JP2004121942A - Method and apparatus for supplying functional liquid to discharge head therefor, liquid drop discharge device, production method of electrooptical device, electrooptical device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for supplying a functional liquid capable of controlling the functional liquid supply pressure in a functional liquid drop discharge head to a predetermined pressure regardless of the pressure loss in a functional liquid flow channel to properly supply the functional liquid to the functional liquid drop discharge head from a functional liquid tank, a liquid drop discharge device, an electrooptical device and its production method, and electronic equipment. <P>SOLUTION: The method of supplying the functional liquid to the functional liquid drop discharge head 31 from a functional liquid supply means 221 through a supply pipeline 251, is characterized by being provided with a pressure detection process for detecting the pressure in the supply pipeline 251 at the time of driving of the functional liquid drop discharge head 31 and a regulation process for regulating the supply pressure of the functional liquid of the supply means 221 on the basis of the detection result due to the pressure detection process so that the head inner pressure of the discharge head 31 becomes constant. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method and apparatus for supplying a functional liquid to a functional droplet discharge head that supplies a functional liquid from a functional liquid tank that stores a functional liquid to a functional droplet discharge head, a droplet discharge apparatus, and an electro-optical device. The present invention relates to a manufacturing method, an electro-optical device, and an electronic apparatus.
[0002]
[Prior art]
Ink jet printers are designed to prevent ink (functional liquid) from dripping from an ink jet head (functional droplet discharge head) to prevent the ink liquid from flowing from an ink tank storing the ink to a functional droplet discharge head. The liquid flow path) is maintained at a slightly negative head, and the ink is supplied from the ink tank to the inkjet head by the action of a pump unit incorporated in the inkjet head so that the ink can be ejected with high precision (for example, see Patents). Reference 1).
[0003]
Since the ink jet head of such an ink jet printer can discharge minute ink droplets with high precision in the form of dots, it is expected to be applied to the field of manufacturing various products. As an example of application of an ink jet head, a special liquid or a functional liquid such as a photosensitive resin liquid is introduced into a functional liquid droplet discharge head, and the liquid droplet that discharges the functional liquid droplet accurately to a workpiece such as a substrate is used. Discharge devices have been considered.
[0004]
[Patent Document 1]
JP-A-2002-248784 (page 4, FIG. 1)
[0005]
[Problems to be solved by the invention]
By the way, the supply pressure for supplying the functional liquid to the functional liquid droplet ejection head is greatly affected by pressure loss caused by pipe frictional resistance from the functional liquid to the functional liquid ejection head from the functional liquid tank. . Therefore, depending on conditions such as the viscosity of the functional liquid introduced into the functional droplet discharge head, the length and diameter of the functional liquid flow path, the number of nozzles of the functional droplet discharge head to be used, the ink discharge frequency, and the like, Since the supply pressure of the functional liquid in the head changes, there arises a problem that the functional liquid cannot be discharged properly and stably. Further, the supply of the functional liquid may not be performed in time for discharging the functional liquid droplets from the functional liquid droplet discharging head, which may adversely affect the discharging performance of the functional liquid droplet discharging head.
[0006]
Therefore, the present invention controls the functional liquid supply pressure in the functional liquid discharge head to a predetermined pressure regardless of the pressure loss in the functional liquid flow path, and appropriately functions from the functional liquid tank to the functional droplet discharge head. It is an object of the present invention to provide a functional liquid supply method and a functional liquid supply device to a functional liquid droplet discharge head capable of supplying a liquid, a liquid droplet discharge device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus. .
[0007]
[Means for Solving the Problems]
The present invention provides a method for supplying a functional liquid to a functional liquid droplet ejection head, which supplies a functional liquid from a functional liquid supply means to a functional liquid droplet ejection head via a supply conduit. A pressure detecting step of detecting the pressure in the pipeline, and adjusting the functional liquid supply pressure of the functional liquid supply means based on a result of the detection by the pressure detecting step so that the pressure in the functional liquid droplet discharging head is constant. And an adjusting step.
[0008]
The present invention also provides a functional liquid supply device for supplying a functional liquid from a functional liquid supply unit to a functional droplet discharge head via a supply conduit, wherein the pressure in the supply conduit is controlled when the functional droplet discharge head is driven. Pressure detecting means for detecting the pressure, the pressurizing means for pressurizing the inside of the functional liquid supply tank, and the pressurizing means based on the detection result of the pressure detecting means so that the functional liquid supply pressure of the functional liquid supplying means becomes constant. Control means for controlling the pressure.
[0009]
According to this configuration, the inside of the functional liquid tank is pressurized and controlled based on the pressure of the supply pipe detected at the time of discharging the functional liquid, so that the pressure loss in the supply pipe is large and the supply pressure of the functional liquid is reduced. In such a case, the function liquid supply pressure can be kept constant by pressurizing the inside of the function liquid tank.
[0010]
In this case, it is preferable that the pressure detecting means is disposed near the functional liquid ejection head.
[0011]
According to this configuration, since the pressure detecting means is disposed near the functional liquid droplet ejection head at which the functional liquid supply pressure is minimized at the time of discharging the functional liquid, is it necessary to pressurize the functional liquid tank by the pressurizing means? It is possible to supply the functional liquid to the functional liquid droplet ejection head stably by properly determining whether or not the functional liquid is discharged. Further, by detecting the pressure in the vicinity of the functional liquid droplet discharge head and controlling the supply pressure of the functional liquid in the functional liquid tank, the functional liquid supply pressure in the functional liquid droplet discharge head can be kept constant. It is most preferable to detect the pressure in the functional liquid droplet ejection head and control the pressure based on the detected pressure.
[0012]
In this case, the pressurizing means includes a compressed air supply source for supplying compressed air, a pressurizing pipe connecting the compressed air supply source and the functional liquid supply tank, and a pipe opening / closing means interposed in the pressurizing pipe. It is preferable that the control unit causes the pipeline opening / closing unit to open and close based on the detection result of the pressure detecting unit.
[0013]
According to this configuration, when the pipe opening / closing means is opened, the compressed air is supplied from the compressed air supply source to the functional liquid tank via the pressurizing pipe to pressurize the inside of the functional liquid tank, and when the opening / closing means is closed. The supply of the compressed air to the functional liquid tank is interrupted, and the pressurization of the functional liquid tank is stopped. It is possible to stably discharge the functional liquid to the functional droplet discharge head while keeping the functional liquid supply pressure constant, and to stably supply the functional liquid to the functional droplet discharge head. Specifically, when the supply pressure of the functional liquid is reduced, the control means opens the pipeline opening / closing means until the supply pressure reaches the predetermined function liquid supply pressure, and closes the opening / closing means when the supply pressure reaches the predetermined function liquid supply pressure.
[0014]
In this case, it is preferable that the conduit opening / closing means is constituted by a three-way valve having an atmosphere opening port.
[0015]
According to this configuration, since the pipeline opening / closing means has the atmosphere release port, when the supply pipeline reaches a predetermined functional fluid supply pressure, the pressure in the pressurized functional fluid tank is released to the atmosphere. Thus, it is possible to prevent the supply pressure from excessively increasing. Further, since the opening / closing means is constituted by a three-way valve having an atmosphere opening port, there is no need to separately provide a component for opening the pressurized functional liquid tank to the atmosphere, and the apparatus can be simplified.
