JP2004055733A - Opening and closing device of substrate holding vessel - Google Patents

Opening and closing device of substrate holding vessel Download PDF

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Publication number
JP2004055733A
JP2004055733A JP2002209558A JP2002209558A JP2004055733A JP 2004055733 A JP2004055733 A JP 2004055733A JP 2002209558 A JP2002209558 A JP 2002209558A JP 2002209558 A JP2002209558 A JP 2002209558A JP 2004055733 A JP2004055733 A JP 2004055733A
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Prior art keywords
opening
substrate holding
pin
holding container
closing device
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JP4156286B2 (en
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Atsuo Imai
今井 厚雄
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MTC Co Ltd Japan
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MTC Co Ltd Japan
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Priority to JP2002209558A priority Critical patent/JP4156286B2/en
Priority to PCT/JP2002/012860 priority patent/WO2004010492A1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67373Closed carriers characterised by locking systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67379Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To improve efficiency of opening and closing work, by easily locating a substrate holding vessel at an opening and closing position, regarding an opening and closing device for opening and closing the substrate holding vessel which is used, when a substrate which is to be used in a prescribed process in semiconductor manufacturing is carried and held. <P>SOLUTION: When an SMIF pod 12 is moved horizontally on a mounting part 13, a pin rotator 23 is positioned downward. When the pot 12 is mounted at a prescribed position, a lever 25 is raised, and the pin rotator 23 is positioned upward. As a result, a pin-clenching hole and engaging pins 23A and 23B are turned into an engaging state. By pivoting the lever 25, the pin-clenching hole is operated via the pin rotator 23, a latch mechanism is operated, and latch claws 34A, 34B of a holding part 31 are made to act which claws have the relation of latch with latch-clenching parts 33A, 33B formed on a pod cover 32. As a result, the opening and closing device is constituted. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、半導体製造における所定の工程で使用される基板を搬送、保管させる際に用いられる基板保持容器を開閉させる開閉装置に関する。
【0002】
【従来の技術】
近年、半導体製造におけるフォトマスク、マスクブランクス、ガラス基板、ウエハ等の基板を搬送、保管させるために、SEMI E19で規格化されたSMIF(Standard Mechanical Interface)ポッドと称される基板保持容器が使用される。このSMIFポッドは、塵埃混入を防ぐために密閉状態とされ、取り出しや搬入の際にはポッドカバーを開閉させる必要があり、開閉させる際の煩雑さを回避させることによる作業効率の向上が望まれている。
【0003】
従来、SMIFポッドに上記基板を収納したり、取り出したりする際のポッドの開閉を自動的に行う自動開閉装置が種々知られている。このような自動開閉装置は、作業者による基板の取り出しが容易でないことから、当該装置の故障やメンテナンス等を含めて手動で開閉する機構で行っているのが現状である。一方で自動開閉装置は高価であることから、手動でのみ開閉を行わせる開閉装置も必要な状況であり、このような手動の開閉装置として、例えば特開2002−76106号公報等に記載されたものがある。
【0004】
上記規格化されたSMIFポッドは、基板を保持する保持部を透明なポッドカバーで構成されたものであり、保持部とポッドカバーとがラッチ機構によりロックされる構造となっており、保持部の底面(裏面)に設けられたピン嵌合孔を回転させることによりロック状態、ロック解除状態とする構造となっている。また、上記保持部の底面には当該ポッドを位置決めさせるための孔(製造上の治具穴)等が所定数形成されている。
【0005】
上記のようなSMIFポッドを開閉させる上記公報によれば、当該ポッドを載置させるステージ上に所定数の位置決めピンと、上記ピン嵌合孔に嵌合させる2つの嵌合ピンを立設させた回転台座が設けられており、当該ステージに上方より当該SMIFポッドをおろしながら位置決めピンに嵌合させることで嵌合ピンを当該ポッドの保持部に形成されたピン嵌合孔に嵌合させる。そして、回転台座と連結されているレバーを水平方向に回動させて上記ピン嵌合孔を回転させることによりロック解除を行うというものである。
【0006】
【発明が解決しようとする課題】
しかしながら、SMIFポッドはそれ自体でも重量があり、上記基板が収納されるとさらに重くなるもので、このようなSMIFポッドを上記ステージのようなものに上方より位置決めさせながら載置させにくく、作業効率を低下させているという問題がある。
【0007】
そこで、本発明は、上記課題に鑑みなされたもので、基板保持容器を開閉位置に対して容易に位置させ、開閉作業の効率を向上させる基板保持容器の開閉装置を提供することを目的とする。
【0008】
【課題を解決するための手段】
