JP2004066323A - Positioning working method and positioning working apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning working apparatus for performing positioning of high precision even if microworking is required. <P>SOLUTION: The apparatus is provided with a laser oscillator 11 applying laser light to the object 12 to be worked and performing working to picture recognition marks 13 having working original positions and peripheral edges; an imaging camera 16 detecting the positions of the picture recognition marks 13; a picture recognition apparatus 17 performing treatment with the centroids of the picture recognition marks detected by the imaging camera as the central positions of the working; a working table 22 mounted with the object to be worked and moving to the directions of an X-axis and a Y-axis; and a controller 18 controlling an XY-axis galvano mirror scan apparatus 14 and performing positioning working so as to carry out actual working to the specified positions of the object to be worked. The controller controls the XY-axis galvano mirror scanning apparatus by correction data based on the difference between the central points of working obtained by treating the positions of the relatively largely formed picture recognition marks and the prescribed working positions, and performs the positioning working. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a positioning processing method and a positioning processing apparatus using a recognition processing apparatus such as an image recognition apparatus for performing positioning of the processing on a workpiece when performing drilling or cutting with a laser processing apparatus or the like. It is.
[0002]
[Prior art]
2. Description of the Related Art In recent years, in a drilling process typified by a printed wiring board manufacturing process, the density of wiring patterns has been increasing due to the miniaturization of electronic devices and the like. Accordingly, it is required to reduce the diameter of the processing hole and to increase the accuracy of the drilling position.
[0003]
Conventionally, a positioning method described in JP-A-8-71780 has been known. FIG. 7 shows the above-described conventional positioning processing method and apparatus, in which 71 is a laser oscillator, 72 is an XY-axis galvanometer mirror scanning apparatus, 73 is an imaging camera, 74 is an fθ scan lens, and 75 is a workpiece to be actually processed. A temporary workpiece having the same shape as, and 76 is a processing hole. Reference numeral 77 denotes an image processing apparatus which takes in the position data of the processing hole 76 photographed by the imaging camera 73 and detects the position of the processing hole 76. Reference numeral 78 denotes a controller that stores in advance the specified position of the processing hole 76 of the workpiece 75, takes in the position data of the processing hole 76 captured by the imaging camera 73 processed by the image processing device 77, and then processes the processing hole. The amount of deviation from the specified position is calculated, and based on this amount of deviation, the XY axis galvanometer mirror scanning device 72 is fed back via the scanner controller 79 and the scanner driver 80 to correct the position of the machining hole 76 to the specified position. , Positioning processing.
[0004]
About the positioning processing apparatus comprised as mentioned above, the operation | movement is demonstrated. First, the controller 78 obtains an image recognition mark, which is formed in advance as a drilling position on the temporary workpiece 25 having the same shape as the workpiece to be actually processed, by the imaging camera 23 under the control of the image. Based on the above, the image processing device 77 detects the drilling position, and calculates the amount of deviation from the predetermined drilling position in the controller 78. This deviation amount is inaccurate at the detection position where the punching position is imaged due to the imaging capability of the imaging camera 23, the size of the image recognition mark, and the like, and a difference from the specified position inevitably occurs.
[0005]
Therefore, the controller 78 feeds back the correction data to the XY axis galvanometer mirror scanning device 72 via the scanner controller 79 and the scanner driver 80 based on the calculated deviation amount. The XY-axis galvanometer mirror scanning device 72 causes the X-axis mirror to follow the X-axis direction and the Y-axis mirror to follow the Y-axis direction based on the correction data from the controller 78 so that the laser beam is irradiated to the specified position. Perform positioning processing.
[0006]
As described above, once the drilling positioning process is determined, the controller 78 thereafter controls the laser oscillator 71 and the XY axis galvano mirror scanning device 72, and the laser beam from the laser oscillator 71 is scanned by the XY axis galvano mirror scan. The laser beam is refracted by the device 72 and condensed by the fθ scan lens 74 to form a processing hole 76 at a predetermined position of the formal workpiece.
[0007]
However, in the conventional positioning processing apparatus, when the number of pixels of the image recognition mark captured by the imaging camera 73 is far smaller than the total number of pixels including the other, that is, when the image recognition mark has a small area, In particular, in recent years, the density of printed circuit board wiring patterns has been increased due to miniaturization of electronic devices and the like, and the processing holes are small. Further, the imaging position of the imaging camera 73 and the like cannot be used to accurately detect the processing position. Had.
[0008]
[Problems to be solved by the invention]
In view of the above problems of the conventional technology, the problem to be solved by the present invention is to provide a positioning processing method and a positioning processing apparatus that enable highly accurate positioning processing even when the laser processing spot diameter is small. It is to provide.
[0009]
[Means for Solving the Problems]
In order to solve the above-described problem, a positioning processing method of the present invention includes a recognized portion processing means for processing a recognized portion having a processing origin and an outer peripheral edge by irradiating a temporary workpiece with laser light, and a recognized target. A recognized part machining position detecting means for detecting the position of the part, a recognition processing means for processing the machining origin of the recognized part detected by the recognized part machining position detecting means as a machining center position, and a temporary workpiece. A table means that moves in the direction of the loading X-axis and Y-axis, and a control means that controls the processing means for processing the workpiece and positions the workpiece so that the workpiece can be processed at a specified position; A step of processing a recognized portion having a step, a step of detecting a position of the recognized portion, and a step of obtaining a difference between a processing center position obtained by processing the detected position of the recognized portion and a specified position. , According to the correction data based on the difference Controls processing means, a method and a step of performing positioning processing.
[0010]
In addition, the positioning processing apparatus of the present invention detects the position of the recognized portion, the recognized portion processing means for processing the recognized portion having the processing origin and the outer periphery by irradiating the temporary workpiece with laser light. Recognized portion machining position detecting means, recognition processing means for processing the recognized origin machining position detected by the recognized portion machining position detecting means as a processing center point, and a temporary workpiece to be placed on the X axis and Y axis A table means that slides in the direction of the workpiece, and a control means that controls the processing means for processing the workpiece and positions the workpiece so as to perform processing at a specified position of the workpiece. Positioning processing is performed by controlling the processing means based on correction data based on the difference between the center position of processing and the specified position obtained by processing the position of the recognized portion detected by the position detection means.