[0016]
In this case, a plurality of supply conduits and a plurality of functional liquid tanks are provided corresponding to the plurality of functional droplet discharge heads, and the pressure detecting means is connected to each of the functional droplet discharge heads. Preferably, the pressure in the supply pipe is detected, and the control means individually controls the pressure applied to each functional liquid tank by the pressurizing means.
[0017]
According to this configuration, the functional liquid supply pressure in the supply conduit is detected for each supply conduit connected to the plurality of functional liquid droplet ejection heads, and the functional liquid supply pressure of the plurality of functional liquid tanks is determined based on the detection result. Are controlled individually, so that all supply pipes connected to each functional droplet discharge head can be set to an appropriate functional liquid supply pressure, and the functional liquid discharge performance of the functional droplet discharge head can be improved. The function liquid can be stabilized and the function liquid can be appropriately supplied to each function liquid droplet ejection head.
[0018]
In this case, the supply pipeline is connected to a plurality of functional liquid droplet ejection heads via a branch supply pipeline obtained by branching the supply pipeline into a plurality of branches, and the pressure detecting means detects the pressure in each branch supply pipeline. It is preferable that the control means controls the pressing force of the pressurizing means based on the average pressure in the plurality of branch supply pipes.
[0019]
According to this configuration, when a plurality of functional droplet discharge heads are connected to the supply conduit via the plurality of branch supply conduits, the pressure in each branch supply conduit is detected, and the plurality of branch supply conduits are detected. Since the pressurizing force of the pressurizing means is controlled based on the average pressure in the passage, the functional fluid supply pressure of the functional fluid tank is appropriately maintained, and the functional fluid supply pressure of each branch supply pipe is adjusted to a predetermined supply pressure. It can be controlled to get closer.
[0020]
A droplet discharge device according to the present invention includes the functional liquid supply device described above.
[0021]
According to this configuration, at the time of discharging the functional liquid, the functional liquid supply pressure in the functional liquid droplet discharge head is kept constant, and the function liquid supply head is connected to the functional liquid droplet discharge head. Since the functional liquid can be supplied appropriately and stably, the functional liquid can be discharged stably.
[0022]
According to a second aspect of the invention, there is provided a method of manufacturing an electro-optical device, wherein a film forming unit using functional liquid droplets is formed on a work using the above-described liquid droplet discharging apparatus.
[0023]
Further, an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional liquid droplets is formed on a work using the above-described liquid droplet discharging device.
[0024]
According to this configuration, the electro-optical device itself can be efficiently manufactured because the electro-optical device is manufactured using the droplet discharge device that enables various discharges of the functional liquid to the work. In addition, as the electro-optical device (device), a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron-emitting device, a PDP (Plasma Display Panel) device, an electrophoretic display device, and the like can be considered. The electron emission device is a concept including a so-called FED (Field Emission Display) device. Further, as the electro-optical device, a device including formation of a metal wiring, formation of a lens, formation of a resist, formation of a light diffuser, and the like can be considered.
[0025]
An electronic apparatus according to another aspect of the invention includes the electro-optical device described above.
[0026]
In this case, as the electronic device, various electric products other than a mobile phone and a personal computer equipped with a so-called flat panel display correspond thereto.
[0027]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing the appearance of a droplet discharge device to which the present invention is applied, FIG. 2 is a front view of the droplet discharge device to which the present invention is applied, and FIG. 3 is the right side of the droplet discharge device to which the present invention is applied. FIG. As will be described in detail later, the droplet discharging apparatus 1 introduces a functional liquid such as a special ink or a luminescent resin liquid into the functional droplet discharging head 31 and forms a functional droplet on a work W such as a substrate. It forms a film part.
[0028]
As shown in FIGS. 1 to 3, the droplet discharge device 1 includes a discharge unit 2 for discharging a functional liquid, a maintenance unit 3 that performs maintenance of the discharge unit 2, and supplies a functional liquid to the discharge unit 2. A functional liquid supply / recovery means 4 for recovering the unnecessary functional liquid and an air supply means 5 (pressurizing means) for supplying compressed air for driving and controlling each means are provided. These units are controlled by the control unit 6 in association with each other. Although not shown, a work recognition camera for recognizing the position of the work W, a head recognition camera for confirming the position of the head unit 21 (described later) of the ejection unit 2, and ancillary devices such as various indicators are also provided. These are also controlled by the control means 6.
[0029]
As shown in FIGS. 1 to 3, a flushing unit 93 (described later) of the discharge means 2 and the maintenance means 3 is disposed on a stone surface plate 12 fixed to an upper portion of a gantry 11 formed by assembling angle materials in a rectangular shape. Most of the functional liquid supply / recovery means 4 and the air supply means 5 are incorporated in a machine base 13 attached to the gantry 11. The machine base 13 is formed with two large and small storage chambers 14 and 15. The larger storage chamber 14 stores the tanks of the functional liquid supply / recovery means 4, and the smaller storage chamber 15 has air. The main part of the supply means 5 is accommodated. Further, on the machine base 13, the tank base 17 on which the liquid supply tank 241 (functional liquid tank) of the functional liquid supply / recovery means 4 to be described later is mounted and slidable in the longitudinal direction of the machine base 13 (ie, the X-axis direction) Is provided, and a common base 16 on which a suction unit 91 (to be described later) and a wiping unit 92 (to be described later) of the maintenance means 3 are mounted is fixed on the moving table 18. .
[0030]
The droplet discharge device 1 supplies the functional liquid from the liquid supply tank 241 of the functional liquid supply / recovery unit 4 to the functional droplet discharge head 31 while maintaining the functional droplet discharge head 31 of the discharge unit 2 by the maintenance unit 3. At the same time, the functional liquid is discharged from the functional liquid droplet discharging head 31 to the work W. Hereinafter, each means will be described.
[0031]
The ejection unit 2 includes a head unit 21 having a plurality of functional droplet ejection heads 31 for ejecting a functional liquid, a main carriage 22 supporting the head unit 21, a work W, and a work droplet W. And an X / Y moving mechanism 23 for scanning with respect to the reference numeral 31.
[0032]
As shown in FIGS. 4 and 5, the head unit 21 includes a plurality of (twelve) functional droplet discharge heads 31, a sub-carriage 51 on which the plurality of functional droplet discharge heads 31 are mounted, and each functional droplet discharge head. A head holding member 52 for mounting the nozzle 31 on the sub-carriage 51 with the nozzle forming surface 44 (nozzle surface) of the head 31 protruding from the lower surface. The twelve functional droplet discharge heads 31 are divided into six, and are arranged on the sub-carriage 51 at a predetermined angle in order to secure a sufficient application density of the functional liquid to the work W. The six divided functional droplet discharge heads 31 are disposed so as to be displaced from each other in the sub-scanning direction (Y-axis direction), and the discharge nozzles of each functional droplet discharge head 31 are arranged in the sub-scanning direction. 42 are continuous (partially overlapped). When the functional liquid ejection head 31 is made up of dedicated components and a sufficient application density of the functional liquid to the work W can be secured, it is not necessary to intentionally set the functional liquid droplet ejection head 31 to be inclined. Absent.