上記課題を解決するために、請求項1の発明では、蓋部と、当該蓋部をロックするラッチ機構を備えた保持部とで構成され、当該ラッチ機構を動作させる関連部を備えた基板保持容器に対し、当該保持部より蓋部を開閉状態とさせる基板保持容器の開閉装置であって、前記基板保持容器を所定位置に載置させる載置部と、上下動自在であり、前記基板保持容器が前記載置部上で前記所定位置に載置されていないときには下方位置とされ、少なくとも所定位置に載置されたときには上方位置とされて前記関連部と係合状態となる係合手段と、前記係合手段と連結され、当該係合手段と前記関連部とが係合されている状態で、当該係合手段を介して当該関連部を動作させるための操作部と、を有する構成とする。
【0009】
請求項2〜4の発明では、「前記操作手段を上下動させることで前記係合手段を上下動させる伝達手段を備える」構成であり、
「前記載置部に上下動自在に設けられ、前記基板保持容器が当該載置部上で前記所定位置に載置されていないときには上方位置とされ、少なくとも載置されたときに当該基板保持容器と当接することにより下方位置とされる所定数の当接手段と、前記当接手段が上方位置のときには前記係合手段を下方位置とさせ、当該当接手段が下方位置のときには当該係合手段を上方位置とさせる伝達手段と、を備える」構成であり、
「前記基板保持容器を、前記載置部上の所定位置に位置させるための規制手段が当該載置部に設けられる」構成である。
【0010】
このように、基板保持容器が前記載置部上で所定位置に載置されていないときときには係合手段を下方位置とさせ、所定位置に載置されたときには当該係合手段を上方位置とさせて関連部と係合状態となったときに操作手段で係合手段を介して関連部を動作させることでラッチ機構を動作させる。すなわち、基板保持容器が所定位置でないときには係合手段は下方位置であることから、当該基板保持容器を載置部上で水平移動させることが可能となり、基板保持容器を開閉位置に対して容易に位置させて開閉作業の効率を向上させることが可能となるものである。
【0011】
【発明の実施の形態】
以下、本発明の好ましい実施形態を図により説明する。本実施形態では、収納する基板を、フォトマスクを例として説明するが、上述のようにマスクブランクス、ガラス基板、ウエハ等を対象としてもよい。また、本実施形態では、収納する基板の枚数を複数枚として説明するが、単一で収納させるものであっても適用することができるものである。
【0012】
図1に、本発明に係る第1実施形態の基板保持容器開閉装置の外観構成図を示す。図1において、基板保持容器の開閉装置11は、基板保持容器である例えば上述のSMIFポッド12に対して開閉を行う。開閉装置11は、例えば箱状(必ずしも箱状でなくともよい)の載置部13を備え、当該SMIFポッド12が所定方向より水平移動させたときに位置決めを行うための規制手段であるガイド規制部21A,21Bが当該載置部13上に設けられる。
【0013】
また、当該載置部13の上板上の所定位置(開閉位置)に対応した部分に切欠部22が形成され、当該切欠部22よりピン回転体23を上昇自在とさせる。すなわち、SMIFポッド12が載置部13上で上記ガイド規制部21A,21Bで位置決めされたときに、当該保持部に備えられるラッチ機構を動作させる関連部であるピン嵌合孔とピン回転体23に立設された2本の嵌合ピン23A,23Bとが対峙する。このピン回転体23および嵌合ピン23A,23Bとが係合手段の一部を構成する。
【0014】
また、載置部13の所定の側部にはレバーガイド切欠部24Aが水平方向に形成され、その端部(図では左端)には垂直方向にレバーガイド切欠部24Bが形成される。そして、ピン回転体23と連結された操作部であるレバー25の先端部分がレバーガイド切欠部24A,24Bより表出する。なお、ピン回転体23とレバー25との関連を図3で説明する。
【0015】
一方、SMIFポッド12は、保持部31と適宜透明の蓋部であるポッドカバー32とにより構成され、当該保持部31には、ポッドカバー32に形成されたラッチ係合部33A,33Bとの係合関係でロックしたりロック解除するラッチ爪34A,34Bを動作させるラッチ機構(図示せず)を備える。また、保持部31上にはホルダガイド部35が所定数設けられ、当該ホルダガイド部35で規制されて基板ホルダ36が位置される。この基板ホルダ36には、所定数の基板37が保持される。そして、ポッドカバー32には、当該ポッドカバー32が保持部31との間でロック解除されたときに上方に持ち上げるための把持部38A,38Bが設けられる。
【0016】
ここで、図2に、図1の開閉装置におけるピン回転体の動作説明図を示す。図2(A)はSMIFポッド12の底面図、図2(B)は開閉装置11におけるピン回転体の動作説明の概略斜視図である。図2(A)において、保持体31の底面には、円弧状のラッチガイド切欠部41A,41Bが円形状に沿って対峙して形成され、それぞれのラッチガイド切欠部41A,41B内に上述のラッチ機構を動作させるための関連部であるピン嵌合孔42A,42Bが配置される。このラッチガイド切欠部41A,41Bおよびピン嵌合孔42A,42Bの配置は、前述のSEMI E19で規格化されたものである。
【0017】
一方、図2(B)に示す開閉装置11は、レバー25をレバーガイド切欠部24Bで上下動させると、後述の図3に示す伝達部を介してピン回転体23(嵌合ピン23A,23B)を上下動させる。すなわち、載置部13上にSMIFポッド12が位置されていないときにはレバー25は、レバーガイド切欠部24Bの上方に位置され、このときにピン回転体23は下方に位置される。
【0018】
そして、SMIFポッド12が載置部13上にガイド規制部21A,21Bで位置決めされて位置されたときには、上記ピン嵌合孔42A,42Bと嵌合ピン23A,23Bとが対峙した状態となり、レバー25をレバーガイド切欠部24Bの下方に押し下げることでピン回転体23が上昇され、当該嵌合ピン23A,23Bにピン回転体23の嵌合ピン23A,23Bがそれぞれ嵌合状態となって係合する。この状態で、レバー25をレバーガイド切欠部24Aに沿って回動させると、回転体23(嵌合ピン23A,23B)が回転し、ピン嵌合孔42A,42Bが回転することで、ラッチ機構を動作させるものである。
【0019】
そこで、図3に、本発明の開閉装置に係る係合手段の概略構成図を示す。図3(A)は係合手段の分解説明図、図3(B)はその動作説明の概念図である。図3(A)において、ピン回転体23はピン回転体支持部51に弾性手段であるコイルバネ52を介して支持される。ピン回転体23は、逆凹状のもので、その側部に例えば2つ(1つでもよい)の嵌合溝53A,53Bが形成されると共に、上記のように上部に2つの嵌合ピン23A,23Bが立設される。
【0020】
上記ピン回転体支持部51は、円筒状のもので、内部に上記コイルバネ52をを支持するように段差が形成されている。また、その側部には、上記ピン回転体23に形成された嵌合溝53A,53Bと嵌合する嵌合突部54A,54Bが形成される。さらに、ピン回転体支持部51の側部には「コ」字状の伝達手段である伝達部55が回動自在に取り付けられ、当該伝達部55にレバー25が取り付けられている。
【0021】
そして、ピン回転体支持部51内にコイルバネ52を内包させ、ピン回転体23を、嵌合突部54A,54Bと嵌合溝53A,53Bとを嵌合させて図3(B)に示すように被せることにより係合手段が構成されるものである。このとき、ピン回転体23はピン回転体支持部51に対して、コイルバネ52によって内部にクリアランスが形成されて上下動(例えば10mm〜20mm)自在となる。
【0022】
図3(B)示すように、ピン回転体23を支持したピン回転体支持部51は、載置部13の内部の底板に設けられた固定軸56に上下動自在に嵌合される。この固定軸56と上記載置部13の側部に形成されたレバーガイド切欠部24A,24Bとの間にレバーガイド板57が設けられる。このレバーガイド板57にはレバー25の水平方向の回動をガイドするレバーガイド切欠部58が形成される。このレバーガイド板57は、レバー25の上下動によりピン回転体23を上下動させる際の支点となる。
【0023】
すなわち、レバー25がレバーガイド切欠部24Bの上方に位置されているときにはピン回転体23(ピン回転体支持部51)はレバーガイド切欠部58を支点として伝達部55を介して固定軸56上で下方に位置され、レバー25がレバーガイド切欠部24Bの下方に押し下げられるとレバーガイド板57を支点としてピン回転体23(ピン回転体支持部51)が伝達部55を介して固定軸56上で上昇されるものである。
【0024】
