WO2003107064A1

WO2003107064A1 - Confocal microscope and method for measuring by confocal microscope

Info

Publication number: WO2003107064A1
Application number: PCT/JP2003/007750
Authority: WO
Inventors: 藤本　洋久; 北原　章広; 北　信浩; 渡部　秀夫
Original assignee: オリンパス光学工業株式会社
Priority date: 2002-06-01
Filing date: 2003-06-18
Publication date: 2003-12-24

Abstract

A confocal microscope and a method for measuring by confocal microscope in which one or a plurality of measuring units for detecting a moving amount is disposed oppositely to a Z stage for mounting a sample, maximum value of a variation curve represented by light intensity information and a relative position imparting it are estimated based on relative positional information obtained by detecting the relative position of the condensing position of an objective lens and the sample by means of the measuring unit, and a plurality of pieces of light intensity information including a maximum light intensity value, and then a confocal image is created using the maximum light intensity value and the relative position thus estimated as reflection luminance information and height information.

Description

Specification

Confocal microscope and measuring method using this confocal microscope

Technical field

The present invention relates to a confocal microscope for irradiating a sample with light and measuring surface information of the sample from the reflected light, and a measuring method using the confocal microscope.

Background art

In general, a confocal microscope irradiates a sample with point-like illumination, focuses light from the sample, for example, transmitted light or reflected light, on the confocal stop, and then reduces the light intensity transmitted through the confocal stop. The surface information of the sample is obtained by detecting with a photodetector. The point illumination is scanned on the sample surface by various methods, and surface information of a wide range of the sample is obtained from the obtained light intensity.

FIG. 19 shows an example of a configuration of a conventional confocal microscope. In this confocal microscope, light emitted from a light source 71 passes through a beam splitter 72, and then enters a two-dimensional scanning mechanism 74 through a reflecting mirror 73. Two-dimensional scanning is performed. This two-dimensionally scanned light is condensed by an objective lens 75 and is irradiated on a sample 77 placed on a sample table 76.

The light reflected from the surface of the sample 77 is guided to the reproduction objective lens 75, passes through the two-dimensional scanning mechanism 74 and the reflecting mirror 73, and is incident on the beam splitter 72. This reflected light is guided to the reflected light path of the beam splitter 72, is bent toward the imaging lens 78, and is focused on the confocal stop 79. The confocal stop 79 is arranged at a position conjugate with the objective lens 75, and the light only at the focal point of the sample 77 is Only to the photodetector 80. The photodetector 80 detects the light intensity (hereinafter, detection value) of the light only at this light collecting point.

The sample stage 76 is provided on the Z stage 81, and is controlled to move in the optical axis direction by the Z stage 81. The processing control section 82 is composed of a computer and the like, and controls each section of the microscope such as the Z stage 81, the two-dimensional scanning mechanism 74 and the optical detector 80 according to a preset control program. Drive control is performed, and the operating state and operation instructions are displayed on the moeta 83.

The focusing position of the objective lens 75 described above is at a position optically conjugate with the confocal stop 79, and the sample 77 is at the focusing position of the objective lens 75. In this case, the reflected light from the sample 77 is focused on the confocal stop 79 and passes through the confocal stop 79. When the sample 77 is located at a position deviated from the condensing position by the objective lens 75, the reflected light from the sample 77 is not condensed on the confocal stop 79 and almost passes therethrough. There is nothing to do.

The relationship between the relative position (Z) of the objective lens 75 and the sample 77, which is called I-Z force obtained by such a configuration, and the detection value (I) output from the photodetector 80 is as follows. As shown in FIG. 20, when the sample 77 is located at the light condensing position Z 0 of the objective lens 75, this detection value becomes the maximum. As the relative position between the objective lens 75 and the sample 77 moves away from the light condensing position Z0, the detection value of the photodetector 80 has a characteristic of sharply decreasing.

Utilizing this characteristic, the processing control unit 82 scans the focal point two-dimensionally by the two-dimensional scanning mechanism 74 and irradiates it onto the sample 77, and the detected value of the photodetector 80 is two-dimensionally Image synchronized with running mechanism 7 4 An image (confocal image) obtained by optically slicing the sample 77 was acquired.

Further, the sample 77 is moved in the optical axis direction by the Z stage 81, and the confocal image is acquired by scanning the two-dimensional scanning mechanism 74 at each position, and the photodetector 80 is detected at each point on the sample 77. The height information of the sample 77 is obtained by detecting the position of the Z stage 81 at which the detection value of the sample 77 becomes maximum.

Then, by superimposing and displaying the maximum value of the detection value of the photodetector 80 at each point of the sample 77, an image in which all surfaces are in focus is obtained.

With this confocal microscope, the height of the sample 77 can be measured by generating a confocal image. At this time, in order to increase the measurement accuracy, the width of the Z stage 81 to be moved once, that is, the width of the detection step (or the movement pitch) is reduced. The number of measurements accounts for the majority of the time it takes to detect the focal position Z 0.

In order to improve this, for example, in Japanese Patent Application Laid-Open No. 09-068413, the height of the sample 77 is not reduced without reducing the detection step width of the Z stage 81. A measurement method has been proposed to increase the accuracy of the measurement. The measurement method here is based on the position Z 0 of the Z stage 81, which is the maximum, and the detection values (light intensity) from the photodetector 80 at three points before and after the position. (1) By approximating the Z curve with a quadratic curve, the position of the Z stage 81 where the detection value of the photodetector 80 becomes the maximum is obtained with the accuracy equal to or less than the moving pitch of the conventional Z stage 81, and the height information is obtained. It has gained. For example, suppose that three detection values are obtained as indicated by the black circles shown in FIG. 21A. The approximated quadratic curve (approximate I-Z carp) (solid line shown in Fig. 21A) obtained using these three detected values is the actual I-Z curve (Fig. (Dotted line), it can be assumed that it is almost equal in the practical range, and from the approximate quadratic curve, the maximum value I max at which the detection value of the photodetector 80 becomes the maximum, and the position Z of the Z stage 81 at that time o can be estimated correctly.

However, according to the measurement method described in Japanese Patent Application Laid-Open No. Hei 9-68413, the I-Z carp is steep near the converging position of the objective lens 75 as shown in FIG. When driving the Z-stage 81 in the optical axis direction, it is necessary to move the Z-axis to the correct position in accordance with the instructions from the processing control unit 82 to obtain an accurate approximate curve. There is a problem. In particular, when the number of light intensity detection values is reduced to three points, for example, the error becomes large. Therefore, it is necessary to drive the Z stage 81 with high precision and high resolution. Is a burden on workers.

When the relative movement pitch in the Z axis is fixed, noise is greatly affected because a portion where the detected value does not change much near the peak of the I-Z curve is sampled. In addition, since arithmetic processing is performed on the detection value from the position (spread portion) of the unimportant Z stage 81, the number of data points is large, and it takes time to calculate the approximate quadratic curve. I need it.

In addition, the measurement conditions for finding the maximum position of the Z stage 81, that is, the number of detected light intensity values used for approximation, Whether a similar curve is used or the width of the light-condensing position and the detection step (relative movement pitch) between the sample must be set by the user. It is necessary to specify a curve and a relative movement pitch.

Since this I-Z curve has different settings depending on the magnification of the objective lens 75 and the like, it is not easy to select the optimum relative movement pitch. In addition, the measurement conditions differ depending on whether the height of the sample is measured at high speed or whether the measurement is performed with high accuracy.However, the technology disclosed in the above publication does not consider the measurement conditions. Not.

In addition, the contrast generally varies based on the non-uniform reflectivity of the sample surface, and a portion where the detected light intensity is insufficient or too strong is likely to be mixed.

For example, when the light intensity is insufficient as shown by the black circle in Fig. 21B, one of the detection values of the photodetector 80 at the three Z positions indicates a minimum value of 0. There are cases. The approximated quadratic curve (solid line shown by Fig. 2 IB) obtained using the detection values of these three photodetectors 80 is the actual I-Z curve (dotted line shown by Fig. 21 B) Therefore, I max and Z 0, which should be estimated from the approximated quadratic curve, are shifted by I err and Z err respectively.

Conversely, when the light intensity is too high, for example, the detection range of the photodetector 80 may exceed the detection range of a white circle shown by Fig. 21C. The detection value exceeding the detection range is the maximum value regardless of the actual value. In the case of the range, the detection value is indicated by the black circle (center) replaced by. The approximate quadratic curve (solid line shown in Fig. 21C) obtained using these detected values is different from the actual I-Z carp (dotted line shown in Fig. 21C). Imax, which should be originally estimated from the approximated quadratic curve obtained, exceeds the assumed maximum value, and Zo is shifted by Zerr. If any of these three detection values indicates the minimum value or the maximum value of the range that the detection value of the photodetector 80 can take, an approximate quadratic curve cannot be obtained.

Also, in the portion near the both ends of the scanning range of the Z stage 81 set in advance, for example, as shown by the black circle in FIG. is there.

For example, even if one missing detection value is appropriately captured (for example, a white circle in FIG. 21D) and an approximate quadratic curve (the actual shown in FIG. 21D) is obtained, It is not known whether it matches the actual I-Z curve (dotted line in Fig. 21D). Therefore, Imax and Z0 estimated by appropriately supplemented detection values change so much that a correct value cannot be estimated.

Ni will this Yo, approximate I -. When performing height measurement based on the Z curve, the obtained luminance information及Pi height _{information, F i g 2 1 B~ 2} 1 shown in D such as Such an uncertain measurement result may be included, and even if it is included, the user has no way of knowing it.

Disclosure of the invention

The purpose of the present invention is to achieve high speed under optimum measurement conditions with a simple configuration. Another object of the present invention is to provide a confocal microscope capable of calculating an approximate expression with high precision and realizing acquisition of a confocal image, and a measuring method using the confocal microscope.

