JP2004157591A - Vacuum pressure regulating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum pressure regulating device in which vacuum pressure is highly accurately set. <P>SOLUTION: A housing 10 has a vacuum port 11 communicating with a vacuum pump 14 and a pressure regulating port 12 communicating with vacuum pressure operated equipment 16, a communication chamber 18 communicating with the pressure regulating port 12 and a pilot pressure chamber 19 are partitioned with a diaphragm 17 for flow passage opening and closure, and when the diaphragm 17 leaves a flow-passage opening/closing valve 23 equipped with an opening end contacting the diaphragm 17, air flows from the communication chamber 18 to the vacuum port 11. When the flow-passage opening/closing valve 23 is pressed by the diaphragm 17, external air is introduced into the pressure regulating port 12 to regulate the pressure in the vacuum port 12 according to the pressure in the pilot pressure chamber 19. The pressure in the pilot pressure chamber 19 is set by adjusting a spring force applied to a diaphragm 36 for regulating pressure which partitions a vacuum chamber 37 and an atmospheric pressure chamber 38. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a vacuum pressure adjusting device that adjusts the pressure of vacuum, that is, the pressure of negative pressure air supplied to a vacuum operating device.
[0002]
[Prior art]
For example, when negative pressure air, that is, vacuum is supplied from a vacuum pump to a vacuum operating device such as a vacuum cup for vacuum suction of an electronic component or the like as a workpiece, the vacuum pump and the vacuum operating device are connected to each other. A vacuum pressure adjusting device, that is, a vacuum regulator is used therebetween, and the vacuum pressure is adjusted by the vacuum pressure adjusting device and supplied to the negative pressure operating device.
[0003]
As such a vacuum pressure adjusting device, conventionally, for example, as disclosed in Patent Document, a vacuum port connected to a vacuum source such as a vacuum pump, and a pressure adjustment port connected to a negative pressure operating device The communication port to be communicated is opened and closed by a valve body. A diaphragm is attached to the valve body, and a spring force and a pressure on the pressure adjustment port side are urged on one surface of the diaphragm, and an atmospheric pressure is urged on the other surface. The valve body opens and closes the communication port according to the difference, and adjusts the pressure of the pressure adjustment port. By opening and closing the valve body in this manner, the primary side vacuum supplied to the vacuum port from the vacuum pump via the primary side flow path is regulated, and the vacuum pressure operation is performed from the pressure regulation port via the secondary side flow path. We supply to equipment.
[0004]
[Patent Document 1]
JP-A-7-295655
[0005]
[Problems to be solved by the invention]
The vacuum pressure adjusting device is used when the negative pressure air is constantly supplied to the vacuum pressure operating device, when the vacuum pressure adjusting device is used so as to maintain a constant degree of vacuum in a closed space where the negative pressure air does not flow much. In any case, it is desirable that the vacuum pressure connected to the pressure regulating port through the secondary flow path and supplied to the vacuum pressure operating device can be set with high accuracy. In particular, when air is constantly supplied to the vacuum pressure operated device, it is desirable that the vacuum pressure of the pressure adjustment port connected to the vacuum pressure operated device can be set with high accuracy even if the flow rate fluctuates. However, in the case where a spring force is applied to a diaphragm for opening and closing the valve body to maintain the pressure of the pressure adjustment port at a set pressure as in the related art, the inertia force of the coil spring is applied when the diaphragm is operated. In addition, the spring force applied to the diaphragm changes as the contraction amount of the coil spring changes, so if the vacuum flow rate increases, the pressure cannot be adjusted with high accuracy, and the accuracy of the adjustment pressure is limited. was there.
[0006]
In particular, when a large amount of air flows into the negative pressure operating device, it is necessary to increase the opening area of the communication port through which the valve element opens and closes, so use a large-diameter coil spring. Therefore, the size of the vacuum pressure adjusting device must be increased, the response speed of the diaphragm is reduced, and the pressure accuracy is reduced.
[0007]
An object of the present invention is to enable a vacuum pressure adjusted by a vacuum pressure adjusting device to be set with high accuracy.
[0008]
Another object of the present invention is to reduce the size of the vacuum pressure regulator even when the flow rate of vacuum air is increased.
