JP2004108947A - Height measuring method and confocal optical measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform brightness and height instrumentation at a high speed and acquire only an optimum instrumentation result, and to notify a user whether or not setting of appropriate measuring conditions has been performed. <P>SOLUTION: A light beam is caused to enter on a test piece through an objective lens, and the relative position of the light condensing position of the objective lens with respect to the test piece is discretely changed in its optical axis direction, and an output of a photo detector at each relative position is acquired. From the acquired output of the photo detector at each relative position, outputs of the photo detector at two or more relative positions are extracted, and a maximum light intensity value on a variation curve based on the extracted outputs of the photo detector at two or more relative positions, and a relative position which gives the maximum light intensity value are estimated. The estimated maximum light intensity value and relative position are acquired as brightness information and height information. To the acquired brightness information and height information (data of bit numbers 0 to 11), supplementary information (data of bit numbers 12 to 15) formed on the basis of the extracted outputs of the photo detector at the two or more relative positions are added. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and apparatus for measuring surface information of a sample using a confocal optical microscope.
[0002]
[Prior art]
The confocal optical microscope apparatus illuminates a sample in a spot shape, collects transmitted light, reflected light, or fluorescence from the sample on a confocal stop (pinhole), and then transmits the light transmitted through the confocal stop. The surface information of the sample is obtained by detecting the intensity with a photodetector. Further, surface information of a wide range of the sample is acquired by scanning the sample surface by various methods as point illumination.
[0003]
FIG. 10 is a diagram illustrating a configuration example of a conventional scanning confocal optical microscope apparatus.
In the apparatus shown in the figure, the light emitted from the light source 21 passes through the beam slitter 22 and then enters the two-dimensional scanning mechanism 23. The two-dimensional scanning mechanism 23 includes a first optical scanner 23a and a second optical scanner 23b, and guides the light beam to the objective lens 24 in two dimensions. The light beam incident on the objective lens 24 scans the surface of the sample 25 as focused light. The sample 25 is placed on the sample stage 26 and can be moved in the optical axis direction by the Z stage 27.
[0004]
The light reflected from the surface of the sample 25 is again introduced from the objective lens 24 into the beam splitter 22 via the two-dimensional scanning mechanism 23, reflected by the beam splitter 22, and collected on the pinhole 29 by the imaging lens 28. Lighted. Then, the reflected light from other than the focal point of the objective lens 24 is cut by the pinhole 29, and only the light passing through the pinhole 29 is detected by the photodetector 30.
[0005]
The computer 31 controls the two-dimensional scanning mechanism 23, the Z stage 27, the photodetector 30, and the like, for example, acquires a detection result by the photodetector 30, and displays an image based on the detection result on the monitor 32. And so on.
In the above configuration, the condensing position by the objective lens 24 is optically conjugate with the pinhole 29, and when the sample 25 is in the condensing position by the objective lens 24, the reflected light from the sample 25 is pinhole. However, when the sample 25 is located at a position deviated from the light collection position by the objective lens 24, the reflected light from the sample 25 is focused on the pinhole 29. The light is not condensed and does not pass through the pinhole 29.
[0006]
FIG. 11 shows the relationship between the focusing position of the objective lens 24 at this time and the relative position (Z) between the sample 25 and the output (I) of the photodetector 30 (hereinafter, this relationship is called an IZ curve). FIG.
[0007]
As shown in the figure, when the sample 25 is at the condensing position Zo of the objective lens 24, the output of the photodetector 30 becomes maximum, and from this position Zo, the condensing position of the objective lens 24 and the sample 25 are As the relative position increases, the output of the photodetector 30 decreases rapidly.
[0008]
Due to this characteristic, if the focal point is two-dimensionally scanned by the two-dimensional scanning mechanism 23 and the output of the light detector 30 is imaged in synchronization with the two-dimensional scanning mechanism 23, only a certain height of the sample 25 is obtained. An image obtained by imaging and optically slicing the sample 25 (also referred to as a confocal image) is obtained. Further, the sample 25 is discretely moved in the optical axis direction by the Z stage 27, the confocal image is acquired by scanning the two-dimensional scanning mechanism 23 at each position, and the output of the photodetector 30 is maximum at each point of the sample. By detecting the position of the Z stage 27, the height information of the sample 25 can be obtained. Further, by displaying the images when the output of the photodetector 30 at each point on the surface of the sample 25 is maximized, an image in which all the points are in focus can be obtained.
[0009]
By the way, when measuring the height of the sample 25 with such a configuration, it is necessary to reduce the unit movement amount of the Z stage 27 in order to increase the measurement accuracy, and the measurement time becomes long.
Accordingly, a height measurement method has been proposed that increases the accuracy of the height measurement of the sample 25 without reducing the unit movement amount of the Z stage 27 (see, for example, Patent Document 1). In this height measurement method, while the Z stage 27 is moved by a predetermined unit movement amount, the output of the photodetector 30 is acquired at each position for each unit movement amount, and the output value is among them. The IZ curve is approximated by a quadratic curve based on the output of the photodetector 30 at three positions, that is, the position of the Z stage 27 at the maximum and the positions before and after that, and the approximated I Based on the −Z curve, the position of the Z stage 27 at which the output of the light detector 30 is inherently maximized is obtained and obtained as height information.
[0010]
[Patent Document 1]
JP 09-113235 A
[Patent Document 2]
JP-A-11-264933
[Patent Document 3]
Japanese Patent Laid-Open No. 09-068413
[0011]
[Problems to be solved by the invention]
However, in the method of measuring the height based on the approximated IZ curve in this way, the following problems may occur.
In order to approximate the I-Z curve with the above-mentioned quadratic curve or other curves, it is necessary to acquire the output of the photodetector 30 at three or more Z positions.
[0012]
FIGS. 12A, 12B, 12C, and 12D are diagrams showing an example of the output of the photodetector 30 at the three acquired Z positions.
For example, if the outputs of the photodetector 30 at three Z positions are obtained as shown by the black circles in FIG. 3A, the outputs of the photodetector 30 at these three Z positions are used. Since the obtained approximate quadratic curve (approximate IZ curve) (solid line in FIG. 11A) is substantially equal to the actual IZ curve (dotted line in FIG. 11A), the approximate quadratic curve From the curve, the maximum value Imax that maximizes the output of the photodetector 34 and the position Zo of the Z stage 27 at that time can be correctly estimated.
[0013]
However, in general, the reflectance of the sample is not uniform, and a portion having a strong contrast is likely to have a portion where the detected light intensity is insufficient or, on the contrary, too strong depending on the observation conditions.