In order to achieve the above object, the present invention converges and irradiates light from a light source onto a sample, and captures reflected light from the sample; and an optical axis of the light. A moving mechanism for relatively moving the focus position of the objective lens and the position of the sample along a direction; a confocal stop disposed at a position conjugate to the focus position of the objective lens; A photodetector for detecting the intensity of light passing through the confocal stop, a measuring unit for detecting a relative position between the converging position of the objective lens and the sample, and a converging position of the objective lens. The relative position of the sample is changed, and the light intensity information indicates based on a plurality of light intensity information including the maximum light intensity value of the light intensity detected by the light detector and the position information detected by the measurement unit. The maximum value of the change curve and the relative position to give it are estimated, and this estimation The maximum value and the relative position of the light intensities, reflected luminance information and high - providing a configured confocal microscope between Is information and the processing control unit for generating a confocal image.

Further, in the present invention, an objective lens, a confocal stop arranged at a position conjugate to a focusing position of the objective lens, and a relative distance between the sample and the objective lens are changed. A light detecting unit that discretely acquires light intensity information that has passed through the confocal point aperture at that time; a relative distance estimating unit that estimates the relative distance that obtains maximum light intensity information based on the light intensity information; , The magnification of the objective lens and the light intensity corresponding to each measurement mode for acquiring the height information A confocal point having information measurement condition data, and having a height information calculation unit for acquiring height information of the sample by changing a relative distance between the sample and the objective lens according to the measurement condition data. Provide a microscope.

Also, in the measurement method using a confocal scanning optical microscope, the luminance at a plurality of positions is measured while changing the relative position between the sample and the objective lens at predetermined intervals, and the measurement is performed at the plurality of positions. Among the luminance measurement results, the effect of noise was evaluated using luminance data at at least three consecutive points including the maximum luminance described above,

The present invention provides a confocal microscope-based measurement method for calculating an approximate curve based on the above-mentioned noise evaluation result and calculating a peak position of brightness.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a diagram showing a configuration of a confocal microscope according to a first embodiment of the present invention.

FIG. 2 is a diagram for explaining the processing operation of FIG. 1 for generating a confocal image in a confocal microscope.

FIG. 3 is a diagram showing a configuration of a confocal microscope according to a second embodiment of the present invention.

FIG. 4 is a diagram showing a configuration of a confocal microscope according to a third embodiment of the present invention.

FIG. 5 is a diagram schematically showing the measurement condition data in the third embodiment.

FIG. 6 is a diagram showing a setting screen in the third embodiment. is there.

FIG. 7 is a diagram showing a schematic configuration of a confocal microscopy system applied to a height measuring method according to a fourth embodiment of the present invention.

FIG. 8 is a flowchart for explaining a height measuring method according to the fourth embodiment.

FIG. 9 is a characteristic diagram for describing the height measuring method according to the fourth embodiment.

FIG. 10 is a diagram showing a configuration of a confocal microscope according to a fifth embodiment of the present invention.

FIG. 11 is a diagram showing the relationship (I-Z curve) between the relative position (Z) between the focusing position of the objective lens and the sample and the output (I) of the photodetector in the fifth embodiment. It is.

FIGS. 12A, 12B, and 12C are diagrams illustrating examples of outputs of the photodetectors at three extracted Z positions in the fifth embodiment.

FIGS. 13A, 13B, and 13C are diagrams showing an example of the shape of the sample in the fifth embodiment, and FIG. 13B is based on the acquired luminance. FIG. 13C shows an example of a displayed luminance image (two-dimensional image). FIG. 13C shows an example of a height image (three-dimensional image) displayed based on the acquired luminance and height. FIG.

FIG. 14 is a diagram showing the measurement range in the Z direction set by the user.

FIG. 15 is a diagram showing an example of a data format according to the sixth embodiment of the present invention. Fig. 16A is a diagram showing an example of a luminance image (two-dimensional image) displayed according to the value of each flag of bit numbers 12 to 14; Fig. 1 FIG. 6B is a diagram showing an example of a height image (three-dimensional image) displayed according to the value of each flag of bit numbers 12 to 14.

Fig. 17 A shows the luminance image shown in Fig. 16 A together with the ratio of the measurement points colored in each color to the total, and is displayed. FIG. 7B is a diagram showing the height image shown in FIG. 16B and the ratio of the measurement points colored in each color to the whole, together with the height image shown in FIG. 16B.

FIG. 18 is a diagram showing a display example of a measurement result in the sixth embodiment.

FIG. 19 is a diagram showing a configuration of a conventional confocal microscope.

FIG. 20 is shown to explain the processing operation of generating a conventional confocal image.

-Fig.-21A to 21D are diagrams showing examples of the output of the photodetector at the acquired three Z positions.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments according to the present invention will be described in detail.

FIG. 1 is a diagram schematically showing a configuration of a confocal microscope according to a first embodiment of the present invention.

In this confocal microscope, light emitted from a light source 1 passes through a beam splitter 2 and then enters a two-dimensional scanning mechanism 4 via a reflecting mirror 3. The light two-dimensionally scanned by the two-dimensional scanning mechanism 4 is condensed by an objective lens 5 and is converged on a sample stage 6. Irradiate the placed sample 7,

The reflected light reflected at the condensing point on the surface of the sample 7 is guided again to the objective lens 5, and enters the beam splitter 2 via the two-dimensional scanning mechanism 4 and the reflecting mirror 3. The beam splitter 2 guides the reflected light to a reflected light path, and is focused on a confocal stop 9 by an imaging lens 8. The confocal stop 9 is arranged at a position conjugate with the objective lens 5 and cuts the reflected light of the sample 7 from a point other than the focal point, and detects only the reflected light from the focal point of the photodetector 1. Pass through to 0. The photodetector 10 detects, as a detection signal, the light intensity of the condensing point that has passed through the confocal stop 9, and sends the detection signal to a processing control unit 11 including a CPU and the like. Send out.

Here, the condensing position of the objective lens 5 is located at a position optically conjugate with the confocal stop 9. For this reason, when the sample 7 is located at the position converged by the objective lens 5, the reflected light from the sample 7 is converged on the confocal stop 9 and passes through the confocal stop 9. When the sample 7 is located at a position deviated from the condensing position by the objective lens 5, the reflected light from the sample 7 is not converged on the confocal stop 9 but spreads. Therefore, only a small amount passes through the confocal aperture 9.

The sample stage 6 is mounted on a Z stage 12, and the movement of the sample stage 6 in the optical axis direction is controlled by the Z stage 12. On the Z stage 12, a measuring device 13 such as a glass scale, which constitutes a measuring means, is arranged on the optical axis so as to face each other. The measuring device 13 allows the objective lens 5 and the sample 7 to be measured. The movement pitch in the Z direction, which is a relative position, is detected. Then, this measuring instrument 13 The detection signal is output to the processing control unit 11.

The relationship between the reading (Z>) of the measuring device 13 and the output (I) of the photodetector 10 indicates that the sample 7 has an objective lens 5 like an I-Z carp shown in FIG. The output of the photodetector 10 is maximized when it is at the focal position Z0 of the objective lens 13. The reading (Z) of the measuring device 13 is obtained from the focal position Z0 of the objective lens 5 The output of the photodetector 10 has a characteristic of sharply decreasing as the relative position between the light-collecting position and the sample 7 is moved in the direction away from each other.

Further, a Z stage 12, a two-dimensional scanning mechanism 4, and a photodetector 10 are connected to the processing control unit 11 together with the measuring device 13. Based on the output, each part of the microscope such as the Z stage 12 and the two-dimensional scanning mechanism 4 is driven and controlled in accordance with a control program stored in advance. At this time, the processing control unit 11 displays the operation screen on the monitor 14.

With such a configuration, the processing control unit 11 drives and controls the two-dimensional scanning mechanism 4 to two-dimensionally scan the focal point on the sample 7 and outputs the output of the photodetector 10. By performing imaging processing in synchronization with the two-dimensional scanning mechanism 4, only a certain height of the sample 7 is imaged, and an image obtained by optically slicing the sample 7 (confocal image ) Is generated. This image is displayed on the monitor 14 together with the operation screen described above.

That is, the processing control unit 11 stores a luminance and height calculation program in advance. In this brightness and calculation program, approximate curves are set according to the I-Z carp for each objective lens 5. Have been. The processing control unit 11 starts the measurement of the measuring device 13, moves the Z stage 12 at the determined moving pitch △ Z within the measurement range, and moves the Z stage 12 at each Z relative position accompanying the movement. Then, each sliced confocal image is generated.

Here, the light intensity information is the value on the I-Z curve indicated by the black circle shown in Fig. 2 and compared at each point. For example, the maximum intensity was obtained (Zm, Imax). Then, the values before and after (Zm−ΔZf, I ′) and (Zm + ΔZb, I ″) are extracted. From these three points, the luminance and relative intensity of the surface of the sample 7 are determined based on the approximate curve. Is obtained with a resolution equal to or greater than the moving pitch ΔZ The processing control unit 11 generates a confocal image based on the luminance and relative height information of the surface of the sample 7 estimated in this manner.

Since the movement pitch △ Z of the Z stage 12 is actually measured by the measuring device 13, accurate movement operation is not required as in the past, and the detection position is detected at equal intervals for each movement pitch. Since there is no need to dispose them, high-precision images can be generated even with a simple moving mechanism. If the detection positions are not arranged at equal intervals, correct the measurement according to the arrangement to ensure the desired measurement accuracy.

As described above, in the confocal microscope, the measuring device 13 for detecting the amount of movement is arranged to face the Z stage 12. The measuring device 13 detects the relative position between the condensing position of the objective lens 5 and the sample 7. Based on the detected relative position information and a plurality of pieces of light intensity information including the maximum light intensity value of the light intensity, a maximum value of a change curve indicated by the light intensity information and a relative position at which the change curve is given are estimated. This estimated light intensity A confocal image is generated using the maximum value of the degree and the relative position as reflected luminance information and height information.