[0009]
[Means for Solving the Problems]
The vacuum pressure adjusting device of the present invention defines a housing in which a vacuum port communicating with a vacuum source and a pressure regulating port communicating with a vacuum pressure operating device are formed, a communication chamber and a pilot pressure chamber communicating with the pressure regulating port. A diaphragm for opening and closing the flow path, and an open end that is opened and closed by contact with the diaphragm, and a flow path for guiding air from the communication chamber toward the vacuum port when the diaphragm moves away from the open end. An on-off valve, an external air introduction valve that is linked to the axial movement of the flow path on-off valve, and introduces outside air into the pressure regulating port when the flow path on-off valve is pressed by the diaphragm; A pressure regulating diaphragm for partitioning a communicating vacuum chamber and an atmospheric pressure chamber, and a pressure regulating diaphragm provided on the pressure regulating diaphragm, and when the pressure in the vacuum chamber decreases, the outside air is supplied to the pilot And a pressure regulating valve for communicating the vacuum port with the pilot pressure chamber and the vacuum chamber when the pressure in the vacuum chamber is increased, and the pressure control valve is connected to the pilot pressure chamber and the communication chamber. The flow path on-off valve is opened and closed by a pressure difference of air.
[0010]
The vacuum pressure adjusting device of the present invention is characterized in that a spring member for applying a pressing force to the diaphragm for pressure adjustment is provided in the vacuum chamber, and a handle for adjusting the spring force of the spring member is rotatably attached to the housing. And
[0011]
The vacuum pressure adjusting device according to the present invention includes a flapper valve that opens and closes a vacuum path that communicates the vacuum port with the pilot pressure chamber and the vacuum chamber, and a regulator that is attached to the pressure regulating diaphragm and whose tip contacts the flapper valve. The pressure regulating valve shaft is formed with the pressure regulating valve, and an air supply hole communicating with the atmospheric pressure chamber, the pilot pressure chamber, and the vacuum chamber is formed when the tip of the pressure regulating valve shaft is separated from the flapper valve. It is characterized by being formed in. Further, the vacuum pressure adjusting device of the present invention is characterized in that a bleed port for gradually supplying outside air to the vacuum chamber is formed in the pressure regulating valve.
[0012]
The vacuum pressure adjusting device of the present invention defines a housing in which a vacuum port communicating with a vacuum source and a pressure regulating port communicating with a negative pressure operating device are formed, a communication chamber communicating with the pressure regulating port, and a pilot pressure chamber. A diaphragm for opening and closing the flow path, and an open end that is opened and closed by contact with the diaphragm, and a flow path for guiding air from the communication chamber toward the vacuum port when the diaphragm moves away from the open end. An on-off valve, an external air introduction valve that is linked to the axial movement of the flow path on-off valve, and introduces outside air into the pressure regulating port when the flow path on-off valve is pressed by the diaphragm; A port for supplying a pilot pressure of a negative pressure to be supplied, wherein the flow path on-off valve is opened and closed by a pressure difference between air in the pilot pressure chamber and the communication chamber. That.
[0013]
The vacuum pressure adjusting device according to the present invention is characterized in that a balancer for applying inertial force to the diaphragm for opening and closing the flow path is provided in the pilot pressure chamber. Further, the vacuum pressure adjusting device of the present invention is characterized in that it has a screw member for setting a position where the outside air introduction valve is interlocked with the flow path on-off valve.
[0014]
According to the present invention, a spring is not attached to a flow passage opening / closing diaphragm that opens and closes a flow passage that connects a vacuum port and a pressure adjustment port, and a pressure difference between a communication chamber and a pilot pressure chamber on both sides thereof is provided. Since the flow path is opened and closed, the diaphragm for opening and closing the flow path has a floating structure. As a result, the diaphragm for opening and closing the flow path opens and closes quickly, and the pressure of the pressure adjustment port is adjusted to the set pressure with high accuracy. In addition, even if a large amount of negative pressure air flows through the vacuum pressure operating device connected to the pressure adjustment port, the pressure of the pressure adjustment port can be adjusted to the set pressure with high accuracy.
