JP2004028312A - Pneumatic valve with manual closing mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pneumatic valve with a new manual closing mechanism which can save a space and reduce the cost by unifying the air operation valve with the manual closing mechanism. <P>SOLUTION: In this pneumatic valve for moving a cylinder piston 33 forward and backward with pneumatic operation to operate a valve element 40 integrally formed with the piston, an operating member 51 is arranged in rear of the cylinder piston through a spring member 52, and a manual operation lever 56 having a cam part 57 at a tip thereof and the described operating member are connected to each other to move the operating member forward and backward with turning of the operation lever. When moving the operating member forward, the piston is forcedly moved forward to make the valve element 40 abut on a valve seat 16 to close the valve. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an air-operated valve, and more particularly to an air-operated valve having a manual closing mechanism used for controlling a fluid such as a chemical solution or pure water in a semiconductor manufacturing line or the like.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in a semiconductor production line, a production line for various chemicals, and the like, the supply of various chemicals and pure water is controlled by a valve member having a diaphragm valve or the like. For example, in a device that performs fluid control, an air operated valve that opens and closes a line by air operation, and a manual closing mechanism that manually shuts off the line in an emergency or the like are each piped in series.
[0003]
However, arranging the air-operated valve and the manual closing mechanism in series and piping them requires space for two devices, and also has a problem that a complicated flow passage increases the number of liquid pools. come. Naturally, an increase in the number of devices not only increases the cost, but also tends to complicate the management of the devices due to an increase in the number of complicated components.
[0004]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described circumstances, and has an air operation having a novel manual closing mechanism capable of realizing space saving and cost reduction by integrating the air operating valve and the manual closing mechanism. A valve is provided.
[0005]
[Means for Solving the Problems]
That is, the present invention relates to an air operated valve for moving a cylinder piston forward and backward by an air operation to operate a valve body formed integrally with the piston, wherein an operating member is disposed at a rear portion of the cylinder piston via a spring member, The manual operation lever having a cam portion and the operating member are connected to each other to allow the operating member to advance and retreat by turning the operation lever, and when the operating member advances, the piston is forcibly advanced to advance the valve body. The present invention relates to an air-operated valve having a manual closing mechanism, characterized in that a valve is brought into contact with a valve seat to create a valve-closed state.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a sectional view showing an air-operated valve provided with a manual closing mechanism according to an embodiment of the present invention. FIG. 2 is a sectional view showing a valve-closed state of the air-operated valve provided with the manual closing mechanism of FIG. FIG. 3 is a sectional view showing a valve closing state by the manual closing mechanism.
[0007]
An air operated valve 10 having a manual closing mechanism according to the present invention shown in FIG. 1 includes a manual closing mechanism provided on an air operated valve portion 11 which moves a cylinder piston forward and backward by operating air to operate a valve body integrated with the piston. 50.
[0008]
First, an air-operated valve portion 11 shown in the lower part of the drawing of this embodiment is a diaphragm valve, and a diaphragm valve body 40 having a movable membrane portion 41 moves forward and backward in a valve chamber 13 of a valve body 12 so that the valve chamber 13 moves forward and backward. Of the fluid F1 flowing out of the outlet 15 by controlling the opening / closing of the inlet 14 of the nozzle.
[0009]
In the figure, reference numeral 21 denotes an inflow-side flow path of the fluid F1, reference numeral 22 denotes an outflow-side flow path, and reference numeral 30 denotes an operation mechanism (cylinder device) of the diaphragm valve body 40, 31 denotes a cylinder chamber, and 32 denotes a cylinder chamber 31. 33 is a cylinder piston connected to the diaphragm valve body 40, 34 and 35 are inflow / outflow portions of a working fluid that advances and retreats the cylinder piston 33, 36 is an air vent portion, 37 Is a rubber cushion which serves as a cushioning material for the diaphragm valve element 40, and 38 is a spring member for urging the cylinder piston.
[0010]
The manual closing mechanism 50 has an operating member 51 disposed at a rear portion of the cylinder piston 33 via a spring member 52, and connects a manual operating lever 56 having a cam portion 57 at a distal end to the operating member 51 to perform the operation. The operation member 51 can be advanced and retracted by the rotation of the lever 56, and when the operation member 51 is advanced, the cylinder piston 33 is forcibly advanced to bring the valve body 40 into contact with the valve seat 16 to close the valve. To produce.
