JP2004001517A - 最適化されたヒーターの長さを備える多層のサーマルアクチュエータ及びその操作方法 - Google Patents
最適化されたヒーターの長さを備える多層のサーマルアクチュエータ及びその操作方法 Download PDFInfo
- Publication number
- JP2004001517A JP2004001517A JP2003139152A JP2003139152A JP2004001517A JP 2004001517 A JP2004001517 A JP 2004001517A JP 2003139152 A JP2003139152 A JP 2003139152A JP 2003139152 A JP2003139152 A JP 2003139152A JP 2004001517 A JP2004001517 A JP 2004001517A
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- Prior art keywords
- layer
- deflector
- deflector layer
- cantilever
- thermal
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/154,634 US6598960B1 (en) | 2002-05-23 | 2002-05-23 | Multi-layer thermal actuator with optimized heater length and method of operating same |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2004001517A true JP2004001517A (ja) | 2004-01-08 |
Family
ID=27612694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003139152A Pending JP2004001517A (ja) | 2002-05-23 | 2003-05-16 | 最適化されたヒーターの長さを備える多層のサーマルアクチュエータ及びその操作方法 |
Country Status (4)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7645027B2 (en) | 2006-06-21 | 2010-01-12 | Canon Kabushiki Kaisha | Print head with thermomechanical actuator |
Families Citing this family (59)
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US6682174B2 (en) | 1998-03-25 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
US6540331B2 (en) * | 1997-07-15 | 2003-04-01 | Silverbrook Research Pty Ltd | Actuating mechanism which includes a thermal bend actuator |
US6648453B2 (en) | 1997-07-15 | 2003-11-18 | Silverbrook Research Pty Ltd | Ink jet printhead chip with predetermined micro-electromechanical systems height |
US6557977B1 (en) * | 1997-07-15 | 2003-05-06 | Silverbrook Research Pty Ltd | Shape memory alloy ink jet printing mechanism |
US6712453B2 (en) | 1997-07-15 | 2004-03-30 | Silverbrook Research Pty Ltd. | Ink jet nozzle rim |
US6682176B2 (en) * | 1997-07-15 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet printhead chip with nozzle arrangements incorporating spaced actuating arms |
US7556356B1 (en) | 1997-07-15 | 2009-07-07 | Silverbrook Research Pty Ltd | Inkjet printhead integrated circuit with ink spread prevention |
US7337532B2 (en) | 1997-07-15 | 2008-03-04 | Silverbrook Research Pty Ltd | Method of manufacturing micro-electromechanical device having motion-transmitting structure |
US6855264B1 (en) | 1997-07-15 | 2005-02-15 | Kia Silverbrook | Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring |
US6935724B2 (en) | 1997-07-15 | 2005-08-30 | Silverbrook Research Pty Ltd | Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point |
US7468139B2 (en) | 1997-07-15 | 2008-12-23 | Silverbrook Research Pty Ltd | Method of depositing heater material over a photoresist scaffold |
US7195339B2 (en) * | 1997-07-15 | 2007-03-27 | Silverbrook Research Pty Ltd | Ink jet nozzle assembly with a thermal bend actuator |
US7527357B2 (en) | 1997-07-15 | 2009-05-05 | Silverbrook Research Pty Ltd | Inkjet nozzle array with individual feed channel for each nozzle |
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US6742873B1 (en) * | 2001-04-16 | 2004-06-01 | Silverbrook Research Pty Ltd | Inkjet printhead construction |
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US7073890B2 (en) * | 2003-08-28 | 2006-07-11 | Eastman Kodak Company | Thermally conductive thermal actuator and liquid drop emitter using same |
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US7331650B2 (en) | 2004-04-08 | 2008-02-19 | Eastman Kodak Company | Printhead having a removable nozzle plate |
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US7283030B2 (en) * | 2004-11-22 | 2007-10-16 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
US7175258B2 (en) * | 2004-11-22 | 2007-02-13 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
US7188931B2 (en) * | 2004-11-22 | 2007-03-13 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
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US7377623B2 (en) * | 2005-04-04 | 2008-05-27 | Silverbrook Research Pty Ltd | Printhead heaters with a nanocrystalline composite structure |