[0015]
The pressure of the negative pressure air supplied to the vacuum operation device via the pressure adjustment port can be changed by adjusting the pressure of the pilot pressure chamber. Any of the equations can be varied. In the case of the internal pilot type, since the pressure on the pressure adjustment port side is adjusted by adjusting only the pressure in the pilot pressure chamber, the regulator for pilot chamber pressure adjustment requires almost no flow rate. That is, since the orifice of the pressure regulating valve is small, the pressure regulating diaphragm, the coil spring and the like can be reduced in size.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a sectional view showing a vacuum pressure adjusting device according to an embodiment of the present invention. The vacuum pressure adjusting device has a main body block 10a in which a vacuum port 11 and a pressure adjusting port 12 are formed. A vacuum source such as a vacuum pump 14 is connected to the vacuum port 11 via a primary flow path 13, and a vacuum source 16 such as a vacuum suction tool is connected to the pressure regulating port 12 via a secondary flow path 15. The channels 13 and 15 are formed by hoses and pipes. A female screw is formed in the vacuum port 11 and the pressure adjusting port 12 to which a joint member for connecting a hose or the like is screwed. However, if the housing of the vacuum operation device 16 is formed integrally with the main body block 10a, the vacuum operation device 16 can be directly connected to the pressure adjustment port 12 as a space for pressure adjustment without using the secondary flow path 15. Pressure air can be supplied directly to the
[0017]
The main body block 10a has a substantially rectangular parallelepiped shape, and a plug 10b is screwed to a lower end in FIG. 1, and a pressure regulating block 10c is attached to an upper end. The pressure regulating block 10c has a substantially rectangular parallelepiped base connected to the mounting end face of the main body block 10a and a prism integrated with the base, and a valve holder 10d is mounted on the prism. A cylindrical bonnet 10e is attached to 10d, and these members 10a to 10e form a housing 10 of the vacuum pressure adjusting device.
[0018]
A diaphragm 17 for opening and closing a flow path is incorporated in the housing 10, and an outer peripheral portion of the diaphragm 17 is sandwiched between a main body block 10 a and a pressure regulating block 10 c. A communication chamber 18 formed in communication with the pressure control block 12 and a pilot pressure chamber 19 formed on the pressure adjustment block 10c side are defined.
[0019]
The vacuum port 11 and the pressure regulating port 12 are formed coaxially with openings on two opposing surfaces of the main body block 10a, and the central portion of the main body block 10a accommodates a valve in a direction perpendicular to the respective ports. A hole 21 is formed. One end of the valve housing hole 21 communicates with the communication chamber 18, and the other end is closed by a valve seat block 22. A flow opening / closing valve 23 is mounted in the valve housing hole 21 so as to be reciprocally movable in the axial direction. The communication flow passage 25 communicating with the vacuum port 11 through the communication hole 24 is provided in the flow opening / closing valve 23. Is formed. The front end of the flow path opening / closing valve 23 is an open end of the communication flow path 25, and the open end is opened and closed by contact with the flow path opening / closing diaphragm 17. A stopper 26 is formed in the main body block 10a in order to set the position of the end of the movement stroke of the flow path on-off valve 23 toward the diaphragm 17, and the diaphragm 17 is moved in a state where the flow path on-off valve 23 is in contact with the stopper 26. When separated from the opening end of the flow path opening / closing valve 23, the communication chamber 18 and the communication flow path 25 communicate with each other, and air flows from the pressure adjustment port 12 to the vacuum port 11.
[0020]
On the other hand, when the diaphragm 17 contacts the opening end of the flow path on-off valve 23, the communication flow path 25 is closed, and the flow of air from the pressure adjustment port 12 to the vacuum port 11 is stopped. The diaphragm 17 is not connected with a member such as the flow path on-off valve 23 and is supported in a floating manner so as to deform the space formed in the housing 10. Therefore, the diaphragm 17 contacts the opening end of the passage opening / closing valve 23 due to the pressure difference between the communication chamber 18 and the pilot pressure chamber 19, moves away from the opening end, and further contacts the opening end of the passage opening / closing valve 23. It operates to apply a pressing force to the valve 23. A balancer 28 is attached to a retainer 27 fixed to the diaphragm 17 on the side of the pilot pressure chamber 19 in order to apply an inertial force to the diaphragm 17. An inertia force is applied to the diaphragm 17 by the balancer 28 so as to maintain the state, and the vibration of the diaphragm 17 when the communication passage 25 is opened and closed can be suppressed. The applied inertial force is set to such an extent that the effect of suppressing vibration can be obtained without lowering the responsiveness of the diaphragm 17.
[0021]
A valve housing hole 29 is formed in the plug 10b coaxially with the valve housing hole 21 formed in the main body block 10a, and a relief port 30a communicating with the valve housing hole 29 is formed in the plug 10b. The valve seat block 22 is formed with a communication hole 30b for communicating the pressure adjustment port 12 with the valve housing hole 29. The outside air is introduced into the pressure adjustment port 12 by the relief port 30a and the communication hole 30b. A passage 30 is formed. An outside air introduction valve 31 for opening and closing the outside air introduction passage 30 is accommodated in the valve accommodation hole 29 so as to be able to reciprocate in the axial direction, and between the outside air introduction valve 31 and the valve accommodation hole 29, FIG. As shown in the enlarged view, a gap 32 through which air flows is formed. When the outside air introduction valve 31 contacts the valve seat 22a formed in the valve seat block 22, the outside air introduction passage 30 is closed. A compression coil spring 33 is incorporated in the plug 10b to apply a spring force to the outside air introduction valve 31 in a direction to close the outside air introduction passage 30.