Therefore, by acquiring the brightness and height of the sample 7 based on the relative position information (movement information of the Z stage 12) detected by the measuring device 13, the focusing position of the objective lens 5 is obtained. It is not necessary to move the position of the sample 7 and the position of the sample 7 with high precision, and the number of movements of the Z stage 12 can be kept to a minimum, so that quick calculation can be performed.

Further, according to this, since the relative position between the focus position of the objective lens 5 and the sample 7 is detected using the measuring device 13, the movement performance of the Z stage 12 is affected. In addition, since highly accurate detection of the movement position is realized, the movement mechanism for controlling the movement of the Z stage 12 can be simplified.

In the present embodiment, an example in which the measuring device 13 is formed of a glass scale has been described. However, the present invention is not limited to this, and a measuring device such as a laser interferometer for measuring various lengths may be used. Configure using-It is possible.

Also, in the first embodiment, an example has been described in which the sample 7 is moved in the Z direction (the direction of the optical axis) so as to be relatively moved between the sample 7 and the objective lens 5. The present invention is not limited to this, and it is possible to move the entire microscope with respect to the sample 7 or to move the objective lens 5 relatively with respect to the sample 7. In the configuration, substantially the same effect can be obtained.

As described in detail above, the confocal microscope of the first embodiment According to this, a high-precision confocal image can be easily acquired easily with a simple configuration.

Further, in the first embodiment, as the method of calculating the reflection luminance and the height dimension, the approximation curve is assumed to be a quadratic curve, and the number of calculation points is assumed to be three. However, the present invention is not limited to this. Instead, various calculation methods can be configured according to the device characteristics and the like.

Next, a confocal microscope according to a second embodiment will be described. In the above-described embodiment, an example is described in which one measuring device is used. However, in the present embodiment, a plurality of measuring devices are used as shown in FIG. Note that, in the components shown in FIG. 3, the same components as those shown in FIG. 1 described above are denoted by the same reference numerals, and description thereof will be omitted.

In this confocal microscope, for example, two measuring devices 21 and 22 are arranged approximately symmetrically with respect to the optical axis of the objective lens 5 at intervals L, and these measuring devices 21 and 2 are arranged. 2 is configured to measure the relative position between the condensing position of the objective lens 5 and the sample 7. · In this configuration, the measured values of the two measuring devices 21 and 22 arranged approximately symmetrically with a distance L from the optical axis of the objective lens 5 are averaged, and the reflected luminance and A height dimension is obtained, and a confocal image is generated in the same manner based on the averaged reflection luminance and height dimension.

According to the confocal microscope of the second embodiment, the movement pitch in the Z direction can be measured by the two measuring instruments, and the configuration is simple and simple. Thus, a highly accurate confocal image can be obtained.

Next, a confocal microscope according to a third embodiment of the present invention will be described. Will be described.

FIG. 4 is a diagram schematically showing a configuration of a confocal microscope according to the third embodiment. In the components shown in FIG. 4, those that are the same as the components shown in FIG. 1 described above are given the same reference numerals, and descriptions thereof will be omitted.

In this confocal microscope, the processing control unit 11 controls the operation of the two-dimensional scanning mechanism 4 and the Z-stage 12, and acquires the light intensity information discretely by taking in the output of the photodetector 10. In addition to having a control program for a series of operations for estimating the relative distance at which the maximum light intensity information is obtained based on the light intensity information and using this relative distance as the height information of the sample 7, the brightness and height calculation are performed. Has a program. The processing control section 11 has a height information calculation section 32. The height information calculation section 32 performs brightness and height calculations as described later, and thus responds to each measurement mode for acquiring the magnification and height information of the objective lens 5. A measurement condition data memory 31 for storing the measurement condition data of the light intensity information is provided. The height information calculation unit 32 reads the measurement condition data from the measurement condition data memory 31 and changes the relative distance between the sample 7 and the objective lens 5 according to the measurement condition data. Obtain the height information of sample 7.

FIG. 5 is a schematic diagram showing an example of the measurement condition data stored in the measurement condition data memory 31. The measurement condition data stores, for example, 10 ×, 20 ×, 50 ×, and 100 × as the magnification of the objective lens 5, and each measurement mode corresponds to the magnification of the objective lens 5. Mode, for example, high speed mode and fine mode It is remembered. The high-speed mode is a mode in which the measurement time of the height information of the sample 7 is prioritized, and the fine mode is a mode in which the measurement accuracy of the height information of the sample 7 is prioritized.

The high-speed mode and the fine mode include an approximate curve for estimating height information from each light intensity information corresponding to the magnification of the objective lens 5 and the measurement mode, respectively. Each data of the number of calculation points for extracting information and the moving pitch ΔZ for changing the relative distance are stored.

The approximate curve stores a quadratic curve in the high-speed mode, the Gaussian curve in the fine mode, three points in the high-speed mode, and five points in the fine mode. Is stored. The moving pitch ΔZ is different from the moving speed ΔZ for the high-speed mode and the fine mode at each magnification of the objective lens 5, for example, the high-speed mode for the objective lens 5 having a magnification of 10 times. On the other hand, 10 m is memorized, and 5 μm etc. are recorded for the fine mode. -The processing control unit 11 displays the confocal image of the sample 7 on the monitor 14 and displays an operation screen (not shown) for acquiring height information of the sample 7 together with the confocal image. It has the function of displaying on the monitor 14. In addition, the processing control unit 11 executes the luminance and height calculation program to obtain, for example, the magnification of the objective lens 5 as shown in FIG. The setting screen for selecting between 2 ×, 20 ×, 50 ×, and 100 × and the measurement mode (for example, high speed mode, fine mode) is displayed on the monitor 14 screen. It has the function of displaying. Next, the operation of the confocal microscope configured as described above will be described.

The light beam emitted from the light source 1 passes through the beam splitter 2, is reflected by the mirror 3, and enters the two-dimensional scanning mechanism 4. The two-dimensional scanning mechanism 4 two-dimensionally scans light beams incident from the first and second optical scanners 4a and 4b. The light beam two-dimensionally scanned by the two-dimensional scanning mechanism 4 is incident on the objective lens 5 through each of the lenses 33 and 34. The light beam incident on the objective lens 5 is converged by the objective lens 5 and is scanned on the surface of the sample 7.

The light reflected on the surface of the sample 7 passes through the optical path opposite to the optical path incident on the sample 7, that is, passes through the objective lens 5 and the lenses 3 4 and 3 3 in order, and is further two-dimensionally scanned. Re-enters beam splitter 2 through mechanism 4 and mirror 3. The light that has re-entered the beam splitter 2 is reflected by the beam splitter 2 and condensed on a confocal stop 9 by an imaging lens 8. The photodetector 10 receives the light beam that has passed through the confocal stop 9 and outputs an electric signal thereof.

The processing control unit 11 captures the output of the photodetector 10 in synchronization with the two-dimensional scanning mechanism 4, images the sample image of only a specific height of the sample 7, and optically converts the sample 7 The sliced confocal image is obtained and displayed on the monitor i4. At the same time, the processing control unit 11 displays an operation screen for obtaining the height information of the sample 7 on the monitor 14 together with the confocal image. Here, the user observes the confocal image on the motor 14 screen while viewing the operation screen on the same screen. Perform the above operation to set the measurement range while moving the Z stage 12 in the optical axis direction. This measurement range is stored in a memory in the processing control unit 11.

Next, the processing control unit 11 receives the operation of the user, and performs the magnification of the objective lens 5 as shown in FIG. 4 (for example, 10 ×, 20 ×, 50 ×, 100 ×). The setting screen for selecting the measurement mode and selecting the measurement mode (for example, high-speed mode, fine mode) is displayed on the monitor 14 screen.

Here, the user operates on the setting screen to select the objective lens 5 magnification (for example, 10 times) used for measuring the height information of the sample 7, and then to change the measurement mode (for example, high-speed mode). Selected. Note that setting the magnification of the objective lens 5 is not limited to the operation on the setting screen shown in Fig. 6; for example, if the magnification of the objective lens 5 has already been set on the microscope setting screen, this setting will be performed again. There is no need to make selections on the screen.

The setting of the magnification of the objective lens 5 and the measurement mode is completed, and the measurement of the height information of the sample 7 is started. First, in the set measurement range, the height information calculation unit 32 measures from the measurement condition data memory 31 shown in Fig. 5 using the magnification (10 times) of the objective lens 5 (high-speed mode). ), Ie, a quadratic curve as an approximate curve, three points as the number of operation points, and a moving pitch ΔZ are read out, and the moving pitch Z (= 10 μm), the Z stage 12 is moved in the optical axis direction.

Next, the height information calculation unit 3 2 determines that the Z stage 12 Every time it moves at a moving pitch ΔΖ (= 10 μm), the output of the photodetector 10 is acquired, and each confocal image is acquired for each of these moving pitches ΔΖ (AZf, ΔZb, etc.) I do. At this time, the light intensity information at a certain point is, for example, the value of a black circle on the I-Z carp shown in FIG.

Next, when the high-speed mode is set, the height information calculation unit 32 calculates the light intensity information sequentially acquired for each movement pitch ΔZ and the light intensity information already acquired as the maximum. Compare. As a result of this comparison, the light intensity information with the higher light intensity is changed as the maximum light intensity information. Such a comparison operation is sequentially repeated each time light intensity information is taken in, and the light intensity information having the maximum light intensity is obtained as a result. At this time, the height information Z (m) of the Z stage 12 and the maximum light intensity I max are obtained.

At the same time, the height information calculation unit 32 calculates the Z stay at the height Z (m) —ΔZ, Z (m) + ΔZ before and after the height information Z (ra) at which the maximum light intensity is reached. The height information and the light intensity information of each of the elements 1 and 2 are obtained from the light intensity information obtained by sequentially acquiring {Z (m) —ΔZ, I '} and {Z (m) + ΔZ, I〃}. Extract.

