JP2004358591A - Polishing tool and polishing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing tool and a polishing method for uniformly and rapidly polishing a free curved surface such as a nonaxisymmetric aspheric surface while suppressing the occurrence of polishing unevenness. <P>SOLUTION: Polishing is performed using the polishing tool 1 having: a mounting rotary shaft body 4 coaxially mountable to a polishing tool rotating shaft 107 of a polishing device 100; an elastic polishing body 2 composed of an elastic material expanded in dome shape or formed in dome shape; and a supporting tool 3 freely rotatable around the mounting rotary shaft body 4 and supporting the elastic polishing body 2. It is preferable that the rotational center C1 of the mounting rotary shaft body 4 and the rotational center C2 of the supporting tool 4 have eccentricity δ. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a polishing tool and a polishing method capable of rapidly polishing a free-form surface such as a non-axisymmetric aspheric surface to a mirror surface while suppressing polishing unevenness.
[0002]
[Prior art]
NC control cutting technology has advanced, and it has become possible to form non-axisymmetric aspheric surfaces such as lenses by cutting. In optical products, it is necessary to polish the created cut surface to a desired smooth optical mirror surface. In recent years, the performance of lenses has been improved, and the requirements for shape accuracy and surface accuracy for mirror polishing have become strict.
[0003]
Conventionally, a polishing method for a non-axisymmetric aspheric surface using a polishing apparatus 100 as shown in FIG. 3 is known. This polishing method uses a polishing head 101 made of a small spherical elastic polishing body that comes into contact with a part of a surface 111 to be polished of a work 110. The maximum curvature is determined from the shape of the surface to be polished, a polishing head 101 having a curvature larger than the maximum curvature is selected, and the polishing head 101 is rotated while the polishing head 101 is rotated. The entire surface to be polished 111 is polished by scanning the entire surface while controlling in the normal direction of the polished surface 111.
[0004]
However, in this partial polishing method, since the entire surface to be polished is polished by a small polishing head, there is a problem that a long polishing time is required and the manufacturing cost is high.
[0005]
As shown in Patent Document 1, a hollow dome-shaped polishing tool made of a rubber-like elastic material is used for mirror polishing of a non-axisymmetric aspheric surface. In the polishing method, a polishing pad is attached to the surface of the polishing tool, compressed air is introduced into the polishing tool to give tension to the dome portion, and a slurry-type abrasive is supplied to the polishing tool and the object to be polished. These are rubbed together with each other while rotating them together to perform mirror polishing.
[0006]
As shown in FIG. 4, the polishing tool 200 having the dome-shaped elastic polishing body 2 made of an elastic material is replaced with the spherical polishing head 101 of the polishing apparatus 100 described above, and both the polishing tool 200 and the work 110 are replaced. By pressing the polishing tool 200 against the surface 111 to be polished while rotating, the contact area of the polishing tool 200 is larger than when the spherical polishing head 101 is used. It became possible.
[0007]
[Patent Document 1]
JP-A-11-77503
[Problems to be solved by the invention]
However, in polishing using the polishing tool 200 having the hollow dome-shaped elastic polishing body 2 made of an elastic material, there is a problem that polishing unevenness occurs depending on the shape of the surface to be polished 111. In order to eliminate the generated polishing unevenness, the polishing tool 200 in which the internal pressure of the hollow dome has been reduced must be re-polished over a long period of time, resulting in a decrease in productivity.
[0009]
The present invention has been made in view of the above circumstances, and provides a polishing tool capable of uniformly and quickly polishing a free-form surface such as a non-axisymmetric aspheric surface while suppressing the occurrence of polishing unevenness. Aim.
[0010]
Another object of the present invention is to provide a polishing method capable of uniformly and quickly polishing a free-form surface such as a non-axisymmetric aspheric surface while suppressing the occurrence of uneven polishing.