[0022]
An operation pin 34 is screwed to the outside air introduction valve 31 with a male screw portion 35 formed at a base end thereof, and a distal end of the operation pin 34 is in contact with a closed end face of the flow path on-off valve 23, and a compression coil spring 33 is provided. Is applied to the flow path on-off valve 23 via the operating pin 34. When the outside air introduction passage 30 is closed by the outside air introduction valve 31, the position of the operating pin 34 is set by adjusting the external thread portion 35 so that the flow path on-off valve 23 almost contacts the stopper 26, and the flow is controlled by the diaphragm 17. When the passage opening / closing valve 23 is pressed against the spring force of the coil spring 33, the outside air introduction valve 31 opens the outside air introduction passage 30 via the operation pin 34. As described above, the male screw portion 35 functions as a screw member for setting a position where the outside air introduction valve 31 is interlocked with the flow path on-off valve 23.
[0023]
A pressure regulating diaphragm 36 is incorporated in the housing 10, and an outer peripheral portion of the diaphragm 36 is sandwiched between a valve holder 10d and a bonnet 10e, and a vacuum chamber 37 formed in the bonnet 10e by the diaphragm 36 and a valve. An atmospheric pressure chamber 38 formed in the holder 10d is partitioned. The vacuum chamber 37 communicates with the pilot pressure chamber 19 through a pressure adjustment path 39 formed in the housing 10, and the pressure in the pilot pressure chamber 19 is adjusted to substantially the same pressure as the pressure in the vacuum chamber 37. . On the other hand, the atmospheric pressure chamber 38 communicates with the outside through an air introduction port 40, and air at atmospheric pressure is introduced from the air introduction port 40 into the atmospheric pressure chamber 38.
[0024]
A valve housing hole 41 is formed in the valve holder 10d so as to extend through the valve holder 10d in the axial direction. The valve housing hole 41 communicates with the pressure regulating path 39 through a communication passage 42a formed in the valve holder 10d. , Is communicated with the vacuum port 11 by a communication passage 42b formed in the main body block 10a and the pressure regulating block 10c. These communication passages 42a and 42b form a vacuum passage 42 for communicating the vacuum port 11 with the pilot pressure chamber 19 and the vacuum chamber 37.
[0025]
A pressure regulating valve shaft 43 is fitted in the valve receiving hole 41 so as to be reciprocally movable in the axial direction, and the pressure regulating valve shaft 43 is integrated with a retainer 44 fixed to the diaphragm 36 on the vacuum chamber 37 side. In the flow path formed in the pressure regulating block 10c and constituting the vacuum path 42, the vacuum path 42 is closed by contacting the valve seat 20 formed in the valve holder 10d, and the vacuum path 42 is separated from the valve seat 20 and separated therefrom. An open flapper valve 45 is incorporated, and a spring force in a direction to close the vacuum path 42 is applied to the flapper valve 45 by a compression coil spring 46. As shown in FIG. 2C, a gap 45a through which air flows is formed between the outer peripheral surface of the flapper valve 45 and the inner peripheral surface of the communication passage 42b.
[0026]
The front end of the pressure regulating valve shaft 43 comes into contact with the flapper valve 45. When the diaphragm 36 is deformed toward the flapper valve 45, the flapper valve 45 is pushed down through the pressure regulating valve shaft 43 to open the vacuum path 42. I do. When the vacuum path 42 is thus opened, the vacuum port 11 is in communication with the vacuum chamber 37 and the pilot pressure chamber 19. As a result, the pressures in the vacuum chamber 37 and the pilot pressure chamber 19 decrease.
[0027]
The pressure regulating valve shaft 43 is formed with an air supply hole 47 for communicating the open end of the tip with the atmospheric pressure chamber 38. When the diaphragm 36 is deformed away from the flapper valve 45, the flapper valve 45 With the valve closed, the opening of the distal end of the pressure control valve shaft 43 is separated from the flapper valve 45, and the atmospheric pressure chamber 38 and the pressure control path 39 communicate with each other via the air supply hole 47. As a result, the air at atmospheric pressure in the atmospheric pressure chamber 38 is supplied to the vacuum chamber 37 and the pilot pressure chamber 19 via the pressure regulating path 39, and the pressures in the vacuum chamber 37 and the pilot pressure chamber 19 increase to atmospheric pressure. You will get closer. Thus, the pressure regulating valve 48 that regulates the pressure in the vacuum chamber 37 and the pilot pressure chamber 19 by the pressure regulating valve shaft 43 and the flapper valve 45 is formed.
