JP2004098267A - Polishing tool, polishing device, and polishing precess - Google Patents

Polishing tool, polishing device, and polishing precess Download PDF

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Publication number
JP2004098267A
JP2004098267A JP2002267549A JP2002267549A JP2004098267A JP 2004098267 A JP2004098267 A JP 2004098267A JP 2002267549 A JP2002267549 A JP 2002267549A JP 2002267549 A JP2002267549 A JP 2002267549A JP 2004098267 A JP2004098267 A JP 2004098267A
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JP
Japan
Prior art keywords
polishing
thin film
tool
film head
elastic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002267549A
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Japanese (ja)
Inventor
Kazuhiko Ito
伊藤 和彦
Original Assignee
Canon Inc
キヤノン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, キヤノン株式会社 filed Critical Canon Inc
Priority to JP2002267549A priority Critical patent/JP2004098267A/en
Publication of JP2004098267A publication Critical patent/JP2004098267A/en
Pending legal-status Critical Current

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Abstract

An object of the present invention is to control the shape and the like of an elastic head portion of a polishing tool in real time during processing.
An elastic tool main body of a polishing tool has a pair of holding plates (2, 3) hermetically holding both ends of a cylindrical elastic thin film head (1) inside a rotating shaft (11) serving as a tool spindle rotated by a motor (16). The elastic thin film head 1 is maintained in a predetermined outer shape by a controllable gas pressure supplied from the outside of the apparatus through a gas supply flow path 11a provided in the apparatus. By adjusting the distance between both holding plates 2 and 3 by the hydraulic cylinder 19, it is possible to change the outer shape of the elastic thin-film head portion 1 during machining to match the local curvature radius of the workpiece lens W 1.
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a polishing tool in which a workpiece is immersed in a solution (polishing liquid) in which fine abrasive grains are dispersed, and the polishing tool is kept at a minute interval so that the workpiece does not come into contact with the polishing tool. The present invention relates to a polishing tool, a polishing apparatus, and a polishing method used for so-called non-contact polishing in which fine abrasive grains are caused to collide with a workpiece by rotating a liquid flow generated in a nip portion to smoothly finish the surface of the workpiece. .
[0002]
[Prior art]
The non-contact polishing is a polishing method called EEM (Elastic Emission Machining). In the processing of optical components such as lenses and mirrors, polyurethane spheres or elastic thin film members in which gas is enclosed are used as polishing tools. (See Japanese Patent Application Laid-Open Nos. 9-85613 and 9-85614).
[0003]
For example, as shown in FIG. 6, a core 102 integrally supporting an elastic body 101 such as a polyurethane sphere is fixed to a tip of a rotating shaft 111 by a screw member 103, and the rotating shaft 111 is held by a housing 112. The elastic body 101 immersed in the polishing liquid is rotated at a high speed by being rotatably supported by a pair of bearings 113 and 114 and connecting the rear end of the rotating shaft 111 to a motor 116 by a coupling 115.
[0004]
A core 102 for fixing the elastic body 101 to the rotating shaft 111 is made of aluminum or SUS material, and the outer shape of a polyurethane resin created around the core 102 is fixed using a machining process such as grinding. The elastic body 101 is formed by processing into a spherical shape having a radius of curvature of.
[0005]
And the workpiece W 0 held by the jig 120, since the spacing at the nip portion between the elastic member 101 of the spherical is an elastic tool body such normally less than the number of [mu] m, sphericity of the elastic member 101 is below the distance Need to be processed. The material of the elastic body 101 is fixed at the stage when a polyurethane sphere or the like is selected.
[0006]
On the other hand, in a polishing apparatus using an elastic thin film member filled with gas as a polishing tool, a gas is sealed inside the elastic thin film member so as to have a radius of curvature suitable for the optical surface shape of an optical component to be processed, and a check is made. The external pressure is maintained by holding the internal pressure by a valve.
[0007]
[Problems to be solved by the invention]
However, according to the above-mentioned conventional technology, a solid rotary tool using an elastic body such as polyurethane requires that the space between the workpiece and the spherical elastic tool body during processing is usually several μm or less. Considering this, it is necessary to process the sphericity of the elastic tool main body to be equal to or less than the above-mentioned interval, and it is difficult to guarantee the shape accuracy of the elastic body due to the nature of the material.