[0011]
[Means for Solving the Problems]
The present inventor, in order to achieve the above object, as a result of intensive studies, conventionally, the polishing tool was forced to rotate while being pressed against the surface to be polished of the work, and the cause of polishing unevenness. I knew that it had become. Based on the knowledge, the mounting part that is mounted coaxially with the polishing tool rotation axis that rotates the polishing tool of the polishing device is separated from the support jig that supports the elastic polishing body to form a mounting rotary shaft, and the support jig is mounted on the mounting rotary shaft. Tried to rotate freely around the body. As a result, when the work is rotated and the elastic polishing body is pressed against the surface to be polished of the work and polished, when the surface to be polished and the elastic polishing body are in partial strong contact, the support for supporting the elastic polishing body is provided. Since the jig rotates with the surface to be polished and escapes, it is possible to prevent the elastic polishing body from forcibly rubbing the surface to be polished. Thereby, compared with the case where the elastic polishing body is forcibly rotated, partial excessive polishing can be prevented, and the occurrence of polishing unevenness can be suppressed, and uniform polishing can be performed. Moreover, since the contact area of the elastic dome of the polishing tool is large, the polishing efficiency is good and the polishing can be performed quickly.
[0012]
By displacing the center of rotation of the supporting jig around the rotating shaft and the center of rotation of the rotating shaft to be eccentric, the rotating center where the peripheral speed is zero and polishing is not possible always moves, and the polishing efficiency is remarkable. Can be improved.
[0013]
When the elastic polishing body for polishing the surface to be polished is formed of an elastic sheet that expands in a dome shape or is formed in a dome shape, a range of polishing conditions such as the internal pressure of the elastic polishing body and the hardness of the elastic sheet increases. Appropriate polishing can be performed.
[0014]
In order to keep the internal pressure of the dome-shaped elastic polishing body constant, it is preferable to form a sealed space inside the dome-shaped elastic polishing body and provide a check valve for keeping the pressure in the sealed space constant.
[0015]
By swinging one of the polishing tool and the workpiece during polishing, the entire surface to be polished can be uniformly polished.
[0016]
Therefore, the invention according to claim 1 is an elastic polishing body composed of a mounting rotary shaft body that can be mounted on a polishing tool rotary shaft of a polishing apparatus, and an elastic material that expands in a dome shape or is formed in a dome shape. And a support jig that is freely rotatable around the mounting rotary shaft and supports the elastic polishing body.
[0017]
According to a second aspect of the present invention, there is provided the polishing tool according to the first aspect, wherein a rotation center of the mounting rotary shaft and a rotation center of the support jig are eccentric.
[0018]
A third aspect of the present invention is the polishing tool according to the first or second aspect, wherein the elastic polishing body is formed of an elastic sheet, and the support jig and the elastic polishing body form a sealed space. To provide a polishing tool.
[0019]
According to a fourth aspect of the present invention, in the polishing tool according to the third aspect, a check valve connected to the sealed space, for introducing a pressurized fluid into the sealed space and maintaining the sealed state is provided on the support jig. An abrasive tool is provided that is mounted.
[0020]
According to a fifth aspect of the present invention, there is provided a mounting rotary shaft body that can be mounted on a polishing tool rotary shaft of a polishing apparatus, and an elastic polishing body formed of an elastic material that expands in a dome shape or is formed in a dome shape, The mounting rotary shaft of the polishing tool having a support jig that can freely rotate around the mounting rotary shaft and supports the elastic polishing body around a rotation center that is eccentric to the rotation center of the mounting rotary shaft. A polishing method characterized in that polishing is performed while applying the elastic polishing body to a surface to be polished of a rotating work while being rotated.
[0021]
According to a sixth aspect of the present invention, there is provided the polishing method according to the fifth aspect, wherein the polishing is performed while swinging the polishing tool or the work.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of a polishing tool and a polishing method of the present invention will be described, but the present invention is not limited to the following embodiments.
