JP2004084040A5 - - Google Patents

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Publication number
JP2004084040A5
JP2004084040A5 JP2002249796A JP2002249796A JP2004084040A5 JP 2004084040 A5 JP2004084040 A5 JP 2004084040A5 JP 2002249796 A JP2002249796 A JP 2002249796A JP 2002249796 A JP2002249796 A JP 2002249796A JP 2004084040 A5 JP2004084040 A5 JP 2004084040A5
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JP
Japan
Prior art keywords
thin film
heating element
reaction chamber
manufacturing apparatus
film
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Granted
Application number
JP2002249796A
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English (en)
Japanese (ja)
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JP4054234B2 (ja
JP2004084040A (ja
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Priority to JP2002249796A priority Critical patent/JP4054234B2/ja
Priority claimed from JP2002249796A external-priority patent/JP4054234B2/ja
Publication of JP2004084040A publication Critical patent/JP2004084040A/ja
Publication of JP2004084040A5 publication Critical patent/JP2004084040A5/ja
Application granted granted Critical
Publication of JP4054234B2 publication Critical patent/JP4054234B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002249796A 2002-08-28 2002-08-28 薄膜デバイス用製造装置および薄膜デバイスの製造方法 Expired - Fee Related JP4054234B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002249796A JP4054234B2 (ja) 2002-08-28 2002-08-28 薄膜デバイス用製造装置および薄膜デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002249796A JP4054234B2 (ja) 2002-08-28 2002-08-28 薄膜デバイス用製造装置および薄膜デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2004084040A JP2004084040A (ja) 2004-03-18
JP2004084040A5 true JP2004084040A5 (https=) 2005-09-02
JP4054234B2 JP4054234B2 (ja) 2008-02-27

Family

ID=32056785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002249796A Expired - Fee Related JP4054234B2 (ja) 2002-08-28 2002-08-28 薄膜デバイス用製造装置および薄膜デバイスの製造方法

Country Status (1)

Country Link
JP (1) JP4054234B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016111101A (ja) * 2014-12-03 2016-06-20 株式会社ニューフレアテクノロジー 気相成長方法および気相成長装置
CN109860321A (zh) * 2019-03-08 2019-06-07 泸州金能移动能源科技有限公司 一种封装光伏组件用防错位防气泡装置及其使用方法

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