JP2004072815A - Micro power converter and its manufacturing method - Google Patents

Micro power converter and its manufacturing method Download PDF

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Publication number
JP2004072815A
JP2004072815A JP2002224578A JP2002224578A JP2004072815A JP 2004072815 A JP2004072815 A JP 2004072815A JP 2002224578 A JP2002224578 A JP 2002224578A JP 2002224578 A JP2002224578 A JP 2002224578A JP 2004072815 A JP2004072815 A JP 2004072815A
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conductor
power converter
substrate
thin
micro power
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JP3649214B2 (en
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Yoshitomo Hayashi
林　善智
Masaharu Edo
江戸　雅晴
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Fuji Electric Co Ltd
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Fuji Electric Holdings Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1517—Multilayer substrate
    • H01L2924/15192—Resurf arrangement of the internal vias
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro power converter which has a planar magnetic induction element being small in mounting area and capable of reducing power loss by enhancing power conversion efficiency, and to provide its manufacturing method. <P>SOLUTION: The first conductor 4 is made on the surface of a ferrite substrate 1, and the second conductor 5 is made on the rear. The first conductor 4 and the second conductor 5 are connected with each other by a connecting conductor 3 piercing the ferrite substrate 1, and the surfaces of the first conductor 4 and the second conductor 5 are covered with resist or an insulating protective film 8 so as to form the film inductor of a toroidal endless solenoid. The micro power converter is constituted of this film inductor, a semiconductor chip 11, and a stacked ceramic conductor array 15. By doing it into an endless solenoid, the inductance value can be made larger than that of a spiral film conductor, and the film inductor can be downsized. Moreover, since DC resistance can be made small, the improvement of the conversion efficiency of the power converter and the reduction of power loss can be achieved. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は，半導体基板に形成した半導体集積回路（以下ＩＣと記す）と、コイルやコンデンサ、抵抗などの受動部品で構成されるＤＣ−ＤＣコンバ−タなどの超小型電力変換装置に関する。
【０００２】
【従来の技術】
近年、電子情報機器、特に携帯型の各種電子情報機器の普及が著しい。それらの電子情報機器は、電池を電源とするものが多く、ＤＣ−ＤＣコンバータなどの電力変換装置を内蔵している。通常その電力変換装置は、スイッチング素子、整流素子、制御用ＩＣなどの能動素子とコイル、トランス、コンデンサ、抵抗などの受動素子の各個別部品をセラミック基板やプラスチック等のプリント基板などの上にハイブリッド型のモジュールとして、構成されている。
【０００３】
図２６は、ＤＣ−ＤＣコンバータの回路構成図である。図中の外枠の点線部分５０がＤＣ−ＤＣコンバータの回路である。
ＤＣ−ＤＣコンバータは、入力コンデンサＣｉ、出力コンデンサＣｏ、調整用の抵抗ＲＴ　、コンデンサＣＴ　、薄膜インダクタＬおよびマイクロ電源用ＩＣで構成される。直流の入力電圧Ｖｉを入力し、マイクロ電源用ＩＣのＭＯＳＦＥＴをスイッチングさせて、直流の所定の出力電圧Ｖｏを出力する。薄膜インダクタＬと出力コンデンサＣｏは直流電圧を出力するためのフィルタ回路である。
【０００４】
この回路において、薄膜インダクタＬの直流抵抗が大きくなると、この部分での電圧降下が大きくなり、出力電圧Ｖｏが低くなる。つまり、ＤＣ−ＤＣコンバータの変換効率は小さくなる。
【０００５】
【発明が解決しようとする課題】
携帯用を含めた各種電子情報機器の小型軽量化の要望に伴い、内蔵される電力変換装置の小型化の要求も強い。ハイブリッド型電源モジュールの小型化は、ＭＣＭ（マルチチップモジュール）技術や，積層セラミック部品等の技術により進歩してきている。しかしながら、個別の部品を同一基板上に，並べて実装するため、電源モジュールの実装面積の縮小化が制限されている。特にインダクタやトランス等の磁気誘導部品は、集積回路と比べると体積が非常に大きいために、電子機器の小型化を図る上で最大の制約となっている。
【０００６】
これら磁気誘導部品の小型化にたいする今後の方向としては、チップ部品として限りなく小さくし、面実装により電源全体を小さくする方向と、シリコン基板上に薄膜で形成する方向の二つが考えられる。近年、磁気誘導部品の小型化の要求に応えて、半導体技術の適用により、半導体基板上に薄型のマイクロ磁気素子（コイル、トランス）を搭載した例も報告されている。発明者も特願２０００−０８０６５号公報において、そのような平面型磁気誘導部品を考案した。これは、スイッチング素子や制御回路等の半導体装置を作り込んだ半導体基板の表面上に、薄膜コイルを磁性薄膜とフェライト薄板とで挟んだ形の平面型磁気誘導素子（薄膜インダクタ）を薄膜技術により形成したものである。これにより、磁気誘導素子の薄型化とその実装面積の削減が可能となった。
【０００７】
しかしなお、個別チップ部品数が多いことや、また実装面積が大きいという問題があった。
これを解決するために、発明者は特願２００１−０２１４５３号公報の図１で開示された超小型電力変換装置を考案した。この超小型電力変換装置に用いられている平面型磁気誘導素子は、渦巻き状（蚊取り線香状）のコイル導体の隙間に磁性を帯びた微粒子を混入した樹脂を充填し、上面、下面をフェライト薄板で挟んで形成される。
【０００８】
しかし、この方法では、コイル導体のインダクタンスは渦巻きの回数にほぼ比例するため、大きなインダクタンスを確保するためには、渦巻きの回数を増やす必要がある。実装面積を増やさずに渦巻きの回数を増やすと、コイル導体の断面積を小さくする必要がある。
つまり、高いインダクタンスを得るためには、コイル導体の断面積を小さく、導体線長を長くしなければならない。しかし、コイル導体の断面積を小さく、導体線長を長くすると、コイル導体の直流抵抗が増大し、このコイル導体での電圧降下が大きくなり、超小型電力変換装置の変換効率が低下してしまう。また、直流抵抗が増大するため電力損失も増大する。
【０００９】
この発明の目的は、実装面積が小さく、電力変換効率を向上させ、電力損失の低減を図ることができる平面型磁気誘導素子を有する超小型電力変換装置およびその製造方法を提供することにある。
【００１０】
【課題を解決するための手段】
前記の目的を達成するために、半導体集積回路の形成された半導体基板と、薄膜磁気誘導素子と、コンデンサとを有する超小型電力変換装置において、磁性絶縁基板と、該磁性絶縁基板の第１主面に形成された第１導体と前記磁性絶縁基板の第２主面に形成された第２導体と前記磁性絶縁基板を貫通する貫通孔に形成された接続導体とをそれぞれ接続してなるコイル導体と、からなる薄膜磁気誘導素子を有する構成とする。
【００１１】
また、半導体集積回路の形成された半導体基板と、薄膜磁気誘導素子と、コンデンサとを有する超小型電力変換装置において、前記半導体基板上に形成された第１導体と絶縁支持基板上に形成された第２導体と前記第１、第２導体をそれぞれ接続する接続導体とで構成されるコイル導体と、該コイル導体自体を被覆し該コイル導体内部を充填する磁性絶縁体と、からなる薄膜磁気誘導素子を有する構成とする。
【００１２】
また、前記磁性絶縁基板が、フェライト基板であるとよい。
また、前記コイル導体表面を絶縁膜もしくは磁性を有する微粒子を分散させた樹脂で被覆するとよい。
また、前記磁性絶縁体が、磁性を有する微粒子を分散させた樹脂であるとよい。