[0011]
According to the above method and apparatus, the recognized portion having the processing origin and the outer peripheral edge is relatively large, and by processing this into a temporary workpiece, the position of the recognized portion can be easily detected, resulting in a result. As a result, a highly accurate positioning process is possible.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Since the object of the present invention described above can be achieved by using the configuration described in each claim as an embodiment, the effects of the configuration will be described together with the configuration of each claim. The specific terms that require explanation in the configuration will be described in detail in the embodiment of the present invention by adding a detailed explanation.
[0013]
The invention according to claim 1 processes the step of irradiating the temporary workpiece with laser light to process the image recognition mark, the step of detecting the position of the image recognition mark, and the position of the detected image recognition mark A step of obtaining a difference between the center point of machining obtained and the specified machining position, and a step of controlling a machining means based on correction data based on the difference to perform positioning machining, and machining the image recognition mark. In this case, the positioning processing method performs processing having an outer peripheral edge and a center of gravity, and further detects the center of gravity as a processing center point when detecting the position of the image recognition mark.
[0014]
According to the above method, a relatively large image recognition mark having a processing origin that is the center of gravity and an outer peripheral edge can be processed, and the processing origin can be detected as a processing center point.
[0015]
According to a second aspect of the present invention, in processing the image recognition mark according to the first aspect, the XY-axis galvanometer mirror scanning system having a function of scanning the laser beam in both the X-axis and Y-axis directions is driven, This is a positioning processing method for processing a circular outer peripheral edge by rotating a laser beam once or a plurality of times in a vortex from a point.
[0016]
According to the above method, the XY-axis galvanometer mirror scanning system can process a relatively large circular image recognition mark and can detect the processing origin as the processing center point.
[0017]
According to a third aspect of the present invention, in the first aspect, when the image recognition mark is processed, a temporary work piece is placed, a processing table that moves in both the X-axis and Y-axis directions is driven, and the processing center point is the base point. In the positioning processing method, the laser beam is rotated once or a plurality of times in a vortex to process a circular outer peripheral edge.
[0018]
According to the above method, it is possible to process a relatively large circular image recognition mark by moving the processing table in both the X-axis and Y-axis directions, and to detect the processing origin as the processing center point.
[0019]
According to a fourth aspect of the present invention, there is provided an XY-axis galvanometer mirror scanning system having a function of scanning a laser beam in both directions of the X-axis and the Y-axis when the image recognition mark is processed. Positioning that drives both the machining table moving in both the X-axis and Y-axis directions, and machining the circular outer periphery by rotating the laser beam once or a plurality of times in a vortex from the machining center point It is a processing method.
[0020]
According to the above method, a relatively large circular image recognition mark can be processed by the XY axis galvanometer mirror scanning system and the processing table, and the processing origin can be detected as the processing center point.
[0021]
According to a fifth aspect of the present invention, when the position of the image recognition mark is detected by the imaging camera according to any one of the first to fourth aspects, a temporary workpiece is placed on both sides of the X axis and the Y axis. Using a processing table to move, moving the processing center point of the image recognition mark to the center position of the imaging camera, detecting a shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera; And a step of performing correction by moving the processing table based on the amount of deviation, and a positioning processing method for correcting the processing center point of the image recognition mark to the center position of the imaging camera.
[0022]
According to the above method, when the position of the image recognition mark is detected by the imaging camera, there is an effect of correcting the shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera.
[0023]
A sixth aspect of the present invention is the method according to any one of the first to fifth aspects, wherein an area having a temporary workpiece is scanned with laser light using an XY-axis galvanometer mirror scanning system, and an fθ scan lens is used. When the image recognition mark is processed via the processing table, the processing center point of the image recognition mark is moved to the center position of the imaging camera by using a processing table on which a temporary workpiece is placed and moved in both the X-axis and Y-axis directions. A step of detecting a shift amount of a processing center point of the image recognition mark with respect to a center position of the imaging camera, and a step of performing correction by moving the processing table based on the shift amount of the fθ scan lens. This is a positioning processing method for correcting a processing position distortion generated due to characteristics.
[0024]
According to the above method, when the laser beam is scanned on an area with a temporary workpiece using an XY-axis galvanometer mirror scan system and the image recognition mark is processed via the fθ scan lens, the center position of the imaging camera The processing table is moved based on the amount of shift of the processing center point of the image recognition mark with respect to, and the processing position distortion of the fθ scan lens is corrected.
[0025]
According to a seventh aspect of the present invention, the positioning processing method according to any one of the first to sixth aspects of the present invention is performed. The image recognition mark has a center of gravity and an outer peripheral edge by irradiating a temporary workpiece with laser light. An image recognition mark processing means for performing the above processing, an imaging camera for detecting the position of the image recognition mark, an image recognition device for processing the center of gravity of the image recognition mark detected by the imaging camera as a processing center position, A processing table on which a workpiece is placed and moved in the X-axis and Y-axis directions, and a control means for controlling a processing means for processing the workpiece and positioning so that the processing can be performed at a predetermined position of the workpiece. And the control means controls the processing means by correction data based on a difference between a processing center point obtained by processing the position of the image recognition mark detected by the imaging camera and a specified position, and performs positioning processing. A-decided Me processing equipment.
[0026]
According to the above apparatus, since the image recognition mark is a relatively large image recognition mark having a processing origin and an outer peripheral edge, the imaging camera can accurately detect the image recognition mark, and the image recognition apparatus accurately detects the processing origin as the processing center point. The control means can control the machining means with correction data based on the difference between the center point of machining and the specified position, and has an effect of positioning with high accuracy.
[0027]
According to an eighth aspect of the present invention, in the apparatus according to the seventh aspect, wherein the positioning processing method according to any one of the first to sixth aspects is implemented, the control means has a processing table on which a temporary workpiece is placed, X Moving the processing center point of the image recognition mark to the center position of the imaging camera by moving in both directions of the axis and the Y-axis, and detecting a shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera, In the positioning processing apparatus, the processing table is moved based on a shift amount, and the processing center point in the image recognition mark is corrected to the center position of the imaging camera.
[0028]
According to the above apparatus, the control means has an effect of correcting the shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera.
[0029]
A ninth aspect of the present invention is the one according to the seventh aspect, wherein the positioning processing method according to any one of the first to sixth aspects of the present invention is implemented. When processing a laser beam using a mirror scan system and processing an image recognition mark via an fθ scan lens, a temporary work piece is placed and a processing table that moves in both the X-axis and Y-axis directions is used. The processing center point of the recognition mark is moved to the center position of the imaging camera, the shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera is detected, and the processing table is moved based on the shift amount. Thus, the positioning processing apparatus corrects the processing position distortion generated due to the characteristics of the fθ scan lens.