Next, the height information calculation unit 32 selects a quadratic curve as an approximate curve from the measurement condition data memory 31 shown in FIG.

^{I = a - Z 2 + b} -. Z + c · '· (1) to. Then, the height information calculation unit 32 generates the height information and the light intensity information {Z (m), Imax}, {Z (m) —ΔZ, I of the stage 12 extracted earlier. '}, Two

{Z (m) + Δ Z, I "} into equation (1),

a = (I '+ I "-2 I max) / 2 · · · (2) b = (I-I') / 2" · (3) and find the value (Z 0, I)

ZQ =--b / (2 a) · '· (4) 1 = 1 max-b "4 a · · · (, 5) This gives the brightness and relative height of the surface of sample 7. Can be obtained with a resolution equal to or greater than the moving pitch ΔZ.

On the other hand, when the fine mode is set, the height information calculation unit 32 similarly compares the light intensity information for each of the moving pitches Δ 込む that are sequentially acquired, and sequentially obtains the light having the maximum light intensity. Intensity information is obtained, and height information Z (m) of the Z stage 12 at this time and maximum light intensity I max are obtained.

At the same time, the height information calculation unit 21 calculates the height Z (m−2) · ΔZ, Z (m) — Δ at each of two points before and after the height information Z (m) at which the maximum light intensity is reached. — Z, Z (m) + ΔZ, Z (m + 2) 'Height information and light intensity information of Z stage 12 at ΔZ {Z (ra-2) · ΔZ, I '}, {Z (m) —ΔZ, I'}, {Z (ra) + ΔZ, I "}, {Z (m + 2) .ΔZ, I〃} Extract from light intensity information.

Next, the height information calculation unit 32 selects a Gaussian curve as an approximate curve from the measurement condition data memory 31 shown in FIG. The Gaussian curve can approximate the I-Z curve more accurately than the quadratic curve.

The Gaussian curve is, for example, I = A. Exp {-(Z — Z o) ² / W ² } (6). This Gaussian curve I is

log I = a Z ² + b Z + c (7), the height information calculation unit 32 calculates the height information and light intensity of the five points already extracted. Information {Z (m-2) ■ mm ZI '}, {Z (m) — Δ Z, I'}, {Z (m) + Δ Z, I "}, {Z (m + 2) · Δ Z , I "}, find (ab, c) by the least squares method, and then find the value (Z0, I) of the vertex of the Gaussian curve.

Z ₀ =-b / (2 a) (8)

^{I = exp {c - b 2} /4 a} ... (9)

Thus, the brightness and relative height of the surface of the sample 7 can be obtained with a resolution of the moving pitch ΔZ or more. In this case, in the fine mode, since the number of calculation points is five and the approximate curve is a Gaussian curve, the height information of the sample 7 can be obtained with higher accuracy. As described above, in the third embodiment, the light intensity information corresponding to each measurement mode of the high-speed mode or the fine mode in which the magnification of the objective lens 5 and the height information of the sample 7 are acquired. The Z stage 12 is moved by the movement pitch ΔΖ in accordance with the measurement condition data of the above, and the maximum light intensity information is obtained based on the light intensity information of each operation point discretely acquired for each movement pitch ΔZ. Since the height information of sample 7 is obtained from the height of Z stage 12 corresponding to this maximum light intensity information, measurement of the light intensity information and height information of sample 7 is performed on Z stage 12. It can be performed at high speed with fewer movements. In addition, the user can set the objective lens 5 magnification (eg, 10 ×, 20 ×, 50 ×, 100 ×) and measurement mode (eg, high speed mode, fine mode) required for measurement. The light intensity information and height information of the sample 7 can be measured using the optimum measurement conditions for the objective lens 5 and the measurement mode, that is, the approximate curve, the number of calculation points, and the movement pitch. .

The brightness and the relative height of the surface of the sample 7 can be obtained with a resolution of the moving pitch ΔΖ or more, and the light intensity information of the sample 7 can be obtained in the high-speed mode. And the height information can be measured in a short time, and the height information of the sample 7 can be obtained with high accuracy in the fine mode.

Also, if the magnification of the objective lens 5 and the measurement mode are set on the setting screen shown in Fig. 6, the magnification of the objective lens 5 desired by the user and the measurement conditions optimal for the measurement mode are automatically set. The light intensity information and height information of sample 7 can be measured.

Further, in the third embodiment, the high-speed mode and the fine mode can be selected and set as the measurement mode. However, the present invention is not limited to this. It is also possible to select and set various modes for measuring the height information of the sample 7 between the intermediate mode (1) and the sample (7). As the approximate curve, in addition to the quadratic curve and the Gaussian curve, other curves may be used, and the number of calculation points may be different from that of the confocal microscope. Various changes may be made accordingly.

In addition, the confocal microscope is not limited to the configuration shown in FIG. 4; for example, the convergent light is converged by the objective lens 5 along the surface of the sample 7. For example, an XY stage that moves the sample 7 in a plane perpendicular to the optical axis may be used as the scanning mechanism that performs the scanning. In addition, instead of the two-dimensional scanning mechanism 4, a one-dimensional optical scanner may be used to scan the convergent light of the objective lens 5 one line over the sample 7 to measure the cross-sectional shape of the sample 7. As the moving mechanism for moving the relative position between the light collecting position of the objective lens 5 and the position of the sample 7, for example, a mechanism for moving the objective lens 5 may be used instead of the movement by the Z stage 12. Then, the objective lens 5 and the sample 7 may be relatively moved.

In place of the confocal stop 9, for example, a configuration may be adopted in which a Nipkow disk provided with a plurality of fine holes in a spiral shape in a disk is rotated at a high speed. The Nipkow disk also serves as a microhole arranged at a position conjugate with the condensing position of the objective lens 5, and a two-dimensional image sensor using, for example, a CCD or the like is used as the photodetector 10. As a confocal microscope, various confocal diaphragms 9 were placed at positions conjugate to the focusing position of the objective lens 5, and the relative distance between the sample 7 and the objective lens 5 was changed relatively. The light intensity information that has passed through the confocal aperture at this time is obtained discretely, the relative distance at which the maximum light intensity information is obtained is estimated based on the light intensity information, and this relative distance is used as the height information of sample 7. If it does, it applies to all of them.

According to the confocal microscope according to the third embodiment, height information can be obtained at high speed under optimum measurement conditions.

Next, a system including a confocal microscope according to a fourth embodiment of the present invention will be described. FIG. 7 is a diagram showing a schematic configuration of a system including a confocal microscope applied to the height measuring method according to the fourth embodiment. In the system of the present embodiment, surface information is acquired by scanning the sample two-dimensionally using the optical system of the confocal scanning optical microscope.

The confocal microscope 41 shown in FIG. 7 reflects the scanning laser light emitted from the laser light source 4 2 at the mirror 4 3 and enters the scanning mechanism 45 via the half mirror 44. .

The scanning mechanism 45 is connected to a processing control unit 47 composed of a computer or the like via a scanning control unit 46. The scanning mechanism 45 is connected to the scanning control unit 46 in response to an instruction from the processing control unit 47. Drive control is performed based on the output scanning control signal P 1.

The scanning mechanism 45 focuses the scanning laser beam on the sample 50 on the stage 49 via the objective lens 48 set in the revolver 47 based on the scanning control signal P1. In this state, a scanning laser beam is scanned in the XY direction on the sample 50 in the same manner as one raster scan.

The reflected light reflected from the sample 50 by the scanning of the sample with the scanning laser light is guided to the half mirror 44 via the objective lens 48 and the scanning mechanism 45, and the half mirror 4 The light is reflected by 4 to the light detector 51 side.

The light reflected by the half mirror 44 passes through a confocal stop 52 arranged at a position conjugate to the converging position of the objective lens 48, and then enters the photodetector 51. The photodetector 51 converts the incident reflected light into an electric signal corresponding to the amount of the reflected light and performs image processing. Output to slot 54.

The image processing unit 54 incorporates, for example, an image memory 54a composed of 512 pixels × 512 pixels × 8 bits (256 gradations). The image memory 54a is connected to the photodetector 51, and stores the electric signal output from the photodetector 51. Further, the image memory 54a is configured to control the movement of the stage 49 in the Z direction (that is, the optical axis direction of the scanning laser beam) to scan the scanning laser beam in the Z direction. Movement control circuit 53 is connected. A count value obtained by counting the number of movements of the stage 49 based on the signal output from the Z-direction movement control circuit 53 is stored in the image memory 54a.

The stage 49 is controlled to move by a predetermined amount in the Z direction based on the Z control signal P 2 output from the Z direction movement control circuit 53 according to an instruction from the processing control unit 47. At this time, the amount of movement (movement pitch) per stage 49 is controlled by the processing control unit 47. ·

In addition, the setting of the measurement range, the setting of the amount of movement of the stage 49 within each measurement range, the image display, and the control of the microscope system are performed on the monitor 48 connected to the processing control unit 47. Set by the user while looking at the screen.

In the system configured as described above, after the user places the sample 50 on the stage 49, the minute spot condensed on the sample 50 is controlled by the processing control unit 47. Scan in XY direction. At the same time, at each measurement point (X, y), the stage 49 is controlled to move in the Z direction to control the focus on the sample 50. I will do it. At this time, whether or not the sample 50 is in focus is determined while checking the image displayed on the moeta 48.

Next, the user sets each parameter related to the measurement operation. First, the processing control unit 47 sets the measurement range L of the sample 50 and the position Z0 of the stage 49 where the measurement starts, and then moves the stage 49 in the Z scanning for each movement of the stage 49. Switch Δ (mm Z).

