JP2006292219A - Clean room - Google Patents

Clean room Download PDF

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JP2006292219A
JP2006292219A JP2005111143A JP2005111143A JP2006292219A JP 2006292219 A JP2006292219 A JP 2006292219A JP 2005111143 A JP2005111143 A JP 2005111143A JP 2005111143 A JP2005111143 A JP 2005111143A JP 2006292219 A JP2006292219 A JP 2006292219A
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air
room
clean room
heat exchange
exchange device
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Yoshinobu Suzuki
良延 鈴木
Kazuki Mizuhara
一樹 水原
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Shimizu Construction Co Ltd
Shimizu Corp
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Shimizu Construction Co Ltd
Shimizu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce a building floor height, to reduce running costs of a heat exchanger and an air cleaner, and to improve flexibility of a design. <P>SOLUTION: This clean room is disposed with the heat exchangers 1 each in a form wherein air sucked from a bottom part is blown off to a periphery side direction in an upper part of a room inside 10, is disposed with the air cleaners 2 each in a form wherein air sucked from a side part is blown off downward by an air introduction member 3, and the air treated by the heat exchangers 1 is treated by the air cleaners 2 and are circulated in the room inside 10. Bottom parts of the heat exchangers 1 and the air cleaners 2 are respectively arranged to be disposed at the same height, and a ceiling height of the room inside 10 is reduced to reduce the building floor height. Because centrally blowing off the air toward suction ports of the air cleaners 2 from the heat exchanger 1, the air can be sent even if the heat exchanger 1 and the air cleaner 2 are taken away from each other. As a result, the flexibility of the design is improved. By independently installing the heat exchanger 1 and the air cleaner 2 according to a heat load and cleanliness of the clean room, the running costs of the heat exchanger 1 and the air cleaner 2 can be reduced. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、熱交換装置(FCU)と空気清浄装置(FFU)とにより室内の空気の熱処理および清浄処理を適宜行えるようにしたクリーンルームに関するものである。   The present invention relates to a clean room in which heat treatment and cleaning treatment of indoor air can be appropriately performed by a heat exchange device (FCU) and an air cleaning device (FFU).

従来、室内の空気を吸込んで冷暖房負荷を処理した空気を室内に吹出す熱交換装置(FCU(Fan Coil Unit))と、熱交換装置の吹出した空気を吸込んで清浄処理した空気を室内に吹出す空気清浄装置(FFU(Fan Filter Unit))とを室内の上部に配置したクリーンルームがある。このクリーンルームは、熱交換装置が熱処理した空気を空気清浄装置が清浄処理して吹出し、空気清浄装置が吹出して室内を対流した空気を熱交換装置が吸込んで処理して室内を循環する。この従来のクリーンルームでは、無駄な風量を生じさせることがなく運転コストを低減することができる。また、熱交換装置および空気清浄装置を共に同室内に配置し気流により空気の移動を行うためダクトが不要となり、スペースを有効利用できる。また、ダクト工事にかかる建築コストが低減でき、施工期間を短くできる(例えば、特許文献1参照)。   Conventionally, a heat exchange device (FCU (Fan Coil Unit)) that sucks indoor air and processes air-conditioning load and blows the air that has been blown into the room by sucking the air blown from the heat exchanger. There is a clean room in which an air purifier (FFU (Fan Filter Unit)) to be placed is arranged in the upper part of the room. In this clean room, air that has been heat-treated by the heat exchange device is cleaned and blown by the air purifier, and air that has been blown by the air cleaner and convected in the room is sucked and processed by the heat exchanger and circulated in the room. In this conventional clean room, it is possible to reduce the operation cost without generating a useless air volume. Further, since both the heat exchange device and the air cleaning device are arranged in the same room and the air is moved by the air current, a duct is not required, and the space can be used effectively. Moreover, the construction cost concerning a duct construction can be reduced and a construction period can be shortened (for example, refer patent document 1).