[0030]
According to the above apparatus, the control means moves the processing table based on the shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera, thereby correcting the processing position distortion of the fθ scan lens.
[0031]
The invention according to claim 10 is a step of processing the image recognition mark by irradiating the temporary workpiece with laser light, a step of detecting the position of the image recognition mark, and processing the detected position of the image recognition mark. A step of obtaining the difference between the center position of the machining obtained and the specified machining position, and a step of performing a positioning process by controlling the machining means based on correction data based on the difference, and machining the image recognition mark. When processing the special shape such as a cross shape, triangle shape, star shape, rhombus shape having an outer peripheral edge and a processing origin, and further detecting the position of the image recognition mark of the special shape, the processing origin is the processing center. This is a positioning method for detecting as a point.
[0032]
According to the above method, an image recognition mark having a relatively large special shape having a processing origin and an outer peripheral edge can be processed, and the processing origin can be detected as a processing center point.
[0033]
The invention described in claim 11 drives the XY-axis galvanometer mirror scanning system having the function of scanning the laser beam in both the X-axis and Y-axis directions when processing the special shape image recognition mark. In this positioning processing method, laser light is scanned with the processing center point as the origin to process the outer peripheral edge of the image recognition mark having a special shape.
[0034]
According to the above method, an XY-axis galvanometer mirror scanning system can process a relatively large image recognition mark having a special shape, and can detect the processing origin as a processing center point.
[0035]
The invention according to claim 12 is the processing center according to claim 10, wherein when processing the image recognition mark having a special shape, a temporary work piece is placed, a processing table that moves in both the X-axis and Y-axis directions is driven, and the processing center This is a positioning processing method in which laser light is scanned from a point as an origin to process the outer peripheral edge of a specially shaped image recognition mark.
[0036]
According to the above method, it is possible to process an image recognition mark having a relatively large special shape by moving the processing table in both the X-axis and Y-axis directions, and to detect the processing origin as the processing center point.
[0037]
A thirteenth aspect of the present invention is the provision of the XY axis galvanomirror scanning system having a function of scanning the laser beam in both the X axis and the Y axis when processing the image recognition mark having a special shape. Positioning that places a workpiece, drives both the machining table that moves in both the X-axis and Y-axis directions, scans the laser beam with the machining center point as the origin, and processes the outer periphery of the special shape image recognition mark It is a processing method.
[0038]
According to the above method, the image recognition mark having a relatively large special shape can be processed by the XY axis galvanomirror scanning system and the processing table, and the processing origin can be detected as the processing center point.
[0039]
According to a fourteenth aspect of the present invention, in the method according to any one of the tenth to thirteenth aspects, when the position of the image recognition mark having a special shape is detected by the imaging camera, a temporary workpiece is placed, and the X axis and the Y axis A step of moving the processing center point of the special shape image recognition mark to the center position of the imaging camera, and a processing center point of the special shape image recognition mark with respect to the center position of the imaging camera. A positioning process for correcting the processing center point of the image recognition mark to the center position of the imaging camera, the method including: a step of detecting a shift amount of the image recognition mark; and a step of performing correction by moving the processing table based on the shift amount. Is the method.
[0040]
According to the above method, when the position of the special shape image recognition mark is detected by the imaging camera, there is an effect of correcting the shift amount of the processing center point in the special shape image recognition mark with respect to the center position of the imaging camera.
[0041]
A fifteenth aspect of the present invention is the fifteenth scan lens according to any one of the tenth to fourteenth aspects, wherein an area with a temporary workpiece is scanned with laser light using an XY-axis galvanometer mirror scan system, and an fθ scan lens is used. When processing a specially shaped image recognition mark via a processing table, a processing table is used to place a temporary workpiece and move in both the X-axis and Y-axis directions. Moving to the center position of the imaging camera, detecting a shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the imaging camera, and moving and correcting the processing table based on the shift amount Is a positioning processing method for correcting processing position distortion generated due to the characteristics of the fθ scan lens.
[0042]
According to the above method, when an area with a temporary workpiece is scanned with a laser beam using an XY-axis galvanometer mirror scan system and an image recognition mark having a special shape is processed via an fθ scan lens, an imaging camera is used. The processing table is moved based on the shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the lens to correct the processing position distortion of the fθ scan lens.
[0043]
The invention according to claim 16 implements the positioning processing method according to any one of claims 10 to 15, and has a special shape having a processing origin and an outer periphery by irradiating a temporary workpiece with laser light. Image recognition mark processing means for processing the image recognition mark, an imaging camera for detecting the position of the special shape image recognition mark, and a processing origin of the special shape image recognition mark detected by the imaging camera. An image recognition device for processing as a position, a processing table on which a temporary workpiece is mounted and moved in the X-axis and Y-axis directions, and a processing means for processing the workpiece are controlled to process at a specified position of the workpiece. Control means for positioning so as to be able to perform, and the control means compensates based on the difference between the processing center point obtained by processing the position of the image recognition mark of the special shape detected by the imaging camera and the specified position. Controlling said processing means by the data, a positioning processing apparatus that performs positioning processing.
[0044]
According to the above apparatus, since the image recognition mark has a relatively large special shape having a processing origin and an outer periphery, the imaging camera can accurately detect the image recognition mark having a special shape, and the processing origin is used as an image as a processing center point. The recognizing device can detect with high accuracy, and the control means has an effect of controlling the processing means with correction data based on the difference between the center point of processing and the specified position, and positioning with high accuracy.
[0045]
According to a seventeenth aspect of the present invention, the positioning processing method according to any one of the tenth to fifteenth aspects implements the positioning processing method according to any one of the sixteenth to fifteenth aspects. The processing center point of the special shape image recognition mark is moved to the center position of the imaging camera by moving in both the Y axis and the Y axis, and the processing center point of the special shape image recognition mark is shifted from the center position of the imaging camera. The positioning processing apparatus detects an amount, moves the processing table based on the shift amount, and corrects the processing center point of the image recognition mark having the special shape to the center position of the imaging camera.
[0046]
According to the above apparatus, the control means has an effect of correcting the shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the imaging camera.
