JP2004177202A - Conveyor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize a conveyor with a tray and a test head simplified in structure and consumable parts excluded therefrom. <P>SOLUTION: In this conveyor, a device under test is housed in the tray, the tray is conveyed where a socket is located, and the device is positioned where it is connected to the socket. An alignment mark is put to each of the tray and the socket. The device is positioned in a non-contact manner between the tray and the test head by performing image recognition on the positions of the alignment marks by an imaging means. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a transport device that stores a device to be inspected in a tray, transports the tray to a position where a socket is located, and positions the device to be inspected at a position connected to the socket.
[0002]
[Prior art]
FIG. 3 is a diagram showing a configuration example of a conventional transport device.
In FIG. 3, the device pockets 11 are arranged in a matrix on the tray 10. The device to be inspected 12 is stored in the device pocket 11.
The tray 10 is a dedicated tray for transporting the device under test 12 to the test head. Pins 13 are set up at four corners of the tray 10. The device to be inspected 11 taken out by a transfer robot from a tray (not shown) for accommodating uninspected devices is accommodated in the tray 10.
[0003]
The configuration of the device pocket 11 and the device under test 12 is shown in part A. The device under test 12 is stored in the device pocket 11. Pins 14 are set up at four corners of the device pocket 11.
On the test head 20, a socket board 21 is mounted. Sockets 22 are arranged on the socket board 21 in a matrix. Bushes 23 are formed at four corners of the socket board 21.
[0004]
The structure of the socket 22 is shown in part B. Contact electrodes 24 are arranged on the socket 22. Bushes 25 are formed at four corners of the socket 22.
[0005]
FIG. 4 is a longitudinal sectional view of the apparatus of FIG.
As shown in FIG. 4, a device pocket 11 is provided in the tray 10, and a device 12 to be inspected is stored in the device pocket 11. Each device pocket 11 is provided with a pin 14.
Sockets 22 are arranged on the socket board 21. When the tray 10 is placed on the socket board 21, the connection pins 121 of the device under test 12 are connected to the contact electrodes 24 of the socket 22. As a result, the device under test 12 is connected to the test head 20. The provision of the mechanism (not shown) for holding the device under test 12 prevents the device under test 12 from rising when connected to the socket 22.
[0006]
Rough positioning is performed by inserting the pin 13 of the tray 10 into the bush 23 of the socket board 21, and precise positioning is performed by inserting the pin 14 of the device pocket 11 into the bush 25 of the socket 22.
[0007]
[Patent Document 1]
JP-A-7-297241
[Patent Document 2]
Japanese Patent Application Laid-Open No. 8-335612
[Problems to be solved by the invention]
However, in the conventional example shown in FIGS. 3 and 4, since the device is positioned between the tray and the test head mechanically by using pins and bushes, there are the following problems.
(A) The configuration of the tray is complicated.
(B) A bush for positioning is also required on the test head side.
(C) The positioning components are consumed.
[0010]
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems. By performing positioning between a tray and a test head in a non-contact manner by using an imaging unit, the configuration of the tray and the test head is simplified, and consumable parts are used. It is an object of the present invention to realize a transport device that eliminates the problem.
[0011]
[Means for Solving the Problems]
The present invention is a transfer device having the following configuration.
[0012]
(1) A transport device that stores a device to be inspected in a tray, transports the tray to a position where a socket is located, and positions the device to be inspected at a position connected to the socket.
A first alignment mark attached to the tray;
A second alignment mark attached to the socket;
First imaging means for recognizing an image of the position of the first alignment mark,
A second imaging unit having a known positional relationship with respect to the first imaging unit and recognizing an image of a position of the second alignment mark;
The positional relationship between the device to be inspected and the socket is determined based on the positions of the alignment marks recognized by the first and second imaging units, and the device to be inspected is moved to a position connected to the socket based on the determined positional relationship. Positioning means for positioning;
A transport device comprising:
[0013]
(2) The transport device according to (1), wherein the first alignment mark is provided at at least two corners of the tray.
[0014]
(3) The transport device according to (1) or (2), wherein the second alignment mark is provided at both ends of the socket.
[0015]
(4) The transport device according to any one of (1) to (3), wherein the tray has a concave device pocket for storing a device to be inspected.
[0016]
(5) The transport device according to (4), wherein the device pockets are arranged in a matrix.
[0017]
(6) The transport device according to (5), wherein the first imaging unit is provided with information indicating a positional relationship between the first alignment mark and the device pocket.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a configuration diagram showing one embodiment of the present invention. In FIG. 1, the same components as those described above are denoted by the same reference numerals.
In FIG. 1, device pockets 31 are arranged in a matrix on the tray 30. The device to be inspected 12 is stored in the device pocket 31. The tray 30 is a dedicated tray for transporting the device under test 12 to the test head, similarly to the tray 10 of FIG. At the four corners of the tray 30, alignment marks 32 are provided. Note that the alignment marks 32 need only be provided on at least two corners of the tray 30.
The configuration of the device pocket 31 is shown in a portion C. The device pocket 31 is formed in a concave shape, and the inspection target device 12 is stored in this portion.
[0019]
A socket board 40 is attached to the test head 20. Sockets 41 are arranged in a matrix on the socket board 40. The structure of the socket 41 is shown in D part. Contact electrodes 42 are arranged on the socket 41. Alignment marks 43 are provided at both ends of the socket 41.
[0020]
