JP2004031929A5 - - Google Patents

Download PDF

Info

Publication number
JP2004031929A5
JP2004031929A5 JP2003125440A JP2003125440A JP2004031929A5 JP 2004031929 A5 JP2004031929 A5 JP 2004031929A5 JP 2003125440 A JP2003125440 A JP 2003125440A JP 2003125440 A JP2003125440 A JP 2003125440A JP 2004031929 A5 JP2004031929 A5 JP 2004031929A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003125440A
Other languages
Japanese (ja)
Other versions
JP2004031929A (ja
JP4532845B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003125440A priority Critical patent/JP4532845B2/ja
Priority claimed from JP2003125440A external-priority patent/JP4532845B2/ja
Publication of JP2004031929A publication Critical patent/JP2004031929A/ja
Publication of JP2004031929A5 publication Critical patent/JP2004031929A5/ja
Application granted granted Critical
Publication of JP4532845B2 publication Critical patent/JP4532845B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003125440A 2002-04-30 2003-04-30 管理システム及び方法並びにデバイス製造方法 Expired - Fee Related JP4532845B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003125440A JP4532845B2 (ja) 2002-04-30 2003-04-30 管理システム及び方法並びにデバイス製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002129326 2002-04-30
JP2003125440A JP4532845B2 (ja) 2002-04-30 2003-04-30 管理システム及び方法並びにデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2004031929A JP2004031929A (ja) 2004-01-29
JP2004031929A5 true JP2004031929A5 (sr) 2006-06-22
JP4532845B2 JP4532845B2 (ja) 2010-08-25

Family

ID=31190024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003125440A Expired - Fee Related JP4532845B2 (ja) 2002-04-30 2003-04-30 管理システム及び方法並びにデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4532845B2 (sr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005096353A1 (ja) * 2004-03-31 2005-10-13 Nikon Corporation アライメント条件決定方法及び装置、並びに露光方法及び装置
US7259828B2 (en) * 2004-05-14 2007-08-21 Asml Netherlands B.V. Alignment system and method and device manufactured thereby
JP2006140204A (ja) * 2004-11-10 2006-06-01 Nikon Corp 計測条件の最適化方法、該最適化方法を使用した位置計測方法、該位置計測方法を使用した位置合わせ方法、該位置合わせ方法を使用したデバイス製造方法、計測条件の最適化システム、該最適化システムを使用した位置計測装置及び該位置計測装置を使用した露光装置
JP2007027573A (ja) 2005-07-20 2007-02-01 Canon Inc 露光装置および露光方法ならびにこれらの露光装置または露光方法を用いたデバイス製造方法
JP4984038B2 (ja) * 2006-07-27 2012-07-25 株式会社ニコン 管理方法
US8175831B2 (en) 2007-04-23 2012-05-08 Kla-Tencor Corp. Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
WO2008151083A1 (en) 2007-05-30 2008-12-11 Kla-Tencor Corporation Feedforward/feedback litho process control of stress and overlay
JP2009283600A (ja) * 2008-05-21 2009-12-03 Nec Electronics Corp 露光アライメント調整方法、露光アライメント調整プログラム、及び露光装置
TWI735323B (zh) * 2020-08-31 2021-08-01 南亞塑膠工業股份有限公司 改性熱塑性聚酯彈性體及透溼防水膜

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62242866A (ja) * 1986-04-15 1987-10-23 Matsushita Electric Ind Co Ltd 部品検査方法
JP2626637B2 (ja) * 1995-08-28 1997-07-02 株式会社ニコン 位置合わせ方法
JPH0992591A (ja) * 1995-09-21 1997-04-04 Nikon Corp 位置合わせ方法
JPH10284403A (ja) * 1997-04-04 1998-10-23 Ricoh Co Ltd ウエハのリソグラフィー装置
JP3003646B2 (ja) * 1997-09-16 2000-01-31 株式会社ニコン 投影露光装置
JPH11297739A (ja) * 1998-04-07 1999-10-29 Mitsubishi Electric Corp 半導体組立装置及び半導体装置
JP2000235949A (ja) * 1998-12-17 2000-08-29 Tokyo Electron Ltd 塗布現像処理装置及び塗布現像処理方法
JP2001134798A (ja) * 1999-11-08 2001-05-18 Nippon Chem Ind Co Ltd 製品品質管理情報システム

Similar Documents

Publication Publication Date Title
BE2014C055I2 (sr)
BE2014C027I2 (sr)
BE2014C003I2 (sr)
BE2013C075I2 (sr)
BE2013C069I2 (sr)
BE2013C067I2 (sr)
BE2013C038I2 (sr)
BE2013C036I2 (sr)
BE2013C034I2 (sr)
BE2011C030I2 (sr)
JP2004088722A5 (sr)
JP2004163877A5 (sr)
BE2015C005I2 (sr)
JP2004004085A5 (sr)
BE2012C053I2 (sr)
JP2004206677A5 (sr)
JP2004096087A5 (sr)
JP2004112996A5 (sr)
JP2003288854A5 (sr)
JP2004000194A5 (sr)
JP2003301345A5 (sr)
JP2004086188A5 (sr)
JP2004214454A5 (sr)
AU2002327736A1 (sr)
AU2002310561A1 (sr)