[0047]
According to an eighteenth aspect of the present invention, the positioning processing method according to any one of the tenth to fifteenth aspects implements the positioning processing method according to any one of the sixteenth to fifteenth aspects. When processing a laser beam using a mirror scan system and processing an image recognition mark having a special shape via an fθ scan lens, a processing table on which a temporary workpiece is mounted and moved in both the X-axis and Y-axis directions is provided. And moving the processing center point of the special shape image recognition mark to the center position of the imaging camera, detecting the amount of shift of the processing center point in the special shape image recognition mark with respect to the center position of the imaging camera, and In this positioning processing apparatus, the processing table is moved based on the amount to correct the processing position distortion generated due to the characteristics of the fθ scan lens.
[0048]
According to the above apparatus, the control means moves the processing table based on the shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the imaging camera, and has an effect of correcting the processing position distortion of the fθ scan lens.
[0049]
According to a nineteenth aspect of the present invention, recognized part processing means for processing a recognized part having a processing origin and an outer peripheral edge by irradiating a temporary workpiece with laser light, and a recognized part for detecting the position of the recognized part. Part processing position detection means, recognition processing means for processing the processing origin of the recognized part detected by the recognized part processing position detection means as the center position of the processing, and the direction of the X-axis and Y-axis on which the temporary workpiece is placed And a table means for controlling the workpiece, and a control means for controlling the machining means for machining the workpiece and positioning the workpiece at a specified position of the workpiece, and machining the recognized portion having the machining origin. A step of detecting a position of the recognized portion, a step of obtaining a difference between the processing center point obtained by processing the detected position of the recognized portion and the specified position, and correction data based on the difference Control the processing means, positioning processing A positioning processing method and a step of performing.
[0050]
The invention described in claim 20 is a recognized part processing means for processing a recognized part having a processing origin and an outer peripheral edge by irradiating a temporary workpiece with laser light, and a recognized part for detecting the position of the recognized part. Part processing position detection means, recognition processing means for processing the processing origin of the recognized part detected by the recognized part processing position detection means as the center position of the processing, and a temporary workpiece to be placed in the X-axis and Y-axis directions And control means for controlling the processing means for processing the workpiece and positioning so that the processing can be performed at the specified position of the workpiece. The positioning processing apparatus performs positioning processing by controlling the processing means based on correction data based on a difference between a processing center point obtained by processing the position of the recognized portion detected by the means and a specified position.
[0051]
According to the above method and apparatus, since the recognized portion has a machining origin and an outer peripheral edge, the recognized portion machining position detecting means can accurately detect the recognized portion, and the machining origin is used as the machining center point. The recognition processing means can detect with high accuracy, and the control means has the effect of controlling the processing means with correction data based on the difference between the processing center point and the specified position, and positioning with high accuracy.
[0052]
Hereinafter, embodiments of the present invention will be described with reference to FIGS.
[0053]
(Embodiment 1)
FIG. 1 is a schematic view showing a positioning processing apparatus and positioning processing method of the present invention, and FIG. 2 is a diagram showing a processing method of an image recognition mark of the positioning processing apparatus. The positioning processing apparatus shown in FIG. 1 is before the processing means such as a laser processing apparatus that performs processing such as drilling a formal workpiece by the laser oscillator 11, the XY axis galvanometer mirror scanning device 14, and the fθ scan lens 15. In addition, the positioning process is performed based on the specified position of the process. The laser processing apparatus that performs actual processing is also used for positioning processing in the present positioning processing apparatus.
[0054]
A laser oscillator 11 as laser output means is an outer peripheral edge 132 that recognizes a processing origin 131 that is a center of gravity serving as a processing center, as a recognition target portion shown in FIG. A laser beam for processing to draw the circular image recognition mark 13 is output. The XY-axis galvanometer mirror scanning device 14 uses the temporary workpiece 12 based on the predetermined position in advance to perform processing by irradiating the formal workpiece with laser light at the specified position as designed. It is the processing positioning means which positions.
[0055]
Then, the XY-axis galvanometer mirror scanning device 14 moves in the X-axis direction so that the temporary workpiece 12 can be irradiated with laser light based on the specified position to draw the image recognition mark 13 shown in FIG. The angle of the X-axis mirror (not shown) and the Y-axis mirror (not shown) moving in the Y-axis direction are adjusted independently so as to draw a locus in a spiral shape from the center by the laser beam spot. As a result, a large image recognition mark 13 is processed by scanning.
[0056]
The fθ scan lens 15 focuses the laser beam scanned by the XY axis galvanometer mirror scanning device 14 on the temporary workpiece 12. Reference numeral 16 denotes an imaging camera that uses a CCD charge element or the like, which is a recognized portion processing position detection means for detecting the position of the image recognition mark 14, and 17 denotes the position data of the image recognition mark 13 detected by the imaging camera 16. This is an image recognition device as a recognition processing means for processing the center of gravity of the recognition mark 13 as a processing origin 131 (processing center point).
[0057]
Reference numeral 18 denotes a controller as a control means, which stores in advance, for example, a specified position of a processing hole in a formal workpiece, and position data of the image recognition mark 13 taken by the imaging camera 16 processed by the image recognition device 17. The correction calculation circuit 19 calculates a deviation amount from the specified position of the machining hole, and feeds correction data to the XY axis galvanometer mirror scanning device 14 via the XY axis scanner driver 20 based on the deviation amount. The control sequence for correcting the position of the processing hole (image recognition mark of the temporary workpiece) to the specified position and positioning is stored.
[0058]
The controller 18 also stores a control sequence for controlling the XY-axis galvanometer mirror scanning device 14 that scans the laser beam based on the specified position in order to process the image recognition mark 13 as described above.
[0059]
Reference numeral 21 denotes an XY axis table control unit of a controller 18 as a processing table control means. When an image recognition mark 13 processed on the temporary workpiece 12 is imaged by irradiating a laser beam, the control command of the controller 18 is used. Control of movement adjustment of the movable processing table 22 on which the temporary workpiece 12 is placed so that the image recognition mark 13 is positioned in the imaging area directly under the imaging camera 16 is performed in the X-axis direction and the Y-axis direction. .
[0060]
The image recognition device 17, the controller 18, the correction arithmetic circuit 19, and the XY axis table control unit 21 are configured by a microcomputer and its peripheral circuits. In addition, the laser light output from the laser oscillator 11 reaches the XY axis galvanometer mirror scanning device 14 and the angle adjustment of both galvanometer mirrors of the XY axis galvanometer mirror scanning device 14 is performed so that the laser beam can be irradiated to the specified position. It is also an apparatus that can perform, for example, a processed hole on a formal workpiece through the fθ scan lens 15.