When the measurement range L and the movement pitch Δ per one time of the stage 49 are set, the number of movements N of the stage 49 is determined according to the relationship L / Δ≤N. Since the count value of the number of movements of the stage 49 is stored in the image memory 54a, the number of movements N of the stage 49 is the gradation of the image memory 54a. Limited to the number 2 5 5 or less.

After setting the measurement range L, the movement pitch Δ, and the number of movements N as described above, when the measurement on the sample ₅₀ is started, the relative positions Z ₀ , Z _{s s} in the Z direction are detected by the photodetector _51. ... air collector in Z _n signal I _0, I丄, is ... I _n are detected.

Next, with reference to the flowchart shown in FIG. 8, a method for measuring the height of the confocal microscope configured as described above will be described.

First, the luminance is sampled by scanning in the Z direction, and the maximum luminance value, the luminance of the five points before and after the luminance value, and the value of the Z counter that maximizes the luminance are stored (step S1 (step S2 Step 9>) The specific contents of steps S2 to S9 are as follows. Perform the initial settings at the start of measurement (step S2). As a concrete initial setting, after moving the Z stage to Z o, resetting the power counter (substituting 0 for k), taking the initial luminance value I 0, value of 0 is stored in the maximum brightness value M _c. In the following, only the movement pitch by moving the Z stages, the counter value k with i ink Li main emission Tosuru, Komu takes luminance I _k (stearyl class tap S 3).

The luminance I _k is compared with the value of the maximum luminance value M _c (step S 4). If I _k is larger than M c (YES), I _{k is set} to M _c and the previous luminance is set to M _c. The two previous luminances L 2 are stored in M _A ; L, the previous luminance L 2 is stored in M _A2 , and k is stored in M _d (step S5), and the process proceeds to step S8. On the other hand, in stearyl-up S 4, if the value of the following I _k is M _c (NO), the value of the counter is equal to or k = M _d + 2 der Luca (Step-up S 6). In the determination of this migration if _{k = M d + 2 (YES} ), the luminance I _k to M _{b 2,} and stores each L i to M _bl to (step S 7), stearyl-up S 8 I do. On the other hand, in stearyl-up S 6, if Kere such a _{k = M d + 2 (NO} ), control proceeds to stearyl-up S 8.

Next, in step S8, the immediately preceding luminance L i is stored in the immediately preceding luminance L ₂ , and the luminance I _k is stored in the immediately preceding luminance L i. Thereafter, it is determined whether or not the counter value has reached the end value N (step S9). When the counter value reaches the same value (YES), the brightness sampling and the five points around the maximum value are determined. The extraction is completed. If the counter value has not reached the end value, the process returns to step S3, and the same processing is repeated. When sampling of such luminance is completed, the I—Z curve is then transformed into two curves using the data _Ma ₂ , M _ai , M _c , M _bl , and M _{b 2} of the five points before and after the maximum luminance. It is approximated by the following equation. The coefficients of the approximation formula are calculated by the least squares method from the luminance data at five points. The magnitude of the influence of noise is determined according to the second order coefficient a of the approximation formula obtained in step S10 (step S11).

In here, the magnitude of the impact of Roh size b in this decision, will be described with reference to the F i _g. 9. In Fig. 9, sample A has a smooth surface, so that the I-Z carp is sharp, and sample B has a rough surface, indicating that the I-Z carp is loose.

In the above step S 11, when the coefficient a obtained by the calculation is negative (a is less than 0 (YES)), as shown in the five-point approximate curve of sample A shown in FIG. Since the quadratic curve is upwardly convex, the I-Z carp can be approximated from the force. (Step S 12) However, when the coefficient a is not negative but positive in the judgment of Step S 11 (NO), a five-point approximation of sample B is obtained. It is convex downward like a curve, and becomes a straight line when it is 0. In such a case, the extracted five points of data show the I-Z force due to the noise. This indicates that the curve could not be approximated.

Therefore, in such a case, it is considered that the change in luminance on the I-Z curve is small and the influence of noise is large. Data M _al point near the maximum value, without using the M _bl with _{_{M a 2, M b 2,}} M c for computing the coefficients of the approximate expression (scan STEP S 1 3). By doing so, an approximate curve as shown in the three-point approximate curve of sample B is obtained, and the peak position is calculated based on this coefficient (step S14).

According to this Yo I Do method, data is M _{a 2,} M _al the scanning range of Z is store even wider, M _c, M _bl, 6 frames worth of M _{b 2} Contact Yopi M _d As a result, the use of memory can be reduced. In the above description, for the sake of simplicity, the condition for judging the noise effect is a <0 (approximate curve is convex upward), but in the case of a <0 (convex upward). Even so, the approximation curve may be too wide, so it is preferable to use a more appropriate threshold value (about 0).

The coefficient a indicates the spread width of the I-Z carp, and becomes the smallest when the sample is a mirror surface (the width of the I-Z carp becomes narrower). When the sample surface is rough, the I-Z curve expands to about twice, so the threshold for judging the noise effect is about 1 Z2, which is the coefficient a for a mirror surface (about 0). It may be. In the case of a mirror surface, the coefficient a may be obtained by actually measuring the I-Z carp of the mirror surface, or by calculating from the NA and the wavelength of the optical system.

Also, if there is no noise, if the peak position is calculated using the result of step S10, the result will always be within ± 1-2 of the moving pitch Δ. Therefore, in step S10, the calculation up to the peak position is performed. In step S11, when the calculated peak position is within the range of ± 1Ζ2ΧΔ, the step is performed. In step S12, use the peak position calculated in step S10, and In this case, the peak position may be obtained by the procedure after step S13. Note that since it is inevitable that noise is superimposed on the sampled luminance, the standard of step S11 may be slightly widened, and may be set to earth or ± 2ΧΔ.

The image Note Li 5 4 luminance at all positions in the Z scanning range stearyl class tap S 4 if there is room in Note Li capacity of a I丄, earthenware pots by storing I _2, a ~ I _n the memory In this case, the processing from step S5 to step S8 becomes unnecessary.

In this case, the maximum value of the luminance and N points before and after the maximum value of the luminance are extracted in step S10. In this case, the number of extracted points need only be 3 or more, and is not limited to 3 points or 5 points. Absent.

Further, if the influence of the noise is evaluated to be large in step S11 (NO), the re-extraction of the luminance data in step SI3 is performed based on the luminance extracted in step S10. , But before and after the maximum value from the luminances I 丄, I ₂ , 〜 _n at all positions in the Z scan range temporarily stored in step S 4,

Every other 5 points may be extracted.

Ni will this Yo, luminance I _ls 1 ₂ at all positions of the Z Hashi查range, ... when the power sale by storing I _n the Note Li, when sampled in g of luminance (Step-up S 1) Noise reduction and faster sampling, as well as a constant number of luminances used to calculate the peak position regardless of the magnitude of the effect of noise. The degree of freedom in re-extracting luminance data increases.

According to the present embodiment, the following points are extracted.

The height measuring method according to the fourth embodiment uses a confocal microscope. First, the brightness at a plurality of positions is measured while changing the relative positions of the sample and the objective lens at predetermined intervals. Of the multiple luminances obtained, the effect of noise is evaluated using luminance data at at least three consecutive positions including before and after the maximum luminance. Based on the result of this noise evaluation, an approximate curve is obtained, and the luminance peak position is calculated.

In this height measurement method, when obtaining an approximate curve, if the effect of noise is small, the approximate curve is used using the luminance data at at least three consecutive points including the maximum luminance. If the effect of noise is large, an approximate curve is calculated using luminance data excluding the luminance data at least adjacent to the position of the maximum luminance from the measured luminance data. Ask.

According to such a height measuring method, when obtaining an approximate curve, the width of the approximate expression is used as a noise evaluation criterion. For recalculation of the approximate curve, three points at the center and both ends are used among the five extracted points.

Therefore, according to the fourth embodiment, even if the shape of the I-Z carp changes due to the surface shape of the sample, it is used for calculating the coefficient of the approximate expression without changing the step of Z. By calculating the coefficients of the approximation of the I-z curve without increasing the number of I and suppressing the effects of noise, the height can be measured quickly and accurately.

Next, a fifth embodiment will be described.

Fig. 10 shows a configuration example of a system including a confocal point microscope according to the fifth embodiment of the present invention. In this system, the same reference numerals are used for the components that are the same as the components shown in Fig. 1. And the description is omitted.

In this configuration, a plurality of objective lenses 5 having different magnifications are mounted on the revolver 61. The processing control unit 11 includes a CPU, a ROM, a RAM, and the like. The CPU reads and executes a microscope control program stored in the ROM.

The luminance and height measurement processing by this system will be described.

The condensing position of the objective lens 5 is optically conjugate with the confocal stop 9, and when the sample 7 is at the condensing position of the objective lens 5, the reflected light from the sample 7 is common. The light is focused on the focus stop 9 and passes through the confocal stop 9, but if the sample 7 is shifted from the focus position by the objective lens 5, the reflection from the sample 7 will occur. Light does not converge on confocal aperture 9 and does not pass through confocal aperture 9.

Fig. 11 shows the relationship (I-Z curve) between the relative position (Z) of the focus position of the objective lens 5 and the sample 7 and the output (I) of the photodetector 10 at this time. FIG.

As shown in the figure, when the sample 7 is located at the focusing position Zo of the objective lens 5, the output of the photodetector 10 becomes maximum (I max), and the focusing of the objective lens 5 is started from this position. As the relative position between the position and the sample 7 increases, the output of the photodetector 10 sharply decreases.

For example, when the output of the photodetector 10 obtained at a predetermined point on the surface of the sample 7 is the value indicated by the black circle in FIG. 11, the point at which the output becomes the maximum (Z (k), I (k)), and points before and after (Z (k-1), I (k-1)), (Z (k + 1), An approximate quadratic curve passing through three points of I (k + 1)) is obtained.