次に、図4および図5に、基板保持容器の開閉装置によるロック解除動作の説明図を示す。図4および図5において、まず、SMIFポッド12は、保持部31内に、所定数の基板37を保持した基板ホルダ36が収納され、当該保持部31がポッドカバー32で覆われてラッチ係合部33A,33Bとラッチ爪34A,34Bとがラッチ機構によりロック状態とされている。また、開閉装置11は、レバー25がレバーガイド切欠部24Bの上方に位置されており、これに伴って、ピン回転体23(嵌合ピン23A,23Bの先端)は載置部13の上面より下方に位置されている。
【0025】
上記SMIFポッド12は、図4(A)に示されるように、開閉装置11の載置部13上の一端部分(レバー25側)に置かれる。この状態から、図4(B)に示すように、載置部13の上面上を奥側に水平移動され、ガイド規制部21A,21Bによりガイドされて最奥の規制部分に当接することで位置決めされる。当該SMIFポッド12の開閉装置11上での位置決めがされた時点で、レバー25をレバーガイド切欠部24Bの下方に押し下げるとレバーガイド板57を支点としてピン回転体23(嵌合ピン23A,23B)は伝達部55を介して固定軸56上で上昇され、載置部13の底面のピン嵌合孔42A,42Bに嵌合ピン23A,23Bがそれぞれ嵌合して係合された状態となる。
【0026】
そこで、図5に示すように、レバー25をレバーガイド切欠部24Aに沿って回動させると、嵌合ピン23A,23Bを介してピン嵌合孔42A,42Bが回転することでラッチ機構が動作され、ラッチ係合部33A,33Bとラッチ爪34A,34Bによるロック状態が解除される。これによって、ポッドカバー32は保持部31に対して開放状態となる。そして、ポッドカバー32の把持部38A,38Bを把持して上方に持ち上げることにより収納された基板ホルダ36が表出され、保持された基板37の抜き取りや挿入が行われるものである。
【0027】
ところで、SMIFポッド12(載置部13)の底面のピン嵌合孔42A,42Bがずれていてピン回転体23が上昇したときに必ずしも嵌合ピン23A,23Bが嵌合されない場合も生じる。この場合、ピン回転体23は、コイルバネ52により上下動できる状態であることから、当該ピン回転体23が上昇した時点では嵌合ピン23A,23Bがピン嵌合孔42A,42Bの周辺部分と当接した状態で維持され、ピン回転体23が回転されているうちにピン嵌合孔42A,42Bと嵌合ピン23A,23Bとが一致し、この時点でコイルバネ52によって嵌合させることができるものである。
【0028】
続いて、図6に、基板保持容器の開閉装置によるロック動作の説明図を示す。図6は、図5の状態から基板ホルダ36を取り替える場合や、当所SMIFポッド12内に基板ホルダ36が収納されておらず(この場合は保持部31とポッドカバー32はロック状態)、ロック解除からポッドカバー32を上げて基板ホルダ36を収納させる場合を示している。
【0029】
図6において、開閉装置11上には、SMIFポッド12の保持部31がセットされており、レバー25はレバーガイド切欠部24Aの反対端に位置されてロックが解除されている。そこで、保持部31上にホルダガイド35で位置決めさせて所定数の基板37が保持された基板ホルダ36を載置させる。その後に、ポッドカバー32を保持部31上に覆い被せ、レバー25をレバーガイド切欠部24Aに沿って回動させることにより、ピン嵌合孔42A,42Bが回転してラッチ機構が動作され、ポッドカバー32のラッチ係合部33A,33Bと保持部31のラッチ爪34A,34Bとが係合してロック状態となるものである。そして、レバー25をレバーガイド切欠部24Bの上方に移動させてピン回転体23を下降させることにより、図4(A)とは逆にSMIFポッド12を水平移動させて開閉装置11より取り出すことができるものである。
【0030】
このように、SMIFポッド12が開閉装置11の載置部13上の所定位置(開閉位置)でないときにはピン回転体23は下方位置であることから、当該SMIFポッド12を載置部13上で水平移動させることができるようになり、これによってSMIFポッド12を開閉位置に対して容易に位置させて開閉作業の効率を向上させることができるようになるものである。なお、図示しないが、SMIFポッド12を載置部13上の所定位置に上方より載置させる場合であっても、載置されていないときにはピン回転体23が下方位置であり、載置する際にピン嵌合孔42A,42Bと嵌合ピン23A,23Bとを嵌合させながら行う必要がなく、容易に載置させることができるものである。このことは、以下の実施形態でも同様である。
【0031】
次に、図7に、本発明に係る第2実施形態の基板保持容器開閉装置の外観構成図を示す。図7において、開閉装置11における載置部13上であって、SMIFポッド12が水平移動により挿入される奥側(必ずしも奥側でなくともよい)には、例えば2つ(1つでもよい)の当接手段であるプランジャ61A,61Bが上下動自在に設けられ、またレバー25の回動をガイドするレバーガイド切欠部24Aのみを形成して上記レバーガイド切欠部24Bを不要とした構成のものである。
【0032】
上記プランジャ61A,61Bの上下動は、後述の図8および図9で説明する伝達手段を介してピン回転体23を上下動させるものである。すなわち、プランジャ61A,61Bが上方位置で載置部13上に突出されている状態では、ピン回転体23(嵌合ピン23A,23B)は下方に位置されて載置部13上には突出されず、またプランジャ61A,61BがSMIFポッド12と当接して押し込まれた状態では、ピン回転体23(嵌合ピン23A,23B)が上昇して当該嵌合ピン23A,23Bとピン嵌合孔42A,42Bとが嵌合(またはレバー25の回動による嵌合)された状態となるものである。
【0033】
なお、図7において、SMIFポッド12の構成は図1と同様であり、また開閉装置11における上記構成の伝達手段を除いた他の構成においても図1と同様である。
【0034】
そこで、図8に、図7の開閉装置におけるピン回転体の動作説明図を示す。図8(A)〜(C)において、ピン回転体23がコイルバネ52を内包してピン回転体支持部51に被せられた状態とされるのは図3と同様であるが、ピン回転体支持部51の中空内部は図8(B)に示すように断面円形状の一部円弧を切り欠いた形状とされている。また、レバー25の奥先端には回動板25Aが形成または取り付けられたもので、当該回動板25A上に上記固定軸56に相当する回動軸56Aが固着される。この回動軸56Aは、図8(C)に示されるように、上記ピン回転体支持部51の内部中空の断面形状と同一(相似)であって、当該ピン回転体支持部51の内部中空と嵌合される。
【0035】
一方、ピン回転体支持部51の下部(側面でもよい)は、当該ピン回転体支持部51を上下動させる伝達手段である伝達部71の一方端と関連され、当該伝達部71の一方端は上記回動軸56Aを避ける形状で形成される。この伝達部71の他方端は上記プランジャ61A,61Bと関連されており、その構成は図9で説明する。
【0036】
なお、図8においては、図3(B)で示したようにレバーガイド板57を設けている場合を示しているが、上記第1実施形態のようにレバー25でピン回転体23を上下動させるものではないことから、当該レバーガイド板57を省略することができるものである。
【0037】
ここで、図9に、図8における伝達部の説明図を示す。図9(A)は、プランジャ61A,61Bが上方位置の場合を示しており、その上端を載置部13上に突出させた状態である。この場合、当該プランジャ61A,61Bの最大幅より小の切欠を載置部13上に形成させて当該プランジャ61A,61Bが突出されすぎないようにしている。
【0038】
上記伝達部71は、その他方端のプランジャ61A,61Bと関連されている当接部分より、載置部13内に適宜設けられた支点板71A上に延出し、当該支点板71Aよりピン回転体23方向に所定角度で延出し、さらに適宜所定角度で延出するもので、上記一方端としてピン回転体支持部51と関連される。このような伝達部71におけるプランジャ61A,61Bの当接部分から支点板71Aへの長さ、支点板71A部分での角度、支点板71Aからピン回転体支持部51側への長さは、当該プランジャ61A,61Bの下方へのストロークでピン回転体23がピン嵌合位置まで上昇されるように設定される。
【0039】
すなわち、図9(B)に示すように、プランジャ61A,61BがSMIFポッド12と当接して下方に押し込まれると、伝達部71の他方端が下方に押し込まれ、支点板71Aの位置で同一角度を保つようにピン回転体23側が押し上げられることによりピン回転体支持部51(ピン回転体23)を上昇させ、嵌合ピン23A,23Bを載置部13上に突出させるものである。
【0040】