[0061]
In the above embodiment, an apparatus and a processing method for positioning a specified processing position will be described. In order to increase the area of the image recognition mark, for example, recognition mark processing as shown in FIG. 2 is performed. As described above, this type of processing is necessary because, in recent years, the processing holes have become smaller due to the higher density of printed circuit boards due to the miniaturization of electronic devices, etc. If the processing position cannot be detected with high accuracy due to the imaging capability of the camera, that is, if the size of the laser beam spot 133 is about φ20 μm, it is much smaller than the total number of pixels on the image recognition screen. This is because high-accuracy position recognition cannot be performed by one-point machining with the same as the spot 133.
[0062]
Therefore, the controller 18 controls the XY-axis galvanometer mirror scanning device 14 via the XY-axis scanner driver 20, and as shown in FIG. An image recognition mark 13 having a peripheral edge 132 is formed. At this time, since the processing origin 131 is located at the center of gravity (center) of the circular outer periphery 132, the center of gravity of the outer periphery 132 is detected by the imaging camera 16, that is, the laser light spot is gradually moved and superimposed. The image recognition mark 13 having an area is formed.
[0063]
Then, the processing table 22 on which the temporary workpiece 12 is placed is moved so that the image recognition mark 13 processed into the temporary workpiece 12 by the controller 18 and the XY axis table control unit 21 is positioned directly below the imaging camera 16. The position of the image recognition mark 13 is detected by the imaging camera 16. Subsequently, the image recognition device 17 takes in the detection data of the image recognition mark 13 detected by the imaging camera 16 and processes the center point of the circular outer peripheral edge 132 which is the processing origin 131 of the image recognition mark 13 as the processing center point.
[0064]
Further, the controller 18 takes in the position data of the image recognition mark 13 photographed by the imaging camera 16 processed by the image recognition device 17 and corrects the shift amount of the processing origin 131 of the image recognition mark 13 with respect to the predetermined position of the processing hole. The correction data calculated by the arithmetic circuit 19 is fed back to the XY-axis galvanometer mirror scanning device 14 via the XY-axis scanner driver 20 based on the deviation amount, the position of the processing hole is corrected to the specified position, and positioning processing is performed. To do.
[0065]
There is also a method of forming the image recognition mark 13a having a special shape shown in FIG. In FIG. 3, a cross-shaped outer peripheral edge 132a can be formed by moving the laser beam by a certain amount vertically and horizontally from the processing origin 131a. At this time, in addition to the detection of the processing center serving as the center of gravity as described above, the accuracy is further improved by performing pattern detection. In pattern detection, a cross-shaped mark is created in advance, and the position of the processing origin 131a is registered in accordance with the origin position of the image recognition device 17. Then, when detecting the position of the image recognition mark 13a, a method may be used in which the registered pattern and the image of the image recognition mark 13a recognized by the imaging camera 16 are matched to detect the amount of displacement of the processing origin 131a. In this case as well, laser light spots can be overlapped in the same manner as described above to form a recognition mark having a size that does not cause a problem in position detection accuracy.
[0066]
As described above, the present embodiment detects a recognized part processing unit that processes a recognized part having a processing origin and an outer periphery by irradiating a temporary workpiece with laser light, and detects the position of the recognized part. Recognition portion processing position detection means, recognition processing means for processing the recognition origin processing position detected by the recognition portion processing position detection means as the processing center position, and a temporary workpiece to be placed on the X and Y axes. A table means that moves in the direction of the workpiece, and a control means that controls the machining means for machining the workpiece and positions the workpiece so that machining can be performed at a specified position of the workpiece. This is an apparatus for performing positioning processing by controlling the processing means based on correction data based on the difference between the processing center position obtained by processing the position of the recognized portion detected by the position detection means and the specified processing position.
[0067]
Then, using this positioning processing device, processing the recognized portion having the processing origin and outer periphery, detecting the position of the recognized portion, and processing the detected position of the recognized portion. The positioning processing method includes a step of obtaining a difference between the obtained processing center position and a prescribed processing position, and a step of performing positioning processing by controlling the processing means based on correction data based on the difference.
[0068]
Therefore, according to the present embodiment, it is possible to process a large-size image recognition mark that is a recognized portion, and by detecting the position of the large recognized portion in the image recognition device that is a recognition processing device. Highly accurate and stable detection results can be obtained.
[0069]
In this embodiment, the circular shape shown in FIG. 2 and the cross shape shown in FIG. 3 are used as the image recognition mark. However, if there is a processing origin and an outer peripheral edge as the image recognition mark that is the recognized portion, Shape, triangle shape, star shape, rhombus shape, etc., and are not limited to these shapes.
[0070]
In this embodiment, the XY-axis galvanometer mirror scanning device 14 is used to process the image recognition mark. However, an XY-axis table control unit is used by using a processing table 22 that can slide in the X-axis direction and the Y-axis direction. The same positioning process can be obtained by driving both X and Y axes in the same manner by 21. Further, the X and Y axes galvanometer mirror scanning device 14 is assigned to one axis, and the machining table 22 is assigned to the other axis, and both are driven simultaneously. Thus, it is possible to obtain the same positioning process. In this case, the processing time is shortened.
[0071]
(Embodiment 2)
FIG. 4 is a schematic diagram showing the positioning processing apparatus and positioning processing method of the present invention, and shows the correction relationship between the processing origin of the image recognition mark and the center position of the imaging camera at the time of shooting by the imaging camera.
[0072]
In the present embodiment, the deviation amount correction is performed until the deviation amount between the processing origin of the image recognition mark and the center position of the imaging camera at the time of shooting by the imaging camera falls within the specified accuracy. Unlike the above-described invention, parts having the same configuration and operational effects are denoted by the same reference numerals, detailed description thereof is omitted, and different points will be mainly described.
[0073]
The controller 18a, which is a control means, controls the XY axis table control unit so that the processing origin 131 of the image recognition mark 13 coincides with the center position of the imaging camera 16 after processing the image recognition mark 13 on the workpiece 12. 21, the processing table 22 is moved by the shift amount of X0, Y0, and the shift amount of X0, Y0 is shifted ΔX from the center position of the imaging camera 16 using the imaging camera 16 and the image recognition device 17. By detecting ΔY and using the deviation amount as a correction amount, the correction calculation circuit 19 calculates the shift amounts of the processing table 22 as X = ΔX + X0, Y = ΔY + Y0, and the processing table 22 via the XY axis table control unit 21. The image is recognized again by the imaging camera 16 and the image recognition device 17 with this shift amount, and this verification is repeated until it is within the specified accuracy. Storing a control sequence to be executed (also referred to as a correction function of the center position of the image pickup camera of the processing center point of the image recognition mark) and.
