JP2004096107A5 - - Google Patents

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Publication number
JP2004096107A5
JP2004096107A5 JP2003287475A JP2003287475A JP2004096107A5 JP 2004096107 A5 JP2004096107 A5 JP 2004096107A5 JP 2003287475 A JP2003287475 A JP 2003287475A JP 2003287475 A JP2003287475 A JP 2003287475A JP 2004096107 A5 JP2004096107 A5 JP 2004096107A5
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JP
Japan
Prior art keywords
anisotropic conductive
wafer
inspection
inspected
conductive
Prior art date
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Granted
Application number
JP2003287475A
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English (en)
Japanese (ja)
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JP3685190B2 (ja
JP2004096107A (ja
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Priority to JP2003287475A priority Critical patent/JP3685190B2/ja
Priority claimed from JP2003287475A external-priority patent/JP3685190B2/ja
Publication of JP2004096107A publication Critical patent/JP2004096107A/ja
Publication of JP2004096107A5 publication Critical patent/JP2004096107A5/ja
Application granted granted Critical
Publication of JP3685190B2 publication Critical patent/JP3685190B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003287475A 2002-08-09 2003-08-06 異方導電性コネクターおよび導電性ペースト組成物、プローブ部材並びにウエハ検査装置およびウエハ検査方法 Expired - Fee Related JP3685190B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003287475A JP3685190B2 (ja) 2002-08-09 2003-08-06 異方導電性コネクターおよび導電性ペースト組成物、プローブ部材並びにウエハ検査装置およびウエハ検査方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002232204 2002-08-09
JP2003287475A JP3685190B2 (ja) 2002-08-09 2003-08-06 異方導電性コネクターおよび導電性ペースト組成物、プローブ部材並びにウエハ検査装置およびウエハ検査方法

Publications (3)

Publication Number Publication Date
JP2004096107A JP2004096107A (ja) 2004-03-25
JP2004096107A5 true JP2004096107A5 (enrdf_load_stackoverflow) 2005-06-30
JP3685190B2 JP3685190B2 (ja) 2005-08-17

Family

ID=32072344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003287475A Expired - Fee Related JP3685190B2 (ja) 2002-08-09 2003-08-06 異方導電性コネクターおよび導電性ペースト組成物、プローブ部材並びにウエハ検査装置およびウエハ検査方法

Country Status (1)

Country Link
JP (1) JP3685190B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101145886B1 (ko) * 2009-01-16 2012-05-15 주식회사 아이에스시 전기적 접속체 및 그 전기적 접속체를 포함한 테스트 소켓
JP6772448B2 (ja) * 2015-10-29 2020-10-21 住友ベークライト株式会社 導電性樹脂組成物、配線、配線基板および電子装置
KR102075669B1 (ko) * 2018-10-26 2020-02-10 오재숙 신호 전송 커넥터 및 그 제조방법

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