JP2004037184A - Contact probe unit and inspection device provided with it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe unit and an inspection device usable in common for inspection of a liquid crystal display device even if the size of the liquid crystal display device, or the number or pitch of signal input terminals thereof is different. <P>SOLUTION: This contact probe unit is provided with a plurality of contact probes 6 aligned in parallel with one another so as to inspect an object device by inputting electric signals to a plurality of signal input terminals 3 arranged in the object device, and having tips arranged along a certain direction. The arrangement pitch P of the contacts 6 in the arrangement length direction is smaller than the length M of a space between the input terminals 3 adjacent to each other. The arrangement pitch P is smaller than a value obtained by subtracting a half of a contact diameter D of the contact probe 6 from the width L of the input terminal 3. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an inspection device used for inspecting a liquid crystal display device and other electronic devices. In addition, the present invention relates to a contact probe unit for inputting an electric signal by contacting an object in the inspection. In the present specification, each needle-like one is referred to as a “contact probe”, and a plurality of contact probes collected and fixed in a fixed arrangement is referred to as a “contact probe unit”.
[0002]
[Prior art]
2. Description of the Related Art Liquid crystal display devices are widely used from small display devices incorporated in portable telephones to large display devices such as large-screen televisions because of their low power consumption and thinness and lightness. In accordance with an increase in demand for each of these uses, the production amount of liquid crystal display devices having various screen sizes tends to increase.
[0003]
A liquid crystal display device is a device in which a liquid crystal is sealed between two glass substrates, and a polarizing plate is attached to each of the front and back sides of a liquid crystal panel, a circuit board and the like are mounted, and a backlight and a cover are mounted. . In a liquid crystal panel, electrodes are arranged inside a glass substrate, and an electric signal is externally applied between electrodes opposed to each other with a liquid crystal layer interposed therebetween, so that the liquid crystal interposed therebetween is incident from the outside. Modulates light and displays points. The liquid crystal display device can display information by such a set of light modulations.
[0004]
Note that a liquid crystal panel alone also corresponds to a liquid crystal display device in a broad sense, and hence is hereinafter referred to as a “liquid crystal display device” including the case of only a liquid crystal panel.
[0005]
The liquid crystal display device has a large number of pixel electrodes two-dimensionally arranged in the screen area. In recent years, as the quality of liquid crystal display devices has become higher, the occupation rate of active matrix type liquid crystal display devices in which switching elements such as TFTs (Thin Film Transistors) are added to each pixel electrode is increasing. However, since the manufacturing process of the switching element is complicated, linear defects caused by disconnection or short circuit of the scanning lines and signal lines, point defects caused by defective switching elements, and defects such as display unevenness occur. I do. In addition, in order to improve the production yield and the display quality of the liquid crystal display device as the final product, it is necessary to promptly feed back the status of occurrence of defects to the process. Therefore, a display device in a state before a switching element such as a TFT is completed, or in a state before mounting such as an expensive driver circuit, TAB (Tape Automated Bonding), or a backlight is important.
[0006]
In recent years, among liquid crystal display devices, in particular, a low-temperature polysilicon type liquid crystal display device in which peripheral circuits such as a driver IC are formed on a glass substrate has been developed from the viewpoint of high definition, low power consumption and high reliability. , And its development and production have been active.
[0007]
FIGS. 5A to 5C show the appearance of a liquid crystal panel 100 of a typical low-temperature polysilicon liquid crystal display device. A CF-side substrate 1, which is a glass substrate on which a CF (Color Filter) is formed, and a TFT-side substrate 2, which is a glass substrate on which a TFT and a peripheral circuit are formed, are bonded to each other. Is input, an image is displayed on the screen area 4. In the liquid crystal panel 100, individual signals are input to matrix wirings in the screen area 4 via a peripheral circuit (not shown) formed on the TFT-side substrate 2. The number of signal input terminals is smaller than that of the type in which peripheral circuits are not arranged.
[0008]
(Lighting inspection flow)
FIG. 6 shows a flowchart for lighting inspection of a liquid crystal display device by a contact probe unit or an inspection device based on the prior art. In the lighting test, it is necessary to apply a predetermined signal voltage to each of the signal input terminals 3 to light the liquid crystal display device. For this purpose, first, as in step S1, a contact probe unit designed to match each signal input terminal of the liquid crystal display device is manufactured. Next, as in step S2, the contact probe unit is incorporated into a lighting inspection device. Further, as in step S3, position adjustment is performed so that each contact probe matches a corresponding signal input terminal on the liquid crystal display device side. As in step S4, the contact probe unit or the liquid crystal display device is raised and lowered, and each contact probe is brought into contact with the signal input terminal. As in step S5, an individual electric signal is input to each signal input terminal via each contact probe. Thus, the lighting inspection is performed as in step S6.