For example, because the light intensity is insufficient, one of the outputs of the photodetector 30 at the three Z positions indicates 0, which is the minimum value, as indicated by the black circle in FIG. In this case, an approximate quadratic curve (solid line in FIG. 5B) obtained using the outputs of the photodetector 30 at these three Z positions is an actual IZ curve (FIG. 5B). In other words, Imax and Zo that should be estimated from the obtained approximate quadratic curve are shifted from each other by Ierr and Zerr, respectively.
[0014]
On the other hand, since the light intensity is too strong, one of the outputs of the photodetector 30 at the three Z positions (white circle in FIG. 3C) is as shown by the black circle in FIG. When the detection range of the photodetector 30 is exceeded and replaced with the maximum value 4095 (in the case of the 12-bit range), the output of the photodetector 30 at these three Z positions is used. The approximate quadratic curve (solid line in Fig. (C)) obtained in this way is different from the actual I-Z curve (dotted line in Fig. (C)) and should be originally estimated from the obtained approximate quadratic curve. Imax exceeds the maximum value that can be taken, and Zo is shifted by Zerr.
[0015]
Further, when any of the outputs of the photodetector 30 at the three Z positions indicates the minimum value or the maximum value of the range that the output of the photodetector 30 can take, even an approximate quadratic curve is obtained. It will not be possible.
Further, for the portions close to both ends of the preset scanning range of the Z stage 27, all the outputs of the photodetector 30 at the three Z positions may not be obtained. For example, as shown by the black circle in FIG. 4D, when only the output of the photodetector 30 at two Z positions is obtained, the output of the photodetector 30 at one missing Z position. Even if the approximate quadratic curve (solid line in Fig. (D)) is obtained using the outputs of the photodetector 30 at these three Z positions, the white circle in Fig. (D) is appropriately compensated. It is difficult to make it equal to the I-Z curve (dotted line in FIG. 4D), and Imax and Zo estimated by the number of appropriately compensated values change in various ways. The correct value cannot be estimated.
[0016]
As described above, when the height measurement is performed based on the approximated I-Z curve, the obtained luminance information and height information are shown in FIGS. 12 (b) to 12 (d). There is a possibility that a certain uncertain measurement result is included, and even if it is included, the user has no way of knowing it.
[0017]
In view of the above circumstances, the problem of the present invention is that it is possible to measure the brightness and height of a sample at high speed, and obtain only optimal measurement results and determine whether appropriate measurement conditions have been set. A height measurement method capable of notifying a user and a confocal optical measurement device to which the method is applied are provided.
[0018]
[Means for Solving the Problems]
According to a first aspect of the present invention, light from a light source is incident on a sample through an objective lens, and a relative position between the focusing position of the objective lens and the sample is discretely changed in the optical axis direction. Light intensity information from the sample at each of the above, and a plurality of light intensity information is extracted from the acquired light intensity information at each relative position, the maximum on the change curve based on the plurality of extracted light intensity information A light intensity value and the relative position giving the maximum light intensity value are estimated, and the estimated maximum light intensity value and the relative position giving the maximum light intensity value are respectively acquired as luminance information and height information; In this height measurement method, supplemental information generated based on the plurality of extracted light intensity information is added to the acquired luminance information and height information.
[0019]
According to the above method, the supplementary information generated based on the plurality of light intensity information is added to the luminance information and the height information acquired from the change curve based on the plurality of extracted light intensity information. Become. Thereby, for example, when the extracted plurality of light intensity information is inappropriate, it is possible to add information indicating that the luminance information and height information are inaccurate data as supplementary information. Become.
[0020]
According to a second aspect of the present invention, in the first aspect, in the plurality of extracted light intensity information, at least one of light intensity values indicated by each light intensity information is a predetermined light intensity value. Or in a predetermined light intensity range, the estimation is not performed, and an arbitrary light intensity value and an arbitrary relative position are acquired as the luminance information and height information.
[0021]
According to this method, when any one of the extracted light intensity information indicates a predetermined light intensity value or indicates an intensity value belonging to a predetermined intensity range. Arbitrary values are acquired as luminance information and height information. Thereby, for example, it is possible to determine whether the luminance information and the height information are correct or incorrect based on the values of the luminance information and the height information.
[0022]
According to a third aspect of the present invention, in the second aspect, the predetermined light intensity range is a range that can be taken by a light intensity value, and is determined from a maximum light intensity value or a minimum light intensity value of the possible range. Is a specific light intensity range up to the light intensity value, the arbitrary light intensity value is the minimum light intensity value of the possible range, and the arbitrary relative position is the minimum value of the height measurement range. Is the way.
[0023]
According to this method, any one of the plurality of extracted light intensity information is in a specific light intensity range from a maximum light intensity value or a minimum light intensity value within a range that the light intensity value can take to a predetermined light intensity value. If the light intensity value belongs, the minimum light intensity value and the minimum value of the height measurement range are acquired as luminance information and height information. Thereby, for example, when the values of the luminance information and the height information are the minimum light intensity value and the minimum value of the height measurement range that the light intensity value can respectively take, the luminance information and the height information are inaccurate. It is possible to determine that the data is correct.
[0024]
According to a fourth aspect of the present invention, there is provided an objective lens that focuses light from a light source with respect to a sample, and a relative position between the focusing position of the objective lens and the sample along the optical axis direction of the focused light. A confocal system comprising: a moving mechanism that automatically moves; a confocal stop disposed at a position conjugate to the condensing position of the objective lens; and a photodetector that detects the intensity of light passing through the confocal stop A light intensity from the sample at each relative position when the relative position between the focusing position of the objective lens and the sample is discretely changed in the optical axis direction of the focused light A first acquisition unit for acquiring information; an extraction unit for extracting a plurality of pieces of light intensity information from the light intensity information at each relative position acquired by the first acquisition unit; and the extraction unit Maximum light intensity value on the change curve based on multiple light intensity information The estimation means for estimating the relative position that provides the maximum light intensity value, and the maximum light intensity value estimated by the estimation means and the relative position that provides the maximum light intensity value are acquired as luminance information and height information, respectively. Second acquisition means, generation means for generating supplemental information based on a plurality of light intensity information extracted by the extraction means, and supplementary information generated by the generation means are acquired by the second acquisition means The confocal optical measurement device includes an adding means for adding the luminance information and the height information.
[0025]
According to said structure, the effect | action and effect similar to the above-mentioned 1st aspect can be acquired.
