JP2003504613A5 - - Google Patents
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- Publication number
- JP2003504613A5 JP2003504613A5 JP2001509948A JP2001509948A JP2003504613A5 JP 2003504613 A5 JP2003504613 A5 JP 2003504613A5 JP 2001509948 A JP2001509948 A JP 2001509948A JP 2001509948 A JP2001509948 A JP 2001509948A JP 2003504613 A5 JP2003504613 A5 JP 2003504613A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/350,747 US6449571B1 (en) | 1999-07-09 | 1999-07-09 | System and method for sensor response linearization |
| US09/350,747 | 1999-07-09 | ||
| PCT/US2000/040254 WO2001004582A1 (en) | 1999-07-09 | 2000-06-20 | System and method for sensor response linearization |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003504613A JP2003504613A (ja) | 2003-02-04 |
| JP2003504613A5 true JP2003504613A5 (enExample) | 2007-10-11 |
Family
ID=23378007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001509948A Withdrawn JP2003504613A (ja) | 1999-07-09 | 2000-06-20 | センサ応答の線形化のためのシステムおよび方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6449571B1 (enExample) |
| EP (1) | EP1192424A1 (enExample) |
| JP (1) | JP2003504613A (enExample) |
| KR (1) | KR100620282B1 (enExample) |
| CN (1) | CN1206518C (enExample) |
| AU (1) | AU6405600A (enExample) |
| TW (1) | TW436672B (enExample) |
| WO (1) | WO2001004582A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100808727B1 (ko) | 2000-02-14 | 2008-02-29 | 셀레리티 인크. | 저항 평형 방법 및 그 장치 |
| JP4864280B2 (ja) | 2001-04-24 | 2012-02-01 | ブルックス・インストルメント・エルエルシー | 質量流量コントローラのシステムおよび方法 |
| KR20050031109A (ko) * | 2002-07-19 | 2005-04-01 | 셀레리티 그룹 아이엔씨 | 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치 |
| US6845659B2 (en) | 2002-07-19 | 2005-01-25 | Celerity Group, Inc. | Variable resistance sensor with common reference leg |
| US6859765B2 (en) * | 2002-12-13 | 2005-02-22 | Lam Research Corporation | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection |
| US7216019B2 (en) * | 2004-07-08 | 2007-05-08 | Celerity, Inc. | Method and system for a mass flow controller with reduced pressure sensitivity |
| US20080221822A1 (en) * | 2004-08-13 | 2008-09-11 | Marc Laverdiere | System and Method for Calibration of a Flow Device |
| US20090063070A1 (en) * | 2005-06-24 | 2009-03-05 | Carl Peter Renneberg | Circuit and Method for Fitting the Output of a Sensor to a Predetermined Linear Relationship |
| DE102005062981A1 (de) * | 2005-12-28 | 2007-07-05 | Endress + Hauser Flowtec Ag | Verfahren zur Bestimmung eines Ausgangswertes eines Sensors der Automatisierungstechnik |
| US7532992B2 (en) * | 2006-01-20 | 2009-05-12 | Teledyne Isco, Inc. | Measuring apparatuses and methods of using them |
| JP5073949B2 (ja) * | 2006-02-02 | 2012-11-14 | 日立オートモティブシステムズ株式会社 | 流量測定装置 |
| EP2479681A1 (en) * | 2011-01-24 | 2012-07-25 | Sensirion AG | Approximating a non-linear characteristic in a sensor system |
| CN103176499B (zh) * | 2013-03-29 | 2014-11-19 | 哈尔滨工业大学（威海） | 低功耗抗工艺偏差和电源噪声的动态电流模式收发系统 |
| GB201323009D0 (en) * | 2013-10-21 | 2014-02-12 | Continental Automotive Systems | Dual range high precision pressure sensor |
| DE112016000872B4 (de) * | 2015-02-23 | 2022-07-14 | Aceinna, Inc. (n.d.Ges.d. Staates Delaware) | Thermischer MEMS-Strömungssensor mit Fluidzusammensetzungskompensation und Verfahren zum Messen der Strömungsrate eines Fluids |
| ES2811305T3 (es) * | 2015-05-20 | 2021-03-11 | Thd Spa | Aparato y método de medición asociado |
| TR201614439A1 (en) | 2016-10-13 | 2018-04-24 | Univ Yeditepe | SMART OPTIMAL ANALOG CIRCUIT FOR SENSOR LINEARIZATION IN A WIDE RANGE |
| CN106813737B (zh) * | 2016-12-29 | 2020-01-10 | 北京七星华创流量计有限公司 | 流量测量装置、其最佳响应时间获取方法和测试系统 |
| KR20190036959A (ko) | 2017-09-28 | 2019-04-05 | 금오기전 주식회사 | 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법 |
| US10969797B2 (en) * | 2018-08-29 | 2021-04-06 | Illinois Tool Works, Inc. | Mass flow valve controller and control method with set point filter and linearization system based on valve model |
| CN115452080B (zh) * | 2022-08-08 | 2024-06-11 | 重庆川仪自动化股份有限公司 | 热式气体质量流量计信号线性化电路及方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4059982A (en) | 1975-08-29 | 1977-11-29 | Massachusetts Institute Of Technology | Apparatus for the measurement of thermal properties of biomaterials |
| US5062446A (en) * | 1991-01-07 | 1991-11-05 | Sematech, Inc. | Intelligent mass flow controller |
| US5193406A (en) | 1991-06-20 | 1993-03-16 | Exxon Research And Engineering Company | On-stream method for detecting erosion or plugging for manifolded feed nozzle systems |
| US5369603A (en) | 1992-07-19 | 1994-11-29 | Myers; Allen | Calibration of a non-linear sensor |
| US5660207A (en) | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
| US5710370A (en) * | 1996-05-17 | 1998-01-20 | Dieterich Technology Holding Corp. | Method for calibrating a differential pressure fluid flow measuring system |
| US5944048A (en) * | 1996-10-04 | 1999-08-31 | Emerson Electric Co. | Method and apparatus for detecting and controlling mass flow |
| US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
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1999
- 1999-07-09 US US09/350,747 patent/US6449571B1/en not_active Expired - Fee Related
-
2000
- 2000-06-20 AU AU64056/00A patent/AU6405600A/en not_active Abandoned
- 2000-06-20 KR KR1020027000306A patent/KR100620282B1/ko not_active Expired - Fee Related
- 2000-06-20 WO PCT/US2000/040254 patent/WO2001004582A1/en not_active Ceased
- 2000-06-20 JP JP2001509948A patent/JP2003504613A/ja not_active Withdrawn
- 2000-06-20 EP EP00951068A patent/EP1192424A1/en not_active Withdrawn
- 2000-06-20 CN CNB008101132A patent/CN1206518C/zh not_active Expired - Fee Related
- 2000-07-07 TW TW089113537A patent/TW436672B/zh not_active IP Right Cessation