JP2003344218A - Instrument and method for measuring aspherical lens - Google Patents

Instrument and method for measuring aspherical lens

Info

Publication number
JP2003344218A
JP2003344218A JP2002155050A JP2002155050A JP2003344218A JP 2003344218 A JP2003344218 A JP 2003344218A JP 2002155050 A JP2002155050 A JP 2002155050A JP 2002155050 A JP2002155050 A JP 2002155050A JP 2003344218 A JP2003344218 A JP 2003344218A
Authority
JP
Japan
Prior art keywords
aspherical
light
curvature
center
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002155050A
Other languages
Japanese (ja)
Other versions
JP3857954B2 (en
JP2003344218A5 (en
Inventor
Takayuki Ito
孝之 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Pentax Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pentax Corp filed Critical Pentax Corp
Priority to JP2002155050A priority Critical patent/JP3857954B2/en
Publication of JP2003344218A publication Critical patent/JP2003344218A/en
Publication of JP2003344218A5 publication Critical patent/JP2003344218A5/ja
Application granted granted Critical
Publication of JP3857954B2 publication Critical patent/JP3857954B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To measure an outside diameter deviation of an aspherical lens, a face deflection in a peripheral part of an aspherical face, and a curvature center deviation under the same condition as the condition where the aspherical lens is bonded to a mirror frame. <P>SOLUTION: This measuring instrument for the aspherical lens is provided with a suction rotation means 11 for rotating the examined aspherical lens L2 of which the outline shape is circular and of which the one face forms a spherical face, under the condition where the spherical face is sucked, a light emitting means 17 for emitting light toward the central part of the aspherical face of the aspherical lens under the condition where the center of curvature of the spherical face is positioned on a rotary shaft of the suction rotation means, an outside diameter deviation detecting means S1 for abutting to an outer circumferential face of the aspherical lens to detect the outside diameter deviation of the outer circumferential face, under the condition where the center of curvature of the central part of the aspherical face is determined to be positioned on the rotary shaft, based on a photo-receiving position of the light reflected by the aspherical face, and a face deflection detecting means S2 for abutting to the peripheral part of the aspherical face to detect the face deflection in the peripheral part. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【技術分野】本発明は、非球面レンズを鏡枠に入れたの
と同じ状態にして、非球面レンズの外径振れ量、非球面
の周辺部の面振れ量、曲率中心振れ量を測定する測定装
置および測定方法に関する。
TECHNICAL FIELD The present invention measures the amount of outer diameter deflection of an aspherical lens, the amount of surface deflection of a peripheral portion of an aspherical surface, and the amount of deflection of a center of curvature in the same state as when an aspherical lens is put in a lens frame. The present invention relates to a measuring device and a measuring method.

【0002】[0002]

【従来技術およびその問題点】非球面レンズを鏡枠内に
セッティングする方法の一つとして、非球面レンズを鏡
枠内に位置させた後、非球面レンズの外周面と鏡枠の内
周面の間の僅かなクリアランスを利用して非球面レンズ
を鏡枠に対して動かし、非球面レンズの一方の面の曲率
中心を鏡枠の中心軸上に位置させて、その状態を保持し
たまま非球面レンズを鏡枠に固定する方法がある。
2. Description of the Related Art As one of the methods for setting an aspherical lens in a lens frame, after placing the aspherical lens in the lens frame, the outer peripheral surface of the aspherical lens and the inner peripheral surface of the lens frame. The aspherical lens is moved with respect to the lens frame by using a slight clearance between the two, and the center of curvature of one surface of the aspherical lens is positioned on the central axis of the lens frame, and the state is maintained while keeping the state. There is a method of fixing the spherical lens to the lens frame.

