JP2004071403A - Method of manufacturing organic el element, organic el element, and organic el display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL element, capable of patterning an organic luminescent layer without using a resist, and to provide the organic EL element and an organic EL display device. <P>SOLUTION: This method of manufacturing an EL element has a process to form a first electrode 2 on a substrate (an insulating substrate) 1, a process to form a first coating film 4 for a first organic luminescent layer on the first electrode 2 and the substrate 1, an insolvilizing process to insolvilize the first coating film 4 on the first electrode 2 by making the first electrode 2 generate heat and by selectively heating it by the generated heat, and a process to expose the first coating film 4 in a liquid after the insolvilizing process, to selectively remove the first coating film 4 of the portion which has not been insolvilized by dissolving it, and to leave the first coating film 4 of the insolvilized portion on the first electrode 2 as the first organic luminescent layer 4a. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an organic EL (electro luminescence) element, a method of manufacturing the same, and an organic EL display device in which a plurality of organic EL elements are arranged.
[0002]
[Prior art]
In recent years, an organic EL element has attracted attention as a light-emitting element that emits visible light and can be driven at a low voltage. The organic EL element also has an advantage that it can be manufactured by a simple manufacturing process as compared with a conventional inorganic EL element.
[0003]
In addition, a display device using an organic EL element has no viewing angle dependency, has a high response speed, and does not require a backlight, as compared with a liquid crystal display device that has been widely used in the past. Therefore, there is an advantage that the weight can be reduced. Further, since the organic EL element is a solid-state element, it has an advantage of being resistant to impact.
[0004]
[Problems to be solved by the invention]
By the way, as the organic light emitting layer of the above-mentioned organic EL device, for example, a polymer material doped with a dye is used, which is usually formed by a spin coating method.
[0005]
However, when the organic light emitting layer is formed by the spin coating method as described above, it is necessary to pattern the organic light emitting layer for each electrode after the application, and when a resist for patterning is applied on the organic light emitting layer, the organic light emitting layer is formed. The light-emitting layer and the resist are mixed with each other, so that the organic light-emitting layer cannot be patterned as desired. Further, there is also a disadvantage that the organic light emitting layer is damaged by the ultraviolet light for exposure. These inconveniences are a major obstacle to realizing the formation of the organic light emitting layer by spin coating.
[0006]
The present invention has been made in view of the problems of the related art, and provides a method of manufacturing an organic EL element, an organic EL element, and an organic EL display device that can pattern an organic light emitting layer without using a resist. The purpose is to:
[0007]
[Means for Solving the Problems]
The above-described problem is a step of forming an electrode on an insulating substrate, a step of forming a coating film for an organic light emitting layer on the electrode and the insulating substrate, and causing the electrode to generate heat by electromagnetic induction, An insolubilizing step of selectively heating and insolubilizing the coating film on the electrode by the heat generation, and exposing the coating film to a liquid after the insolubilizing step to selectively dissolve the coating film in a non-insolubilized portion. And removing the insolubilized portion of the coating film as an organic light emitting layer on the electrode while removing the insolubilized portion on the electrode.
[0008]
Hereinafter, the operation of the present invention will be described.
[0009]
According to the present invention, by heating an electrode using electromagnetic induction, a coating film on the electrode is selectively insolubilized to form an organic light emitting layer, and thereafter, a coating film of a non-insolubilized portion is selectively formed. , The organic light emitting layer can be selectively left on the electrode, and there is no need to pattern the coating film using a resist as in the conventional example.
[0010]
Further, by using the electromagnetic induction, the electrode made of a conductor can be selectively heated, while the temperature of the insulating substrate made of an insulator can be prevented from rising, so that the insulating substrate may be deformed by heat. There is no. Therefore, in the process after the formation of the organic light emitting layer, there is no need to take a design in consideration of misalignment due to thermal deformation of the insulating substrate.
[0011]
Moreover, by using electromagnetic induction, heating can be started immediately from the time when the electrodes are exposed to the magnetic field for electromagnetic induction, and there is no time delay in heating. Since the degree of heating is substantially determined only by the interaction between the magnetic field and the electrode, the electrode can be heated with good reproducibility.
[0012]
In particular, when a magnetic conductive film or a laminated film including the magnetic conductive film is used as an electrode and heat generation due to hysteresis loss is used, the temperature rise of the electrode becomes slow at the boundary of the Curie temperature of the magnetic conductive film. The Curie temperature can be a substantial upper limit of the temperature of the electrode, and the temperature control of the electrode becomes accurate.
[0013]
Further, the above-mentioned electrode, a step of forming a transparent conductor pattern on the insulating substrate, a step of forming a resist pattern smaller than the upper surface of the transparent conductor pattern on the upper surface of the transparent conductor pattern, The transparent conductive pattern is immersed in a plating solution in a state where the conductive pattern remains, and a conductive film is formed on the side wall and the edge of the upper surface of the transparent conductive pattern by electrolytic plating or electroless plating, and the conductive film and the conductive pattern are formed. May be formed by performing a step of using the above as the electrode and a step of removing the resist pattern.
[0014]
Then, the conductive film formed on the side wall of the transparent conductor pattern generates heat by electromagnetic induction, and the coating film on the electrode is insolubilized to become an organic light emitting layer. In this method, by using an optically transparent insulating substrate, light from the organic light emitting layer can be extracted to the outside of the device through the transparent conductor pattern and the insulating substrate. An organic EL device is provided.
[0015]
Further, by forming the conductive film on the side wall and the edge of the upper surface of the transparent conductive pattern in this way, the resistance of the electrode formed of the transparent conductive pattern and the conductive film is reduced.
[0016]
Alternatively, instead of such a method for forming an electrode, the above-mentioned electrode is formed on the insulating substrate by a step of forming a transparent conductive film; a step of forming a resist pattern on the transparent conductive film; Etching the transparent conductive film into a transparent conductor pattern while using as an etching mask, immersing the transparent conductor pattern in a plating solution in a state where the resist pattern remains, and side walls of the transparent conductor pattern by electrolytic plating. May be formed by performing a step of using the conductive film and the transparent conductor pattern as the electrode and a step of removing the resist pattern. Also in this case, an optically transparent substrate is used as the insulating substrate.
[0017]
According to this method, the resist formed for patterning the transparent conductor pattern is not removed, and plating is performed in a state where the resist remains to form a conductive film on the side wall of the transparent conductor pattern. A new forming step is not required.
[0018]
Alternatively, the above-described problems include a step of forming an electrode on an insulating substrate, a step of forming a coating film for an organic light-emitting layer on the electrode and the insulating substrate, and a conductor pattern facing the electrode. Bringing the conductive pattern close to or in contact with the coating film, and causing the conductive pattern to generate heat by electromagnetic induction, and selectively heating and insolubilizing the coating film on the electrode facing the conductive pattern by the heat generation. And after the insolubilizing step, exposing the coating film to a liquid, and selectively dissolving and removing the non-insolubilized portion of the coating film, and forming the insolubilized portion of the coating film as an organic light emitting layer as the electrode. And a method of manufacturing the organic EL device.
[0019]
Next, the operation of the present invention will be described.
[0020]
According to the present invention, instead of causing the electrode on the insulating substrate to generate heat, the conductor pattern facing the electrode is brought into contact with or close to the coating film, and then the conductor pattern is heated by electromagnetic induction, thereby causing the electrode to generate heat. The coating is selectively heated to insolubilize it. As described above, since the electrode does not play the role of heating the coating film, the degree of freedom in designing the electrode is increased, and the electrode can be designed as desired.
[0021]
In any of the above inventions, the electrode may be heated to a temperature higher than room temperature using an auxiliary heating means during or before the insolubilization step. This allows the electrodes to be heated to a desired temperature by a lower frequency alternating magnetic field.
[0022]
Furthermore, in any of the above-mentioned inventions, performing the insolubilization step in a vacuum or in an atmosphere of an inert gas can prevent the organic luminescent layer from being exposed to oxygen or water to deteriorate its characteristics.
[0023]
Alternatively, the above-described problems include a step of forming an electrode on an insulating substrate, a step of selectively printing a coating film for an organic light-emitting layer on the electrode, and causing the electrode to generate heat by electromagnetic induction. Heating the coating film on the electrode to form an organic light emitting layer.
[0024]
Next, the operation of the present invention will be described.
[0025]
According to the present invention, since a coating film is formed on an electrode by printing, there is no need to pattern the coating film using a resist as in the related art.
[0026]
Alternatively, the above object is to form a first electrode on an insulating substrate,
Forming a second electrode, which generates heat at a higher temperature than the first electrode upon electromagnetic induction, on the insulating substrate; and selectively forming a first coating film for a first organic light emitting layer on the first electrode. Printing a second coating film for the second organic light emitting layer having a higher insolubilizing temperature than the first coating film on the second electrode; and printing the first electrode and the second coating film on the second electrode. The second electrode is heated at a higher temperature than the first electrode by electromagnetic induction with respect to the two electrodes, and the generated heat heats the first coating film on the one electrode to form a first organic light emitting layer. Heating the second coating film on the second electrode to form a second organic light emitting layer.
[0027]
Next, the operation of the present invention will be described.
[0028]
According to the present invention, since the first and second coating films are formed on the first and second electrodes by printing, there is no need to pattern the first and second coating films using a resist as in the related art. .
[0029]
In addition, it is not necessary to separately perform the insolubilization step on the first and second coating films, and the first and second coating films can be collectively insolubilized in a single insolubilization step, thus complicating the process. Is prevented.
[0030]
Furthermore, since the amount of heat generated by the electromagnetic induction is made different between the first electrode and the second electrode, the first and second coating films are insolubilized at an optimum temperature for each of the first and second coating films.
[0031]
Alternatively, the above-described problem is caused by a step of forming a first electrode on an insulating substrate, and a step of generating heat at a lower temperature than the first electrode for a first excitation frequency and for generating a second excitation frequency. Forming a second electrode that generates heat at a higher temperature than the first electrode on the insulating substrate; and forming a first coating film for a first organic light emitting layer on the first electrode, the second electrode, and Forming on the insulating substrate, placing the insulating substrate in a magnetic field of the first excitation frequency, and causing the first electrode to generate heat at a higher temperature than the second electrode by electromagnetic induction; A first insolubilizing step of heating and selectively insolubilizing the first coating film on the first electrode, and after the first insolubilizing step, exposing the first coating film to a liquid to form a non-insolubilized portion of the first coating film. The first coating is selectively dissolved and removed, and the first coating of the insolubilized portion is removed. Leaving on the first electrode as the first organic light emitting layer, and forming a second coating film for the second organic light emitting layer on the second electrode, on the first organic light emitting layer, and on the insulating substrate. And placing the insulating substrate in a magnetic field of the second excitation frequency, causing the second electrode to generate heat at a higher temperature than the first electrode by electromagnetic induction, and generating heat on the second electrode. A second insolubilizing step of selectively insolubilizing the second coating film by heating the second coating film, and after the second insolubilizing step, exposing the second coating film to a liquid to remove a portion of the second coating film that is not insolubilized. Selectively dissolving and removing and leaving an insolubilized portion of the second coating film as the second organic light emitting layer on the second electrode. Solved by the way.
