用位相マスクを使用して作製されたブラッグ回折格子付き光ファイバー | |
JP2003014915A (ja) | Dammann型グレーティングをつけた光学素子 | |
JP3916773B2 (ja) | 回折格子の周期測定方法 | |
JPH0980738A (ja) | 光ファイバー加工用位相シフトフォトマスクの製造方法 | |
JP2000089014A (ja) | 光ファイバー加工用位相マスク及びその製造方法 | |
EP1876591A2 (en) | Hologram recording device, hologram reproducing device and hologram recording method not requiring positioning of a phase mask | |
JPH09318831A (ja) | 直接描画方法 | |
JP4668696B2 (ja) | チャープトグレーティング形成基板の作製方法 | |
Jones et al. | The application of electron beam lithography to device fabrication for optical communication systems |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040316 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040322 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20061020 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061025 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070125 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070131 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070425 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070620 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070628 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070806 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070829 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100907 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4008409 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110907 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120907 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130907 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |