JP2004061491A5 - - Google Patents
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- Publication number
- JP2004061491A5 JP2004061491A5 JP2003090441A JP2003090441A JP2004061491A5 JP 2004061491 A5 JP2004061491 A5 JP 2004061491A5 JP 2003090441 A JP2003090441 A JP 2003090441A JP 2003090441 A JP2003090441 A JP 2003090441A JP 2004061491 A5 JP2004061491 A5 JP 2004061491A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0044716A KR100516828B1 (ko) | 2002-07-29 | 2002-07-29 | 광학적 검사의 과검출 방지 방법 및 이를 수행하기 위한 시스템 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004061491A JP2004061491A (ja) | 2004-02-26 |
| JP2004061491A5 true JP2004061491A5 (de) | 2005-12-22 |
| JP4133509B2 JP4133509B2 (ja) | 2008-08-13 |
Family
ID=30439406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003090441A Expired - Fee Related JP4133509B2 (ja) | 2002-07-29 | 2003-03-28 | 光学的検査の誤った検出防止方法及びシステム |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4133509B2 (de) |
| KR (1) | KR100516828B1 (de) |
| CN (1) | CN100456024C (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353697B (zh) * | 2011-08-31 | 2015-04-29 | 上海华虹宏力半导体制造有限公司 | 在线测评缺陷的方法 |
| CN105865979B (zh) * | 2016-03-30 | 2019-03-12 | 南京邮电大学 | 一种测量微液滴电湿效应的装置与方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160450A (ja) * | 1989-11-17 | 1991-07-10 | Fujitsu Ltd | マスクの欠陥検査方法 |
| JPH04198742A (ja) * | 1990-11-28 | 1992-07-20 | Matsushita Electric Ind Co Ltd | 配線パターン検査装置 |
| US5563702A (en) * | 1991-08-22 | 1996-10-08 | Kla Instruments Corporation | Automated photomask inspection apparatus and method |
| JP3189500B2 (ja) * | 1993-06-25 | 2001-07-16 | 松下電器産業株式会社 | 電子部品の外観検査装置および外観検査方法 |
| JP3812020B2 (ja) * | 1996-11-27 | 2006-08-23 | 松下電器産業株式会社 | 電子部品観察装置及び電子部品観察方法 |
| JPH10221041A (ja) * | 1997-02-10 | 1998-08-21 | Toppan Printing Co Ltd | 欠陥検査方法 |
| WO1998058241A1 (fr) * | 1997-06-17 | 1998-12-23 | Yuki Engineering System, Ltd | Dispositif de controle de conditionnement feuille |
| US6282309B1 (en) * | 1998-05-29 | 2001-08-28 | Kla-Tencor Corporation | Enhanced sensitivity automated photomask inspection system |
| JP3678007B2 (ja) * | 1998-07-10 | 2005-08-03 | 松下電器産業株式会社 | 電子部品実装装置における電子部品認識装置および電子部品認識方法 |
| JP2001208693A (ja) * | 2000-01-26 | 2001-08-03 | Dainippon Printing Co Ltd | 板状ワークの検査方法及び装置 |
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2002
- 2002-07-29 KR KR10-2002-0044716A patent/KR100516828B1/ko not_active IP Right Cessation
-
2003
- 2003-03-28 JP JP2003090441A patent/JP4133509B2/ja not_active Expired - Fee Related
- 2003-04-21 CN CNB031225802A patent/CN100456024C/zh not_active Expired - Fee Related