[0011]
The operation member 51 is connected to the manual operation lever 56, and the length of the operation member 51 inserted into the device 10 is changed by the cam portion 57 of the manual operation lever 56. Can be made to advance and retreat. Further, since the operating member 51 is disposed via the spring member 52 which always urges the apparatus 10 (downward in the drawing), the manual operation lever 56 is always in the A direction (open) and the B direction (closed). ), The malfunction can be prevented.
[0012]
In the air operated valve 10 of this embodiment, the operating member 51 and the cylinder piston 33 are not normally connected in a state where the manual operating lever 56 is tilted in the direction A and the operating member 51 is retracted. The cylinder piston 33 is always in the forward position by the urging action of the spring member 38.
[0013]
The air operation valve 10 shown in FIG. 1 is obtained by inclining the manual operation bar 56 in the direction A and retreating the operation member 51, and causing the cylinder piston 33 to flow through the air inflow portion 35 as indicated by an arrow. This is an example showing a valve open state in which the valve body 40 is retracted to separate the valve body 40 from the valve seat 16 and the fluid F1 can flow.
[0014]
The air operation valve 10 shown in FIG. 2 tilts the manual operation lever 56 in the direction A in the same manner as in FIG. 1 to retreat the operating member 51. Since no air is allowed to flow from the portion 35, the cylinder piston 33 is advanced by the spring member 38 to bring the valve body 40 into contact with the valve seat 16 in a valve closed state.
[0015]
FIG. 3 shows a state in which the operating member 51 is moved forward by tilting the manual operation lever 56 in the direction B, and the valve body 40 is brought into contact with the valve seat 16 by pushing out the cylinder piston 33 to close the valve. It is shown. In the case where the manual operation lever 56 is tilted in the direction B to perform the emergency shutoff of the fluid F1 as described above, even if the air pressure is applied to the cylinder piston 33 of the air operation valve section 11, the operating member Since the biasing force of the spring member 52 that pushes down 51 is stronger, the valve body 40 can be forcibly closed and the valve closed state can be maintained.
[0016]
【The invention's effect】
As shown and described above, according to the air operated valve having the manual closing mechanism of the present invention, the operating member is disposed at the rear portion of the cylinder piston via the spring member on the air adjusting valve, and the cam portion is provided at the tip. Connecting the manual operating lever having the function member and the operating member to enable the operating member to advance and retreat by rotation of the operating lever, and forcibly advance the piston when the operating member advances, thereby opening the valve body to the valve seat. Since it is provided with a manual closing mechanism that is brought into contact with the valve to create a valve closed state, it is possible to quickly and manually shut off the fluid at the site in an emergency.
[0017]
In addition, according to the air-operated valve having the manual closing mechanism of this structure, compared with the conventional two devices, the space for piping is reduced, and the cost and the number of parts are reduced, so that management and management can be performed. Failures are also reduced.
[Brief description of the drawings]
FIG. 1 is a sectional view showing an air-operated valve provided with a manual closing mechanism according to one embodiment of the present invention.
FIG. 2 is a cross-sectional view showing a closed state of an air-operated valve provided with the manual closing mechanism of FIG. 1;
FIG. 3 is a sectional view showing a valve closing state by a manual closing mechanism.
[Explanation of symbols]
Reference Signs List 10 Air operated valve provided with manual closing mechanism 11 Air operated valve section 14 Working fluid inflow section 15 Working fluid outflow section 16 Valve seat 30 Valve operating mechanism 33 Cylinder piston 40 Valve (diaphragm)
Reference Signs List 50 manual closing mechanism 51 operating member 52 spring member 56 operating lever 57 cam portion

Claims (1)

In an air operated valve that moves a cylinder piston forward and backward by air operation and operates a valve body formed integrally with the piston,
An operating member is arranged at the rear of the cylinder piston via a spring member, and a manual operating lever having a cam portion at a distal end is connected to the operating member to enable the operating member to advance and retreat by rotating the operating lever, An air-operated valve provided with a manual closing mechanism, wherein when the operating member is advanced, the piston is forcibly advanced to bring the valve body into contact with a valve seat to create a valve-closed state.

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