[0033]
As shown in FIG. 5, the functional droplet discharge head 31 is a so-called two-unit type, and includes a functional liquid introduction unit 32 having two connection needles 33 and two head substrates connected to the functional liquid introduction unit 32. 34, and a head main body 35 connected below the functional liquid introduction section 32 and having an in-head channel filled with the functional liquid therein. Each connection needle 33 is connected to the liquid supply tank 241 of the functional liquid supply / recovery means 4 via a pipe adapter 36, and the functional liquid introduction unit 32 receives the supply of the functional liquid from each connection needle 33. ing. The head main body 35 has a double pump unit 41 and a nozzle forming plate 43 having a nozzle forming surface 44 in which a large number of discharge nozzles 42 are formed. The function droplet is ejected from the ejection nozzle 42 by the action of (1). It should be noted that two rows of discharge nozzles 42 composed of a large number of discharge nozzles 42 are formed on the nozzle forming surface 44.
[0034]
As shown in FIG. 4, the sub-carriage 51 includes a body plate 53 partially cut away, a pair of left and right reference pins 54 provided at intermediate positions in the long side direction of the body plate 53, A pair of left and right support members 55 attached to the long sides. The pair of reference pins 54 serve as references for positioning (position recognition) the sub-carriage 51 (head unit 21) in the X-axis, Y-axis, and θ-axis directions on the premise of image recognition. The support member 55 is a fixing portion when fixing the head unit 21 to the main carriage 22. In addition, the sub-carriage 51 is provided with a pipe joint 56 for connecting each functional liquid droplet discharge head 31 and the liquid supply tank 241 by pipe. The piping joint 56 is connected at one end to a head-side piping member from a piping adapter 36 connected to (the connection needle 33 of) each functional droplet discharge head 31, and to the other end at a device-side piping member from the liquid supply tank 241. Are connected to each other.
[0035]
As shown in FIG. 3, the main carriage 22 includes a hanging member 61 having an external appearance “I” shape fixed to a bridge plate 82 described below from below, a θ table 62 attached to the lower surface of the hanging member 61, and a carriage main body 63 attached to be suspended below the θ table 62. The carriage body 63 has a rectangular opening into which the head unit 21 is loosely fitted, and the head unit 21 is positioned and fixed. The carriage main body 63 is provided with a work recognition camera for recognizing the work W.
[0036]
As shown in FIGS. 1 to 3, the XY moving mechanism 23 is fixed to the stone surface plate 12, performs main scanning of the work W (in the X-axis direction), and connects the head unit 21 via the main carriage 22 to the auxiliary unit. The scanning (Y-axis direction) is performed. The X / Y moving mechanism 23 includes an X-axis table 71 fixed so that an axis thereof is aligned with a center line along a long side of the stone surface plate 12, and straddles the X-axis table 71, and is attached to a short side of the stone surface plate 12. A Y-axis table 81 whose axis is aligned with the center line along the Y-axis.
[0037]
The X-axis table 71 includes a suction table 72 that suction-sets the work W by air suction, a θ table 73 that supports the suction table 72, and an X-axis air slider 74 that supports the θ table 73 slidably in the X-axis direction. , An X-axis linear motor (not shown) for moving the work W on the suction table 72 in the X-axis direction via the θ table 73, and an X-axis linear scale 75 attached to the X-axis air slider 74. . The main scanning of the functional droplet discharge head 31 is such that the suction table 72 and the θ table 73 that have sucked the substrate W reciprocate in the X-axis direction by guiding the X-axis air slider 74 by driving the X-axis linear motor. It is performed by.
[0038]
The Y-axis table 81 is provided alongside a bridge plate 82 for suspending the main carriage 22, a pair of Y-axis sliders 83 that both ends of the bridge plate 82 are supported slidably in the Y-axis direction, and a Y-axis slider 83. A Y-axis linear scale 84, a Y-axis ball screw 85 for guiding the pair of Y-axis sliders 83 to move the bridge plate 82 in the Y-axis direction, and a Y-axis motor for rotating the Y-axis ball screw 85 forward and backward (not shown) ). The Y-axis motor is composed of a servo motor. When the Y-axis motor rotates forward and backward, a bridge plate 82 screwed to the Y-axis ball screw 85 guides a pair of Y-axis sliders 83 to guide the Y-axis motor. Move in the Y-axis direction. That is, with the movement of the bridge plate 82, the main carriage 22 (head unit 21) reciprocates in the Y-axis direction, and the sub-scan of the functional liquid droplet ejection head 31 is performed.
[0039]
Here, a series of operations of the ejection unit 2 will be briefly described. First, as a preparation before discharging the functional liquid, the position of the head unit 21 is corrected by the head recognition camera, and then the position of the work W set on the suction table 72 is corrected by the work recognition camera. Next, the work W is reciprocated in the main scanning (X-axis) direction by the X / Y moving mechanism 23 (X-axis table 71), and the plurality of function liquid droplet ejection heads 31 are driven to move the function liquid onto the work W. Is selectively performed. After the work W is moved back, the head unit 21 is moved in the sub-scanning (Y-axis) direction by the XY moving mechanism 23 (Y-axis table 81), and the work W is reciprocated in the main scanning direction again. And the functional droplet discharge head 31 is driven. In the present embodiment, the work W is moved in the main scanning direction with respect to the head unit 21, but the head unit 21 may be moved in the main scanning direction. Further, the head unit 21 may be fixed and the work W may be moved in the main scanning direction and the sub-scanning direction.
[0040]
Next, the maintenance means 3 will be described. The maintenance unit 3 maintains the functional droplet discharge head 31 so that the functional droplet discharge head 31 can appropriately discharge the functional liquid. The maintenance unit 3 includes a suction unit 91, a wiping unit 92, and a flushing unit 93. I have.
[0041]
As shown in FIG. 1, the suction unit 91 is mounted on the common base 16 of the machine base 13 described above, and is slidable in the longitudinal direction of the machine base 13, that is, in the X-axis direction via the moving table 18. Is configured. The suction unit 91 is for maintaining the functional droplet discharge head 31 by sucking the functional droplet discharge head 31, and fills (the functional droplet discharge head 31 of) the head unit 21 with the functional liquid. It is used when performing suction (cleaning) for removing the thickened functional liquid in the functional liquid droplet ejection head 31. Referring to FIG. 6 and FIG. 10, the suction unit 91 includes a cap unit 101 having twelve caps 102, a functional liquid suction pump 141 that suctions a functional liquid through the caps 102, and each cap 102 A suction tube unit 151 that connects the pump unit 141 and the functional liquid suction pump 141, a support member 171 that supports the cap unit 101, and an elevating mechanism 181 (capping unit) that moves the cap unit 101 up and down via the support member 171. ing.
[0042]
As shown in FIG. 6, the cap unit 101 has twelve caps 102 arranged on a cap base 103 in correspondence with the arrangement of the twelve functional droplet discharge heads 31 mounted on the head unit 21. In addition, each cap 102 can be brought into close contact with the corresponding functional liquid droplet ejection head 31.
[0043]
As shown in FIG. 8, the cap 102 includes a cap body 111 and a cap holder 112. The cap body 111 is urged upward by two springs 113 and is held by the cap holder 112 in a state in which it can be moved up and down slightly. On the upper surface of the cap main body 111, a concave portion 121 including two rows of the discharge nozzles 42 of the functional liquid droplet discharge head 31 is formed, and a seal packing 122 is attached to a peripheral portion of the concave portion 121. The absorbent 123 is laid on the bottom of the concave portion 121 while being pressed by the holding frame 124. When the functional droplet discharge head 31 is sucked, the seal packing 122 is pressed against the nozzle formation surface 44 of the functional droplet discharge head 31 to be in close contact therewith, and the nozzle formation surface 44 includes two rows of discharge nozzles 42. Is sealed. Further, a small hole 125 is formed at the bottom of the concave portion 121, and the small hole 125 communicates with an L-shaped joint connected to each suction branch tube 153 described later.