[0009]
Steps S1 and S2 surrounded by a broken line in FIG. 6 are necessary only at the time of so-called “setup change” when a new model is supported. Need not be performed, and only steps S3 to S6 may be repeated.
[0010]
7 and 8 show a state in which the contact probe 106 is in contact with the signal input terminal 3 of the liquid crystal display device. Each contact probe 106 comes into contact with one of the contact positions 105 of the corresponding signal input terminal 3 one by one. FIG. 8 is a sectional view taken along line VIII-VIII of FIG. When performing the lighting inspection of the liquid crystal display device, an electric signal emitted from a signal generator (not shown) is input to the signal input terminal 3 via the contact probe 106, and the inspection is performed.
[0011]
[Problems to be solved by the invention]
However, when testing liquid crystal display devices with different sizes or with different numbers of signal input terminals and pitches, it is necessary to prepare contact probe units designed to the specifications of each individual liquid crystal display device. There is. If the number of signal input terminal blocks to be inspected and the number of inspection devices to be operated increase, a corresponding number of contact probe units must be prepared before the start of production. Since it takes time to design and manufacture the contact probe unit, it has been a bottleneck to shorten the period from when the design of a new model of a liquid crystal display device to be produced next is decided to when production starts. Furthermore, the replacement work of the contact probe unit is a very fine adjustment work of assembling it into the inspection device so that the arrangement of the contact probes matches the arrangement of the signal input terminals. I had to do it.
[0012]
Further, when the production of a certain model is temporarily terminated and the setup is changed to another model, it is necessary to safely store a large number of unused contact probe units until the next use. Generally, since the contact probe unit is expensive, such a management is not only inconvenient, but also increases expenses.
[0013]
Therefore, an object of the present invention is to provide a contact probe unit and an inspection apparatus that can be commonly used even when the size of the liquid crystal display device, the number of signal input terminals, and the pitch are different in the inspection of the liquid crystal display device.
[0014]
[Means for Solving the Problems]
In order to achieve the above object, a contact probe unit according to the present invention is aligned in parallel for testing the target device by inputting electrical signals to a plurality of signal input terminals arranged in the target device. And a plurality of contact probes whose tips are arranged along a certain direction. The arrangement pitch of the contact probes in the arrangement length direction is smaller than the length of the gap between the signal input terminals adjacent to each other, and the arrangement pitch is 1 / の of the contact diameter of the contact probe based on the width of the signal input terminals. It is smaller than the length minus 2. By adopting this configuration, when the contact probe unit is brought into contact with an object, one of the signal input terminals surely comes into contact with each of the signal input terminals, and between the signal input terminals adjacent to each other. Means that there is at least one contact probe that does not contact any of the signal input terminals. Therefore, it is possible to determine which contact probe is in contact with which signal input terminal. Based on this information, what kind of signal should be input to each contact probe for the inspection is determined. Therefore, it is possible to cope with the inspection of a new model without changing the contact probe.
[0015]
In the above invention, preferably, the arrangement length of the plurality of contact probes is longer than the arrangement length of the plurality of signal input terminals of the target device. By adopting this configuration, the same contact probe unit can be used as it is even when corresponding to a model in which the arrangement length of the signal input terminals is slightly different.
[0016]
Preferably, in the above invention, the plurality of contact probes are arranged in a staggered manner. By adopting this configuration, the restriction due to the diameter of the contact probe itself can be relaxed, and the contact probes can be arranged with higher density. Therefore, it is possible to cope with signal input terminals arranged at a narrower pitch.
[0017]
In order to achieve the above object, an inspection apparatus according to the present invention includes the above-described contact probe unit, an electric capacitance measuring unit connected to the contact probe unit, and an electric capacitance measuring unit based on a measurement result obtained from the electric capacitance measuring unit. Specifying means for specifying the contact probe in contact with the signal input terminal. By adopting this configuration, it is possible to determine which contact probe is to be applied with a voltage so that a voltage can be applied to the signal input terminal, so that a type of inspection in which a voltage is applied to the display device can be performed.