[0032]
Next, the operation of the present invention will be described.
[0033]
According to the present invention, the first electrode and the second electrode are formed on an insulating substrate. Among them, the second electrode generates heat at a lower temperature than the first electrode at the first excitation frequency and generates heat at a higher temperature than the first electrode at the second excitation frequency due to electromagnetic induction. By using such first and second electrodes, the first and second organic light-emitting layers emitting different colors are formed on the first and second electrodes while using a simple coating method such as spin coating. Painted in a self-aligned manner.
[0034]
In addition, a laminated film of a magnetic conductive film and a non-magnetic conductive film is used for both the first electrode and the second electrode, and the thickness of the non-magnetic conductive film in the first electrode is changed to the thickness of the non-magnetic film in the second electrode. By making the thickness greater than the thickness of the conductive film, the amount of heat generated by the first electrode and the second electrode can be made different depending on the excitation frequency.
[0035]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0036]
(1) First embodiment
First, steps required until a sectional structure shown in FIG.
[0037]
First, a resist mask (not shown) in which a cathode-shaped opening is formed is formed on a substrate 1 made of an insulator such as glass, and Fe, Co, Ni is formed by an electron beam evaporation method using the resist mask as a mask. , Gd, Tb, etc., are deposited on the substrate 1 and then the resist mask is removed to leave the magnetic metal as a cathode-shaped magnetic conductive film 3a on the substrate. The thickness of the magnetic conductive film 3a is about 50 to 500 nm. In addition, the magnetic conductive film 3a is not limited to the above-mentioned metals, and may be a film made of any of an iron group element, a rare earth element, and a magnetic metal oxide. Of these, EuO and CrO are used as magnetic metal oxides. ₂ Etc.
[0038]
Next, using a shadow mask (not shown) in which a cathode-shaped opening is formed, a nonmagnetic conductive material such as an aluminum film is separately formed on a part of the substrate 1 and on the magnetic conductive film 3a by an electron beam evaporation method. A film is selectively formed to a thickness of about 20 to 1000 nm, the non-magnetic conductive film is used as the first cathode 2 and the coating film 3b, and a laminated film of the coating film 3b and the magnetic conductive film 3a is further formed. The second cathode 3 is used. As the nonmagnetic conductive film, any one of an aluminum alloy film, a magnesium film, and a magnesium alloy film may be used instead of the aluminum film.
[0039]
By using a metal having a small work function, such as aluminum, as the coating film 3b, a potential barrier for electron injection between the organic light emitting layer formed later thereon and the coating film 3b can be reduced. In addition, electrons can be efficiently injected from the second cathode 3 into the organic light emitting layer.
[0040]
Next, steps required until a sectional structure shown in FIG.
[0041]
First, a solution is prepared by dissolving the precursor of the organic light emitting layer in a solvent such as water or acetone, and the solution is spin-coated on the first cathode 2, the second cathode 3, and the substrate 1, Thereafter, the solvent component is dried to form a first coating film 4 for a first organic light emitting layer having a thickness of about 50 to 1000 nm.
[0042]
As such a first coating film 4, a film which becomes insoluble in a solvent when heated to a certain temperature (insolubilizing temperature) or higher is used. Hereinafter, the insolubilizing temperature of the first coating film 4 is defined as T1, and a sulfonium salt polymer which is a precursor of poly-p-phenylenevinylene (PPV) having an insolubilizing temperature T1 of about 150 to 300 ° C. is used as the above-described precursor. . This poly-p-phenylene vinylene becomes a yellow-green light emitting layer.
[0043]
Next, steps required until a sectional structure shown in FIG. First, the first cathode 2 and the second cathode 3 are exposed to an alternating magnetic field B generated by the alternating magnetic field generator shown in FIG. The alternating magnetic field generator has an exciting circuit 70 and a coil 8 connected to the exciting circuit 70. The intensity of the alternating magnetic field B can be arbitrarily varied by changing the magnitude of the alternating current supplied by the exciting circuit 70. .
[0044]
When each of the cathodes 2 and 3 (FIG. 1 (c)) is exposed to the alternating magnetic field B, they generate heat by electromagnetic induction. The mechanism of the heat generation is caused by hysteresis loss and eddy current. It is divided into two types, one due to resistance loss.
[0045]
Heat generation due to hysteresis loss occurs when a magnetic metal (eg, an iron group element, an iron group element, and a rare earth element) or a magnetic metal oxide is placed in an alternating magnetic field. Is shown.
[0046]
Ph∝ (maximum magnetic flux density) ^1.6 × (volume of magnetic metal) × (excitation frequency) ・ ・ ・ (1)
On the other hand, the loss due to the resistance loss occurs when an arbitrary conductor is placed in an alternating magnetic field, and the heat value Pr is represented by the following equation.
[0047]
Pr∝ (magnetic permeability) ² × (conductivity) × (area of conductor) ² × (thickness of conductor) ³ × (excitation frequency) ² × (current flowing through coil 8) ² ... (2)
Equation (2) is a result obtained when a cylindrical non-magnetic metal is placed in the coil 8 and the magnetic field inside the metal is approximated to be uniform. In this case, the shape of each of the cathodes 2 and 3 is a quadrangular prism, but the calorific value may be approximated by the equation (2).
[0048]
For magnetic metals, the sum of the above Ph and Pr is the total heating value, while for non-magnetic metals, Pr is the total heating value.
[0049]
In this case, since the first cathode 2 is made of aluminum which is a non-magnetic metal, its total heat generation P ⁽¹⁾ Is the heat value Pr due to resistance loss ⁽¹⁾ Is equal to
[0050]
On the other hand, since the second cathode 3 has the magnetic conductive film 3a made of a magnetic metal, the heat value Ph due to the hysteresis loss is generated. ⁽²⁾ And heat generation due to resistance loss Pr ⁽²⁾ Sum with ⁽²⁾ + Pr ⁽²⁾ Is the total heat value P ⁽²⁾ It becomes.
[0051]
Total calorific value P of each electrode ⁽¹⁾ , P ⁽²⁾ Is as shown in FIG. P ⁽¹⁾ Consists only of the amount of heat generated by resistance loss, and from equation (1), it consists only of the square of the excitation frequency. On the other hand, P ⁽²⁾ Includes the square of the excitation frequency in Equation (2) in addition to the square of the excitation frequency. Therefore, if parameters other than the excitation frequency in the equations (1) and (2) are appropriately set, P ⁽¹⁾ And P ⁽²⁾ Has an intersection as shown in the figure, and the frequency f of the intersection ₀ (Hereinafter referred to as a boundary frequency), the heat generated by each of the cathodes 2 and 3 is inverted, and one of the cathodes 2 and 3 generates heat more dominantly than the other.
[0052]
Utilizing such a property, in the step of FIG. ₀ Higher first excitation frequency f ₁ Is used, the first cathode 2 is heated to a temperature higher than T1 while suppressing the heating temperature of the second cathode 3 to a temperature lower than the insolubilizing temperature T1 of the first coating film 4 (first insolubilizing step). As a result, the first coating film 4 is selectively insolubilized on the first cathode 2 to become the first organic light emitting layer 4a, while the coating film 4 is not insolubilized on the second cathode 3.
[0053]
Therefore, when the first coating film 4 is exposed to a liquid such as water or acetone, the first organic light emitting layer 4a is selectively left on the first cathode 2 while the first organic light emitting layer 4a is selectively left on the first cathode 2, as shown in FIG. The coating film 4 will be removed.
[0054]
Since the first organic light emitting layer 4a deteriorates its characteristics when exposed to oxygen or moisture, the first insolubilization step (FIG. 1 (c)) is performed in a vacuum (at a pressure of about 0.1 Torr or less) or a nitrogen gas. It is preferably performed in an inert gas atmosphere (atmospheric pressure).
[0055]
Further, since Pr is proportional to the electrical conductivity as in the equation (2), in order to make the heat generation of the first cathode 2 dominant, the resistivity (the reciprocal of the electrical conductivity) of the material of the first cathode should be as small as possible. Preferably, it is smaller. Practically, it is preferable to use a nonmagnetic metal having a resistivity of 1 mΩcm or less for the first cathode 2.
[0056]
Further, it is preferable to use a frequency of the alternating magnetic field B of 3 kHz to 400 kHz. The reason why the upper limit of the frequency is set to 400 kHz is that at a frequency higher than this, radiated noise increases. The reason why the lower limit of the frequency is set to 3 kHz is that the heating efficiency (absorption of the magnetic flux in each of the cathodes 2 and 3) decreases at a lower frequency. As a general guide, it is preferable to use the heat generation Ph due to hysteresis loss at 10 kHz or less, and to use the heat generation Pr due to resistance loss at higher frequencies.
[0057]
Next, as shown in FIG. 2A, the second coating film is formed on the first organic light emitting layer 4 a, the second cathode 3, and the substrate 1 by using the same method as the formation method of the first coating film 4. 5 is formed. As the second coating film 5, similarly to the first coating film 4, a film which is insolubilized in a solvent when heated to a temperature higher than the insolubilization temperature is used. However, as the second coating film 5, a coating material whose insolubilizing temperature T2 is lower than the insolubilizing temperature T1 of the first coating film 4 (T2 <T1) is used. The reason will be described later. As such a precursor for the second coating film 5, for example, one obtained by substituting ethoxy groups at positions 2 and 5 of the benzene ring in a sulfonium salt polymer, which is a precursor of poly (p-phenylenevinylene) (PPV), is used. is there. This precursor has an insolubilizing temperature of about 50 to 150 ° C. and becomes a red-orange light emitting layer.
[0058]
Next, steps required until a sectional structure shown in FIG. First, an alternating magnetic field B is generated by the aforementioned alternating magnetic field generator (see FIG. 3), and each of the cathodes 2 and 3 is exposed to the alternating magnetic field B.
