JP2004012898A5 - - Google Patents
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- Publication number
- JP2004012898A5 JP2004012898A5 JP2002167393A JP2002167393A JP2004012898A5 JP 2004012898 A5 JP2004012898 A5 JP 2004012898A5 JP 2002167393 A JP2002167393 A JP 2002167393A JP 2002167393 A JP2002167393 A JP 2002167393A JP 2004012898 A5 JP2004012898 A5 JP 2004012898A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- substituent
- hydrogen atom
- alkyl group
- fluorine atom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002167393A JP4116335B2 (ja) | 2002-06-07 | 2002-06-07 | 感光性樹脂組成物 |
| TW092115358A TWI284779B (en) | 2002-06-07 | 2003-06-06 | Photosensitive resin composition |
| US10/455,459 US7214467B2 (en) | 2002-06-07 | 2003-06-06 | Photosensitive resin composition |
| EP03012226A EP1376232A1 (en) | 2002-06-07 | 2003-06-06 | Photosensitive resin composition |
| EP04019923A EP1480079A3 (en) | 2002-06-07 | 2003-06-06 | Photosensitive resin composition |
| KR1020030036576A KR100945003B1 (ko) | 2002-06-07 | 2003-06-07 | 감광성 수지 조성물 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002167393A JP4116335B2 (ja) | 2002-06-07 | 2002-06-07 | 感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004012898A JP2004012898A (ja) | 2004-01-15 |
| JP2004012898A5 true JP2004012898A5 (US06780888-20040824-C00057.png) | 2005-09-22 |
| JP4116335B2 JP4116335B2 (ja) | 2008-07-09 |
Family
ID=30434652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002167393A Expired - Fee Related JP4116335B2 (ja) | 2002-06-07 | 2002-06-07 | 感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4116335B2 (US06780888-20040824-C00057.png) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009011364A1 (ja) * | 2007-07-18 | 2009-01-22 | Asahi Glass Company, Limited | 電子線、ｘ線またはｅｕｖ光を用いたリソグラフィー法に用いられるレジスト組成物 |
| JP5846889B2 (ja) * | 2011-12-14 | 2016-01-20 | 東京応化工業株式会社 | レジスト組成物、レジストパターン形成方法、化合物 |
| JP2015057376A (ja) * | 2013-05-20 | 2015-03-26 | 東洋合成工業株式会社 | 有機塩の合成と精製 |
| JP6706530B2 (ja) * | 2016-03-31 | 2020-06-10 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
| JP7467148B2 (ja) * | 2019-02-18 | 2024-04-15 | 住友化学株式会社 | 樹脂、レジスト組成物及びレジストパターンの製造方法 |
| CN112011008A (zh) * | 2019-05-31 | 2020-12-01 | 罗门哈斯电子材料有限责任公司 | 抗蚀剂组合物、其制造方法及包含其的制品 |
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2002
- 2002-06-07 JP JP2002167393A patent/JP4116335B2/ja not_active Expired - Fee Related