[0074]
Further, as described in the first embodiment, the controller 18a stores in advance, for example, a specified position of a processing hole in a formal workpiece, and an image captured by the imaging camera 16 processed by the image recognition device 17. The position data of the recognition mark 13 is taken in, the amount of deviation from the specified position of the machining hole is calculated by the correction arithmetic circuit 19, and the correction data based on this amount of deviation is sent to the XY axis galvanometer mirror via the XY axis scanner driver 20. A control sequence is stored in which the scanning device 14 is fed back, the position of the processing hole (image recognition mark of the temporary workpiece) is corrected to the specified position, and the positioning processing is performed.
[0075]
The controller 18a also stores a control sequence for controlling the XY axis galvanometer mirror scanning device 14 that scans the laser beam based on the specified position in order to process the image recognition mark 13 as described above.
[0076]
As shown in FIG. 6, the XY-axis scanner driver 20 includes an X-axis scanning driver and an X-axis scan mirror driven by the X-axis scanning driver, and a Y-axis scanning driver and a Y-axis scan mirror driven by the X-axis scanning driver. The XY axis table control unit 21 includes an X axis table control unit and an X axis slide mechanism motor controlled thereby, and a Y axis table control unit and an X axis slide mechanism motor controlled thereby.
[0077]
Hereinafter, the operation of the function for correcting the processing center point of the image recognition mark in the present embodiment to the camera center position will be described. The controller 18a controls the XY axis galvanometer mirror scanning device 14 via the XY axis scanner driver 20, and forms the image recognition mark 13 as shown in FIG.
[0078]
Then, a laser beam is irradiated onto the temporary workpiece 12 by the controller 18a, and the processing coordinate of the processing table 22 at that time is set as the processing origin 131 of the image recognition mark 13 and the processing origin is set via the XY axis table control unit 21. 4 is shifted by X0 and Y0 as shown in FIG. 4 so as to coincide with the position just below the center position of the imaging camera 16, and the position of the image recognition mark 13 using the imaging camera 16 and the image recognition device 17. Is detected.
[0079]
Subsequently, the controller 18a takes in the position data of the image recognition mark 13 photographed by the imaging camera 16 processed by the image recognition device 17, and the shift amount ΔX of the processing origin 131 of the image recognition mark 13 with respect to the center position of the imaging camera 16. , ΔY are detected. Using this deviation amount as a correction amount, the correction calculation circuit 19 calculates X = ΔX + X0 and Y = ΔY + Y0, which are shift amounts of the machining table 22.
[0080]
Then, the controller 18a moves the machining table 22 through the XY axis table control unit 21 by the shift amount, and recognizes the shift amount again by the imaging camera 16 and the image recognition device 17 in the same manner as described above. This verification is repeated until it is inside.
[0081]
After correcting the processing center point of the image recognition mark to the center position of the imaging camera, the controller 18a of the imaging camera 16 processed by the image recognition device 17 as described in the first embodiment. The taken position data of the image recognition mark 13 is taken in, the amount of deviation of the processing origin 131 of the image recognition mark 13 with respect to the specified position of the processing hole is calculated by the correction arithmetic circuit 19, and the correction data is converted into XY based on this amount of deviation. The XY axis galvanometer mirror scanning device 14 is fed back via the axis scanner driver 20, the position of the processing hole is corrected to a specified position, and positioning processing is performed.
[0082]
As described above, according to the present embodiment, by performing offset amount correction with respect to the processing origin of the imaging camera, it is possible to improve the accuracy of positioning processing at a predetermined position where processing is always performed more than in the first embodiment. As a result, processing can always be performed with a specified positional accuracy.
[0083]
(Embodiment 3)
5A and 5B are diagrams comparing the relationship between the positional distortion of the fθ scan lens and the actual machining position in the positioning processing apparatus and positioning processing method of the present invention before and after correction of the positional distortion of the fθ scan lens. is there.
[0084]
The present embodiment differs from the first and second embodiments in that the positional distortion correction of the fθ scan lens is executed. The rest of the configuration and the operational effects are the same as those of the first and second embodiments. The differences will be mainly described with reference to the drawings of the first and second embodiments.
[0085]
Hereinafter, the operation of the positional distortion correction function of the fθ scan lens 15 in the present embodiment will be described.
[0086]
In general, the positional distortion of the fθ scan lens means that a distortion as shown in FIG. 5A is generated as the scan area is widened and processed due to the characteristics of the scan lens.
[0087]
The controller 18a controls the XY-axis galvanometer mirror scanning device 14 via the XY-axis scanner driver 20, and as shown in FIG. 2, the image recognition mark 13 is applied to the temporary workpiece 12 as shown in FIG. When the image recognition mark 13 is processed by irradiation and arranged in a lattice pattern, for example, as shown in FIG. 5A, the image recognition mark 13 in the middle of the left and right sides and the upper and lower sides is shifted outward, and the positional distortion is caused. Occur.
[0088]
Therefore, the processing table 22 is moved by the shift amount so that the processing origin 131 of each image recognition mark 13 matches the center position of the imaging camera 16 as described in the second embodiment.
[0089]
Then, the processing table 22 is moved by the shift amount so that the processing origin 131 of each image recognition mark 13 coincides with the center position of the imaging camera 16, and the imaging camera 16 and the image recognition of FIG. 6 are recognized as in the second embodiment. The amount of deviation from the center position of the imaging camera 16 is detected using the device 17. The correction calculation circuit 19 calculates a correction command value for the XY-axis galvanometer mirror scanning device 14 using this deviation amount as a correction amount.
[0090]
The controller 18a controls the XY-axis galvanometer mirror scanning device 14 with this correction value, and again irradiates the temporary workpiece 12 with laser light in the same manner as described above to arrange the image recognition marks 13 in a lattice pattern. The processing origin 22 of each image recognition mark 13 is moved to the center position of the imaging camera 16 as described in the second embodiment, and the processing table 22 is moved by the shift amount.