[0023]
FIG. 1 is a sectional view showing one embodiment of the polishing tool of the present invention. This polishing tool 1 includes an eccentric cam follower 5 including an elastic polishing body 2, a support jig 3 for supporting the elastic polishing body 2, a mounting rotary shaft 4 for rotatably holding the support jig 3, and a check valve 6. Have.
[0024]
The elastic polishing body 2 is made of an elastic sheet and has a flat circular sheet shape or a hollow dome shape having a dome-shaped portion 22 provided with a ring-shaped flange portion 21 on the outer periphery as shown in FIG. It is formed in the shape of.
[0025]
The support jig 3 is made of metal such as stainless steel, and includes a disk-shaped support jig body 31 and a ring-shaped pressing member 32 separate from the support jig body 31. The holding member 32 is fixed to the outer peripheral surface of the lower surface of the support jig body 31 by a crimping jig (not shown).
[0026]
The outer peripheral portion or the flange portion 21 of the elastic polishing body 2 is pressed between the outer peripheral surface of the lower surface of the support jig main body 31 and the ring-shaped pressing member 32 like a packing so as to be attached to the support jig main body 31. I have. Thereby, the outer peripheral portion or the flange portion 21 of the elastic polishing body 2 is pressed against the lower surface of the support jig main body 31 so that the space between the elastic polishing body 2 and the support jig main body 31 can form the sealed space 7. Has become.
[0027]
Further, a check valve 6 that penetrates the support jig body 31 and introduces a pressure fluid into the sealed space 7 is provided. The check valve 6 has a function of keeping the pressure of the pressurized fluid in the sealed space 7 constant. By introducing the pressurized fluid into the sealed space 7, the flat sheet-like elastic polishing body 2 can be expanded and formed into a dome shape. In addition, tension can be applied to the elastic polishing body 2 formed in a dome shape by an internal pressure to maintain the dome shape. The shape, such as the curvature, of the hollow elastic polishing body 2 formed of the elastic sheet can be changed to some extent by the pressure of the pressure fluid.
[0028]
The elastic polishing body 2 of such a polishing tool 1 is constituted by the elastic sheet shown in FIG. 1 and is formed by forming an elastic material into a dome-shaped block other than the one that retains the dome shape by the internal pressure of the pressure fluid. Or a dome-shaped elastic sheet whose hollow portion is filled with another elastic material. The thickness of the elastic sheet is preferably 0.1 to 10 mm, particularly preferably 0.2 to 5 mm, JIS A hardness (type A durometer) 10 to 100, Young's modulus 10 ² to 10 ³ N · cm ⁻² , heat resistance temperature Preferably have physical properties of 100 ° C. or higher. The elastic sheet or elastic material is made of natural rubber, chloroprene rubber, styrene-butadiene rubber (SBR), acrylonitrile-butadiene rubber (NBR), rubber such as silicone rubber, fluorine rubber, thermoplastic resin such as polyethylene, nylon, or styrene. And urethane-based thermoplastic resin elastomers.
[0029]
The mounting rotary shaft 4 is formed of, for example, a stud of an eccentric cam follower 5. The eccentric cam follower 5 is a rolling bearing in which a needle-shaped roller 51, a retainer (not shown), a side plate 52, and a thick outer ring 53 are incorporated in a threaded stud (mounting rotary shaft) 4. This is a structure in which the rotation center C2 of the meat outer ring 53 is eccentric. The mounting rotary shaft (stud with screw) 4 has a cylindrical or cylindrical shape, and has a mounting portion 41 formed with a screw or the like that can be mounted on a polishing tool rotary shaft for rotating a polishing tool of a polishing device at a base end portion. A flange portion 42 is formed at the front end to prevent slipping, and a short-axis cylindrical cam 43 having a rotation center C2 eccentric to the rotation center C1 of the mounting portion 41 is provided between the flange portion 42 and the mounting portion 41. Make up. A needle roller 51 is arranged around the cam 43, and the needle roller 51 is held by a retainer (not shown), and an outer ring 53 is rotatably held on the outer surface of the needle roller 51. The sides of the needle rollers 51 are sealed by side plates 52. Therefore, the outer ring 53 is rotatably held around the cam 43 of the mounting rotary shaft 4 via the needle roller 51. The outer ring 53 is coaxially fixed to the support jig main body 31 with bolts 54.