特開2004−278887号公報JP 2004-278887 A

しかしながら、従来のクリーンルームでは、熱交換装置は底部から空気を吸込んで側部に吹出す構成であり、空気清浄装置は天部から空気を吸込んで底部に吹出す構成である。そこで、熱交換装置を上方に配置して空気清浄装置をその側部下方に配置してある。このため、空気清浄装置の底部は、熱交換装置の底部に対して例えば600mm程度下方にある。この結果、クリーンルームの室内の天井の高さが空気清浄装置の底部の高さ位置で規定されることになり、空気清浄装置と熱交換装置との高低差の分だけクリーンルームの天井高さが嵩み建物階高が高くなるという不都合があった。さらに、熱交換装置の側部から吹出した空気を空気清浄装置の天部から吸込むため、空気の循環を考慮すると相互の距離間が決められるのでクリーンルームの設計に自由度が乏しくなってしまう。   However, in the conventional clean room, the heat exchange device is configured to suck air from the bottom and blow it out to the side, and the air cleaning device is configured to suck air from the top and blow it out to the bottom. Therefore, the heat exchanging device is disposed above and the air purifier is disposed below the side. For this reason, the bottom of the air cleaning device is, for example, about 600 mm below the bottom of the heat exchange device. As a result, the height of the ceiling inside the clean room is defined by the height position of the bottom of the air purifier, and the height of the ceiling of the clean room is increased by the difference in height between the air purifier and the heat exchange device. There was an inconvenience that the building floor height was high. Furthermore, since the air blown out from the side of the heat exchange device is sucked from the top of the air purifier, the distance between them can be determined in consideration of the circulation of the air, so that the degree of freedom in designing the clean room is reduced.

本発明は、上記実情に鑑みて、建物階高を低くし、熱交換装置および空気清浄装置のランニングコストを低減し、設計の自由度を向上することができるクリーンルームを提供することを目的とする。   In view of the above circumstances, an object of the present invention is to provide a clean room that can reduce the building floor height, reduce the running cost of the heat exchange device and the air cleaning device, and improve the degree of design freedom. .

上記の目的を達成するために、本発明の請求項1に係るクリーンルームは、室内の上部に配置されて前記室内の空気を吸込んで冷暖房負荷を処理した空気を前記室内に吹出す熱交換装置と、前記室内の上部に配置されて前記熱交換装置の吹出した空気を吸込んで清浄処理した空気を前記室内に吹出す空気清浄装置とを備えたクリーンルームにおいて、前記熱交換装置は底部から吸込んだ空気を周側方に吹出す形態で配置してあり、前記空気清浄装置は側部から吸込んだ空気を下方に向けて吹出す形態で配置してあることを特徴とする。   In order to achieve the above object, a clean room according to claim 1 of the present invention includes a heat exchange device that is disposed in an upper part of a room and sucks the air in the room and blows out air that has been subjected to a cooling / heating load. In a clean room provided with an air purifier arranged in the upper part of the room and sucking in air blown out of the heat exchange device and blowing out the purified air into the room, the heat exchange device sucks air from the bottom. The air purifier is arranged in a form in which the air sucked in from the side is blown out downward.

本発明の請求項2に係るクリーンルームは、上記請求項1において、前記空気清浄装置は一側部から吸込んだ空気を他側部から吹出す形態で配置してあり、当該他側部には吹出される空気を下方に向けて導く導風部材を設けてあることを特徴とする。   A clean room according to a second aspect of the present invention is the clean room according to the first aspect, wherein the air purifier is arranged in a form in which air sucked from one side is blown out from the other side, and is blown out to the other side. An air guide member that guides the air to be directed downward is provided.

本発明に係るクリーンルームは、室内の上部において、底部から吸込んだ空気を周側方に吹出す形態で熱交換装置を配置し、側部から吸込んだ空気を下方に向けて吹出す形態で空気清浄装置を配置して、熱交換装置で処理された空気を空気清浄装置で処理して室内に循環させる。この結果、室内にクリーンルームの天井やリターンチャンバーを要さないので、必要とするクリーンルームの天井高さを得た上で建物階高を低くすることができる。   The clean room according to the present invention arranges a heat exchange device in a form in which air sucked in from the bottom is blown out to the side in the upper part of the room, and is air-cleaned in a form in which air sucked in from the side is blown out downward. An apparatus is arrange | positioned, the air processed with the heat exchange apparatus is processed with an air purifier, and it circulates in a room | chamber interior. As a result, since the ceiling of the clean room and the return chamber are not required in the room, the height of the building floor can be lowered after obtaining the required ceiling height of the clean room.

