JP2004109752A - Photosensitive resin composition and method for forming spacer or color filter using them - Google Patents

Photosensitive resin composition and method for forming spacer or color filter using them Download PDF

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JP2004109752A
JP2004109752A JP2002274632A JP2002274632A JP2004109752A JP 2004109752 A JP2004109752 A JP 2004109752A JP 2002274632 A JP2002274632 A JP 2002274632A JP 2002274632 A JP2002274632 A JP 2002274632A JP 2004109752 A JP2004109752 A JP 2004109752A
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photosensitive resin
composition
photosensitive
carboxyl group
color filter
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JP4150236B2 (en
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Yoshizo Minamoto
源 義三
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Taiyo Holdings Co Ltd
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Taiyo Ink Mfg Co Ltd
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  • Optical Filters (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a composition for a photospacer which is a one-component composition that easily obtains uniform film thickness and pigment concentration, has a long life, has a property of drying to the touch which can be exposed by an inexpensive contact type exposing machine and can be further cured at low temperature and to provide a photosensitive resin composition for a color filter and its forming method. <P>SOLUTION: This photosensitive resin composition for a color filter contains (A) a photosensitive resin obtained by neutralizing a photosensitive resin containing a carboxyl group which has two or more photosensitive unsaturated double bonds and one or more carboxyl groups in one molecule (a) with a first-class amino compound, (B) a photosensitive (meta) acrylate compound, (C) a photopolymerization primer, (D) water, (E) a composition for a photospacer containing an organic solvent and (F) pigment in the composition. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、液晶やEL(Electro Luminescence)等のフラットパネルディスプレィに使用されるフォトスペーサー用組成物及びカラーフィルター用感光性樹脂組成物とそれらを用いたスペーサー又はカラーフィルターの形成方法に関する。
【0002】
【従来の技術】
液晶やEL(Electro Luminescence)等のフラットパネルディスプレィに使用されるスペーサー及びカラーフィルターは、高解像性、耐熱性、耐溶剤性が要求されている。
カラーフィルター用感光性樹脂組成物としては、特公平8−7282号に、非感光性のカルボキシル基含有樹脂、光重合性モノマー、光重合開始剤、希釈剤、及びエポキシ樹脂を組み合わせた組成のカラーフィルターが開示されている。
このようなカラーフィルター用感光性樹脂組成物は、膜厚や顔料濃度を均一にする必要があることから、一液性組成物にすることが好ましく、前述の組成物の場合、反応性の低いエポキシ樹脂を使用して一液性としているがライフが短いため、ライフ切れ組成物の廃棄の問題や、少量生産となりコスト高となることが問題となっている。
また、非感光性のカルボキシル基含有樹脂を用いているため、光重合性モノマーの添加量が多く、そのため指触乾燥性が悪く、高価な非接触型露光機を使用せざるを得ない状況にある。更に、耐溶剤性が低いことから、熱硬化温度として200℃以上の高温で使用しているのが現状である。
【0003】
また、感光性樹脂組成物としては、特開平5−202330号公報に、1分子中にエチレン性不飽和結合及びカルボキシル基を併せ持つ感光性樹脂をアミン化合物で中和して水希釈可能な組成物が開示されているが、第一級アミン化合物はエチレン性不飽和結合とマイケル付加反応によりゲル化を起こしやすいため、第一級アミン化合物の使用は困難であると記載されている。更に、特開平5−339307号公報には、第一級アミン化合物がエチレン性不飽和結合と反応しやすいため、エチレン性不飽和結合を持つ樹脂に第一級アミン化合物をマイケル付加反応により付加させた後、有機酸で中和したカチオン性の樹脂組成物が提案されている。
以上のように、第一級アミン化合物は、不飽和二重結合とマイケル付加反応を起こしやすく、又はゲル化を起こすという問題から、カルボキシル基含有感光性樹脂の中和には、用いることが出来なかった。
【0004】
【発明が解決しようとする課題】
本発明は、前記の様な問題に鑑みなされたものであり、その目的は、均一な膜厚及び顔料濃度を得やすい一液性組成物であり、かつライフが長く、安価な接触型露光機で露光可能な指触乾燥性を有し、更に低温で硬化できるフォトスペーサー用組成物及びカラーフィルター用感光性樹脂組成物とその形成方法を提供することにある。
【0005】
【課題を解決するための手段】
前記目的を達成するために、本発明によれば、(A)(a)1分子中に感光性の不飽和二重結合を2個以上有し、かつカルボキシル基を1個以上有するカルボキシル基含有感光性樹脂を、(b)第一級アミノ化合物で中和させて出来る感光性樹脂、(B)感光性(メタ)アクリレート化合物、(C)光重合開始剤、(D)水、及び(E)有機溶剤を含有することを特徴としたフォトスペーサー用組成物が提供され、更に上記組成物に、(F)顔料を添加・分散したカラーフィルター用感光性樹脂組成物が提供される。
更に、本発明の他の側面によれば、上記フォトスペーサー用組成物及びカラーフィルター用感光性樹脂組成物を、ガラス基板若しくはプラスチック基板表面に塗布・乾燥し、選択的に活性エネルギー線により露光し、加熱後、未露光部をアルカリ水溶液により現像し、少なくとも120℃に加熱して熱硬化することを特徴とするスペーサー又はカラーフィルターの形成方法が提供される。
【0006】
【発明の実施の形態】
本発明者は、前記の課題を解決するため鋭意検討を重ねた結果、(A)(a)1分子中に感光性の不飽和二重結合を2個以上有し、かつカルボキシル基を1個以上有するカルボキシル基含有感光性樹脂を、(b)第一級アミノ化合物で中和させて出来る感光性樹脂、(B)感光性(メタ)アクリレート化合物、(C)光重合開始剤、(D)水、および(E)有機溶剤を含有する感光性樹脂組成物が、一液性でライフが長く、指触乾燥性が良好であり、かつ、アルカリ水溶液で現像でき、解像性に優れ、より低温で硬化ができ、更に十分な耐溶剤性があることを見出し、本発明を完成させるに至ったものである。
【0007】
即ち、本発明の組成物中の感光性樹脂(A)は、(a)1分子中に感光性の不飽和二重結合を2個以上有し、かつカルボキシル基を1個以上有するカルボキシル基含有感光性樹脂のカルボキシル基を、(b)第一級アミノ化合物で中和させることにより、カルボン酸アンモニウム構造ができ、指触乾燥性が向上し、またアルカリ水溶液への溶解性を調整し優れた解像性とアルカリ現像性が得られると共に、更に加熱することにより脱水縮合してアミドになり、耐溶剤性に富む硬化物が得られると考えられる。
また、水を添加することにより、カルボン酸アンモニウム塩構造に水が配位し、不飽和二重結合とのマイケル付加反応を抑え、十分なライフが得られる。
【0008】
以下、本発明の感光性樹脂組成物について詳細に説明する。
まず、本発明において用いる1分子中に感光性の不飽和二重結合を2個以上有し、かつカルボキシル基を1個以上有するカルボキシル基含有感光性樹脂(a)としては、具体的にはそれ自体が感光性の不飽和二重結合を有する公知慣用のカルボン酸含有の感光性樹脂が使用出来る。
好適に使用できる樹脂(オリゴマー及びポリマーのいずれでも良い。)としては、以下のようなものが挙げられる。
(a−1)不飽和カルボン酸と不飽和二重結合を有する化合物の共重合体に、カルボキシル基と反応する基と不飽和二重結合を有する化合物を、共重合体のカルボキシル基に付加させることによって得られるカルボキシル基含有感光性樹脂、
(a−2)エポキシ基と不飽和二重結合を有する化合物と不飽和二重結合を有する化合物の共重合体に、不飽和モノカルボン酸を反応させ、生成した第二級の水酸基に多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、