[0059]
At this time, the excitation frequency f ₀ Second excitation frequency f lower than (see FIG. 4) ₂ Is used, the second cathode 3 is heated above T2 while the heating temperature of the first cathode 2 is kept lower than the insolubilizing temperature T2 of the second coating film 5, and the second cathode 3 on the second cathode 3 is heated. The coating film 5 is selectively insolubilized into a second organic light emitting layer 5a (second insolubilization step).
[0060]
By the way, since the first organic light emitting layer 4a is made of an organic substance, it is not preferable to heat the first organic light emitting layer 4a to a temperature higher than the insolubilization temperature T1 after insolubilization.
[0061]
Therefore, in the present embodiment, as described above, in order from the coating film having the higher insolubilizing temperature, that is, first, the first coating film 4 (insolubilizing temperature T1) is insolubilized into the first light emitting layer 4a, and then the second coating film is formed. 5 (insolubilization temperature T2 <T1). In this case, when the second coating film 5 is insolubilized, the heating temperature of the first cathode 2 is suppressed to T2 or lower, so that the first cathode 2 is not heated to a temperature higher than T1, and It is possible to prevent the first organic light emitting layer 4a from being heated to a temperature higher than T1.
[0062]
Next, by exposing the second coating film 5 to a liquid such as water or acetone, the second organic light emitting layer 5a is left on the second cathode 3 as shown in FIG. 5 is removed.
[0063]
Note that, as in the case of the first organic light emitting layer 4a, the second organic light emitting layer 5a also has a deteriorated characteristic when exposed to oxygen or moisture, so that the above-mentioned second insolubilization step (FIG. 2B) is performed under vacuum. It is preferably performed in an atmosphere of an inert gas such as nitrogen or nitrogen.
[0064]
Next, as shown in FIG. 2D, a transparent conductive film is formed on the first and second cathodes 2 and 3 by an electron beam evaporation method using a shadow mask (not shown) in which an anode-shaped opening is formed. Are formed to a thickness of about 80 nm, and these are used as first and second anodes 6 and 7.
[0065]
The organic EL device according to the present embodiment is completed by the steps described above. This organic EL element has a top emission type in which the first organic light emitting layer 4a emits yellow-green light, the second organic light emitting layer 5a emits red-orange light, and the two colors of light emit above the substrate 1. Element.
[0066]
According to the embodiment described above, the first and second organic light emitting layers 4a and 5a can be selectively left on the first and second cathodes 2 and 3 without using a resist for patterning. Therefore, there is no disadvantage that the resist and the light emitting layer are mixed with each other and patterning cannot be performed as in the related art.
[0067]
Moreover, the upper and lower relationship of the heating temperature due to the electromagnetic induction is the boundary frequency f ₀ The first and second organic light emitting layers 4a and 5a emitting light of different colors are formed by using the first cathode 2 and the second cathode 3 which are inverted with respect to each other, using a simple spin coating method. The top can be painted in a self-aligned manner. Therefore, there is no need to perform alignment between the organic light emitting layer and the cathode as in the case where the organic light emitting layer of each color is selectively applied on the corresponding cathode.
[0068]
Further, by using electromagnetic induction, each of the cathodes 2 and 3 made of a conductor can be selectively heated, while the temperature of the substrate 1 made of an insulator can be prevented from rising, so that the substrate 1 is deformed by heat. There is no fear of doing. Therefore, in the process after the formation of the organic light emitting layers 4a and 5a, there is no need to perform a design in which the misalignment due to the thermal deformation of the substrate 1 is taken into account.
[0069]
In addition, by using electromagnetic induction, heating can be started immediately when each of the cathodes 2 and 3 is exposed to the alternating magnetic field B, and there is no time delay in heating. Moreover, since the degree of heating is substantially determined only by the alternating magnetic field B, the cathodes 2 and 3 can be heated with good reproducibility.
[0070]
Furthermore, although the magnetic conductive film 3a is used for the second cathode 3, the magnetic conductive film 3a loses magnetism and becomes a non-magnetic conductive film when heated above its Curie temperature. There is no contribution, and only equation (2) contributes to the heat generation. Therefore, the temperature rise of the second cathode 3 becomes slower at the Curie temperature, so that the Curie temperature can be set to the substantial upper limit of the temperature of the second cathode 3, and the temperature control of the second cathode 3 becomes easy. Thereby, it is possible to prevent the second cathode 3 from being excessively heated and the second coating film 5 thereon from being deteriorated. This advantage can be similarly obtained in all the following embodiments when the magnetic conductive film is heated by electromagnetic induction.
[0071]
The Curie temperature can be continuously adjusted by continuously changing the composition of the magnetic conductive film 3a. For example, the Curie temperature of Ni is 358 ° C., but it is 300 ° C. for Ni 40% -Fe 60% (Permalloy).
[0072]
Further, in the above description, the first cathode 2 is formed of a single layer of non-magnetic conductive film (aluminum film). However, like the second cathode 3, the first cathode 2 is formed of a two-layer of a non-magnetic conductive film and a magnetic conductive film. It may have a structure. In that case, the thickness of the non-magnetic conductive film in the first cathode 2 is made larger than the thickness of the non-magnetic conductive film in the second cathode 3, so that (excitation frequency)-(heat generation amount) having the same tendency as in FIG. ) Characteristics, so that the same advantages as above can be obtained.
[0073]
(2) Second embodiment
Although the organic EL device of the first embodiment is a top emission type, a bottom emission type can also be manufactured according to the present invention. In order to fabricate a bottom emission type, the following process is performed.
[0074]
First, as shown in FIG. 5A, ITO is formed as a transparent conductive film to a thickness of about 150 to 300 nm on a substrate 1 made of an optically transparent insulator such as glass, and is formed by photolithography. By patterning, a first transparent conductor pattern 10 and a second transparent conductor pattern 11 are formed.
[0075]
Next, steps required until a sectional structure shown in FIG. First, a resist pattern 14 that covers the entire second transparent conductor pattern 11 and covers the upper surface of the first transparent conductor pattern 10 is formed by photolithography. The side surfaces of the first transparent conductor pattern 10 are not covered with the resist pattern 14 but are exposed.
[0076]
Next, the substrate 1 and the first conductor pattern 10 are immersed in a plating solution such as a copper sulfate bath (copper sulfate 200 g / l, sulfuric acid 50 g / l, chloride 90 ppm), and the current density is 0.5 A / dm by electrolytic plating. ² A non-magnetic conductive film 12 made of Cu is formed to a thickness of about 200 to 500 nm on the side wall of the first conductive pattern 10 while supplying power to the first conductive pattern 10 and used as the first anode 13 together with the first conductive pattern 10. . At this time, the resist pattern 14 is formed smaller than the upper surface of the first transparent conductor pattern 10 in consideration of an alignment error in photolithography. In this case, the nonmagnetic conductive film 12 is formed not only on the side surface of the first transparent conductor pattern 10 but also on the edge of the upper surface thereof.
[0077]
Next, steps required until a sectional structure shown in FIG. First, a resist pattern 15 that covers the entire first anode 13 and covers the upper surface of the second transparent conductor pattern 11 is formed by photolithography. The side surface of the second transparent conductor pattern 11 is not covered with the resist pattern 15 but is exposed. At this time, as described above, it is preferable that the resist pattern 15 be formed smaller than the upper surface of the second transparent conductor pattern 11.
[0078]
Next, a plating solution such as a nickel-phosphorus bath (30 g / l nickel sulfate, 30 g / l sodium hypophosphite, 60 g / l sodium pyrophosphate, 100 g / l triethanolamine) is applied to the substrate 1 and the second conductor pattern 11. A magnetic conductive film 16 made of Ni is formed on the side wall of the second conductor pattern 11 by electroless plating, and is used as the second anode 17 together with the second conductor pattern 11.
[0079]
As described above, the first anode 13 and the second anode 17 are formed. The first anode 13 has the non-magnetic conductive film 12, and the second anode 17 has the magnetic conductive film 16. Therefore, each of the anodes 13 and 17 is made of a different material. Therefore, the (excitation frequency)-(heat generation amount) characteristics of these anodes 13 and 17 in electromagnetic induction show almost the same tendency as in FIG. ₀ Since the heating temperature is inverted at the boundary, the color of the organic light emitting layer described in the first embodiment can be classified.
[0080]
Therefore, the process proceeds from the next step to the step of color-coding the organic light emitting layer described in the first embodiment.
[0081]
First, steps required until a sectional structure shown in FIG. First, a solution is prepared by dissolving a sulfonium salt polymer, which is a precursor of the above-mentioned poly-p-phenylenevinylene (PPV), in a solvent such as water or acetone, and is applied over the entire surface by spin coating. After the application, the solution is dried to form a first coating film 18 (insolubilizing temperature T1) for the first organic light emitting layer.
[0082]
Next, as shown in FIG. ₀ By electromagnetic induction using a higher first excitation frequency, the first anode 13 is heated to a temperature higher than the insolubilization temperature T1 while suppressing the second anode 17 from becoming higher than the insolubilization temperature T1. The first coating film 18 on the one anode 13 is selectively insolubilized to form a first organic light emitting layer 18a. The first organic light emitting layer 18a emits yellow-green light.
[0083]
Subsequently, by exposing the first coating film 18 to a liquid such as water or acetone, as shown in FIG. 6B, the portion of the first coating film 18 that has not been insolubilized is removed, and the first organic light emission is performed. The layer 18a is selectively left on the first anode 13.
[0084]
Next, steps required until a sectional structure shown in FIG. First, a solution is prepared by dissolving a polymer in which sulfonium salt polymer, which is a precursor of poly-p-phenylenevinylene (PPV), in which the benzene ring is substituted with an ethoxy group at the 2- and 5-positions in a solvent such as water or acetone. I do. Next, the solution is spin-coated on the first organic light-emitting layer 18a, the second anode 17, and the substrate 1, and then dried to form a second coating film 19 for the second organic light-emitting layer (insolubilization temperature T2 < T1).
[0085]
Next, as shown in FIG. ₀ By electromagnetic induction using a lower second excitation frequency, the second anode 17 is heated to a temperature higher than the insolubilization temperature T2 while suppressing the first anode 13 from becoming higher than the insolubilization temperature T2. The second coating film 19 on the second anode 17 is selectively insolubilized to form a second organic light emitting layer 19a. The second organic light emitting layer 19a emits red-orange light.