そこで、図8(A)に戻って説明すると、プランジャ61A,61BがSMIFポッド12と当接して下方に押し込まれると、嵌合ピン23A,23B(回転体32)が載置部13上に突出され、当該SMIFポッド12(保持部31)の底面のピン嵌合孔42A,42Bと嵌合される。そして、レバー25をレバーガイド切欠部24Aに沿って回動させると、回動軸56Aを介してピン回転体支持部51(ピン回転体23)が回動されることによって嵌合ピン23A,23Bを介してピン嵌合孔42A,42Bが回転される。したがって、ラッチ機構が動作されてポッドカバー32のラッチ係合部33A,33Bとラッチ爪34A,34Bとのロック状態が解除されるものである。
【0041】
すなわち、保持部31とポッドカバー32とのロックおよびロック解除の状態は、上記図4(B)および図5、図6と同様である。また、上記同様に、例えばレバー25がレバーガイド切欠部24Aの途中位置にあって、SMIFポッド12(載置部13)の底面のピン嵌合孔42A,42Bがずれていても、ピン回転体23はコイルバネ52により上下動できる状態であることから、当該ピン回転体23が上昇した時点では嵌合ピン23A,23Bがピン嵌合孔42A,42Bの周辺部分と当接した状態で維持され、レバー25を戻したり、進めたりすることでピン嵌合孔42A,42Bと嵌合ピン23A,23Bとを一致させ、この時点でコイルバネ52によって嵌合させることができるものである。
【0042】
このように、プランジャ61A,61Bによりピン回転体23を上下動させることによっても、上記同様に、SMIFポッド12が開閉装置11の載置部13上の所定位置(開閉位置)でないときにはピン回転体23は下方位置であることから、当該SMIFポッド12を載置部13上で水平移動させることができるようになり、これによってSMIFポッド12を開閉位置に対して容易に位置させて開閉作業の効率を向上させることができるようになるものである。
【0043】
【発明の効果】
以上のように、本発明によれば、基板保持容器が前記載置部上で水平移動されているときには係合手段を下方位置とさせ、所定位置に載置されたときには当該係合手段を上方位置とさせて関連部と係合状態となったときに操作手段で係合手段を介して関連部を動作させることでラッチ機構を動作させる構成とすることにより、基板保持容器を載置部上で水平移動させることで当該基板保持容器を開閉位置に対して容易に位置させることができ、開閉作業の効率を向上させることができるものである。
【図面の簡単な説明】
【図1】本発明に係る第1実施形態の基板保持容器開閉装置の外観構成図である。
【図2】図1の開閉装置におけるピン回転体の動作説明図である。
【図3】本発明の開閉装置に係る係合手段の概略構成図である。
【図4】基板保持容器の開閉装置によるロック解除動作の説明図(1)である。
【図5】基板保持容器の開閉装置によるロック解除動作の説明図(2)である。
【図6】基板保持容器の開閉装置によるロック動作の説明図である。
【図7】本発明に係る第2実施形態の基板保持容器開閉装置の外観構成図である。
【図8】図7の開閉装置におけるピン回転体の動作説明図である。
【図9】図8における伝達部の説明図である。
【符号の説明】
11          開閉装置
12          SMIFポッド
13          載置部
21          ガイド規制部
23          ピン回転体
24,58       レバーガイド切欠部
25          レバー
31          保持部
32          ポッドカバー
33          ラッチ係合部
34          ラッチ爪
36          基板ホルダ
37          基板
42          ピン嵌合孔
51          ピン回転体支持部
55,71       伝達部
61          プランジャ
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an opening and closing device that opens and closes a substrate holding container used when transporting and storing a substrate used in a predetermined process in semiconductor manufacturing.
[0002]
[Prior art]
2. Description of the Related Art In recent years, a substrate holding container called a standard mechanical interface (SMIF) pod standardized by SEMI E19 has been used to transport and store substrates such as photomasks, mask blanks, glass substrates, and wafers in semiconductor manufacturing. You. This SMIF pod is sealed to prevent dust from entering, and it is necessary to open and close the pod cover when taking out or carrying in. It is desired to improve the working efficiency by avoiding the complexity of opening and closing. I have.
[0003]
2. Description of the Related Art Conventionally, various automatic opening / closing devices for automatically opening and closing a pod when the substrate is stored in or taken out of a SMIF pod are known. At present, such an automatic opening / closing device is operated by a mechanism for manually opening / closing the device, including failures and maintenance of the device, because it is not easy for an operator to take out the substrate. On the other hand, since an automatic opening and closing device is expensive, an opening and closing device for opening and closing only manually is also required, and such a manual opening and closing device is described in, for example, JP-A-2002-76106. There is something.
[0004]
In the standardized SMIF pod, the holding portion for holding the substrate is formed of a transparent pod cover, and the holding portion and the pod cover are structured to be locked by a latch mechanism. By rotating a pin fitting hole provided on the bottom surface (back surface), a locked state and an unlocked state are provided. A predetermined number of holes (manufacturing jig holes) and the like for positioning the pod are formed on the bottom surface of the holding portion.
[0005]
According to the above-mentioned publication for opening and closing the SMIF pod as described above, a predetermined number of positioning pins on a stage on which the pod is mounted, and a rotation in which two fitting pins for fitting into the pin fitting holes are provided upright. A pedestal is provided, and the fitting pin is fitted into a pin fitting hole formed in the holding portion of the pod by fitting the SMIF pod to the positioning pin while lowering the SMIF pod from above. Then, the lock is released by rotating the lever connected to the rotating pedestal in the horizontal direction and rotating the pin fitting hole.
[0006]
[Problems to be solved by the invention]
However, the SMIF pod itself is heavy, and becomes heavier when the substrate is stored. Therefore, it is difficult to place such a SMIF pod on the above-mentioned stage or the like while positioning it from above. Is reduced.
[0007]
The present invention has been made in view of the above problems, and has as its object to provide a substrate holding container opening / closing device that easily positions a substrate holding container with respect to an opening / closing position and improves the efficiency of the opening / closing operation. .
[0008]
[Means for Solving the Problems]
In order to solve the above problem, according to the first aspect of the present invention, there is provided a substrate holding device including a lid portion and a holding portion having a latch mechanism for locking the lid portion, and a related portion for operating the latch mechanism. An opening / closing device for a substrate holding container for opening and closing a lid portion from the holding portion with respect to the container, wherein a mounting portion for mounting the substrate holding container at a predetermined position, and a vertically movable unit, An engaging means which is set to a lower position when the container is not placed at the predetermined position on the mounting portion, and which is set to an upper position when at least mounted to the predetermined position and is engaged with the related portion; An operation unit connected to the engagement unit, and operating the related unit via the engagement unit in a state where the engagement unit and the related unit are engaged with each other; I do.
[0009]
The invention according to claims 2 to 4 has a configuration that “provides a transmission unit that moves the engagement unit up and down by moving the operation unit up and down”.
"The substrate holding container is provided on the mounting portion so as to be vertically movable, and is located at an upper position when the substrate holding container is not mounted at the predetermined position on the mounting portion, and at least when the substrate holding container is mounted, the substrate holding container is A predetermined number of abutting means that is brought into a lower position by abutting on the engaging means; and when the abutting means is in the upper position, the engaging means is in the lower position; and when the abutting means is in the lower position, the engaging means is And a transmission means for setting the upper position to the upper position ''.
A configuration is provided in which "a regulating means for positioning the substrate holding container at a predetermined position on the mounting portion is provided on the mounting portion".
[0010]
As described above, when the substrate holding container is not placed at the predetermined position on the placing portion, the engaging means is set to the lower position, and when the substrate holding container is placed at the predetermined position, the engaging means is set to the upper position. The latch mechanism is operated by operating the related part by the operating means via the engaging means when the related part is engaged. That is, when the substrate holding container is not at the predetermined position, the engaging means is at the lower position, so that the substrate holding container can be horizontally moved on the mounting portion, and the substrate holding container can be easily moved to the open / close position. It is possible to improve the efficiency of the opening / closing operation by being positioned.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the present embodiment, the substrate to be stored will be described using a photomask as an example, but may be a mask blank, a glass substrate, a wafer, or the like as described above. Further, in the present embodiment, the number of substrates to be stored is described as a plurality, but the present invention can be applied to a case where a single substrate is stored.
[0012]
FIG. 1 shows an external configuration diagram of a substrate holding container opening and closing device according to a first embodiment of the present invention. In FIG. 1, a substrate holding container opening / closing device 11 opens and closes a substrate holding container, for example, the SMIF pod 12 described above. The opening / closing device 11 includes, for example, a box-shaped (not necessarily a box-shaped) mounting portion 13, and is a guide restricting means which is a restricting means for performing positioning when the SMIF pod 12 is horizontally moved from a predetermined direction. The portions 21A and 21B are provided on the mounting portion 13.
[0013]
A notch 22 is formed at a position corresponding to a predetermined position (open / close position) on the upper plate of the mounting portion 13, and the pin rotator 23 can be raised from the notch 22. That is, when the SMIF pod 12 is positioned on the mounting portion 13 by the guide restricting portions 21A and 21B, the pin fitting hole and the pin rotating member 23 are related portions for operating the latch mechanism provided in the holding portion. And the two fitting pins 23A and 23B erected at the same position. The pin rotating body 23 and the fitting pins 23A and 23B constitute a part of the engaging means.
[0014]
A lever guide cutout portion 24A is formed in a predetermined side portion of the mounting portion 13 in the horizontal direction, and a lever guide cutout portion 24B is formed in a vertical direction at an end portion (the left end in the figure). The distal end of the lever 25, which is an operation unit connected to the pin rotating body 23, is exposed from the lever guide cutouts 24A and 24B. The relationship between the pin rotator 23 and the lever 25 will be described with reference to FIG.
[0015]
On the other hand, the SMIF pod 12 is composed of a holding portion 31 and a pod cover 32 which is a transparent cover, and the holding portion 31 is engaged with latch engagement portions 33A and 33B formed on the pod cover 32. A latch mechanism (not shown) for operating latch pawls 34A and 34B for locking and unlocking in a relationship is provided. Further, a predetermined number of holder guides 35 are provided on the holding unit 31, and the substrate holder 36 is positioned while being regulated by the holder guides 35. The substrate holder 36 holds a predetermined number of substrates 37. The pod cover 32 is provided with grip portions 38A and 38B for lifting the pod cover 32 upward when the pod cover 32 is unlocked with the holding portion 31.
[0016]
Here, FIG. 2 shows an operation explanatory view of the pin rotating body in the opening and closing device of FIG. FIG. 2A is a bottom view of the SMIF pod 12, and FIG. 2B is a schematic perspective view for explaining the operation of the pin rotator in the opening and closing device 11. In FIG. 2A, arc-shaped latch guide notches 41A and 41B are formed on the bottom surface of the holding body 31 so as to face each other along a circular shape, and the above-described latch guide notches 41A and 41B are formed in the respective latch guide notches 41A and 41B. Pin fitting holes 42A and 42B, which are related parts for operating the latch mechanism, are arranged. The arrangement of the latch guide notches 41A and 41B and the pin fitting holes 42A and 42B is standardized by the above-described SEMI E19.
[0017]
On the other hand, in the opening / closing device 11 shown in FIG. 2B, when the lever 25 is moved up and down by the lever guide notch 24B, the pin rotator 23 (the fitting pins 23A and 23B) is transmitted via a transmission unit shown in FIG. ) Up and down. That is, when the SMIF pod 12 is not located on the mounting portion 13, the lever 25 is located above the lever guide notch 24B, and at this time, the pin rotating body 23 is located below.