[0030]
The mounting rotary shaft 4 of the polishing tool 1 is separated from the support jig 3, and the support jig 3 does not rotate even if the mounting rotary shaft 4 rotates. The support jig 3 is freely rotatable around the mounting rotary shaft 4. The center of rotation C1 of the mounting rotary shaft 4 and the center of rotation C2 of the support jig 3 are deviated from each other, and have an eccentricity δ. Accordingly, the rotation of the mounting rotary shaft 4 causes the support jig 3 to slightly change its position by the amount of eccentricity δ, thereby causing minute vibration.
[0031]
The amount of eccentricity δ is determined by the specifications of the eccentric cam follower 5 and can be generally selected from the range of 0.3 mm to 1.6 mm. If the amount of eccentricity is too large, vibration occurs, so that about 1 mm is appropriate. By eccentricity, the center of rotation at which the peripheral speed is zero and which cannot be polished is constantly moved, and the polishing efficiency can be significantly improved.
[0032]
Since the polishing tool 1 cannot forcibly rotate the elastic polishing body 2, the polishing apparatus using the polishing tool 1 needs to include a mechanism for rotating the work and a mechanism for rotating the mounting rotary shaft. is there. Any polishing apparatus can be used as long as these mechanisms are provided.
[0033]
For example, a polishing apparatus as shown in FIG. 3 may be used. The polishing apparatus 100 performs polishing by controlling the polishing axis in a normal direction with respect to the processing surface 111 by four-axis NC control. As the polishing head 101, for example, a polishing head with a polishing pad attached to the surface of a spherical elastic body is used. The polishing apparatus 100 includes an X-axis table 102 for controlling a horizontal position of a work 110, a tilt table 103 for controlling an inclination of the work 110, and a Z-axis for controlling a vertical position of a polishing head 101. Polishing is performed on four axes of a lifting table 104 and a rotary table 105 that controls the rotation position of the work 110. The polishing head 101 grinds the surface to be polished while being pressed by the pressure control of the air cylinder 106 against the workpiece 110 with a predetermined load while rotating with the rotation of the polishing tool rotating shaft 107.
[0034]
As shown in FIG. 2, for example, the polishing head 101 of the polishing apparatus 100 can be used by replacing it with the polishing tool 1 of the present invention. The polishing tool rotating shaft 107 of the polishing tool 1 is arranged vertically downward, and the mounting rotary shaft body 4 of the polishing tool 1 in which the sealed space 7 is adjusted to a predetermined internal pressure is mounted coaxially on the polishing tool rotating shaft 107. 1 can be mounted.
[0035]
The work 110 is mounted by joining a surface opposite to the surface to be polished 111 to a processing jig 120 for mounting on a rotary table 105 of a polishing apparatus via a bonding material 121 such as wax, and rotating the processing jig 120. It can be fixed to the table 105 with bolts or the like.
[0036]
The NC control of the polishing apparatus 100 controls the horizontal position of the X-axis table 102 while controlling the tilt of the tilt table 103 while rotating the rotary table 105 at a predetermined number of revolutions. The vertical position of the tool 1 is controlled, and while the polishing tool rotating shaft 107 is rotated at a predetermined rotation speed, the polishing tool is pressed against the work 110 with a predetermined load by the pressure control of the air cylinder 106. It can be supplied to the surface to be polished 111 to perform polishing.