【００１３】
また、前記薄膜磁気誘導素子が、無端ソレノイドもしくは非無端ソレノイドのいずれかで構成されるとよい。
また、前記半導体基板に形成した第１導体と前記薄膜磁気誘導素子とをバンプ電極を介して接続するとよい。
また、前記半導体基板面に形成した前記第１導体上にバンプ電極を形成し、前記絶縁支持基板上に形成した第２導体上に接続導体を形成し、該接続導体と前記バンプ電極とを接続するとよい。
【００１４】
また、前記絶縁支持基板が、セラミック基板であるとよい。
また、前記コンデンサが、積層セラミックコンデンサアレイ基板であるとよい。
また、前記積層セラミックコンデンサアレイ基板と、前記薄膜磁気誘導素子と、前記半導体基板とをそれぞれ積層して接続するとよい。
【００１５】
また、前記積層セラミックコンデンサアレイ基板と、前記絶縁セラミック基板と、前記薄膜磁気誘導素子と、前記半導体基板とをそれぞれ積層して接続するとよい。
また、磁性絶縁基板に複数の貫通孔を形成する工程と、該貫通孔を導電性材料を充填して複数の接続導体を形成する工程と、前記磁性絶縁基板の表面と裏面に表面側コイル導体となる複数の第１導体と裏面側コイル導体となる複数の第２導体をそれぞれ形成する工程と、一つの第１導体の一端と一つの第２導体の一端の位置を合わせて一つの接続導体と接続し、他端をずらし、該他端が無端ソレノイドもしくは非無端ソレノイドの終端となるものを除き、前記一つの第１導体の他端を前記一つの第２導体とは別の第２導体の一端と位置を合わせて前記一つの接続導体とは別の接続導体で接続し、前記一つの第２導体の他端を前記一つの第１導体とは別の第１導体の一端と位置を合わせて前記接続導体とは別の接続導体により接続して、無端ソレノイドもしくは非無端ソレノイドを形成する工程と、第１、第２導体表面を絶縁膜もしくは磁性を有する微粒子を分散させた樹脂で被覆する工程とを含む製造方法とする。
【００１６】
また、絶縁支持基板上に裏面側コイル導体となる第２導体を形成する工程と、該第２導体の端部上に接続導体を形成する工程と、該第２導体表面を磁性を有する微粒子を分散させた樹脂で被覆する工程と、表面側コイル導体となる第１導体を半導体チップ面に形成し、該第１導体の両端上に突起導体を形成する工程と、該突起導体と前記接続導体とを固着させて無端ソレノイドもしくは非無端ソレノイドを形成する工程とを含む製造方法とする。
【００１７】
また、半導体集積回路の形成された半導体基板と、薄膜磁気誘導素子と、コンデンサとを有する超小型電力変換装置において、半導体基板と薄膜磁性誘素子を形成する磁性絶縁基板とが積層一体化され、半導体基板に形成された集積回路の外部導出端子が、少なくとも磁気絶縁基板に形成された端子を経由して外部回路と接続する構成とする。積層セラミックコンデンサアレイに形成した端子を経由して外部回路と接続しても構わない。
【００１８】
前記のように、コイル特性の高性能化の手段として，コイル導体の巻き方を薄膜プロセスによるトロイダル巻き線構造の無端ソレノイドにすることにより，インダクタンス値を高め，かつ、直流抵抗による電力損失を低減できる。
また、非無端ソレノイド（通常のソレノイド）とすることで、さらに、磁気飽和を抑えてインダクタンス値を高めることができる。
【００１９】
【発明の実施の形態】
〔実施例１〕
図１、図２および図３は、この発明の第１実施例の超小型電力変換装置の要部構成図で、図１は超小型電力変換装置の要部断面図、図２（ａ）は半導体チップの要部断面図、図２（ｂ）は図２（ａ）のＡ−Ａ面での要部平面図、図３（ａ）は薄膜インダクタの要部断面図、図３（ｂ）は図３（ａ）の上部から透視した要部平面図である。図２（ａ）は図２（ｂ）のＸ−Ｘ線で切断した要部断面図であり、図３（ａ）は図３（ｂ）のＸ−Ｘ線で切断した要部断面図である。
【００２０】
コイル導体は、図３（ｂ）の３、４、５で示されるようにその平面形状はリング状であり、トロイダル状の無端ソレノイドとなっている。このコイル導体はフェライト基板１を取り巻いている。このコイル導体は、フェライト基板１の表面に表面側コイル導体である第１導体４を形成し、裏面に裏面側コイル導体である第２導体５を形成し、この第１導体４と第２導体５をフェライト基板１を貫通する接続導体３で接続する構成となっている。第１導体４の一端と第２導体５の一端の位置を合わせ、両者の他端をずらして形成し、それぞれの端部を接続導体３で互い違いに接続することで、トロイダル状の無端ソレノイドが形成される。第１導体４と第２導体５の表面をレジストまたは絶縁性保護膜８で被覆する。
【００２１】
このようにして形成した薄膜インダクタの一方の主面にマイクロ電源ＩＣチップ（半導体チップ１１）を配置し、他方の主面に積層セラミックコンデンサアレイ１５を配置することで図２６の外枠の点線部分５０の超小型電力変換装置（ＤＣ−ＤＣコンバータ）が形成される。
このように、無端ソレノイドの薄膜インダクタとすることで、渦巻き状の薄膜コンダクタよりもインダクタンス値を大きくできるため、薄膜インダクタの小型化（小実装面積）を図ることができる。また、薄膜インダクタの直流抵抗を小さくできるために、電力変換装置の変換効率の向上と電力損失の低減を図ることができる。
【００２２】
尚、前記の半導体チップ１１に形成された集積回路（ＩＣ）の端子（パット電極上に形成したスタッドバンプ１２も含む：外部導出端子）は、フェライト基板１に形成された接続配線６、７と接続導体２および積層セラミックコンデンサアレイ１４の接続配線１５を経由して図示しない外部回路と接続する。
図４から図１０は、第１実施例の超小型電力変換装置の製造方法であり、工程順に示した、要部製造工程断面図である。尚、図４から図７は、平面型磁気誘導素子である薄膜インダクタの製造方法となる。
【００２３】
厚さ８００μｍ以下で２００μｍ以上のフェライト基板１を用意する。この厚さは、磁気特性との兼ね合いで決まり、薄くなり過ぎると磁気飽和が起こりやすくなり好ましくない。また、薄すぎると強度的にも好ましくない。一方、厚くなり過ぎると超小型電力変換装置の厚みが実用的でなくなる。そのため、前記の範囲をさらに狭めて、厚さ７００μｍ以下で４００μｍ以上とするとよい（図４）。
【００２４】
つぎに、このフェライト基板１に直径０．５ｍｍ程度の半導体チップ接続用貫通孔と、直径０．１５ｍｍ程度のコイル導体接続用貫通孔を形成する。この場合、孔あけはサンドブラストやレーザー加工で行う。そのとき、貫通孔をフェライト基板の上下から開けると、貫通孔の開口部面積を小さくできて、小型化に寄与できる。次に、スクリーン印刷により、この貫通孔を導電性ペースト（例えばＡｇペースト）で埋めて，焼結させて接続導体２、３とする。また、Ｃｕメッキで貫通孔の側壁を被覆して接続導体としてもよい。また、焼結前のグリーンシート状のフェライトシートに貫通孔を形成し、その貫通孔に導電ペーストを充填して一括焼結し接続導体としてもよい。尚、接続導体２は半導体チップ接続用貫通孔を充填して形成され、接続導体３はコイル導体接続用貫通孔を充填して形成される（図５）。
【００２５】
つぎに、このフェライト基板１の表面と裏面に表面側コイル導体である第１導体４と裏面側コイル導体である第２導体５をＣｕメッキなどで形成し、接続導体３を介して第１導体４の一端と第２導体５の一端の位置を合わせて接続し、両者の他端を互い違いにずらして第１導体４と第２導体５を接続導体３で接続して、トロイダル状の無端ソレノイドを形成する。また、半導体チップ１１や積層セラミックコンデンサアレイ１４と接続する接続配線６もＣｕメッキで形成する（図６）。
【００２６】
つぎに、第１導体４上と第２導体５上にレジスト（絶縁膜として使用）もしくは絶縁保護膜８をスクリーン印刷により埋め込み、堆積させる。この時、接続配線６は、マスクにより開口し、その上に電解メッキもしくは無電解メッキにより表面がＮｉ−Ａｕ層のＣｕメッキ層で接続配線７を形成する。このＮｉ−Ａｕメッキ層はスタッドバンプ１２と接続配線７との接合性を向上させるものである（図７）。
【００２７】
つぎに、半導体チップ１１のパッド電極上に形成したスタッドバンプ１２を介して、第１導体４と第２導体５の図示しないＩＣと接続するためのコイルの端子および接続配線６と半導体チップ１１とを接続し、その後、アンダーフィル１３（例えばエポキシ系接着剤）により半導体チップ１１とフェライト基板１とを固着させる（図８）。
【００２８】
つぎに、図８のＹ−Ｙ線に沿ってダイシングにより切断すことにより、半導体チップ１１と無端ソレノイドの薄膜インダクタとが一体となった構造が出来上がる（図９）。
尚、フェライト基板１上下に形成された第１導体４、第２導体５と接続する接続導体３、および接続配線６同士を接続する接続導体２を、第１導体４、第２導体５および接続配線６を形成するときのＣｕメッキで貫通孔内をメッキすることで同時に形成しても構わない。
【００２９】
さらに、複数のコンデンサと抵抗を一括形成した積層セラミック基板（厚さ０．５ｍｍ）をダイシングによりチップサイズに切り出して形成された積層セラミックコンデンサアレイ１４の表面実装用端子電極１５と、フェライト基板１に形成した接続配線７とを導電性接着剤で接続して超小型電力変換装置を形成する（図１０）。
【００３０】
このように、半導体素子を作り込んだ半導体チップと，薄膜技術により，形成する薄膜インダクタとを積み重ねて一つの構造体部品とし、この構造体部品と複数のコンデンサおよび抵抗部品を一括形成した積層型セラミックコンデンサアレイ基板を積み重ねて一つの構造体部品とすることで超小型電力変換装置を形成することができる。このとき、セラミックコンデンサアレイの積層数と素子配置を調整して、底面積を半導体チップもしくは薄膜インダクタの大きい方と同じ（電極端子形成分だけ大き目）にすることで、積層型セラミックコンデンサアレイ上に半導体チップおよび薄膜インダクタを無駄スペース無しに積み重ねる構造とできる。
【００３１】
尚、薄膜インダクタは、図７の段階で切断して単独部品として用いたり（例えば、超小型アンテナなど）、また、図９のように、半導体チップと一体として用たりすることもできる。
〔実施例２〕
図１１は、この発明の第２実施例の超小型電力変換装置の要部断面図である。
【００３２】
図１の第１実施例と異なるのは、レジストまたは絶縁性保護膜８ではなく、磁気を帯びた微粒子を含んだ樹脂（磁性体微粒子分散エポキシ樹脂１６）で第１導体４、第２導体５を被覆する点である。このように、磁性体微粒子分散エポキシ樹脂１６で被覆することで、磁束の外部への漏れを防止できて、直流抵抗の増大を抑制しながら、薄膜インダクタのインダクタンス値を高めることができる。その結果、薄膜インダクタの実装面積を一層縮小することができる。