【0003】そして、この方法によって鏡枠に入れられ
たのと同じ状態にある非球面レンズの、外径振れ量や、
非球面の周辺部の面振れ量や、曲率中心振れ量を測定で
きれば、多数の非球面レンズの外径振れ量、面振れ量、
曲率中心振れ量を測定し、これらの非球面レンズのレン
ズ性能を調べ、外径振れ量、面振れ量、曲率中心振れ量
とレンズ性能の相関関係を調べることにより、上記の方
法によって非球面レンズを鏡枠に入れたときに、外径振
れ量、面振れ量、曲率中心振れ量が非球面レンズのレン
ズ性能にどのような影響を与えているかを知ることが出
来る。
Then, the outer diameter deflection amount of the aspherical lens in the same state as that put in the lens frame by this method,
If it is possible to measure the amount of surface runout around the aspherical surface and the amount of runout at the center of curvature,
By measuring the amount of center-of-curvature deflection and examining the lens performance of these aspherical lenses, and by examining the correlation between the amount of outer-diameter deflection, the amount of surface deflection, and the amount of center-of-curvature deflection and lens performance, the aspheric lens It is possible to know how the outer diameter runout amount, the surface runout amount, and the curvature center runout amount affect the lens performance of the aspherical lens when the lens is placed in the lens frame.

【0004】しかし従来は、上記の方法によって鏡枠に
入れられたのと同じ状態にされた非球面レンズの、外径
振れ量や、非球面の周辺部の面振れ量や、曲率中心振れ
量を測定する装置および方法がなかった。
However, conventionally, the outer diameter runout amount, the surface runout amount of the peripheral portion of the aspherical surface, and the curvature center runout amount of the aspherical lens which has been put in the same state as that in the lens frame by the above-mentioned method. There was no device or method to measure.

【0005】[0005]

【発明の目的】本発明は、非球面レンズを鏡枠内に位置
させた後、非球面レンズの外周面と鏡枠の内周面の間の
僅かなクリアランスを利用して非球面レンズを鏡枠に対
して動かし、非球面レンズの一方の面の曲率中心を鏡枠
の中心軸上に位置させて、その状態を保持したまま非球
面レンズを鏡枠に接着したのと同じ状態で、非球面レン
ズの外径振れ量、非球面の周辺部の面振れ量、曲率中心
振れ量を測定できる測定装置と測定方法を提供すること
を目的とする。
It is an object of the present invention to position an aspherical lens in a lens frame and then use the slight clearance between the outer peripheral surface of the aspherical lens and the inner peripheral surface of the lens frame to mirror the aspherical lens. Move it with respect to the frame, position the center of curvature of one surface of the aspherical lens on the center axis of the lens frame, and in the same state as when bonding the aspherical lens to the lens frame while maintaining that state, It is an object of the present invention to provide a measuring device and a measuring method capable of measuring the outer-diameter shake amount of a spherical lens, the surface shake amount of the peripheral portion of an aspherical surface, and the shake center shake amount.

【0006】[0006]

【発明の概要】本発明の非球面レンズの測定装置は、外
形が円形であり片面が球面をなす被検非球面レンズを、
上記球面を吸着した状態で回転させる吸着回転手段と、
上記球面の曲率中心を上記吸着回転手段の回転軸上に位
置させた状態で、上記非球面レンズの非球面の中央部に
向けて光を照射する調整用送光手段と、該調整用送光手
段から発せられ上記非球面によって反射された光を受光
する、受光位置を認識可能な調整用受光手段と、該調整
用受光手段による反射光の受光位置に基づいて、上記非
球面の中央部の曲率中心が上記吸着回転手段の回転軸上
に位置しているか否かを判別する調整用判別手段と、該
調整用判別手段が、上記非球面の中央部の曲率中心が上
記回転軸上に位置していると判別している状態で、上記
非球面レンズの外周面に当接して、該外周面の外径振れ
量を検出する外径振れ検出手段と、上記調整用判別手段
が、上記非球面の中央部の曲率中心が上記回転軸上に位
置していると判別している状態で、上記非球面の周辺部
に当接して、該周辺部の面振れ量を検出する面振れ検出
手段とを備えることを特徴としている。
SUMMARY OF THE INVENTION An aspherical lens measuring device of the present invention comprises a test aspherical lens having a circular outer shape and one spherical surface,
Suction rotation means for rotating the spherical surface in a suction state,
An adjusting light sending means for irradiating light toward the central part of the aspherical surface of the aspherical lens, with the center of curvature of the spherical surface positioned on the rotation axis of the suction rotating means; The light receiving position for recognizing the light receiving position, which receives the light emitted from the means and reflected by the aspherical surface, and the light receiving position of the reflected light by the adjusting light receiving means, An adjusting discriminating means for discriminating whether or not the center of curvature is located on the rotation axis of the suction rotating means, and the adjusting discriminating means is arranged such that the center of curvature of the central portion of the aspherical surface is located on the rotating axis. In a state where it is determined that the aspherical lens is in contact with the outer peripheral surface of the aspherical lens, the outer diameter deflection detecting means for detecting the outer diameter deflection amount of the outer peripheral surface, and the adjustment determining means, Determined that the center of curvature of the center of the sphere is located on the above-mentioned axis of rotation In it are state, in contact with the periphery of the aspherical surface, it is characterized in that it comprises a surface deflection detecting means for detecting a surface deflection of the peripheral portion.