[0037]
When the polishing tool 1 is used in such a polishing apparatus 100, the work 110 is rotated at a predetermined number of rotations to control the position in the horizontal direction and the inclination from the vertical direction, so that the eccentric amount δ Polishing can be performed by pressing the polishing tool 1 against the work 110 while only slightly vibrating.
[0038]
Since the workpiece 110 is polished while rotating, the polishing tool 1 can be controlled in the normal direction of the polished surface 111 when the polished surface 111 is a spherical surface or an axisymmetric aspheric surface. In the case of a non-axisymmetric aspherical surface, strictly normal control cannot be performed, but control close to normal control can be performed.
[0039]
Further, the work 110 is simply swung while rotating the work 110, and the horizontal position of the work 110 and the position of the polishing tool 1 are adjusted so that the top surface of the surface to be polished 111 is near the center of the elastic polishing body 2. The polishing apparatus 100 may be controlled so as to adjust the position in the vertical direction. By imparting a swinging motion to the work 110, even the lens 110 having the polished surface 111 having a large curvature as shown in FIG. 2 can uniformly polish the entire polished surface 111.
[0040]
In this case, the internal pressure applied to the elastic polishing body 2 is, for example, 0.2 to 1.2 kgf / cm ² , the rotation speed of the mounting rotary shaft 4 is, for example, 10 to 200 rpm / min, and the rotation speed of the work 110 is, for example, 10 The polishing can be performed under the polishing conditions of, for example, 1 to 8 kgf at a polishing pressure of 1 to 8 kgf.
[0041]
Since the elastic polishing body 2 of the polishing tool 1 rotates freely, when the elastic polishing body 2 comes into strong contact with a part of the surface to be polished 111, the part that strongly hits the part to be rubbed as it is during forced rotation is strongly polished. In contrast to the occurrence of polishing unevenness, the elastic polishing body 2 rotates together with the surface to be polished 111 by free rotation, and it is possible to prevent the elastic polishing body 2 from forcibly rubbing. As a result, the occurrence of polishing unevenness is significantly suppressed as compared with the case where the elastic polishing body is forcibly rotated.
[0042]
Further, in the above polishing method, the contact area of the elastic polishing body 2 is extremely large as compared with the case where the spherical polishing head 101 is used, so that the polishing rate is extremely high. In addition, since the elastic polishing body 2 slightly vibrates by the amount of eccentricity δ with the rotation of the mounting rotary shaft body 4, polishing is performed while constantly changing the position of the rotation center of the elastic polishing body 2, which is inferior in polishing efficiency. It is.
[0043]
As a result, in the polishing method using the polishing tool 1 of the present invention, the polishing time is extremely short, and mirror polishing without polishing unevenness can be obtained with a polishing time of usually about 1 to 20 minutes.
[0044]
At the time of polishing, the elastic polishing body 2 may be in contact with a part of the polished surface 111 or may be in contact with the entire polished surface 111 depending on the shape of the polished surface 111.
[0045]
Further, a polishing pad may be attached to the surface of the elastic polishing body 2 and polished through the polishing pad, or may be polished directly by the elastic polishing body 2. Further, an abrasive may be adhered to the surface of the elastic abrasive body 2 for polishing.
[0046]
As the surface to be polished to be polished by the polishing tool 1 and the polishing method of the present invention, anything requiring mirror polishing is polished. For example, convex and concave surfaces of various lenses having curved surfaces such as spherical surfaces, axisymmetric aspheric surfaces, and non-axisymmetric aspheric surfaces, molds, optical products, etc. are applicable, and materials such as plastic, glass, carbide, and steel are limited. There is no.
[0047]
In the above description, the pressure in the sealed space is kept constant by using the check valve.However, by providing a passage through which the pressure fluid can be introduced at the center of the mounting rotary shaft, and communicating with the pressure fluid side, The inside of the sealed space may be maintained at a constant pressure.