[0018]
When the SMIF pod 12 is positioned on the placing portion 13 by the guide restricting portions 21A, 21B, the pin fitting holes 42A, 42B and the fitting pins 23A, 23B face each other, and the lever 25 is pushed down below the lever guide notch 24B, the pin rotating body 23 is raised, and the fitting pins 23A, 23B of the pin rotating body 23 are engaged with the fitting pins 23A, 23B respectively. I do. In this state, when the lever 25 is rotated along the lever guide notch 24A, the rotating body 23 (fitting pins 23A and 23B) is rotated, and the pin fitting holes 42A and 42B are rotated. Is to operate.
[0019]
Therefore, FIG. 3 shows a schematic configuration diagram of the engagement means according to the opening / closing device of the present invention. FIG. 3 (A) is an exploded view of the engagement means, and FIG. 3 (B) is a conceptual view of the operation thereof. 3A, the pin rotator 23 is supported by a pin rotator support 51 via a coil spring 52 as elastic means. The pin rotator 23 has an inverted concave shape, and has, for example, two (or one) fitting grooves 53A and 53B formed on its side, and has two fitting pins 23A on the upper portion as described above. , 23B are erected.
[0020]
The pin rotator supporting portion 51 is cylindrical and has a step formed therein to support the coil spring 52. In addition, fitting protrusions 54A and 54B that fit into the fitting grooves 53A and 53B formed in the pin rotating body 23 are formed on the side portions. Further, a transmitting portion 55 as a U-shaped transmitting means is rotatably attached to a side portion of the pin rotator supporting portion 51, and a lever 25 is attached to the transmitting portion 55.
[0021]
Then, the coil spring 52 is included in the pin rotator support portion 51, and the pin rotator 23 is fitted with the fitting protrusions 54A, 54B and the fitting grooves 53A, 53B, as shown in FIG. To form the engagement means. At this time, a clearance is formed inside the pin rotator 23 with respect to the pin rotator support portion 51 by the coil spring 52, and the pin rotator 23 can freely move up and down (for example, 10 mm to 20 mm).
[0022]
As shown in FIG. 3B, the pin rotator supporting portion 51 that supports the pin rotator 23 is fitted to a fixed shaft 56 provided on a bottom plate inside the mounting portion 13 so as to be vertically movable. A lever guide plate 57 is provided between the fixed shaft 56 and the lever guide cutouts 24A and 24B formed on the side of the mounting portion 13. The lever guide plate 57 is formed with a lever guide notch 58 for guiding the horizontal rotation of the lever 25. The lever guide plate 57 serves as a fulcrum when the pin rotator 23 is moved up and down by the up and down movement of the lever 25.
[0023]
That is, when the lever 25 is positioned above the lever guide notch 24B, the pin rotator 23 (pin rotator support portion 51) is supported on the lever guide notch 58 as a fulcrum on the fixed shaft 56 via the transmission portion 55. When the lever 25 is positioned below and the lever 25 is pushed down below the lever guide notch 24B, the pin rotator 23 (pin rotator support 51) is supported on the fixed shaft 56 via the transmission part 55 with the lever guide plate 57 as a fulcrum. It will be raised.
[0024]
Next, FIGS. 4 and 5 show explanatory views of the unlocking operation by the opening / closing device for the substrate holding container. 4 and 5, first, in the SMIF pod 12, a substrate holder 36 holding a predetermined number of substrates 37 is housed in a holding portion 31, and the holding portion 31 is covered with a pod cover 32 and latched. The portions 33A and 33B and the latch claws 34A and 34B are locked by the latch mechanism. In the opening / closing device 11, the lever 25 is located above the lever guide notch 24 </ b> B, and accordingly, the pin rotator 23 (tips of the fitting pins 23 </ b> A, 23 </ b> B) is located above the mounting portion 13. It is located below.
[0025]
As shown in FIG. 4A, the SMIF pod 12 is placed at one end (on the lever 25 side) on the mounting portion 13 of the opening / closing device 11. From this state, as shown in FIG. 4 (B), the upper surface of the mounting portion 13 is horizontally moved to the rear side, and is guided by the guide restricting portions 21A and 21B to come into contact with the innermost restricting portion for positioning. Is done. When the SMIF pod 12 is positioned on the opening / closing device 11, when the lever 25 is pushed down below the lever guide notch 24B, the pin rotating body 23 (the fitting pins 23A, 23B) is supported by the lever guide plate 57 as a fulcrum. Is raised on the fixed shaft 56 via the transmission portion 55, and the fitting pins 23A and 23B are fitted and engaged with the pin fitting holes 42A and 42B on the bottom surface of the mounting portion 13, respectively.
[0026]
Therefore, as shown in FIG. 5, when the lever 25 is rotated along the lever guide notch 24A, the pin fitting holes 42A and 42B rotate through the fitting pins 23A and 23B, and the latch mechanism operates. Then, the locked state by the latch engagement portions 33A, 33B and the latch claws 34A, 34B is released. As a result, the pod cover 32 is opened with respect to the holding unit 31. Then, the held substrate holder 36 is exposed by gripping and holding the grip portions 38A and 38B of the pod cover 32 and lifting the same, and the held substrate 37 is extracted and inserted.
[0027]
By the way, when the pin fitting holes 42A and 42B on the bottom surface of the SMIF pod 12 (mounting portion 13) are displaced and the pin rotating body 23 rises, the fitting pins 23A and 23B may not always be fitted. In this case, since the pin rotator 23 can be moved up and down by the coil spring 52, the fitting pins 23A and 23B contact the peripheral portions of the pin fitting holes 42A and 42B when the pin rotator 23 rises. The pins are kept in contact with each other, and the pin fitting holes 42A, 42B and the fitting pins 23A, 23B coincide with each other while the pin rotating body 23 is being rotated, and can be fitted by the coil spring 52 at this time. It is.
[0028]
Next, FIG. 6 shows an explanatory view of the locking operation by the opening / closing device for the substrate holding container. FIG. 6 shows the case where the substrate holder 36 is replaced from the state of FIG. 5 or the substrate holder 36 is not stored in the SMIF pod 12 in this case (in this case, the holding portion 31 and the pod cover 32 are in the locked state), and the lock is released. The case where the pod cover 32 is raised from above to accommodate the substrate holder 36 is shown.
[0029]
In FIG. 6, the holding portion 31 of the SMIF pod 12 is set on the opening / closing device 11, and the lever 25 is positioned at the opposite end of the lever guide notch 24A and is unlocked. Therefore, a substrate holder 36 holding a predetermined number of substrates 37 is placed on the holding portion 31 by positioning with the holder guide 35. Thereafter, the pod cover 32 is covered on the holding portion 31, and the lever 25 is rotated along the lever guide notch portion 24A, whereby the pin fitting holes 42A and 42B are rotated to operate the latch mechanism, and the pod is rotated. The latch engagement portions 33A and 33B of the cover 32 and the latch claws 34A and 34B of the holding portion 31 are engaged with each other to lock. Then, by moving the lever 25 above the lever guide notch 24B and lowering the pin rotating body 23, the SMIF pod 12 can be horizontally moved and taken out from the opening / closing device 11 contrary to FIG. You can do it.