[0086]
Subsequently, by exposing the second coating film 19 to a liquid such as water or acetone, as shown in FIG. 7A, the portion of the second coating film 19 that has not been insolubilized is removed, and the second organic light emission is performed. The layer 19a is selectively left on the second anode 17.
[0087]
Next, steps required until a sectional structure shown in FIG. First, an alloy film of aluminum and lithium (Al-Li) is formed on the first and second organic light emitting layers 18a and 19a by an electron beam evaporation method using a shadow mask (not shown) in which a cathode-shaped opening is formed. Film) is formed to a thickness of about 50 nm. Next, an aluminum film is formed to a thickness of about 250 nm on the Al-Li film by an electron beam evaporation method using a shadow mask. Then, the stacked film of the Al—Li film and the aluminum film is used as the first cathode 20 and the second cathode 21. By using a metal having a small work function such as Al-Li for each of the cathodes 20 and 21, a potential barrier between each of the cathodes 20 and 21 and each of the organic light emitting layers 18a and 19a can be reduced. Electrons can be efficiently injected into the light emitting layers 18a and 19a.
[0088]
The organic EL device according to the present embodiment is completed by the steps described above.
[0089]
According to the above-described embodiment, there is provided a bottom emission type element capable of extracting light from each light emitting layer 18a, 19a to the outside through each transparent conductor pattern 10, 11 and the optically transparent substrate 1. be able to.
[0090]
In addition, since the nonmagnetic conductive film 12 and the magnetic conductive film 16 are not used as hole injection electrodes, their work functions do not need to be small, and the selection of their materials is relatively free.
[0091]
Further, as the transparent conductor patterns 10 and 11, those having electric resistance about two orders of magnitude higher than those of ordinary conductors, such as ITO, are used. Is provided, the resistance of each of the anodes 13 and 17 can be reduced. Therefore, when the anodes 13 and 17 function as bus lines as in a simple matrix display device, the resistance of the bus lines is reduced. And the deformation of the signal waveform is prevented as much as possible, so that the display area can be enlarged.
[0092]
(3) Third embodiment
In the above-described second embodiment, a bottom emission type organic EL element emitting two colors is manufactured. In the present invention, in addition to the two-color light emitting element, a bottom emission type organic EL element of single color light emission can be manufactured. Hereinafter, this will be described.
[0093]
First, steps required until a sectional structure shown in FIG. First, ITO is formed as a transparent conductive film to a thickness of about 300 nm on a substrate 1 made of an optically transparent insulator such as glass, and a resist pattern 23 is formed thereon. Using the resist pattern 23 as an etching mask, the transparent conductive film is patterned by wet etching using oxalic acid to form a plurality of transparent conductor patterns 22.
[0094]
Next, steps required until a sectional structure shown in FIG. First, the transparent conductor pattern 22 in which the resist pattern 23 remains is immersed in a plating solution such as a nickel-phosphorus bath, and a conductive film 24 made of Ni is formed on the side wall of each transparent conductor pattern 22 by electroless plating. It is used as the anode 25 together with the transparent electrode pattern 22. In the present embodiment, since the organic light emitting layers are not separately applied, a common material may be used for the conductive film 24 of each anode 25.
[0095]
In this plating, since the resist pattern 23 used at the time of forming the transparent conductor pattern 22 functions as a plating resist, it is not necessary to form a new resist for plating as in the second embodiment. The conductive film 24 can be formed on the sidewall of the transparent conductive pattern 22 in a self-aligned manner.
[0096]
Next, as shown in FIG. 8C, a coating solution for an organic light emitting layer is applied to the entire surface by spin coating, and dried to form a coating film 26. Examples of such a coating solution for the coating film 26 include a sulfonium salt polymer which is a precursor of p-phenylenevinylene (PPV) described in the first embodiment, and a 2- or 5-position benzene ring of the polymer. Examples thereof include those in which a sulfonium salt polymer or the like, which is a precursor of a PPV derivative substituted with an ethoxy group, is dissolved in the above-described solvent.
[0097]
In the present embodiment, since the organic light emitting layers are not separately applied, it is not necessary to particularly care about the insolubilization temperature of the coating film 26.
[0098]
Next, as shown in FIG. 8D, each anode 25 is exposed to the magnetic field B generated by the aforementioned alternating magnetic field generating section (FIG. 3), and the anode 25 is heated by electromagnetic induction to a temperature higher than the insolubilizing temperature of the coating film 26. Heat to As a result, the coating film 26 on the anode 25 is selectively heated and insolubilized to form the organic light emitting layer 26a.
[0099]
As described above, by performing this insolubilization step in a vacuum or in an atmosphere of an inert gas, it is possible to prevent the characteristics of the organic light emitting layer 26a from being deteriorated by oxygen or moisture.
[0100]
Subsequently, by exposing the coating film 26 to a liquid such as water as described above, as shown in FIG. 9A, the coating film 26 in the non-insolubilized portion is dissolved and removed, and the organic light emitting layer 26a is removed. Leave on each anode 25.
[0101]
Next, steps required until a sectional structure shown in FIG. First, an alloy film of aluminum and lithium (Al-Li film) having a thickness of about 500 nm is formed on each organic light emitting layer 26a by an electron beam evaporation method using a shadow mask (not shown) having a cathode-shaped opening. It is formed to a thickness of about 50 nm. Next, an aluminum film is formed to a thickness of about 250 nm on the Al-Li film by an electron beam evaporation method using the same shadow mask as described above. Then, the laminated film of the Al-Li film and the aluminum film is used as the cathode 27.
[0102]
Through the steps so far, the monochromatic organic EL device according to the present embodiment is completed.
[0103]
According to the present embodiment, a bottom emission type organic EL device can be manufactured as in the second embodiment, and the same advantages as in the second embodiment can be obtained. Moreover, in the present embodiment, since the color of the organic light emitting layer 26a is not determined, the resist pattern 23 used for patterning the transparent conductor pattern 22 can be used as it is as a plating resist. Therefore, a new resist for forming the conductive film 24 on the side wall of the transparent conductor pattern 22 is not required, so that it is possible to prevent an increase in the number of steps and a complicated process.
[0104]
(4) Fourth embodiment
Next, a method for manufacturing an organic EL device according to a fourth embodiment of the present invention will be described.
[0105]
First, steps required until a sectional structure shown in FIG. First, ITO is formed to a thickness of about 150 nm as a transparent conductive film on a substrate 1 made of an insulator such as glass, and is patterned by photolithography to form a red anode 30R, a blue anode 30B, and a green anode 30R. The anode is 30G.
[0106]
Next, steps required until a sectional structure shown in FIG. First, a coating liquid for a red organic light-emitting layer is applied on each of the anodes 30R to 30G and the substrate 1 to a thickness of about 500 nm by spin coating, and dried to form a red coating film 31 (insolubilizing temperature T1). ). Examples of such a coating solution for the coating film 31 include a precursor of a PPV derivative in which the benzene ring in the sulfonium salt polymer of poly-p-phenylenevinylene (PPV) has been substituted with an ethoxy group at positions 2 and 5 as described above. Some are dissolved in the aforementioned solvents.
[0107]
Separately, an aluminum film having a thickness of, for example, about 1 μm is formed on a heating substrate 32 made of an insulator such as glass, and the aluminum film is patterned to form a conductor pattern 33. A plurality of the conductor patterns 33 are formed at the same interval as the pitch of the anodes of the same color (for example, the red anode 30R).
[0108]
Next, steps required until a sectional structure shown in FIG. First, the heating substrate 32 and the substrate 1 are aligned so that the conductor pattern 33 faces the red anode 30R. Thereafter, the heating substrate 32 is lowered toward the substrate 1, and the conductor pattern 33 is brought into contact with the red coating film 31.
[0109]
Subsequently, by exposing the conductor pattern 33 to the alternating magnetic field B of the first excitation frequency generated in the alternating magnetic field generator (see FIG. 3), the conductor pattern 33 is heated by electromagnetic induction. The heat generation temperature can be adjusted by the first excitation frequency. In this case, the heat generation temperature is equal to or higher than the insolubilizing temperature T1 of the red coating film 31. This selectively insolubilizes the red coating film 31 at the portion where the conductor pattern 33 contacts, and becomes the red organic light emitting layer 31R.
[0110]
When there is a possibility that the red paint film 31 may be damaged by the contact of the conductor pattern 33 with the red paint film 31, the buffer film 36 covering the conductor pattern 33 is attached to the heating substrate as shown in FIG. 32 is preferably formed. It is preferable to use an organic film as such a buffer film 36. For example, a resist having a thickness of about 1 μm can be used. This is the same in the subsequent steps.
[0111]
Further, in the above, the conductor pattern 33 is brought into contact with the red coating film 31 to directly heat the red coating film 31. However, the conductor pattern 33 may be brought close to the red coating film 31, The coating film for red 31 can be heated by radiant heat or the like. In this case, the red paint film 31 can be effectively heated by bringing the conductor pattern 33 close to the red paint film 31 at a distance of less than the short side width of the red anode 30R, for example, at a distance of 5 μm or less. . This is the same in the subsequent steps.
[0112]
Thereafter, by exposing the red coating film 31 to the liquid described above, as shown in FIG. 11 (a), the red coating film 31 which is not insolubilized is selectively removed, and the red organic light emitting layer is removed. 31R remains on the red anode 30R.
[0113]
Next, steps required until a sectional structure shown in FIG. First, a coating liquid for a blue organic light emitting layer is applied on the substrate 1 to a thickness of about 500 nm by spin coating, and dried to form a blue coating film 34 (insolubilizing temperature T2). As the coating liquid used in this case, for example, there is a solution in which a precursor of polyparaphenylene (ppp) is dissolved in the above-mentioned solvent.
[0114]
Then, separately from this, a heating substrate 32 on which the above-described conductor pattern 33 is formed is prepared. The heating substrate 32 is shifted in the horizontal direction by one pitch (distance between adjacent anodes 31R to 31G) as compared with the case where the red coating film 31 is heated (FIG. 10B). It is aligned with the substrate 1 so as to face the blue anode 30B.
[0115]
Next, steps required until a sectional structure shown in FIG. First, the heating substrate 32 is lowered toward the substrate 1 with the conductor pattern 33 facing the blue anode 30 </ b> B, and the conductor pattern 33 is brought into contact with the blue coating 34.
[0116]
Subsequently, by exposing the conductor pattern 33 to the alternating magnetic field B of the second excitation frequency generated in the alternating magnetic field generator (see FIG. 3), the conductor pattern 33 is heated by electromagnetic induction, and its temperature is changed to a blue color. The temperature is set higher than the insolubilization temperature T2 of the film 34. This selectively insolubilizes the blue coating film 34 at the portion where the conductor pattern 33 contacts, and becomes the blue organic light emitting layer 34B.