[0048]
Further, in the above description, the work is described as swinging, but the polishing tool may be swinging. Furthermore, the description has been made such that the rotation center of the support jig and the rotation center of the mounting rotary shaft are eccentric. However, it is sufficient that the support jig and the mounting rotary shaft are separated from each other, and it is not always necessary to perform eccentricity. Absent.
[0049]
[Example]
The workpiece is made of a shot S-3 material, and the convex side of an optical glass lens having an outer diameter of 100 mmφ is precision ground by an ultraprecision grinder using a # 2000 resin bond grindstone, and the average surface roughness Ra is 0.068 μm. After processing the back surface into a flat surface with the same grindstone, an optical mirror surface (average surface roughness Ra: 0.003 μm) was used, and the convex surface was used as the surface to be polished.
[0050]
The flat surface on the back surface of the optical glass lens was bonded to the processing jig 120 using wax (electron wax) melted with a dryer.
[0051]
The polishing slurry was prepared using cerium oxide (cerox: average particle diameter: 1 μm) and a specific gravity of 1.07 ± 0.01 using pure water as a diluent.
[0052]
<Comparative example>
As shown in FIG. 4, a conventional polishing tool was used. In this polishing tool 200, a mounting portion 201 mounted on a polishing tool rotating shaft 107 of a polishing apparatus is fixed to a disk-shaped support jig main body 202. There is no difference in the structure for supporting the elastic polishing body 2 and the structure in which the check valve 6 is provided.
[0053]
The elastic abrasive body 2 used was an NBR rubber sheet having a thickness of 1 mm and a hardness of HS90 formed in a 120R dome shape. A cerium sheet polishing cloth having a thickness of 0.8 mm was stuck on the elastic polishing body.
[0054]
The polishing apparatus 100 controlled the reciprocating motion of the X-axis table 102, the swinging motion of the tilt table 103, the rotating motion of the rotary table 105, and the elevating motion of the Z-axis elevating mechanism 104. Since the mounting part 201 and the support jig body 202 are fixed, the rotation of the polishing tool rotation shaft 107 is directly connected to the rotation of the polishing tool 200, and the polishing tool 200 is given a forcible rotational motion to perform polishing.
[0055]
Polishing conditions were as follows: polishing tool rotation speed: 30 rpm, workpiece rotation speed: 60 rpm, polishing load: 3.5 kgf, polishing time: 5 min.
[0056]
The average value Ra of the convex surface roughness of the polished optical glass lens was 0.0161 μm. The polished surface was almost a mirror surface, but there was undulation far away from the designed shape in the range of the lens center from 10 mm to 40 mm, and when inspected by a mercury lamp, there was a ring-shaped shadow in the circumferential direction, and the shape from the center to the outer periphery Was discontinuous.
[0057]
<Example 1>
The lens polished in Comparative Example 1 was polished using the polishing tool 1 of the present invention shown in FIG. The amount of eccentricity δ of the polishing tool 1 is 1 mm.
[0058]
The elastic abrasive body 2 was the same as the comparative example, and used an NBR rubber sheet having a thickness of 1 mm and a hardness of HS90 formed in a 120R dome shape. A cerium sheet polishing cloth having a thickness of 0.8 mm was stuck on the elastic polishing body.
[0059]
The polishing method controls the reciprocating motion of the X-axis table 102, the swinging motion of the tilt table 103, the rotating motion of the rotary table 105, and the vertical motion of the Z-axis elevating mechanism 104, as in the comparative example. Polishing was performed by giving a rotating motion to the shaft body 4.
[0060]
Polishing conditions were as follows: the rotational speed of the mounted rotary shaft: 30 rpm, the rotational speed of the workpiece: 60 rpm, the polishing load: 3.5 kgf, and the polishing time: 3 min.
[0061]
The average value Ra of the surface roughness of the convex surface of the optical glass lens after polishing was 0.0033 μm. The ring-shaped shadow disappeared, and an optical mirror surface almost equivalent to the flat surface on the back surface was obtained.