[0028]
Therefore, when the pressure in the vacuum chamber 37 increases and the thrust applied to the diaphragm 36 increases in the direction in which the pressure regulating valve shaft 43 is directed toward the flapper valve 45, the pressure regulating valve shaft 43 opens the vacuum path 42, and the vacuum port 11 is opened. Communicates with the pilot pressure chamber 19 and the vacuum chamber 37, and the vacuum of the vacuum port 11 is supplied to the pilot pressure chamber 19 and the vacuum chamber 37. On the other hand, when the thrust applied to the diaphragm 36 increases in the direction away from the flapper valve 45 with respect to the pressure regulating valve shaft 43, the atmospheric pressure chamber 38 communicates with the pilot pressure chamber 19 and the vacuum chamber 37, and the large pressure in the atmospheric pressure chamber 38 Atmospheric pressure air is supplied to the pilot pressure chamber 19 and the vacuum chamber 37. Further, when the pressure regulating valve shaft 43 comes into contact with the flapper valve 45, the communication between the pilot pressure chamber 19 and the vacuum chamber 37 is interrupted to both the atmospheric pressure chamber 38 and the vacuum port 11.
[0029]
The retainer 44 is formed with pores for communicating the atmospheric pressure chamber 38 and the vacuum chamber 37 via an air supply hole 47, that is, a bleed port 49. Through this bleed port 49, outside air at atmospheric pressure is released from the vacuum chamber. 37 is gradually supplied. Therefore, when the pressure in the vacuum chamber 37 and the pilot pressure chamber 19 is lower than the atmospheric pressure, that is, when the pressure on the pressure adjustment port side is adjusted, the vacuum source is stopped for maintenance or the like, and the entire system is returned to the atmospheric pressure. , The atmospheric pressure air gradually flows into the vacuum chamber 37 and the pilot pressure chamber 19 from the bleed port 49, and the vacuum pressure adjusting device can be stopped in a state in which these are at the atmospheric pressure.
[0030]
A screw shaft 51 is rotatably attached to the closed end of the bonnet 10e, and a handle 52 rotatably mounted outside the bonnet 10e is connected to the screw shaft 51 via a handle guide 53. . A spring receiver 54 is screw-coupled to the male screw portion formed on the screw shaft 51, and a compression coil spring 55 is mounted as a spring member between the spring receiver 54 and the retainer 44. Accordingly, by adjusting the length of expansion and contraction of the compression coil spring 55 by rotating the handle 52, the spring force in the direction of pressing the pressure regulating valve shaft 43 toward the flapper valve 45 against the diaphragm 36 is adjusted. By adjusting the spring force, the pressure in the pilot pressure chamber 19 is adjusted, and the pressure of the negative pressure air supplied to the vacuum pressure operating device 16 via the pressure adjustment port 12 is set.
[0031]
In order to attach the vacuum pressure adjusting device to a predetermined installation location, a nut 56 is screw-coupled to a male screw portion formed on the bonnet 10e. An attaching member (not shown) is provided between the step of the bonnet 10e and the nut 56. Is concluded.
[0032]
Next, a procedure for adjusting the vacuum pressure operating device 16 to a predetermined degree of vacuum by the above-described vacuum pressure adjusting device will be described with reference to FIGS.
[0033]
When reducing the vacuum pressure supplied to the vacuum pressure operating device 16, that is, when decreasing the pressure away from the atmospheric pressure, the handle 52 is rotated to move the spring receiver 54 toward the retainer 44. As a result, the coil spring 55 is compressed, and the pressing force in the direction of pressing the pressure regulating valve shaft 43 toward the flapper valve 45 against the diaphragm 36 increases. As a result, as shown in FIG. 2A, the flapper valve 45 is pressed by the pressure regulating valve shaft 43 to open the vacuum passage 42, and the pilot pressure chamber 19 communicates with the vacuum port 11 via the vacuum passage 42. , The pressure in the pilot pressure chamber 19 decreases.