熱交換装置および空気清浄装置の互いの底部を水平方向に揃えて同一高さに配置できる。この結果、クリーンルームの必要天井高さを得た上で室内の天井高さを低くして、建物階高をさらに低くすることができる。また、熱交換装置および空気清浄装置の高さを揃えたことで、電源供給用のケーブルや、冷水配管などの配置が容易になる。   The bottom portions of the heat exchange device and the air cleaning device can be arranged at the same height in the horizontal direction. As a result, the required ceiling height of the clean room can be obtained and the indoor ceiling height can be lowered to further reduce the building floor height. Further, by arranging the heights of the heat exchange device and the air cleaning device, it is easy to arrange a power supply cable, a cold water pipe, and the like.

空気清浄装置の吸込口に向けて熱交換装置から集中的に空気を吹出すため、熱交換装置と空気清浄装置とを離隔しても空気を送ることが可能である。この結果、クリーンルームの設計の自由度を向上することができる。さらに、熱交換装置と空気清浄装置とをクリーンルームの熱負荷および清浄度に応じて独立にも設置できるので、熱交換装置および空気清浄装置のランニングコストを低減することができる。   Since air is intensively blown from the heat exchange device toward the suction port of the air purification device, it is possible to send air even if the heat exchange device and the air purification device are separated. As a result, the degree of freedom in designing the clean room can be improved. Furthermore, since the heat exchange device and the air cleaning device can be installed independently according to the heat load and cleanliness of the clean room, the running cost of the heat exchange device and the air cleaning device can be reduced.

また、本発明に係るクリーンルームは、空気清浄装置の吹出口に空気を下方に向けて導く導風部材を設けた。この結果、従前からある空気清浄装置を横向きにして採用することが可能なので、特別に空気清浄装置を設計する必要がない。   Moreover, the clean room which concerns on this invention provided the air guide member which guides air toward the downward direction to the blower outlet of an air purifier. As a result, it is possible to employ a conventional air purifier in a horizontal orientation, and it is not necessary to design an air purifier specially.

以下に添付図面を参照して、本発明に係るクリーンルームの好適な実施の形態を詳細に説明する。なお、この実施の形態によりこの発明が限定されるものではない。   Hereinafter, preferred embodiments of a clean room according to the present invention will be described in detail with reference to the accompanying drawings. Note that the present invention is not limited to the embodiments.

図1は本発明に係るクリーンルームの実施の形態を示す概略図である。図1に示すように本実施の形態におけるクリーンルームは、床10a、天井10bおよび周壁10cで囲まれた室内10の上部に熱交換装置1および空気清浄装置2を配置してある。   FIG. 1 is a schematic view showing an embodiment of a clean room according to the present invention. As shown in FIG. 1, in the clean room according to the present embodiment, the heat exchange device 1 and the air cleaning device 2 are arranged in the upper part of the room 10 surrounded by the floor 10a, the ceiling 10b, and the peripheral wall 10c.

熱交換装置1は、FCU(Fan Coil Unit)であり室内10の空気を吸込んで冷暖房負荷を熱処理(熱除去)した空気を室内10に吹出す。具体的に熱交換装置1は、箱形のケーシングの底部を吸込口とし、周側部を吹出口としてある。この熱交換装置1は、例えば吊りボルトやワイヤなどの吊下部材(図示せず)によって天井10bから適宜間隔をおいて吊り下げた状態にして吊設してある。   The heat exchange device 1 is an FCU (Fan Coil Unit), sucks air in the room 10 and blows out air that has been heat-treated (heat removed) from the air conditioning load. Specifically, the heat exchange device 1 has a bottom portion of a box-shaped casing as a suction port and a peripheral side portion as a blow-out port. The heat exchanging device 1 is suspended in a state where it is suspended from the ceiling 10b at an appropriate interval by a suspension member (not shown) such as a suspension bolt or a wire.

空気清浄装置2は、FFU(Fan Filter Unit)であり室内10の空気を吸込んで清浄処理した空気を室内10に吹出す。具体的に空気清浄装置2は、箱形のケーシングの一側部を吸込口として当該吸込口にファン2aを配置してあり、他側部を吹出口として当該吹出口にフィルタ2bを配置してある。フィルタ2bとしては、例えばHEPA(High Efficiency Particulate Air)フィルタである。   The air cleaning device 2 is an FFU (Fan Filter Unit) and sucks the air in the room 10 and blows out the cleaned air into the room 10. Specifically, the air cleaning device 2 has a fan 2a arranged at one side of the box-shaped casing as a suction port, and a filter 2b arranged at the outlet as the other side. is there. The filter 2b is, for example, a HEPA (High Efficiency Particulate Air) filter.