[0044]
Further, each cap 102 is provided with an atmosphere release valve 131 so that the bottom of the recess 121 can be opened to the atmosphere (see FIG. 8). The atmosphere release valve 131 is urged to the upper side by a spring 132, and the atmosphere release valve 131 is opened and closed via an operation plate 176 described later. Then, at the final stage of the suction operation of the functional liquid, the operating unit 133 of the air release valve 131 is pulled down via the operating plate 176 and the valve is opened, so that the functional liquid impregnated in the absorbent 123 can also be sucked. It has become.
[0045]
The functional liquid suction pump 141 applies a suction force to the functional liquid droplet ejection head 31 via each cap 102, and is constituted by a piston pump in consideration of maintainability.
[0046]
As shown in FIG. 10, the suction tube unit 151 includes a function liquid suction tube 152 connected to the function liquid suction pump 141, a plurality of (twelve) suction branch tubes 153 connected to each cap 102, and a function. And a header pipe 154 for connecting the liquid suction tube 152 and the suction branch tube 153. That is, the functional liquid suction tube 152 and the suction branch tube 153 form a functional liquid flow path that connects the cap 102 and the functional liquid suction pump 141. As shown in the figure, each suction branch tube 153 is provided with a liquid sensor 161, a cap-side pressure sensor 162, and a suction opening / closing valve 163 in order from the cap 102 side. The liquid sensor 161 detects the presence or absence of a functional liquid, and the cap-side pressure sensor 162 detects the pressure in the suction branch tube 153. The suction opening / closing valve 163 closes the suction branch tube 153.
[0047]
As shown in FIG. 7, the support member 171 includes a support member main body 172 having a support plate 173 that supports the cap unit 101 at an upper end, and a stand 174 that supports the support member main body 172 in a vertically slidable manner. I have. A pair of air cylinders 175 is fixed to lower surfaces on both sides in the longitudinal direction of the support plate 173, and the operation plate 176 is moved up and down by the pair of air cylinders 175. On the operation plate 176, hooks 177 that are engaged with the operation unit 133 of the atmosphere release valve 131 of each cap 102 are attached. As the operation plate 176 moves up and down, the hook 177 moves the operation unit 133 up and down. By doing so, the above-described atmosphere release valve 131 is opened and closed.
[0048]
As shown in FIG. 7, the lifting mechanism 181 includes two lifting cylinders composed of air cylinders, that is, a lower lifting cylinder 182 erected on a base portion of a stand 174 and a lifting plate 184 raised and lowered by the lower lifting cylinder 182. And an elevating cylinder 183 of the upper stage is provided, and a piston rod of the elevating cylinder 183 of the upper stage is connected to the support plate 173. The strokes of the two lifting cylinders 182 and 183 are different from each other, and the selection operation of the two lifting cylinders 182 and 183 makes it possible to switch the rising position of the cap unit 101 between a relatively high first position and a relatively low second position. . When the cap unit 101 is at the first position, each cap 102 is in close contact with each functional liquid droplet ejection head 31, and when the cap unit 101 is at the second position, each functional liquid ejection head 31 and each cap 102 There is a slight gap between them.
[0049]
Although details will be described later, each cap 102 of the cap unit 101 also serves as a droplet receiver for receiving the functional liquid discharged by flushing (preliminary discharge) of the functional liquid droplet discharge head 31 when the functional liquid is not discharged. . The elevating mechanism 181 discharges the functional liquid droplets through the caps 102 when the functional liquid is filled in the flow path in the head of the functional liquid droplet discharge head 31 or when the functional liquid droplet discharge head 31 is cleaned. When the head 31 is sucked, the cap unit 101 is moved to the first position to bring each cap 102 into close contact with each functional droplet discharge head 31, and when the functional droplet discharge head 31 performs flushing, The cap unit 101 is moved to the second position.
[0050]
The wiping unit 92 wipes the nozzle forming surface 44 of each functional droplet discharge head 31 to which the functional liquid has adhered and is contaminated by suction (cleaning) of the functional droplet discharge head 31 and the like. It is composed of a winding unit 191 and a wiping unit 192 which are arranged in abutting condition (see FIGS. 1 and 3). For example, when the cleaning of the functional droplet discharge head 31 is completed, the wiping unit 92 is moved to a position facing the functional droplet discharge head 31 by the moving table 18 described above. Then, the wiping unit 92 draws out a wiping sheet (not shown) from the winding unit 191 in a state sufficiently close to the functional liquid droplet ejection head 31, and feeds out the wiping sheet using a wiping roller (not shown) of the wiping unit 192. The nozzle forming surface 44 of the functional liquid droplet ejection head 31 is wiped off with a wiping sheet. A cleaning liquid is supplied to the fed wiping sheet from a cleaning liquid supply system 223 described later, so that the functional liquid attached to the functional droplet discharge head 31 can be efficiently wiped off.
[0051]
The flushing unit 93 receives functional liquids sequentially discharged by the flushing operation (preliminary discharge) of a plurality (12) of the functional liquid droplet discharge heads 31 at the time of discharging the liquid droplets (to the work W). The flushing unit 93 includes a pair of flushing boxes 201 (only one side is shown) fixed to the θ table 73 with the suction table 71 of the X-axis table 71 interposed therebetween (see FIG. 1). Since the flushing box 201 moves together with the θ table 73 during the main scanning, the head unit 21 and the like do not move for the flushing operation. That is, since the flushing box 201 moves toward the head unit 21 together with the work W, the flushing operation can be sequentially performed from the discharge nozzles 42 of the functional liquid discharge head 31 facing the flushing box 201. The functional liquid received by the flushing box 201 is stored in a waste liquid tank 281 described later.
[0052]
The flushing operation is to discharge the functional liquid from all the discharge nozzles 42 of all the functional droplet discharge heads 31, and as the time elapses, the functional liquid introduced into the functional droplet discharge head 31 increases in viscosity by drying. This is performed periodically to prevent the discharge nozzles 42 of the functional droplet discharge head 31 from being clogged. The flushing operation needs to be performed not only at the time of discharging the functional liquid but also at the time of non-discharging of the functional liquid (during standby), such as when replacing the work W, where the discharging of the functional liquid is temporarily stopped. In such a case, after the head unit 21 moves to the cleaning position, that is, immediately above the cap unit 101 of the suction unit 91, each functional liquid droplet ejection head 31 performs flushing toward the corresponding cap 102.
[0053]
When flushing the cap 102, the cap unit 101 is raised by the elevating mechanism 181 to a second position where a slight gap (functional droplet discharge space) is formed between the functional droplet discharge head 31 and the cap 102. Most of the functional liquid discharged by flushing can be received by each cap 102. However, a part of the discharged functional liquid becomes mist-like fine particles, that is, satellites, and floats and scatters, thereby contaminating the nozzle forming surface 44 of the functional droplet discharge head 31 and the inside of the apparatus. Therefore, in the droplet discharge device 1 of the present embodiment, when performing flushing toward the caps 102, the satellites are received by the caps 102 by sucking the air in the functional droplet discharge space through the caps 102. This prevents the nozzle formation surface 44 of the functional droplet discharge head 31 and the inside of the apparatus from being contaminated with satellites. In order to prevent the generation of satellites, it is conceivable to perform flushing in a state in which the cap 102 is in close contact with the nozzle forming surface 44 of each functional liquid droplet ejection head 31, but in such a case, the cap 102 receiving the functional liquid may be used. Therefore, the nozzle forming surface 44 becomes dirty and requires wiping, which is not practical.
