JP2004126097A - Uv light spot irradiation and exposing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a UV light spot irradiation and exposure device which improves exposure edge precision by preventing an exposure time from being extended accompanying variation in size of an irradiation spot. <P>SOLUTION: An exposure device main body 1 is provided with a light guide 2 as a light source for UV light at the upper end of a lens frame main body 3 provided with a fixed lens 4, a frame 5 for zooming which is provided with a movable lens and has a projection hole 9 atop is fitted to the lens frame main body 3 to freely slide upward and downward by a zoom adjusting device 5', and the lens frame main body 3 is configured to freely move up and down about a lens fitting plate 8 by a focal length adjusting device 7. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
The present invention relates to an exposure apparatus that irradiates a spot with UV light.
TECHNICAL FIELD OF THE INVENTION
[0002]
FIG. 2 is a partial vertical cross-sectional view of a conventional exposure apparatus 1 'that irradiates a spot with a conventional UV light by a lens. In order to change a spot size, a variable mask 13 is provided at the tip of an emission hole 9'. Attached. In the figure, 2 'is a light guide, 3' is a lens frame, 4 'and 6' are lenses, 8 'is a lens mounting plate, 9' is an exit hole, 10 'is irradiation light, 11 is an exposure surface, and 12 is leakage. Light 14 is a variable mask adjustment device.
[0003]
FIG. 3 is a bottom view of the conventional exposure apparatus 1 'shown in FIG. 2, and the size of the irradiation spot can be changed by moving the variable mask 13 right and left. However, in this case, since the irradiation light is shielded by the variable mask 13, the light amount of the irradiation light also decreases, and in order to obtain a sufficient exposure amount, the exposure time must be lengthened accordingly.
[0004]
Therefore, the exposure time becomes longer each time the irradiation spot is made smaller, so that the tact time as a manufacturing apparatus for completing all the exposures is extended.
[0005]
Further, since the irradiation light is shielded by the variable mask 13, the leakage light 12 is generated and the irradiation light is blurred, so that the accuracy of the exposure edge is deteriorated.
[0006]
[Problems to be solved by the invention]
Accordingly, it is an object of the present invention to provide a UV light spot irradiation exposure apparatus that prevents an increase in exposure time due to a change in the size of an irradiation spot and improves exposure edge accuracy.
[0007]
[Means for Solving the Problems]
The present invention has been made in order to solve the above-mentioned problems, and a UV light emitted by a UV lamp of a light source unit is condensed by a lens attached to an XY stage and is spot-irradiated on a substrate. Is a UV light spot irradiation exposure apparatus provided with a zoom lens mechanism for changing the diameter of the spot light and a focal length adjustment mechanism for the spot light.
[0008]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is a partially longitudinal side view showing an embodiment of the present invention. 1 is an exposure apparatus main body, 2 is a light guide as a light source of UV light, 3 is a lens frame main body, 4 is a fixed lens, and 5 is a lens. A zoom frame that fits into the frame body 3 and can be slid up and down freely by a 5 ′ zoom adjustment device, 6 is a movable lens, and 7 is a lens frame body 3 that can be moved up and down with respect to the lens mounting plate 8. A movable focal length adjusting device, 9 is an emission hole provided at the end of the zoom frame, 10 is irradiation light, and 11 is an exposure surface.
[0009]
Irradiation light emitted from the light guide 2 is condensed by the fixed lens 4 and the movable lens 6 and is emitted to the exposure surface 11 through the emission hole 9. The movable lens 6 moves up and down together with the zoom frame 5 to change the diameter of the irradiation light 10. At this time, since the focal length of the irradiation light 10 also changes, the lens frame main body 3 is moved up and down by the focal length adjusting device 7 so that the focus is focused on the exposure 11. The movable lens 6 may be driven in the vertical direction either manually or electrically.
[0010]
【The invention's effect】
Since the present invention is configured as described above, since the irradiation spot is not shielded by the variable mask, there is no light amount loss, and the light amount per unit area is increased by adjusting the focal length, so that the exposure time is shortened. As a result, the takt time of the manufacturing apparatus is shortened, so that it is possible to prevent the exposure time from being extended due to the change of the irradiation spot. Further, since the light is not shielded by the variable mask, the influence on the exposure edge due to light leaked from the variable mask portion is prevented.
[Brief description of the drawings]
FIG. 1 is a partially longitudinal side view showing one embodiment of the present invention.
FIG. 2 is a partial longitudinal sectional view showing a conventional exposure apparatus.
FIG. 3 is a bottom view of the exposure apparatus shown in FIG. 2;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Exposure apparatus main body 2 Light guide 3 Lens frame 4 Fixed lens 5 Zoom frame 5 'Zoom adjustment device 6 Movable lens 7 Focal length adjustment device 8 Lens mounting frame 9 Emission hole 10 Irradiation light 11 Exposure surface

Claims (1)

In an apparatus that partially exposes a photosensitive resist on a substrate by condensing UV light emitted from a UV lamp of a light source unit with a lens attached to an XY stage and irradiating the spot with a spot, the diameter of the spot light is reduced. A UV light spot irradiation exposure apparatus comprising a zoom lens mechanism for changing magnification and a focal length adjusting mechanism for spot light.

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