[0034]
The pressure in the pilot pressure chamber 19 acts on the upper surface in FIG. 1 of the diaphragm 17 for opening and closing the flow path, and the pressure in the communication chamber 18 acts on the lower surface. Therefore, when the pressure in the pilot pressure chamber 19 decreases, the thrust applied to the diaphragm 17 increases in the direction away from the open end of the flow path on-off valve 23, and as shown in FIG. From the pressure control port 12 and the vacuum port 11 via the communication chamber 18. As a result, the pressure at the pressure adjustment port 12 decreases so as to be lower than the atmospheric pressure. That is, the pressure value on the minus side with respect to the atmospheric pressure becomes large, so that the degree of vacuum becomes high.
[0035]
When the pressure of the pressure adjustment port 12 decreases and the pressure of the communication chamber 18 decreases to balance the thrust applied from above and below to the diaphragm 17, as shown in FIG. The part is closed, and the vacuum pressure of the pressure adjusting port 12 is adjusted to a predetermined pressure.
[0036]
Since the vacuum pressure in the pilot pressure chamber 19 is introduced into the vacuum chamber 37 via the pressure adjustment path 39 and acts on the diaphragm 36, when the pressure in the pilot pressure chamber 19 decreases, it opposes the spring force of the compression coil spring 55. The thrust in the direction in which the flapper valve 45 is closed increases on the diaphragm 36, and the pressure regulating valve shaft 43 and the diaphragm 36 are displaced upward in the drawing. When the atmospheric pressure in the atmospheric pressure chamber 38, the vacuum pressure in the vacuum chamber 37, and the spring force of the compression coil springs 46 and 55 are balanced, the vacuum path 42 is closed by the flapper valve 45, and the pilot pressure chamber 19 is set to a predetermined vacuum pressure. Pressure is regulated.
[0037]
On the other hand, when increasing the vacuum pressure supplied to the vacuum operating device 16, that is, when approaching the atmospheric pressure, the handle 52 is rotated in the opposite direction to the above-described case to separate the spring receiver 54 from the retainer 44. Move in the direction. As a result, the coil spring 55 is extended, and the pressing force on the diaphragm 36 in the direction of pressing the pressure regulating valve shaft 43 toward the flapper valve 45 decreases. As a result, as shown in FIG. 2 (B), the pressure regulating valve shaft 43 moves in a direction away from the flapper valve 45 while the flapper valve 45 remains in contact with the valve seat, and the pilot pressure chamber 19 becomes the air supply hole. The communication with the atmospheric pressure chamber 38 is established via the pressure chamber 47, and the pressure in the pilot pressure chamber 19 increases. That is, it approaches the atmospheric pressure.
[0038]
When the pressure in the pilot pressure chamber 19 increases, the thrust in the direction of pressing the flow path on-off valve 23 against the diaphragm 17 increases, and the diaphragm 17 presses the flow path on-off valve 23 as shown in FIG. I do. As a result, the outside air introduction valve 31 is driven via the operating pin 34 in a direction away from the valve seat of the valve seat block 22, and the outside air introduction passage 30 is opened. Therefore, atmospheric pressure outside air flows into the pressure adjustment port 12 from the outside air introduction passage 30, and the pressure in the pressure adjustment port 12 increases. When the pressure of the pressure adjustment port 12 increases, the pressure of the communication chamber 18 increases, and when the thrusts applied to the diaphragm 17 from above and below are balanced, as shown in FIG. After moving, the outside air introduction valve 31 closes the outside air introduction passage 30, and the vacuum pressure of the pressure adjustment port 12 is adjusted to a predetermined pressure.
[0039]
As described above, when the pressure of the pressure adjusting port 12 is changed, the spring force of the spring member 55 is adjusted by rotating the handle 52, and the rotation of the handle 52 causes the pressure adjusting port 12 to move to the vacuum pressure operating device 16. The supplied pressure is set. Further, when the pressure supplied to the vacuum operating device 16 changes due to the operation of the vacuum operating device 16 or the like, the pressure of the pressure adjustment port 12 and the communication chamber 18 also changes. Therefore, the diaphragm 17 and the flow path on-off valve 23 open or close or the outside air introduction valve 31 opens or closes due to the pressure difference between the pilot pressure chamber 19 and the communication chamber 18, and the pressure of the pressure adjustment port 12 is adjusted to the set pressure. You.
[0040]
As described above, the pressure of the pressure adjusting port 12 connected to the vacuum pressure operating device 16 is adjusted by the diaphragm 17 having a floating structure, so that the pressure of the pressure adjusting port 12 fluctuates frequently, Even when a large amount of negative pressure air flows through the port 12, the pressure of the pressure regulating port 12 can be quickly adjusted to a predetermined vacuum pressure.