[0030]
As described above, when the SMIF pod 12 is not at the predetermined position (opening / closing position) on the mounting portion 13 of the opening / closing device 11, the pin rotator 23 is at the lower position. This makes it possible to move the SMIF pod 12 easily with respect to the opening / closing position, thereby improving the efficiency of the opening / closing operation. Although not shown, even when the SMIF pod 12 is placed at a predetermined position on the placing portion 13 from above, the pin rotator 23 is at the lower position when the SMIF pod 12 is not placed. It is not necessary to perform the fitting while the pin fitting holes 42A, 42B and the fitting pins 23A, 23B are fitted to each other, and the mounting can be easily performed. This is the same in the following embodiments.
[0031]
Next, FIG. 7 shows an external configuration diagram of a substrate holding container opening / closing device according to a second embodiment of the present invention. In FIG. 7, on the mounting portion 13 of the opening and closing device 11, for example, two (one) may be provided on the back side (not necessarily the back side) into which the SMIF pod 12 is inserted by horizontal movement. Plungers 61A and 61B, which are abutting means, are provided so as to be vertically movable, and only the lever guide notch 24A for guiding the rotation of the lever 25 is formed so that the lever guide notch 24B is not required. It is.
[0032]
The up and down movement of the plungers 61A and 61B moves the pin rotating body 23 up and down via transmission means described later with reference to FIGS. That is, when the plungers 61A and 61B are projected above the mounting portion 13 at the upper position, the pin rotating body 23 (the fitting pins 23A and 23B) is positioned below and protruded above the mounting portion 13. When the plungers 61A and 61B abut against the SMIF pod 12 and are pushed in, the pin rotator 23 (fitting pins 23A and 23B) rises to fit the fitting pins 23A and 23B and the pin fitting holes 42A. , 42B are fitted (or fitted by the rotation of the lever 25).
[0033]
In FIG. 7, the configuration of the SMIF pod 12 is the same as that of FIG. 1, and the other configuration of the opening and closing device 11 except for the transmission unit of the above configuration is also the same as that of FIG. 1.
[0034]
Therefore, FIG. 8 is a view for explaining the operation of the pin rotator in the opening and closing device of FIG. 8A to 8C, the pin rotator 23 is covered with the pin rotator support 51 with the coil spring 52 included therein, as in FIG. As shown in FIG. 8B, the hollow interior of the portion 51 has a shape in which a part of a circular cross section is cut off. A turning plate 25A is formed or attached to the rear end of the lever 25, and a turning shaft 56A corresponding to the fixed shaft 56 is fixed on the turning plate 25A. As shown in FIG. 8 (C), the rotating shaft 56A has the same (similar) cross-sectional shape as the internal hollow of the pin rotator support 51, and the internal hollow of the pin rotator support 51. Is fitted.
[0035]
On the other hand, a lower portion (or a side surface) of the pin rotator supporting portion 51 is associated with one end of a transmitting portion 71 which is a transmitting means for moving the pin rotator supporting portion 51 up and down. It is formed in a shape avoiding the rotation shaft 56A. The other end of the transmission portion 71 is associated with the plungers 61A and 61B, and the configuration will be described with reference to FIG.
[0036]
Although FIG. 8 shows the case where the lever guide plate 57 is provided as shown in FIG. 3B, the pin rotator 23 is moved up and down by the lever 25 as in the first embodiment. Since this is not done, the lever guide plate 57 can be omitted.
[0037]
Here, FIG. 9 shows an explanatory diagram of the transmission unit in FIG. FIG. 9A shows a case where the plungers 61A and 61B are at the upper position, and the upper ends thereof are projected above the mounting portion 13. In this case, a notch smaller than the maximum width of the plungers 61A and 61B is formed on the mounting portion 13 so that the plungers 61A and 61B are not excessively protruded.
[0038]
The transmission portion 71 extends from a contact portion associated with the other end plungers 61A and 61B onto a fulcrum plate 71A appropriately provided in the mounting portion 13, and the pin rotator is moved from the fulcrum plate 71A. It extends at a predetermined angle in 23 directions, and further extends at a predetermined angle as appropriate, and is related to the pin rotating body support 51 as the one end. The length of the transmitting portion 71 from the contact portion of the plungers 61A and 61B to the fulcrum plate 71A, the angle at the fulcrum plate 71A portion, and the length from the fulcrum plate 71A to the pin rotator supporting portion 51 side are as follows. The pin rotator 23 is set so as to be raised to the pin fitting position by the downward stroke of the plungers 61A and 61B.
[0039]
That is, as shown in FIG. 9B, when the plungers 61A and 61B abut against the SMIF pod 12 and are pushed downward, the other end of the transmission portion 71 is pushed downward, and the same angle is obtained at the position of the fulcrum plate 71A. When the pin rotator 23 side is pushed up so as to maintain the position, the pin rotator support portion 51 (pin rotator 23) is raised, and the fitting pins 23A and 23B are projected onto the mounting portion 13.
[0040]
Returning to FIG. 8A, when the plungers 61A and 61B come into contact with the SMIF pod 12 and are pushed downward, the fitting pins 23A and 23B (the rotator 32) project above the mounting portion 13. Then, it is fitted into the pin fitting holes 42A and 42B on the bottom surface of the SMIF pod 12 (holding portion 31). When the lever 25 is turned along the lever guide notch 24A, the pin rotator supporting portion 51 (pin rotator 23) is turned via the turning shaft 56A, so that the fitting pins 23A and 23B are fitted. , The pin fitting holes 42A and 42B are rotated. Therefore, the latch mechanism is operated to release the locked state between the latch engaging portions 33A, 33B of the pod cover 32 and the latch claws 34A, 34B.
[0041]
That is, the state of locking and unlocking between the holding portion 31 and the pod cover 32 is the same as that in FIG. 4B, FIG. 5, and FIG. As described above, even if the lever 25 is located at an intermediate position of the lever guide notch 24A and the pin fitting holes 42A and 42B on the bottom surface of the SMIF pod 12 (mounting portion 13) are displaced, for example, Since the pin 23 can be moved up and down by the coil spring 52, the fitting pins 23A and 23B are maintained in contact with the peripheral portions of the pin fitting holes 42A and 42B when the pin rotating body 23 rises. By returning or advancing the lever 25, the pin fitting holes 42A, 42B are matched with the fitting pins 23A, 23B. At this point, the fitting can be performed by the coil spring 52.