[0054]
Specifically, a blower 211 is used as a suction source for air suction, a suction force is applied to each cap 102, and the air in the functional droplet discharge space is sucked from each cap 102. Referring to FIG. 10, a joint (not shown) is provided on the functional liquid suction tube 152 of the above-described suction tube unit 151, and an air suction tube 212 (air flow path) connected to the blower 211 is provided. It is connected to this joint. That is, when the blower 211 is driven, air is sucked from each cap 102 via the air suction tube 212 and the suction branch tube 153. A collection trap 263 is provided in the air suction tube 212 to collect and reuse the satellite sucked together with the functional liquid received by the cap 102 and the air, and to ensure that the satellite reaches the blower 211. Preventing. Further, between the joint of the air suction tube 212 and the collection trap 263, an air suction open / close valve 213 (open / close valve) for switching between the functional liquid flow path and the air flow path is provided.
[0055]
A series of operations when flushing the cap 102 will be described. First, the functional liquid droplet ejection head 31 (head unit 21) moves directly above the suction unit 91. Then, the cap unit 101 is moved to the second position by the elevating mechanism 181 to make a state in which there is a slight gap between the nozzle forming surface 44 of the functional liquid droplet ejection head 31 and the cap 102 (functional liquid ejection space). . Then, the air suction on-off valve 213 is opened, the functional liquid droplet ejection head 31 is driven to perform flushing, and the blower 211 is driven. In addition, since the purpose is to prevent the satellite from scattering, there is no problem even if there is some variation in the amount of air suctioned from each cap 102, but a wind speed of 1 m / sec or more is secured by suction from each cap 102. Is preferred.
[0056]
When the flushing operation is completed (or stopped), the air suction on-off valve 213 is closed and the drive of the blower 211 is stopped. The functional liquid droplet ejection head 31, the air suction opening / closing valve 213, and the blower 211 are controlled by the control unit 6, and the air suction opening / closing valve 213 is opened and closed in synchronization with the flushing operation of the functional liquid droplet ejection head 31. At the same time, the blower 211 is driven.
[0057]
As described above, in the droplet discharge device 1 of the present embodiment, the flushing performed when the functional liquid is not discharged is performed by using the cap 102 of the suction unit 91. Therefore, the functional liquid receiving member that receives the flushed functional liquid is used. There is no need to provide them, and space saving of the device can be achieved. In addition, by driving the blower 211 in synchronization with the flushing operation, the satellite generated when the flushing is performed is sucked, so that the inside of the apparatus is not polluted by the satellite floating and scattering and adhering.
[0058]
Next, the functional liquid supply / recovery means 4 will be described. The liquid supply / recovery means 4 supplies a functional liquid supply system 221 (functional liquid supply device) for supplying a functional liquid to each functional droplet discharge head 31 of the head unit 21 and a functional liquid sucked by the suction unit 91 of the maintenance means 3. A functional liquid recovery system 222 for recovery, a cleaning liquid supply system 223 for supplying a solvent of a functional material to the wiping unit 92 for cleaning, and a waste liquid recovery system 224 for recovering the functional liquid received by the flushing unit 93 are provided. . As shown in FIG. 3, the pressurized tank 231 of the functional liquid supply system 221, the reuse tank 261 of the functional liquid recovery system 222, the cleaning liquid supply The cleaning liquid tanks 271 of the system 223 are arranged side by side. In the vicinity of the reuse tank 261 and the cleaning liquid tank 271, a waste liquid tank 281 of the waste liquid collecting system 224 and a collecting trap 263 of the functional liquid collecting system 222 are provided.
[0059]
As shown in FIG. 10, the functional liquid supply system 221 stores a pressurized tank 231 for storing a large amount (3 L) of functional liquid, a functional liquid sent from the pressurized tank 231, and each functional liquid droplet. It is composed of a liquid supply tank 241 for supplying a functional liquid to the discharge head 31 and a liquid supply tube 251 for forming a liquid supply pipe and connecting these pipes. The pressurized tank 231 pumps the functional liquid stored through the liquid supply tube 251 to the liquid supply tank 241 by a compressed gas (inert gas) introduced from the air supply means 5.
[0060]
As shown in FIG. 9, the liquid supply tank 241 is fixed on the tank base 17 of the machine base 13, has a liquid level window 244 on both sides, and stores the functional liquid from the pressurized tank 231. A main body 243, a liquid level detector 245 facing the liquid level windows 244 to detect the liquid level (water level) of the functional liquid, a pan 246 on which the tank main body 243 is placed, and the tank main body 243 via the pan 246. And a tank stand 242 for supporting the same.
[0061]
As shown in FIG. 9, a liquid supply tube 251 connected to the pressurized tank 231 is connected to the upper surface of (the lid of) the tank body 243, and the liquid supply tube 251 for the liquid supply tube 251 extending to the head unit 21 side. Six supply connectors 247 and one pressurization connector 248 for an air supply tube 292 (described later) connected to the air supply means 5 are provided. The liquid level detector 245 includes an upper limit level detector 249 for detecting an upper limit of the functional liquid, that is, overflow, and a management liquid level detector 250 for detecting a control liquid level of the functional liquid in order to maintain an appropriate head pressure. Consists of The liquid supply tube 251 connected to the pressurized tank 231 is provided with a liquid level control valve 253, and by controlling the opening and closing of the liquid level control valve 253, the function liquid stored in the tank main body 243 is provided. The liquid level is adjusted so that it is always within the detection range of the control liquid level detector.
[0062]
As will be described later in detail, a three-way valve 254 (pipe opening / closing means) having an air release port is interposed in the air supply tube 292 connected to the pressurizing connector 248, and is provided from the pressurized tank 231. The pressure is cut off by venting to atmosphere. Thus, the head pressure of the liquid supply tube 251 extending toward the head unit 21 is maintained at a slightly negative head (for example, 25 mm ± 0.5 mm) by adjusting the liquid level, and the discharge nozzle of the functional droplet discharge head 31 is controlled. In addition to preventing the liquid from dripping from 42, the pumping operation of the functional liquid droplet ejection head 31, that is, the driving of the piezoelectric element in the pump section 41, allows the liquid droplets to be accurately discharged.
[0063]
As shown in FIG. 10, a head-side pressure sensor 255 (pressure detecting means) connected to a pressure controller 294 described below is attached to each of the six liquid supply tubes 251 extending to the functional droplet ejection head 31. It is provided near the head 31. These liquid supply tubes 251 are each branched into two via a T-joint 257, and a total of 12 liquid supply branch tubes 252 (branch supply pipes) are formed (see FIG. 3). The twelve supply branch tubes 252 are connected to twelve sockets 57 of a piping joint 56 provided in the head unit 21 as a device-side piping member. Each supply branch tube 252 is provided with a supply valve 256 for closing the branch supply passage, and is controlled by the control means 6 to open and close.