[0117]
Thereafter, by exposing the blue coating film 34 to the liquid described above, the blue coating film 34 which is not insolubilized is selectively removed as shown in FIG. 34B remains on the blue anode 30B.
[0118]
Next, steps required until a sectional structure shown in FIG. First, a coating solution for a green organic light emitting layer is applied on the substrate 1 to a thickness of about 500 nm by spin coating, and dried to form a green coating film 37 (insolubilizing temperature T3). As the coating solution used in this case, for example, a solution obtained by dissolving a sulfonium salt polymer which is a precursor of the above-mentioned poly (p-phenylenevinylene) (PPV) derivative in the above-mentioned solvent is used.
[0119]
Separately, a heating substrate 32 on which the above-described conductor pattern 33 is formed is prepared. The heating substrate 32 is shifted by one pitch in the horizontal direction as compared with the case where the blue coating film 34 is heated (FIG. 11B), so that each conductor pattern 33 faces the green anode 30G. Is aligned with
[0120]
Next, steps required until a sectional structure shown in FIG. First, the heating substrate 32 is lowered toward the substrate 1 with the conductor pattern 33 facing the green anode 30G, and the conductor pattern 33 is brought into contact with the green coating 37.
[0121]
Subsequently, by exposing the conductor pattern 33 to an alternating magnetic field B of a third excitation frequency generated in an alternating magnetic field generator (see FIG. 3), the conductor pattern 33 is heated by electromagnetic induction, and its temperature is changed to a green color. The temperature is set higher than the insolubilizing temperature T3 of the film 37. This selectively insolubilizes the green coating film 37 at the portion where the conductor pattern 33 contacts, and becomes the green organic light emitting layer 37G.
[0122]
Thereafter, by exposing the green coating 37 to the liquid described above, as shown in FIG. 13A, the blue coating 37 not insolubilized is selectively removed, and the green organic light emitting layer is formed. 37G remains on the green anode 30G.
[0123]
Next, steps required until a sectional structure shown in FIG.
[0124]
First, an alloy film of aluminum and lithium (an Al-Li film) is formed on the organic light emitting layers 31R, 34B, and 37G of each color by an electron beam evaporation method using a shadow mask (not shown) having a cathode-shaped opening. ) Is selectively formed to a thickness of about 50 nm. Next, an aluminum film is selectively formed on the Al-Li film by electron beam evaporation using the same shadow mask as described above to a thickness of about 250 nm. Then, the laminated film of the Al-Li film and the aluminum film is used as a red cathode 38R, a blue cathode 38B, and a green cathode 38G.
[0125]
The organic EL device according to the present embodiment is completed by the steps described above. This organic light-emitting device is of a bottom emission type, and further includes a red organic light-emitting layer 31R, a blue organic light-emitting layer 34B, and a green organic light-emitting layer 37G, so that full-color display is possible.
[0126]
According to the present embodiment, unlike the first to third embodiments, instead of causing each of the anodes 30R to 30G on the substrate 1 to generate heat, the conductor pattern 30 provided to face the anodes 30R to 30G is desired by electromagnetic induction. , And the coating films 31, 34, and 37 for each color are selectively heated. As described above, since the anodes 30R to 30G do not play a role of heating the coating films 31, 34, and 37, the shapes, sizes, and materials of the anodes 30R to 30G are not limited, and the design of the anodes 30R to 30G is not limited. The degree of freedom is large, and they can be designed in a desired shape.
[0127]
Therefore, the organic light-emitting layers 31R, 34B, and 37G are formed on the anodes 30R to 30G made of ITO without forming a conductive film or a magnetic conductive film on the side walls thereof as in the second and third embodiments. Will be able to
[0128]
Also, the order of forming the anodes 30R to 30G and the cathode can be reversed, and the cathode can be formed on the substrate 1 first instead of the anodes 30R to 30G.
[0129]
Moreover, the heating temperature can be controlled as desired by changing only the first to third excitation frequencies, and the temperature can be easily set.
[0130]
Furthermore, the heating substrate 32 on which the conductor pattern 30 is formed can be used many times, so that it is economical.
[0131]
Since it is not necessary to determine with high precision the boundaries of the heating regions in the coating films 31, 34, and 37, that is, the portions where the edges of the conductor pattern 30 abut, the alignment between the conductor pattern 30 and the anodes 30R to 30G is performed. And a simple device can be used as a device for performing the alignment.
[0132]
In the above description, the organic light emitting layers 31R, 34B, and 37G of the respective colors are alternately formed above the substrate 1 at intervals, but the present embodiment is not limited to this. For example, an area color can be realized by dividing the substrate 1 into three regions for each color and integrally forming an organic light emitting layer of each color in each region.
[0133]
(5) Fifth embodiment
Next, a method for manufacturing an organic EL device according to a fifth embodiment of the present invention will be described.
[0134]
In the first to fourth embodiments, the coating film for the organic light emitting layer is formed by spin coating. In the present embodiment, instead of this, a coating film for an organic light emitting layer is formed by a printing method.
[0135]
First, steps required until a sectional structure shown in FIG. First, a red cathode 40R made of an aluminum alloy is deposited on a substrate 1 made of an insulator such as glass by electron beam evaporation using a shadow mask (not shown) in which a cathode-shaped opening is formed. _R Formed. Thickness TH _R Can be arbitrarily controlled by adjusting the deposition time of aluminum.
[0136]
Next, the above-described shadow mask is shifted by one pitch in the horizontal direction, and a blue cathode 40B made of aluminum is formed on the substrate 1 by electron beam evaporation to a thickness of TH. _B Formed. Further, this shadow mask is shifted in the horizontal direction by another pitch, and a green cathode 40G made of aluminum is formed on the substrate 1 by electron beam evaporation to a thickness of TH. _G Formed.
[0137]
As described above, one shadow mask is commonly used for each of the cathodes 40R to 40G, and the thickness of the electrode is changed for each of the cathodes 40R to 40G by changing the aluminum deposition time for each of the cathodes 40R to 40G. Can be.
[0138]
Next, as shown in FIG. 15B, a lithographic plate 45 for offset printing is prepared, and a coating liquid 46 for a red organic luminescent layer is applied on the printing surface of the lithographic plate 45 using an application device. . As the coating liquid 46, for example, a precursor of a PPV derivative in which the benzene ring in the sulfonium salt polymer of poly-p-phenylenevinylene (PPV) is substituted with an ethoxy group at the 2- and 5-positions in the solvent described above is used. Some have melted.
[0139]
A projection 45a corresponding to the red cathode 40R is formed on the printing surface of the planographic plate 45.
[0140]
Subsequently, the printing liquid 46 is selectively printed on the red cathode 40R by pressing the printing surface of the planographic plate 45 against the substrate 1. After the printing is completed, as shown in FIG. 15C, the coating liquid 46 on the red cathode 40R is dried to obtain a red coating film 41 (insolubilizing temperature T1).
[0141]
Thereafter, the same printing process as described above is performed on the blue cathode 40B and the green cathode 40G, so that the blue coating film 42 (see FIG. 16A) is formed on these cathodes 40B and 40G. The insolubilizing temperature T2) and the green coating film 43 (insolubilizing temperature T3) are selectively printed. Among them, as the coating liquid for the blue coating film 42, for example, a solution in which a precursor of polyparaphenylene (ppp) is dissolved in the above-described solvent is used. As the coating liquid for the green coating film 43, for example, a solution in which a sulfonium salt polymer which is a precursor of the above-described poly (p-phenylenevinylene) (PPV) is dissolved in the above-described solvent is used.
[0142]
Next, steps required until a sectional structure shown in FIG. First, in order to heat and insolubilize each of the coating films 41 to 43, an alternating magnetic field B is generated by the aforementioned alternating magnetic field generation unit (see FIG. 3), and each of the cathodes 40R to 40G is exposed to the alternating magnetic field B. Then, the cathodes 40R to 40G are collectively heated by electromagnetic induction. Here, since the insolubilizing temperatures T1 to T3 of the coating films 41 to 43 usually differ from one coating film to another, the cathodes 40R to 40G cannot be heated to the same temperature. It is necessary to change the heating temperature of the cathodes 40R to 40G. In addition, it is conceivable to cause all the cathodes 40R to 40G to generate heat above the maximum temperature among the insolubilization temperatures T1 to T3. It is not preferable because it deteriorates.
[0143]
Therefore, in the present embodiment, attention is paid to the fact that the cathodes 40R to 40G are made of a conductor (aluminum alloy) and the calorific value depends on the thickness (see equation (2) of the first embodiment). In the formation process of the cathodes 40R to 40G (FIG. 15A), the thickness TH _R ~ TH _G Is changed according to the insolubilizing temperatures T1 to T3 of the coating films 41 to 43.
[0144]
According to the equation (2) of the first embodiment, since the calorific value Pr is proportional to the cube of the thickness, the thickness of the cathode of the coating film having a low insolubilizing temperature is reduced, and the coating film having a high insolubilizing temperature is reduced. The thickness of the cathode should be increased.
[0145]
For example, when the insolubilization temperature is T1 <T2 <T3, each of the cathodes 40R to 40G is set to TH _R <TH _B <TH _G By doing so, each coating film 41 to 43 can be insolubilized at an optimum temperature without excessive heating.
[0146]
By this step, each of the coating films 41 to 43 is insolubilized and becomes a red organic light emitting layer 41R, a blue organic light emitting layer 42B, and a green organic light emitting layer 43G, respectively. Since the organic light-emitting layers 41R, 42B, and 43G of each color are selectively printed in advance on the cathodes 40R to 40G by a printing method, there is no need to perform a step of removing a coating film that has not been insolubilized thereafter.
[0147]
Next, as shown in FIG. 16C, a transparent conductive film is formed on each of the organic light emitting layers 41R, 42B and 43G by an electron beam evaporation method using a shadow mask (not shown) having an anode-shaped opening. An ITO film is selectively formed as a film to a thickness of about 80 nm, and these are used as a red anode 44R, a blue anode 44B, and a green anode 44G.
[0148]
According to the present embodiment, since the coating films 41 to 43 for each color are selectively printed on the cathodes 40R to 40G for each color by the printing method, the coating films for each color are used as in the first to fourth embodiments. It is not necessary to perform the insolubilization step every time, and all the coating films 41 to 43 can be insolubilized collectively in one insolubilization step, so that the process is not complicated.