【0007】上記吸着回転手段の上記球面との接触部の
形状を、平面視において円形をなすとともに、側面視に
おいて上記回転軸と直交するものとし、さらに、上記非
球面レンズの球面に向けて光を照射する確認用送光手段
と、該確認用送光手段から発せられ上記球面によって反
射された光を受光し、その受光位置から、上記球面の曲
率中心が上記吸着回転手段の回転軸上にあるか否かを判
別する確認用判別手段とを備えるのが好ましい。
The shape of the contact portion of the suction rotation means with the spherical surface is circular in plan view and orthogonal to the rotation axis in side view, and the light is directed toward the spherical surface of the aspherical lens. And a light-transmitting means for irradiating the light-receiving means for receiving the light emitted from the light-transmitting means for confirmation and reflected by the spherical surface, and from the light receiving position, the center of curvature of the spherical surface is on the rotation axis of the suction rotation means. It is preferable to include a confirmation determination means for determining whether or not there is any.

【0008】また、外形が円形であり片面が球面をなす
被検非球面レンズを、その非球面を吸着した状態で回転
させる吸着回転手段と、上記球面に向けて光を照射する
調整用送光手段と、該調整用送光手段から発せられ上記
球面によって反射された光を受光する、受光位置を認識
可能な調整用受光手段と、該調整用受光手段による反射
光の受光位置に基づいて、上記球面の曲率中心が上記吸
着回転手段の回転軸上に位置しているか否かを判別する
調整用判別手段と、該調整用判別手段が、上記球面の曲
率中心が上記回転軸上に位置していると判別している状
態で、上記非球面レンズの外周面に当接して、該外周面
の外径振れ量を検出する外径振れ検出手段と、上記調整
用判別手段が、上記球面の曲率中心が上記回転軸上に位
置していると判別している状態で、上記非球面の中央部
に向けて光を照射する測定用送光手段と、該測定用送光
手段から発せられ上記非球面によって反射された光を受
光する、受光位置を認識可能な測定用受光手段と、該測
定用受光手段による反射光の受光位置に基づいて、上記
回転軸に対する上記非球面の中央部の曲率中心振れ量を
演算する曲率中心振れ量演算手段とを備えるようにする
ことができる。
Further, a suction rotation means for rotating an aspherical lens under test having a circular outer shape and a spherical surface on one side in a state in which the aspherical surface is suctioned, and an adjusting light sending device for irradiating light to the spherical surface. Means for receiving the light emitted from the adjusting light-transmitting means and reflected by the spherical surface, the light receiving position for recognizing the light receiving position, and the light receiving position of the reflected light by the adjusting light receiving means, The adjusting discriminating means for discriminating whether or not the center of curvature of the spherical surface is located on the rotation axis of the suction rotating means, and the adjusting discriminating means is arranged such that the center of curvature of the spherical surface is located on the rotating shaft. In the state in which it is determined that the spherical surface is in contact with the outer peripheral surface of the aspherical lens to detect the outer diameter deflection amount of the outer peripheral surface, the adjusting determination means is Determined that the center of curvature is located on the rotation axis In this state, the measuring light transmitting means for irradiating light toward the central portion of the aspherical surface, and the light receiving position for receiving the light emitted from the measuring light transmitting means and reflected by the aspherical surface are recognized. And a curvature center shake amount calculating means for calculating the curvature center shake amount of the central portion of the aspherical surface with respect to the rotation axis based on the light receiving position of the reflected light by the measurement light receiving means. You can

