JP2004144434A - Fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fan filter unit capable of securing sufficient ceiling height, and easily carrying out maintenance or the like of a lighting system. <P>SOLUTION: Since in the FFU 10, the lighting system 48 is built in a space 50, the ceiling height can be raised by eliminating a lighting system from a lower part of a system ceiling frame 20. Since a partially closing member 64 is provided in an upper part of a partition space 50, maintenance of the lighting system 48 can be carried out from a ceiling chamber 14 side. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fan filter unit, and more particularly to a fan filter unit disposed on a ceiling of a clean room.
[0002]
[Prior art]
A fan filter unit (hereinafter, FFU) is generally arranged on a ceiling of a clean room. In this FFU, a fan and a clean filter are provided in a casing, air is filtered by the clean filter by the fan, and the obtained clean air is supplied into a clean room (for example, see Patent Document 1).
[0003]
[Patent Document 1]
JP-A-9-206527
[0004]
[Problems to be solved by the invention]
In a clean room equipped with such a conventional FFU, an illuminating device is installed on the underside of the ceiling bar. For this reason, there has been a problem that the height from the floor to the ceiling is reduced by the illumination device. Furthermore, since the lighting device is mounted on the lower surface of the ceiling bar, the semiconductor manufacturing device and the like arranged in the room are obstructive, and the light bulb of the lighting device may not be replaced in some cases.
[0005]
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a fan filter unit that can secure a ceiling height and can easily perform maintenance of a lighting device and the like.
[0006]
[Means for Solving the Problems]
According to a first aspect of the present invention, there is provided a fan filter unit including a casing, a fan provided in the casing, and a clean filter provided in the casing below the fan. The lighting device is characterized in that a space for disposing the lighting device is formed by dividing the portion.
[0007]
According to the first aspect of the present invention, since the space inside the casing is formed by dividing a part of the inside of the casing, the lighting device can be built in the fan filter unit, and a sufficient ceiling height can be secured. .
[0008]
According to the second aspect of the present invention, a detachable half-close plate is attached to the upper part of the space of the casing where the lighting device is arranged, so that maintenance of the lighting device can be performed from the ceiling chamber side.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of a fan filter unit (FFU) according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a conceptual diagram of a clean room 12 using a fan filter unit 10 according to the present invention.
[0010]
As shown in FIG. 1, the clean room 12 mainly includes a ceiling chamber 14, a room 16, and an underfloor chamber 18 in which the FFU 10 is provided. The ceiling chamber 14 and the room 16 are defined by a system ceiling frame 20, and the room 16 and the underfloor chamber 18 are defined by a grating floor 22. The ceiling chamber 14 and the underfloor chamber 18 are connected via a return area 15.
[0011]
The system ceiling frame 20 is partitioned in a lattice shape, and regularly formed with openings 24, 24,..., FFUs 10, 10,. Reference numerals 21, 21... Are hanging metal fittings for supporting the system ceiling frame 20 from the ceiling 13 of the clean room 12. Below the system ceiling frame 20, a chamber 16 in which the semiconductor manufacturing apparatus 5 and the like are installed is formed.
[0012]
An exhaust duct 26 is provided in the underfloor chamber 18, and a part of the air discharged from the grating floor 22 is exhausted to the outside through the exhaust duct 26. An air supply duct 28 is provided in the ceiling chamber 14, and outside air is supplied to the ceiling chamber 14 via the air supply duct 28.
[0013]
FIG. 2A is a side sectional view of the fan filter unit 10 according to the present invention, and FIG. 2B is a plan view thereof.
[0014]
The FFU 10 includes a fan 44, a clean filter 46, and the like that are built in the casing 40. Partition walls 54, 54 are provided on both sides inside the casing 40, and the inside of the casing 40 is divided by the partition walls 54, 54 to form spaces 50, 50. A lighting device 48 is installed in the space 50, and the lighting device 48 is connected to a lighting power connector 62 via a wiring (not shown).
[0015]
Semi-closed plates 64, 64 are detachably provided on the upper surfaces of the spaces 50, 50, and aluminum expanded metals 66, 66 are provided at positions below the spaces 50, 50. The semi-closed plate 64 is formed of a perforated plate. In place of the aluminum expanded metal, other members having light transmissivity and air permeability, such as SUS expanded metal, PVC wire mesh, and aluminum lattice louver, may be used according to the intended use. Reference numeral 61 denotes a power connector box.