[0149]
In addition, by changing the thickness of each of the cathodes 40R to 40G in accordance with the insolubilizing temperature of the coatings 41 to 43, the calorific value of each of the cathodes 40R to 40G in electromagnetic induction can be made different. Can be prevented from being insolubilized at the optimum temperature for each and excessively heating them to deteriorate their characteristics.
[0150]
In the above description, aluminum, which is a non-magnetic metal, is used for the cathodes 40R to 40G, but a magnetic metal such as Fe, Co, Ni, Gd, and Tb may be used instead. In that case, the total calorific value of the cathode is the sum of the one due to hysteresis loss (Ph) and the one due to resistance loss (Pr), but Ph depends on the volume of the cathode (Equation (1) in the first embodiment). Therefore, it can be said that Ph eventually depends on the thickness of the cathode. Therefore, even when the above-described magnetic metal is used as the cathodes 40R to 40G, the above advantages can be obtained by changing the thickness of each of the coatings 41 to 43.
[0151]
Further, in the above, the thickness of the cathodes 40R to 40G is individually changed according to the insolubilizing temperature of the coating films 40R to 40G. However, according to the equations (1) and (2) of the first embodiment, the thicknesses In addition, it is understood that the material, area, etc. of the cathode may be changed.
[0152]
In the present embodiment, the anodes 44R to 44G are formed after the coating films 41 to 43 are heated to form the organic light emitting layers 41R, 42B, and 43G of the respective colors, but the present embodiment is not limited to this. For example, after forming the coating films 41 to 43 and forming the anodes 44R to 44G thereon, the coating films 41 to 43 may be heated to form the organic light emitting layers 41R, 42B, and 43G.
[0153]
(6) Other embodiments
From the equations (1) and (2) of the first embodiment, it is understood that the higher the excitation frequency, the larger the amount of heat generated by electromagnetic induction. Therefore, if a large amount of heat is desired, it is sufficient to increase the excitation frequency.
[0154]
However, in order to generate a high excitation frequency, an expensive alternating magnetic field generating unit is required, and the circuit configuration of the alternating magnetic field generating unit becomes complicated. Equipment may be adversely affected.
[0155]
Therefore, in the above-described first to fifth embodiments, it is preferable to heat the electrode to a temperature higher than room temperature in advance by using the auxiliary heating means before or during heating by electromagnetic induction.
[0156]
As such an auxiliary heating means, for example, there is a hot plate 50 using resistance heating as shown in FIG. By mounting the substrate 1 on the hot plate 50, the substrate 1 and electrodes (not shown) thereon are heated to about 100 ° C.
[0157]
Alternatively, in place of the hot plate, as shown in FIG. 17B, the electrodes may be heated by laser heating or lamp heating.
[0158]
By using such an auxiliary heating means, the electrode can be heated to a desired temperature without using a high-frequency alternating magnetic field.
[0159]
【Example】
Hereinafter, examples actually performed by the inventor will be described.
[0160]
(1) First embodiment
In this embodiment, the first embodiment described above is applied to a simple matrix two-color area color display device.
[0161]
First, as shown in the plan view of FIG. 18, a plurality of data bus lines 60 formed by electrically connecting the strip-shaped first cathodes 2 and the second cathodes 3 were formed on the substrate 1 at intervals. As the substrate 1, a square glass substrate having a plane size of 30 mm × 30 mm was used. The width of the data bus lines 60 was 30 μm, and a total of 200 data bus lines 60 were formed at intervals of 10 μm.
[0162]
FIGS. 19A and 19B are a cross-sectional view taken along line II and II-II in FIG. 18, respectively.
[0163]
As shown in FIG. 19A, the second cathode 3 has a two-layer structure of the magnetic conductive film 3a and the coating film 3b described above. The magnetic conductive film 3a was formed by electron beam evaporation using a shadow mask, had a thickness of 250 nm, and used permalloy (40Ni-60Fe) as its material. Further, an Al layer having a thickness of 30 nm was used as the coating film 3b.
[0164]
On the other hand, as the first cathode 2 shown in FIG. 19B, an Al layer having a thickness of 300 nm was used. The first cathode 2 and the coating layer 3b were formed by electron beam evaporation using the same shadow mask.
[0165]
Next, steps required until a planar structure shown in FIG. 20 is obtained will be described. First, a coating solution obtained by dissolving a sulfonium salt polymer (insolubilization temperature: 150 to 300 ° C.), which is a precursor of a poly-p-phenylenevinylene (PPV) derivative, in water is formed on the entire surface by spin coating to a thickness of 120 nm. Then, it was dried at 30 ° C. for 30 minutes in a nitrogen atmosphere to obtain a first coating film.
[0166]
Thereafter, the above-described first insolubilizing step was performed to selectively insolubilize the first coating film on the first cathode 2 to obtain a first organic light emitting layer 4a. The first organic light emitting layer 4a has a structure of-[C ₆ H ₄ -CH (S ⁺ Et ₂ Br ⁻ ) CH ₂ ] _n And emits yellow-green light.
[0167]
This first insolubilization step is performed in a nitrogen atmosphere at atmospheric pressure, and an alternating current of 100 kHz is applied to the coil 8 of the alternating magnetic field generating section (see FIG. 3) to generate an alternating magnetic field B of 100 kHz. Was heated to about 200 ° C.
[0168]
Thereafter, the whole was immersed in water to remove a portion of the first coating film that was not insolubilized.
[0169]
The cross-sectional views taken along line II and II-II in FIG. 20 are as shown in FIGS. 21 (a) and 21 (b), respectively.
[0170]
Next, steps required until a planar structure shown in FIG. 22 is obtained will be described. First, a coating solution obtained by dissolving the precursor of the above-mentioned PPV derivative in which the benzene ring at the 2- and 5-positions substituted with an ethoxy group in water is formed by spin coating to a thickness of 120 nm over the entire surface. It dried at 30 degreeC for 30 minutes in atmosphere, and was set as the 2nd coating film (insolubility temperature: 50-150 degreeC).
[0171]
Thereafter, the above-described second insolubilization step was performed to selectively insolubilize the second coating film on the second cathode 3, thereby obtaining a second organic light emitting layer 5a. This second organic light emitting layer 5a has a structure of-[C ₆ H ₂ (OC ₂ H ₅ ) ₂ -CH (S ⁺ Et ₂ Br ⁻ ) CH ₂ ] _n And emits red-orange light.
[0172]
In the second insolubilization step, the same alternating magnetic field generator as that in the first insolubilization step is used, and the frequency of the input current to the coil 8 (see FIG. 3) is 10 kHz, the power is 100 w, and the atmospheric pressure is reduced. The second cathode 3 was heated to 80 ° C. in a nitrogen atmosphere.
[0173]
Thereafter, the whole was immersed in water to remove a portion of the second coating film that was not insolubilized.
[0174]
The sectional views taken along line II and II-II in FIG. 22 are as shown in FIGS. 23 (a) and 23 (b), respectively.
[0175]
Next, as shown in the plan view of FIG. 24, ITO is formed to a thickness of about 80 nm by electron beam evaporation using a shadow mask (not shown) having an anode-shaped opening, and a strip having a width of 30 μm is formed. The scanning bus line (anode) 61 is used. The scanning bus lines 61 extend in a direction orthogonal to the data bus lines 60, and are formed in a total of 120 at intervals of 10 μm.
[0176]
Thus, the organic EL display device according to this embodiment is completed. This display device is a two-color area color top emission type display device that emits yellow-green light in a region where the first cathodes 2 are arranged and emits red-orange light in a region where the second cathodes 3 are arranged. .
[0177]
(2) Second embodiment
In this embodiment, the fourth embodiment described above is applied to a simple matrix type two-color area color display device.
[0178]
First, as shown in the plan view of FIG. 26, ITO is formed to a thickness of 150 nm on the entire surface of the same substrate 1 as in the first embodiment, and is patterned by photolithography to form a band-shaped scanning bus line 65 (anode). Was formed to a width of 30 μm. The upper half of the scanning bus line 65 functions as a red anode 30R, and the lower half functions as a green anode 30G. The 220 bus lines 65 are formed at intervals of 10 μm.
[0179]
The cross-sectional views taken along the line II and the line II-II in FIG. 26 are as shown in FIGS. 27A and 27B, respectively.
[0180]
Next, steps required until a planar structure in FIG. 28 is obtained will be described. First, a coating solution obtained by dissolving a sulfonium salt, which is a precursor of poly-p-phenylenevinylene (PPV), in water is formed to a thickness of 120 nm over the entire surface by spin coating. After drying for minutes, a green coating film 37 (insolubilization temperature: 150 to 300 ° C.) was obtained.
[0181]
In addition, a heating substrate 32 shown in FIG. 29 was prepared. A glass substrate was used as the heating substrate 32, and a 1 μm-thick conductive pattern 33 made of aluminum was formed on the surface of the heating substrate 32 by electron beam evaporation using a shadow mask (not shown). The conductor pattern 33 has the same pattern shape as the lower half of the scanning bus line 65 (see FIG. 26), that is, the green anode 30G.
[0182]
Next, the heating substrate 32 and the substrate 1 are opposed to each other, and after the respective conductor patterns 33 and the green anode 30G are aligned, the conductor patterns 33 are brought into contact with the green coating film 37. 29A and 30B are sectional views taken along line II and II-II in FIG. 29 after the contact. FIGS. 30A and 30B correspond to the cross-sectional view taken along line II and II-II in FIG. 28, respectively.
[0183]
Thereafter, using the same alternating magnetic field generator (see FIG. 3) as used in the first embodiment, an alternating current of 100 kHz and 100 W was passed through the coil 8 to generate an alternating magnetic field B of 100 kHz. Then, the conductor pattern 33 was heated to 200 ° C. for about 30 minutes by electromagnetic induction by exposing the conductor pattern 33 to the alternating magnetic field B in a nitrogen atmosphere at atmospheric pressure.
[0184]
As a result, the green coating film 37 on the green anode 30G facing the conductor pattern 33 is selectively heated and insolubilized, and becomes the green organic light emitting layer 37G. The green organic light-emitting layer 37G has a structure of-[C ₆ H ₄ -CH (S ⁺ Et ₂ Br ⁻ ) CH ₂ ] _n -A polymer composed of
[0185]
Then, the whole was immersed in water, and the green coating film 37 in a portion not insolubilized was removed.