【００３３】
図１２は、図１１の第２実施例の超小型電力変換装置の製造方法を示し、要部製造工程断面図である。図７の工程が異なるだけで、その他の工程は前記の製造工程と同じであるため説明を省略する。
図７に相当する工程で、第１導体４上と第２導体５上に磁性体微粒子分散エポキシ樹脂１６をスクリーン印刷により埋め込み，堆積させる。
〔実施例３〕
図１３、図１４、図１５は、この発明の第３実施例の超小型電力変換装置の要部構成図で、図１３は超小型電力変換装置の要部断面図、図１４（ａ）は半導体チップと表面側コイル導体の要部断面図、図１４（ｂ）は図１４（ａ）のＡ−Ａ面での要部平面図、図１５（ａ）は薄膜インダクタの主要部分の要部断面図、図１５（ｂ）は図１５（ａ）の上部からの透視した要部平面図である。図１４（ａ）は図１４（ｂ）のＸ−Ｘ線で切断した要部断面図であり、図１５（ａ）は図１５（ｂ）のＸ−Ｘ線で切断した要部断面図である。
【００３４】
図１、図２、図３との違いは、まず、フェライト基板１を用いずに、セラミック基板２０を用いる点である。セラミック基板２０上に第２導体５（裏面側コイル導体）を形成し、この第２導体５端部上に接続導体２２を形成し、第２導体５上に磁気を帯びた微粒子を含んだ樹脂（磁性体微粒子分散エポキシ樹脂２４）を形成する。
【００３５】
また、半導体チップ１１上（半導体チップ１１の下面）に形成した第１導体４（表面側コイル導体）を、磁性体微粒子分散エポキシ樹脂２４上へ配置し、この第１導体４上に形成したスタッドバンプ１２を介して、第２導体５に形成した接続導体２２と第１導体４とを接続してトロイダル状の無端ソレノイドである薄膜インダクタを形成する。この場合も前記した実施例と同様の効果が得られる。
【００３６】
尚、図中の３１は半導体チップ１１と無端ソレノイドの終端部の第１導体４との接続箇所であり、３２は半導体チップ１１に形成したパッド電極である。
図１６から図２２は、第３実施例の超小型電力変換装置の製造方法であり、工程順に示した、要部製造工程断面図である。尚、図１６から図２１は、平面型磁気誘導素子である薄膜インダクタの製造方法となる。
【００３７】
厚さ４００μｍ以下のセラミック基板２０を用意する。厚みについては、機械的強度があればよい（図１６）。
つぎに、このセラミック基板２０に直径０．５ｍｍの積層セラミックコンデンサアレー１４との接続用貫通孔を形成する。この場合、穴あけは、型成形または焼結前の穴あけ加工により、予め穴を有するセラミック基板２０を用いた。次に、スクリーン印刷により、この貫通孔を導電性ペースト（例えばＡｇペースト）で埋めた後、焼結させ接続導体２１とする。また、Ｃｕメッキで貫通孔の側壁を被覆して接続導体としてもよい（図１７）。
【００３８】
つぎに、セラミック基板２０上に裏面側コイル導体である第２導体５（下面コイル導体）を形成し、またセラミック基板２０上面に接続導体２１と接するように接続配線６を形成する（図１８）。
つぎに、第２導体５上を磁性体微粒子を分散攪拌させたエポキシ樹脂（磁性体微粒子分散エポキシ樹脂２４）でスクリーン印刷により埋め込み，堆積させる。この時、第２導体５の図示しない両端の端子部および接続配線６は、マスクにより開口する構造とする。この第２導体５の端子部の開口部にＣｕメッキで接続導体２２を形成し、その表面にＮｉ−Ａｕ層をメッキで形成する。また、接続配線６の開口部にも同様にＣｕメッキで接続配線２３を形成し、その表面にＮｉ−Ａｕ層をメッキで形成する。つぎに、メッキ法により、半導体チップ１１上に表面側コイル導体である第１導体４（上面コイル導体）と接続配線６を形成し、この第１導体４の両端上と接続配線６上にスタッドバンプ１２を形成する（図１９）。
【００３９】
つぎに、スタッドバンプ１２を介して、第２導体５上に形成した接続導体２２および接続配線７と接続し、アンダーフィル１３（例えばエポキシ系接着剤）により半導体チップ１１とセラミック基板２０を固着させる（図２０）。
つぎに、図２０のＹ−Ｙ線に沿ってダイシングにより切断すことにより、半導体チップ１１と無端ソレノイドの薄膜インダクタとが一体となった構造が出来上がる（図２１）。
【００４０】
さらに、複数のコンデンサと抵抗を一括形成した積層セラミック基板（厚さ０．５ｍｍ）をダイシングによりチップサイズに切り出して形成された積層セラミックコンデンサアレイ１４の表面実装用端子電極１５と、セラミック基板２０に形成した接続配線２１とを導電性接着剤で接続して超小型電力変換装置を形成する（図２２）。
【００４１】
尚、図２１の段階で、半導体チップと薄膜インダクタとが一体となった部品として用いることもできる。
前記した第１から第３実施例は薄膜インダクタがトロイダル状の無端ソレノイドであるが、これを非無端ソレノイド（通常のソレノイドであり、両端のある磁心にコイル導体を巻き付けた形状もの）で形成した場合について説明する。
〔実施例４〕
図２３、図２４、図２５は、この発明の第４実施例の超小型電力変換装置の要部構成図で、図２３は超小型電力変換装置の要部断面図、図２４（ａ）は半導体チップの要部断面図、図２４（ｂ）は図２４（ａ）のＡ−Ａ面での要部平面図、図２５（ａ）は薄膜インダクタの要部断面図、図２５（ｂ）は図２５（ａ）の上部から透視した要部平面図である。図２４（ａ）は図２４（ｂ）のＸ−Ｘ線で切断した要部断面図であり、図２５（ａ）は図２５（ｂ）のＸ−Ｘ線で切断した要部断面図である。
【００４２】
第１実施例との違いは、無端ソレノイドの代わりに非無端ソレノイドで形成した点である。
薄膜インダクタは、コイルをフェライト基板に巻きつけたソレノイド（棒状の磁心にコイルを巻き付けた形状もの）である。図２５（ｂ）に示すように、このコイルは、フェライト基板１の表面に、第１導体４ａをストレート状に形成し、裏面に第２導体５ａをストレート状に形成し、この第１導体４ａと第２導体５ａをフェライト基板１を貫通する接続導体３で接続する。第１導体４ａの一端と第２導体５ａの一端の位置を合わせ、他端をずらして形成し、それぞれの端部を互い違いに接続導体３で接続することで、非無端ソレノイドが形成される。第１、第２導体４ａ、５ａ上をレジストまたは絶縁性保護膜８で被覆する。
【００４３】
このようにして形成した薄膜インダクタの一方の主面にマイクロ電源ＩＣチップ（半導体チップ１１）を配置し、他方の主面に積層セラミックコンデンサアレイ１４を配置することで図２６の外枠の点線部分５０の超小型電力変換装置（ＤＣ−ＤＣコンバータ）が形成される。
このように非無端ソレノイドとすることで、第１実施例の無端ソレノイドより、コイル磁心の磁路断面積を増加させることができるため、磁気飽和が起こり難くなり、低直流抵抗としながら、大きな直流電流を流した場合でも比較的高いインダクタンスを保ことができる。
【００４４】
また、この実施例の超小型電力変換装置の製造工程は、図２から図８の製造工程と同じである。異なるのは、図６の工程で、穴付きのフェライト基板の表面と裏面にストレート状の第１、第２導体４ａ、５ａおよび接続配線６を形成して、磁心に始点と終点がある非無端ソレノイドとする点である。
また、前記のレジストまたは絶縁性保護膜８の代わりに第２実施例のように磁気を帯びた微粒子を含んだ樹脂（磁性体微粒子分散エポキシ樹脂１６）で第１、第２導体４ａ、５ａを被覆してもよい。
【００４５】
また、前記のフェライト基板１を用いずに、第３実施例のように、図１３のようにセラミック基板２０上に図２５の点線のような第２導体５ａを形成し、この第２導体５ａ端部上に接続導体３を形成し、第２導体５ａ上に、磁気を帯びた微粒子を含んだ樹脂（磁性体微粒子分散エポキシ樹脂２４）を形成する。また、半導体チップ１１上に図２５の実線で示すような第１導体４ａを形成し、この第１導体４ａにスタッドバンプ１２を形成して、このスタッドバンプ１２と第２導体５ａ上に形成した接続導体２２とを接続することで図２５に相当する非無端ソレノイドである薄膜インダクタを形成してもよい。
【００４６】
また、支持基板上に、前記した薄膜インダクタまたは半導体チップ搭載薄膜インダクタと、前記した積層セラミックコンデンサアレーなどとを併設してもよい。このように併設すると、超小型電力変換装置の実装面積は大きくなるが、厚みを減じることができる。
【００４７】
【発明の効果】
この発明によれば、薄膜インダクタをトロイダル状の無端ソレノイド構造とすることで、インダクタンス値を、渦巻き構造に比べて、３倍以上大きくできるため、コイル配線長を短縮できて直流抵抗を低減できる。また、薄膜インダクタの実装面積を低減できる。
【００４８】
直流抵抗の低減により、電力変換装置の変換効率の向上と電力損失の低減を図ることができる。
また、非無端ソレノイド構造とすることで、低直流抵抗で、無端ソレノイドよりさらにインダクタンス値を高めることができる。
そのため、一層の実装面積の低減と変換効率の向上と電力損失の低減を図ることができる。
【００４９】
また、この超小型電力変換装置１個（一個の部品）でＤＣ−ＤＣコンバータ回路が形成されており、また、表面実装部品と同様の端子電極構造となっているため、応用機器の回路において部品の実装が容易となる。
この薄膜インダクタと積層セラミックコンデンサアレイを用いることで、個別部品で構成した従来の電力変換装置（ＤＣ−ＤＣコンバータ）と比べて、実装面積をほぼ１／２以下に削減できる。
【図面の簡単な説明】
【図１】この発明の第１実施例の超小型電力変換装置の要部断面図
【図２】この発明の第１実施例の超小型電力変換装置を構成する半導体チップであり、（ａ）は要部断面図、（ｂ）は（ａ）のＡ−Ａ面での要部平面図
【図３】この発明の第１実施例の超小型電力変換装置を構成する薄膜インダクタであり、（ａ）は要部断面図、（ｂ）は（ａ）の上部から透視した要部平面図
【図４】第１実施例の超小型電力変換装置の要部製造工程断面図
【図５】図４に続く、第１実施例の超小型電力変換装置の要部製造工程断面図
【図６】図５に続く、第１実施例の超小型電力変換装置の要部製造工程断面図
【図７】図６に続く、第１実施例の超小型電力変換装置の要部製造工程断面図
【図８】図７に続く、第１実施例の超小型電力変換装置の要部製造工程断面図
【図９】図８に続く、第１実施例の超小型電力変換装置の要部製造工程断面図
【図１０】図９に続く、第１実施例の超小型電力変換装置の要部製造工程断面図
【図１１】この発明の第２実施例の超小型電力変換装置の要部断面図
【図１２】第２実施例の超小型電力変換装置の要部製造工程断面図
【図１３】この発明の第３実施例の超小型電力変換装置の要部断面図
【図１４】この発明の第３実施例の超小型電力変換装置を構成する半導体チップと表面側コイル導体であり、（ａ）は要部断面図、（ｂ）は（ａ）のＡ−Ａ面での要部平面図