Subsequently, from the obtained approximated quadratic curve, the maximum light intensity value at which the output of the photodetector 10 is originally maximum and the Z position of the Z stage 12 that gives the maximum light intensity value are estimated, and the estimated maximum light intensity The value and the Z position that gives it are acquired as luminance (luminance information) and height (height information).

According to the example shown in Fig. 11, the maximum light intensity Iraax and the position Zo of the Z stage 12 that gives it are estimated from the obtained approximated quadratic curve, and the estimated value is obtained. I max and Z o are obtained as brightness and height.

In the luminance and height measurement processing according to the fifth embodiment, as described above, in order to prevent an erroneous luminance and height from being acquired when an inappropriate approximate quadratic curve is obtained, The following processing is also performed in addition to the measurement processing in the embodiment.

When the output of the photodetector 10 at the three Z positions is extracted, the output value of the photodetector 10 is inappropriate for obtaining the approximate quadratic curve. Does not calculate the approximated quadratic curve or estimate the maximum light intensity value and the Ζ position to give it from the approximated quadratic curve. And the like are obtained.

Specifically, it is performed as follows. However, in the fifth embodiment, the range that can be obtained as the output value of the photodetector 10 is 0 to 495 (12 bits), and the aforementioned inappropriate value Is set to 0 or 495, and the above-mentioned arbitrary maximum light intensity value is taken as the output value of the photodetector 10. The low light intensity value is assumed to be 0, and an arbitrary Z position is assumed to be 0, which is the minimum value of the measurement range in the height direction.

First, the processing performed when any of the outputs of the photodetectors 10 at the three extracted Z positions is 0 will be described using FIG. 12A as an example.

FIG. 12A is a diagram showing an example of the output of the photodetector 10 at the three extracted Z positions. The photodetector 10 was detected because the measurement conditions were improperly set. This is obtained when the output of the sample 7 becomes small, or when the reflectivity of the measurement point on the surface of the sample 7 is lower than the others.

As shown in Fig. 12 A, almost no output of the photodetector 10 was obtained over the measurement range in the Z direction, and the focal position (the focusing position of the objective lens 5 was (Position on the surface of Fig. 7) Output is slightly obtained in the vicinity. In this case, when the points indicating the output values of the photodetector 10 at the three Z positions indicated by black circles are extracted,

(Z (m), Γ (m)〉, (Z (ra-1), 0) ·, (Z (m + l), I (ra + 1)) Approximated quadratic curve

(The solid line in Fig. 12A) is significantly different from the actual I-Z carp (dotted line in Fig. 12A), and estimates the correct maximum light intensity value and the Z position that gives it. This may not be possible.

Therefore, if any of the outputs of the photodetectors 10 at the three extracted Z positions is 0, the approximate quadratic curve is not obtained, or the maximum light intensity is calculated from the approximate quadratic curve. Processing is performed so as to obtain 0 as the luminance and height without estimating the value and the Z position at which it is given. Next, Fig. 12B describes the processing performed when one of the outputs of the photodetector 10 at the three Z positions described above is saturated and the value is 495. This will be described as an example. In this example, contrary to the example shown in Fig. 12A, when the output of the photodetector 10 becomes large or the reflectance of the measurement point on the surface of the sample 7 becomes different. It can be obtained if the price is higher than the others. In this case, one of the outputs of the photodetector 10 at the three extracted Z positions, which exceeds the measurement range of the photodetector 10 (the white circle in Fig. 12B) Is replaced by the upper limit of the measurement range, 495.

Therefore, when the points indicating the output values of the photodetector 10 at the three Z positions indicated by the black circles including these points are extracted, (Z (m), 40995), (Z (m-1 ), I (m-1)), (Z (m + 1), I (m + 1)). The approximated quadratic curve (solid line in Fig. 12B) obtained based on these results is significantly different from the actual I-Z carp (dotted line in Fig. 12B). It may not be possible to estimate a new maximum light intensity value and the Z position that gives it. Therefore, in order to prevent this, if any of the outputs of the photodetectors 10 at the three extracted Z positions is 40995, the approximate quadratic curve is not obtained or approximated. Processing is performed so as to obtain 0 as the luminance and height without estimating the maximum light intensity value and the Z position at which it is given from the quadratic curve.

The processing performed when any of the outputs of the photodetector 10 at the three extracted Z positions is 0 or 495, as described above, is performed at each measurement point on the surface of the sample 7. When done for Subsequently, an image based on the luminance and height obtained for each of the measurement points is displayed on the monitor 14.

For example, when the shape of the sample 7 is the shape shown in FIG. 13A, the image shown in FIG. 13B or FIG. 13C or the like is displayed. FIG. 13A is a diagram showing an example of the shape of the sample 7, and a part of the surface has a high reflection surface portion and a low reflection surface portion. FIG. 13B is a diagram showing an example of a luminance image (two-dimensional image) displayed based on the acquired luminance. The black portion of FIG. 13B indicates the portion where the luminance is 0. FIG. 13C is a diagram showing an example of a height image (three-dimensional image) displayed based on the acquired luminance and height. The black portion of FIG. 13C indicates a portion where the brightness and the height are ◦, and is actually displayed as a hollow portion with a hole.

In this way, when the output of the photodetector 10 at three Z positions for obtaining the approximate quadratic curve was an inappropriate value, the values obtained for each measurement point on the surface of Sample 7 were obtained. Measurement points with a luminance and height of 0 are displayed on the image based on the luminance and height so that they can be visually distinguished. This allows the user to visually check which measurement point on the surface of the sample 7 is incorrect data, or which measurement point or measurement condition of the measurement target portion is inappropriate. It is possible to make a judgment.

Next, another example in which one of the outputs of the photodetector 10 at the three extracted Z positions described above is 0 will be described using FIG. 12C as an example.

Fig. 1 2 C is the photodetector 1 at the three extracted Z positions. FIG. 9 is a diagram showing an example of an output of 0. In the example shown in Fig. 12C, as shown in Fig. 14, the user sets the Z scanning range of Fig. 14 as the measurement range in the Z direction as shown in Fig. 14. However, as a result, this is an example in which the S 3 surface of the surface of the sample 7 is close to the lower limit position of the measurement range. In this case, as shown in Fig. 12C, one of the light intensity information at the three Z positions to be extracted cannot be acquired at a predetermined measurement point on the S3 surface, as shown in Fig. 12C. There is a fear. In the example of Fig. 12 C, the output of the photodetector 10 at the measurement start position in the Z direction has reached the maximum, so the output of the photodetector 10 at the previous Z position cannot be obtained. It will be. Therefore, even if the output of the photodetector 1 at the Z position is the value indicated by the white circle in Fig. 12C, it cannot actually be obtained, so that at the Z position The output of the photodetector 10 is regarded as 0 indicated by a black circle. Therefore, if any of the outputs of the photodetectors 10 at the three extracted Z positions is 0, the approximate quadratic curve is not obtained, or the approximate Processing is performed so as to obtain 0 as the luminance and height without estimating the maximum light intensity value and the Z position at which it is given from the quadratic curve.

When such processing is performed for each measurement point on the surface of the sample 7, an image based on the luminance and height obtained for each measurement point is displayed on the monitor 14 subsequently.

For example, the image shown in FIG. 13B is displayed.

Fig. L3B is obtained and, contrary to the example shown in Fig. L2C, the measurement range in the Z direction is set by the user. As a result, since the SI surface of the surface of sample 7 shown in Fig. 14 was close to the upper limit position of the measurement range, an approximate quadratic curve was obtained at a predetermined measurement point on the S1 surface. When one of the outputs of the photodetector 10 at the three Z positions cannot be obtained, the same processing is performed.

As described above, when the output of the photodetector 10 at three Z positions for obtaining the approximate quadratic curve is an inappropriate value due to the measurement range in the Z direction set by the user. There is. In this case, the measurement point whose luminance and height are 0 is displayed in an image based on the luminance and height acquired for each measurement point on the surface of the sample 7 so as to be visually distinguishable. Therefore, according to the fifth embodiment, as described above, according to the fifth embodiment, the user is required to determine which measurement point on the surface of the sample 7 is inaccurate data, or as described above. Since the brightness and height of sample 7 can be measured by obtaining an approximate quadratic curve that is assumed to be a Z curve, in that measurement, the number of movements of the Z stage-12 is reduced to speed up the processing. be able to.

Further, the output value of the photodetector 10 at the three Z positions is the minimum value (for example, 0) or the maximum value (for example, 40995) of the range that the output of the photodetector 10 can take. In this case, the value is inappropriate for obtaining the approximate quadratic curve. If the values are inappropriate, an approximate quadratic curve is not obtained, or the maximum light intensity value and the Z position at which it is given are not estimated from the approximate quadratic curve. Will be replaced with a specific value (for example, 0). Therefore, in the present embodiment, the brightness image or the height image is displayed. In this case, it is possible to notify the user of the accurate / inaccurate measurement result in a distinguishable manner, and to notify whether or not appropriate measurement condition setting has been performed.

Next, a sixth embodiment according to the present invention will be described.

The configuration of the system including the confocal microscope according to the sixth embodiment is the same as the configuration shown in FIG. 10 in the fifth embodiment described above, except that the output of the photodetector 10 is different. The data format when digitally processed by the processing control unit 11 is different.

FIG. 15 is a diagram showing an example of a data format according to the present embodiment. In this data format, the data length is composed of, for example, 16 bits, and the 12-bit data of bit numbers 0 to 11 indicates information on luminance and height (luminance height data). The remaining four bits of bit numbers 12 to 15 indicate the condition flag (capture information). The condition flag indicates that the output of the photodetector 10 at the three Z positions extracted to obtain the approximated quadratic curve was not determined when one of the outputs was judged to be an inappropriate value. This is a flag for notifying the reason for obtaining an appropriate value.