(a−3)不飽和二重結合を有する酸無水物と不飽和二重結合を有する化合物の共重合体に、水酸基と不飽和二重結合を有する化合物を反応させて得られるカルボキシル基含有感光性樹脂、
(a−4)1分子中に2個以上のエポキシ基を有する化合物と不飽和モノカルボン酸を反応させ、生成した第二級の水酸基に多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、
(a−5)水酸基含有ポリマーに多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂に、エポキシ基と不飽和二重結合を有する化合物を、反応させて得られるカルボキシル基含有感光性樹脂などが挙げられる。
【0009】
前記(a−1)のカルボキシル基含有感光性樹脂は、不飽和カルボン酸と不飽和二重結合を有する化合物との共重合体のカルボキシル基の一部に、十分な光硬化性を得られる割合で、ビニル基、アクリロイル基、メタクリロイル基等の感光性の不飽和二重結合と、エポキシ基、酸クロライド基などのカルボキシル基との反応性を有する基を併せ持つ化合物、例えばグリシジル(メタ)アクリレートを反応させ、該化合物に感光性の不飽和二重結合を側鎖に導入した樹脂である。
このように、前記共重合体のカルボキシル基の一部に上記化合物を反応させることにより、一部のカルボキシル基が未反応のまま残存し、得られる樹脂は、アルカリ水溶液に対して可溶性となる。このため、上記樹脂を含有する組成物から形成した皮膜は、選択的露光後にアルカリ水溶液により安定した現像が可能となる。
なお、本明細書中で(メタ)アクリレートとは、アクリレートとメタアクリレートを総称する用語であり、他の類似の表現についても同様である。
【0010】
前記(a−2)のカルボキシル基含有感光性樹脂は、分子中にエポキシ基と不飽和二重結合を有する化合物、例えばグリシジル(メタ)アクリレート、α−メチルグリシジル(メタ)アクリレート等と不飽和二重結合を有する化合物の共重合体のエポキシ基に、十分な光硬化性を得られる割合で不飽和カルボン酸のカルボキシル基を反応させ、該不飽和カルボン酸の不飽和二重結合を側鎖に導入し、更に、上記付加反応で生成した第二級の水酸基に、多塩基酸無水物、例えば無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸等を付加反応させ、側鎖にカルボキシル基を導入した樹脂である。
【0011】
前記(a−3)のカルボキシル基含有感光性樹脂は、不飽和二重結合を有する酸無水物、例えば無水マレイン酸、無水イタコン酸等と不飽和二重結合を有する化合物との共重合体の酸無水物基に、十分な光硬化性を得られる割合で水酸基と不飽和二重結合を有する化合物、例えばヒドロキシアルキル(メタ)アクリレート類、前記ヒドロキシアルキル(メタ)アクリレート類にカプロラクトンを反応させたモノマー、前記ヒドロキシアルキル(メタ)アクリレート類にポリカプロラクトンオリゴマーを反応させたマクロモノマー等の水酸基を反応させてハーフエステルとし、不飽和二重結合を側鎖に導入した樹脂である。
【0012】
前記(a−4)のカルボキシル基含有感光性樹脂は、1分子中に2個以上のエポキシ基を有する化合物、例えばビスフェノールA型、ビスフェノールF型、ビスフェノールS型、フェノールノボラック型、クレゾールノボラック型、ビフェノール型、ビキシレノール型、N−グリシジル型等の公知慣用エポキシ樹脂のエポキシ基に、十分な光硬化性を得られる割合で(メタ)アクリル酸等の不飽和モノカルボン酸のカルボキシル基を反応させ、エポキシ樹脂骨格の不飽和基含有感光性樹脂を生成し、更に上記付加反応で生成した第二級の水酸基に多塩基酸無水物を付加させ、側鎖にカルボキシル基を導入した樹脂である。
【0013】
前記(a−5)のカルボキシル基含有感光性樹脂は、水酸基含有ポリマー、例えばオレフィン系水酸基含有ポリマー、アクリル系ポリオール、ゴム系ポリオール、ポリビニルアセタール、スチレンアリルアルコール系樹脂セルロース類等に、多塩基酸無水物を反応させてカルボキシル基を生成させ、更にそのカルボキシル基の一部に、十分な光硬化性を得られる割合で前記エポキシ基と不飽和二重結合を有する化合物のエポキシ基を反応させ、不飽和二重結合を側鎖に導入した樹脂である。
【0014】
上記したようなカルボキシル基含有感光性樹脂(a)は、単独又は2種類以上を混合して用いてもよいが、いずれの場合でもこれらの合計量は、組成物全量の10〜80質量%の割合で配合することが好ましい。これらの樹脂の配合量が上記範囲よりも少ない場合、形成する皮膜中の上記樹脂の分布が不均一になり易く、十分な光硬化性が得られ難く、選択的露光、現像によるパターン形成が困難となる。一方、上記範囲よりも多い場合、現像時間の増加や密着性不良を生じ易くなるので好ましくない。
【0015】
また、上記カルボキシル基含有感光性樹脂(a)としては、重量平均分子量が1,000〜100,000、好ましくは5,000〜20,000であり、酸価が25〜250mgKOH/gで、かつ、二重結合当量が200〜2,000g/当量、好ましくは400〜1,500g/当量であるものが用いられる。上記樹脂の重量平均分子量が1,000未満の場合、現像時の皮膜の密着性が低下するので好ましくない。一方、100,000を超えた場合、現像不良を生じ易いので好ましくない。また、酸価が25mgKOH/g未満の場合、アルカリ水溶液に対する溶解性が不充分で現像不良を生じるので好ましくない。一方、250mgKOH/gを超えた場合、現像時アンダーカット(光硬化反応が進み難いレジスト下部が現像される現象)が生じやすく、又、耐現像性が低下するので好ましくない。更に、感光性樹脂の二重結合当量が200g/当量未満の場合、硬化膜塗膜が脆くなり好ましくない。一方、2,000g/当量を超えた場合、感度が低く光硬化時に高露光量を必要とするので好ましくない。
【0016】
前記第一級アミノ化合物(b)としては、例えば、メチルアミン、エチルアミン、n−プロピルアミン、イソブチルアミン、n−ブチルアミン、n−ペンチルアミン、n−ヘキシルアミン、n−オクチルアミン等の脂肪族アミン類、ベンジルアミン、アニリン、トルイジン等の芳香族アミン類、シクロヘキシルアミン等の脂環式アミン類、顔料を分散する時に使用するアミン系分散剤、o−トリルビグアニド等のビグアニド類、ジシアンジアミド等が挙げられるが、これらの中でシクロヘキシルアミン等の脂環式アミン類、o−トリルビグアニド等のビグアニド類、ジシアンジアミド等が、不飽和二重結合とのマイケル付加反応を起こしにくいので、特に好ましい。
【0017】
前記一級アミノ化合物(b)の配合量は、前記カルボキシル基含有感光性樹脂(a)のカルボキシル基を、20〜70モル%中和することが好ましい。中和率が、20モル%未満の場合、指触乾燥性、耐溶剤性が低下するので好ましくない。一方、中和率が、70モル%を超えた場合、有機溶剤への溶解性が低下し、感光性樹脂が析出するので好ましくない。
【0018】
前記感光性(メタ)アクリレート化合物(B)としては、例えば、ペンタエリスリトールトリアクリレート、ジペンタエリスリトールペンタアクリレートなどの水酸基含有のアクリレート類;ポリエチレングリコールジアクリレート、ポリプロピレングリコールジアクリレートなどの水溶性のアクリレート類;トリメチロールプロパントリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールヘキサアクリレートなどの多価アルコールの多官能ポリエステルアクリレート類;トリメチロールプロパン、水添ビスフェノールA等の多官能アルコール若しくはビスフェノールA、ビフェノールなどの多価フェノールのエチレンオキサイド付加物及び/又はプロピレンオキサイド付加物のアクリレート類;上記水酸基含有アクリレートのイソシアネート変成物である多官能若しくは単官能ポリウレタンアクリレート;ビスフェノールAジグリシジルエーテル、水添ビスフェノールAジグリシジルエーテル又はフェノールノボラックエポキシ樹脂の(メタ)アクリル酸付加物であるエポキシアクリレート類、及び上記アクリレート類に対応するメタクリレート類などが挙げられ、これらは単独で又は2種類以上を組み合わせて使用することができる。これらの中でも、1分子中に2個以上の(メタ)アクリロイル基を有する多官能(メタ)アクリレート化合物が、耐現像性向上や高感度化の面から特に好ましい。
【0019】
光重合開始剤(C)としては、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル等のベンゾインとベンゾインアルキルエーテル類;アセトフェノン、2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシ−2−フェニルアセトフェノン、1,1−ジクロロアセトフェノン等のアセトフェノン類;2−メチル−1−[4−(メチルチオ)フェニル]−2−モルフォリノ−プロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノフェニル)−ブタン−1−オン、N,N− ジメチルアミノアセトフェノン等のアミノアセトフェノン類;2−メチルアントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノン等のアントラキノン類;2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントン等のチオキサントン類;アセトフェノンジメチルケタール、ベンジルジメチルケタール等のケタール類;ベンゾフェノン、4,4´− ビスジエチルアミノベンゾフェノン等のベンゾフェノン類又はキサントン類;2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイドや、2−トリクロロメチル−5−スチリル−1,3,4−オキサジアゾール、2−トリクロロメチル−5−(p−シアノスチリル)−1,3,4−オキサジアゾール等のハロメチルオキサジアゾール系化合物;2,4―ビス(トリクロロメチル)―6―(p―メトキシ−フェニルビニル)−1,3,5−トリアジン、2,4−ビス(トリクロロメチル)−6−p−メトキシスチリル−s−トリアジン、2,4−ビス(トリクロロメチル)−6−(1−p−ジメチルアミノフェニル−1,3−ブタジエニル)−s−トリアジン等のハロメチル−s−トリアジン系化合物が挙げられる。
これら公知慣用の光重合開始剤は、単独で又は2種類以上の混合物として使用でき、更にはN,N−ジメチルアミノ安息香酸エチルエステル、N,N−ジメチルアミノ安息香酸イソアミルエステル、ペンチル−4−ジメチルアミノベンゾエート、トリエチルアミン、トリエタノールアミン等の第三級アミン類などの光開始助剤を加えることができる。また可視光領域に吸収のあるCGI―784等(チバ・スペシャルティ・ケミカルズ(株)製)のチタノセン化合物等も、光反応を促進するために添加することができる。特にこれらに限られるものではなく、紫外光もしくは可視光領域で光を吸収し、感光性の不飽和二重結合をラジカル重合させるものであれば、光重合開始剤、光開始助剤に限らず、単独で又は2種類以上を組み合わせて使用することができる。