【図１５】この発明の第３実施例の超小型電力変換装置を構成する薄膜インダクタの主要部分であり、（ａ）は要部断面図、（ｂ）は（ａ）の上部から透視した要部平面図
【図１６】第３実施例の超小型電力変換装置の要部製造工程断面図
【図１７】図１６に続く、第３実施例の超小型電力変換装置の要部製造工程断面図
【図１８】図１７に続く、第３実施例の超小型電力変換装置の要部製造工程断面図
【図１９】図１８に続く、第３実施例の超小型電力変換装置の要部製造工程断面図
【図２０】図１９に続く、第３実施例の超小型電力変換装置の要部製造工程断面図
【図２１】図２０に続く、第３実施例の超小型電力変換装置の要部製造工程断面図
【図２２】図２１に続く、第３実施例の超小型電力変換装置の要部製造工程断面図
【図２３】この発明の第４実施例の超小型電力変換装置の要部断面図
【図２４】この発明の第４実施例の超小型電力変換装置を構成する半導体チップであり、（ａ）は要部断面図、（ｂ）は（ａ）のＡ−Ａ面での要部平面図
【図２５】この発明の第４実施例の超小型電力変換装置を構成する薄膜インダクタであり、（ａ）は要部断面図、（ｂ）は（ａ）の上部から透視した要部平面図
【図２６】ＤＣ−ＤＣコンバータの回路構成図
【符号の説明】
１　　フェライト基板
２、４、２２　接続導体
４、４ａ　第１導体
５、５ａ　第２導体
６、７、１５、２１、２３　接続配線
８　　レジストまたは絶縁保護膜
１１　　半導体チップ
１２　　スタッドバンプ
１３　　アンダーフィル
１４　　積層セラミックコンデンサアレイ
１６、２４　磁性体微粒子分散エポキシ樹脂
２０　　セラミック基板
３１　　接続箇所
３２　　パッド電極
５０　　外枠の点線部分（ＤＣ−ＤＣコンバータ回路）[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a semiconductor integrated circuit (hereinafter, referred to as an IC) formed on a semiconductor substrate and an ultra-compact power conversion device such as a DC-DC converter including passive components such as coils, capacitors, and resistors.
[0002]
[Prior art]
2. Description of the Related Art In recent years, electronic information devices, particularly various types of portable electronic information devices, have become remarkably widespread. Many of these electronic information devices use a battery as a power source, and incorporate a power conversion device such as a DC-DC converter. Normally, the power converter is a hybrid of active elements such as switching elements, rectifiers, and control ICs and passive elements such as coils, transformers, capacitors, and resistors on a ceramic substrate or a printed substrate such as plastic. It is configured as a type module.
[0003]
FIG. 26 is a circuit configuration diagram of the DC-DC converter. A dotted line portion 50 in the outer frame in the figure is a circuit of the DC-DC converter.
The DC-DC converter includes an input capacitor Ci, an output capacitor Co, an adjusting resistor RT, a capacitor CT, a thin-film inductor L, and a micro power supply IC. The DC input voltage Vi is input, and the MOSFET of the micro power supply IC is switched to output a predetermined DC output voltage Vo. The thin-film inductor L and the output capacitor Co are a filter circuit for outputting a DC voltage.
[0004]
In this circuit, when the DC resistance of the thin-film inductor L increases, the voltage drop at this portion increases, and the output voltage Vo decreases. That is, the conversion efficiency of the DC-DC converter decreases.
[0005]
[Problems to be solved by the invention]
2. Description of the Related Art Along with a demand for miniaturization and weight reduction of various electronic information devices including portable devices, there is a strong demand for miniaturization of a built-in power converter. The miniaturization of the hybrid power supply module has been advanced by technologies such as MCM (multi-chip module) technology and multilayer ceramic components. However, since individual components are mounted side by side on the same substrate, reduction in the mounting area of the power supply module is limited. In particular, magnetic induction components such as inductors and transformers are extremely large in volume as compared with integrated circuits, and are the most restrictive in reducing the size of electronic devices.
[0006]
There are two possible future directions for reducing the size of these magnetic induction components: a direction in which chip components are made as small as possible and the entire power supply is reduced by surface mounting, and a direction in which a thin film is formed on a silicon substrate. In recent years, there has been reported an example in which a thin micromagnetic element (coil, transformer) is mounted on a semiconductor substrate by applying semiconductor technology in response to a demand for miniaturization of a magnetic induction component. The inventor also devised such a planar magnetic induction component in Japanese Patent Application No. 2000-08065. It uses a thin-film technology to form a planar magnetic induction element (thin film inductor) in which a thin-film coil is sandwiched between a magnetic thin film and a ferrite thin plate on the surface of a semiconductor substrate on which semiconductor devices such as switching elements and control circuits are built. It was formed. This has made it possible to reduce the thickness of the magnetic induction element and reduce its mounting area.
[0007]
However, there are still problems that the number of individual chip components is large and the mounting area is large.