[0008]
In addition, since the elastic body is fixed at the stage of selecting the material and the outer shape of the tool is also fixed at the time of manufacturing, the deformation area (machining area) of the elastic tool main body elastically deformed by the fluid pressure due to the rotation of the tool is processed. It varies based on the surface shape, that is, the local radius of curvature of the surface to be processed, which makes it impossible to perform uniform processing and results in a distribution of surface roughness.
[0009]
On the other hand, in a polishing tool in which an elastic thin film member in which a gas is enclosed is used as an elastic tool main body, it is assumed that a constant radius of curvature is maintained by presetting the pressure of the enclosed gas. When is a spherical surface, optimal machining can be performed by setting a tool radius of curvature suitable for the radius of curvature. However, in recent years, the performance required for optical components has also tended to be higher in precision, and the surface shape has become more complicated from an aspherical shape to a free-form surface, thus causing the following problems.
[0010]
In other words, the amount of aspherical surface also tends to increase with further improvement in accuracy, and the amount of aspherical surface has reached several hundred μm. In addition, even when looking at the local radius of curvature of the surface to be processed, it ranges from 100 mm to several thousand mm in one optical component, and when processing is performed with a constant tool radius of curvature, there are locations where the processing capacity is locally reduced. Occurs. Therefore, it is difficult to uniformly process the entire processing surface of the workpiece to a sub-nanometer roughness.
[0011]
The present invention has been made in view of the above-mentioned unresolved problems of the conventional technology, and a processing area in a nip portion between a polishing tool and a polishing tool can be controlled in real time during processing according to a local shape of a surface to be processed. It is an object of the present invention to provide a polishing tool, a polishing apparatus, and a polishing method that can polish a free-form surface of an optical component or the like with high accuracy and uniformity and efficiently.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, a polishing tool according to the present invention includes a pair of disk members facing each other, a cylindrical elastic thin film head portion whose both ends are sealed and held by the pair of disk members, and a tool spindle rotated by a motor. Coupling means for coupling the pair of disk members to each other, and the elastic thin film head section is controlled by a controllable gas pressure supplied from a gas supply means through a gas supply passage provided on the tool spindle. Is characterized in that a predetermined outer shape is maintained, and a nip portion for performing a non-contact polishing process by flowing a polishing liquid containing abrasive grains between the workpiece and a workpiece is formed.
[0013]
Adjusting means for changing the distance between the two disk members may be provided.
[0014]
Preferably, the adjusting means has a hydraulic cylinder for moving one disk member toward and away from the other disk member.
[0015]
The polishing apparatus of the present invention includes a tool spindle having a gas supply flow path extending in the axial direction, a motor for rotating and driving the tool spindle, a pair of disk members facing each other on the tool spindle, and the pair of disks. An elastic tool main body having a cylindrical elastic thin film head portion whose both ends are sealed and held by members, coupling means for coupling the elastic tool main body to the tool spindle, and the gas supply flow path of the tool spindle. Gas supply means for supplying a controllable gas pressure to the elastic thin film head portion of the elastic tool main body portion via the gas supply passage. Is characterized in that the outer shape is maintained, and a nip portion for performing non-contact polishing is formed by flowing a polishing liquid containing abrasive grains between the workpiece and a workpiece.
[0016]
A labyrinth seal structure for preventing leakage of the gas pressure supplied to the gas supply channel may be provided on the tool spindle.
[0017]
The polishing method according to the present invention comprises rotating a resilient tool body provided with a cylindrical resilient thin film head, both ends of which are sealed and held by a pair of disk members opposed to each other, by a tool spindle, thereby forming a nip between the resilient tool body and a workpiece. A polishing method for performing non-contact polishing by a flow of a polishing liquid generated in a portion, wherein the polishing is controllably supplied from a gas supply means to the elastic thin film head portion through a gas supply passage provided in the tool spindle. The elastic thin film head is maintained in a predetermined outer shape by a suitable gas pressure.
[0018]
By controlling the gas pressure supplied from the gas supply means, the outer shape of the elastic thin film head may be changed during processing.
[0019]
The outer shape of the elastic thin film head may be changed during processing by controlling the distance between the two disk members by the adjusting means.
[0020]
By controlling the gas pressure supplied to the elastic thin film head and / or the distance between the two disk members, the outer shape of the elastic thin film head may be changed according to the local shape of the workpiece.