【0009】また、外形が円形であり両面がともに非球
面をなす被検非球面レンズを、その一方の非球面を吸着
した状態で回転させる吸着回転手段と、他方の非球面の
中央部に向けて光を照射する調整用送光手段と、該調整
用送光手段から発せられ上記他方の非球面によって反射
された光を受光する、受光位置を認識可能な調整用受光
手段と、該調整用受光手段による反射光の受光位置に基
づいて、上記他方の非球面の中央部の曲率中心が上記吸
着回転手段の回転軸上に位置しているか否かを判別する
調整用判別手段と、該調整用判別手段が、上記他方の非
球面の中央部の曲率中心が上記回転軸上に位置している
と判別している状態で、上記非球面レンズの外周面に当
接して、該外周面の外径振れ量を検出する外径振れ検出
手段と、上記調整用判別手段が、上記他方の非球面の中
央部の曲率中心が上記回転軸上に位置していると判別し
ている状態で、上記他方の非球面の周辺部に当接して、
該周辺部の面振れ量を検出する面振れ検出手段と、上記
調整用判別手段が、上記他方の非球面の中央部の曲率中
心が上記回転軸上に位置していると判別している状態
で、上記一方の非球面の中央部に向けて光を照射する測
定用送光手段と、該測定用送光手段から発せられ上記一
方の非球面によって反射された光を受光する、受光位置
を認識可能な測定用受光手段と、該測定用受光手段によ
る反射光の受光位置に基づいて、上記非球面軸に対する
上記一方の非球面の中央部の曲率中心振れ量を演算する
曲率中心振れ量演算手段とを備えるようにすることがで
きる。
Further, the aspherical lens to be inspected, which has a circular outer shape and has aspherical surfaces on both sides, is directed toward a suction rotation means for rotating one aspherical surface in a state in which one aspherical surface is suctioned, and a central portion of the other aspherical surface. Adjusting light sending means for irradiating light, and an adjusting light receiving means capable of recognizing a light receiving position for receiving the light emitted from the adjusting light sending means and reflected by the other aspherical surface, and the adjusting light sending means. An adjusting discriminating means for discriminating whether or not the center of curvature of the central portion of the other aspherical surface is located on the rotation axis of the suction rotating means based on the light receiving position of the reflected light by the light receiving means; When the application determining means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis, it contacts the outer peripheral surface of the aspherical lens, Outer diameter runout detecting means for detecting the amount of outer runout, and the above adjustment Determining means, in a state where the center of curvature of the central portion of the other aspherical surface is determined to be located on said rotation axis, in contact with the periphery of the other aspherical surface,
A state in which the surface shake detecting means for detecting the amount of surface shake of the peripheral portion and the adjustment determining means determine that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis. Then, the measuring light sending means for irradiating light toward the central portion of the one aspherical surface, and the light receiving position for receiving the light emitted from the measuring light sending means and reflected by the one aspherical surface, A curvature center shake amount calculation for calculating the curvature center shake amount of the central part of the one aspherical surface with respect to the aspherical surface axis based on the recognizable measurement light receiving means and the light receiving position of the reflected light by the measurement light receiving means. And means.