[0018]
In the above invention, preferably, the specifying means is for specifying a correspondence relationship between each of the signal input terminals and the contact probe which is in contact with the signal input terminal. By adopting this configuration, the correspondence can be grasped. Therefore, even when the voltage to be applied to each signal input terminal is different, an appropriate voltage is applied to each signal input terminal to perform a correct inspection. Can be performed.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
(Embodiment 1)
(Constitution)
With reference to FIGS. 1A and 1B, a contact probe unit according to a first embodiment of the present invention will be described. This contact probe unit includes a plurality of contact probes arranged in parallel and having tips arranged along a certain direction. The pitch of the contact probes provided in the contact probe unit is P, the contact diameter of the contact probe (diameter of the surface in contact with the signal input terminal) is D, the length of the gap between the signal input terminals is M, Assuming that the width of one terminal is L, this contact probe unit is designed such that the following relational expression is satisfied.
[0020]
P <M ‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥‥ (Equation 1)
P <LD / 2 ‥‥‥‥‥‥‥‥‥‥‥‥ (Equation 2)
(Action / Effect)
When the above equations 1 and 2 are simultaneously satisfied, one of the contact probes 6 surely comes into contact with each of the signal input terminals 3 as shown in FIGS. At least one contact probe 6 that does not contact any of the signal input terminals 3 exists between the terminals 3. Therefore, it is possible to determine which signal input terminal 3 of the contact probe 6 is in contact with any one of the signal input terminals 3. FIG. 1B is a cross-sectional view taken along line IB-IB of FIG. 1A. Hatching is applied to any of the contact probes 6 which are in contact with any of the signal input terminals 3 and are in conduction. Is shown with Here, it can be seen that conduction is established in four of the ten contact probes 6.
[0021]
(Lighting inspection flow)
FIG. 2 is a flowchart showing a lighting inspection of the liquid crystal display device by the contact probe unit according to the present invention. Steps S1 to S4 are the same as the respective steps in the above-described conventional contact probe unit. In the case where the contact probe unit according to the present embodiment is used, when each contact probe is brought into contact with the signal input terminal in step S4, instead of proceeding to the lighting inspection as it is, as in step SN1, each contact probe 6 Measure the capacity. It is possible to determine whether or not the contact probe 6 is in contact with the signal input terminal 3 based on the detected capacitance. In this way, the contact probe 6 that is in contact with the signal input terminal 3 among all the contact probes 6 is specified as in step SN2. As in step SN3, it is specified which signal input terminal 3 each of the contact probes 6 in contact with the signal input terminal 3 is in contact with the arrangement of the signal input terminal 3. When the specification of the correspondence is completed, it is determined what signal should be input to each contact probe 6 for the lighting inspection. Based on this information, an individual electric signal is input to each signal input terminal via each contact probe 6 as in step SN4. Step S6 and subsequent steps are the same as those in the related art.
[0022]
In FIG. 2, steps S1 and S2 and SN1 to SN3 surrounded by broken lines are necessary only at the time of so-called "setup changeover" when corresponding to a new model. , Only steps S3, S4, SN4, and S6 need to be performed. Further, even when the model to be inspected is changed, if the arrangement length of the signal input terminals does not exceed the arrangement length of the contact probes, steps S1 and S2 do not need to be performed again. , SN1 to SN4, and S6 only in this order.
[0023]
(Embodiment 2)
(Constitution)
Referring to FIG. 3, an inspection apparatus according to the second embodiment of the present invention will be described. This inspection apparatus has the same contact probe unit 7 as the contact probe unit described in the first embodiment as the contact probe unit 7.
[0024]
A signal input terminal 3 is arranged on a TFT side substrate 2 of the liquid crystal display device. When this is installed on an inspection stage (not shown) of the inspection apparatus according to the present embodiment, the contact probe unit 7 approaches and the contact probe 6 comes into contact with the signal input terminal 3 as shown in FIG. In order that the contact probe unit 7 can be used commonly for as many models as possible, the arrangement length N of the contact probes 6 is set to be longer than the arrangement length S of the signal input terminals 3 with a certain margin. deep. By doing so, the same contact probe unit 7 can be used as it is even when corresponding to a model in which the arrangement length of the signal input terminals is slightly different.
[0025]
(Inspection procedure)
When this inspection apparatus is used for the first time to inspect a new type of liquid crystal display device, steps SN1 to SN3 are performed following steps S2 to S4 in FIG. That is, after the step S4, the capacitance of each contact probe is automatically measured by the capacitance measuring device while the switch 8 (see FIG. 3) is switched to the capacitance measuring device side. The measurement result is sent to the control device. The control device specifies a contact probe that is in contact with the signal input terminal (step SN2), and determines which contact probe is in contact with which signal input terminal based on the arrangement information of the signal input terminals registered in advance. A correspondence is derived (step SN3). Thereafter, the switch 8 is switched to the lighting signal generator side, a predetermined electric signal is input to the contact probe in contact with each signal input terminal (step SN4), the liquid crystal display device is driven, and the lighting test is started. (Step S6).