[0021]
[Action]
According to the above polishing tool, for example, by adjusting the interval between the disc members at both ends while keeping the internal pressure of the elastic thin film head constant, the size of the processing area of the nip portion can be processed without changing the tool rigidity. Since it can be enlarged or reduced in real time during processing according to the local radius of curvature of the object, a free-form surface such as an aspherical lens can be processed uniformly and efficiently with high accuracy.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described with reference to the drawings.
[0023]
FIG. 1 shows a polishing apparatus according to an embodiment, in which first and second holding members, which are a pair of mutually opposing disk members, respectively hold both ends of an elastic thin film head portion 1 formed of a cylindrical thin film. It has an elastic tool main body sealed and held by the plates 2 and 3, and the holding plate 2 is fixed to the tip of the rotating shaft 11 by a screw member 4 as a coupling means, and the rotating shaft 11 is held by the housing 12. The rotating tool 11 is rotatably supported by a pair of bearings 13 and 14, the rear end of the rotating shaft 11 is connected to a motor 16 by a coupling 15, and the elastic tool body immersed in a polishing liquid containing abrasive grains is rotated at high speed.
[0024]
The rotating shaft 11 is, for example, a tool main shaft having an outer diameter of φ30 mm connected to the motor shaft of the motor 16 via the coupling 15.
[0025]
The rotary shaft 11 is provided with a gas supply flow path 11a for conducting gas from the tip to the inside of the elastic thin film head 1 up to the position of 2/3 of the total length. An elliptical through hole 11b connecting the gas supply channel 11a and the outer surface is provided at the end of the road.
[0026]
On the outer surface of the rotating shaft 11, a seal member 17 having an inner diameter capable of securing a clearance of, for example, 5 μm for forming a labyrinth seal structure is provided. A gas supply line 18 is connected as a gas supply means for supplying a controllable gas pressure through the gas supply line.
[0027]
The seal member 17 is fixedly held by a housing 12 that holds both bearings 13 and 14 that hold the rotating shaft 11. The housing 12 is a processing lens W 1 that is a processing object held by a jig 20. Is connected to the tilting unit 21 so that the relative angle can be set arbitrarily. The tilting unit 21 is suspended from the moving stage 23 via the voice coil 22, supports the polishing head units below the tilting unit 21 in the vertical direction, and has a function of canceling the own weight of the polishing head unit. ing.
[0028]
Further, during processing, a dynamic pressure is generated between the elastic thin film head portion 1 and the polishing liquid by rotation of the elastic thin film head portion 1, but the voice coil 22 applies a load against the dynamic pressure. Further, the moving stage 23 that suspends the voice coil 22 moves along the guide 24, and can move and swing the entire polishing head unit back and forth, right and left.
[0029]
The gas supplied from the gas supply line 18 is dry air, passes through an opening (not shown) provided in the seal member 17, and passes through a gas supply passage 11 a in the rotation shaft 11 from a through hole 11 b provided in the rotation shaft 11. Thus, gas pressure is supplied to the internal space of the elastic tool main body composed of the two holding plates 2 and 3 and the elastic thin film head 1.
[0030]
The elastic thin-film head 1 is, for example, a rubber film having a thickness of 2 mm, and is sandwiched between the holding plates 2 and 3. The two holding plates 2 and 3 are fixed in the rotation direction by three regulating keys 5a, 5b and 5c inside the elastic thin film head 1 so as not to shift in the rotation direction. The elastic thin film head 1 expands into an outer shape having a desired curvature by applying an internal pressure of, for example, 0.3 MPa by the gas pressure supplied from the gas supply channel 11 a conducted inside the rotating shaft 11. Will be maintained.
[0031]
The first holding plate 2 is fixed in the thrust direction of the rotating shaft 11 by a screw member 4, and the second holding plate 3 is slidable on the rotating shaft 11 in the thrust direction. An O-ring is provided at a sliding portion between the holding plate 3 and the rotating shaft 11 to seal air supplied to a space formed by the holding plates 2 and 3 and the elastic thin film head 1. It has a structure to do.
