JP2004176955A - Fluid cooling system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the control of a flow rate of cooling fluid from getting difficult and heat exchanging efficiency from lowering and prevent an increase in temperature of the cooling fluid to be discharged to the outside. <P>SOLUTION: This fluid cooling system comprises a first heat exchanger 12 using the cooling fluid delivered from a second heat exchanger 15 for cooling fluid to be cooled and the second heat exchanger using the used cooling fluid used in the first heat exchanger for heating the cooling fluid introduced from the outside, delivering the heated cooling fluid to the first heat exchanger and delivering the used cooling fluid to be discharged to the outside to a discharge port. Thus, a temperature difference between a target temperature of the fluid to be cooled and the temperature of cooling water is greatly reduced, allowing easy control of the flow rate of the cooling water to be introduced. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fluid cooling device suitable for use in a chiller device or the like for cooling a heat medium and supplying it to a use side.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a brine supply apparatus for supplying brine (heat medium) in a circulating manner while cooling it with a utilization side of a semiconductor manufacturing apparatus or the like has been known (for example, see Patent Document 1). In this brine supply device, a refrigerator composed of a compressor, a condenser, an expansion valve, an evaporator, and the like is generally used, but recently, together with or instead of the refrigerator. There is also known an apparatus for cooling brine by a heat exchanger using cooling water such as industrial water.
[Patent Document 1]
JP-A-2002-54852
[0003]
[Problems to be solved by the invention]
FIG. 2 is a conceptual diagram for explaining a conventional brine supply device that cools brine using a heat exchanger using cooling water. In FIG. 2, reference numeral 1 denotes a return passage through which brine used on the heat load side of a semiconductor manufacturing apparatus or the like is returned for cooling, and 2 denotes external cooling water (for example, an average temperature of about 20 to 28 ° C.). Heat exchanger 3 for cooling the brine to a predetermined target temperature by using the industrial water) to supply the brine cooled to the target temperature in the heat exchanger 2 to the heat load side again. A cooling water introduction passage 4 for introducing cooling water (industrial water) from the outside to the heat exchanger 2, and a cooling water introduction passage 5 for discharging the cooling water used in the heat exchanger 2 to the outside. A cooling water discharge flow path, a temperature sensor for measuring the temperature of brine from the heat exchanger 2, and a cooling water introduction flow path 7 based on an output from the temperature sensor 6. To adjust the flow rate of cooling water introduced from outside Control valve (e.g. a motor valve), a.
[0004]
In the apparatus shown in FIG. 2, the heat exchanger 2 is configured such that the used brine returned from the heat load side and the cooling water from the outside flow in directions facing each other. Further, the control valve 7 adjusts the flow rate of cooling water from the outside flowing through the cooling water introduction flow path 4 based on the output from the temperature sensor 6 that measures the temperature of the brine from the heat exchanger 2. Thereby, the cooling capacity of the heat exchanger 2 is made variable (PID control or the like).
[0005]
By the way, in the conventional heat exchanger 2 as shown in FIG. 2, the temperature of the cooling water from the outside flowing through the cooling water introduction flow path 4 (cooling water inlet temperature) and the outlet side of the brine from the heat exchanger 2 The larger the temperature difference between the measured temperature (or the target temperature of the brine) and the smaller the flow rate of the external cooling water to be introduced into the heat exchanger 2 (the amount of heat (W) = material Weight x specific heat x temperature difference / 0.86). For example, when the temperature difference is 60 ° C. (500 W), the flow rate of the cooling water to be introduced into the heat exchanger 2 is as small as, for example, about 0.1 liter / minute. As described above, when the flow rate of the cooling water to be introduced into the heat exchanger 2 decreases, the flow of the cooling water in the heat exchanger 2 becomes slow (due to the internal volume of the heat exchanger 2), and a time lag occurs. There is a problem that the controllability deteriorates and a control valve that can cope with the control of a small flow rate is required in some cases.