【0020】
前記水(D)は、中和により生じたカルボン酸アンモニウム塩構造に配位し、前記カルボキシル基含有感光性樹脂(a)又は感光性(メタ)アクリレート化合物(B)の不飽和二重結合と第一級アミノ化合物(b)とのマイケル付加反応を抑制するものであり、添加量としては、第一級アミノ化合物1モルに対して、1〜5モルが好ましい。
【0021】
また、前記感光性樹脂(A)、感光性(メタ)アクリレート化合物(B)、及び光重合開始剤(C)を溶解させ、また組成物を塗布方法に適した粘度に調整するために、有機溶剤(E)が使用される。
有機溶剤(E)としては、例えば、メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類;セロソルブ、メチルセロソルブ、ブチルセロソルブ、カルビトール、メチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、ジプロピレングリコールジエチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類;酢酸エチル、酢酸ブチル、セロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート、ジプロピレングリコールモノメチルエーテルアセテート等の酢酸エステル類;エタノール、プロパノール、エチレングリコール、プロピレングリコール等のアルコール類;オクタン、デカン等の脂肪族炭化水素;石油エーテル、石油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤などが挙げられる。これらの有機溶剤は、単独で又は2種類以上の混合物として使用することができる。
【0022】
前記顔料(F)は、上記感光性樹脂組成物をカラーフィルター用感光性樹脂組成物として用いる場合、使用される。
例えば、赤の顔料として、アントラキノン系顔料、ペリレン系顔料を、単独または、それらの少なくとも一種とジスアゾ系黄色顔料またはイソインドリン系黄色顔料との混合物が用いられる。緑の顔料としては、ハロゲン化フタロシアニン系顔料を、単独又は、ジスアゾ系黄色顔料またはイソインドリン系黄色顔料との混合物が用いられる。青の顔料としては、フタロシアニン系顔料を、単独又は、ジオキサジン系紫色顔料との混合物が用いられる。ブラックマトリックス用の顔料としては、カーボン、チタンカーボン、酸化鉄単独又は、これらの混合物が用いられる。
【0023】
また、必要に応じて公知慣用の種々の添加剤を使用することができる。例えば、消泡剤、密着性付与剤、レベリング剤、顔料分散剤等の各種添加剤類を配合することができる。
【0024】
以上の成分を配合して得られた本発明の組成物は、撹拌機、又は分散機、例えばロールミル、サンドミル、ボールミルあるいはアトライターのような分散機を使用して均一になるまで、混合・分散して調整する。
このように調整された本発明の組成物は、適当な方法、例えばロールコート法、バーコート法、カーテンコート法及びスピンコート法等の塗布方法により、ガラス基板若しくはプラスチック基板に塗布し、適当な温度、例えば70℃の熱風循環式乾燥炉で乾燥させ、タックフリーな塗膜を得る。次いで、パターンを形成したフォトマスクを通して選択的に活性エネルギー線により露光し、必要ならば適当な温度で加熱(露光後の加熱工程を、Post Expousure Bakeと言い、PEBと略す。)し、アルカリ水溶液で現像し、適当な温度、例えば120℃で熱硬化して、スペーサー又はカラーフィルターを得ることができる。
【0025】
前記アルカリ水溶液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類などのアルカリ水溶液が使用できる。
また、光硬化させるための照射光源としては、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプ又はメタルハライドランプなどが適当である。その他、レーザー光線なども活性エネルギー線として利用できる。
【0026】
以下、本発明の実施例等により具体的に説明するが本発明はこれら実施例に限定されるものではない。なお、以下において特に断りのない限り、「部」は質量部を意味するものとする。
【0027】
(合成例1)
クレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業(株)社製、エポキシ当量=212、軟化点85℃〕212部、アクリル酸72部(1.0モル)、メチルハイドロキノン0.28部、プロピレングリコールモノメチルエーテルアセテート174.2部を仕込み、95℃に加熱し、上記混合物が均一に溶解したことを確認後、トリフェニルホスフィン1.14部を仕込み、100℃に加熱し、約24時間反応させ、酸価が0.5mgKOH/gの反応物を得た。これに、テトラヒドロ無水フタル酸39.5部(0.26モル)を仕込み、90℃に加熱し約6時間反応させ、赤外吸光分析器にて1770cm−1の酸無水物の吸収がなくなったことを確認し、プロピレングリコールモノメチルエーテルアセテート149.3部を加え、固形分酸価45.1mgKOH/g、固形分濃度50質量%の感光性樹脂を得た。この反応溶液をAワニスと称す。
【0028】
(合成例2)
合成例1に使用したアクリル酸を、プロピオン酸74部(1.0モル)に変更して同様に合成し、固形分酸価44.5mgKOH/g、固形分濃度50質量%の樹脂を得た。この反応溶液をBワニスと称す。
【0029】
フォトスペーサー用組成物の実施例1〜3と比較例1〜2の配合を、次の表1に示す。
【0030】
【表1】

Figure 2004109752
【0031】
フォトスペーサー用組成物の実施例1〜3と比較例1〜2の評価結果を、次の表2に示す。
【0032】
【表2】
Figure 2004109752
【0033】
上記表2中の性能試験の評価方法は、以下の通りである。
【0034】
(1)指触乾燥性
上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)に、バーコーターで乾燥塗膜が15μmになるように塗布し、70℃のホットプレート上で5分間乾燥し、冷却後PETフィルムを押し当て、指触乾燥性を評価する。
○ ;全く、べた付きの無いもの。
△ ;ほんの僅かに、べた付きのあるもの。
× ;べた付きのあるもの。
××;塗膜が剥がれるもの。
【0035】
(2)ライフ
上記組成物を40℃で90日間保存し、流動性が無くなる日数を調べる。
○ ;90日間、流動性がある。
× ;流動性が無くなった日数。
【0036】
(3)熱安定性
同様に上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)に、バーコーターで乾燥塗膜が15μmになるように塗布し、70℃のホットプレート上で5分間乾燥した。冷却後、30℃の0.4質量%炭酸ソーダ水溶液で、スプレー圧0.2MPaで2分現像し、残渣を評価する。
残渣が無ければ、更に10℃上げて評価を行い、残渣が発生するまで行い、残渣の無い最高温度を熱安定性として評価する。
【0037】
(4)感度
上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)に、バーコーターで乾燥塗膜が15μmになるように塗布し、70℃のホットプレート上で5分間乾燥した。冷却後コダックNo.2ステップタブレットを使用し、超高圧水銀灯で400mJ/cm露光した。次いで、70℃のホットプレート上で30秒間PEB(露光後の後の加熱)を行い、30℃の0.4質量%炭酸ソーダ水溶液で、スプレー圧0.2MPaで2分現像し、光沢のある段数で評価する。
【0038】
(5)解像性
上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)に、バーコーターで乾燥塗膜が15μmになるように塗布し、70℃のホットプレート上で5分間乾燥した。冷却後、10〜200μmまで、10μm間隔で線幅が異なったパターンが描かれているガラスマスクを使用し、感度が6段となる露光量で露光した。次いで、70℃のホットプレート上で30秒間PEBを行い、30℃の0.4質量%炭酸ソーダ水溶液で、スプレー圧0.2MPaで2分現像し、残存する最小線幅を評価する。
【0039】
(6)密着性
上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)に、バーコーターで乾燥塗膜が15μmになるように塗布し、70℃のホットプレート上で5分間乾燥した。冷却後、感度が4段以上になる露光量で、全面露光を行い、ホットプレートにて熱硬化させた。
各例の熱硬化条件は、実施例1;120℃,8分間、実施例2;150℃,8分間、実施例3;180℃,8分間、比較例1;150℃,8分間、比較例2;150℃,8分間と220℃,8分間の2条件で硬化させた。
この硬化塗膜に、カッターで縦横11本ずつ切れ目を入れ、100個の升目を作り、セロハン粘着テープでいくつ残るかを評価する。(碁盤目テスト)
【0040】
(7)耐TMAH性
上記硬化塗膜を、3.0質量%のテトラメチルアンモニウムハイドロオキサイド水溶液に浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0041】
(8)耐アセトン性
上記硬化塗膜を、アセトンに浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0042】
(9)耐NMP性
上記硬化塗膜を、N−メチルピロリドンに浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0043】
(10)耐GBL性
上記硬化塗膜を、γ−ブチロラクトンに浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0044】
次の表3に示す配合成分を、サンドミルで8時間分散し、5μmのフィルターで濾過し、カラーフィルター用感光性樹脂組成物を得た。
【0045】
【表3】
Figure 2004109752
【0046】
カラーフィルター用感光性樹脂組成物の実施例4〜6と比較例3〜4の評価結果を、次の表4に示す。
【0047】
【表4】
Figure 2004109752
【0048】
上記表4中の性能試験の評価方法は、以下の通りである。
【0049】