According to a fifth aspect of the present invention, in the fourth aspect, in the plurality of light intensity information extracted by the extraction unit, at least one of the light intensity values indicated by each light intensity information is a predetermined value. When it is a light intensity value or belongs to a predetermined light intensity range, the estimation means does not perform the estimation, and the second acquisition means determines an arbitrary light intensity value and an arbitrary relative position as the luminance. It is a configuration that is acquired as information and height information.
[0026]
According to this configuration, it is possible to obtain the same operations and effects as those of the second aspect described above.
According to a sixth aspect of the present invention, in the fifth aspect, the predetermined light intensity range is a range in which a light intensity value can be obtained, and is determined from a maximum light intensity value or a minimum light intensity value in the possible range. Is a specific light intensity range up to the light intensity value, the arbitrary light intensity value is the minimum light intensity value of the possible range, and the arbitrary relative position is the minimum value of the height measurement range. The configuration.
[0027]
According to this configuration, it is possible to obtain the same functions and effects as those of the third aspect described above.
According to a seventh aspect of the present invention, in the fourth aspect, the maximum light intensity value estimated by the estimation means acquired as the luminance information and height information by the second acquisition means as the supplementary information. And a relative position for giving the maximum light intensity value.
[0028]
According to this configuration, supplemental information is displayed together with luminance information and height information. As a result, for example, it is possible to display supplemental information indicating that the luminance information and the height information about a specific pixel on the image are inaccurate together with the image based on the luminance information and the height information. become.
[0029]
According to an eighth aspect of the present invention, in the fifth or sixth aspect, the arbitrary light intensity acquired as the luminance information and height information by the second acquisition unit under a condition not estimated by the estimation unit. The value and an arbitrary relative position are displayed together with the maximum light intensity value estimated by the estimation means acquired as the luminance information and height information by the second acquisition means and the relative position giving the maximum light intensity value. The configuration.
[0030]
According to this configuration, the luminance information that is an arbitrary light intensity value and the height information that is an arbitrary relative position together with the luminance information that is the estimated maximum light intensity value and the position that gives the estimated maximum light intensity value The height information is displayed. Thereby, for example, when an image based on luminance information and height information is displayed, the user can easily determine whether the luminance information and height information about which pixel on the image is accurate or inaccurate. It becomes possible to discriminate.
[0031]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a diagram showing a configuration example of a confocal optical measurement device including a confocal optical microscope according to the first embodiment of the present invention.
[0032]
In the apparatus shown in the figure, the light beam emitted from the light source 1 passes through the beam splitter 2 and then enters the two-dimensional scanning mechanism 3. The two-dimensional scanning mechanism 3 includes a first optical scanner 3 a and a second optical scanner 3 b, scans the beam light two-dimensionally, and guides it to the objective lens 5 attached to the revolver 4. The beam light incident on the objective lens 5 becomes focused light and scans the surface of the sample 6. The sample 6 is placed on the sample table 7 and can be moved in the optical axis direction by the Z stage 8.
[0033]
The light reflected from the surface of the sample 6 is again introduced from the objective lens 5 into the beam splitter 2 via the two-dimensional scanning mechanism 3, then reflected by the beam splitter 2, and collected by the objective lens 5 by the imaging lens 9. The light is condensed on a pinhole (confocal stop) 10 at a position optically conjugate with the light position. Then, the reflected light from other than the focal point of the sample 6 is cut by the pinhole 10, and only the light passing through the pinhole 10 is detected by the photodetector 11.
[0034]
The computer 12 includes a CPU, a ROM, a RAM, and the like, and includes a two-dimensional scanning mechanism 3, a Z stage 8, a photodetector 11, and the like by the CPU reading and executing a microscope control program stored in the ROM. The entire confocal optical measurement apparatus is controlled. For example, processing such as acquiring the output of the photodetector 11 and displaying an image based on the output on the monitor 13 is performed. The computer 12 also includes an input unit (not shown) for receiving various instructions from the user, for example, according to the content of the operation screen displayed on the monitor 13 by the user via the input unit. By making various setting instructions, it is possible to operate each part of the apparatus.
[0035]
Next, luminance and height measurement processing performed in this confocal optical measurement device will be described.
As described above, the condensing position by the objective lens 5 is optically conjugate with the pinhole 10, and when the sample 6 is in the condensing position by the objective lens 5, the reflected light from the sample 6 is pinned. The light is condensed on the hole 10 and passes through the pinhole 10, but when the sample 6 is at a position shifted from the condensing position by the objective lens 5, the reflected light from the sample 6 is reflected on the pinhole 10. In other words, the light is not condensed and does not pass through the pinhole 10.
[0036]
FIG. 2 is a diagram showing a relationship (I-Z curve) between the light-collecting position of the objective lens 5 and the relative position (Z) between the sample 6 and the output (I) of the photodetector 11 at this time.
As shown in the figure, when the sample 6 is at the condensing position Zo of the objective lens 5, the output of the photodetector 11 becomes maximum (Imax), and from this position, the condensing position of the objective lens 5, the sample 6 and As the relative position increases, the output of the photodetector 11 decreases rapidly.
[0037]
In the brightness and height measurement processing performed in this apparatus, using this characteristic, the two-dimensional scanning mechanism 3 two-dimensionally scans the focal point of the objective lens 5, and two-dimensionally scans the output of the photodetector 11. By imaging in synchronization with the mechanism 3, only a specific height of the sample 6 is imaged, and an image (confocal image) obtained by optically slicing the sample 6 is acquired. Then, the sample 6 is discretely moved in the optical axis direction by the Z stage 8, the two-dimensional scanning mechanism 3 is scanned at each position to acquire a confocal image, and a photodetector is detected at each measurement point on the surface of the sample 6. The height information of the sample 6 is acquired by detecting the position of the Z stage 8 at which the output of 11 is maximized. In addition, an image (luminance image) in which all the measurement points are in focus is obtained by displaying the images when the output of the photodetector 11 at each measurement point on the surface of the sample 6 is maximized. To do. Further, processing such as displaying the luminance image on the monitor 13 together with the operation screen is performed.
[0038]
Specifically, the brightness and height measurement processing is performed as follows.
First, in response to an instruction from the user, the Z stage 8 is moved to the measurement start position, and a desired measurement range in the height direction (Z direction), a two-dimensional scanning range of the surface of the sample 6 and the like are set. These ranges are stored in the RAM of the computer 12 so that they can be referred (read) as needed.