[0032]
Further, a thrust bearing 19a is fixed to the second holding plate 3. The thrust bearing 19a is in contact with the end face of the cylinder head of the hydraulic cylinder 19, which is an adjusting means having a through hole of, for example, φ35 at the center so as not to contact the rotating shaft 11. The outer periphery of the hydraulic cylinder 19 is fixedly held to the housing 12, and oil lines 19 b and 19 c for supplying and discharging hydraulic oil pass through the housing 12 to the outside on the side surface of the hydraulic cylinder 19. From here, connection to a pressure source (not shown) is made. The second holding plate 3 is moved by the hydraulic cylinder 19 so as to expand and contract the space between the second holding plate 3 and the first holding plate 2.
[0033]
The standard setting interval between the first holding plate 2 and the second holding plate 3 is set to, for example, 20 mm, and the operating stroke of the second holding plate 3 is secured so as to be widened to a maximum of 40 mm.
[0034]
FIG. 2A shows a state of machining by the polishing tool when the interval between the holding plates 2 and 3 is set to 20 mm and the internal pressure which is the gas pressure in the elastic thin film head 1 is applied to 0.3 MPa. At this time, the radius of curvature of the elastic thin film head 1 is 30 mm. Polishing around the elastic thin-film head portion 1, the rotary shaft 11 on the working surface of the workpiece lens W 1 with the polishing liquid approaches while rotating at 900 rpm, by around brought elastic thin-film head portion 1 in the nip flow occurs in the liquid, the fluid pressure is generated between the elastic thin-film head portion 1 of the workpiece lens W 1. This fluid pressure is balanced with the normal force generated on the surface to be processed by the voice coil 22 for applying a constant load to the housing 12 shown in FIG. 1, so that a gap of about 1 μm is formed in the nip portion. ing.
[0035]
At this time, due to the fluid pressure generated in the gap and the pressing force of the voice coil 22, a portion corresponding to the surface to be processed of the elastic thin film portion 1 to which the internal pressure of 0.3 MPa is applied is elastically deformed, and a nip along the surface to be processed is formed. In the portion, a processing region in which the pressure increases exponentially as compared with the surroundings is formed. This is an elliptical processing region having a length also in the depth direction perpendicular to the cross section shown in FIG. This processing area can be arbitrarily changed even during the rotation of the tool by controlling the internal pressure of the elastic thin film head unit 1 or moving the second holding plate 3 by driving the hydraulic cylinder 19.
[0036]
FIG. 2B shows the change in the processing area when the internal pressure is kept constant and the interval between the two holding plates 2 and 3 is enlarged to 30 mm. As described above, by increasing the distance between the holding plates 2 and 3, the external curvature of the elastic thin film head 1 is increased and the elastic thin film head 1 is flattened. That is, the processing region corresponding to the surface to be processed can be made wider than in the case of FIG.
[0037]
For a workpiece such as an optical component whose curvature radius changes depending on the position, such as an aspherical lens, use a polishing tool capable of freely reducing or increasing the curvature of the elastic thin film head 1 as described above. Then, in places where the curvature of the surface to be processed is large, the interval between the holding plates 2 and 3 of the elastic thin film head portion 1 is increased to set a large curvature, thereby increasing the acceleration speed to increase the processing efficiency and increasing the processing efficiency. In a place where the curvature is small, the curvature of the elastic thin film head portion 1 can be set small, so that the machining area for supplying abrasive grains in accordance with the local radius of curvature of the workpiece is utilized to the utmost. By keeping the supply amount of the abrasive grains uniform in the above, it is possible to finish the final surface roughness with high accuracy and uniformity, and efficiently.
[0038]
FIGS. 3A, 3B and 3C show the case where the distance between the holding plates 2 and 3 is changed to 10 mm, 20 mm and 30 mm, respectively, with the internal pressure kept constant at 0.3 MPa. FIG. 3 is a diagram illustrating a change in curvature of an elastic thin film head unit 1. When the distance between the holding plates 2 and 3 is set to 10 mm, which is smaller than the standard value of 20 mm, the curvature of the elastic thin film head 1 becomes smaller than that of the case of 20 mm, and the fluid pressure generation area on the surface to be processed becomes narrower. Therefore, the processing area is also reduced. Conversely, when the distance between the holding plates 2 and 3 is widened to 30 mm, the curvature of the elastic thin film head 1 becomes larger than when the distance is 20 mm, and the fluid pressure generation region on the surface to be processed is widened and the processing region is also large. Expanding.