[0026]
(Embodiment 3)
(Constitution)
Referring to FIG. 4, a contact probe unit according to a third embodiment of the present invention will be described. FIG. 4 shows a positional relationship when the contact probe unit is brought into contact with a signal input terminal of a liquid crystal display device. In this contact probe unit, the contact probes are arranged in a staggered manner. By arranging the contact probes in a staggered shape instead of a straight line, restrictions on the arrangement pitch due to the diameter of the contact probes themselves can be relaxed, and the contact probes can be arranged at a higher density. Therefore, it is possible to cope with signal input terminals arranged at a narrower pitch. Even when the contact probes are arranged in a staggered manner, the pitch of the contact probes refers to the pitch P along the arrangement length direction (the left-right direction in the figure) as shown in FIG. In this case as well, it suffices that the above expressions 1 and 2 are simultaneously satisfied.
[0027]
The contact probe unit and the inspection device according to the present invention are not limited to the lighting inspection of the liquid crystal display device, but can be applied to other electrical inspections. The display device to be inspected is not limited to a liquid crystal display device, for example, a low-temperature polysilicon liquid crystal display device, an amorphous liquid crystal display device, an STN (Super Twisted Nematic) liquid crystal display device, and a PDP (Plasma Display). A display device other than liquid crystal, such as a Panel (Panel) or EL (Electro Luminescence) display, may be used.
[0028]
Note that the above-described embodiment disclosed this time is illustrative in all aspects and is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and includes all modifications within the scope and meaning equivalent to the terms of the claims.
[0029]
【The invention's effect】
According to the present invention, when each contact probe unit is brought into contact with an object, any one of the contact probes surely comes into contact with each signal input terminal, and between signal input terminals adjacent to each other, There will be at least one contact probe that does not contact any of the signal input terminals. Therefore, it can be determined which contact probe is in contact with which signal input terminal, and based on this information, what kind of signal should be input to each contact probe for inspection is determined. Therefore, an appropriate inspection can be performed corresponding to the inspection of the new model without changing the contact probe.
[Brief description of the drawings]
FIG. 1A is a plan view showing an overlapping state between a tip of a contact probe and a signal input terminal of a contact probe unit according to a first embodiment of the present invention. (B) is an arrow sectional view regarding the IB-IB line of (a).
FIG. 2 is a flowchart for lighting inspection of the liquid crystal display device by the contact probe unit according to the first embodiment of the present invention.
FIG. 3 is a conceptual diagram of a use state of an inspection device according to a second embodiment of the present invention.
FIG. 4 is a plan view showing how a contact probe unit and a signal input terminal overlap in a third embodiment according to the present invention.
5A is a plan view, and FIGS. 5B and 5C are side views of a liquid crystal panel based on the prior art.
FIG. 6 is a flow chart for lighting inspection of a liquid crystal display device by a contact probe unit or an inspection device based on the prior art.
FIG. 7 is a plan view showing how a contact probe tip and a signal input terminal of a contact probe unit based on the prior art overlap.
FIG. 8 is a cross-sectional view taken along line VIII-VIII of FIG. 7;
[Explanation of symbols]
1 CF side substrate, 2 TFT side substrate, 3 signal input terminals, 4 screen areas, 5,105 contact positions, 6,106 contact probes, 7 contact probe units, 8 switches, 100 liquid crystal panels.

Claims (5)

By inputting electrical signals to a plurality of signal input terminals arranged in the target device, a plurality of contact probes arranged in parallel and having tips aligned along a certain direction for testing the target device are provided. Prepare,
The arrangement pitch of the contact probes in the arrangement length direction is smaller than the length of the gap between the signal input terminals adjacent to each other, and the arrangement pitch is 1 / の of the contact diameter of the contact probe based on the width of the signal input terminals. Contact probe unit smaller than the length minus 2. The contact probe unit according to claim 1, wherein an arrangement length of the plurality of contact probes is longer than an arrangement length of the plurality of signal input terminals of the target device. The contact probe unit according to claim 1, wherein the plurality of contact probes are arranged in a staggered manner. A contact probe unit according to claim 1,
Capacitance measuring means connected to the contact probe unit,
An inspection device comprising: an identification unit configured to identify the contact probe that is in contact with the signal input terminal based on a measurement result obtained from the capacitance measurement unit. The inspection device according to claim 4, wherein the specifying unit is for specifying a correspondence between each of the signal input terminals and the contact probe that is in contact with the signal input terminal.

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