[0091]
Further, the processing table 22 is moved by the shift amount so that the processing origin 131 of each reprocessed image recognition mark 13 coincides with the center position of the imaging camera 16, and the imaging camera 16 of FIG. And the image recognition device 17 are used to detect the amount of deviation from the center position of the imaging camera 16. The correction calculation circuit 19 calculates a correction command value for the XY-axis galvanometer mirror scanning device 14 using this deviation amount as a correction amount. As shown in FIG. 5B, the grid array processing and verification by the imaging camera, the image recognition device, and the controller are performed until the correction value falls within the specified accuracy.
[0092]
After correcting the positional distortion of the fθ scan lens 15 as described above, positioning processing to a specified position is performed as described in the first embodiment.
[0093]
As described above, according to the present embodiment, by correcting the positional distortion of the fθ scan lens 15, it is possible to improve the accuracy of the positioning process at the prescribed position that is always processed more than in the first embodiment. As a result, it is possible to always perform processing with a specified positional accuracy, and it is possible to realize a high-accuracy processing without positional distortion as shown in FIG.
[0094]
【The invention's effect】
As described above, according to the present invention, by processing a recognized portion having a processing origin and an outer peripheral edge into a workpiece, it becomes easy to detect the position of the recognized portion and perform highly accurate positioning processing. Can do.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a positioning processing apparatus according to Embodiment 1 of the present invention.
FIG. 2 is a diagram showing a method for processing an image recognition mark of the positioning processing apparatus according to the first embodiment.
FIG. 3 is a diagram showing another example of the processing method using the image recognition mark of the positioning processing apparatus according to the first embodiment;
FIG. 4 is a diagram showing a correction method to a center position of an imaging camera of a positioning apparatus according to Embodiment 2 of the present invention.
5A is a diagram showing a position before correction of position distortion of the fθ scan lens of the positioning processing apparatus according to the third embodiment of the present invention; FIG. 5B is a view showing correction of position distortion of the fθ scan lens of the positioning processing apparatus according to the third embodiment; Figure showing the back
FIG. 6 is a feedback control diagram of the positioning processing device according to the second and third embodiments of the present invention.
FIG. 7 is a schematic view showing a conventional positioning apparatus.
[Explanation of symbols]
11 Laser oscillator (recognized part processing means, processing means)
12 Temporary workpiece
13 Image recognition mark (recognized part)
13a Special shape image recognition mark (recognized part)
14 XY axis galvanometer mirror scanning device (XY axis galvanometer mirror scanning system, machining positioning means)
15 fθ scan lens
16 Imaging camera (recognized part processing position detection means)
17 Image recognition device (recognition processing means)
18, 18a Controller (control means)
19 Correction arithmetic circuit
22 Processing table (table means)
131, 131a Machining origin
132, 132a outer periphery

Claims (20)

Irradiating a temporary workpiece with laser light to process an image recognition mark; detecting a position of the image recognition mark; and processing center point obtained by processing the detected position of the image recognition mark And a step of controlling the processing means by correction data based on the difference and performing positioning processing, and when processing the image recognition mark, it has an outer periphery and a center of gravity. A positioning processing method for performing processing and detecting the center of gravity as a processing center point when detecting the position of the image recognition mark. When processing the image recognition mark, it drives an XY-axis galvanometer mirror scanning system that has the function of scanning the laser beam in both the X-axis and Y-axis directions, and the laser beam is swirled once or multiple times from the processing center point The positioning processing method according to claim 1, wherein a circular outer peripheral edge is processed by being rotated. When processing the image recognition mark, place a temporary workpiece, drive a processing table that moves in both the X-axis and Y-axis directions, and rotate the laser beam one or more times in a vortex from the processing center point The positioning method according to claim 1, wherein a circular outer peripheral edge is processed. When processing an image recognition mark, an XY-axis galvanometer mirror scanning system having a function of scanning a laser beam in both the X-axis and Y-axis directions and a temporary workpiece, and a processing table that moves in both the X-axis and Y-axis directions The positioning processing method according to claim 1, wherein the circular outer periphery is processed by rotating the laser beam once or a plurality of times in a vortex shape with the processing center point as a base point. When the position of the image recognition mark is detected by the imaging camera, a processing table is used that places a temporary workpiece and moves in both the X-axis and Y-axis directions, and the processing center point of the image recognition mark is set to the center position of the imaging camera. And a step of detecting a shift amount of a processing center point of the image recognition mark with respect to a center position of the imaging camera, and a step of moving the processing table based on the shift amount to perform correction. The positioning processing method according to claim 1, wherein the processing center point in the recognition mark is corrected to the center position of the imaging camera. When a laser beam is scanned using an XY-axis galvanometer mirror scanning system and an image recognition mark is processed via an fθ scan lens, the temporary workpiece is placed on the area where the temporary workpiece is located. Using a processing table that moves in both directions of the axis, the step of moving the processing center point of the image recognition mark to the center position of the imaging camera, and the amount of deviation of the processing center point of the image recognition mark from the center position of the imaging camera is detected And correcting the processing position distortion that occurs due to the characteristics of the fθ scan lens, and a step of correcting by moving the processing table based on the amount of deviation. The positioning processing method described. An image recognition mark processing for performing an image recognition mark processing having a center of gravity and an outer peripheral edge by irradiating a temporary workpiece with laser light in the positioning processing method according to any one of claims 1 to 6. Means, an imaging camera for detecting the position of the image recognition mark, an image recognition device for processing the center of gravity of the image recognition mark detected by the imaging camera as a processing center position, a temporary workpiece, A processing table that moves in the Y-axis direction; and a control unit that controls a processing unit that processes the workpiece and positions the workpiece so that the processing can be performed at a specified position of the workpiece. A positioning processing apparatus that performs positioning processing by controlling the processing means based on correction data based on a difference between a processing center point obtained by processing a position of an image recognition mark detected by a camera and a specified position. 