[0039]
FIGS. 4A, 4B, and 4C show machining states at the holding plate intervals shown in FIGS. 3A, 3B, and 3C, respectively, as viewed from the tip of the head. . When the elastic thin film head 1 rotates in the direction indicated by the arrow R due to the rotation of the rotating shaft 11, arrows A 1 , B 1 , A 2 , B 2 , and A 3 are provided between the elastic thin film head 1 and the surface to be processed. , fluid flow indicated by B 3 is produced. As the distance between the holding plates 2 and 3 increases to 10 mm, 20 mm, and 30 mm, the nip portion between the surface to be processed and the elastic thin film head portion 1 becomes longer, and the processing region becomes wider.
[0040]
Further, a gas pressure from the outside of the apparatus is supplied to the elastic thin film head unit 1 through a gas supply line 18, and the space between the elastic thin film head unit 1 and the rotating shaft 11 is sealed by a labyrinth seal structure. Since it is possible to adjust the gas pressure inside the elastic thin film head unit 1 during processing by the tool, by adjusting the magnitude of the external curvature of the polishing tool being processed by increasing or decreasing the gas pressure, an aspheric lens or the like can be adjusted. Even in the polishing of optical components whose radius of curvature changes locally, the tool diameter can be freely controlled to suit the local shape, and the processing area can be used as efficiently as possible. Can be improved. The roundness of the outer shape after the expansion is guaranteed by the balance between the internal pressure of the elastic thin film head 1 and the centrifugal force and the elastic film rigidity.
[0041]
For example, as shown in FIG. 5, when the interval between the holding plates 2 and 3 is maintained at 20 mm and the internal pressure of the elastic thin film head 1 is changed to 0.1 MPa, 0.3 MPa, and 0.5 MPa, (FIG. As shown in (a), (b), and (c), the amount of expansion of the elastic thin film head portion 1 changes, and the processing area becomes smaller as the internal pressure increases.
[0042]
According to the present embodiment, by providing a gas supply flow path on the rotating shaft holding the elastic thin film head and sealing it with a labyrinth seal structure, the internal pressure of the elastic thin film head is controlled during processing, and the elastic thin film The curvature and tool rigidity of the head can be controlled in real time.
[0043]
In addition, by simultaneously controlling the internal pressure of the elastic thin film head and the spacing between the holding plates, the external shape and tool rigidity of the elastic thin film head are changed, and the fluid pressure generated at the nip with the work (workpiece) and the machining The size of the region can be freely controlled even during polishing.
[0044]
As a result, even in the polishing process of aspherical surface that changes depending on the place, it is possible to process with the optimal nip shape by the tool shape adapted to the local radius of curvature, and to achieve the uniform and high precision finish roughness while improving the processing efficiency It becomes possible.
[0045]
【The invention's effect】
Since the present invention is configured as described above, the following effects can be obtained.
[0046]
By providing a space covered with an elastic thin film between a pair of holding plates constituting the head portion of the polishing tool and supplying dry air or the like from outside to have rigidity, the curvature of the elastic thin film head portion during processing and By controlling the rigidity in real time, it is possible to freely control a processing area generated in a portion facing a workpiece such as a lens. As a result, it is possible to perform machining with an optimum nip shape adapted to the local radius of curvature of the aspheric surface that varies depending on the location, and it is possible to improve the removal efficiency and realize uniform finish roughness.
[0047]
Further, by simultaneously controlling the internal pressure and the holding plate interval, the outer shape of the elastic thin film head and the rigidity due to the internal pressure, that is, the shape of the nip portion and the tool rigidity can be arbitrarily controlled. Thereby, the removal efficiency and finishing accuracy of the polishing process can be further improved.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view showing a polishing apparatus according to an embodiment.
FIG. 2 is a diagram illustrating a change in a processing area when a holding plate interval is adjusted.
FIG. 3 is a diagram showing a specific example in a case where a holding plate interval is adjusted in three stages.
FIG. 4 is an elevational view of the specific example of FIG. 3 viewed from another direction.
FIG. 5 is a diagram illustrating a specific example in which the holding plate interval is kept constant and only the internal pressure is changed in three stages.
