JP2004006455A5 - - Google Patents
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- JP2004006455A5 JP2004006455A5 JP2002158788A JP2002158788A JP2004006455A5 JP 2004006455 A5 JP2004006455 A5 JP 2004006455A5 JP 2002158788 A JP2002158788 A JP 2002158788A JP 2002158788 A JP2002158788 A JP 2002158788A JP 2004006455 A5 JP2004006455 A5 JP 2004006455A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002158788A JP2004006455A (ja) | 2002-05-31 | 2002-05-31 | 半導体装置およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002158788A JP2004006455A (ja) | 2002-05-31 | 2002-05-31 | 半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004006455A JP2004006455A (ja) | 2004-01-08 |
| JP2004006455A5 true JP2004006455A5 (ja) | 2005-10-06 |
Family
ID=30428848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002158788A Pending JP2004006455A (ja) | 2002-05-31 | 2002-05-31 | 半導体装置およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004006455A (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006135229A (ja) * | 2004-11-09 | 2006-05-25 | Elpida Memory Inc | 絶縁膜の成膜方法及びその絶縁膜を備えた半導体装置 |
| KR100833445B1 (ko) | 2006-03-14 | 2008-05-29 | 주식회사 하이닉스반도체 | 플래시 메모리 소자의 제조방법 |
| JP2008235397A (ja) * | 2007-03-19 | 2008-10-02 | Elpida Memory Inc | 半導体装置の製造方法 |
| JP5325759B2 (ja) * | 2009-12-21 | 2013-10-23 | ラムバス・インコーポレーテッド | 半導体装置の製造方法 |
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2002
- 2002-05-31 JP JP2002158788A patent/JP2004006455A/ja active Pending