【0010】また、本発明の非球面レンズの測定方法
は、外形が円形であり片面が球面をなす被検非球面レン
ズの上記球面を吸着回転手段に吸着させて回転させるス
テップ、上記球面の曲率中心を上記吸着回転手段の回転
軸上に位置させた状態で、上記非球面レンズの非球面の
中央部に向けて光を照射するステップ、上記非球面によ
って反射された光を、受光位置に基づいて、上記非球面
の中央部の曲率中心が上記吸着回転手段の回転軸上に位
置しているか否かを判別する調整用判別手段に受光させ
るステップ、該調整用判別手段が、上記非球面の中央部
の曲率中心が上記回転軸上に位置していると判別してい
る状態で、上記非球面レンズの外周面の外径振れ量を検
出するステップ、及び上記調整用判別手段が、上記非球
面の中央部の曲率中心が上記回転軸上に位置していると
判別している状態で、上記非球面の周辺部の面振れ量を
検出するステップを有することを特徴としている。
Further, in the aspherical lens measuring method of the present invention, the aspherical surface of the aspherical lens to be inspected having a circular outer shape and one surface of which is a spherical surface is adsorbed by an adsorbing and rotating means and rotated, and the curvature of the spherical surface is adjusted. Step of irradiating light toward the central portion of the aspherical surface of the aspherical lens in a state in which the center is located on the rotation axis of the suction rotation means, the light reflected by the aspherical surface based on the light receiving position. The adjustment discriminating means for deciding whether or not the center of curvature of the central portion of the aspherical surface is located on the rotation axis of the suction rotation means. In a state where it is determined that the center of curvature of the central portion is located on the rotation axis, the step of detecting the outer diameter deflection amount of the outer peripheral surface of the aspherical lens, and the adjustment determination means are During the curvature of the center of the sphere There has been characterized in a state where it is determined that the are located on the rotating shaft, by a step of detecting the surface deflection amount of the peripheral portion of the aspherical surface.

【0011】上記吸着回転手段の上記球面との接触部の
形状を、平面視において円形をなすとともに、側面視に
おいて上記回転軸と直交するものとし、さらに、上記球
面の曲率中心が上記吸着回転手段の回転軸上に位置させ
た後に、上記非球面レンズの球面に向けて光を照射する
ステップ、該球面によって反射された光を、受光位置に
基づいて、上記球面の曲率中心が上記吸着回転手段の回
転軸上にあるか否かを判別する確認用判別手段に受光さ
せるステップを有するのが好ましい。
The contact portion of the suction rotation means with the spherical surface is circular in plan view and is orthogonal to the rotation axis in side view, and the center of curvature of the spherical surface is the suction rotation means. Irradiating the light toward the spherical surface of the aspherical lens after locating it on the axis of rotation of the aspherical lens, and based on the light receiving position of the light reflected by the spherical surface, the center of curvature of the spherical surface is the suction rotation means. It is preferable to have a step of causing the confirmation discriminating means for discriminating whether or not it is on the rotation axis.

【0012】また、外形が円形であり片面が球面をなす
被検非球面レンズの非球面を吸着回転手段に吸着させて
回転させるステップ、上記球面に向けて光を照射するス
テップ、該球面によって反射された光を、受光位置に基
づいて、上記球面の曲率中心が上記吸着回転手段の回転
軸上に位置しているか否かを判別する調整用判別手段に
受光させるステップ、該調整用判別手段が、上記球面の
曲率中心が上記回転軸上に位置していると判別している
状態で、上記非球面レンズの外周面の外径振れ量を検出
するステップ、上記調整用判別手段が、上記球面の曲率
中心が上記回転軸上に位置していると判別している状態
で、上記非球面の中央部に向けて光を照射するステッ
プ、該非球面によって反射された光を、受光位置を認識
可能な測定用受光手段に受光させるステップ、及び該測
定用受光手段による反射光の受光位置に基づいて、上記
回転軸に対する上記非球面の中央部の曲率中心振れ量を
演算するステップを有することができる。
Further, a step of adsorbing and rotating an aspherical surface of an aspherical lens to be inspected having a circular outer shape and one surface of which is a spherical surface, a step of irradiating light to the spherical surface, and a step of reflecting by the spherical surface. A step of causing the adjusting discriminating means to discriminate whether or not the center of curvature of the spherical surface is located on the rotation axis of the suction rotating means based on the light receiving position; A step of detecting the outer diameter deviation of the outer peripheral surface of the aspherical lens in a state where it is determined that the center of curvature of the spherical surface is located on the rotation axis, The step of irradiating light toward the central portion of the aspherical surface in a state where it is determined that the center of curvature of is located on the rotation axis, and the light receiving position of the light reflected by the aspherical surface can be recognized. Receiver for various measurements Can have a step step of receiving, and based on the receiving position of the reflected light by the measuring light receiving unit, calculates a center of curvature deflection of the central portion of the aspherical surface with respect to the axis of rotation.