The image pickup unit 50 recognizes the position of the alignment mark 32 as an image. The imaging unit 51 has a known positional relationship with the imaging unit 50, and recognizes the position of the alignment mark 43 as an image. The imaging means 50 and 51 are composed of, for example, a CCD camera and an optical system.
The positioning unit 52 obtains the positional relationship between the device under test 12 and the socket 41 based on the positions of the alignment marks recognized by the image capturing units 50 and 51, and places the device under test 12 in the socket 41 based on the obtained positional relationship. Position it at the location where it will be connected.
[0021]
FIG. 2 is a longitudinal sectional view of the apparatus of FIG.
As shown in FIG. 2, a device pocket 31 is provided in the tray 30, and the device 12 to be inspected is stored in the device pocket 31.
On the socket board 40, sockets 41 are arranged. When the socket board 40 is placed on the tray 30, the connection pins 121 of the device under test 12 are connected to the contact electrodes 42 of the socket 41. As a result, the device under test 12 is connected to the test head 20. Since there is no mechanism for holding the device under test 12 in the device pocket 31, the test head 20 is arranged on the upper side and the tray 30 is arranged on the lower side in this embodiment.
[0022]
In the transfer device shown in FIGS. 1 and 2, an imaging unit 50 is provided to detect the position of the tray 30, and an imaging unit 51 is provided to detect the position of the socket 41. The positional relationship between the imaging units 50 and 51 is known. The positional relationship between the inspection target device 12 stored in the tray 30 and the tray 30 is determined by dropping the device into the device pocket 31. Information indicating the positional relationship between the alignment mark 32 and the device pocket 31 is given to the imaging means 51. Information indicating a positional relationship is provided for each of the device pockets 31 arranged in a matrix.
[0023]
By recognizing the alignment mark 32 as an image, the imaging means 50 calculates the rotational displacement of the tray 30 about the two-dimensional position (X and Y direction positions) and the θ axis (the θ axis is an axis orthogonal to the X axis and the Y axis). I do. The image pickup means 51 calculates the two-dimensional position (X and Y direction positions) of each socket 41 and the rotational deviation about the θ axis by recognizing the alignment mark 43 as an image. Since the positional relationship between the imaging units 50 and 51 is known, the positional relationship between the tray 30 and the socket 41 is obtained. Based on the obtained positional relationship, the device under test 12 and the socket 41 are positioned. As a result, the device under test 12 can be connected to the socket 41.
[0024]
【The invention's effect】
According to the present invention, the following effects can be obtained.
[0025]
According to the first and fourth aspects of the present invention, alignment marks are respectively attached to the tray and the socket, and the positions of these alignment marks are image-recognized by the image pickup means to perform non-contact positioning between the tray and the test head. ing. As a result, the following effects can be obtained.
(A) Since the tray does not require positioning pins, the configuration can be simplified.
(B) Since the positioning bush is not required on the test head side, the configuration is simplified.
(C) Since the positioning is performed in a non-contact manner, parts are not consumed. Also, there is no displacement due to component deterioration.
[0026]
According to the second aspect of the present invention, since the alignment marks are provided at at least two corners of the tray, not only the two-dimensional position of the tray but also the rotational deviation can be detected.
[0027]
According to the third aspect of the present invention, since the alignment marks are provided at both ends of the socket, not only the two-dimensional position of the socket but also the rotational deviation can be detected.
[0028]
According to the fifth aspect of the invention, the device pocket can transport and inspect a plurality of devices arranged in a matrix on the tray at one time.
[0029]
In the invention according to claim 6, since information indicating the positional relationship between the first alignment mark and the device pocket is given to the first imaging means, the device to be inspected is stored in any device pocket. Can be positioned with respect to the socket.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing one embodiment of the present invention.
2 is a longitudinal sectional view of the device of FIG. 1;
FIG. 3 is a diagram illustrating a configuration example of a conventional transport device.
FIG. 4 is a longitudinal sectional view of the device of FIG. 3;
[Explanation of symbols]
12 Device to be inspected 30 Tray 31 Device pocket 32, 43 Alignment mark 41 Socket 50, 51 Imaging means 52 Positioning means

Claims (6)

In a transfer device that stores the device to be inspected in a tray, transports the tray to a position where the socket is located, and positions the device to be inspected at a position connected to the socket,
A first alignment mark attached to the tray;
A second alignment mark attached to the socket;
First imaging means for recognizing an image of the position of the first alignment mark,
A second imaging unit having a known positional relationship with respect to the first imaging unit and recognizing an image of a position of the second alignment mark;
The positional relationship between the device to be inspected and the socket is determined based on the positions of the alignment marks recognized by the first and second imaging units, and the device to be inspected is moved to a position connected to the socket based on the determined positional relationship. Positioning means for positioning;
A transport device comprising: The transport device according to claim 1, wherein the first alignment mark is provided at at least two corners of the tray. The transport device according to claim 1, wherein the second alignment mark is provided at both ends of the socket. The transport device according to claim 1, wherein a concave device pocket for storing a device to be inspected is formed in the tray. The transport device according to claim 4, wherein the device pockets are arranged in a matrix. The transport apparatus according to claim 5, wherein the first imaging unit is provided with information indicating a positional relationship between the first alignment mark and a device pocket.

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