7. The apparatus for carrying out the positioning processing method according to claim 1, wherein the control means moves the processing table on which the temporary workpiece is placed in both the X-axis and Y-axis directions, thereby recognizing the image recognition mark. Moving the processing center point to the center position of the imaging camera, detecting a shift amount of the processing center point of the image recognition mark with respect to the center position of the imaging camera, moving the processing table based on the shift amount, and moving the image The positioning processing apparatus according to claim 7, wherein the processing center point in the recognition mark is corrected to the center position of the imaging camera. The apparatus for performing the positioning processing method according to any one of claims 1 to 6, wherein the control means scans a laser beam in an area where the temporary workpiece is present using an XY-axis galvanometer mirror scanning system, and When processing the image recognition mark via the fθ scan lens, a processing table is used that places a temporary workpiece and moves in both the X-axis and Y-axis directions, and the processing center point of the image recognition mark is the center position of the imaging camera. The amount of displacement of the processing center point of the image recognition mark with respect to the center position of the imaging camera is detected, the processing table is moved based on the amount of displacement, and the processing position distortion caused by the characteristics of the fθ scan lens is detected. The positioning processing apparatus according to claim 7, wherein correction is performed. Irradiating the temporary workpiece with laser light to process the image recognition mark; detecting the position of the image recognition mark; and processing center position obtained by processing the detected position of the image recognition mark And a step of controlling a processing means by correction data based on the difference and performing positioning processing, and when processing the image recognition mark, an outer peripheral edge and a processing origin are set. A positioning processing method for processing a special shape such as a cross shape, a triangle shape, a star shape, a rhombus shape, and the like, and detecting the processing origin as a processing center point when detecting the position of the image recognition mark having the special shape. When processing an image recognition mark with a special shape, it drives an XY-axis galvanometer mirror scanning system with the function of scanning the laser beam in both the X-axis and Y-axis directions. The positioning processing method according to claim 10, wherein the outer peripheral edge of the shape image recognition mark is processed. When processing a special shape image recognition mark, place a temporary workpiece, drive a processing table that moves in both the X-axis and Y-axis directions, scan the laser beam with the processing center point as the origin, and scan the special shape image. The positioning processing method according to claim 10, wherein an outer peripheral edge of the recognition mark is processed. When processing an image recognition mark with a special shape, an XY-axis galvanometer mirror scanning system with a function to scan the laser beam in both the X-axis and Y-axis and a temporary workpiece are placed and moved in both the X-axis and Y-axis directions. The positioning processing method according to claim 10, wherein both of the processing table and the processing table to be driven are driven, the laser beam is scanned with the processing center point as the origin, and the outer peripheral edge of the image recognition mark having a special shape is processed. When detecting the position of the image recognition mark of the special shape with the imaging camera, the processing center point of the image recognition mark of the special shape is set using the processing table on which the temporary workpiece is placed and moved in both the X-axis and Y-axis directions. A step of moving to the center position of the imaging camera; a step of detecting a shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the imaging camera; and a correction by moving the processing table based on the shift amount. The positioning processing method according to claim 10, further comprising: correcting a processing center point of the image recognition mark having the special shape to a center position of the imaging camera. When a laser beam is scanned using an XY-axis galvanometer mirror scanning system and an image recognition mark having a special shape is processed via an fθ scan lens, an area where the temporary workpiece is present is placed on the temporary workpiece. A step of moving a processing center point of the image recognition mark of a special shape to a center position of the imaging camera using a processing table that moves in both directions of the axis and the Y axis, and an image recognition mark of a special shape with respect to the center position of the imaging camera And a step of correcting by moving the processing table based on the amount of deviation, and correcting a processing position distortion generated due to characteristics of the fθ scan lens. The positioning method according to any one of claims 10 to 14. The positioning processing method according to any one of claims 10 to 15, wherein the temporary workpiece is irradiated with laser light to process a special shape image recognition mark having a processing origin and an outer periphery. An image recognition mark processing means, an imaging camera that detects the position of the image recognition mark of the special shape, an image recognition device that processes the origin of the image recognition mark of the special shape detected by the imaging camera as a processing center position, A control table for placing a temporary workpiece and controlling a machining table that moves in the X-axis and Y-axis directions and a machining means for machining the workpiece, and positioning so that machining can be performed at a specified position of the workpiece. And the control means controls the processing means based on correction data based on a difference between a processing center point obtained by processing the position of the special shape image recognition mark detected by the imaging camera and a specified position. Gyoshi positioning processing apparatus that performs positioning processing. The positioning processing method according to any one of claims 10 to 15, wherein the control means moves the processing table on which the temporary workpiece is placed in both the X-axis and Y-axis directions and has a special shape. The processing center point of the image recognition mark is moved to the center position of the imaging camera, and the shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the imaging camera is detected, and the processing table is based on the shift amount The positioning processing apparatus according to claim 16, wherein the processing center point in the image recognition mark having the special shape is corrected to the center position of the imaging camera. The apparatus for carrying out the positioning processing method according to any one of claims 10 to 15, wherein the control means scans a laser beam in an area with a temporary workpiece using an XY axis galvanometer mirror scanning system, and When processing a specially shaped image recognition mark via an fθ scan lens, a processing table is used to place a temporary workpiece and move in both the X-axis and Y-axis directions. The fθ scan lens is moved to the center position of the imaging camera, detects the shift amount of the processing center point in the image recognition mark having a special shape with respect to the center position of the imaging camera, and moves the processing table based on the shift amount. The positioning processing apparatus according to claim 16, wherein the processing position distortion generated due to the characteristics of the positioning processing is corrected. Recognized part processing means for irradiating a temporary workpiece with laser light to process a recognized part having a processing origin and an outer periphery, recognized part processing position detecting means for detecting the position of the recognized part, and Recognition processing means for processing the processing origin of the recognized part detected by the recognition part processing position detection means as a processing center position, table means for placing a temporary workpiece and moving in the X-axis and Y-axis directions, A control means for controlling a processing means for processing the workpiece and positioning so that the processing can be performed at a specified position of the workpiece, and processing a recognized portion having a processing origin and an outer peripheral edge; The step of detecting the position of the recognition unit, the step of obtaining the difference between the processing center position obtained by processing the detected position of the recognized portion and the specified position, and the processing means controlled by the correction data based on the difference Step for positioning Positioning processing method having. Recognized part machining means for irradiating a temporary workpiece with laser light to machine a recognized part having a machining origin and an outer periphery, recognized part machining position detecting means for detecting the position of the recognized part, Recognition processing means for processing the processing origin of the recognized portion detected by the recognition portion processing position detection means as the processing center position, table means for placing a temporary workpiece and moving in the X-axis and Y-axis directions, Control means for controlling the processing means for processing the workpiece, and positioning so that the processing can be performed at the specified position of the workpiece, the control means of the recognition portion detected by the recognition portion processing position detection means A positioning processing apparatus that performs positioning processing by controlling the processing means based on correction data based on a difference between a processing center point obtained by processing a position and a specified position.

Images