[0039]
Subsequently, measurement is started in response to a measurement start instruction from the user, and the Z stage 8 is moved within the set measurement range in the Z direction at a preset movement pitch ΔZ, while every movement of ΔZ. In addition, two-dimensional scanning of the set two-dimensional scanning range by the two-dimensional scanning mechanism 3 is performed, and the output (light intensity information) of the photodetector 11 is acquired in synchronization with the two-dimensional scanning mechanism 3. If necessary, a confocal image based on the acquired output of the photodetector 11 is displayed on the monitor 13 together with the operation screen for each movement of ΔZ.
[0040]
By such processing, the output of the photodetector 11 at each Z position for each ΔZ within the measurement range in the Z direction is acquired for each point (each measurement point) in the two-dimensional scanning range on the surface of the sample 6. For example, the output of the photodetector 11 acquired for a predetermined point on the surface of the sample 6 has a value indicated by a black circle in FIG.
[0041]
Subsequently, the following processing is performed on each measurement point on the surface of the sample 6.
First, from the output of the photodetector 11 acquired at each Z position, the output of the photodetector 11 obtained at the Z position where the output is maximum and the Z positions before and after the Z position are extracted. From the outputs of the photodetector 11 at the three Z positions, approximate quadratic curves (change curves) serving as I-Z curves are obtained.
[0042]
For example, when the output of the photodetector 11 acquired for a predetermined point on the surface of the sample 6 is the value indicated by the black circle in FIG. 2, the point (Z (k), I ( k)), and an approximate quadratic curve passing through the three points (Z (k-1), I (k-1)), (Z (k + 1), I (k + 1)) before and after that.
[0043]
Subsequently, from the obtained approximate quadratic curve, the maximum light intensity value at which the output of the photodetector 11 is originally maximized and the Z position of the Z stage 8 that gives it are estimated, and the estimated maximum light intensity value and The Z position to give it is acquired as luminance (luminance information) and height (height information).
[0044]
For example, according to the example shown in FIG. 2, the maximum light intensity Imax and the position Zo of the Z stage 8 that gives it are estimated from the obtained approximate quadratic curve, and the estimated Imax and Zo Get as height.
[0045]
Since such processing is performed for each measurement point on the surface of the sample 6, the brightness and height of each measurement point can be obtained using an approximate quadratic curve. Accurate brightness and height can be acquired without reducing the value of the movement pitch ΔZ. Further, it does not increase the processing time.
[0046]
However, in this brightness and height measurement process, in addition to the above-described process, in order to prevent an incorrect brightness and height from being acquired when an inappropriate approximate quadratic curve is obtained, the following process is performed. The processing is also performed.
That is, when the output of the photodetector 11 at the three Z positions as described above is extracted, the output value of the photodetector 11 is an inappropriate value for obtaining the approximate quadratic curve. Without obtaining the approximate quadratic curve or estimating the maximum light intensity value and the Z position to give it from the approximate quadratic curve, the arbitrary maximum light intensity value and the arbitrary Z position are acquired as the luminance and the height. , Etc. are performed.
[0047]
Specifically, this is performed as follows.
However, in this example, the possible range of the output value of the photodetector 11 is 0 to 4095 (12 bits), the above-mentioned inappropriate value is 0 or 4095, and the above-mentioned arbitrary maximum light intensity It is assumed that the value is 0, which is the minimum light intensity value of the range that can be taken as the output value of the photodetector 11, and that an arbitrary Z position is 0, which is the minimum value of the measurement range in the height direction.
[0048]
First, processing performed when any of the outputs of the photodetector 11 at the three extracted Z positions is 0 will be described with reference to FIG.
FIG. 6A is a diagram showing an example of the output of the photodetector 11 at the three extracted Z positions. The output of the photodetector 11 is small because the measurement conditions are not set properly. This is obtained when the reflectance of the measurement point on the surface of the sample 6 is lower than others.
[0049]
As shown in FIG. 9A, the output of the photodetector 11 is hardly obtained over the measurement range in the Z direction, and is near the focal position (the position where the focusing position of the objective lens 5 is on the surface of the sample 6). A slight output is obtained. In this case, when points indicating the output values of the photodetector 11 at the three Z positions indicated by black circles are extracted, (Z (m), I (m)), (Z (m-1), 0) , (Z (m + 1), I (m + 1)), and an approximate quadratic curve (solid line in FIG. 10A) obtained based on these is an actual I-Z curve (dotted line in FIG. Therefore, there is a possibility that the correct maximum light intensity value and the Z position that gives it cannot be estimated. Therefore, in order to prevent this, when any of the outputs of the photodetector 11 at the three extracted Z positions is 0, an approximate quadratic curve is not obtained or the maximum light intensity is calculated from the approximate quadratic curve. Processing is performed so as to obtain 0 as luminance and height without estimating the value and the Z position that gives it.
[0050]
Next, processing performed when any of the outputs of the photodetector 11 at the above-described three Z positions is 4095 will be described with reference to FIG.
FIG. 5B is a diagram showing an example of the output of the photodetector 11 at the three extracted Z positions. Contrary to the example shown in FIG. This is obtained when the output has increased, or when the reflectance at the measurement point on the surface of the sample 6 is higher than the others.
[0051]
As shown in FIG. 6B, the output of the photodetector 11 is obtained over the measurement range in the Z direction, but the output is saturated near the focal position. In this case, one of the extracted outputs of the photodetector 11 at the three Z positions (the white circle in FIG. 5B) exceeds the measurement range of the photodetector 11, and the value is within the measurement range. Will be replaced with 4095, which is the upper limit value. Therefore, when the points indicating the output values of the photodetector 11 at the three Z positions indicated by the black circles including this are extracted, (Z (m), 4095), (Z (m-1), I (m -1)), (Z (m + 1), I (m + 1)), and the approximate quadratic curve (solid line in FIG. 5B) obtained based on these is the actual I-Z curve (in FIG. It is very different from the dotted line b), and there is a possibility that the correct maximum light intensity value and the Z position giving it cannot be estimated. Therefore, to prevent this, when any of the outputs of the photodetector 11 at the three extracted Z positions is 4095, an approximate quadratic curve is not obtained, or the maximum light intensity value is calculated from the approximate quadratic curve. Then, the processing is performed so as to obtain 0 as the luminance and the height without estimating the Z position to give it.
[0052]
When the processing performed when any of the outputs of the photodetector 11 at the three extracted Z positions is 0 or 4095 as described above is performed for each measurement point on the surface of the sample 6, Subsequently, an image based on the brightness and height obtained for each measurement point is displayed on the monitor 13.