[0042]
In this manner, by moving the pin rotator 23 up and down by the plungers 61A and 61B, as described above, when the SMIF pod 12 is not at the predetermined position (opening / closing position) on the mounting portion 13 of the opening / closing device 11, the pin rotator 23 is moved. Since 23 is the lower position, the SMIF pod 12 can be horizontally moved on the mounting portion 13, whereby the SMIF pod 12 can be easily positioned with respect to the opening / closing position, thereby improving the efficiency of the opening / closing operation. Can be improved.
[0043]
【The invention's effect】
As described above, according to the present invention, when the substrate holding container is horizontally moved on the placing portion, the engaging means is set at the lower position, and when the substrate holding container is placed at the predetermined position, the engaging means is set at the upper position. The substrate holding container is placed on the mounting portion by operating the latch portion by operating the relevant portion via the engaging means by the operating means when the substrate holding container is in the engaged state with the relevant portion by setting the substrate holding container on the mounting portion. By moving horizontally, the substrate holding container can be easily positioned with respect to the open / close position, and the efficiency of the open / close operation can be improved.
[Brief description of the drawings]
FIG. 1 is an external configuration diagram of a substrate holding container opening and closing device according to a first embodiment of the present invention.
FIG. 2 is an operation explanatory view of a pin rotating body in the opening and closing device of FIG. 1;
FIG. 3 is a schematic configuration diagram of an engagement means according to the opening / closing device of the present invention.
FIG. 4 is an explanatory view (1) of an unlocking operation of the substrate holding container opening / closing device.
FIG. 5 is an explanatory view (2) of the unlocking operation by the opening / closing device for the substrate holding container.
FIG. 6 is an explanatory view of a locking operation by the opening / closing device for the substrate holding container.
FIG. 7 is an external configuration diagram of a substrate holding container opening / closing device according to a second embodiment of the present invention.
FIG. 8 is an operation explanatory view of a pin rotating body in the opening and closing device of FIG. 7;
FIG. 9 is an explanatory diagram of a transmission unit in FIG. 8;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 Opening-closing device 12 SMIF pod 13 Mounting part 21 Guide control part 23 Pin rotation body 24, 58 Lever guide notch 25 Lever 31 Holding part 32 Pod cover 33 Latch engaging part 34 Latch nail 36 Board holder 37 Board 42 Pin fitting Hole 51 Pin rotating body support 55, 71 Transmission 61 Plunger

Claims (4)

蓋部と、当該蓋部をロックするラッチ機構を備えた保持部とで構成され、当該ラッチ機構を動作させる関連部を備えた基板保持容器に対し、当該保持部より蓋部を開閉状態とさせる基板保持容器の開閉装置であって、
前記基板保持容器を所定位置に載置させる載置部と、
上下動自在であり、前記基板保持容器が前記載置部上で前記所定位置に載置されていないときには下方位置とされ、少なくとも所定位置に載置されたときには上方位置とされて前記関連部と係合状態とされる係合手段と、
前記係合手段と連結され、当該係合手段と前記関連部とが係合されている状態で、当該係合手段を介して当該関連部を動作させるための操作部と、
を有することを特徴とする基板保持容器の開閉装置。
The lid is opened and closed by the holding part for a substrate holding container including a lid and a holding part having a latch mechanism for locking the lid, and a related part for operating the latch mechanism. An opening and closing device for a substrate holding container,
A mounting portion for mounting the substrate holding container at a predetermined position,
The substrate holding container is freely movable up and down, and is set to a lower position when the substrate holding container is not placed at the predetermined position on the mounting portion, and is set to an upper position at least when the substrate holding container is mounted at the predetermined position. Engagement means brought into an engaged state;
An operation unit that is connected to the engagement unit and operates the related unit via the engagement unit in a state where the engagement unit and the related unit are engaged;
An opening and closing device for a substrate holding container, comprising:
請求項1記載の基板保持容器の開閉装置であって、前記操作手段を上下動させることで前記係合手段を上下動させる伝達手段を備えることを特徴とする基板保持容器の開閉装置。2. The opening / closing device for a substrate holding container according to claim 1, further comprising a transmitting unit that moves the engaging unit up and down by moving the operating unit up and down. 請求項1記載の基板保持容器の開閉装置であって、
前記載置部に上下動自在に設けられ、前記基板保持容器が当該載置部上で前記所定位置に載置されていないときには上方位置とされ、少なくとも載置されたときに当該基板保持容器と当接することにより下方位置とされる所定数の当接手段と、
前記当接手段が上方位置のときには前記係合手段を下方位置とさせ、当該当接手段が下方位置のときには当該係合手段を上方位置とさせる伝達手段と、
を備えることを特徴とする基板保持容器の開閉装置。
It is an opening and closing device of a substrate holding container according to claim 1,
The substrate holding container is provided to be freely movable up and down, and is located at an upper position when the substrate holding container is not placed at the predetermined position on the mounting portion, and at least when the substrate holding container is placed, A predetermined number of abutting means that is brought to a lower position by abutting;
A transmission unit that causes the engagement unit to be at the lower position when the contact unit is at the upper position, and sets the engagement unit to be at the upper position when the contact unit is at the lower position;
An opening and closing device for a substrate holding container, comprising:
請求項1〜3の少なくとも何れかに記載の基板保持容器の開閉装置であって、前記基板保持容器を、前記載置部上の所定位置に位置させるための規制手段が当該載置部に設けられることを特徴とする基板保持容器の開閉装置。The opening / closing device for a substrate holding container according to at least one of claims 1 to 3, wherein a regulating means for positioning the substrate holding container at a predetermined position on the mounting portion is provided on the mounting portion. An opening and closing device for a substrate holding container.
JP2002209558A 2002-07-18 2002-07-18 Opening and closing device for substrate holding container Expired - Lifetime JP4156286B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002209558A JP4156286B2 (en) 2002-07-18 2002-07-18 Opening and closing device for substrate holding container
PCT/JP2002/012860 WO2004010492A1 (en) 2002-07-18 2002-12-09 Opening/closing device of substrate holding container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002209558A JP4156286B2 (en) 2002-07-18 2002-07-18 Opening and closing device for substrate holding container

Publications (2)

Publication Number Publication Date
JP2004055733A true JP2004055733A (en) 2004-02-19
JP4156286B2 JP4156286B2 (en) 2008-09-24

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ID=30767690

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Country Status (2)

Country Link
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WO (1) WO2004010492A1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
JP2002076106A (en) * 2000-08-28 2002-03-15 Dainippon Printing Co Ltd Box opening/closing apparatus

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WO2004010492A1 (en) 2004-01-29

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