(11)指触乾燥性
上記組成物を、スピンコーターで乾燥塗膜が1μmになるようにガラス基板(コーニング社製1737 0.7mm厚)に塗布し、70℃のホットプレート上で1分間乾燥し、冷却後PETフィルムを押し当て、指触乾燥性を評価する。
○ ;全く、べた付きの無いもの。
△ ;ほんの僅かに、べた付きのあるもの。
× ;べた付きのあるもの。
××;塗膜が剥がれるもの。
【0050】
(12)ライフ
上記組成物を、40℃で90日間保存し、流動性が無くなる日数を調べる。
○ ;90日間、流動性がある。
× ;流動性が無くなった日数。
【0051】
(13)熱安定性
上記組成物を、スピンコーターで乾燥塗膜が1μmになるようにガラス基板(コーニング社製1737 0.7mm厚)に塗布し、70℃のホットプレート上で1分間乾燥した。冷却後、30℃の1.0質量%テトラメチルハイドロオキサイド水溶液で、スプレー圧0.2MPaで20秒現像し、30℃の水道水で、スプレー圧0.2MPaで20秒リンスし、残渣を評価する。
残渣が無ければ、更に10℃上げて評価を行い、残渣が発生するまで行い残渣の無い最高温度を熱安定性として評価する。
【0052】
(14)感度
上記組成物を、スピンコーターで乾燥塗膜が1μmになるようにガラス基板(コーニング社製1737 0.7mm厚)に塗布し、70℃のホットプレート上で1分間乾燥した。冷却後コダックNo2ステップタブレットを使用し、超高圧水銀灯で裏面から400mJ/cm露光した。次いで、30℃の1.0質量%テトラメチルハイドロオキサイド水溶液で、スプレー圧0.2MPaで20秒現像し、30℃の水道水で、スプレー圧0.2MPaで20秒リンスし、光沢のある段数で評価する。
【0053】
(15)解像性
上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)にスピンコーターで乾燥塗膜が1μmになるように塗布し、70℃のホットプレート上で1分間乾燥した。冷却後、10〜200μmまで、10μm間隔で線幅が異なったパターンが描かれているガラスマスクを使用し、感度が6段となる露光量で裏面から露光した。次いで、140℃のホットプレート上で30秒間PEBを行い、30℃の1.0質量%テトラメチルハイドロオキサイド水溶液で、スプレー圧0.2MPaで20秒現像し、残存する最小線幅を評価する。
【0054】
(16)密着性
上記組成物を、ガラス基板(コーニング社製1737 0.7mm厚)にスピンコーターで乾燥塗膜が1μmになるように塗布し、70℃のホットプレート上で1分間乾燥した。冷却後、感度が4段以上になるように裏面から全面露光を行い、140℃のホットプレート上で30秒間PEBを行い、ホットプレートにて熱硬化させる。
各例の熱硬化条件は、実施例4;120℃,8分間、実施例5;150℃,8分間、実施例6;180℃,8分間、比較例3;150℃,8分間、比較例4;150℃,8分間と220℃,8分間の2条件で硬化させる。
この硬化塗膜に、カッターで縦横11本ずつ切れ目を入れ、100個の升目を作り、セロハン粘着テープでいくつ残るかを評価する。(碁盤目テスト)
【0055】
(17)耐TMAH性
上記硬化塗膜を、3.0質量%のテトラメチルアンモニウムハイドロオキサイド水溶液に浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0056】
(18)耐アセトン性
上記硬化塗膜を、アセトンに浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0057】
(19)耐NMP性
上記硬化塗膜を、N−メチルピロリドンに浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0058】
(20)耐GBL性
上記硬化塗膜を、γ−ブチロラクトンに浸漬したウエスで擦り、表面状態を評価する。
○ ;全く、変化無し。
× ;表面が溶解、又は軟化して、キズが付く。
【0059】
【発明の効果】
以上のように、本発明の感光性樹脂組成物は、一液性でライフが長く、指触乾燥性が良好であることから、比較的安価な接触型露光機で露光可能であり、又従来品に比べ、低温で硬化することができ、製品のコストダウンが可能となる。更に、低温で硬化することにより熱劣化等が無く、耐溶剤性等、信頼性の高いフォトスペーサー、又はカラーフィルターを提供することが出来る。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a composition for a photo spacer and a photosensitive resin composition for a color filter used for a flat panel display such as a liquid crystal or EL (Electro Luminescence) and a method for forming a spacer or a color filter using the composition.
[0002]
[Prior art]
Spacers and color filters used for flat panel displays such as liquid crystals and EL (Electro Luminescence) are required to have high resolution, heat resistance, and solvent resistance.
As the photosensitive resin composition for color filters, Japanese Patent Publication No. 8-7282 discloses a color composition having a combination of a non-photosensitive carboxyl group-containing resin, a photopolymerizable monomer, a photopolymerization initiator, a diluent, and an epoxy resin. A filter is disclosed.
Such a photosensitive resin composition for a color filter is preferably a one-pack composition because it is necessary to make the film thickness and the pigment concentration uniform, and in the case of the aforementioned composition, the reactivity is low. Although the epoxy resin is used to make it one-component, it has a short life, so that there is a problem of disposal of the composition having an expired life and a problem of high production cost due to small production.
In addition, since a non-photosensitive carboxyl group-containing resin is used, the amount of the photopolymerizable monomer added is large, and therefore, the dryness to the touch is poor, so that an expensive non-contact type exposure machine must be used. is there. Furthermore, because of its low solvent resistance, it is currently used at a high temperature of 200 ° C. or higher as the thermosetting temperature.
[0003]
Further, as a photosensitive resin composition, JP-A-5-202330 discloses a composition which can be diluted with water by neutralizing a photosensitive resin having an ethylenically unsaturated bond and a carboxyl group in one molecule with an amine compound. However, it is described that the use of a primary amine compound is difficult because a primary amine compound is liable to gel by an ethylenically unsaturated bond and a Michael addition reaction. Further, JP-A-5-339307 discloses that a primary amine compound is added to a resin having an ethylenically unsaturated bond by a Michael addition reaction because the primary amine compound is liable to react with the ethylenically unsaturated bond. After that, a cationic resin composition neutralized with an organic acid has been proposed.
As described above, the primary amine compound can be used for neutralizing a carboxyl group-containing photosensitive resin due to the problem of easily causing a Michael addition reaction with an unsaturated double bond or causing gelation. Did not.
