JP2003525379A5 - - Google Patents
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- Publication number
- JP2003525379A5 JP2003525379A5 JP2001556016A JP2001556016A JP2003525379A5 JP 2003525379 A5 JP2003525379 A5 JP 2003525379A5 JP 2001556016 A JP2001556016 A JP 2001556016A JP 2001556016 A JP2001556016 A JP 2001556016A JP 2003525379 A5 JP2003525379 A5 JP 2003525379A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10004271.6 | 2000-02-01 | ||
| DE10004271A DE10004271A1 (de) | 2000-02-01 | 2000-02-01 | Reibungsvakuumpumpe |
| PCT/EP2001/000726 WO2001057402A1 (de) | 2000-02-01 | 2001-01-24 | Reibungsvakuumpumpe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003525379A JP2003525379A (ja) | 2003-08-26 |
| JP2003525379A5 true JP2003525379A5 (ja) | 2007-11-22 |
| JP4819277B2 JP4819277B2 (ja) | 2011-11-24 |
Family
ID=7629403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001556016A Expired - Fee Related JP4819277B2 (ja) | 2000-02-01 | 2001-01-24 | 摩擦真空ポンプ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7011491B2 (ja) |
| EP (1) | EP1252445B1 (ja) |
| JP (1) | JP4819277B2 (ja) |
| DE (2) | DE10004271A1 (ja) |
| WO (1) | WO2001057402A1 (ja) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10150015A1 (de) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür |
| GB0322889D0 (en) | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
| DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
| DE102005003091A1 (de) * | 2005-01-22 | 2006-07-27 | Leybold Vacuum Gmbh | Vakuum-Seitenkanalverdichter |
| US7632060B2 (en) * | 2005-01-24 | 2009-12-15 | Ford Global Technologies, Llc | Fuel pump having dual flow channel |
| US7165932B2 (en) * | 2005-01-24 | 2007-01-23 | Visteon Global Technologies, Inc. | Fuel pump having dual single sided impeller |
| GB0618745D0 (en) * | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
| US20090081022A1 (en) * | 2007-09-21 | 2009-03-26 | Honeywell International Inc. | Radially Staged Microscale Turbomolecular Pump |
| US20120014779A1 (en) * | 2010-07-16 | 2012-01-19 | Charles David Gilliam | Disc pump |
| US20140020556A1 (en) * | 2011-11-04 | 2014-01-23 | Honeywell International Inc. | Mass separation via a turbomolecular pump |
| EP2620649B1 (en) | 2012-01-27 | 2019-03-13 | Edwards Limited | Gas transfer vacuum pump |
| GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
| US9677990B2 (en) | 2014-04-30 | 2017-06-13 | Particles Plus, Inc. | Particle counter with advanced features |
| US10983040B2 (en) | 2013-03-15 | 2021-04-20 | Particles Plus, Inc. | Particle counter with integrated bootloader |
| US10352844B2 (en) | 2013-03-15 | 2019-07-16 | Particles Plus, Inc. | Multiple particle sensors in a particle counter |
| US11579072B2 (en) | 2013-03-15 | 2023-02-14 | Particles Plus, Inc. | Personal air quality monitoring system |
| US20150063982A1 (en) * | 2013-09-01 | 2015-03-05 | Particles Plus, Inc. | Multi-stage inflow turbine pump for particle counters |
| CN104600081A (zh) * | 2014-12-31 | 2015-05-06 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示面板、显示装置 |
| DE102016210701A1 (de) | 2016-06-15 | 2017-12-21 | Inficon Gmbh | Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle |
| DE102018119747B3 (de) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | Turbomolekularpumpe für massenspektrometer |
| EP3767110A1 (en) * | 2019-07-15 | 2021-01-20 | Pfeiffer Vacuum Gmbh | Vacuum system |
| US11519419B2 (en) * | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
| US11988591B2 (en) | 2020-07-01 | 2024-05-21 | Particles Plus, Inc. | Modular optical particle counter sensor and apparatus |
| CN112160919A (zh) * | 2020-09-28 | 2021-01-01 | 东北大学 | 涡轮分子泵和包括该分子泵的复合分子泵 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE107118C (ja) | ||||
| DE605902C (de) * | 1932-01-08 | 1934-11-20 | Hugo Seemann Dr | Turbohochvakuumpumpe |
| GB479427A (en) | 1935-05-31 | 1938-01-31 | Gyoergy Jendrassik | Improvements in rotary compressors |
| CH235102A (fr) * | 1941-06-24 | 1944-11-15 | Dupont Emile | Machine pour la transformation de la pression d'un fluide en travail ou inversement. |
| DE845883C (de) | 1950-02-21 | 1952-08-07 | Heraeus Gmbh W C | Verfahren zur Herstellung von Spinnduesen |
| DE1845883U (de) * | 1961-10-19 | 1962-02-01 | Akad Wissenschaften Ddr | Molekularpumpe. |
| FR2224009A5 (ja) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
| DD107118A1 (ja) * | 1973-10-03 | 1974-07-12 | ||
| SU1252552A1 (ru) | 1984-06-01 | 1986-08-23 | Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского | Ротор радиального турбомолекул рного вакуумного насоса |
| FR2589529A1 (fr) * | 1985-11-06 | 1987-05-07 | Guimbal Jean | Systeme rotatif de compression ou de refoulement a haute pression |
| JPH0689757B2 (ja) * | 1987-05-28 | 1994-11-14 | バキュ−ムプロダクツ株式会社 | 真空ポンプ |
| GB8921071D0 (en) * | 1989-09-18 | 1989-11-01 | Framo Dev Ltd | Pump or compressor unit |
| EP0646220B1 (de) * | 1992-06-19 | 1997-01-08 | Balzers und Leybold Deutschland Holding Aktiengesellschaft | Gasreibungsvakuumpumpe |
| GB9609281D0 (en) | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
| GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
| KR100460173B1 (ko) * | 1998-12-11 | 2004-12-04 | 겐 코오포레이션 | 헬리코박터 파일로리 정착 억제제 |
| US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
| DE10004263A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Dynamische Dichtung |
-
2000
- 2000-02-01 DE DE10004271A patent/DE10004271A1/de not_active Withdrawn
-
2001
- 2001-01-24 DE DE50113533T patent/DE50113533D1/de not_active Expired - Lifetime
- 2001-01-24 US US10/182,843 patent/US7011491B2/en not_active Expired - Fee Related
- 2001-01-24 JP JP2001556016A patent/JP4819277B2/ja not_active Expired - Fee Related
- 2001-01-24 WO PCT/EP2001/000726 patent/WO2001057402A1/de active IP Right Grant
- 2001-01-24 EP EP01909681A patent/EP1252445B1/de not_active Expired - Lifetime