JP2004132956A5 - - Google Patents

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Publication number
JP2004132956A5
JP2004132956A5 JP2003270078A JP2003270078A JP2004132956A5 JP 2004132956 A5 JP2004132956 A5 JP 2004132956A5 JP 2003270078 A JP2003270078 A JP 2003270078A JP 2003270078 A JP2003270078 A JP 2003270078A JP 2004132956 A5 JP2004132956 A5 JP 2004132956A5
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JP
Japan
Prior art keywords
incident angle
angle
structural element
electron beam
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003270078A
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English (en)
Japanese (ja)
Other versions
JP4469572B2 (ja
JP2004132956A (ja
Filing date
Publication date
Priority claimed from US10/186,797 external-priority patent/US6670612B1/en
Application filed filed Critical
Publication of JP2004132956A publication Critical patent/JP2004132956A/ja
Publication of JP2004132956A5 publication Critical patent/JP2004132956A5/ja
Application granted granted Critical
Publication of JP4469572B2 publication Critical patent/JP4469572B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003270078A 2002-07-01 2003-07-01 Ｓｅｍを利用するアンダカットの測定方法 Expired - Fee Related JP4469572B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/186,797 US6670612B1 (en) 2002-07-01 2002-07-01 Undercut measurement using SEM

Publications (3)

Publication Number Publication Date
JP2004132956A JP2004132956A (ja) 2004-04-30
JP2004132956A5 true JP2004132956A5 (enExample) 2009-12-03
JP4469572B2 JP4469572B2 (ja) 2010-05-26

Family

ID=29735250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003270078A Expired - Fee Related JP4469572B2 (ja) 2002-07-01 2003-07-01 Ｓｅｍを利用するアンダカットの測定方法

Country Status (2)

Country Link
US (1) US6670612B1 (enExample)
JP (1) JP4469572B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1668915B (zh) * 2002-07-11 2011-06-15 应用材料以色列公司 用于判定具有次微米截面积的结构元件的界面特征的系统和方法
JP5596896B2 (ja) * 2003-03-28 2014-09-24 イノヴェイショナル・ホールディングズ・エルエルシー 有益な薬剤の濃度勾配を有する、移植可能な医療装置の形成方法
DE102004004597B4 (de) * 2004-01-29 2008-08-07 Qimonda Ag Verfahren zur Vermessung einer Struktur auf einem Halbleiterwafer mit einem Rasterelektronenmikroskop
US7355709B1 (en) 2004-02-23 2008-04-08 Kla-Tencor Technologies Corp. Methods and systems for optical and non-optical measurements of a substrate
JP5367549B2 (ja) 2009-12-07 2013-12-11 株式会社東芝 基板計測方法
KR20150023526A (ko) * 2012-06-05 2015-03-05 비-나노 리미티드 전자현미경을 사용하여 비진공 환경에서 재료를 분석하기 위한 시스템 및 방법
US20160336143A1 (en) * 2015-05-15 2016-11-17 Kabushiki Kaisha Toshiba Charged particle beam apparatus and method of calibrating sample position
TWI846364B (zh) 2019-05-21 2024-06-21 美商應用材料股份有限公司 增強的截面特徵量測方法與系統
US11264202B2 (en) 2020-05-18 2022-03-01 Applied Materials Israel Ltd. Generating three dimensional information regarding structural elements of a specimen
CN112563149B (zh) * 2020-12-11 2023-12-01 苏州工业园区纳米产业技术研究院有限公司 精准测量钻刻大小的方法及剥离工艺
EP4099091B1 (en) 2021-06-02 2024-04-10 IMEC vzw Pattern height metrology using an e-beam system

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114269A (en) * 1980-02-15 1981-09-08 Internatl Precision Inc Scanning type electronic microscope
JPH01311551A (ja) * 1988-06-08 1989-12-15 Toshiba Corp パターン形状測定装置
JPH02249908A (ja) * 1989-03-24 1990-10-05 Dainippon Printing Co Ltd レジストパターンの検査方法
JPH07111336B2 (ja) * 1990-02-07 1995-11-29 株式会社東芝 パターン寸法測定方法及び装置
US6411377B1 (en) * 1991-04-02 2002-06-25 Hitachi, Ltd. Optical apparatus for defect and particle size inspection
JP3730263B2 (ja) * 1992-05-27 2005-12-21 ケーエルエー・インストルメンツ・コーポレーション 荷電粒子ビームを用いた自動基板検査の装置及び方法
JP3265724B2 (ja) * 1993-07-14 2002-03-18 株式会社日立製作所 荷電粒子線装置
US5739909A (en) * 1995-10-10 1998-04-14 Lucent Technologies Inc. Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry
US6066849A (en) * 1997-01-16 2000-05-23 Kla Tencor Scanning electron beam microscope
US5869833A (en) * 1997-01-16 1999-02-09 Kla-Tencor Corporation Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments
US6054710A (en) * 1997-12-18 2000-04-25 Cypress Semiconductor Corp. Method and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy
US6031614A (en) * 1998-12-02 2000-02-29 Siemens Aktiengesellschaft Measurement system and method for measuring critical dimensions using ellipsometry
JP4361661B2 (ja) * 2000-03-24 2009-11-11 富士通マイクロエレクトロニクス株式会社 線幅測定方法
US6472662B1 (en) * 2000-08-30 2002-10-29 International Business Machines Corporation Automated method for determining several critical dimension properties from scanning electron microscope by using several tilted beam or sample scans
US6911349B2 (en) * 2001-02-16 2005-06-28 Boxer Cross Inc. Evaluating sidewall coverage in a semiconductor wafer
JP4094327B2 (ja) * 2002-04-10 2008-06-04 株式会社日立ハイテクノロジーズ パターン計測方法及びパターン計測装置、並びにパターン工程制御方法

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