[0053]
For example, when the shape of the sample 6 is the shape shown in FIG. 4A, the image shown in FIG. 4B or FIG.
FIG. 5A is a diagram showing an example of the shape of the sample 6, and a part of the surface has a high reflection surface portion and a low reflection surface portion.
[0054]
FIG. 5B is a diagram showing an example of a luminance image (two-dimensional image) displayed based on the acquired luminance. The part shown in black in FIG. 5B shows the part where the luminance is zero.
FIG. 6C is a diagram showing an example of a height image (three-dimensional image) displayed based on the acquired brightness and height. The part shown in black in FIG. 3C shows a part where the luminance and the height are 0, and is actually displayed as a hollow part with a hole.
[0055]
As described above, when the output of the photodetector 11 at the three Z positions for obtaining the approximate quadratic curve becomes an inappropriate value, the brightness and the brightness acquired for each measurement point on the surface of the sample 6 are Since the measurement point having the brightness and the height of 0 is displayed in the image based on the height so as to be visually distinguishable, the user can determine which measurement point on the surface of the sample 6 is inaccurate data, or It is possible to visually determine which measurement point or measurement target site measurement condition is inappropriate.
[0056]
Next, another example in which one of the outputs of the photodetector 11 at the three extracted Z positions is 0 will be described with reference to FIG.
FIG. 4C is a diagram showing an example of the output of the photodetector 11 at the three extracted Z positions. In the example shown in FIG. 5 (c), as shown in FIG. 5 (a), the user sets the Z scanning range in FIG. 5 (a) as the measurement range in the Z direction. This is an example of the case where the S3 surface of the sensor is close to the lower limit position of the measurement range. In this case, at a predetermined measurement point on the S3 surface, as shown in FIG. 3C, there is a possibility that one of the light intensity information at the three Z positions to be extracted cannot be acquired. In the example of FIG. 6C, the output of the photodetector 11 at the measurement start position in the Z direction is maximized, so that the output of the photodetector 11 at the previous Z position cannot be acquired. . Therefore, even if the output of the photodetector 11 at the Z position is a value indicated by a white circle in FIG. 10C, it cannot be actually obtained, so the photodetector 11 at the Z position. Is regarded as 0 indicated by a black circle. Therefore, when the points indicating the output values of the photodetector 11 at the three Z positions indicated by the black circles including them are extracted, (Z (−1), 0), (Z (0), I (0) ), (Z (1), I (1)), and an approximate quadratic curve (solid line in FIG. 10 (c)) obtained based on these is an actual I-Z curve (in FIG. 10 (c)). There is a possibility that the correct maximum light intensity value and the Z position that gives it cannot be estimated. Therefore, in order to prevent this, even in such a case, if any of the outputs of the photodetector 11 at the three extracted Z positions is 0, an approximate quadratic curve is not obtained or approximated. Processing is performed so as to obtain 0 as luminance and height without estimating the maximum light intensity value and the Z position that gives it from the quadratic curve.
[0057]
When such processing is performed for each measurement point on the surface of the sample 6, an image based on the brightness and height obtained for each measurement point is displayed on the monitor 13.
For example, the image shown in FIG. 5B is displayed.
[0058]
FIG. 6B is a diagram showing an example of a height image displayed based on the acquired luminance and height. The part shown in black in FIG. 3C shows a part where the luminance and the height are 0, and is actually displayed as a hollow part with a hole.
Further, contrary to the example shown in FIG. 3C, the measurement range in the Z direction is set by the user, and as a result, the S1 surface of the surface of the sample 6 shown in FIG. In the case where one of the outputs of the photodetector 11 at three Z positions for obtaining an approximate quadratic curve at a predetermined measurement point on the S1 plane cannot be obtained because it is close to the upper limit position of Is processed in the same manner.
[0059]
As described above, even when the output of the photodetector 11 at the three Z positions for obtaining the approximate quadratic curve becomes an inappropriate value due to the measurement range in the Z direction set by the user, the sample 6 In the image based on the brightness and height acquired for each measurement point on the surface of the surface, the measurement point having the brightness and height of 0 is displayed so as to be visually distinguishable. It is possible to visually determine whether the measurement point is inaccurate data, or which measurement point or measurement condition of the measurement target part is inappropriate.
[0060]
As described above, according to the present embodiment, the approximate quadratic curve as the I-Z curve can be obtained and the brightness and height of the sample 6 can be measured. Therefore, in the measurement, the number of movements of the Z stage 8 is reduced to perform processing. Can be speeded up. Further, the output value of the photodetector 11 at the three Z positions extracted for obtaining the approximate quadratic curve is the minimum value (for example, 0) or the maximum of the range that the output of the photodetector 11 can take. If the value is inappropriate for obtaining the approximate quadratic curve, such as a value (for example, 4095), the approximate quadratic curve is not obtained, or the maximum light intensity value is given from the approximate quadratic curve. Since the Z position is not estimated, the brightness and height are replaced with a specific value (for example, 0), so that when the brightness image or height image is displayed, the user can make an accurate / inaccurate measurement. The result can be notified in a distinguishable manner, and it can be notified whether or not appropriate measurement condition setting has been performed.
[0061]
Next, a second embodiment of the present invention will be described.
The configuration of the confocal optical measurement device according to the present embodiment is the same as the configuration shown in FIG. 1, but the data format when the output of the photodetector 11 is digitally processed by the CPU of the computer 12 is different.
[0062]
FIG. 6 is a diagram showing an example of a data format according to the present embodiment. In the data format shown in the figure, the data length is composed of 16 bits, of which 12-bit data with bit numbers 0 to 11 indicates information on luminance and height (luminance / height data), and the remaining bit numbers 12 The 15-bit 4-bit data indicates the condition flag (supplementary information).
[0063]
When it is determined that any one of the outputs of the photodetector 11 at the three Z positions extracted for obtaining the approximate quadratic curve is an inappropriate value, the condition flag has an inappropriate value. This is a flag for notifying the obtained reason.
In the example shown in the figure, the bit of bit number 15 indicates a flag indicating the presence / absence of the determination, and the bit of bit number 14 indicates that the measurement range in the Z direction is insufficient (Z scan range is insufficient). The bit of bit number 13 indicates a flag indicating excessive light amount as the reason, and the bit of bit number 12 indicates a flag indicating insufficient light amount as the reason.
[0064]
Further, in the luminance and height measurement processing according to the present embodiment, it is determined that one of the outputs of the photodetector 11 at the three Z positions extracted for obtaining the approximate quadratic curve is an inappropriate value. Even when the approximated quadratic curve is obtained, the maximum light intensity value and the Z position that gives it are estimated from the approximated quadratic curve, and the estimated maximum light intensity value and the Z position that gives it are Processing is performed to obtain the brightness and height.