Here, in the example shown in FIG. 15, first, the bit of bit number 15 shows a flag indicating whether or not the determination is made. The bit of bit number 14 indicates a flag indicating that the measurement range is insufficient in the Z direction (Z scanning range is insufficient). 13 it of bit number 13 indicates a flag indicating excessive light intensity as the reason. Bits 1 and 2 have the reason for lack of light. Indicates the flag.

In the luminance and height measurement processing according to the present embodiment, an approximate quadratic curve is obtained even if there are inappropriate values in the outputs at the three Z positions as described above. From this approximate quadratic curve, the maximum light intensity value and the Z position at which it is provided are estimated, and the estimated maximum light intensity value and the Z position at which the intensity value is obtained are obtained as luminance and height.

That is, when the brightness and height measurement processing of the sample 7 is started, an approximate quadratic curve is obtained for each measurement point on the surface of the sample 7 and the brightness and the height are obtained as in the fifth embodiment. It will be.

For example, for one measurement point during the processing, one of the outputs of the photodetector 10 at an inappropriate value at three Z positions extracted to obtain an approximate quadratic curve due to insufficient light quantity It is determined to be hot. At this time, the flags of bits 15 and 12 described above are flagged, and the information on the luminance and the height is determined by an approximate quadratic curve that is inappropriate due to insufficient light quantity. Information to the effect that the data is obtained is recorded together with information on luminance and height.

Or, for one of the measurement points being processed, one of the outputs of the photodetector 10 at an inappropriate value at the three Z positions extracted to obtain an approximate quadratic curve due to excessive light intensity It is determined to be hot. At this time, the flags of bits 15 and 13 described above are flagged, and the information on the luminance and the height is obtained by an approximate quadratic curve that is inappropriate due to excessive light quantity. Information indicating that the data was collected, along with information on brightness and height. Be recorded.

Alternatively, at one of the measurement points being processed, one of the outputs of the photodetector 10 is inappropriate at the three Z positions extracted to obtain the approximate quadratic curve due to the lack of the measurement range in the Z direction. Is determined to be a reasonable value. At this time, the flags of the bits 15 and 14 mentioned above are set, and the information on the luminance and the height is converted to an inappropriate approximation quadratic curve due to insufficient measurement range in the Z direction. Information indicating that the data is obtained is recorded together with information on the luminance and the height.

The above processing is performed for each measurement point on the surface of the sample 7 and the brightness and height of each measurement point are acquired. Subsequently, an image based on the brightness and height is displayed on the monitor 14. Is displayed.

However, at the time of this display, the processing control unit 11 checks the flag of the bit number 15 bit of the 16-bit data described above for each measurement point on the surface of the sample 7. Checks each flag of bit number 14 to 12 of the data indicating that it is valid, and performs processing to display the flag according to the value of each flag. .

For example, the measurement point at which 16-bit data with the bit number 12 bit (light quantity insufficient) was set is blue, and the bit number 13 bit (excess light quantity) flag is The measurement point at which the set 16-bit data was obtained is red, and the measurement at which the 16-bit data with the bit number 14 bit (measuring range insufficiency in the Z direction) is set is obtained. The points are colored yellow and displayed on monitor 14. FIGS. 16A and 16B show an example of an image displayed according to the value of each flag of such bit numbers 12 to 14. Fig. 16A shows an example of a brightness image (two-dimensional image) displayed based on luminance, and Fig. 16B shows the height displayed according to luminance and height. An example of an image (three-dimensional image) is shown and described.

In these Fig. 16 A, 16Β, the areas 6 3 (63 a, 63 b) colored blue are indicated by the bits (light quantity shortage) of bit number 12. The measurement points at which the 16-bit data with the flag set are obtained are shown. The area 64 (64a, 64b, 64c) colored red is 16-bit data with the bit 13 bit (excessive light) flag set. Shows the measurement points obtained. In addition, the area 62 (62a, 62b, 62c), which is colored yellow, is the flag of bit number 14 (the measurement range is insufficient in the Z direction). Indicates the measurement point at which the 16-bit data for which the was set was obtained. As described above, the area 63 indicates the area where the light quantity is insufficient, the area 64 indicates the area where the light quantity is excessive, and the area 62 indicates the area where the measurement range in the Z direction is insufficient.

In this way, the measurement points at which the unreliable data (brightness and height) are obtained are color-coded and colored. This makes it possible to determine whether unreliable data has been acquired.

In addition to the images shown in Figs. 16A and 16B, the ratio of the measurement points colored in each color to the whole (color It can also be configured to display the ratio of the colored pixels to the total pixels).

FIGS. 17A and 17B are examples of display screens on which such display is performed. FIGS. 17A and 17B correspond to FIGS. 16A and 16B, respectively, and FIG. 17A is used together with the luminance image shown in FIG. 16A. FIG. 9 is a diagram showing the ratio of the measurement points colored in each color to the entirety, which are displayed. Fig. 17B is a diagram showing the height image shown in Fig. 16B and the ratio of the measurement points colored by the respective colors to the whole, which are shown.

As shown in Fig. 17A and 17B, "red ... 〇〇% blue ... △△% yellow ... XX%" is shown below the image. As a result, users can see that excessive light amount data accounts for 〇〇% of the total, insufficient light amount data accounts for △△% of the total, and measurement range shortage data in the Z direction accounts for XX% of the total. You can confirm that it is. In addition, instead of “Red… 〇〇% Blue… △△% Yellow… XX%” displayed on Fig. 17 A and 17B, “Excessive light quantity… 〇_〇% Insufficient light quantity… △△ % Insufficient measurement range in Z direction ... XX ° / ₀ "etc. may be displayed.

After information on the brightness and height of each measurement point on the surface of the sample 7 is obtained in this manner, measurement of a predetermined part can be performed based on the obtained information on the brightness and height. become.

However, if the information on the luminance and the height is normally obtained, the luminance image or the height image displayed on the monitor 14 includes the flag of the bit numbers 12 to 14 described above. Base It does not matter if the measurement points that are colored and displayed are included. However, if the range selected as the part to be measured includes a colored measurement point, the measurement result of the part to be measured will be unreliable data. Become. In this case, when the measurement result is displayed, a mark for notifying that the measurement result is low-reliability data is also displayed.

FIG. 18 is a diagram showing a display example of the prediction result.

In FIG. 18, the “number” indicates that the measurement is for the specified part corresponding to the number. The “accuracy” is a mark indicating whether or not the measurement result is data with low reliability. When the “accuracy” power S “X”, the data is low reliability. Indicates that the data is not unreliable when it is "〇". “Height” and “width” indicate the height and width as the measurement result of the part to be measured.

For example, in the measurement of a predetermined part corresponding to No. 2 or No. 5, since the part selected as the measurement target part includes the measurement point displayed in color, the measurement is performed. The results show that the data is unreliable.

Further, in such a measurement process, when a predetermined portion is measured based on the acquired information on the luminance and the height, a portion selected as the measurement target portion is displayed in a colored form. If a certain measurement point is included, the measurement may be prohibited and a warning may be displayed on the monitor 14 to notify the user. As a result, the measurement results of other measurement target parts are This makes it possible to prevent the user from using measurement results that may include large errors.

As described above, according to the present embodiment, since the luminance and the height of the sample 7 are measured using the approximate quadratic curve, the number of movements of the Z stage 12 can be reduced and the processing speed can be increased.

If the output value of the photodetector 10 is inappropriate for obtaining an approximate quadratic curve, information about the luminance and height at the measurement point is included in the capture information (for example, the bit number described above). 13 to 15 flags) are added. As a result, it is possible to notify the user of an accurate / inaccurate measurement result in a distinguishable manner, and to notify the user whether or not appropriate measurement condition setting has been performed. it can.

Next, modified examples according to the fifth and sixth embodiments described above will be described.

In the fifth embodiment described above, the output values of the three photodetectors 10 for obtaining the approximate quadratic curve are the minimum value (for example, 0) of the range that the outputs of the photodetectors 10 can take, or When the value was the maximum value (for example, 4,095), the processing was performed without obtaining the approximate quadratic curve, or without estimating the maximum intensity value and the Z position to give it from the approximate quadratic curve.

In this process, the output value of the photodetector 10 is not limited to the minimum value or the maximum value in the range, but may be a threshold value considering noise. For example, if any of these three output values is below or above the threshold, i.e., the light intensity range の from the minimum value of the range to the threshold, or its When the light intensity is within the light intensity range from the maximum value to the threshold value, the processing is performed without calculating the approximate quadratic curve or estimating the maximum intensity value and the Z position that gives it from the approximate quadratic curve. It may be done.

In the fifth embodiment, one of the values of the output of the photodetector 10 at the three Z positions extracted for obtaining the approximate quadratic curve is inappropriate for obtaining the approximate quadratic curve. In the case of an unusual value, the brightness and height were replaced with 0 as a specific value, but the specific value is not limited to 0, but other values. May be.

Also, by applying the data format shown in FIG. 15 to the fifth embodiment, the user can set the luminance and height on an image displayed based on the information on luminance and height. When a pixel (measurement point) having a value of 0 is designated, the reason why the luminance and the height of the pixel are 0 (for example, lack of light amount) may be displayed. · · · · In the sixth embodiment, in the data format shown in Fig. 15, the information indicated by the bits of bit numbers 12 to 15 added to the information on luminance and height is added. Information other than the above may be added. For example, when any one of the bit numbers 12 to 14 and the bit number 15 are flagged, an advice to resolve the reason why the flag was set is set. Alternatively, information about the added device may be added, and the information about the added device may be displayed on the monitor 14 together with the image.

In this case, for example, bit number 1 2 (light quantity is insufficient) and 1 5 When the it flag is set, information indicating that the sensitivity of the photodetector 10 is recommended is added as information to the advisor, and the advisor is added together with the image. It will be displayed on Moeta 14. Also, other help information may be added.