【0013】また、外形が円形であり両面が非球面をな
す被検非球面レンズの一方の非球面を吸着回転手段に吸
着させて回転させるステップ、他方の非球面の中央部に
向けて光を照射するステップ、該他方の非球面によって
反射された光を、受光位置に基づいて、上記他方の非球
面の中央部の曲率中心が上記吸着回転手段の回転軸上に
位置しているか否かを判別する調整用判別手段に受光さ
せるステップ、該調整用判別手段が、上記他方の非球面
の中央部の曲率中心が上記回転軸上に位置していると判
別している状態で、上記非球面レンズの外周面の外径振
れ量を検出するステップ、上記調整用判別手段が、上記
他方の非球面の中央部の曲率中心が上記回転軸上に位置
していると判別している状態で、上記他方の非球面の周
辺部の面振れ量を検出するステップ、上記調整用判別手
段が、上記他方の非球面の中央部の曲率中心が上記回転
軸上に位置していると判別している状態で、上記一方の
非球面の中央部に向けて光を照射するステップ、該一方
の非球面によって反射された光を、受光位置を認識可能
な測定用受光手段に受光させるステップ、及び該測定用
受光手段による反射光の受光位置に基づいて、上記回転
軸に対する上記一方の非球面の中央部の曲率中心振れ量
を演算するステップを有することができる。
Further, a step of adsorbing one aspherical surface of the aspherical lens to be inspected whose outer shape is circular and both surfaces of which are aspherical surfaces by adsorbing and rotating the aspherical surface by the adsorbing and rotating means, and directing light toward the central portion of the other aspherical surface. The step of irradiating, the light reflected by the other aspherical surface, based on the light receiving position, whether the center of curvature of the central portion of the other aspherical surface is located on the rotation axis of the suction rotation means. The step of causing the adjusting discriminating means to discriminate receives the aspherical surface in a state where the adjusting discriminating means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis. In the step of detecting the outer diameter runout amount of the outer peripheral surface of the lens, the adjustment determination means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis, The amount of surface runout around the other aspherical surface When the adjustment determining means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis, the adjustment determining means is directed toward the central portion of the one aspherical surface. Based on the light receiving position of the reflected light by the measuring light receiving means, the step of irradiating light, the light reflected by the one aspherical surface, the step of causing the measuring light receiving means to recognize the light receiving position, There may be a step of calculating a curvature center shake amount of a central portion of the one aspherical surface with respect to the rotation axis.

【0014】[0014]

【発明の実施の形態】以下、本発明の第1の実施形態に
ついて図1を参照しながら説明する。この実施形態は、
一方の面が球面r1をなし、他方の面が非球面r2をな
す非球面レンズL1を、図示を省略した鏡枠に入れたの
と同じ状態にして、この非球面レンズL1の外径振れ量
と、非球面r2の周辺部の面振れ量を測定するものであ
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIG. This embodiment is
The aspherical lens L1 having one surface that is a spherical surface r1 and the other surface that is an aspherical surface r2 is in the same state as when it is placed in a lens frame (not shown), and the outer diameter deflection amount of the aspherical lens L1 is set. Then, the amount of surface wobbling in the peripheral portion of the aspherical surface r2 is measured.