また、空気清浄装置2の吹出口には、導風部材3が設けてある。導風部材3は、吹出口の上端部から側方に延在しつつ下方に向けて湾曲または折曲した板材からなり、空気清浄装置2の他側部において下方に向く開口3aを形成してある。つまり、導風部材3は、空気清浄装置2の吹出口を覆って下方に向く開口3aを形成し、空気清浄装置2の他側部の吹出口から吹出される空気を下方に向けて導くものである。また、開口3aには、空気の流れを整える整流板3bが設けてある。   An air guide member 3 is provided at the outlet of the air cleaning device 2. The air guide member 3 is made of a plate material that is bent or bent downward while extending laterally from the upper end portion of the air outlet, and forms an opening 3a that faces downward in the other side portion of the air cleaning device 2. is there. That is, the air guide member 3 forms an opening 3a that covers the air outlet of the air cleaning device 2 and faces downward, and guides the air blown from the air outlet of the other side of the air cleaning device 2 downward. It is. The opening 3a is provided with a rectifying plate 3b that regulates the air flow.

上記空気清浄装置2は、熱交換装置1の周側部において吸込口を熱交換装置1の吹出口に向けた形態で、例えば吊りボルトやワイヤなどの吊下部材(図示せず)によって天井10bから適宜間隔をおいて吊り下げた状態にして吊設してある。   The air purifying device 2 has a shape in which the suction port is directed to the air outlet of the heat exchanging device 1 in the peripheral side portion of the heat exchanging device 1, and the ceiling 10b is formed by a hanging member (not shown) such as a hanging bolt or a wire. Are suspended in a state where they are suspended at appropriate intervals.

また、熱交換装置1および空気清浄装置2は、相互のケーシングの底部をほぼ水平方向に揃えて配置してある。   Moreover, the heat exchange apparatus 1 and the air purifying apparatus 2 are arrange | positioned, aligning the bottom part of a mutual casing in the substantially horizontal direction.

本実施の形態におけるクリーンルームは、熱交換装置1の周囲に空気清浄装置2を配置した空調清浄ユニットを構成してある。そして、図1では、空調清浄ユニットをクリーンルームの室内10の2箇所に配置してある。なお、空調清浄ユニットは、図1に示すように熱交換装置1の両側だけでなく熱交換装置1の周側に空気清浄装置2を複数配置してあってもよい。この場合、熱交換装置1の吹出口は、少なくとも各空気清浄装置2に向けて空気を吹出す構成とする。また、空調清浄ユニットは、図1に示すように熱交換装置1の両側に空気清浄装置2を配置せず片側に配置してあってもよい。この場合、熱交換装置1の吹出口は、空気清浄装置2以外の方向に向けて空気を吹出す構成としてもよい。また、空調清浄ユニットは、図1に示すように2箇所に限らず、1〜複数箇所に設けてあってもよい。   The clean room in the present embodiment constitutes an air conditioning cleaning unit in which an air cleaning device 2 is arranged around the heat exchange device 1. And in FIG. 1, the air-conditioning cleaning unit is arrange | positioned in two places of the room | chamber interior 10 of a clean room. In addition, as shown in FIG. 1, the air-conditioning cleaning unit may have a plurality of air cleaning devices 2 arranged not only on both sides of the heat exchanging device 1 but on the peripheral side of the heat exchanging device 1. In this case, the air outlet of the heat exchange device 1 is configured to blow air toward at least each air cleaning device 2. Moreover, the air-conditioning purification unit may be arrange | positioned on one side, without arrange | positioning the air purification apparatus 2 on the both sides of the heat exchange apparatus 1, as shown in FIG. In this case, the air outlet of the heat exchange device 1 may be configured to blow out air in a direction other than the air cleaning device 2. Moreover, the air-conditioning cleaning unit is not limited to two places as shown in FIG. 1, and may be provided at one to a plurality of places.

なお、クリーンルームの室内10において、建物の上部梁11の間のふところには、熱交換装置1や空気清浄装置2への電源供給用のケーブルや、冷水配管などを配置するラック5が設けてある。   In the room 10 of the clean room, a rack 5 in which a cable for supplying power to the heat exchanging device 1 and the air purifying device 2, a cold water pipe, and the like is provided at a position between the upper beams 11 of the building. .