[0004]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a one-part composition that can easily obtain a uniform film thickness and a pigment concentration, and that has a long life and is inexpensive. An object of the present invention is to provide a composition for a photospacer, a photosensitive resin composition for a color filter, and a method for forming the same, which have a dryness to the touch that can be exposed to light and can be cured at a lower temperature.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, (A) (a) a carboxyl group-containing compound having two or more photosensitive unsaturated double bonds in one molecule and one or more carboxyl groups; (B) a photosensitive resin obtained by neutralizing a photosensitive resin with a primary amino compound, (B) a photosensitive (meth) acrylate compound, (C) a photopolymerization initiator, (D) water, and (E) A) a composition for a photo spacer characterized by containing an organic solvent; and a photosensitive resin composition for a color filter in which a pigment (F) is added to and dispersed in the composition.
Further, according to another aspect of the present invention, the composition for a photospacer and the photosensitive resin composition for a color filter are applied to a glass substrate or a plastic substrate, dried, and selectively exposed to active energy rays. And a method for forming a spacer or a color filter, wherein the unexposed portion is developed with an aqueous alkali solution after heating, and is heated to at least 120 ° C. and thermally cured.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
The present inventors have conducted intensive studies in order to solve the above-mentioned problems. As a result, (A) and (a) one molecule has two or more photosensitive unsaturated double bonds and one carboxyl group in one molecule. (B) a photosensitive resin obtained by neutralizing the carboxyl group-containing photosensitive resin with a primary amino compound, (B) a photosensitive (meth) acrylate compound, (C) a photopolymerization initiator, and (D) The photosensitive resin composition containing water and (E) an organic solvent is one-part, has a long life, has good dryness to the touch, can be developed with an alkaline aqueous solution, and has excellent resolution. It has been found that the composition can be cured at a low temperature and has sufficient solvent resistance, and the present invention has been completed.
[0007]
That is, the photosensitive resin (A) in the composition of the present invention contains (a) a carboxyl group containing two or more photosensitive unsaturated double bonds in one molecule and one or more carboxyl groups. By neutralizing the carboxyl group of the photosensitive resin with (b) a primary amino compound, an ammonium carboxylate structure is formed, the dryness to the touch is improved, and the solubility in an aqueous alkali solution is adjusted to provide an excellent solution. It is considered that a resolution and alkali developability can be obtained, and further heating to dehydration-condensation to form an amide, thereby obtaining a cured product having high solvent resistance.
Further, by adding water, water coordinates to the structure of the ammonium carboxylate, and the Michael addition reaction with the unsaturated double bond is suppressed, so that a sufficient life can be obtained.
[0008]
Hereinafter, the photosensitive resin composition of the present invention will be described in detail.
First, as the carboxyl group-containing photosensitive resin (a) having two or more photosensitive unsaturated double bonds and one or more carboxyl groups in one molecule used in the present invention, specifically, A known and commonly used carboxylic acid-containing photosensitive resin having a photosensitive unsaturated double bond can be used.
Preferred examples of the resin (which may be any of an oligomer and a polymer) include the following.
(A-1) A group that reacts with a carboxyl group and a compound that has an unsaturated double bond are added to a carboxyl group of the copolymer to a copolymer of an unsaturated carboxylic acid and a compound having an unsaturated double bond. Carboxyl group-containing photosensitive resin obtained by
(A-2) A copolymer of a compound having an epoxy group and an unsaturated double bond and a compound having an unsaturated double bond is reacted with an unsaturated monocarboxylic acid, and a secondary hydroxyl group formed is polybasic. Carboxyl group-containing photosensitive resin obtained by reacting an acid anhydride,
(A-3) Carboxyl group-containing photosensitive material obtained by reacting a copolymer of an acid anhydride having an unsaturated double bond and a compound having an unsaturated double bond with a compound having a hydroxyl group and an unsaturated double bond. Resin,
(A-4) Carboxyl group-containing compound obtained by reacting a compound having two or more epoxy groups in one molecule with an unsaturated monocarboxylic acid, and reacting the resulting secondary hydroxyl group with a polybasic anhydride. Photosensitive resin,
(A-5) Carboxyl group-containing photosensitive resin obtained by reacting a compound having an epoxy group and an unsaturated double bond with a carboxyl group-containing resin obtained by reacting a polybasic acid anhydride with a hydroxyl group-containing polymer And the like.
[0009]
In the (a-1) carboxyl group-containing photosensitive resin, a ratio at which a sufficient photocurability can be obtained in part of the carboxyl groups of a copolymer of an unsaturated carboxylic acid and a compound having an unsaturated double bond. A compound having both a photosensitive unsaturated double bond such as a vinyl group, an acryloyl group and a methacryloyl group and a group having a reactivity with a carboxyl group such as an epoxy group and an acid chloride group, for example, glycidyl (meth) acrylate It is a resin in which a photosensitive unsaturated double bond is introduced into the side chain of the compound after the reaction.
Thus, by reacting the above compound with a part of the carboxyl group of the copolymer, a part of the carboxyl group remains unreacted, and the obtained resin becomes soluble in an aqueous alkaline solution. For this reason, a film formed from the composition containing the resin can be stably developed with an alkaline aqueous solution after selective exposure.
In this specification, (meth) acrylate is a general term for acrylate and methacrylate, and the same applies to other similar expressions.
[0010]
The carboxyl group-containing photosensitive resin (a-2) is a compound having an epoxy group and an unsaturated double bond in the molecule, for example, glycidyl (meth) acrylate, α-methylglycidyl (meth) acrylate and the like. The epoxy group of the copolymer of the compound having a heavy bond is reacted with a carboxyl group of an unsaturated carboxylic acid in such a ratio as to obtain sufficient photocurability, and the unsaturated double bond of the unsaturated carboxylic acid is converted to a side chain. In addition, a polybasic acid anhydride, for example, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, or the like, is subjected to an addition reaction to the secondary hydroxyl group generated by the above addition reaction, to form a carboxyl group on the side chain. It is the introduced resin.
[0011]
The carboxyl group-containing photosensitive resin (a-3) is a copolymer of an acid anhydride having an unsaturated double bond, such as maleic anhydride, itaconic anhydride or the like, and a compound having an unsaturated double bond. A compound having a hydroxyl group and an unsaturated double bond in a ratio capable of obtaining a sufficient photocurability to an acid anhydride group, for example, hydroxyalkyl (meth) acrylates, and caprolactone was reacted with the hydroxyalkyl (meth) acrylates. A resin in which a hydroxyl group such as a macromonomer obtained by reacting a monomer or the above hydroxyalkyl (meth) acrylate with a polycaprolactone oligomer is reacted to form a half ester, and an unsaturated double bond is introduced into a side chain.
[0012]
The carboxyl group-containing photosensitive resin (a-4) is a compound having two or more epoxy groups in one molecule, for example, bisphenol A type, bisphenol F type, bisphenol S type, phenol novolak type, cresol novolak type, A carboxyl group of an unsaturated monocarboxylic acid such as (meth) acrylic acid is reacted with an epoxy group of a known and commonly used epoxy resin such as a biphenol type, a bixylenol type, or an N-glycidyl type at a ratio capable of obtaining sufficient photocurability. A resin in which an unsaturated group-containing photosensitive resin having an epoxy resin skeleton is generated, and a polybasic acid anhydride is added to a secondary hydroxyl group generated by the above addition reaction to introduce a carboxyl group into a side chain.
[0013]
The carboxyl group-containing photosensitive resin (a-5) includes a hydroxyl group-containing polymer, for example, an olefinic hydroxyl group-containing polymer, an acrylic polyol, a rubber polyol, a polyvinyl acetal, a styrene allyl alcohol-based resin cellulose, and the like. Reacting the anhydride to form a carboxyl group, further reacting a part of the carboxyl group with the epoxy group and the epoxy group of the compound having an unsaturated double bond in such a ratio that sufficient photocurability can be obtained, This is a resin with unsaturated double bonds introduced into the side chains.
[0014]
The carboxyl group-containing photosensitive resin (a) as described above may be used alone or as a mixture of two or more kinds. In any case, the total amount thereof is 10 to 80% by mass of the total amount of the composition. It is preferable to mix them in a ratio. If the amount of these resins is less than the above range, the distribution of the resins in the film to be formed is likely to be uneven, and it is difficult to obtain sufficient photocurability, and it is difficult to form patterns by selective exposure and development. It becomes. On the other hand, when the amount is larger than the above range, it is not preferable because the development time is increased and poor adhesion is likely to occur.
