JP2004156981A5 - - Google Patents

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Publication number
JP2004156981A5
JP2004156981A5 JP2002322026A JP2002322026A JP2004156981A5 JP 2004156981 A5 JP2004156981 A5 JP 2004156981A5 JP 2002322026 A JP2002322026 A JP 2002322026A JP 2002322026 A JP2002322026 A JP 2002322026A JP 2004156981 A5 JP2004156981 A5 JP 2004156981A5
Authority
JP
Japan
Prior art keywords
pupil diameter
objective lens
optical system
illumination optical
changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002322026A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004156981A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002322026A priority Critical patent/JP2004156981A/ja
Priority claimed from JP2002322026A external-priority patent/JP2004156981A/ja
Publication of JP2004156981A publication Critical patent/JP2004156981A/ja
Publication of JP2004156981A5 publication Critical patent/JP2004156981A5/ja
Pending legal-status Critical Current

Links

JP2002322026A 2002-11-06 2002-11-06 形状測定装置 Pending JP2004156981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002322026A JP2004156981A (ja) 2002-11-06 2002-11-06 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002322026A JP2004156981A (ja) 2002-11-06 2002-11-06 形状測定装置

Publications (2)

Publication Number Publication Date
JP2004156981A JP2004156981A (ja) 2004-06-03
JP2004156981A5 true JP2004156981A5 (enExample) 2005-10-27

Family

ID=32802330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002322026A Pending JP2004156981A (ja) 2002-11-06 2002-11-06 形状測定装置

Country Status (1)

Country Link
JP (1) JP2004156981A (enExample)

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