上述したクリーンルームでは、熱交換装置1の底部の吸込口から吸込まれた室内10の空気は、当該熱交換装置1によって冷房負荷を処理されて吹出口から周側方に吹出される。そして、熱交換装置1から吹出された空気は、空気清浄装置2の一側部の吸込口から吸込まれて当該空気清浄装置2のフィルタ2bで清浄処理されて他側部の吹出口から吹出される。そして、空気清浄装置2の他側部の吹出口から吹出された空気は、導風部材3によって室内10の下方(床10a側)に導かれる。さらに、室内10の床10a側に導かれた空気は、床10aから熱交換装置1に向けて上昇して当該熱交換装置1の底部の吸込口から吸込まれる。このように、熱交換装置1で処理された空気を空気清浄装置2で処理し、2つの処理が行われた空気が室内10に吹出されるとともに室内10を循環する。   In the above-described clean room, the air in the room 10 sucked from the suction port at the bottom of the heat exchange device 1 is subjected to a cooling load by the heat exchange device 1 and blown out from the outlet to the circumferential side. The air blown out from the heat exchange device 1 is sucked from the suction port on one side of the air cleaning device 2, cleaned by the filter 2 b of the air cleaning device 2, and blown out from the outlet on the other side. The Then, the air blown out from the air outlet at the other side of the air cleaning device 2 is guided to the lower side of the room 10 (the floor 10a side) by the air guide member 3. Furthermore, the air led to the floor 10 a side of the room 10 rises from the floor 10 a toward the heat exchange device 1 and is sucked from the suction port at the bottom of the heat exchange device 1. In this way, the air that has been processed by the heat exchange device 1 is processed by the air cleaning device 2, and the air that has been subjected to the two processes is blown into the room 10 and circulated through the room 10.

したがって、上述したクリーンルームでは、室内10の上部において、底部から吸込んだ空気を周側方に吹出す形態で熱交換装置1を配置し、側部から吸込んだ空気を導風部材3によって下方に向けて吹出す形態で空気清浄装置2を配置してあり、熱交換装置1で処理された空気を空気清浄装置2で処理して室内10に循環させる。この結果、室内10にクリーンルームの天井やリターンチャンバーを要さないので、必要とするクリーンルームの天井高さを得た上で建物階高を低くすることが可能になる。   Therefore, in the above-described clean room, the heat exchange device 1 is arranged in a form in which air sucked from the bottom is blown out to the circumferential side at the top of the room 10, and the air sucked from the side is directed downward by the air guide member 3. The air purifier 2 is arranged in a blowout form, and the air treated by the heat exchange device 1 is treated by the air purifier 2 and circulated in the room 10. As a result, since the ceiling of the clean room and the return chamber are not required in the room 10, the height of the building floor can be lowered after obtaining the required ceiling height of the clean room.

さらに、上述したクリーンルームでは、熱交換装置1および空気清浄装置2の互いの底部を水平方向に揃えて同一高さに配置できる。この結果、クリーンルームの必要天井高さを得た上で室内10の天井高さを低くすることができ、建物階高をさらに低くすることが可能になる。また、熱交換装置1および空気清浄装置2の高さを揃えたことで、電源供給用のケーブルや、冷水配管などの配置が容易になる。   Furthermore, in the clean room described above, the bottoms of the heat exchange device 1 and the air cleaning device 2 can be arranged at the same height in the horizontal direction. As a result, the ceiling height of the room 10 can be lowered after obtaining the necessary ceiling height of the clean room, and the building floor height can be further lowered. Further, by arranging the heights of the heat exchange device 1 and the air cleaning device 2, it becomes easy to arrange a power supply cable, a cold water pipe, and the like.

また、上述したクリーンルームでは、空気清浄装置2の吸込口に向けて熱交換装置1から集中的に空気を吹出すため、熱交換装置1と空気清浄装置2とを離隔しても空気を送ることが可能である。この結果、クリーンルームの室内10での設計の自由度を向上することが可能になる。さらに、熱交換装置1と空気清浄装置2とをクリーンルームの熱負荷および清浄度に応じて独立にも設置できるので、熱交換装置1および空気清浄装置2のランニングコストを低減することが可能になる。   Further, in the above-described clean room, air is intensively blown from the heat exchange device 1 toward the suction port of the air purification device 2, so that air is sent even if the heat exchange device 1 and the air purification device 2 are separated. Is possible. As a result, it becomes possible to improve the degree of freedom of design in the room 10 of the clean room. Furthermore, since the heat exchange device 1 and the air purification device 2 can be installed independently according to the heat load and cleanliness of the clean room, the running cost of the heat exchange device 1 and the air purification device 2 can be reduced. .