FIG. 6 is a schematic sectional view showing a conventional example.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Elastic thin film head part 2, 3 Holding plate 5a, 5b, 5c Restriction key 11 Rotation shaft 11a Gas supply channel 12 Housing 13, 14 Bearing 16 Motor 17 Seal member 19 Hydraulic cylinder 20 Jig 21 Tilting unit 22 Voice coil 23 Moving stage 24 Guide

Claims (11)

  1. A pair of disk members facing each other, a cylindrical elastic thin-film head portion whose both ends are sealed and held by the pair of disk members, and coupling means for coupling the pair of disk members to a tool spindle rotated by a motor. The elastic thin film head section maintains a predetermined outer shape by a controllable gas pressure supplied from a gas supply means through a gas supply flow path provided on the tool main shaft, and is provided with a workpiece. A polishing tool characterized by forming a nip portion for performing a non-contact polishing process by flowing a polishing liquid containing polishing abrasive grains therebetween.
  2. 2. The polishing tool according to claim 1, further comprising an adjusting means for changing a distance between the two disk members.
  3. 3. The polishing tool according to claim 2, wherein the adjusting means has a hydraulic cylinder for moving one disk member toward and away from the other disk member.
  4. A tool spindle having a gas supply channel extending in the axial direction, a motor for rotating and driving the tool spindle, and a pair of disk members facing each other on the tool spindle and both ends sealed and held by the pair of disk members An elastic tool main body having a cylindrical elastic thin film head, coupling means for coupling the elastic tool main body to the tool spindle, and the elastic tool main body via the gas supply flow path of the tool spindle. Gas supply means for supplying a controllable gas pressure to the elastic thin film head portion, the elastic thin film head portion maintains a predetermined outer shape by the gas pressure supplied through the gas supply flow path, A polishing apparatus, wherein a nip portion for performing a non-contact polishing process is formed by flowing a polishing liquid containing polishing grains between the workpiece and a workpiece.
  5. 5. The polishing apparatus according to claim 4, further comprising adjusting means for changing a distance between the two disk members.
  6. The polishing apparatus according to claim 5, wherein the adjusting means has a hydraulic cylinder for moving one disk member toward and away from the other.
  7. The polishing apparatus according to any one of claims 4 to 6, wherein a labyrinth seal structure for preventing leakage of gas pressure supplied to the gas supply flow path is provided on the tool spindle.
  8. An elastic tool main body having a cylindrical elastic thin film head portion whose both ends are sealed and held by a pair of disk members opposed to each other is rotated by a tool spindle, and polishing liquid generated in a nip portion between the elastic tool main body and a workpiece. A polishing method for performing non-contact polishing by a liquid flow, wherein the elastic thin film is controlled by a controllable gas pressure supplied from a gas supply unit to the elastic thin film head portion through a gas supply passage provided on the tool spindle. A polishing method comprising maintaining a head portion in a predetermined outer shape.
  9. 9. The polishing method according to claim 8, wherein the outer shape of the elastic thin film head portion is changed during processing by controlling a gas pressure supplied from a gas supply unit.
  10. 9. The polishing method according to claim 8, wherein the outer shape of the elastic thin film head is changed during processing by controlling the distance between the two disk members by adjusting means.
  11. The external shape of the elastic thin film head portion is changed according to the local shape of the workpiece by controlling the gas pressure supplied to the elastic thin film head portion and / or the interval between the two disk members. Item 10. The polishing method according to Item 8.
JP2002267549A 2002-09-13 2002-09-13 Polishing tool, polishing device, and polishing precess Pending JP2004098267A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102922389A (en) * 2012-11-16 2013-02-13 厦门大学 Polishing device and polishing method of aspheric optical element
CN103056744A (en) * 2012-12-18 2013-04-24 中国人民解放军国防科学技术大学 Polishing device with two swing shafts for high-gradient aspheric optical parts
CN105563271A (en) * 2015-12-21 2016-05-11 中国科学院长春光学精密机械与物理研究所 Tool wheels used for elastic emission machining

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102922389A (en) * 2012-11-16 2013-02-13 厦门大学 Polishing device and polishing method of aspheric optical element
CN103056744A (en) * 2012-12-18 2013-04-24 中国人民解放军国防科学技术大学 Polishing device with two swing shafts for high-gradient aspheric optical parts
CN105563271A (en) * 2015-12-21 2016-05-11 中国科学院长春光学精密机械与物理研究所 Tool wheels used for elastic emission machining

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