[0065]
That is, when the brightness and height measurement processing of the sample 6 is started, an approximate quadratic curve is obtained for each measurement point on the surface of the sample 6 and the brightness and height are obtained as in the first embodiment. It will be acquired.
For example, when a certain measurement point being processed has an inappropriate value at one of the three Z positions extracted for obtaining an approximate quadratic curve due to insufficient light quantity. When the determination is made, the above-described bit flags of bit numbers 15 and 12 are set, and information indicating that the information on the brightness and height is data obtained by an inappropriate approximate quadratic curve due to insufficient light quantity. Will be recorded along with information on brightness and height.
[0066]
Alternatively, at a certain measurement point being processed, one of the outputs of the photodetector 11 at the three Z positions extracted for obtaining the approximate quadratic curve was an inappropriate value due to excessive light quantity. When the determination is made, the above-described bit flags of bit numbers 15 and 13 are set, and information indicating that the information regarding the brightness and height is data obtained by an inappropriate approximate quadratic curve due to excessive light amount. Will be recorded along with information on brightness and height.
[0067]
Alternatively, at a certain measurement point during the processing, one of the outputs of the photodetector 11 is inappropriate at the three Z positions extracted for obtaining the approximate quadratic curve due to insufficient measurement range in the Z direction. When it is determined that the value is a value, the bit flags of the bit numbers 15 and 14 described above are set, and information on the brightness and height is obtained by an inappropriate approximate quadratic curve due to insufficient measurement range in the Z direction. Information indicating that the data has been recorded is recorded together with information on brightness and height.
[0068]
When the processing as described above is performed for each measurement point on the surface of the sample 6 and the brightness and height of each measurement point are acquired, an image based on the brightness and height is then displayed on the monitor 13. .
However, at the time of this display, the CPU of the computer 12 checks the bit flag of bit number 15 of the above 16-bit data for each measurement point on the surface of the sample 6, and displays data indicating that it is valid. Each bit flag of bit numbers 14 to 12 is checked, and processing is performed so as to display it according to the value of each flag.
[0069]
For example, the measurement point from which 16-bit data with a bit number 12 bit (light shortage) flag is set is blue, and 16-bit data with a bit number 13 bit (excessive light amount) flag is obtained. Measurement points are displayed in red, and the measurement points from which 16-bit data flagged with bit number 14 bit (measurement range shortage in the Z direction) is set are colored yellow.
[0070]
FIGS. 7A and 7B are examples of images displayed in accordance with the values of the respective bit flags having bit numbers 12 to 14. FIG. FIG. 4A shows an example of a luminance image (two-dimensional image) displayed based on luminance, and FIG. 4B shows a height image (three-dimensional image) displayed according to the luminance and height. ) Is an example.
[0071]
In FIGS. 9A and 9B, the area 15 (15a, 15b) colored and displayed in blue is obtained as 16-bit data in which a bit number 12 bit (light shortage) flag is set. An area 16 (16a, 16b, 16c) displayed with measurement points and colored in red indicates a measurement point from which 16-bit data with a bit number 13 bit (excessive light amount) flag is set is obtained. The area 14 (14a, 14b, 14c), colored yellow, indicates the measurement point from which the 16-bit data flagged with bit 14 (bit measurement range shortage) is obtained. ing. That is, the region 15 indicates a region where the light amount is insufficient, the region 16 indicates a region where the light amount is excessive, and the region 14 indicates a region where the measurement range in the Z direction is insufficient.
[0072]
In this way, the measurement points from which data with low reliability (brightness and height) are acquired are colored and colored, so that the user can acquire data with low reliability for any reason. It becomes possible to judge whether it has been done.
In addition to the images shown in FIGS. 7A and 7B, the ratio of the measurement points colored with the respective colors to the whole (the ratio of the pixels colored with the color to the total pixels) It can also be configured to be displayed.
[0073]
FIGS. 8A and 8B are examples of display screens on which such display is performed. FIGS. 7A and 7B correspond to FIGS. 7A and 7B, and FIG. 8A is colored with each color together with the luminance image shown in FIG. 7A. FIG. 8 (b) shows the ratio of the measurement points to the whole displayed, and FIG. 8 (b) shows the whole measurement points colored in the respective colors together with the height image shown in FIG. 7 (b). It is the figure where the ratio which occupies was shown and displayed.
[0074]
As shown in FIGS. 8A and 8B, “red... OO% blue... ΔΔ% yellow. As a result, the user accounts for XX% of the data with excessive light quantity, △% of the data with insufficient light quantity, and XX% of the data with insufficient measurement range in the Z direction. I can confirm that. In addition, instead of “red ... ○ %% blue ・ ・ ・ △△% yellow ・ ・ ・ XX%” displayed in (a) and (b) of FIG. % Insufficient light quantity… △△% Insufficient measurement range in Z direction… XX% ”may be displayed.
[0075]
In addition, after information on the brightness and height of each measurement point on the surface of the sample 6 is acquired in this way, measurement of a predetermined part can be performed based on the acquired information on the brightness and height.
However, in the measurement, if the information on the luminance and height of the measurement target portion is normally obtained, the above-described bit numbers 12 to 12 are included in the luminance image or height image displayed on the monitor 13. It does not matter if measurement points that are colored and displayed based on the 14-bit flag are included, but the measurement points that are colored and displayed in the range selected as the part to be measured Is included, the measurement result of the measurement target part becomes data with low reliability.
[0076]
Therefore, in the process related to the measurement, when a predetermined part is measured based on the acquired information on the brightness and height and the measurement result is displayed, the range selected as the measurement target part is colored. When the displayed measurement point is included, processing is performed so that a mark for notifying that the measurement result is data with low reliability is also displayed.
[0077]
FIG. 9 is a diagram showing a display example of the measurement result.
In the figure, “number” indicates measurement of a predetermined part corresponding to the number. "Accuracy" is a mark indicating whether or not the measurement result is data with low reliability. When "Accuracy" is "x", it indicates that the data is low reliability. “○” indicates that the data is not unreliable. “Height” and “width” indicate the height and width, which are the measurement results of the part to be measured.
[0078]
For example, in the measurement of a predetermined part corresponding to number 2 or number 5, since the measurement point that is colored and displayed is included in the part selected as the measurement target part, the measurement result is reliable. It indicates that the data is low.