また、上述したクリーンルームでは、空気清浄装置2の吹出口に空気を下方に向けて導く導風部材3を設けたので、従前からある空気清浄装置を横向きにして採用することが可能となり、特別に空気清浄装置を設計する必要がない。   Moreover, in the above-described clean room, since the air guide member 3 that guides air downward is provided at the air outlet of the air purifier 2, it is possible to employ the existing air purifier sideways, and specially There is no need to design an air cleaning device.

本発明に係るクリーンルームの実施の形態を示す概略図である。It is the schematic which shows embodiment of the clean room which concerns on this invention.

符号の説明Explanation of symbols

1 熱交換装置
2 空気清浄装置
2a ファン
2b フィルタ
3 導風部材
3a 開口
3b 整流板
5 ラック
10 室内
10a 床
10b 天井
10c 周壁
11 上部梁
DESCRIPTION OF SYMBOLS 1 Heat exchange apparatus 2 Air purifying apparatus 2a Fan 2b Filter 3 Air guide member 3a Opening 3b Current plate 5 Rack 10 Indoor 10a Floor 10b Ceiling 10c Perimeter wall 11 Upper beam

Claims (2)

室内の上部に配置されて前記室内の空気を吸込んで冷暖房負荷を処理した空気を前記室内に吹出す熱交換装置と、前記室内の上部に配置されて前記熱交換装置の吹出した空気を吸込んで清浄処理した空気を前記室内に吹出す空気清浄装置とを備えたクリーンルームにおいて、
前記熱交換装置は底部から吸込んだ空気を周側方に吹出す形態で配置してあり、前記空気清浄装置は側部から吸込んだ空気を下方に向けて吹出す形態で配置してあることを特徴とするクリーンルーム。
A heat exchanging device that is arranged in the upper part of the room and sucks the air in the room and processes the air-conditioning load and blows out the air into the room; In a clean room equipped with an air purifier that blows clean air into the room,
The heat exchange device is arranged in a form in which air sucked in from the bottom is blown out to the circumferential side, and the air purifier is arranged in a form in which air sucked in from the side is blown out downward. A characteristic clean room.
前記空気清浄装置は一側部から吸込んだ空気を他側部から吹出す形態で配置してあり、当該他側部には吹出される空気を下方に向けて導く導風部材を設けてあることを特徴とする請求項1に記載のクリーンルーム。   The air purifier is arranged in such a manner that air sucked from one side is blown out from the other side, and a wind guide member is provided on the other side to guide the blown air downward. The clean room according to claim 1.
JP2005111143A 2005-04-07 2005-04-07 Clean room Pending JP2006292219A (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Publications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014214915A (en) * 2013-04-23 2014-11-17 清水建設株式会社 Air cleaning and conditioning system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4717997Y1 (en) * 1969-09-20 1972-06-21
JPS5263952A (en) * 1975-11-20 1977-05-26 Sumitomo Naugatuck Co Ltd Resin compositions having high stiffness
JPS6366728A (en) * 1986-09-09 1988-03-25 Ube Ind Ltd Production of perpendicular magnetic recording medium
JPH01168316A (en) * 1987-12-23 1989-07-03 Matsushita Electric Works Ltd Air cleaner
JP2004278887A (en) * 2003-03-14 2004-10-07 Sharp Corp Turbulence type clean room

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4717997Y1 (en) * 1969-09-20 1972-06-21
JPS5263952A (en) * 1975-11-20 1977-05-26 Sumitomo Naugatuck Co Ltd Resin compositions having high stiffness
JPS6366728A (en) * 1986-09-09 1988-03-25 Ube Ind Ltd Production of perpendicular magnetic recording medium
JPH01168316A (en) * 1987-12-23 1989-07-03 Matsushita Electric Works Ltd Air cleaner
JP2004278887A (en) * 2003-03-14 2004-10-07 Sharp Corp Turbulence type clean room

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014214915A (en) * 2013-04-23 2014-11-17 清水建設株式会社 Air cleaning and conditioning system

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