[0064]
The functional fluid recovery system 222 is for storing the functional fluid sucked by the suction unit 91, and is connected to the reuse tank 261 for storing the sucked functional fluid and the functional fluid suction pump 141, and stores the sucked functional fluid. And a collection tube 262 leading to the reuse tank 261. Further, a recovery trap 263 for recovering the flushed functional liquid when the functional liquid is not discharged is provided.
[0065]
The cleaning liquid supply system 223 supplies the cleaning liquid to the wiping sheet of the wiping unit 92, and includes a cleaning liquid tank 271 for storing the cleaning liquid and a cleaning liquid supply tube (not shown) for supplying the cleaning liquid in the cleaning liquid tank 271. Have. The supply of the cleaning liquid is performed by introducing compressed air from the air supply unit 5 to the cleaning liquid tank 271. A relatively volatile solvent is used for the cleaning liquid.
[0066]
The waste liquid collecting system 224 is for collecting the functional liquid discharged to the flushing unit 93, and is connected to the waste liquid tank 281 for storing the collected functional liquid and the flushing unit 93, and is discharged to the waste liquid tank 281 to the flushing unit 93. And a waste liquid tube (not shown) for introducing the functional liquid.
[0067]
Next, the air supply means 5 will be described. As shown in FIG. 10, the air supply means 5 supplies an inert gas (N.sub.N) to each part such as the pressurized tank 231 and the liquid supply tank 241. ₂ ) To supply compressed air to an air pump 291 for compressing an inert gas, and an air supply tube 292 (pressurizing pipeline) for supplying compressed air compressed by the air pump 291 to each part. ). The air supply tube 292 is provided with a regulator 293 for keeping the pressure at a predetermined constant pressure in accordance with the supply destination of the compressed air.
[0068]
Although the details will be described later, the droplet discharge device 1 of the present embodiment is configured to pressurize the liquid supply tank 241 based on the head-side pressure sensor 255 described above, and the air supply connected to the liquid supply tank 241 is provided. The tube 292 is provided with a pressure controller 294 connected to the head side pressure sensor 255 and a three-way valve 254 having an atmosphere opening port. The pressure controller 294 appropriately reduces the pressure of the compressed air sent from the regulator 293 and sends the compressed air to the liquid supply tank 241. By controlling the opening and closing of the three-way valve 254, the pressure applied to the liquid supply tank 241 can be adjusted. I have.
[0069]
In the present embodiment, compressed air is directly introduced into the pressurized tank 231 and the liquid supply tank 241. However, a pressurized box (not shown) in which the pressurized tank 231 and the liquid supply tank 241 are made of aluminum or the like. ), The pressure tank 231 and the liquid supply tank 241 may be individually pressurized via a pressure box. Specifically, vent holes and the like are provided in the pressurized tank 231 and the liquid supply tank 241, and these are communicated with the inside of the pressurized box. Keep the pressure the same. Then, by supplying compressed air from the air pump 291 to the pressurizing box, the inside of the pressurizing tank 231 and the liquid supply tank 241 is pressurized. According to this configuration, since the pressurized tank 231 and the liquid supply tank 241 are pressurized via the pressurized box, compared to a configuration in which compressed air is directly supplied to the pressurized tank 231 and the liquid supply tank 241. These can be uniformly pressurized, and the pressure inside the pressurized tank 231 and the liquid supply tank 241 can be appropriately controlled.
[0070]
Next, the control means 6 will be described. The control unit 6 includes a control unit for controlling the operation of each unit. The control unit stores a control program and control data, and has a work area for performing various control processes. I have. The control means 6 is connected to each of the above-described means, and controls the entire apparatus.
[0071]
Here, as an example of control by the control means 6, a case where a functional liquid is supplied from the liquid supply tank 241 to the functional liquid droplet ejection head 31 will be described with reference to FIG. As described above, the droplet discharge device 1 of the present embodiment supplies the functional liquid from the liquid supply tank 241 to the functional droplet discharge head 31 by the pump action of the functional droplet discharge head 31. And the function droplet discharge head 31 to the functional droplet discharge head 31. Therefore, depending on the type of the functional liquid introduced into the functional liquid droplet ejection head 31, the supply of the functional liquid by the pumping action of the functional liquid droplet ejection head 31 is delayed in addition to the change of the functional liquid supply pressure in the functional liquid enemy ejection head 31. Because of the disappearance, there may be a problem that the functional liquid cannot be properly discharged on the way. Therefore, when the functional liquid is discharged, the inside of the liquid supply tank 241 is pressurized based on the head-side pressure sensor 255 so that the supply pressure of the functional liquid is kept constant, and the discharge of the functional liquid from the functional droplet discharge head 31 is performed. And the supply of the functional liquid to the functional droplet discharge head 31 is prevented from being delayed.
[0072]
First, at the time of supplying the functional liquid, that is, at the time of discharging the functional liquid, the pressure in the six liquid supply tubes 251 extending to the functional droplet discharge head 31, that is, the functional liquid supply pressure is interposed in each supply tube 251. The pressure is detected by the head-side pressure sensor 255 (pressure detection step), and a detection signal is transmitted to the control means 6 and the pressure controller 294. Then, based on the detection signal, the control means 6 and the pressure controller 294 perform opening / closing control of the three-way valve 254 provided in the air supply tube 292 to keep the supply pressure of the functional liquid constant (adjustment step).
[0073]
Specifically, when the functional liquid supply pressure is maintained at a predetermined pressure suitable for supplying the functional liquid, the air opening port of the three-way valve 254 is opened to set the pressure in the liquid supply tank 241 to atmospheric pressure, Maintain an appropriate functional fluid supply pressure. If the functional liquid supply pressure is less than the predetermined pressure, the control means 6 closes the air opening port of the three-way valve 254, releases the air supply tube 292, and supplies compressed air to the liquid supply tank 241. Then, the supply pressure of the functional liquid is increased to a predetermined pressure. In the present embodiment, since six head-side pressure sensors 255 are provided in the six air supply tubes 292, the determination as to whether or not the supply pressure of the functional liquid is maintained at the predetermined pressure is made entirely. The determination is made based on the average functional liquid supply pressure in the air supply tube 292. The pressure controller 294 calculates the average functional liquid supply pressure and appropriately reduces the pressure of the compressed air sent from the regulator 293 based on the average functional liquid supply pressure. Then, the pressure controller 294 supplies compressed air having a pressure in consideration of the difference between the predetermined pressure and the average functional liquid supply pressure to the liquid supply tank 241, and adjusts the pressure applied to the liquid supply tank 241.
[0074]
When it is determined from the detection signal of each head-side pressure sensor 255 that the average functional liquid supply pressure has reached a predetermined pressure, the pressure controller 294 controls the three-way valve 254 to control The supply tube 292 is closed and the air release port is opened to release the pressure in the liquid supply tank 241 to the atmospheric pressure. Thereafter, the control means 6 also issues a command to open the air release port of the three-way valve 254 and close the air supply tube 292. When the functional liquid supply pressure reaches a predetermined pressure, the control means 6 reliably releases the air to the atmosphere. Supply pressure can be maintained.
[0075]
In addition, by controlling the three-way valve 254 in two steps of the control means 6 and the pressure controller 294 as described above, the pressure in the liquid supply tank 241 can be appropriately adjusted, and the function due to the excessive supply of compressed air. Liquid dripping from the droplet discharge head 31 can be prevented.