Further, in such a measurement process, when measuring a predetermined part based on information on the acquired brightness and height, measurement points that are colored and displayed on a part selected as a measurement target part are displayed. If it is included, measurement may be prohibited, and a warning may be displayed on the monitor 13 to notify that effect. Thereby, it is possible to prevent the user from using a measurement result that may include a large error compared to the measurement result of other measurement target parts.
[0079]
As described above, according to the present embodiment, the approximate quadratic curve as the I-Z curve can be obtained and the brightness and height of the sample 6 can be measured. Therefore, the number of movements of the Z stage 8 can be reduced in the measurement. Thus, the processing can be speeded up. Further, if the output values of the photodetector 11 at the three Z positions extracted for obtaining the approximate quadratic curve are inappropriate values for obtaining the approximate quadratic curve, the measurement point Supplemental information (for example, the above-mentioned bit flags of bit numbers 12 to 15) is added to the information on the brightness and height of the image, and is added to the image when the image is displayed based on the information on the brightness and height. Since the information based on the supplementary information is also displayed, it is possible to notify the user of an accurate / inaccurate measurement result in a discriminable manner, and whether or not appropriate measurement condition setting has been performed. Can be notified.
[0080]
Next, a modified example of the confocal optical measurement device according to the first and second embodiments described above will be described.
First, in the first embodiment described above, any of the output values of the photodetector 11 at the three Z positions extracted in order to obtain an approximate quadratic curve as an IZ curve is a light When the output range of the detector 11 is the minimum value (for example, 0) or the maximum value (for example, 4095), the approximate quadratic curve is not obtained, or the maximum intensity value is given from the approximate quadratic curve. The processing is performed without estimating the Z position. The value of the output of the photodetector 11 when such processing is performed is the minimum value of the range that the output of the photodetector 11 can take. The threshold value is not limited to the maximum value, and may be a threshold value considering noise. For example, when any of the output values of the photodetector 11 at the three extracted Z positions is less than or equal to the threshold value, that is, the minimum value of the range that can be taken by the output of the photodetector 11 If it is within the light intensity range from the threshold value to the threshold value, or within the light intensity range from the maximum value to the threshold value, the approximate quadratic curve is not obtained, or the maximum intensity value is given from the approximate quadratic curve and Z is given. Processing may be performed without estimating the position.
[0081]
In the first embodiment described above, any of the output values of the photodetector 11 at the three Z positions extracted for obtaining an approximate quadratic curve as an I-Z curve is approximated. In the case of values inappropriate for obtaining a quadratic curve, the luminance and height were replaced with 0 as specific values, but the specific values are not limited to 0, and other May be the value.
[0082]
In addition, by applying the data format shown in FIG. 6 to the first embodiment described above, a pixel (0) whose luminance and height are 0 by the user on the image displayed based on the information on luminance and height ( By instructing the (measurement point), the reason why the luminance and height of the pixel are 0 (for example, insufficient light amount, etc.) may be displayed.
[0083]
Further, in the second embodiment described above, information other than the information indicated by the bits of bit numbers 12 to 15 added to the information on the brightness and height may be added to the data format shown in FIG. good. For example, when a bit flag of bit number 12 to 14 and bit number 15 is set, information regarding advice for eliminating the reason for setting the flag is added and added together with the image. Information regarding advice may be displayed on the monitor 13. In this case, for example, when a bit flag of bit number 12 (light quantity shortage) and 15 is set, information indicating that the sensitivity of the photodetector 11 is recommended is added as information relating to advice, and the advice along with the image is added. Is displayed on the monitor 13. Further, other help information or the like may be added.
[0084]
In addition, when adding information other than the information indicated by the bits of bit numbers 12 to 15 added to the information on luminance and height in this way, if the number of bits for adding the information is insufficient, known data The information may be embedded in information on luminance and height (12-bit data of the bit numbers 0 to 11 described above) using a compression technique. In this way, the information can be added without increasing the memory capacity.
[0085]
In the second embodiment described above, by checking the bit flags of bit numbers 12 to 15, it can be determined that the light amount is insufficient, the light amount is excessive, or the measurement range in the Z direction is insufficient. Based on the determination result, the sensitivity of the photodetector 11 is set to AGC (automatic gain control) so that information regarding the luminance and height of the measurement point determined as described above is normally acquired. Automatic control such as re-acquiring information on brightness and height, or re-acquiring information on brightness and height by correcting the measurement range in the Z direction set by the user may be performed.
[0086]
In the second embodiment described above, when any of the outputs of the photodetector 11 at the three Z positions extracted for obtaining the approximate quadratic curve is an inappropriate value, As in the case of the first embodiment, 0 is obtained as the luminance and the height without obtaining the approximate quadratic curve or estimating the maximum light intensity value and the Z position to give it from the approximate quadratic curve. Processing may be performed.
[0087]
In the first and second embodiments described above, an approximate quadratic curve that is an I-Z curve is obtained based on the outputs of the photodetector 11 at three Z positions. You may make it obtain | require based on the output of the photodetector 11 in the above Z positions.
In the first and second embodiments described above, the configuration shown in FIG. 1 is used as the configuration of the confocal optical measurement device. However, the configuration is not limited thereto, and other configurations may be used.
[0088]
For example, as a scanning mechanism that relatively scans the focused light from the objective lens 5 along the surface of the sample 6, which is a configuration of a confocal optical microscope included in the apparatus, the sample 6 is moved in a plane perpendicular to the optical axis. An XY stage to be moved may be used.
Alternatively, a structure may be used in which a Nipkow disk provided with a plurality of spiral minute openings on a disk is rotated at high speed. In this case, the Nippon disk also serves as a minute aperture arranged at a position conjugate with the condensing position of the objective lens 5, and a two-dimensional image sensor such as a CCD is used instead of the photodetector 11.
[0089]
Further, instead of the two-dimensional scanning mechanism 3, a configuration in which the focused light of the objective lens 5 is scanned on one line of the sample 6 by a one-dimensional optical scanner and the cross-sectional shape of the sample 6 is measured may be used.
Further, as a moving mechanism for relatively moving the focusing position of the objective lens 5 and the position of the sample 6, a mechanism for moving the position of the objective lens 5 is used instead of the Z stage 8 for moving the position of the sample 6. May be.
[0090]
As described above, the height measuring method and the confocal optical measuring device of the present invention have been described in detail. However, the present invention is not limited to the above embodiment, and various improvements and modifications can be made without departing from the gist of the present invention. Of course you can go.