[0015]
The carboxyl group-containing photosensitive resin (a) has a weight average molecular weight of 1,000 to 100,000, preferably 5,000 to 20,000, an acid value of 25 to 250 mgKOH / g, and Those having a double bond equivalent of 200 to 2,000 g / equivalent, preferably 400 to 1,500 g / equivalent are used. If the weight average molecular weight of the resin is less than 1,000, the adhesion of the film at the time of development is undesirably reduced. On the other hand, if it exceeds 100,000, development defects are likely to occur, which is not preferable. On the other hand, when the acid value is less than 25 mgKOH / g, the solubility in an alkaline aqueous solution is insufficient, and thus poor development is caused. On the other hand, if it exceeds 250 mgKOH / g, an undercut during development (a phenomenon in which the lower part of the resist in which the photocuring reaction hardly proceeds) is likely to occur, and the development resistance is undesirably reduced. Further, when the double bond equivalent of the photosensitive resin is less than 200 g / equivalent, the cured coating film becomes brittle, which is not preferable. On the other hand, if it exceeds 2,000 g / equivalent, the sensitivity is low and a high exposure amount is required at the time of photocuring, which is not preferable.
[0016]
Examples of the primary amino compound (b) include aliphatic amines such as methylamine, ethylamine, n-propylamine, isobutylamine, n-butylamine, n-pentylamine, n-hexylamine, and n-octylamine. , Aromatic amines such as benzylamine, aniline and toluidine; alicyclic amines such as cyclohexylamine; amine-based dispersants used when dispersing pigments; biguanides such as o-tolylbiguanide; and dicyandiamide. Of these, alicyclic amines such as cyclohexylamine, biguanides such as o-tolylbiguanide, dicyandiamide, and the like are particularly preferable because they do not easily cause a Michael addition reaction with an unsaturated double bond.
[0017]
As for the compounding amount of the primary amino compound (b), it is preferable to neutralize the carboxyl group of the carboxyl group-containing photosensitive resin (a) by 20 to 70 mol%. If the neutralization ratio is less than 20 mol%, the dryness to the touch and the solvent resistance are undesirably reduced. On the other hand, when the neutralization ratio exceeds 70 mol%, the solubility in an organic solvent is reduced, and the photosensitive resin is precipitated, which is not preferable.
[0018]
Examples of the photosensitive (meth) acrylate compound (B) include hydroxyl-containing acrylates such as pentaerythritol triacrylate and dipentaerythritol pentaacrylate; and water-soluble acrylates such as polyethylene glycol diacrylate and polypropylene glycol diacrylate. Polyfunctional polyester acrylates of polyhydric alcohols such as trimethylolpropane triacrylate, pentaerythritol tetraacrylate and dipentaerythritol hexaacrylate; polyfunctional alcohols such as trimethylolpropane and hydrogenated bisphenol A, or bisphenol A and biphenol. Acrylates of ethylene oxide adducts and / or propylene oxide adducts of polyhydric phenols; A polyfunctional or monofunctional polyurethane acrylate which is an isocyanate modified product of an acrylate; an epoxy acrylate which is a (meth) acrylic acid adduct of bisphenol A diglycidyl ether, hydrogenated bisphenol A diglycidyl ether or phenol novolak epoxy resin; Methacrylates corresponding to acrylates and the like can be mentioned, and these can be used alone or in combination of two or more. Among these, a polyfunctional (meth) acrylate compound having two or more (meth) acryloyl groups in one molecule is particularly preferable from the viewpoint of improving development resistance and increasing sensitivity.
[0019]
Examples of the photopolymerization initiator (C) include benzoin and benzoin alkyl ethers such as benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, and 2,2. Acetophenones such as -diethoxy-2-phenylacetophenone and 1,1-dichloroacetophenone; 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-propan-1-one, 2-benzyl-2- Aminoacetophenones such as dimethylamino-1- (4-morpholinophenyl) -butan-1-one, N, N-dimethylaminoacetophenone; 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1- Chloro Anthraquinones such as anthraquinone; thioxanthones such as 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone and 2,4-diisopropylthioxanthone; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; benzophenone; Benzophenones such as 4,4'-bisdiethylaminobenzophenone or xanthones; 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, Halomethyloxadiazole compounds such as trichloromethyl-5- (p-cyanostyryl) -1,3,4-oxadiazole; 2,4-bis (trichloromethyl) -6- (p-methoxy-phenylbi 1,3,5-triazine, 2,4-bis (trichloromethyl) -6-p-methoxystyryl-s-triazine, 2,4-bis (trichloromethyl) -6- (1-p-dimethyl Examples include halomethyl-s-triazine-based compounds such as aminophenyl-1,3-butadienyl) -s-triazine.
These known and commonly used photopolymerization initiators can be used alone or as a mixture of two or more kinds. Further, N, N-dimethylaminobenzoic acid ethyl ester, N, N-dimethylaminobenzoic acid isoamyl ester, pentyl-4-yl ester Photoinitiating aids such as tertiary amines such as dimethylaminobenzoate, triethylamine, triethanolamine and the like can be added. In addition, a titanocene compound such as CGI-784 (manufactured by Ciba Specialty Chemicals Co., Ltd.) which absorbs in the visible light region can be added to promote the photoreaction. It is not particularly limited to these, and is not limited to a photopolymerization initiator and a photoinitiator, as long as it absorbs light in the ultraviolet or visible light region and radically polymerizes a photosensitive unsaturated double bond. , Alone or in combination of two or more.
[0020]
The water (D) coordinates with the carboxylic acid ammonium salt structure generated by the neutralization, and forms an unsaturated double bond of the carboxyl group-containing photosensitive resin (a) or the photosensitive (meth) acrylate compound (B). It suppresses the Michael addition reaction with the primary amino compound (b), and the addition amount is preferably 1 to 5 mol per 1 mol of the primary amino compound.
[0021]
In order to dissolve the photosensitive resin (A), the photosensitive (meth) acrylate compound (B), and the photopolymerization initiator (C), and to adjust the composition to a viscosity suitable for a coating method, an organic solvent is used. Solvent (E) is used.
Examples of the organic solvent (E) include ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol and butyl carbitol Glycol ethers such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol diethyl ether, and triethylene glycol monoethyl ether; ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butyl carbitol acetate Vinegar such as propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate Esters; ethanol, propanol, ethylene glycol, alcohols such as propylene glycol; octane, aliphatic hydrocarbons decane; petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, and petroleum solvents such as solvent naphtha. These organic solvents can be used alone or as a mixture of two or more.
[0022]
The pigment (F) is used when the above-mentioned photosensitive resin composition is used as a photosensitive resin composition for a color filter.
For example, as the red pigment, an anthraquinone-based pigment or a perylene-based pigment may be used alone, or a mixture of at least one of them with a disazo-based yellow pigment or an isoindoline-based yellow pigment. As the green pigment, a halogenated phthalocyanine pigment alone or a mixture with a disazo yellow pigment or an isoindoline yellow pigment is used. As the blue pigment, a phthalocyanine pigment alone or a mixture with a dioxazine purple pigment is used. As the pigment for the black matrix, carbon, titanium carbon, iron oxide alone or a mixture thereof is used.
[0023]
In addition, various known and commonly used additives can be used as needed. For example, various additives such as an antifoaming agent, an adhesion-imparting agent, a leveling agent, and a pigment dispersant can be blended.
[0024]
The composition of the present invention obtained by blending the above components is mixed and dispersed until uniform using a stirrer or a disperser, for example, a disperser such as a roll mill, a sand mill, a ball mill or an attritor. And adjust.
The composition of the present invention thus adjusted is applied to a glass substrate or a plastic substrate by an appropriate method, for example, a coating method such as a roll coating method, a bar coating method, a curtain coating method, and a spin coating method. It is dried in a hot-air circulation drying oven at a temperature of, for example, 70 ° C. to obtain a tack-free coating film. Next, the substrate is selectively exposed to active energy rays through a photomask on which a pattern is formed, and if necessary, heated at an appropriate temperature (a heating process after exposure is referred to as Post Exposure Bake, abbreviated as PEB), and an alkaline aqueous solution. And heat-curing at an appropriate temperature, for example, 120 ° C., to obtain a spacer or a color filter.
[0025]
As the alkaline aqueous solution, an alkaline aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, and amines can be used.