[0076]
Next, a droplet discharge device 1 according to a second embodiment of the present invention will be described. The basic configuration of the droplet discharge device 1 is substantially the same as that of the above-described first embodiment. However, in the droplet discharge device 1 of the second embodiment, corresponding to the twelve functional droplet discharge heads 31, Twelve liquid supply tanks 241 and twelve liquid supply tubes 251 are provided, and each liquid supply tank is individually pressurized and controlled based on a head-side pressure sensor 255 provided in each liquid supply tube 251. Is different.
[0077]
The difference from the first embodiment will be described with reference to FIG. 11. Twelve liquid supply tubes 251 are connected to the pressurized tank 241, and each functional liquid droplet ejection is performed via the twelve liquid supply tanks 241. The functional liquid is supplied to the head 31. As in the first embodiment, a head-side pressure sensor 255 is provided in the vicinity of the functional liquid droplet ejection head 31 of each liquid supply tube 251. The twelve head-side pressure sensors 255 are connected to the control means 6 and the pressure controller 294, respectively, and the pressure controller 294 is connected to twelve air supply tubes 292. Compressed air can be supplied to each of the liquid supply tanks 241 via the hopper.
[0078]
The pressure controller 294 can supply compressed air having a different pressure to each liquid supply tank 241 via each air supply tube 292. Therefore, based on the detection signal of each head-side pressure sensor 255, it is possible to individually control the pressurization of each corresponding liquid supply tank 241 and to discharge each functional liquid droplet discharge head from each liquid supply tank 241 at the time of discharging the functional liquid. The functional liquid supply pressure up to 31 can be reliably kept constant.
[0079]
As described above, in the droplet discharge devices 1 of the first embodiment and the second embodiment, the functional liquid supply pressure is detected and the pressure applied to the liquid supply tank 241 is adjusted based on the detected pressure. The supply pressure can be kept constant, and the functional liquid can be reliably supplied to the functional droplet discharge head 31 at the time of discharging the droplet. In addition, by keeping the functional liquid supply pressure constant, it is possible to avoid an influence on the functional liquid supply pressure due to a change in the atmospheric pressure. For example, the functional liquid discharge head can appropriately discharge the functional liquid even at a high altitude. 31 can be supplied.
[0080]
Here, a case where the above-described droplet discharge device 1 is applied to the manufacture of a liquid crystal display device will be described. FIG. 12 illustrates a cross-sectional structure of the liquid crystal display device 301. As shown in the figure, the liquid crystal display device 301 is composed of an upper substrate 311 and a lower substrate 312 having a transparent conductive film (ITO film) 322 and an alignment film 323 formed on the opposing surface mainly of a glass substrate 321; A large number of spacers 331 interposed between the upper and lower substrates 311 and 312, a sealing material 332 for sealing between the upper and lower substrates 311 and 312, and a liquid crystal 333 filled between the upper and lower substrates 311 and 312 are provided. A phase substrate 341 and a polarizing plate 342 a are stacked on the back surface of the substrate 311, and a polarizing plate 342 b and a backlight 343 are stacked on the back surface of the lower substrate 312.
[0081]
In a normal manufacturing process, the upper substrate 311 and the lower substrate 312 are separately manufactured by patterning the transparent conductive film 322 and applying the alignment film 323, respectively, and then the spacer 331 and the sealing material 332 are formed on the lower substrate 312. In this state, the upper substrate 311 is attached. Next, the liquid crystal 333 is injected from the inlet of the sealant 332, and the inlet is closed. After that, the phase substrate 341, the polarizing plates 342a and 342b, and the backlight 343 are stacked.
[0082]
The droplet discharge device 1 of the embodiment can be used, for example, for forming the spacer 331 and for injecting the liquid crystal 333. Specifically, a spacer material (for example, an ultraviolet curable resin or a thermosetting resin) or a liquid crystal that forms a cell gap is introduced as a functional liquid, and these are uniformly discharged (applied) to predetermined positions. First, the lower substrate 312 on which the sealing material 332 is printed in a ring shape is set on a suction table, and the spacer material is discharged onto the lower substrate 312 at coarse intervals, and the spacer material is solidified by irradiating ultraviolet rays. Next, a predetermined amount of liquid crystal 333 is uniformly discharged and injected into the inside of the sealing material 332 of the lower substrate 312. Thereafter, the separately prepared upper substrate 311 and the lower substrate 312 coated with a predetermined amount of liquid crystal are introduced into a vacuum and bonded together.
[0083]
As described above, since the liquid crystal 333 is uniformly applied (filled) in the cell before the upper substrate 311 and the lower substrate 312 are bonded to each other, the liquid crystal 333 does not spread to details such as corners of the cell. Can be solved.
[0084]
By using an ultraviolet curable resin or a thermosetting resin as the functional liquid (material for the sealant), the above-described sealant 332 can be printed by the droplet discharge device 1. Similarly, by introducing a polyimide resin as the functional liquid (alignment film material), the alignment film 323 can be formed by the droplet discharge device 1.
[0085]
As described above, in the manufacture of the liquid crystal display device 301, it is assumed that various types of functional liquids are introduced. However, in the above-described droplet discharge device 1, the functional liquid supply pressure is detected and the supply tank 241 is pressurized and controlled. Therefore, even if the viscosity of the functional liquid is different, the functional liquid supply pressure can be kept constant, the functional liquid can be appropriately supplied to the functional droplet discharge head 31, and the functional droplet discharge head 31 The functional liquid can be stably discharged.
[0086]
By the way, the above-described droplet discharge device 1 can be used for manufacturing various electro-optical devices (devices) in addition to the above-described liquid crystal display device 301 mounted on an electronic device such as a mobile phone or a personal computer. . That is, the present invention can be applied to the manufacture of an organic EL device, an FED device, a PDP device, an electrophoretic display device, and the like.
[0087]
An example in which the above-described droplet discharge device 1 is applied to the manufacture of an organic EL device will be briefly described. As shown in FIG. 13, the organic EL device 401 includes a substrate 421, a circuit element portion 422, a pixel electrode 423, a bank portion 424, a light emitting element 425, a cathode 426 (a counter electrode), and a sealing substrate. The organic EL element 411 is connected to a wiring of a flexible substrate (not shown) and a driving IC (not shown). The circuit element portion 422 is formed on the substrate 421, and the plurality of pixel electrodes 423 are arranged on the circuit element portion 422. A bank 424 is formed between the pixel electrodes 423 in a lattice pattern, and a light emitting element 425 is formed in a concave opening 431 formed by the bank 424. The cathode 426 is formed over the entire upper surface of the bank portion 424 and the light emitting element 425, and a sealing substrate 427 is stacked on the cathode 426.
[0088]
In the manufacturing process of the organic EL device 401, after the bank portion 424 is formed at a predetermined position on the circuit element portion 422 and the substrate 421 (work W) on which the pixel electrode 423 is formed, the light emitting element 425 is appropriately Is performed, and then a light emitting element 425 and a cathode 426 (a counter electrode) are formed. Then, the sealing substrate 427 is laminated on the cathode 426 and sealed to obtain the organic EL element 411. Then, the cathode 426 of the organic EL element 411 is connected to the wiring of the flexible substrate and connected to the driving IC. The organic EL device 401 is manufactured by connecting the wiring of the circuit element portion 422.