[0006]
Further, the temperature difference between the temperature of the cooling water from the outside flowing through the cooling water introduction flow path 4 (the inlet temperature) and the measured temperature of the outlet of the brine from the heat exchanger 2 (or the target temperature of the brine). If the width is large, the fluctuation width of the flow rate of the cooling water to be introduced into the heat exchanger 2 also becomes large. For example, when the width of the temperature difference is 60 ° C. to 6 ° C. (500 W to 1,250 W) In this case, the fluctuation range of the flow rate of the cooling water to be introduced into the heat exchanger 2 is, for example, about 0.1 liter / min to 3.0 liter / min (a flow ratio of about 1:30). As described above, when the fluctuation range of the flow rate of the cooling water to be introduced into the heat exchanger 2 becomes large, it is necessary to introduce only the valve suitable for the case where the flow rate of the cooling water to be introduced is large (a small amount of the cooling water). It is not suitable for small flow rate of cooling water (because it is not suitable for fine control), and conversely, only a valve suitable for low flow rate of cooling water to be introduced (because only a small flow rate can be sent) is introduced The problem is that it cannot cope with the case where the flow rate of the cooling water to be increased is large (thus, it is necessary to install a plurality of valves), that is, the cooling to be introduced into the heat exchanger 2 with only one valve There is a problem that proper flow control of water cannot be performed.
[0007]
When the operation of the brine supply device is stopped and maintenance is performed, maintenance cannot be performed at a high temperature of, for example, 80 ° C., so that the temperature of the entire device including the brine is lowered in a short time. However, if only a valve suitable for the case where the flow rate of the cooling water to be introduced is small (for example, a valve capable of flowing only a flow rate of about 3 liters / minute) is installed, There is a problem that sufficient cooling water for the temperature drop cannot be flowed, and the temperature drop time is prolonged, thereby lowering the operation efficiency of the apparatus. (On the other hand, in order to prevent this, it is necessary to install a plurality of valves. When doing so, the manufacturing and operation costs of the device increase).
[0008]
Further, in the apparatus shown in FIG. 2, as described above, since the brine flowing in the heat exchanger 2 and the cooling water flow in the directions facing each other, for example, the temperature of the brine flowing into the heat exchanger 2 becomes 85 In the case where the temperature is as high as 0 ° C., the temperature of the cooling water sent from the heat exchanger 2 to the outside may be heated to a high temperature close to 85 ° C., but in such a case, When the cooling water discharge passage 5 for discharging the cooling water to the outside is formed of a hose material, the temperature of the cooling water (85 ° C.) is equal to the heat-resistant temperature of the hose material (for example, a hose material made of vinyl chloride). The temperature of the cooling water (85 ° C.) is transmitted to the metal material when the cooling water discharge channel 5 is formed of a metal material. Separate burn prevention treatment due to high temperature There is a problem that Banara not a cost is increased.
[0009]
The present invention has been made in view of such a problem of the related art, and has a small flow rate of a cooling fluid such as cooling water to be introduced into a heat exchanger (for that reason, the heat exchanger It is possible to prevent the flow rate of the cooling fluid to be introduced into the heat exchanger from becoming difficult to control due to, for example, a slow flow of the cooling fluid introduced into the heat exchanger. It is possible to prevent a decrease in heat exchange efficiency due to a small flow rate of a cooling fluid such as cooling water to be introduced into the inside (as a result, a reduced effective area for heat exchange). In addition, appropriate control of the flow rate of the cooling fluid introduced into the heat exchanger can be easily performed with only one valve, shortening the cooling time of the equipment to stop the operation of the equipment and shift to maintenance. To improve the operating efficiency of the equipment Bets can be further it is an object to provide a fluid cooling device it is possible to prevent the temperature of the cooling fluid discharged from the heat exchanger to the outside are shifted too hot.