In order to solve this, the inventor has devised a micro power converter disclosed in FIG. 1 of Japanese Patent Application No. 2001-021453. The flat type magnetic induction element used in this micro power converter has a spiral (mosquito coil) coil gap filled with resin mixed with magnetic particles, and the upper and lower surfaces are ferrite thin plates. It is formed sandwiching.
[0008]
However, in this method, since the inductance of the coil conductor is almost proportional to the number of spirals, it is necessary to increase the number of spirals to secure a large inductance. If the number of spirals is increased without increasing the mounting area, it is necessary to reduce the cross-sectional area of the coil conductor.
That is, in order to obtain high inductance, the cross-sectional area of the coil conductor must be reduced and the length of the conductor wire must be increased. However, when the cross-sectional area of the coil conductor is reduced and the conductor wire length is increased, the DC resistance of the coil conductor increases, the voltage drop at the coil conductor increases, and the conversion efficiency of the micro power converter decreases. . In addition, power loss increases due to an increase in DC resistance.
[0009]
SUMMARY OF THE INVENTION An object of the present invention is to provide an ultra-compact power conversion device having a planar magnetic induction element which has a small mounting area, can improve power conversion efficiency, and can reduce power loss, and a method for manufacturing the same.
[0010]
[Means for Solving the Problems]
In order to achieve the above object, in a micro power converter having a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin-film magnetic induction element, and a capacitor, a magnetic insulating substrate; A coil conductor formed by connecting a first conductor formed on a surface, a second conductor formed on a second main surface of the magnetic insulating substrate, and a connection conductor formed in a through hole penetrating the magnetic insulating substrate, respectively. And a thin-film magnetic induction element comprising:
[0011]
In a microminiature power converter having a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin-film magnetic induction element, and a capacitor, the microconductor power conversion device is formed on a first conductor formed on the semiconductor substrate and on an insulating support substrate. A thin-film magnetic induction comprising: a coil conductor composed of a second conductor and a connection conductor for connecting the first and second conductors; and a magnetic insulator covering the coil conductor itself and filling the inside of the coil conductor. A structure including an element is employed.
[0012]
Further, the magnetic insulating substrate may be a ferrite substrate.
The surface of the coil conductor may be covered with an insulating film or a resin in which fine particles having magnetism are dispersed.
Further, it is preferable that the magnetic insulator is a resin in which magnetic fine particles are dispersed.
[0013]
Further, it is preferable that the thin-film magnetic induction element is constituted by either an endless solenoid or an endless solenoid.
It is preferable that the first conductor formed on the semiconductor substrate and the thin-film magnetic inductive element are connected via a bump electrode.
Further, a bump electrode is formed on the first conductor formed on the semiconductor substrate surface, a connection conductor is formed on a second conductor formed on the insulating support substrate, and the connection conductor is connected to the bump electrode. Good to do.
[0014]
Further, the insulating support substrate may be a ceramic substrate.
Further, it is preferable that the capacitor is a multilayer ceramic capacitor array substrate.
It is preferable that the multilayer ceramic capacitor array substrate, the thin-film magnetic induction element, and the semiconductor substrate are stacked and connected.
[0015]
Further, it is preferable that the multilayer ceramic capacitor array substrate, the insulating ceramic substrate, the thin-film magnetic induction element, and the semiconductor substrate are respectively laminated and connected.
A step of forming a plurality of through holes in the magnetic insulating substrate; a step of filling the through holes with a conductive material to form a plurality of connection conductors; Forming a plurality of first conductors and a plurality of second conductors serving as backside coil conductors, and aligning the positions of one end of one first conductor and one end of one second conductor to form one connection conductor And the other end is shifted, and the other end of the one first conductor is connected to a second conductor different from the one second conductor except that the other end is an endless solenoid or an endless solenoid. One end of the second conductor is connected to another end of the first conductor, and the other end of the one second conductor is connected to one end of a first conductor different from the one first conductor. And connected by a connection conductor different from the connection conductor, Forming a maytansinoid or non endless solenoid, the manufacturing method comprising a step of coating a resin obtained by dispersing fine particles having a first, a second conductor surface insulating film or magnetic.
[0016]
A step of forming a second conductor to be a back-side coil conductor on the insulating support substrate; a step of forming a connection conductor on an end of the second conductor; and forming a magnetic fine particle on the surface of the second conductor. A step of coating with a dispersed resin, a step of forming a first conductor to be a surface-side coil conductor on a semiconductor chip surface, and forming projecting conductors on both ends of the first conductor; To form an endless solenoid or an endless solenoid.
[0017]
Further, in a micro power converter having a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin-film magnetic induction element, and a capacitor, a semiconductor substrate and a magnetic insulating substrate forming a thin-film magnetic induction element are laminated and integrated, An external lead terminal of an integrated circuit formed on a semiconductor substrate is connected to an external circuit via at least a terminal formed on a magnetic insulating substrate. It may be connected to an external circuit via a terminal formed on the multilayer ceramic capacitor array.
[0018]
As described above, as a means of improving the coil characteristics, the winding of the coil conductor is changed to an endless solenoid having a toroidal winding structure by a thin film process, thereby increasing the inductance value and reducing the power loss due to the DC resistance. it can.
Further, by using an endless solenoid (ordinary solenoid), it is possible to further suppress magnetic saturation and increase the inductance value.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
[Example 1]
FIGS. 1, 2, and 3 are main part configuration diagrams of a micro power converter of a first embodiment of the present invention. FIG. 1 is a cross-sectional view of main parts of the micro power converter, and FIG. FIG. 2B is a plan view of a main part of the semiconductor chip taken along a line AA in FIG. 2A, FIG. 3A is a cross-sectional view of a main part of a thin-film inductor, and FIG. FIG. 3 is a plan view of a main part seen from above in FIG. FIG. 2A is a cross-sectional view of a main part taken along line XX of FIG. 2B, and FIG. 3A is a cross-sectional view of a main part cut along line XX of FIG. 3B. is there.
[0020]
The coil conductor has a ring-shaped planar shape as shown by 3, 4, and 5 in FIG. 3B, and is a toroidal endless solenoid. This coil conductor surrounds the ferrite substrate 1. In this coil conductor, a first conductor 4 that is a front-side coil conductor is formed on the front surface of the ferrite substrate 1, and a second conductor 5 that is a rear-side coil conductor is formed on the back surface. 5 is connected by a connection conductor 3 penetrating the ferrite substrate 1. One end of the first conductor 4 and one end of the second conductor 5 are aligned with each other, the other ends of the two conductors are shifted from each other, and the respective ends are alternately connected by the connection conductors 3 so that the toroidal endless solenoid is formed. It is formed. The surfaces of the first conductor 4 and the second conductor 5 are covered with a resist or an insulating protective film 8.
[0021]
The micro power supply IC chip (semiconductor chip 11) is arranged on one main surface of the thin film inductor thus formed, and the multilayer ceramic capacitor array 15 is arranged on the other main surface. Fifty micro power converters (DC-DC converters) are formed.
As described above, by using an endless solenoid thin-film inductor, the inductance value can be made larger than that of a spiral thin-film conductor, so that the thin-film inductor can be reduced in size (small mounting area). Further, since the DC resistance of the thin-film inductor can be reduced, it is possible to improve the conversion efficiency of the power converter and reduce the power loss.
[0022]
The terminals of the integrated circuit (IC) formed on the semiconductor chip 11 (including the stud bumps 12 formed on the pad electrodes: external lead-out terminals) are connected to the connection wirings 6 and 7 formed on the ferrite substrate 1. It is connected to an external circuit (not shown) via the connection conductor 2 and the connection wiring 15 of the multilayer ceramic capacitor array 14.
4 to 10 are cross-sectional views of a main part manufacturing process, showing a method of manufacturing the micro power converter according to the first embodiment, in the order of steps. 4 to 7 show a method of manufacturing a thin film inductor that is a planar magnetic induction element.
[0023]
A ferrite substrate 1 having a thickness of 800 μm or less and a thickness of 200 μm or more is prepared. This thickness is determined in consideration of the magnetic properties. If the thickness is too small, magnetic saturation is likely to occur, which is not preferable. Further, if it is too thin, it is not preferable in terms of strength. On the other hand, if it is too thick, the thickness of the micro power converter becomes impractical. Therefore, it is preferable to further narrow the above range so that the thickness is not more than 700 μm and not less than 400 μm (FIG. 4).