[0041]
On the other hand, when changing the vacuum pressure supplied to the vacuum pressure operating device 16, the handle 52 is operated to adjust the spring force applied to the diaphragm 36 to adjust the pressure in the pilot pressure chamber 19. Therefore, even when a large amount of negative pressure air is supplied to the vacuum operating device 16, the outer diameters of the diaphragm 36 and the bonnet 10e can be reduced, and the device can be downsized.
[0042]
FIG. 5 is a characteristic diagram showing the operating characteristics of the vacuum pressure adjusting device shown in FIG. 1 in comparison with the conventional example, in which the solid line shows the operating characteristics of the vacuum pressure adjusting device of the present invention, 9 shows the operation characteristics of a conventional example. As shown in the characteristic diagram, in the conventional example, when the flow rate of the air flowing through the pressure adjustment port increases, the pressure of the pressure adjustment port becomes higher than a set value. , The pressure on the pressure adjustment port side can be maintained at the set pressure.
[0043]
As shown in FIG. 5, as the suction flow rate increases, the pressure in the pressure adjustment port 12 becomes larger than the set pressure. However, the outer diameter of the diaphragm 17 for opening and closing the flow path is increased and the inner diameter of the communication flow path 25 is increased. For example, the value of the suction flow rate that can keep the pressure of the pressure adjustment port 12 constant can be increased without increasing the outer diameter of the pressure adjustment diaphragm 36.
[0044]
FIG. 6 is a sectional view showing a vacuum pressure adjusting device according to another embodiment of the present invention. In FIG. 6, members common to those shown in FIGS. 1 to 3 are denoted by the same reference numerals. I have. In this vacuum pressure adjusting device, a housing 10 is formed by a main body block 10a, a plug 10b, and a communication block 10f, and the main body block 10a and the plug 10b are the same as those shown in FIG. The communication block 10f has a substantially rectangular parallelepiped base connected to the mounting surface of the main body block 10a and a cylindrical part integrated with the base, and a diaphragm 17 defines a pilot pressure chamber 19 in a partitioned manner.
[0045]
The communication block 10f is provided with a communication port 62 that communicates with the pilot pressure chamber 19 via a throttle 61. The communication port 62 is supplied with a vacuum pressure regulated by a pressure controller 63 such as an electropneumatic regulator. It has become so. As described above, the vacuum pressure adjusting device shown in FIG. 6 is of an external pilot type in which the pressure in the pilot pressure chamber 19 is adjusted by the pressure controller 63 as pressure adjusting means provided outside the device. . Therefore, when changing the vacuum pressure supplied to the pressure adjustment port 12, the pressure of the air supplied to the communication port 62 is changed, and the negative pressure air of the set pressure is supplied to the pressure adjustment port 12. You.
[0046]
The present invention is not limited to the above embodiment, and can be variously modified without departing from the gist thereof.
[0047]
【The invention's effect】
According to the present invention, since the diaphragm for opening and closing the flow path has a floating structure and operates only by the difference in pressure applied to the diaphragm, the diaphragm for opening and closing the flow path can be quickly opened and closed, and can be adjusted with high precision. The pressure of the pressure port is adjusted to the set pressure. In addition, even if a large amount of negative pressure air flows through the vacuum pressure operating device connected to the pressure adjustment port, the pressure of the pressure adjustment port can be adjusted to the set pressure with high accuracy. The pressure of the negative pressure air supplied to the vacuum operation device via the pressure adjustment port can be changed by adjusting the pressure of the pilot pressure chamber. Any of the equations can be varied.
[Brief description of the drawings]
FIG. 1 is a sectional view showing a vacuum pressure adjusting device according to an embodiment of the present invention.
2 (A) and 2 (B) are partially enlarged sectional views of FIG. 1 showing an operating state of a pressure regulating diaphragm, and FIG. 2 (C) is a sectional view taken along line AA in FIG. 2 (A). It is.
FIGS. 3A and 3B are partially enlarged sectional views of FIG. 1 showing an operating state of a diaphragm for opening and closing a flow path.
FIG. 4 is a sectional view taken along line BB in FIG.
FIG. 5 is a characteristic diagram showing operating characteristics of the vacuum pressure adjusting device of the present invention in comparison with a conventional example.
FIG. 6 is a sectional view showing a vacuum pressure adjusting device according to another embodiment of the present invention.