Further, as an irradiation light source for photocuring, a low-pressure mercury lamp, a medium-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a xenon lamp, a metal halide lamp, or the like is suitable. In addition, a laser beam or the like can be used as the active energy ray.
[0026]
Hereinafter, the present invention will be described specifically with reference to Examples and the like, but the present invention is not limited to these Examples. In the following, “parts” means “parts by mass” unless otherwise specified.
[0027]
(Synthesis example 1)
Cresol novolak type epoxy resin [manufactured by Dainippon Ink and Chemicals, Inc., epoxy equivalent = 212, softening point 85 ° C.] 212 parts, acrylic acid 72 parts (1.0 mol), methylhydroquinone 0.28 part, propylene glycol After charging 174.2 parts of monomethyl ether acetate and heating to 95 ° C., and confirming that the mixture was uniformly dissolved, charging 1.14 parts of triphenylphosphine, heating to 100 ° C., and reacting for about 24 hours, A reaction product having an acid value of 0.5 mgKOH / g was obtained. To this, 39.5 parts (0.26 mol) of tetrahydrophthalic anhydride was charged, and the mixture was heated to 90 ° C. and reacted for about 6 hours. -1 After confirming that the absorption of the acid anhydride disappeared, 149.3 parts of propylene glycol monomethyl ether acetate was added to obtain a photosensitive resin having an acid value of 45.1 mgKOH / g and a solid concentration of 50% by mass. This reaction solution is called A varnish.
[0028]
(Synthesis example 2)
The acrylic acid used in Synthesis Example 1 was synthesized in the same manner except that propionic acid was changed to 74 parts (1.0 mol) to obtain a resin having a solid content acid value of 44.5 mgKOH / g and a solid content concentration of 50% by mass. . This reaction solution is called B varnish.
[0029]
The composition of Examples 1-3 and Comparative Examples 1-2 of the composition for photospacers is shown in Table 1 below.
[0030]
[Table 1]
Figure 2004109752
[0031]
The evaluation results of Examples 1 to 3 and Comparative Examples 1 and 2 of the composition for a photo spacer are shown in Table 2 below.
[0032]
[Table 2]
Figure 2004109752
[0033]
The evaluation method of the performance test in Table 2 is as follows.
[0034]
(1) Dryness to the touch
The above composition was applied on a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) with a bar coater so that the dry coating film became 15 μm, dried on a hot plate at 70 ° C. for 5 minutes, cooled, and then PET film To evaluate the dryness to the touch.
○: completely non-sticky.
Δ: Slightly sticky.
×: Sticky.
Xx: peeling of the coating film.
[0035]
(2) Life
The composition is stored at 40 ° C. for 90 days, and the number of days when the fluidity is lost is determined.
: Fluid for 90 days.
×: Number of days when liquidity was lost.
[0036]
(3) Thermal stability
Similarly, the above composition was applied on a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) using a bar coater so that the dry coating film became 15 μm, and dried on a 70 ° C. hot plate for 5 minutes. After cooling, the film is developed with a 0.4% by mass aqueous sodium carbonate solution at 30 ° C. under a spray pressure of 0.2 MPa for 2 minutes, and the residue is evaluated.
If there is no residue, the temperature is further increased by 10 ° C. and the evaluation is performed until the residue is generated. The maximum temperature without the residue is evaluated as the thermal stability.
[0037]
(4) Sensitivity
The above composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) using a bar coater so that the dry coating film became 15 μm, and dried on a hot plate at 70 ° C. for 5 minutes. After cooling, Kodak No. Using a two-step tablet, 400mJ / cm with an ultra-high pressure mercury lamp 2 Exposure. Next, PEB (heating after exposure) is performed on a hot plate at 70 ° C. for 30 seconds, and developed with a 0.4% by mass aqueous sodium carbonate solution at 30 ° C. for 2 minutes at a spray pressure of 0.2 MPa to obtain a glossy film. Evaluate by the number of stages.
[0038]
(5) Resolution
The above composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) using a bar coater so that the dry coating film became 15 μm, and dried on a hot plate at 70 ° C. for 5 minutes. After cooling, exposure was carried out using a glass mask on which patterns having different line widths were drawn at intervals of 10 μm from 10 to 200 μm at an exposure amount at which the sensitivity became 6 steps. Next, PEB is performed on a hot plate at 70 ° C. for 30 seconds, and development is performed for 2 minutes at a spray pressure of 0.2 MPa with a 0.4% by mass aqueous sodium carbonate solution at 30 ° C., and the remaining minimum line width is evaluated.
[0039]
(6) Adhesion
The above composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) using a bar coater so that the dry coating film became 15 μm, and dried on a hot plate at 70 ° C. for 5 minutes. After cooling, the entire surface was exposed at an exposure amount at which the sensitivity became 4 steps or more, and was thermally cured on a hot plate.
The thermosetting conditions of each example were as follows: Example 1; 120 ° C., 8 minutes; Example 2: 150 ° C., 8 minutes; Example 3: 180 ° C., 8 minutes; Comparative Example 1: 150 ° C., 8 minutes; 2: Curing was performed under two conditions of 150 ° C. for 8 minutes and 220 ° C. for 8 minutes.
A cut is made in the cured coating film in 11 rows and 11 rows to make 100 squares, and how many cellophane adhesive tapes remain is evaluated. (Go-go test)
[0040]
(7) TMAH resistance
The cured coating film is rubbed with a waste immersed in a 3.0% by mass aqueous solution of tetramethylammonium hydroxide to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0041]
(8) Acetone resistance
The cured coating film is rubbed with a cloth immersed in acetone to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0042]
(9) NMP resistance
The cured coating film is rubbed with a waste dipped in N-methylpyrrolidone to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0043]
(10) GBL resistance
The cured coating film is rubbed with a waste dipped in γ-butyrolactone to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0044]
The components shown in the following Table 3 were dispersed in a sand mill for 8 hours and filtered with a 5 μm filter to obtain a photosensitive resin composition for a color filter.
[0045]
[Table 3]
Figure 2004109752
[0046]
Table 4 shows the evaluation results of Examples 4 to 6 and Comparative Examples 3 and 4 of the photosensitive resin composition for a color filter.
[0047]
[Table 4]
Figure 2004109752
[0048]
The evaluation method of the performance test in Table 4 above is as follows.
[0049]
(11) Dryness to the touch
The above composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) with a spin coater so that the dried coating film became 1 μm, dried on a hot plate at 70 ° C. for 1 minute, cooled, and then cooled to form a PET film. Press and evaluate dryness to the touch.
○: completely non-sticky.
Δ: Slightly sticky.
×: Sticky.
Xx: peeling of the coating film.
[0050]
(12) Life
The composition is stored at 40 ° C. for 90 days, and the number of days when the fluidity is lost is determined.
: Fluid for 90 days.
×: Number of days when liquidity was lost.
[0051]
(13) Thermal stability
The composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) with a spin coater so that the dried coating film became 1 μm, and dried on a hot plate at 70 ° C. for 1 minute. After cooling, the film was developed with a 1.0% by mass aqueous solution of tetramethyl hydroxide at 30 ° C. for 20 seconds at a spray pressure of 0.2 MPa, and rinsed with tap water at 30 ° C. for 20 seconds at a spray pressure of 0.2 MPa to evaluate the residue. I do.
If there is no residue, the temperature is further raised by 10 ° C. and the evaluation is performed. The evaluation is performed until the residue is generated, and the maximum temperature without the residue is evaluated as the thermal stability.
[0052]
(14) Sensitivity
The composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) with a spin coater so that the dried coating film became 1 μm, and dried on a hot plate at 70 ° C. for 1 minute. After cooling, using a Kodak No. 2 step tablet, 400 mJ / cm from the back with an ultra-high pressure mercury lamp 2 Exposure. Subsequently, development was performed with a 1.0% by mass aqueous solution of tetramethyl hydroxide at 30 ° C. at a spray pressure of 0.2 MPa for 20 seconds, and rinsed with tap water at 30 ° C. at a spray pressure of 0.2 MPa for 20 seconds. To evaluate.
[0053]
(15) Resolution
The composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) using a spin coater so that the dry coating film became 1 μm, and dried on a hot plate at 70 ° C. for 1 minute. After cooling, exposure was performed from the back surface using a glass mask on which patterns with different line widths were drawn at 10-μm intervals from 10 to 200 μm, with a sensitivity of 6 steps. Next, PEB is performed on a hot plate at 140 ° C. for 30 seconds, and developed with a 1.0% by mass aqueous solution of tetramethyl hydroxide at 30 ° C. for 20 seconds at a spray pressure of 0.2 MPa, and the remaining minimum line width is evaluated.