[0024]
Next, a through hole for connecting a semiconductor chip having a diameter of about 0.5 mm and a through hole for connecting a coil conductor having a diameter of about 0.15 mm are formed in the ferrite substrate 1. In this case, drilling is performed by sandblasting or laser processing. At this time, if the through holes are opened from above and below the ferrite substrate, the opening area of the through holes can be reduced, which can contribute to miniaturization. Next, the through holes are filled with a conductive paste (for example, Ag paste) by screen printing and sintered to form connection conductors 2 and 3. Alternatively, the connection conductor may be formed by covering the side wall of the through hole with Cu plating. Alternatively, a through-hole may be formed in a green sheet-shaped ferrite sheet before sintering, and the through-hole may be filled with a conductive paste and sintered together to form a connection conductor. The connection conductor 2 is formed by filling a through hole for connecting a semiconductor chip, and the connection conductor 3 is formed by filling a through hole for connecting a coil conductor (FIG. 5).
[0025]
Next, a first conductor 4 which is a front-side coil conductor and a second conductor 5 which is a rear-side coil conductor are formed on the front and rear surfaces of the ferrite substrate 1 by Cu plating or the like, and the first conductor 4 is connected via the connection conductor 3. 4, one end of the second conductor 5 is connected to the first conductor 4 and the other end is alternately shifted, the first conductor 4 and the second conductor 5 are connected by the connection conductor 3, and the toroidal endless solenoid is connected. To form Also, the connection wiring 6 connected to the semiconductor chip 11 and the multilayer ceramic capacitor array 14 is formed by Cu plating (FIG. 6).
[0026]
Next, a resist (used as an insulating film) or an insulating protective film 8 is buried and deposited on the first conductor 4 and the second conductor 5 by screen printing. At this time, the connection wiring 6 is opened by a mask, and the connection wiring 7 is formed thereon by electrolytic plating or electroless plating with a Cu plating layer having a surface of a Ni-Au layer. The Ni-Au plating layer improves the bonding between the stud bump 12 and the connection wiring 7 (FIG. 7).
[0027]
Next, via a stud bump 12 formed on a pad electrode of the semiconductor chip 11, a terminal of a coil and a connection wiring 6 for connecting to an IC (not shown) of the first conductor 4 and the second conductor 5, and the semiconductor chip 11 After that, the semiconductor chip 11 and the ferrite substrate 1 are fixed to each other by the underfill 13 (for example, an epoxy-based adhesive) (FIG. 8).
[0028]
Next, by dicing along the line YY in FIG. 8, a structure in which the semiconductor chip 11 and the thin-film inductor of the endless solenoid are integrated is completed (FIG. 9).
The connection conductor 3 connected to the first conductor 4 and the second conductor 5 formed above and below the ferrite substrate 1, and the connection conductor 2 connected to the connection wirings 6 are connected to the first conductor 4, the second conductor 5, and the connection conductors. The wiring 6 may be formed at the same time by plating the inside of the through hole with Cu plating when forming the wiring 6.
[0029]
Furthermore, the surface mounting terminal electrodes 15 of the multilayer ceramic capacitor array 14 formed by dicing a multilayer ceramic substrate (thickness: 0.5 mm) on which a plurality of capacitors and resistors are collectively formed and a ferrite substrate 1 are formed. The formed connection wiring 7 is connected with a conductive adhesive to form a micro power converter (FIG. 10).
[0030]
In this way, a semiconductor chip incorporating a semiconductor element and a thin-film inductor formed by thin-film technology are stacked into a single structural component, and this structural component and a plurality of capacitors and resistance components are collectively formed. By stacking the ceramic capacitor array substrates into one structural component, a micro power converter can be formed. At this time, the number of stacked ceramic capacitor arrays and the arrangement of elements are adjusted so that the bottom area is the same as the larger one of the semiconductor chip or the thin film inductor (larger than the electrode terminals are formed), so that the stacked ceramic capacitor array is The semiconductor chip and the thin film inductor can be stacked without wasting space.
[0031]
The thin film inductor can be cut as shown in FIG. 7 and used as a single component (for example, an ultra-small antenna), or can be used integrally with a semiconductor chip as shown in FIG.
[Example 2]
FIG. 11 is a sectional view showing a main part of a micro power converter according to a second embodiment of the present invention.
[0032]
The difference from the first embodiment of FIG. 1 is that the first conductor 4 and the second conductor 5 are made of a resin containing magnetic fine particles (magnetic fine particle dispersed epoxy resin 16) instead of the resist or the insulating protective film 8. This is the point of covering. In this way, by coating with the magnetic fine particle-dispersed epoxy resin 16, it is possible to prevent the leakage of the magnetic flux to the outside and to increase the inductance value of the thin-film inductor while suppressing an increase in the DC resistance. As a result, the mounting area of the thin film inductor can be further reduced.
[0033]
FIG. 12 is a cross-sectional view of a main part manufacturing process, showing a method of manufacturing the micro power converter of the second embodiment of FIG. Only the process of FIG. 7 is different, and the other processes are the same as the above-described manufacturing process, and therefore, the description is omitted.
In a process corresponding to FIG. 7, a magnetic fine particle dispersed epoxy resin 16 is embedded and deposited on the first conductor 4 and the second conductor 5 by screen printing.
[Example 3]
FIGS. 13, 14, and 15 are main part configuration diagrams of a micro power converter according to a third embodiment of the present invention, FIG. 13 is a cross-sectional view of main parts of the micro power converter, and FIG. FIG. 14 (b) is a plan view of a main part taken along the line AA in FIG. 14 (a), and FIG. 15 (a) is a main part of a main part of the thin film inductor. FIG. 15 (b) is a cross-sectional view, and FIG. 14A is a cross-sectional view of a main part taken along line XX of FIG. 14B, and FIG. 15A is a cross-sectional view of a main part cut along line XX of FIG. is there.
[0034]
The difference from FIGS. 1, 2 and 3 is that first, a ceramic substrate 20 is used without using the ferrite substrate 1. A second conductor 5 (backside coil conductor) is formed on a ceramic substrate 20, a connection conductor 22 is formed on an end of the second conductor 5, and a resin containing magnetic fine particles is formed on the second conductor 5. (Electromagnetic resin particles dispersed epoxy resin 24) is formed.
[0035]
Further, the first conductor 4 (surface-side coil conductor) formed on the semiconductor chip 11 (the lower surface of the semiconductor chip 11) is arranged on the magnetic fine particle dispersed epoxy resin 24, and the stud formed on the first conductor 4 is formed. The connection conductor 22 formed on the second conductor 5 and the first conductor 4 are connected via the bumps 12 to form a thin-film inductor that is a toroidal endless solenoid. In this case, the same effect as in the above-described embodiment can be obtained.
[0036]
In the figure, reference numeral 31 denotes a connection point between the semiconductor chip 11 and the first conductor 4 at the end of the endless solenoid, and reference numeral 32 denotes a pad electrode formed on the semiconductor chip 11.
16 to 22 show a method of manufacturing the micro power converter according to the third embodiment, and are sectional views of a main part manufacturing process shown in the order of processes. FIGS. 16 to 21 show a method of manufacturing a thin film inductor that is a planar magnetic induction element.
[0037]
A ceramic substrate 20 having a thickness of 400 μm or less is prepared. The thickness only needs to have mechanical strength (FIG. 16).
Next, a through hole for connection with the multilayer ceramic capacitor array 14 having a diameter of 0.5 mm is formed in the ceramic substrate 20. In this case, the ceramic substrate 20 having holes in advance was used for forming holes by die forming or sintering before sintering. Next, the through holes are filled with a conductive paste (for example, Ag paste) by screen printing, and then sintered to form connection conductors 21. Alternatively, the connection conductor may be formed by covering the side wall of the through hole with Cu plating (FIG. 17).
[0038]
Next, a second conductor 5 (lower surface coil conductor), which is a back side coil conductor, is formed on the ceramic substrate 20, and a connection wiring 6 is formed on the upper surface of the ceramic substrate 20 so as to be in contact with the connection conductor 21 (FIG. 18). .
Next, the second conductor 5 is embedded and deposited by screen printing with an epoxy resin in which magnetic fine particles are dispersed and stirred (magnetic fine particle-dispersed epoxy resin 24). At this time, the terminal portions on both ends (not shown) of the second conductor 5 and the connection wiring 6 are structured to be opened by a mask. A connection conductor 22 is formed in the opening of the terminal portion of the second conductor 5 by Cu plating, and a Ni-Au layer is formed on the surface by plating. Similarly, the connection wiring 23 is formed in the opening of the connection wiring 6 by Cu plating, and a Ni-Au layer is formed on the surface thereof by plating. Next, a first conductor 4 (upper surface coil conductor), which is a surface side coil conductor, and a connection wiring 6 are formed on the semiconductor chip 11 by plating, and studs are formed on both ends of the first conductor 4 and on the connection wiring 6. The bump 12 is formed (FIG. 19).
[0039]
Next, the semiconductor chip 11 and the ceramic substrate 20 are fixedly connected to the connection conductor 22 and the connection wiring 7 formed on the second conductor 5 via the stud bumps 12 and the underfill 13 (for example, an epoxy-based adhesive). (FIG. 20).
Next, by dicing along the line YY in FIG. 20, a structure in which the semiconductor chip 11 and the thin-film inductor of the endless solenoid are integrated is completed (FIG. 21).