[0186]
Thereby, as shown in the plan view of FIG. 31, the green organic light emitting layer 37G remains only on the green anode 30G. The sectional views taken along the line II and II-II in FIG. 31 are as shown in FIGS. 32 (a) and 32 (b), respectively.
[0187]
Next, steps required until a planar structure shown in FIG. 33 is obtained will be described. First, a coating solution formed by dissolving a sulfonium salt polymer, which is a derivative of PPV in which the benzene ring in the PPV intermediate was substituted with an ethoxy group at the 2- and 5-positions, in water was spin-coated to a thickness of 120 nm over the entire surface. Thereafter, it was dried in a nitrogen atmosphere at 30 ° C. for 30 minutes to obtain a red coating film (insolubilization temperature: 50 to 150 ° C.).
[0188]
Thereafter, using the same alternating magnetic field generator as above, the conductor pattern 33 was heated to 80 ° C. for about 30 minutes with the frequency of the input current to the coil 8 (see FIG. 3) at 10 kHz and the power at 100 w. As a result, the red coating film on the red anode 30R was selectively insolubilized, resulting in a red organic light emitting layer 31R. In addition, this red organic light emitting layer 31R has-[C ₆ H ₂ (OC ₂ H ₅ ) ₂ -CH (S ⁺ Et ₂ Br ⁻ ) CH ₂ ] _n -A polymer composed of
[0189]
Thereafter, the whole was immersed in water to remove a portion of the red coating film that had not been insolubilized.
[0190]
The sectional views taken along the line II and II-II in FIG. 33 are as shown in FIGS. 34 (a) and 34 (b), respectively.
[0191]
Next, steps required until a planar structure in FIG. 35 is obtained will be described. First, an alloy film of aluminum and lithium (Al-Li film) is formed on the substrate 1 and each of the light emitting layers 37G and 31R by a vapor deposition method using a shadow mask having a data bus line-shaped opening. It was selectively formed to about 50 nm. Next, an aluminum film was selectively formed on the Al-Li film to a thickness of about 250 nm by an evaporation method using the same shadow mask as described above. Then, the laminated film of the Al-Li film and the aluminum film was used as a data bus line (cathode) 66. The data bus lines 66 have a width of about 30 μm, extend in a direction perpendicular to the scanning bus lines 65, and are formed in a total of 120 at intervals of 10 μm.
[0192]
Note that a cross-sectional view taken along line II and II-II in FIG. 35 are as shown in FIGS. 36A and 36B, respectively.
[0193]
Thus, the organic EL display device according to this embodiment is completed. This display device is a two-color area color bottom emission type display device that emits yellow-green light in a region where the green anode 30G is arranged and emits red-orange light in a region where the red anode 30R is arranged.
[0194]
Hereinafter, features of the present invention will be additionally described.
[0195]
(Supplementary Note 1) a step of forming an electrode on the insulating substrate;
Forming a coating film for an organic light emitting layer on the electrode and the insulating substrate,
Heating the electrode by electromagnetic induction, and selectively heating and insolubilizing the coating film on the electrode by the heat generation;
After the insolubilization step, exposing the coating film to a liquid, and selectively dissolving and removing the uncoated portion of the coating film, the coating film of the insolubilized portion as an organic light emitting layer on the electrode. Leaving process,
A method for producing an organic EL device, comprising: (1)
(Supplementary Note 2) The method for producing an organic EL device according to Supplementary Note 1, wherein a nonmagnetic conductive film having a resistivity of 1 mΩcm or less or a laminated film including the nonmagnetic conductive film is used as the electrode.
[0196]
(Supplementary Note 3) The method for producing an organic EL device according to Supplementary Note 2, wherein any one of an aluminum film, an aluminum alloy film, a magnesium film, and a magnesium alloy film is used as the nonmagnetic conductive film.
[0197]
(Supplementary Note 4) The method for producing an organic EL device according to Supplementary Note 1, wherein a magnetic conductive film or a laminated film including the magnetic conductive film is used as the electrode.
[0198]
(Supplementary Note 5) The method for producing an organic EL device according to Supplementary Note 4, wherein a film made of any one of an iron group element, a rare earth element, and a magnetic metal oxide is used as the magnetic conductive film.
[0199]
(Supplementary Note 6) As the magnetic metal oxide, EuO or CrO ₂ 6. The method for producing an organic EL device according to supplementary note 5, wherein
[0200]
(Supplementary Note 7) The step of forming the electrode includes:
Forming a transparent conductor pattern on the insulating substrate,
Forming a resist pattern smaller than the upper surface of the transparent conductor pattern on the upper surface of the transparent conductor pattern,
The transparent conductor pattern is immersed in a plating solution in a state where the resist pattern remains, and by plating, a conductive film is formed on the side wall and the edge of the upper surface of the transparent conductor pattern, and the conductive film and the conductor pattern are formed. Using the electrode,
Removing the resist pattern,
2. The method for manufacturing an organic EL device according to claim 1, wherein an optically transparent substrate is used as the insulating substrate.
[0201]
(Supplementary Note 8) The step of forming the electrode includes:
Forming a transparent conductive film on the insulating substrate;
Forming a resist pattern on the transparent conductive film;
Etching the transparent conductive film using the resist pattern as an etching mask to form a transparent conductor pattern,
Dipping the transparent conductor pattern in a plating solution with the resist pattern remaining, forming a conductive film on the side wall of the transparent conductor pattern by plating, and using the conductive film and the transparent conductor pattern as the electrodes; When,
Removing the resist pattern,
2. The method for manufacturing an organic EL device according to claim 1, wherein an optically transparent substrate is used as the insulating substrate.
[0202]
(Supplementary Note 9) a step of forming an electrode on the insulating substrate;
Forming a coating film for an organic light emitting layer on the electrode and the insulating substrate,
A step of bringing the conductor pattern facing the electrode close to or in contact with the coating film,
An insolubilizing step of causing the conductive pattern to generate heat by electromagnetic induction, and selectively heating and insolubilizing the coating film on the electrode facing the conductive pattern by the generated heat,
After the insolubilization step, exposing the coating film to a liquid, and selectively dissolving and removing the uncoated portion of the coating film, the coating film of the insolubilized portion as an organic light emitting layer on the electrode. Leaving process,
A method for producing an organic EL device, comprising: (2)
(Supplementary Note 10) In the step of bringing the conductive pattern close to or in contact with the coating film, the conductive pattern is brought close to the coating film at a distance equal to or shorter than a short side width of the electrode. A method for manufacturing an organic EL device.
[0203]
(Supplementary Note 11) The organic semiconductor according to any one of Supplementary Notes 1 to 10, wherein the electrode is heated to a temperature higher than room temperature by using an auxiliary heating means during or before the insolubilization step. Manufacturing method of EL element.
[0204]
(Supplementary Note 12) The method for producing an organic EL device according to Supplementary Note 11, wherein any of a hot plate, laser heating, and lamp heating is used as the auxiliary heating unit.
[0205]
(Supplementary Note 13) The method for manufacturing an organic EL device according to any one of Supplementary Notes 1 to 12, wherein the insolubilizing step is performed in a vacuum or in an atmosphere of an inert gas.
[0206]
(Supplementary Note 14) A step of forming an electrode on the insulating substrate;
Selectively printing a coating film for an organic light emitting layer on the electrode,
Causing the electrode to generate heat by electromagnetic induction, and heating the coating film on the electrode by the heat generation to form an organic light emitting layer;
A method for producing an organic EL device, comprising: (3)
(Supplementary Note 15) a step of forming a first electrode on the insulating substrate;
Forming a second electrode, which generates heat at a higher temperature than the first electrode during electromagnetic induction, on the insulating substrate;
Selectively printing a first coating for a first organic light emitting layer on the first electrode;
Selectively printing a second coating for a second organic light-emitting layer having a higher insolubilizing temperature than the first coating on the second electrode;
By electromagnetic induction with respect to the first electrode and the second electrode, the second electrode generates heat at a higher temperature than the first electrode, and the generated heat heats the first coating film on the first electrode. Heating the second coating film on the second electrode to form a second organic light-emitting layer while forming the first organic light-emitting layer;
A method for producing an organic EL device, comprising:
[0207]
(Supplementary Note 16) a step of forming the first electrode on the insulating substrate;
Forming a second electrode on the insulating substrate that generates heat at a lower temperature than the first electrode for the first excitation frequency and generates higher temperature than the first electrode for the second excitation frequency; The process of
Forming a first coating film for a first organic light emitting layer on the first electrode, on the second electrode, and on the insulating substrate;
The first electrode is heated to a higher temperature than the second electrode by electromagnetic induction by placing the insulating substrate in a magnetic field of the first excitation frequency, and the heat is applied to the first coating film on the first electrode. A first insolubilizing step of selectively insolubilizing by heating
After the first insolubilizing step, the first coating is exposed to a liquid to selectively dissolve and remove the non-insolubilized portion of the first coating, and the first coating of the insolubilized portion is removed. Leaving the first organic light emitting layer on the first electrode;
Forming a second coating film for a second organic light emitting layer on the second electrode, on the first organic light emitting layer, and on the insulating substrate;
Placing the insulating substrate in a magnetic field of the second excitation frequency, causing the second electrode to generate heat at a higher temperature than the first electrode by electromagnetic induction, and generating the second coating film on the second electrode; A second insolubilizing step of selectively insolubilizing by heating
After the second insolubilizing step, the second coating film is exposed to a liquid to selectively dissolve and remove the non-insolubilized portion of the second coating film, and remove the insolubilized portion of the second coating film. Leaving on the second electrode as the second organic light emitting layer;
A method for producing an organic EL device, comprising:
[0208]
(Supplementary Note 17) A stacked film of a magnetic conductive film and a non-magnetic conductive film is used for both the first electrode and the second electrode, and the thickness of the non-magnetic conductive film in the first electrode is set to the second thickness. 17. The method for manufacturing an organic EL device according to claim 16, wherein the thickness of the non-magnetic conductive film in the electrode is larger than that of the non-magnetic conductive film.
[0209]
(Supplementary Note 18) An insulating substrate;
A cathode formed on the insulating substrate,
An organic light emitting layer formed on the cathode,
An anode formed on the organic light emitting layer,
With
An organic EL device, wherein the cathode comprises a magnetic conductive film or a laminated film including the magnetic conductive film. (4)
(Supplementary Note 19) An insulating substrate,
A transparent conductor pattern formed on the insulating substrate,
A conductive film formed on a side wall of the transparent conductor pattern and constituting an anode together with the transparent conductor pattern;
An organic light emitting layer formed on the anode,
A cathode formed on the organic light emitting layer,
An organic EL device comprising:
[0210]
(Supplementary note 20) The organic EL device according to supplementary note 19, wherein the conductive film is formed not only on the side wall of the transparent conductor pattern but also on an edge of an upper surface of the transparent conductor pattern.