In addition, when information other than the information indicated by the bits of bit numbers 12 to 15 added to the information on luminance and height is added, the number of bits for adding the information is small. If not, use a known data compression technique to embed the information in the information on luminance and height (the above-mentioned 12-bit data of bit numbers 0 to 11). May be. In this way, the information can be added without increasing the memory capacity.

Further, in the sixth embodiment, it is determined that the light amount is insufficient, the light amount is excessive, or the measurement range in the Z direction is insufficient by checking the bit flags of bit numbers 12 to 15. can do. Based on the result of the determination, the sensitivity of the photodetector 10 is set to AGC (auto gain control) so that information on the brightness and height of the measurement point determined as described above can be obtained normally. To obtain the information on brightness and height again, or correct the measurement range set by the user in the Z direction and reacquire information on brightness and height. You may do it.

Further, in the sixth embodiment, any of the outputs of the photodetector 10 at the three Z positions extracted to obtain the approximate quadratic curve If any of these values are inappropriate, similar to the fifth embodiment, no approximate quadratic curve is obtained, or the maximum light intensity value and the Z position at which it is given are not estimated from the approximate quadratic curve. Further, the processing may be performed so as to obtain 0 as the luminance and the height.

Further, in the fifth and sixth embodiments, the approximate quadratic curve is obtained based on the output of the photodetector 10 at three Z positions. However, the light detection at three or more Z positions is performed. Alternatively, it may be determined based on the output of the container 10.

Further, in the fifth and sixth embodiments, the system is configured as shown in FIG. 10, but the configuration is not limited thereto and may be another configuration.

For example, a scanning mechanism that relatively scans the focused light from the objective lens 5 along the surface of the sample 7, which is a configuration of a confocal optical microscope included in the system, is perpendicular to the optical axis. An XY stage or the like that moves the sample 7 in a suitable plane may be used.

Further, a configuration may be used in which a Nipkow disk provided with a plurality of spiral minute openings on a disk is rotated at a high speed. In this case, the Nipkow disk also serves as a micro aperture disposed at a position conjugate to the light-collecting position of the objective lens 5, and a two-dimensional image sensor such as a CCD is used instead of the photodetector 10.

In addition, instead of the two-dimensional scanning mechanism 3, a configuration is used in which the focused light of the objective lens 5 is scanned on one line of the sample 7 by a one-dimensional optical scanner to measure the cross-sectional shape of the sample 7. You can use it ₀

Also, the focusing position of the objective lens 5 and the position of the sample 7 are relatively As the moving mechanism for moving, a mechanism for moving the position of the objective lens 5 may be used instead of the Z stage 12 for moving the position of the sample 7.

Et al of the measuring instrument 1 3 for directly detecting the amount of movement of the Do Z stage 1 2 I I described in the first embodiment in the configuration of another embodiment _{(F i g. 4, F} ig. 7 and Fig. 10) can be easily applied, and the relative position between the light-collecting position of the objective lens 5 and the sample 7 can be detected using the measuring device 13. . Therefore, also in these other embodiments, the luminance and the height of the sample 7 are acquired based on the relative position information (movement information of the Z stage 12) detected by the measuring device 13 to obtain the objective 7 It is not necessary to move the focusing position of the lens 5 and the position of the sample 7 with high precision, and the number of movements of the Z stage 12 can be kept to a minimum, thereby enabling quick calculation.

As described above, the confocal microscope of the present invention and the measuring method using the confocal microscope have been described in detail. However, the present invention is not limited to the items described in each of the above-described embodiments. Of course, various improvements and changes may be made without departing from the spirit of the invention.

Claims

The scope of the claims

1. An objective lens that focuses light from a light source onto a sample and irradiates the sample with light, and captures reflected light from the sample.

A moving mechanism for relatively moving the focus position of the objective lens and the position of the sample along the optical axis direction of the light;

A confocal stop arranged at a position conjugate to the light-collecting position of the objective lens, and

A photodetector for detecting the intensity of light passing through the confocal aperture, a measuring unit for detecting a relative position between the condensing position of the objective lens and the sample,

By changing the relative position of the objective lens and the relative position of the sample, the light intensity information including the maximum light intensity value of the light intensity detected by the photodetector and the light intensity information detected by the measurement unit Based on the information, the maximum value of the change curve indicated by the light intensity information and the relative position to give it are estimated, and the estimated maximum value and relative position of the light intensity are calculated as the reflected luminance information and the height. A processing control unit for generating a confocal image as information,

Confocal microscope composed of.

2. The confocal microscope according to claim 1, wherein the measuring unit is arranged on an optical axis of the objective lens.

3. It has measurement condition data of the light intensity information corresponding to each measurement mode for acquiring the magnification and height information of the objective lens, and the relative distance between the sample and the objective lens according to the measurement condition data. 2. The confocal microscope according to claim 1, further comprising a height information calculation unit that obtains height information of the sample by changing the height.

4. The measurement condition data is an approximate curve for estimating the height information from the respective light intensity information according to the magnification of the objective lens and the measurement mode, and the light intensity information from the approximate curve. 4. The confocal microscope according to claim 3, wherein the number of calculation points used for extraction and the movement pitch when changing the relative distance are used.

5. The measurement condition data includes, as the measurement mode, time priority data in which measurement time is prioritized over measurement accuracy, and accuracy priority data in which the measurement accuracy is prioritized over measurement time. The confocal microscope according to claim 3.

6. A luminance measuring unit for measuring the luminance at a plurality of positions while changing the relative position between the sample and the objective lens at a predetermined interval; and the maximum luminance among the measurement results of the luminance at the plurality of positions. A noise evaluation unit that evaluates the effect of noise using luminance data at at least three consecutive points, including:

The noise evaluation unit is configured by: a peak position estimation unit that calculates an approximate curve based on the evaluation result and calculates a luminance peak position; and a peak position estimation unit that calculates a height between the sample and the objective lens. A confocal microscope equipped with a height measuring device for measuring height.

7. The peak position estimating unit

In obtaining the above approximate curve,

When the influence of noise is small, an approximate curve is obtained using the luminance data used for noise evaluation.

When the influence of noise is large, an approximate curve is obtained using the luminance data excluding at least the luminance data at the position adjacent to the position of the maximum luminance among the measured luminance data. Claim 6 A confocal microscope equipped with the height measuring device according to 1.

8. The peak position estimating unit

The confocal microscope equipped with the height measuring device according to claim 7, wherein the height is measured using the width of the approximate curve as an evaluation criterion of the noise when the approximate curve is obtained.

9. The peak position estimator

The confocal microscope equipped with the height measuring device according to claim 7, wherein the recalculation of the approximate curve is performed using three points at the center and both ends of the five extracted points.

10. The above confocal microscope is

An estimating unit for estimating a maximum light intensity value on a change curve and the relative position giving the maximum light intensity value based on a plurality of pieces of light intensity information detected by the light detector;

A second acquisition unit for acquiring the maximum light intensity value estimated by the estimation unit and a relative position giving the maximum light intensity value as luminance information and height information, respectively;

A generating unit for generating supplementary information based on the plurality of light intensity information estimated by the estimating unit;

The confocal microscope according to claim 1, further comprising: an adding unit that adds the supplementary information generated by the generating unit to the luminance information and the height information obtained by the second obtaining unit.

1 1. The estimation unit

When at least one or more of the light intensity values indicated by the light intensity information detected by the light detector is a predetermined light intensity value or belongs to a predetermined light intensity range. , Without performing the above estimation, The confocal microscope according to claim 10, wherein the second acquisition unit acquires an arbitrary light intensity value and an arbitrary relative position as the luminance information and the height information.

12. A maximum light intensity value estimated by the estimation unit and acquired as the luminance information and the height information by the second acquisition unit, and a relative position at which the maximum light intensity value is given. The confocal microscope according to claim 10, wherein said supplementary information is displayed.

1 3. Objective lens and

A confocal stop located at a position conjugate to the focusing position of the objective lens

A light detection unit that discretely acquires light intensity information that has passed through the confocal stop when the relative distance between the sample and the objective lens is changed;

A relative distance estimating unit for estimating the relative distance for obtaining maximum light intensity information based on the light intensity information;

It has measurement condition data of the light intensity information corresponding to each measurement mode for acquiring the magnification and the height information of the objective lens, and determines the relative distance between the sample and the objective lens according to the measurement condition data. A confocal microscope comprising: a height information calculation unit configured to acquire height information of the sample by changing the height.

14. The measurement condition data is an approximate curve for estimating the height information from the respective light intensity information according to the magnification of the objective lens and the measurement mode, and the light intensity information from the approximate curve. 14. The confocal microscope according to claim 13, wherein the number of calculation points used for extraction is a movement pitch when changing the relative distance.

15. The confocal microscope according to claim 13, wherein the measurement condition data includes, as the measurement mode, data in which measurement time is prioritized and data in which measurement accuracy is prioritized.

16. A height measuring method using a confocal scanning optical microscope,

While changing the relative position between the sample and the objective lens at predetermined intervals, the luminance at multiple positions was measured,

Of the luminance measurement results at the above-mentioned plurality of positions, the influence of noise was evaluated using luminance data at at least three consecutive positions including the above-mentioned maximum luminance,

A measurement method using a confocal microscope that calculates an approximate curve based on the above noise evaluation results and calculates the peak position of brightness.

1 7. In the above measurement method,

When finding the above approximate curve,

If the influence of noise is large, a request for obtaining an approximate curve using luminance data obtained by excluding luminance data at least at a position adjacent to the position of the maximum luminance from among the measured luminance data. Item 16. A measurement method using a confocal microscope according to Item 16.

1 8. In the above measurement method,

18. The measurement method using a confocal microscope according to claim 17, wherein, when obtaining the approximate curve, a width of the approximate curve is used as a criterion for evaluating the noise.

1 9. In the above measurement method, 18. The method according to claim 17, wherein the approximate curve is recalculated using three points at the center and both ends of the ^five extracted points.