[0010]
[Means for Solving the Problems]
A fluid cooling device according to the present invention for solving such problems of the prior art is a fluid cooling device for cooling a fluid to be cooled with a cooling fluid introduced from the outside, and the fluid to be cooled is described below. A first heat exchanger for cooling with a cooling fluid sent from a second heat exchanger, and used cooling used for cooling the externally introduced cooling fluid in the first heat exchanger; And a second heat for sending the heated cooling fluid to the first heat exchanger and sending the used cooling fluid to an outlet for discharging the used cooling fluid to the outside. And an exchanger.
[0011]
Further, in the fluid cooling device of the present invention, the first heat exchanger is a non-counterflow type heat exchanger that performs heat exchange while the fluid to be cooled and the cooling fluid flow in the same direction. Is desirable.
[0012]
In the fluid cooling device of the present invention, in the second heat exchanger, the used cooling fluid from the first heat exchanger and the cooling fluid introduced from the outside face each other. It is desirable that the heat exchanger be a counter-flow type heat exchanger that performs heat exchange while flowing in the direction.
[0013]
In the fluid cooling device according to the present invention, it is preferable that both the fluid to be cooled and the cooling fluid are liquids.
[0014]
Furthermore, in the fluid cooling device of the present invention, it is preferable that both or one of the cooling target fluid and the cooling fluid is a gas such as steam.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is a conceptual diagram illustrating a brine supply device including a fluid cooling device according to an embodiment of the present invention. In FIG. 1, reference numeral 11 denotes a brine return flow path through which brine such as pure water or Galden (trade name) used on the heat load side of a semiconductor manufacturing apparatus or the like is returned for cooling, and 12 denotes an average flow introduced from outside. The brine is brought to a predetermined target temperature by using cooling water (cooling water preliminarily heated by the second heat exchanger 15 described later) composed of industrial water having a temperature of about 20 to 28 ° C. A first heat exchanger 13 for cooling is a brine feed passage for supplying the brine cooled to the target temperature in the first heat exchanger 12 to the heat load side again.
[0016]
In FIG. 1, reference numeral 14 denotes a cooling water introduction passage for introducing cooling water (industrial water) from the outside to a second heat exchanger 15 described later, and 15 denotes a cooling water introduction passage used in the first heat exchanger 12. The second heat exchanger 16 for preliminarily heating the cooling water from the cooling water introduction passage 14 with the used cooling water heated by heat exchange with the brine, and the second heat exchanger 16 The cooling water introduction passage 17 for introducing the cooling water preliminarily heated into the first heat exchanger 12 is used in the first heat exchanger 12 and heated by heat exchange with brine. A cooling water movement passage for moving the used cooling water to the second heat exchanger 15; and a cooling water moving passage 18 for discharging the used cooling water further used in the second heat exchanger 15 to the outside. Cooling water discharge passage.
[0017]
In FIG. 1, reference numeral 19 denotes a temperature sensor for measuring the temperature of the brine cooled by the first heat exchanger 12 (the brine on the outlet side of the heat exchanger 12), and 20 denotes a temperature sensor based on the output from the temperature sensor 19. And a control valve for adjusting the flow rate of cooling water from the outside introduced into the first heat exchanger 12. The control valve 20 adjusts the flow rate of the cooling water introduced into the first heat exchanger 12 based on the output from the temperature sensor 19 that measures the temperature of the brine from the first heat exchanger 12. Thereby, the cooling capacity of the first heat exchanger 12 is varied (PID control or the like).
[0018]
As shown in FIG. 1, in the present embodiment, the first heat for cooling the brine from the heat load side by the cooling water heated from the second heat exchanger 15 by the second heat exchanger 15. And a second heat exchanger 15 for preliminarily heating external cooling water introduced into the first heat exchanger 12 with used cooling water from the first heat exchanger 12. And a total of two heat exchangers.
[0019]
Further, the first heat exchanger 12 is configured such that the used brine returned from the heat load side and the cooling water heated by the second heat exchanger 15 from the second heat exchanger 15 It is configured to flow in the same direction (non-counterflow type). The second heat exchanger 15 is arranged so that the used cooling water used in the first heat exchanger 12 and heated by the heat exchange with the brine and the cooling water introduced from the outside are opposed to each other. (Flow type).