[0016]
A fan 44 is provided at the center of the casing 40, and the fan 44 is rotated by a motor (not shown). At an upper portion of the casing 40, a fan guard 45 for preventing entry of an obstacle is provided. The motor of the fan 44 is connected to the FFU power connector 60.
[0017]
A clean filter 46 is provided below the casing 40 below the fan 44.
[0018]
Next, the operation of the FFU 10 configured as described above will be described below.
[0019]
When the fan 44 of the FFU 10 is driven, air in the ceiling chamber 14 (see FIG. 1) is sucked into the casing 40. The suction air removes dust in the air by a cleaning filter 46 and is supplied to the chamber 16 as clean air. In FIG. 1, this clean air is discharged to the underfloor chamber 18 through the grating floor 22 together with the dust floating in the chamber 16. Part of the air containing dust discharged into the underfloor chamber 18 is exhausted to the outside via the exhaust duct 26, and the remaining air is returned to the ceiling chamber 14 via the return area 15 as return air. This return air is sucked into the FFU 10 again together with the outside air supplied from the air supply duct 28.
[0020]
Furthermore, since the ceiling chamber 14 has a negative pressure as compared with the chamber 16, air around the lighting device 48 is sucked into the ceiling chamber 14 via the semi-closed plate 64, and heat and dust generated around the lighting device 48 at this time are also removed. Released into the ceiling chamber 14. Therefore, it is possible to prevent heat and dust caused by the lighting device 48 from staying near the ceiling surface of the room 1.
[0021]
In the FFU 10, the lighting device 48 is built in the space 50, and the FFU 10 and the lighting device 48 are integrated, so that a sufficient ceiling height can be secured. In addition, since the lighting device is eliminated from the lower part of the system ceiling frame 20, the lighting can be easily replaced from the ceiling chamber 14 side.
[0022]
Further, since the semi-closed plate 64 is provided on the upper surface of the space 50, the maintenance of the lighting device 48 can be easily performed from the ceiling chamber 14 side. That is, the semi-closed plate 64 can be removed from the ceiling chamber 14 side to replace the light bulb of the lighting device 48 and the like.
[0023]
Further, in the conventional FFU mounting work, the FFU wiring, the lighting fixture mounting, and the lighting fixture wiring work procedure were required after the FFU mounting, whereas in the FFU 10 according to the present invention, the FFU power connector 60 and the lighting power supply were mounted after the FFU 10 was mounted. Since the work is completed by joining the connectors 62, the work can be simplified.
[0024]
The fan filter unit according to the present invention described above is not limited to the above embodiment. For example, in the FFU 10 according to the present embodiment, an example is shown in which the lighting device 48 is built in. However, the present invention is not limited to this, and a speaker, a fire detector, and the like can be built in the space 50. These devices can be applied to the FFU 10.
[0025]
Further, although an example in which the spaces 50 are provided on both sides of the FFU 10 has been described, the spaces 50 may be provided on only one side.
[0026]
【The invention's effect】
According to the fan filter unit of the present invention, the space inside the casing is divided to form a space for disposing the lighting device. Therefore, the lighting device can be built in the fan filter unit, and a sufficient ceiling height can be secured. Further, since the detachable semi-closed plate is attached to the upper part of the space, the maintenance of the lighting device can be easily performed. Further, heat and dust generated in the lighting device can be released to the ceiling chamber through the semi-closed plate.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram of a clean room using a fan filter unit according to an embodiment of the present invention. FIG. 2 is a side sectional view and plan view showing a fan filter unit according to an embodiment of the present invention.
Reference Signs List 10: fan filter unit, 12: clean room, 16: room, 40: casing, 44: fan, 46: clean filter, 48: lighting device, 50: space, 54: partition wall, 64: semi-closed plate

Claims (2)

A casing,
A fan provided inside the casing;
A clean filter provided in the casing below the fan;
A fan filter unit, wherein a space for disposing a lighting device is formed by dividing a part of the inside of the casing. 2. The fan filter unit according to claim 1, wherein a detachable half-close plate is attached to the casing above a space where the lighting device is arranged. 3.

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