[0040]
Further, the surface-mounting terminal electrodes 15 of the multilayer ceramic capacitor array 14 formed by cutting a multilayer ceramic substrate (thickness 0.5 mm) having a plurality of capacitors and resistors collectively into a chip size by dicing, and the ceramic substrate 20. The formed connection wiring 21 is connected with a conductive adhesive to form a micro power converter (FIG. 22).
[0041]
Incidentally, at the stage of FIG. 21, the semiconductor chip and the thin film inductor can be used as an integrated component.
In the above-described first to third embodiments, the thin film inductor is a toroidal endless solenoid, which is formed by a non-endless solenoid (a normal solenoid, in which a coil conductor is wound around a magnetic core having both ends). The case will be described.
[Example 4]
23, 24, and 25 are main part configuration diagrams of a micro power converter according to a fourth embodiment of the present invention. FIG. 23 is a cross-sectional view of main parts of the micro power converter, and FIG. FIG. 24B is a cross-sectional view of a main part of the semiconductor chip taken along the line AA in FIG. 24A, FIG. 25A is a cross-sectional view of a main part of the thin-film inductor, and FIG. FIG. 26 is a plan view of a main part seen through from above in FIG. 24A is a cross-sectional view of a main part taken along line XX of FIG. 24B, and FIG. 25A is a cross-sectional view of a main part cut along line XX of FIG. 25B. is there.
[0042]
The difference from the first embodiment is that an endless solenoid is used instead of the endless solenoid.
The thin-film inductor is a solenoid (a coil in which a coil is wound around a rod-shaped magnetic core) in which a coil is wound around a ferrite substrate. As shown in FIG. 25 (b), in this coil, a first conductor 4a is formed in a straight shape on the front surface of the ferrite substrate 1, and a second conductor 5a is formed in a straight shape on the back surface. And the second conductor 5 a are connected by the connection conductor 3 penetrating the ferrite substrate 1. An endless solenoid is formed by aligning one end of the first conductor 4a and one end of the second conductor 5a, shifting the other end, and connecting the ends alternately with the connection conductor 3. The first and second conductors 4a and 5a are covered with a resist or an insulating protective film 8.
[0043]
A micro power supply IC chip (semiconductor chip 11) is arranged on one main surface of the thin film inductor thus formed, and a multilayer ceramic capacitor array 14 is arranged on the other main surface. Fifty micro power converters (DC-DC converters) are formed.
By using the endless solenoid as described above, the magnetic path cross-sectional area of the coil core can be increased as compared with the endless solenoid of the first embodiment, so that magnetic saturation is less likely to occur, and a large DC Even when a current flows, a relatively high inductance can be maintained.
[0044]
The manufacturing process of the micro power converter of this embodiment is the same as the manufacturing process of FIG. 2 to FIG. The difference is that in the process of FIG. 6, straight first and second conductors 4a and 5a and connection wiring 6 are formed on the front and back surfaces of a ferrite substrate with holes, and the endless endless endless core has a magnetic core. The point is that it is a solenoid.
Instead of the resist or the insulating protective film 8, the first and second conductors 4a, 5a are made of a resin containing magnetic fine particles (magnetic fine particle dispersed epoxy resin 16) as in the second embodiment. It may be coated.
[0045]
Instead of using the ferrite substrate 1, a second conductor 5a as shown by a dotted line in FIG. 25 is formed on a ceramic substrate 20 as shown in FIG. The connection conductor 3 is formed on the end portion, and a resin containing magnetic fine particles (magnetic fine particle dispersed epoxy resin 24) is formed on the second conductor 5a. A first conductor 4a as shown by a solid line in FIG. 25 is formed on the semiconductor chip 11, a stud bump 12 is formed on the first conductor 4a, and the first conductor 4a is formed on the stud bump 12 and the second conductor 5a. A thin-film inductor that is an endless solenoid corresponding to FIG. 25 may be formed by connecting the connection conductor 22.
[0046]
Further, the above-mentioned thin film inductor or semiconductor chip mounted thin film inductor and the above-mentioned multilayer ceramic capacitor array may be provided on a supporting substrate. With such a juxtaposition, the mounting area of the micro power converter becomes large, but the thickness can be reduced.
[0047]
【The invention's effect】
According to the present invention, since the thin film inductor has a toroidal endless solenoid structure, the inductance value can be increased by three times or more as compared with the spiral structure, so that the coil wiring length can be shortened and the DC resistance can be reduced. Further, the mounting area of the thin film inductor can be reduced.
[0048]
By reducing the DC resistance, it is possible to improve the conversion efficiency of the power conversion device and reduce the power loss.
In addition, by adopting an endless solenoid structure, the inductance value can be further increased with a low DC resistance and an endless solenoid.
Therefore, the mounting area, the conversion efficiency, and the power loss can be further reduced.
[0049]
Also, a DC-DC converter circuit is formed by one micro power converter (one component) and has a terminal electrode structure similar to that of a surface mount component. Is easy to implement.
By using the thin-film inductor and the multilayer ceramic capacitor array, the mounting area can be reduced to approximately 以下 or less as compared with a conventional power converter (DC-DC converter) configured by individual components.
[Brief description of the drawings]
FIG. 1 is a sectional view of an essential part of a micro power converter according to a first embodiment of the present invention;
FIGS. 2A and 2B are semiconductor chip constituting a micro power converter according to a first embodiment of the present invention, wherein FIG. 2A is a sectional view of a main part, and FIG. 2B is a main part on AA plane of FIG. Plan view
3A and 3B are thin-film inductors constituting a micro power converter according to a first embodiment of the present invention, wherein FIG. 3A is a cross-sectional view of a main part, and FIG. 3B is a plan view of a main part seen from the top of FIG.
FIG. 4 is a sectional view of a main part manufacturing process of the micro power converter of the first embodiment.
FIG. 5 is a sectional view of a main part manufacturing process of the micro power converter according to the first embodiment, following FIG. 4;
FIG. 6 is a sectional view of a main part manufacturing process of the micro power converter of the first embodiment, following FIG. 5;
FIG. 7 is a sectional view of a main part manufacturing process of the micro power converter according to the first embodiment, following FIG. 6;
FIG. 8 is a sectional view of a main part manufacturing process of the micro power converter of the first embodiment, following FIG. 7;
FIG. 9 is a sectional view of a main part manufacturing process of the micro power converter according to the first embodiment, following FIG. 8;
FIG. 10 is a sectional view of a main part manufacturing process of the micro power converter according to the first embodiment, following FIG. 9;
FIG. 11 is a sectional view of an essential part of a micro power converter according to a second embodiment of the present invention;
FIG. 12 is a sectional view of a main part manufacturing process of the micro power converter of the second embodiment.
FIG. 13 is a sectional view of an essential part of a micro power converter according to a third embodiment of the present invention.
14A and 14B are a semiconductor chip and a surface-side coil conductor constituting a microminiature power converter according to a third embodiment of the present invention, wherein FIG. 14A is a cross-sectional view of a main part, and FIG. Plan view of main part in plane
15A and 15B are main parts of a thin film inductor constituting a micro power converter according to a third embodiment of the present invention, wherein FIG. 15A is a sectional view of a main part, and FIG. Part plan view
FIG. 16 is a sectional view of a main part manufacturing process of the micro power converter of the third embodiment.
FIG. 17 is a sectional view of a main part manufacturing process of the micro power converter of the third embodiment, following FIG. 16;
FIG. 18 is a sectional view of a main part manufacturing process of the micro power converter according to the third embodiment, following FIG. 17;
FIG. 19 is a sectional view of a main part manufacturing process of the micro power converter according to the third embodiment, following FIG. 18;
FIG. 20 is a sectional view of a main part manufacturing process of the micro power converter according to the third embodiment, following FIG. 19;
FIG. 21 is a sectional view of a main part manufacturing process of the micro power converter of the third embodiment, following FIG. 20;
FIG. 22 is a cross-sectional view of a main part manufacturing process of the micro power converter of the third embodiment, following FIG. 21;
FIG. 23 is a sectional view of an essential part of a micro power converter according to a fourth embodiment of the present invention;
24A and 24B are semiconductor chip constituting a micro power converter according to a fourth embodiment of the present invention, wherein FIG. 24A is a cross-sectional view of a main part, and FIG. 24B is a main part on AA plane of FIG. Plan view
25A and 25B are thin-film inductors constituting a micro power converter according to a fourth embodiment of the present invention, wherein FIG. 25A is a cross-sectional view of a main part, and FIG. 25B is a plan view of the main part seen from the top of FIG.
FIG. 26 is a circuit diagram of a DC-DC converter.