[0020]
As described above, in the apparatus of the present embodiment shown in FIG. 1, the two first heat exchangers 12 and the second heat exchangers 15 are provided as described above, and the brine from the heat load side is cooled by the cooling water. The first heat exchanger 12 for cooling in the second heat exchanger 15 is preliminarily prepared by exchanging heat with the used cooling water from the first heat exchanger 12 in the second heat exchanger 15. Cooling water from the outside, which has been heated, is introduced.
[0021]
Therefore, in the present embodiment, the cooling water introduced into the first heat exchanger 12 for cooling the brine (cooling water from outside and used in the second heat exchanger 15 from the first heat exchanger 12) The temperature difference between the temperature of the external cooling water (preliminarily heated by the heat exchange with the cooling water) and the target temperature of the brine is significantly reduced as compared with the conventional example of FIG. become.
[0022]
In the experiment of the inventor, in the present embodiment, in the case where the cooling water from the outside is not immediately introduced into the first heat exchanger 12, but is temporarily heated by the second heat exchanger 15 before the first cooling water. The temperature difference between the cooling water introduced into the first heat exchanger 12 and the target temperature of the brine is, for example, about 15 ° C. to 3 ° C., and the conventional example described in FIG. (6 ° C.).
[0023]
As described above, in this embodiment, if the temperature difference between the cooling water introduced into the first heat exchanger 12 and the target temperature of the brine can be reduced, the cooling water to be introduced into the first heat exchanger 12 (Heat amount (W) = weight of substance × specific heat × temperature difference / 0.86), so the first heat exchanger 12 (without using a high-precision valve) There is an advantage that the control of the flow rate of the cooling water introduced into the cooling water can be more easily performed.
[0024]
In addition, as described above, when the temperature difference between the cooling water introduced into the first heat exchanger 12 and the target temperature of the brine is reduced, as a result (the fluctuation range of the temperature difference is also reduced). The fluctuation range of the flow rate of the cooling water to be introduced into the first heat exchanger 12 is also reduced accordingly. That is, in the experiment of the present inventor, in the present embodiment, the cooling water from the outside is not immediately introduced into the first heat exchanger 12, but is temporarily heated by the second heat exchanger 15 before the first cooling water. When the temperature difference between the cooling water introduced into the first heat exchanger 12 and the target temperature of the brine is reduced, the fluctuation range of the flow rate of the cooling water to be introduced into the first heat exchanger 12 is, for example, The flow rate is about 0.7 liter / minute to about 10 liter / minute (a flow ratio of about 1 to 15), which is the conventional example described with reference to FIG. 2 (the width of the flow rate of the cooling water to be introduced into the heat exchanger 2 of FIG. 2). Is about 0.1 L / min to about 3.0 L / min).
[0025]
As described above, in the present embodiment, when the fluctuation range of the flow rate of the cooling water to be introduced into the first heat exchanger 12 is reduced, the flow rate of the cooling water can be controlled with “only one valve”. Since the fluctuation range of the flow rate of the cooling water to be introduced into the heat exchanger is large as in the conventional example, it is not necessary to install "multiple valves" to cope with this, Advantages such as cost reduction can be obtained.
[0026]
Further, in the present embodiment, as described above, the temperature difference between the temperature of the cooling water introduced into the first heat exchanger 12 for cooling the brine and the target temperature of the brine is compared with the conventional example of FIG. The cooling water to be introduced into the first heat exchanger 12 is greatly reduced, the flow rate of the cooling water to be introduced into the first heat exchanger 12 is increased as compared with the conventional example, and the valve for introducing the cooling water into the first heat exchanger 12 is also relatively large. Since it is possible to use a device suitable for introducing cooling water, even if only the valve is used, the temperature reduction time of the device when the operation of the device in FIG. The operation efficiency of the apparatus can be increased.