[Explanation of symbols]
10 Housing
10a Body block
10b plug
10c Pressure regulating block
10d valve holder
10e bonnet
11 Vacuum port
12 Pressure adjustment port
13 Primary flow path
14 Vacuum pump
15 Secondary flow path
16 Vacuum pressure operated equipment
17 Diaphragm for opening and closing the flow path
18 Communication room
19 Pilot pressure chamber
21 Valve accommodation hole
22 Valve seat block
23 Flow path on-off valve
24 communication hole
25 Communication channel
26 Stopper
27 Retainer
28 Balancer
29 Valve accommodation hole
30 outside air introduction route
30a relief port
30b communication hole
31 Outside air introduction valve
32 gap
33 Coil spring
34 actuation pin
35 Male thread
36 Diaphragm for pressure regulation
37 vacuum chamber
38 Atmospheric pressure chamber
39 Pressure regulator
40 Atmosphere introduction port
41 Valve accommodation hole
42 vacuum path
42a Connecting passage
42b Connecting passage
43 Pressure regulating valve shaft
44 Retainer
45 Flapper valve
46 Compression coil spring
47 Atmosphere supply hole
48 Pressure regulating valve
49 Bleed port
51 Screw shaft
52 handle
53 Handle Guide
54 Spring support
55 Compression coil spring
56 nuts
61 Aperture
62 Communication port
63 pressure controller (pressure adjusting means)

Claims (7)

A housing in which a vacuum port communicating with a vacuum source and a pressure regulating port communicating with a vacuum pressure operating device are formed,
A diaphragm for opening and closing a flow path that partitions a communication chamber and a pilot pressure chamber that communicate with the pressure adjustment port,
A flow opening / closing valve that has an open end that is opened and closed by contact with the diaphragm, and guides air from the communication chamber toward the vacuum port when the diaphragm separates from the open end;
Interlocking with the axial movement of the flow path on-off valve, an outside air introduction valve for introducing outside air to the pressure regulating port when the flow path on-off valve is pressed by the diaphragm,
A diaphragm for pressure regulation that partitions a vacuum chamber and an atmospheric pressure chamber communicating with the pilot pressure chamber,
When the pressure in the vacuum chamber is reduced, the air is supplied to the pilot pressure chamber and the vacuum chamber when the pressure in the vacuum chamber decreases, and when the pressure in the vacuum chamber increases, the vacuum port, the pilot pressure chamber, and the vacuum A pressure regulating valve for communicating with the chamber,
A vacuum pressure regulator, wherein the flow path on-off valve is opened and closed by a pressure difference between air in the pilot pressure chamber and the communication chamber. 2. The vacuum pressure adjusting device according to claim 1, wherein a spring member for applying a pressing force to the pressure regulating diaphragm is provided in the vacuum chamber, and a handle for adjusting a spring force of the spring member is rotatably attached to the housing. A vacuum pressure adjusting device characterized by the above-mentioned. 3. The vacuum pressure adjusting device according to claim 1, wherein a flapper valve for opening and closing a vacuum path for communicating the vacuum port with the pilot pressure chamber and the vacuum chamber, and a flapper valve attached to the pressure regulating diaphragm and having a distal end. The pressure regulating valve shaft is formed by a pressure regulating valve shaft that comes into contact with the pressure regulating valve shaft, and an atmosphere supply hole that communicates with the atmospheric pressure chamber, the pilot pressure chamber, and the vacuum chamber when the tip of the pressure regulating valve shaft is separated from the flapper valve. A vacuum pressure adjusting device formed on the pressure regulating valve shaft. 4. The vacuum pressure regulator according to claim 1, wherein a bleed port for gradually supplying outside air to the vacuum chamber is formed in the pressure regulating valve. 5. A housing formed with a vacuum port communicating with a vacuum source and a pressure regulating port communicating with a negative pressure operating device,
A diaphragm for opening and closing a flow path that partitions a communication chamber and a pilot pressure chamber that communicate with the pressure adjustment port,
A flow opening / closing valve that has an open end that is opened and closed by contact with the diaphragm, and guides air from the communication chamber toward the vacuum port when the diaphragm separates from the open end;
Interlocking with the axial movement of the flow path on-off valve, an outside air introduction valve for introducing outside air to the pressure regulating port when the flow path on-off valve is pressed by the diaphragm,
A port for supplying a negative pilot pressure to be supplied to the pilot pressure chamber,
A vacuum pressure regulator, wherein the flow path on-off valve is opened and closed by a pressure difference between air in the pilot pressure chamber and the communication chamber. The vacuum pressure adjusting device according to claim 1, wherein a balancer that applies an inertial force to the diaphragm for opening and closing the flow path is provided in the pilot pressure chamber. The vacuum pressure adjusting device according to claim 1, further comprising a screw member that sets a position where the outside air introduction valve is interlocked with the flow path on-off valve.

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