[Explanation of symbols]
1 Ferrite substrate
2, 4, 22 connection conductor
4, 4a first conductor
5, 5a second conductor
6, 7, 15, 21, 23 connection wiring
8 Resist or insulating protective film
11 Semiconductor chip
12 Stud bump
13 Underfill
14 Multilayer ceramic capacitor array
16, 24 Epoxy resin dispersed with magnetic fine particles
20 ceramic substrate
31 Connection
32 pad electrode
50 Dotted line portion of outer frame (DC-DC converter circuit)

Claims (15)

半導体集積回路の形成された半導体基板と、薄膜磁気誘導素子と、コンデンサとを有する超小型電力変換装置において、
磁性絶縁基板と、該磁性絶縁基板の第１主面に形成された第１導体と前記磁性絶縁基板の第２主面に形成された第２導体と前記磁性絶縁基板を貫通する貫通孔に形成された接続導体とをそれぞれ接続してなるコイル導体と、からなる薄膜磁気誘導素子を有することを特徴とする超小型電力変換装置。In a micro power converter having a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin-film magnetic induction element, and a capacitor,
A magnetic insulating substrate, a first conductor formed on a first main surface of the magnetic insulating substrate, a second conductor formed on a second main surface of the magnetic insulating substrate, and a through hole penetrating the magnetic insulating substrate. An ultra-small power converter, comprising: a thin-film magnetic induction element comprising: a coil conductor formed by connecting each of the connected connection conductors; 半導体集積回路の形成された半導体基板と、薄膜磁気誘導素子と、コンデンサとを有する超小型電力変換装置において、
前記半導体基板上に形成された第１導体と絶縁支持基板上に形成された第２導体と前記第１、第２導体をそれぞれ接続する接続導体とで構成されるコイル導体と、該コイル導体自体を被覆し該コイル導体内部を充填する磁性絶縁体と、からなる薄膜磁気誘導素子を有することを特徴とする超小型電力変換装置。In a micro power converter having a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin-film magnetic induction element, and a capacitor,
A coil conductor including a first conductor formed on the semiconductor substrate, a second conductor formed on an insulating support substrate, and a connection conductor connecting the first and second conductors, and the coil conductor itself And a magnetic insulator that covers the inside of the coil conductor and fills the inside of the coil conductor. 前記磁性絶縁基板が、フェライト基板であることを特徴とする請求項１に記載の超小型電力変換装置。The micro power converter according to claim 1, wherein the magnetic insulating substrate is a ferrite substrate. 前記コイル導体表面を絶縁膜もしくは磁性を有する微粒子を分散させた樹脂で被覆することを特徴とする請求項１に記載の超小型電力変換装置。The micro power converter according to claim 1, wherein the surface of the coil conductor is covered with an insulating film or a resin in which fine particles having magnetism are dispersed. 前記磁性絶縁体が、磁性を有する微粒子を分散させた樹脂であることを特徴とする請求項２に記載の超小型電力変換装置。The micro power converter according to claim 2, wherein the magnetic insulator is a resin in which fine particles having magnetism are dispersed. 前記薄膜磁気誘導素子が、無端ソレノイドもしくは非無端ソレノイドのいずれかで構成されること特徴とする請求項１または２に記載の超小型電力変換装置。3. The microminiature power converter according to claim 1, wherein the thin-film magnetic induction element is formed of one of an endless solenoid and an endless solenoid. 前記半導体基板と前記薄膜磁気誘導素子とをバンプ電極を介して接続することを特徴とする請求項１に記載の超小型電力変換装置。The microminiature power converter according to claim 1, wherein the semiconductor substrate and the thin-film magnetic induction element are connected via a bump electrode. 前記半導体基板面に形成した前記第１導体上にバンプ電極を形成し、前記絶縁支持基板上に形成した第２導体上に接続導体を形成し、該接続導体と前記バンプ電極とを接続することを特徴とする請求項２に記載の超小型電力変換装置。Forming a bump electrode on the first conductor formed on the semiconductor substrate surface, forming a connection conductor on a second conductor formed on the insulating support substrate, and connecting the connection conductor to the bump electrode; The micro power converter according to claim 2, characterized in that: 前記絶縁支持基板が、セラミック基板であることを特徴とする請求項２に記載の超小型電力変換装置。3. The micro power converter according to claim 2, wherein the insulating support substrate is a ceramic substrate. 前記コンデンサが、積層セラミックコンデンサアレイ基板であることを特徴とする請求項１または２に記載の超小型電力変換装置。3. The micro power converter according to claim 1, wherein the capacitor is a multilayer ceramic capacitor array substrate. 前記積層セラミックコンデンサアレイ基板と、前記薄膜磁気誘導素子と、前記半導体基板とをそれぞれ積層して接続することを特徴とする請求項１に記載の超小型電力変換装置。2. The microminiature power converter according to claim 1, wherein the multilayer ceramic capacitor array substrate, the thin-film magnetic induction element, and the semiconductor substrate are respectively stacked and connected. 前記積層セラミックコンデンサアレイ基板と、前記絶縁セラミック基板と、前記薄膜磁気誘導素子と、前記半導体基板とをそれぞれ積層して接続することを特徴とする請求項２に記載の超小型電力変換装置。3. The microminiature power converter according to claim 2, wherein the multilayer ceramic capacitor array substrate, the insulating ceramic substrate, the thin-film magnetic induction element, and the semiconductor substrate are respectively stacked and connected. 磁性絶縁基板に複数の貫通孔を形成する工程と、該貫通孔を導電性材料を充填して複数の接続導体を形成する工程と、前記磁性絶縁基板の表面と裏面に表面側コイル導体となる複数の第１導体と裏面側コイル導体となる複数の第２導体をそれぞれ形成する工程と、一つの第１導体の一端と一つの第２導体の一端の位置を合わせて一つの接続導体と接続し、他端をずらし、該他端が無端ソレノイドもしくは非無端ソレノイドの終端となるものを除き、前記一つの第１導体の他端を前記一つの第２導体とは別の第２導体の一端と位置を合わせて前記一つの接続導体とは別の接続導体で接続し、前記一つの第２導体の他端を前記一つの第１導体とは別の第１導体の一端と位置を合わせて前記接続導体とは別の接続導体により接続して、無端ソレノイドもしくは非無端ソレノイドを形成する工程と、第１、第２導体表面を絶縁膜もしくは磁性を有する微粒子を分散させた樹脂で被覆する工程とを含むことを特徴とする超小型電力変換装置の製造方法。Forming a plurality of through holes in the magnetic insulating substrate, filling the through holes with a conductive material to form a plurality of connection conductors, and forming a front-side coil conductor on the front and back surfaces of the magnetic insulating substrate. A step of forming a plurality of first conductors and a plurality of second conductors to be backside coil conductors, respectively, and aligning one end of one first conductor with one end of one second conductor to connect to one connection conductor; The other end is shifted, and the other end of the one first conductor is connected to one end of a second conductor different from the one second conductor, except that the other end is an endless solenoid or an endless solenoid. And the one connection conductor is connected with another connection conductor, and the other end of the one second conductor is aligned with one end of a first conductor different from the one first conductor. An endless solenoid is connected by a connection conductor different from the connection conductor. Alternatively, a method for manufacturing an ultra-small power converter, comprising a step of forming an endless solenoid and a step of coating the first and second conductor surfaces with an insulating film or a resin in which magnetic fine particles are dispersed. . 絶縁基板上に裏面側コイル導体となる第２導体を形成する工程と、該第２導体の端部上に接続導体を形成する工程と、該第２導体表面を磁性を有する微粒子を分散させた樹脂で被覆する工程と、表面側コイル導体となる第１導体を半導体チップ面に形成し、該第１導体の両端上に突起導体を形成する工程と、該突起導体と前記接続導体とを固着させて無端ソレノイドもしくは非無端ソレノイドを形成する工程とを含むことを特徴とする超小型電力変換装置の製造方法。Forming a second conductor to be a backside coil conductor on the insulating substrate; forming a connection conductor on an end of the second conductor; and dispersing magnetic fine particles on the surface of the second conductor. A step of coating with a resin, a step of forming a first conductor to be a surface-side coil conductor on the semiconductor chip surface, and forming projecting conductors on both ends of the first conductor, and fixing the projecting conductor and the connection conductor Forming an endless solenoid or an endless solenoid. 半導体集積回路の形成された半導体基板と、薄膜磁気誘導素子と、コンデンサとを有する超小型電力変換装置において、
半導体基板と薄膜磁性誘素子を形成する磁性絶縁基板とが積層一体化され、半導体基板に形成された集積回路の外部導出端子が、少なくとも磁気絶縁基板に形成された端子を経由して外部回路と接続することを特徴とする超小型電力変換装置。In a micro power converter having a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin-film magnetic induction element, and a capacitor,
A semiconductor substrate and a magnetic insulating substrate forming a thin-film magnetic induction element are laminated and integrated, and an external lead terminal of an integrated circuit formed on the semiconductor substrate is connected to an external circuit via at least a terminal formed on the magnetic insulating substrate. An ultra-compact power conversion device characterized by being connected.
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