US7431431B2 (en) * | 2005-04-04 | 2008-10-07 | Silverbrook Research Pty Ltd | Self passivating transition metal nitride printhead heaters |
US7448729B2 (en) * | 2005-04-04 | 2008-11-11 | Silverbrook Research Pty Ltd | Inkjet printhead heater elements with thin or non-existent coatings |
US7419249B2 (en) * | 2005-04-04 | 2008-09-02 | Silverbrook Research Pty Ltd | Inkjet printhead with low thermal product layer |
WO2006105570A1 (en) * | 2005-04-04 | 2006-10-12 | Silverbrook Research Pty Ltd | Mems fluid sensor |
US20060221114A1 (en) * | 2005-04-04 | 2006-10-05 | Silverbrook Research Pty Ltd | MEMS fluid sensor |
US7654645B2 (en) * | 2005-04-04 | 2010-02-02 | Silverbrook Research Pty Ltd | MEMS bubble generator |
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US7735970B2 (en) * | 2006-12-04 | 2010-06-15 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising passive element having negative thermal expansion |
US7794056B2 (en) * | 2006-12-04 | 2010-09-14 | Silverbrook Research Pty Ltd | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
US7901046B2 (en) * | 2006-12-04 | 2011-03-08 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising conduction pads |
US20090030095A1 (en) * | 2007-07-24 | 2009-01-29 | Laverdure Kenneth S | Polystyrene compositions and methods of making and using same |
JP2012506781A (ja) * | 2008-11-10 | 2012-03-22 | シルバーブルック リサーチ ピーティワイ リミテッド | ヒータの酸化物成長を阻止するために駆動パルスが増加するプリントヘッド |
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WO2012058016A1 (en) | 2010-10-26 | 2012-05-03 | Eastman Kodak Company | Liquid dispenser including sloped outlet opening wall |
US20120098888A1 (en) | 2010-10-26 | 2012-04-26 | Yonglin Xie | Liquid dispenser including curved outlet opening wall |
US8573743B2 (en) | 2010-10-26 | 2013-11-05 | Eastman Kodak Company | Liquid dispenser including curved vent |
WO2012058020A1 (en) | 2010-10-26 | 2012-05-03 | Eastman Kodak Company | Liquid dispenser including multiple liquid return passages |
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US8322825B2 (en) | 2010-10-26 | 2012-12-04 | Eastman Kodak Company | Dispenser including overlapping outlet and return port |
WO2012058019A1 (en) | 2010-10-26 | 2012-05-03 | Eastman Kodak Company | Liquid dispenser including filter in return port |
US8864287B2 (en) * | 2011-04-19 | 2014-10-21 | Eastman Kodak Company | Fluid ejection using MEMS composite transducer |
US8770722B2 (en) | 2012-03-28 | 2014-07-08 | Eastman Kodak Company | Functional liquid deposition using continuous liquid |
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TWI626168B (zh) | 2013-07-25 | 2018-06-11 | 滿捷特科技公司 | 噴墨列印及保持噴嘴水合作用的方法 |
JP6524971B2 (ja) * | 2016-06-14 | 2019-06-05 | 株式会社デンソー | 荷重変動検出装置 |
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US11802554B2 (en) | 2019-10-30 | 2023-10-31 | Frore Systems Inc. | MEMS-based airflow system having a vibrating fan element arrangement |
US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
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JP2023544160A (ja) | 2020-10-02 | 2023-10-20 | フロー・システムズ・インコーポレーテッド | アクティブヒートシンク |
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2002
- 2002-05-23 US US10/154,634 patent/US6598960B1/en not_active Expired - Fee Related
-
2003
- 2003-05-12 EP EP03076419A patent/EP1364792B1/en not_active Expired - Fee Related
- 2003-05-12 DE DE60310640T patent/DE60310640T2/de not_active Expired - Lifetime
- 2003-05-16 JP JP2003139152A patent/JP2004001517A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7645027B2 (en) | 2006-06-21 | 2010-01-12 | Canon Kabushiki Kaisha | Print head with thermomechanical actuator |
Also Published As
Publication number | Publication date |
---|---|
EP1364792A3 (en) | 2004-05-19 |
EP1364792A2 (en) | 2003-11-26 |
DE60310640T2 (de) | 2007-11-15 |
DE60310640D1 (de) | 2007-02-08 |
US6598960B1 (en) | 2003-07-29 |
EP1364792B1 (en) | 2006-12-27 |
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