[0054]
(16) Adhesion
The composition was applied to a glass substrate (1737 0.7 mm thick, manufactured by Corning Incorporated) using a spin coater so that the dry coating film became 1 μm, and dried on a hot plate at 70 ° C. for 1 minute. After cooling, the entire surface is exposed from the back surface so that the sensitivity becomes 4 steps or more, PEB is performed on a hot plate at 140 ° C. for 30 seconds, and heat curing is performed on the hot plate.
The thermosetting conditions in each example were as follows: Example 4; 120 ° C., 8 minutes; Example 5; 150 ° C., 8 minutes; Example 6: 180 ° C., 8 minutes; Comparative Example 3: 150 ° C., 8 minutes; 4: Cure under two conditions of 150 ° C. for 8 minutes and 220 ° C. for 8 minutes.
A cut is made in the cured coating film in 11 rows and 11 rows to make 100 squares, and how many cellophane adhesive tapes remain is evaluated. (Go-go test)
[0055]
(17) TMAH resistance
The cured coating film is rubbed with a waste immersed in a 3.0% by mass aqueous solution of tetramethylammonium hydroxide to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0056]
(18) Acetone resistance
The cured coating film is rubbed with a cloth immersed in acetone to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0057]
(19) NMP resistance
The cured coating film is rubbed with a waste dipped in N-methylpyrrolidone to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0058]
(20) GBL resistance
The cured coating film is rubbed with a waste dipped in γ-butyrolactone to evaluate the surface condition.
: No change at all.
×: The surface is dissolved or softened, and scratches are formed.
[0059]
【The invention's effect】
As described above, the photosensitive resin composition of the present invention can be exposed with a relatively inexpensive contact-type exposure machine because it has a one-part property, a long life, and good dryness to the touch. It can be cured at a lower temperature than products, and the cost of products can be reduced. Further, by curing at a low temperature, there can be provided a photo spacer or a color filter which is free from thermal deterioration or the like and has high reliability such as solvent resistance.

Claims (4)

(A)(a)1分子中に感光性の不飽和二重結合を2個以上有し、かつカルボキシル基を1個以上有するカルボキシル基含有感光性樹脂を、(b)第一級アミノ化合物で中和させて出来る感光性樹脂、(B)感光性(メタ)アクリレート化合物、(C)光重合開始剤、(D)水、及び(E)有機溶剤を含有することを特徴とする感光性樹脂組成物。(A) (a) a carboxyl group-containing photosensitive resin having two or more photosensitive unsaturated double bonds in one molecule and having one or more carboxyl groups, and (b) a primary amino compound A photosensitive resin comprising a photosensitive resin which can be neutralized, (B) a photosensitive (meth) acrylate compound, (C) a photopolymerization initiator, (D) water, and (E) an organic solvent. Composition. 前記感光性樹脂(A)が、1分子中に感光性の不飽和二重結合を2個以上有し、かつカルボキシル基を1個以上有するカルボキシル基含有感光性樹脂(a)のカルボキシル基を、第一級アミノ化合物(b)で20〜70モル%中和することを特徴とする請求項1記載の感光性樹脂組成物。The photosensitive resin (A) has a carboxyl group of a carboxyl group-containing photosensitive resin (a) having two or more photosensitive unsaturated double bonds in one molecule and having one or more carboxyl groups, The photosensitive resin composition according to claim 1, wherein the composition is neutralized with 20 to 70 mol% with the primary amino compound (b). 請求項1又は2に記載の感光性樹脂組成物に、(F)顔料を添加・分散することを特徴とするカラーフィルター用感光性樹脂組成物。A photosensitive resin composition for a color filter, comprising adding and dispersing (F) a pigment to the photosensitive resin composition according to claim 1 or 2. 請求項1乃至3記載の感光性樹脂組成物を、ガラス基板若しくはプラスチック基板に塗布・乾燥し、次いでパターン形成されたフォトマスクを通して選択的に活性エネルギー線により露光し、加熱後、未露光部をアルカリ水溶液により現像してパターンを形成し、その後少なくとも120℃に加熱して熱硬化させる工程を含むことを特徴とするガラス基板又はプラスチック基板のスペーサー又はカラーフィルターの形成方法。The photosensitive resin composition according to claim 1 is applied to a glass substrate or a plastic substrate, dried, and then selectively exposed to active energy rays through a patterned photomask. A method for forming a spacer or a color filter on a glass substrate or a plastic substrate, comprising a step of forming a pattern by developing with an aqueous alkali solution, and then heating the resin to at least 120 ° C. to thermally cure the pattern.
JP2002274632A 2002-09-20 2002-09-20 Photosensitive resin composition and method for forming spacer or color filter using the same Expired - Lifetime JP4150236B2 (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
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JP2006328342A (en) * 2005-04-27 2006-12-07 Mitsubishi Chemicals Corp Curable composition, cured material and liquid crystal display device using the same
JP2007225802A (en) * 2006-02-22 2007-09-06 Sanyo Chem Ind Ltd Photosensitive resin composition
WO2009057411A1 (en) * 2007-10-31 2009-05-07 Sekisui Chemical Co., Ltd. Negative-working resist for formation of protrusions for liquid crystal alignment
JP2013210542A (en) * 2012-03-30 2013-10-10 Fujifilm Corp Method of manufacturing color filter, and color filter, solid-state imaging device and liquid crystal display device manufactured by using the same
KR20140074188A (en) 2012-12-07 2014-06-17 닛뽄 가야쿠 가부시키가이샤 Actinic radiation hardenable resin composition and spacer for display device using the same, and protective layer of color filter
KR20140074189A (en) 2012-12-07 2014-06-17 닛뽄 가야쿠 가부시키가이샤 Actinic radiation hardenable resin composition and spacer for display device using the same, and protective layer of color filter
KR20160090282A (en) 2013-11-28 2016-07-29 닛뽄 가야쿠 가부시키가이샤 Active energy ray-curable resin composition, and spacer for display elements and/or color filter protective film using same
KR20160091339A (en) 2013-11-28 2016-08-02 닛뽄 가야쿠 가부시키가이샤 Active energy ray curable resin composition, and display element spacer and/or color filter protective film using same
KR20160113576A (en) 2014-01-30 2016-09-30 닛뽄 가야쿠 가부시키가이샤 Active energy ray-curable resin composition, and spacer for display elements and/or color filter protective film using same

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006328342A (en) * 2005-04-27 2006-12-07 Mitsubishi Chemicals Corp Curable composition, cured material and liquid crystal display device using the same
JP2007225802A (en) * 2006-02-22 2007-09-06 Sanyo Chem Ind Ltd Photosensitive resin composition
JP4568237B2 (en) * 2006-02-22 2010-10-27 三洋化成工業株式会社 Photosensitive resin composition
WO2009057411A1 (en) * 2007-10-31 2009-05-07 Sekisui Chemical Co., Ltd. Negative-working resist for formation of protrusions for liquid crystal alignment
JP2013210542A (en) * 2012-03-30 2013-10-10 Fujifilm Corp Method of manufacturing color filter, and color filter, solid-state imaging device and liquid crystal display device manufactured by using the same
KR20140074188A (en) 2012-12-07 2014-06-17 닛뽄 가야쿠 가부시키가이샤 Actinic radiation hardenable resin composition and spacer for display device using the same, and protective layer of color filter
KR20140074189A (en) 2012-12-07 2014-06-17 닛뽄 가야쿠 가부시키가이샤 Actinic radiation hardenable resin composition and spacer for display device using the same, and protective layer of color filter
KR20160090282A (en) 2013-11-28 2016-07-29 닛뽄 가야쿠 가부시키가이샤 Active energy ray-curable resin composition, and spacer for display elements and/or color filter protective film using same
KR20160091339A (en) 2013-11-28 2016-08-02 닛뽄 가야쿠 가부시키가이샤 Active energy ray curable resin composition, and display element spacer and/or color filter protective film using same
TWI635131B (en) * 2013-11-28 2018-09-11 日本化藥股份有限公司 Active energy ray-curable resin composition, and spacer for display element and/or color filter protective film using the same
KR20160113576A (en) 2014-01-30 2016-09-30 닛뽄 가야쿠 가부시키가이샤 Active energy ray-curable resin composition, and spacer for display elements and/or color filter protective film using same

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