[0091]
【The invention's effect】
As described above in detail, according to the present invention, the brightness and height of the sample can be measured at high speed, and only the optimum measurement result can be obtained. It is possible to notify that an inaccurate measurement result can be discriminated and to notify whether or not an appropriate measurement condition has been set.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a configuration example of a confocal optical measurement device including a confocal optical microscope according to a first embodiment of the present invention.
FIG. 2 is a view showing a relationship (IZ curve) between a relative position (Z) between a focusing position of an objective lens and a sample and an output (I) of a photodetector.
FIGS. 3A, 3B, and 3C are diagrams showing an example of the output of the photodetector at three extracted Z positions. FIGS.
4A is a diagram showing an example of the shape of a sample, FIG. 4B is a diagram showing an example of a luminance image (two-dimensional image) displayed based on the acquired luminance, and FIG. It is the figure which showed an example of the height image (three-dimensional image) displayed based on the acquired brightness | luminance and height.
5A is a diagram showing a measurement range in the Z direction set by a user, and FIG. 5B is a diagram showing an example of a height image displayed based on acquired brightness and height. is there.
FIG. 6 is a diagram showing an example of a data format according to the second embodiment.
7A is a diagram showing an example of a luminance image (two-dimensional image) displayed according to the value of each bit flag of bit numbers 12 to 14, and FIG. 7B is a diagram of bit numbers 12 to 14; It is the figure which showed an example of the height image (three-dimensional image) displayed according to the value of each flag of bit.
8A is a diagram showing the luminance image shown in FIG. 7A and the ratio of the measurement points colored in the respective colors to the entire measurement point, and FIG. It is the figure shown and displayed the ratio which occupies for the whole measuring point colored with each color with the height image shown to b).
FIG. 9 is a diagram illustrating a display example of measurement results.
FIG. 10 is a diagram illustrating a configuration example of a conventional scanning confocal optical microscope apparatus.
FIG. 11 is a diagram showing the relationship between the focusing position of the objective lens and the relative position (Z) between the sample and the output (I) of the photodetector.
12 (a), (b), (c), and (d) are diagrams showing an example of the output of the photodetector at three acquired Z positions. FIG.
[Explanation of symbols]
1 Light source
2 Beam splitter
3 Two-dimensional scanning mechanism
3a, 3b optical scanner
4 Revolver
5 Objective lens
6 samples
7 Sample stage
8 Z stage
9 Imaging lens
10 pinhole
11 Photodetector
12 computers
13 Monitor
14a, 14b, 14c region
15a, 15b area
16a, 16b, 16c region
21 Light source
22 Beam splitter
23 Two-dimensional scanning mechanism
23a, 23b Optical scanner
24 Objective lens
25 samples
26 Sample stage
27 Z stage
28 Imaging lens
29 pinhole
30 photodetectors
31 computers
32 monitors

Claims (8)

The light from the light source enters the sample through the objective lens,
Discretely changing the relative position between the focusing position of the objective lens and the sample in the direction of the optical axis,
Obtain light intensity information from the sample at each relative position,
Extracting a plurality of light intensity information from the obtained light intensity information at each relative position,
Estimating a maximum light intensity value on a change curve based on the plurality of extracted light intensity information and the relative position giving the maximum light intensity value;
Obtaining the estimated maximum light intensity value and the relative position giving the maximum light intensity value as luminance information and height information, respectively;
Adding supplemental information generated based on the plurality of extracted light intensity information to the acquired luminance information and height information;
A height measuring method characterized by the above. In the plurality of extracted light intensity information, if at least one of the light intensity values indicated by each light intensity information is a predetermined light intensity value or belongs to a predetermined light intensity range, the estimation is performed. Without obtaining an arbitrary light intensity value and an arbitrary relative position as the luminance information and height information,
The height measuring method according to claim 1. The predetermined light intensity range is a specific light intensity range from a maximum light intensity value or a minimum light intensity value to a predetermined light intensity value that can be taken by the light intensity value,
The arbitrary light intensity value is a minimum light intensity value in the possible range,
The arbitrary relative position is the minimum value of the height measurement range.
The height measuring method according to claim 2. An objective lens for focusing the light from the light source on the sample, a moving mechanism for relatively moving the focusing position of the objective lens and the position of the sample along the optical axis direction of the focused light, and A confocal optical measurement apparatus comprising a confocal stop arranged at a position conjugate with a condensing position of an objective lens, and a photodetector for detecting the intensity of light passing through the confocal stop,
A light intensity information from the sample at each relative position when the relative position between the focusing position of the objective lens and the sample is discretely changed in the optical axis direction of the focused light, respectively. Acquisition means;
Extraction means for extracting a plurality of light intensity information from the light intensity information at each relative position acquired by the first acquisition means;
Estimating means for estimating a maximum light intensity value on a change curve based on a plurality of light intensity information extracted by the extracting means and the relative position that gives the maximum light intensity value;
Second acquisition means for acquiring the maximum light intensity value estimated by the estimation means and the relative position giving the maximum light intensity value as luminance information and height information, respectively;
Generating means for generating supplementary information based on a plurality of light intensity information extracted by the extracting means;
Adding means for adding the supplementary information generated by the generating means to the luminance information and height information acquired by the second acquiring means;
A confocal optical measuring device comprising: In the plurality of light intensity information extracted by the extraction means, when at least one of the light intensity values indicated by each light intensity information is a predetermined light intensity value or belongs to a predetermined light intensity range. The estimation unit does not perform the estimation, and the second acquisition unit acquires an arbitrary light intensity value and an arbitrary relative position as the luminance information and height information.
The height measuring method according to claim 4. The predetermined light intensity range is a specific light intensity range from a maximum light intensity value or a minimum light intensity value to a predetermined light intensity value that can be taken by the light intensity value,
The arbitrary light intensity value is a minimum light intensity value in the possible range,
The arbitrary relative position is the minimum value of the height measurement range.
The height measuring method according to claim 5. Displaying the supplemental information together with the maximum light intensity value estimated by the estimation means acquired as the luminance information and height information by the second acquisition means and a relative position for giving the maximum light intensity value;
The confocal optical measurement apparatus according to claim 4. The arbitrary light intensity value and arbitrary relative position acquired as the luminance information and height information by the second acquisition unit under conditions not estimated by the estimation unit, the luminance information and the arbitrary relative position acquired by the second acquisition unit, and Displaying the maximum light intensity value estimated by the estimation means acquired as height information and a relative position for giving the maximum light intensity value;
The confocal optical measurement apparatus according to claim 5 or 6,

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