【0015】まず、本実施形態の非球面レンズL1の測
定装置の構成について説明する。中空箱状の基台1Aの
上面には、取付孔1aが穿設されている。基台1Aの内
部には、上下方向を向く中心孔3aが形成され、かつ底
部がガラス板Gによって閉塞された固定部材3が配設さ
れている。固定部材3の上部には、モータ(図示略)に
連係された略円筒状の第1回転部材5が、軸受を介して
上下方向の軸回りに回転自在に嵌合している。第1回転
部材5の上部は取付孔1aから基台1Aの上方に突出し
ており、第1回転部材5には中心孔3aと同心をなすと
ともに連通する中心孔5aが設けられている。第1回転
部材5の上面には環状をなす第2回転部材7が固着され
ており、第2回転部材7には中心孔5aと同心をなすと
ともに連通する中心孔7aが穿設されている。第2回転
部材7の底面は、基台1Aの上面に固定された環状の固
定部材9の上面に回転自在に支持されている。第2回転
部材7の上面には、非球面レンズL1の球面r1の周辺
部よりやや内側を支持するとともに、上面が開口する略
円筒状のレンズホルダ(吸着回転手段)11が固着され
ている。このレンズホルダ11の上端縁は、平面視では
円形をなし、側面視ではレンズホルダ11の中心軸A1
と直交している。さらに、レンズホルダ11の内部に
は、中心孔7aと同心をなすとともに連通する中心孔1
1aが穿設されている。
First, the structure of the measuring device for the aspherical lens L1 of this embodiment will be described. A mounting hole 1a is formed on the upper surface of the hollow box-shaped base 1A. Inside the base 1A, there is provided a fixing member 3 having a center hole 3a formed in a vertical direction and having a bottom closed by a glass plate G. A substantially cylindrical first rotating member 5 linked to a motor (not shown) is fitted on the fixed member 3 via a bearing so as to be rotatable about an axis in the vertical direction. The upper portion of the first rotating member 5 projects from the mounting hole 1a to above the base 1A, and the first rotating member 5 is provided with a central hole 5a that is concentric with and communicates with the central hole 3a. An annular second rotating member 7 is fixed to the upper surface of the first rotating member 5, and the second rotating member 7 is provided with a central hole 7a that is concentric with and communicates with the central hole 5a. The bottom surface of the second rotating member 7 is rotatably supported on the upper surface of an annular fixing member 9 fixed to the upper surface of the base 1A. A substantially cylindrical lens holder (adsorption rotation means) 11 is fixed to the upper surface of the second rotating member 7 so as to support the inner surface of the spherical surface r1 of the aspherical lens L1 slightly inside and to open the upper surface. The upper edge of the lens holder 11 has a circular shape in a plan view and the central axis A1 of the lens holder 11 in a side view.
Is orthogonal to. Further, inside the lens holder 11, the central hole 1 that is concentric with and communicates with the central hole 7a.
1a is provided.

【0016】基台1Aの内部の底面には、吸引パイプ1
3を介して固定部材3の中心孔3aと連通する真空装置
15が設置されている。この真空装置15は、各中心孔
3a、5a、7a、11a内を真空にすることにより、
レンズホルダ11の上面に載置された被検レンズである
非球面レンズL1を、レンズホルダ11に吸着するもの
である。レンズホルダ11の上方には、レンズホルダ1
1の上面に吸着される非球面レンズL1の外周面L1a
と非球面r2の周辺部とにそれぞれ接触する、揺動式の
接触子S1a、S2aを具備する第1接触式センサ(外
径振れ検出手段)S1と第2接触式センサ(面振れ検出
手段)S2が配設されている。こららの接触式センサS
1、S2は図示を省略したプロセッサーに接続されてお
り、このプロセッサーはテレビモニタ(図示略)に接続
されている。
The suction pipe 1 is provided on the bottom surface inside the base 1A.
A vacuum device 15 that communicates with the center hole 3 a of the fixing member 3 via 3 is installed. The vacuum device 15 creates a vacuum in each of the central holes 3a, 5a, 7a, 11a,
The aspherical lens L1 which is a lens to be inspected mounted on the upper surface of the lens holder 11 is sucked onto the lens holder 11. Above the lens holder 11, the lens holder 1
1. The outer peripheral surface L1a of the aspherical lens L1 attracted to the upper surface of
And a second contact type sensor (outer diameter shake detecting means) S1 and a second contact type sensor (surface shake detecting means), each of which is provided with a swing type contactor S1a, S2a that makes contact with the periphery of the aspherical surface r2. S2 is provided. These contact sensors S
1 and S2 are connected to a processor (not shown), and this processor is connected to a television monitor (not shown).