[0089]
The droplet discharge device 1 is used for forming the light emitting element 425. Specifically, a light emitting element material (functional liquid) is introduced into the functional droplet discharge head 31, and the light emitting element material is discharged corresponding to the position of the pixel electrode 423 on the substrate 421 on which the bank portion 424 is formed. By drying this, the light emitting element 425 is formed. In the formation of the pixel electrode 423 and the cathode 426 described above, the liquid crystal material can be formed by using the liquid material corresponding to each of them.
[0090]
As other electro-optical devices, devices including the above-described preparations in addition to metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable. As described above, there is a possibility that various types of functional liquids may be introduced into the droplet discharge device 1. However, by using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), the function can be improved. The functional liquid supply pressure in the droplet discharge head can be kept constant, and the functional liquid can be reliably supplied to the functional droplet discharge head, so that various kinds of manufacturing can be performed efficiently.
[0091]
【The invention's effect】
As described above, according to the functional liquid supply method and the functional liquid supply device for the functional liquid droplet ejection head of the present invention, the functional liquid supply pressure to the functional liquid droplet ejection head is kept constant. The functional liquid discharge performance of the droplet discharge head can be stabilized, and the functional liquid can be reliably supplied to the functional droplet discharge head. That is, due to pressure loss caused by pipe frictional resistance from the functional liquid tank to the functional liquid droplet discharge head, the supply pressure of the functional liquid to the functional liquid droplet discharge head fluctuates, and the performance of discharging the functional liquid is impaired. In addition, it is possible to solve the problem that the supply of the functional liquid cannot be performed in time when the functional liquid is discharged.
[0092]
Further, the droplet discharge device of the present invention can keep the supply pressure of the functional liquid to the functional droplet discharge head constant, so that even if the viscosity of the functional liquid introduced into the functional droplet discharge head is different, The function liquid supply pressure in the ejection head can be appropriately maintained, and the function liquid can be appropriately supplied to the function droplet ejection head, so that stable function droplet ejection performance can be obtained. That is, according to the droplet discharge device of the present invention, various functional liquids can be introduced, and the versatility of the droplet discharge device can be improved.
[0093]
Further, in the method for manufacturing an electro-optical device, the electro-optical device, and the electronic apparatus of the present invention, which are manufactured using the above-described droplet discharge device, the functional liquid can be stably and appropriately discharged onto a work, thereby improving efficiency. These can be manufactured specifically.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a functional droplet discharge device according to an embodiment.
FIG. 2 is a front view of the functional droplet discharge device according to the embodiment.
FIG. 3 is a right side view of the functional droplet discharge device according to the embodiment.
FIG. 4 is a plan view of a head unit.
5A is a perspective view of the appearance of a functional droplet discharge head, and FIG. 5B is a cross-sectional view when the functional droplet discharge head is mounted on a pipe adapter.
FIG. 6 is an external perspective view of a suction unit.
FIG. 7 is a front view of the suction unit.
FIG. 8 is a sectional view around a cap.
FIG. 9 is an external perspective view around a liquid supply tank.
FIG. 10 is a schematic diagram of a functional liquid droplet ejection head, a functional liquid supply system, an air supply unit, and a suction unit connected thereto according to the first embodiment of the present invention.
FIG. 11 is a schematic diagram of a functional liquid droplet ejection head, a functional liquid supply system, an air supply unit, and a suction unit connected thereto according to a second embodiment of the present invention.
FIG. 12 is a sectional view of a liquid crystal display device manufactured by using the manufacturing method of the present invention.
FIG. 13 is a sectional view of an organic EL device manufactured by using the manufacturing method of the present invention.
[Explanation of symbols]
1 droplet discharge device 2 discharge means
3 Maintenance means 4 Functional liquid supply / recovery means
5 Air supply means 6 Control means
31 functional droplet discharge head 42 discharge nozzle
44 Nozzle formation surface (nozzle surface) 91 Suction unit
93 Flushing unit 101 Cap unit
102 Cap 141 Functional liquid suction pump
152 Functional liquid suction tube 153 Suction branch tube
162 Cap side pressure sensor 181 Elevating mechanism
201 Flushing box 211 Blower
212 Air suction tube 213 Air suction open / close valve
221 Functional liquid supply system 222 Functional liquid recovery system
231 Pressurized tank 241 Liquid supply tank
251 Liquid supply tube 254 Three-way valve
255 Head side pressure sensor 252 Liquid supply branch tube
291 Air pump 292 Air supply tube
294 Pressure controller 301 Liquid crystal display
401 Organic EL device
W Work

Claims (11)

In a method for supplying a functional liquid to a functional droplet discharge head, which supplies a functional liquid from a functional liquid supply unit to a functional droplet discharge head via a supply pipe,
A pressure detecting step of detecting a pressure in the supply pipe line when the functional droplet discharge head is driven;
An adjusting step of adjusting the functional liquid supply pressure of the functional liquid supply unit so that the pressure in the functional liquid droplet ejection head is constant based on the detection result of the pressure detecting step. A method for supplying a functional liquid to a functional droplet discharge head. In a functional liquid supply apparatus for supplying a functional liquid from a functional liquid supply unit to a functional liquid droplet ejection head via a supply pipe,
When the functional droplet discharge head is driven, a pressure detecting unit that detects a pressure in the supply conduit,
Pressurizing means for pressurizing the inside of the functional liquid supply tank,
Control means for controlling the pressing force of the pressurizing means based on the detection result of the pressure detecting means so that the functional liquid supply pressure of the functional liquid supply means becomes constant. Functional liquid supply device to droplet discharge head. 3. The functional liquid supply device according to claim 2, wherein the pressure detection unit is disposed near the functional liquid discharge head. The pressurizing means, a compressed air supply source for supplying compressed air,
A pressurizing pipe connecting the compressed air supply source and the functional liquid supply tank,
Conduit opening / closing means interposed in the pressurizing conduit,
4. The functional liquid supply apparatus according to claim 2, wherein the control unit opens and closes the conduit opening and closing unit based on a detection result of the pressure detecting unit. 5. The apparatus according to claim 4, wherein the conduit opening / closing means comprises a three-way valve having an atmosphere opening port. A plurality of supply conduits and a plurality of the functional liquid tanks are provided corresponding to the plurality of the functional droplet discharge heads,
The pressure detecting means detects a pressure in each supply conduit connected to each functional droplet discharge head,
6. The functional liquid supply apparatus according to claim 2, wherein the control unit individually controls a pressure applied to each of the functional liquid tanks by the pressurizing unit. . The supply conduit is connected to a plurality of the functional droplet ejection heads via a branch supply conduit obtained by branching the supply conduit into a plurality.
The pressure detecting means detects a pressure in each branch supply line,
7. The functional droplet discharge according to claim 2, wherein the control unit controls the pressing force of the pressurizing unit based on an average pressure in the plurality of branch supply pipes. Functional liquid supply device to head. A device for supplying a functional liquid to the functional droplet discharge head according to claim 2,
A droplet discharge device comprising: a functional droplet discharge head that discharges a functional liquid onto a work. A method for manufacturing an electro-optical device, comprising: forming a film-forming portion using functional droplets on the work using the droplet discharge device according to claim 8. An electro-optical device using the droplet discharge device according to claim 8, wherein a film-forming portion made of functional droplets is formed on the work. An electronic apparatus comprising the electro-optical device according to claim 10.

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