[0027]
Further, in the present embodiment, as described above, the used cooling water used in the first heat exchanger 12 and heated by heat exchange with the brine is not immediately discharged to the outside, but is temporarily discharged to the second. The heat exchanger 15 is used to heat external cooling water. The used cooling water from the first heat exchanger 12 used in the second heat exchanger 15 is used to heat the external cooling water (the heat is exchanged with the external cooling water). As a result, when exiting the second heat exchanger 15, heat is exchanged with cooling water from the outside, and is cooled to some extent. For this reason, in the present embodiment, the temperature of the used cooling water discharged to the outside is prevented from becoming extremely high as in the related art, and the problem of the heat resistance of the material forming the cooling water discharge channel is prevented. (As described in the conventional example of FIG. 2, when the cooling water discharge passage is formed of a hose material, the temperature of the cooling water discharged from the cooling water discharge passage becomes high, so that the hose forming the cooling water discharge passage is formed. The problem of exceeding the heat-resistant temperature of the material) and the problem of increasing the cost by applying a burn prevention treatment to the cooling water discharge passage (as described in the conventional example of FIG. In this case, the temperature (for example, 85 ° C.) of the cooling water discharged from the cooling water discharge channel is transmitted to the metal material and becomes high temperature, so that a burn prevention treatment must be performed and the cost increases. ), Etc. It becomes possible way.
[0028]
Further, in the present embodiment, as described above, the first heat exchanger 12 for cooling the brine is configured such that the brine from the heat load side and the cooling water from the second heat exchanger 15 are the same. The cooling water from the second heat exchanger 15 is heated above the target temperature of the brine by heat exchange with the brine in the first heat exchanger 12. This is to prevent the heat from being sent to the second heat exchanger 15. That is, if the first heat exchanger 12 of FIG. 1 is configured as a counter flow type in which the brine from the heat load side and the cooling water from the second heat exchanger 15 flow in opposite directions. The used cooling water from the first heat exchanger 12 is heated above the target temperature of the brine by heat exchange with the brine in the first heat exchanger 12 and introduced into the second heat exchanger 15; As a result, the cooling water introduced from the outside is heat-exchanged with the used cooling water heated above the target temperature of the brine in the second heat exchanger 15, and becomes higher than the target temperature of the brine. There is a possibility that an inconvenient situation may occur in which the heat is introduced into the first heat exchanger 12 in a state where the heat exchanger is in a state of being heated. In the present embodiment, in order to prevent such inconvenience, the first heat exchanger 12 for cooling the brine is configured as a non-counterflow type as described above (however, the present invention is not limited thereto). In the present invention, if the first heat exchanger 12 is designed so that the cooling water from the outside is not heated in the second heat exchanger 15 to a temperature equal to or higher than the target temperature of the brine under various conditions. It is also possible to configure a convection type).
[0029]
In the present embodiment, as described above, the heat exchange between the used cooling water used in the first heat exchanger 12 and heated by the heat exchange with the brine and the external cooling water is performed. The second heat exchanger 15 is configured as a counter flow type in which the used cooling water used in the first heat exchanger 12 and the cooling water from the outside flow in opposite directions. The heat exchange efficiency in the second heat exchanger 15 is further increased (that is, the temperature of the external cooling water introduced from the second heat exchanger 15 to the first heat exchanger 12 is further increased), and the first heat By reducing the temperature difference between the temperature of the cooling water introduced into the exchanger 12 and the target temperature of the brine, and increasing the flow rate of the cooling water to be introduced into the first heat exchanger 12, the first heat exchange To control the flow rate of the cooling water to be introduced into the heater 12 more easily. .