[0211]
(Supplementary Note 21) An organic EL display device in which a plurality of the organic EL elements according to any one of Supplementary Notes 18 to 20 are arranged. (5)
[0212]
【The invention's effect】
As described above, according to the present invention, by heating the electrode by electromagnetic induction, the coating film on the electrode is insolubilized into the organic light emitting layer, and then, the coating film of the non-insolubilized portion is dissolved and removed. Therefore, the organic light emitting layer can be selectively formed on the electrode, and there is no need to pattern the organic light emitting layer using a resist as in the conventional example.
[0213]
In such electromagnetic induction, the insulating substrate made of an insulator is not heated, so that the insulating substrate is not likely to be deformed by heat. In addition, since heating can be started immediately from the time when the electrode is exposed to the magnetic field for electromagnetic induction, there is no time delay in heating. Further, since the degree of heating is substantially determined only by the interaction between the magnetic field and the electrode, the electrode can be heated with good reproducibility.
[0214]
Note that when a magnetic conductive film or a laminated film including the magnetic conductive film is used as an electrode, the temperature rise of the electrode becomes slower at the Curie temperature of the magnetic conductive film, so that the temperature control of the electrode becomes easy.
[0215]
Further, an electrode may be formed by the transparent conductive pattern and the conductive film on the side wall thereof, and the conductive film may be heated by electromagnetic induction to insolubilize the coating film on the electrode to form an organic light emitting layer. In this case, a bottom emission type organic EL element can be manufactured by using an optically transparent substrate as the insulating substrate.
[0216]
Further, by forming the conductive film on the side wall of the transparent conductor pattern in this manner, the resistance of the electrode can be reduced.
[0217]
When the conductive film as described above is formed on the side wall of the transparent conductor pattern, a resist smaller than the upper surface of the transparent conductor pattern is formed on the upper surface, so that the edge and the side wall of the upper surface of the transparent conductor pattern are formed by plating. Thus, the conductive film can be surely formed.
[0218]
Alternatively, by using the resist used for patterning the transparent conductor pattern as a plating resist for the conductive film, the process can be prevented from becoming complicated.
[0219]
Also, instead of heating the electrode by electromagnetic induction, a conductor pattern facing the electrode is brought into contact with or close to the coating film, and the conductor pattern is heated by electromagnetic induction to insolubilize the coating film. There are no restrictions on the design, and the electrode can be designed as desired.
[0220]
Further, even when a coating film is selectively printed on the electrode, it is not necessary to pattern the coating film using a resist.
[0221]
Also, a first electrode and a second electrode that generates heat at a lower temperature than the first electrode for the first excitation frequency and generates higher temperature than the first electrode for the second excitation frequency are formed. By doing so, the first and second organic light emitting layers that emit different colors can be separately applied on the first and second electrodes in a self-aligned manner.
[0222]
In any of the above inventions, during the step of insolubilizing the coating film by electromagnetic induction, the electrode is heated to a temperature higher than room temperature in advance by using an auxiliary heating means, so that a high-frequency alternating magnetic field is used. Without this, the electrode can be heated to a desired temperature.
[0223]
In addition, by performing such a step of insolubilizing the coating film in a vacuum or in an atmosphere of an inert gas, it is possible to prevent the organic light emitting layer from being exposed to oxygen or water to deteriorate its characteristics.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view (part 1) illustrating a process for manufacturing an organic EL device according to a first embodiment of the present invention.
FIG. 2 is a cross-sectional view (part 2) illustrating a process for manufacturing the organic EL device according to the first embodiment of the present invention.
FIG. 3 is a configuration diagram of an alternating magnetic field generator used in each embodiment of the present invention.
FIG. 4 is a graph showing a relationship between each heating value of a first cathode and a second cathode and an excitation frequency in the first embodiment of the present invention.
FIG. 5 is a cross-sectional view (part 1) illustrating a process for manufacturing the organic EL device according to the second embodiment of the present invention.
FIG. 6 is a sectional view (part 2) illustrating a process for manufacturing the organic EL device according to the second embodiment of the present invention.
FIG. 7 is a sectional view (No. 3) showing a step for manufacturing the organic EL device according to the second embodiment of the present invention.
FIG. 8 is a cross-sectional view (part 1) illustrating a process for manufacturing the organic EL device according to the third embodiment of the present invention.
FIG. 9 is a sectional view (part 2) illustrating a process for manufacturing the organic EL device according to the third embodiment of the present invention.
FIG. 10 is a cross-sectional view (part 1) illustrating a process for manufacturing an organic EL device according to a fourth embodiment of the present invention.
FIG. 11 is a sectional view (part 2) illustrating a process for manufacturing the organic EL device according to the fourth embodiment of the present invention.
FIG. 12 is a sectional view (No. 3) showing a step for manufacturing the organic EL device according to the fourth embodiment of the present invention.
FIG. 13 is a sectional view (part 4) illustrating a step of manufacturing an organic EL device according to a fourth embodiment of the present invention.
FIG. 14 is a cross-sectional view showing another example of the heating substrate used in the fourth embodiment of the present invention.
FIG. 15 is a cross-sectional view (part 1) illustrating a step of manufacturing an organic EL device according to a fifth embodiment of the present invention.
FIG. 16 is a sectional view (No. 2) showing the process for manufacturing the organic EL device according to the fifth embodiment of the present invention.
FIG. 17 is a sectional view showing an auxiliary heating means according to another embodiment of the present invention.
FIG. 18 is a plan view (part 1) illustrating a process for manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 19 is a cross-sectional view (part 1) illustrating a process for manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 20 is a plan view (part 2) illustrating the process of manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 21 is a sectional view (part 2) illustrating a process for manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 22 is a plan view (part 3) illustrating a process for manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 23 is a sectional view (No. 3) showing a step of manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 24 is a plan view (part 4) illustrating the process for manufacturing the organic EL display device according to the first embodiment of the present invention.
FIG. 25 is a cross-sectional view (No. 4) illustrating the manufacturing process of the organic EL display device according to the first embodiment of the present invention.
FIG. 26 is a plan view (part 1) illustrating a process for manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 27 is a cross-sectional view (part 1) illustrating a process for manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 28 is a plan view (part 2) illustrating the process of manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 29 is a plan view of a heating substrate used in a second embodiment of the present invention.
FIG. 30 is a sectional view (No. 2) showing the process for manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 31 is a plan view (part 3) illustrating the process of manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 32 is a sectional view (No. 3) showing a step of manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 33 is a plan view (part 4) illustrating a process for manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 34 is a sectional view (part 4) illustrating a process for manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 35 is a plan view (part 5) illustrating the process for manufacturing the organic EL display device according to the second embodiment of the present invention.
FIG. 36 is a sectional view (No. 5) showing a process for manufacturing the organic EL display device according to the second embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... 1st cathode, 3 ... 2nd cathode, 3a ... Magnetic conductive film, 3b ... Coating film, 4 ... 1st coating film, 4a ... 1st organic light emitting layer, 5 ... second coating film, 5a ... second organic light emitting layer, 6 ... first anode, 7 ... second anode, 8 ... coil, 10 ... ..First transparent conductor pattern, 11: second transparent conductor pattern, 12: non-magnetic conductive film, 13: first anode, 14, 15: resist pattern, 16: magnetic conductive Film, 17: second anode, 18: first coating, 18a: first organic light emitting layer, 19: second coating, 19a: second organic light emitting layer, 20 · ..First cathode, 21 ... second cathode, 22 ... transparent conductor pattern, 23 ... resist pattern, 24 ... conductive film, 25 ... anode, 26 ... coat, 26a・ ・Organic light emitting layer, 27 ... Cathode, 30R ... Red anode, 30B ... Blue anode, 30G ... Green anode, 31 ... Red coating film, 31R ... Red organic light emission Layer, 32: heating substrate, 33: conductor pattern, 34: blue coating, 34B: blue organic light emitting layer, 37: green coating, 37G: green organic Light emitting layer, 38R: red cathode, 38B: blue cathode, 38G: green cathode, 36: buffer film, 40R: red cathode, 40B: blue cathode, 40G: green cathode, 41: red coating, 41R: red organic light-emitting layer, 42: blue coating, 42B: blue organic light-emitting layer, 43: green Coating, 43G: green organic light emitting layer, 44R: red anode, 44B: blue anode, 44G - green anodes, 50 ... hot plate, 60, 66 ... data bus lines, 61, 65 ... scan bus lines, 70 ... exciting circuit.

Claims (5)

Forming an electrode on the insulating substrate;
Forming a coating film for an organic light emitting layer on the electrode and the insulating substrate,
Heating the electrode by electromagnetic induction, and selectively heating and insolubilizing the coating film on the electrode by the heat generation;
After the insolubilization step, exposing the coating film to a liquid, and selectively dissolving and removing the uncoated portion of the coating film, the coating film of the insolubilized portion as an organic light emitting layer on the electrode. Leaving process,
A method for producing an organic EL device, comprising: Forming an electrode on the insulating substrate;
Forming a coating film for an organic light emitting layer on the electrode and the insulating substrate,
A step of bringing the conductor pattern facing the electrode close to or in contact with the coating film,
An insolubilizing step of causing the conductive pattern to generate heat by electromagnetic induction, and selectively heating and insolubilizing the coating film on the electrode facing the conductive pattern by the generated heat,
After the insolubilization step, exposing the coating film to a liquid, and selectively dissolving and removing the uncoated portion of the coating film, the coating film of the insolubilized portion as an organic light emitting layer on the electrode. Leaving process,
A method for producing an organic EL device, comprising: Forming an electrode on the insulating substrate;
Selectively printing a coating film for an organic light emitting layer on the electrode,
Causing the electrode to generate heat by electromagnetic induction, and heating the coating film on the electrode by the heat generation to form an organic light emitting layer;
A method for producing an organic EL device, comprising: An insulating substrate;
A cathode formed on the insulating substrate,
An organic light emitting layer formed on the cathode,
An anode formed on the organic light emitting layer,
With
An organic EL device, wherein the cathode comprises a magnetic conductive film or a laminated film including the magnetic conductive film. An organic EL display device comprising a plurality of the organic EL elements according to claim 4 arranged.

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