[0062]
<Example 2>
The workpiece has a mean surface roughness Ra of 0 when the convex side of an optical glass lens having a material of shot S-3 and an outer diameter of 100 mmφ is precision ground by an ultra-precision grinder using a # 2000 resin bond grindstone. After processing into a 0.069 μm aspherical surface and processing the back surface into a flat surface with the same grindstone, an optical mirror surface (average surface roughness Ra: 0.003 μm) was used, and the convex surface was used as the surface to be polished.
[0063]
Using the same elastic polishing body as in Example 1, using the same NC polishing apparatus as in Example 1, and using the same polishing agent, polishing was performed under the same polishing conditions with a polishing time of 7 min. As a result, the average value Ra of the surface roughness of the convex surface of the optical glass lens after polishing was 0.0035 μm. The ring-shaped shadow disappeared, and an optical mirror surface almost equivalent to the flat surface on the back surface was obtained.
[0064]
【The invention's effect】
Since the polishing tool of the present invention is a free-rotating elastic polishing body, a free-form surface such as a non-axisymmetric aspheric surface can be uniformly and rapidly polished while suppressing the occurrence of polishing unevenness.
[0065]
Further, the polishing method of the present invention can uniformly and rapidly polish a free-form surface such as a non-axisymmetric aspheric surface while suppressing the occurrence of polishing unevenness.
[Brief description of the drawings]
FIG. 1 is a sectional view showing one embodiment of a polishing tool of the present invention.
FIG. 2 is a schematic configuration diagram illustrating a method of performing polishing by attaching the polishing tool of the present invention to an NC control polishing apparatus.
FIG. 3 is a schematic configuration diagram showing an NC-controlled polishing apparatus.
FIG. 4 is a schematic configuration diagram illustrating a method for performing polishing by attaching a conventional polishing tool to a polishing apparatus controlled by NC;
[Explanation of symbols]
1: polishing tool 2: elastic polishing body 21: flange portion 22: dome-shaped portion 3: support jig 31: support jig body 32: holding member 4: mounting rotary shaft 5: eccentric cam follower 51: needle-like roller 53: Outer ring 100: Polishing device 101: Polishing head 102: X-axis table 103: Tilt table 104: Z-axis elevating mechanism 105: Rotary table 107: Polishing tool rotary shaft 110: Work 111: Polished surface 120: Processing jig 130: Nozzle

Claims (6)

A mounting rotary shaft body that can be mounted on a polishing tool rotary shaft of a polishing apparatus, an elastic polishing body formed of an elastic material that expands in a dome shape or is formed in a dome shape, and is free to rotate around the mounting rotary shaft body. A polishing jig comprising: a rotatable support jig for supporting the elastic polishing body. The polishing tool according to claim 1,
A polishing tool, wherein a rotation center of the mounting rotary shaft and a rotation center of the support jig are eccentric. The polishing tool according to claim 1 or 2,
The polishing tool, wherein the elastic polishing body is formed of an elastic sheet, and the support jig and the elastic polishing body form a sealed space. The polishing tool according to claim 3,
A polishing tool, wherein a check valve connected to the sealed space, for introducing a pressurized fluid into the sealed space and maintaining the seal is attached to the support jig. A mounting rotary shaft body that can be mounted on a polishing tool rotary shaft of a polishing apparatus, an elastic polishing body formed of an elastic material that expands in a dome shape or is formed in a dome shape, and a rotation center of the mounting rotary shaft body And a support jig that is freely rotatable around the mounting rotary shaft body about a rotation center that is eccentric and supports the elastic polishing body. The workpiece rotating while rotating the mounting rotary shaft body of the polishing tool. Polishing while applying the elastic polishing body to the surface to be polished. The polishing method according to claim 5,
A polishing method, wherein the polishing is performed while swinging the polishing tool or the work.

Images