[0030]
That is, if the second heat exchanger 15 of FIG. 1 is configured as a non-opposite flow type in which the used cooling water used in the first heat exchanger 12 and the external cooling water flow in the same direction as each other. Since the heat exchange efficiency in the second heat exchanger 15 is reduced, the cooling water introduced into the first heat exchanger 12 is compared with the case where the second heat exchanger 15 is of the counterflow type. Becomes relatively low, and the temperature difference between the cooling water temperature introduced into the first heat exchanger 12 and the target temperature of the brine becomes relatively large, and is introduced into the first heat exchanger 12. The flow rate of the cooling water to be cooled is relatively small, and the controllability of the flow rate of the cooling water is relatively reduced. (In the experiment of the present inventor, when the second heat exchanger 15 is of the counterflow type, The flow rate of the cooling water to be introduced into the first heat exchanger 12 is compared with the conventional example of FIG. However, when the second heat exchanger 15 of the apparatus of FIG. 1 is replaced with a non-counterflow type, the cooling water to be introduced into the first heat exchanger 12 The flow rate was less than about twice as compared with the conventional example of FIG. 2). As described above, in the present embodiment, it is desirable that the second heat exchanger 15 be configured as the above-described counter-flow type (however, in the present invention, the second heat exchanger 15 is It can also be configured as a mold).
[0031]
As described above, in the present embodiment, the first heat exchanger 12 and the second heat exchanger 15 are provided, and the second heat exchanger 12 and the second heat exchanger 15 for cooling the brine from the heat load side with cooling water are provided. Since the cooling water preliminarily heated by the second heat exchanger 15 is introduced into the first heat exchanger 12, the cooling water is introduced into the first heat exchanger 12 for cooling the brine. The temperature difference between the temperature of the cooling water and the target temperature of the brine is significantly reduced as compared with the related art, and the flow rate of the cooling water to be introduced into the first heat exchanger 12 is greatly increased. It becomes possible to control the flow rate of the cooling water to be introduced more easily
[0032]
In the present embodiment, as described above, the temperature difference between the cooling water introduced into the first heat exchanger 12 and the target temperature of the brine is reduced, and the cooling water to be introduced into the first heat exchanger 12 is reduced. The fluctuation range of the flow rate of the cooling water is also reduced, and as a result, the flow rate of the cooling water can be controlled with only one valve. In this case, it is possible to reduce the manufacturing and operation costs of the apparatus as compared with the case where the width is large and it is necessary to install a plurality of valves in order to cope with this.
[0033]
Further, in the present embodiment, as described above, the temperature difference between the temperature of the cooling water introduced into the first heat exchanger 12 for cooling the brine and the target temperature of the brine is greatly reduced, and the first heat The flow rate of the cooling water to be introduced into the exchanger 12 is increased, and a valve for introducing the cooling water into the first heat exchanger 12 is also suitable for introducing a relatively large amount of cooling water. Since the apparatus can be used, even when only the valve is used, the temperature reduction time of the apparatus when the operation of the apparatus in FIG. 1 is stopped and the operation shifts to the maintenance can be shortened, and the operation efficiency of the apparatus can be increased. Become like
[0034]
Further, in the present embodiment, as described above, the used cooling water used in the first heat exchanger 12 and heated by heat exchange with the brine is not immediately discharged to the outside, but is temporarily discharged to the second. The heat exchanger 15 is used to heat external cooling water (as a result, the used cooling water from the first heat exchanger 12 is supplied to the second heat exchanger 15 from the outside). As a result of the heat exchange with the cooling water, when the water is discharged from the second heat exchanger 15, the water is cooled to some extent.) Therefore, the temperature of the used cooling water discharged to the outside becomes extremely high as in the related art. And the problem of heat resistance of the material forming the cooling water discharge flow path (when the cooling water discharge flow path is formed of a hose material as described in the conventional example of FIG. The cooling water discharged from the road becomes The problem of exceeding the heat-resistant temperature of the hose material forming the outlet flow path) and the problem of increasing the cost due to the treatment for preventing burns to the cooling water discharge flow path (as described in the conventional example of FIG. When the flow path is formed of a metal material, the temperature of the cooling water discharged from the cooling water discharge flow path (for example, 85 ° C.) is transmitted to the metal material and becomes high temperature, so that a burn prevention treatment must be performed and the cost increases. Problem) can be effectively avoided.
[0035]
Further, in the present embodiment, as described above, the first heat exchanger 12 for cooling the brine is configured such that the brine from the heat load side and the cooling water from the second heat exchanger 15 are the same. Since the configuration is such that the cooling water flows in a non-counterflow type, the used cooling water from the first heat exchanger 12 is heated above the target temperature of the brine by heat exchange with the brine in the first heat exchanger 12. It is heated and introduced into the second heat exchanger 15, and as a result, the used coolant whose externally introduced cooling water is heated to a temperature equal to or higher than the target temperature of the brine in the second heat exchanger 15. This effectively prevents heat from being exchanged with the cooling water and being introduced into the first heat exchanger 12 in a state in which the temperature is higher than the target temperature of the brine.
[0036]
Further, in the present embodiment, as described above, the second heat exchanger 15 for performing heat exchange between the used cooling water used in the first heat exchanger 12 and the cooling water from outside is used. Since the used cooling water used in the first heat exchanger 12 and the cooling water from the outside are configured in a counter-flow type in which the cooling water flows in directions opposite to each other, the heat exchange efficiency in the second heat exchanger 15 is improved. (As a result, the temperature of the cooling water introduced into the first heat exchanger 12 from the second heat exchanger 15 is further increased), and the temperature of the cooling water introduced into the first heat exchanger 12 and the brine are increased. Of the cooling water to be introduced into the first heat exchanger 12, and the control of the flow rate of the cooling water can be made easier.
[0037]
Although the embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications can be made. For example, in the above-described embodiment, the example of the brine supply device including the heat exchanger for cooling the brine with the cooling water (industrial water) has been described. However, the present invention is not limited to the brine supply device, and may be variously. It can be applied to various cooling devices. Further, in the above-described embodiment, an example has been described in which brine is used as a fluid to be cooled and cooling water (industrial water) is used as a cooling fluid. However, in the present invention, the fluid to be cooled is not brine such as pure water. A gas such as steam may be used. In the present invention, the cooling fluid may be a gas such as steam instead of industrial water.
[0038]
【The invention's effect】
As described above, in the fluid cooling device of the present invention, the first and second heat exchangers are provided, and the first heat exchanger for cooling the fluid to be cooled with the cooling fluid is provided. , The cooling fluid preliminarily heated by the second heat exchanger is introduced. Therefore, according to the present invention, the temperature of the cooling fluid introduced into the first heat exchanger for cooling the fluid to be cooled is made higher than before, and as a result, introduced into the first heat exchanger. The temperature difference between the temperature of the cooling fluid to be cooled and the target temperature of the fluid to be cooled is greatly reduced as compared with the related art, and the flow rate of the cooling fluid to be introduced into the first heat exchanger is significantly increased. This makes it easier to control the flow rate of the rejection fluid to be introduced into one heat exchanger.
[0039]
Further, in the present invention, as described above, the temperature difference between the temperature of the cooling fluid introduced into the first heat exchanger and the target temperature of the fluid to be cooled is reduced, and as a result, the first heat exchange The fluctuation range of the flow rate of the cooling fluid to be introduced into the vessel is also reduced. Therefore, according to the present invention, since the fluctuation range of the flow rate of the cooling fluid to be introduced into the heat exchanger is large as in the related art, it is not necessary to install a plurality of valves to cope with the large fluctuation range. Thus, the manufacturing and operation costs of the fluid cooling device can be significantly reduced.
[0040]
Further, in the present invention, as described above, the temperature difference between the temperature of the cooling fluid introduced into the first heat exchanger and the target temperature of the fluid to be cooled is greatly reduced. Since the flow rate of the cooling fluid to be introduced into the heat exchanger is made larger than before, the valve for introducing the cooling fluid to the first heat exchanger is also required to introduce a relatively large amount of cooling fluid. You can now use the right one. Therefore, according to the present invention, even when only the above-mentioned valve is used (even when a plurality of valves are not used), the temperature cooling time of the device when stopping the operation of the fluid cooling device and shifting to the maintenance is reduced. It is possible to improve the operation efficiency of the device by shortening the time.
[0041]
Also, in the present invention, the used cooling fluid used in the first heat exchanger is sent to the second heat exchanger once instead of being discharged to the outside immediately, and the cooling fluid from the outside is sent there. Is used for warming and then discharged (as a result, the used cooling fluid from the first heat exchanger is combined with the external cooling fluid in the second heat exchanger). Since the heat is exchanged, the temperature of the used cooling fluid discharged to the outside becomes extremely low as in the conventional case because the temperature of the used cooling fluid is reduced to a certain degree when discharged from the second heat exchanger to the outside. A high temperature is prevented, and a heat resistance problem occurs when a flow path for discharging a used cooling fluid to the outside is formed of a hose material, and a burn occurs when the flow path is formed of a metal material. Effective against problems such as cost increase due to prevention processing It is possible to avoid.
[0042]
Further, in the present invention, when the first heat exchanger for cooling the cooling target fluid is configured as a non-counterflow type in which the cooling target fluid and the cooling fluid flow in the same direction, The used cooling fluid used in the first heat exchanger is heated above the target temperature of the fluid to be cooled by heat exchange with the fluid to be cooled in the first heat exchanger. (And, consequently, the external cooling which is exchanged with the used cooling fluid in the second heat exchanger and then introduced into the first heat exchanger). The disadvantage that the temperature of the working fluid is heated above the target temperature of the fluid to be cooled and introduced into the first heat exchanger) can be effectively prevented.
[0043]
Further, in the present invention, the second heat exchanger for performing heat exchange between the used cooling fluid used in the first heat exchanger and an external cooling fluid is provided with the first heat exchanger. When configured in a counterflow type in which the used cooling fluid used in the vessel and the external cooling fluid flow in opposite directions, the heat exchange efficiency in the second heat exchanger can be further improved. (As a result, the temperature of the cooling fluid introduced from the second heat exchanger to the first heat exchanger is further increased), and the temperature of the cooling fluid introduced to the first heat exchanger is reduced. The temperature difference between the cooling fluid and the target temperature is made smaller, the flow rate of the cooling fluid to be introduced into the first heat exchanger is made larger, and the flow rate of the cooling fluid introduced into the first heat exchanger is reduced. Control becomes easier.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram for explaining a conventional brine supply device for cooling brine using a heat exchanger using cooling water.
FIG. 2 is a conceptual diagram illustrating a brine supply device including a fluid cooling device according to an embodiment of the present invention.
[Explanation of symbols]
1,11 brine return flow path
2,12,15 heat exchanger
3,13 brine feed channel
4,14,16 Cooling water introduction channel
5,18 Cooling water discharge channel
6,19 Temperature sensor
7,20 control valve
14 Cooling water introduction channel
17 Cooling water transfer channel

Claims (5)

In a fluid cooling device for cooling a fluid to be cooled with a cooling fluid introduced from the outside,
A first heat exchanger for cooling the fluid to be cooled with a cooling fluid sent from a second heat exchanger described below;
The cooling fluid introduced from the outside is heated by the used cooling fluid used in the first heat exchanger, and the heated cooling fluid from the outside is subjected to the first heat exchange. A second heat exchanger for sending the used cooling fluid to an outlet for discharging the used cooling fluid to the outside;
A fluid cooling device comprising: 2. The fluid according to claim 1, wherein the first heat exchanger is a non-opposite flow type heat exchanger that performs heat exchange while the fluid to be cooled and the cooling fluid flow in the same direction. Cooling system. 3. The second heat exchanger according to claim 1, wherein the used cooling fluid from the first heat exchanger and the cooling fluid introduced from the outside flow in opposite directions. A fluid cooling device, which is a counter-flow heat exchanger that performs heat exchange. 4. The fluid cooling device according to claim 1, wherein the fluid to be cooled and the cooling fluid are both liquid. 4. The fluid cooling device according to claim 1, wherein the fluid to be cooled and the cooling fluid are both or one of a gas such as water vapor.

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