【0017】レンズホルダ11の上方には調整用送光装
置(調整用送光手段)17が配設されている。調整用送
光装置17は、下面に孔19aが穿設されたケース19
と、ケース19の内部に配設された光源21と、反射鏡
Mと、レンズL4と、プリズムP1と、レンズL5、レ
ンズL6と、調整用センサ(調整用受光手段)23とか
らなるものである。調整用センサ23は上記プロセッサ
ー(調整用判別手段)に接続されている。
An adjusting light transmitting device (adjusting light transmitting means) 17 is arranged above the lens holder 11. The adjusting light transmitting device 17 has a case 19 having a hole 19a formed in the lower surface.
A light source 21 disposed inside the case 19, a reflecting mirror M, a lens L4, a prism P1, a lens L5, a lens L6, and an adjustment sensor (adjustment light receiving means) 23. is there. The adjustment sensor 23 is connected to the processor (adjustment determination means).

【0018】次に、非球面レンズL1を、図示を省略し
た鏡枠に入れたのと同じ状態にして、非球面レンズL1
の外径振れ量と、非球面r2の周辺部の面振れ量を測定
する要領について説明する。
Next, the aspherical lens L1 is placed in the same state as that in which it is put in a lens frame (not shown), and the aspherical lens L1 is placed.
A description will be given of a procedure for measuring the outer diameter runout amount of and the surface runout amount of the peripheral portion of the aspherical surface r2.

【0019】レンズホルダ11の上面に、非球面r2が
正確な非球面形状をなすように加工された非球面レンズ
L1の球面r1を載せた後、真空装置15を作動させて
各中心孔3a、5a、7a、11a内を真空状態にし
て、非球面レンズL1の球面r1をレンズホルダ11に
吸着させる。球面r1とレンズホルダ11は、両者間の
摩擦抵抗が極めて小さくなるように設計されているの
で、このとき非球面レンズL1は自重により、球面r1
の曲率中心Osが各中心孔3a、5a、7a、11aの
中心軸(回転軸)A1上に位置する状態に、自動的に移
動する。この状態でモータを作動させて、第1回転部材
5、第2回転部材7、レンズホルダ11、非球面レンズ
L1を、中心軸A1回りに回転させる。
After the aspherical surface r1 of the aspherical lens L1 processed so that the aspherical surface r2 has an accurate aspherical shape is placed on the upper surface of the lens holder 11, the vacuum device 15 is actuated to move the respective central holes 3a, The inside of 5a, 7a, and 11a is evacuated, and the spherical surface r1 of the aspherical lens L1 is attracted to the lens holder 11. Since the spherical surface r1 and the lens holder 11 are designed so that the frictional resistance between them is extremely small, at this time, the aspherical lens L1 is moved by its own weight to the spherical surface r1.
The center of curvature Os of is automatically moved to a state in which it is located on the central axis (rotational axis) A1 of each central hole 3a, 5a, 7a, 11a. In this state, the motor is operated to rotate the first rotating member 5, the second rotating member 7, the lens holder 11, and the aspherical lens L1 about the central axis A1.

【0020】次に、光源21から光を発射する。発射さ
れた光は、反射鏡Mで反射され、レンズL4、プリズム
P1、レンズL5、レンズL6、孔19aを通って、非
球面r2の中央部に照射される。非球面r2の中央部に
照射された光は、非球面r2によって反射され、レンズ
L6、レンズL5を通ってプリズムP1により方向を変
えられ、調整用センサ23に導かれる。
Next, the light source 21 emits light. The emitted light is reflected by the reflecting mirror M, passes through the lens L4, the prism P1, the lens L5, the lens L6, and the hole 19a, and is applied to the central portion of the aspherical surface r2. The light applied to the central portion of the aspherical surface r2 is reflected by the aspherical surface r2, passes through the lenses L6 and L5, is redirected by the prism P1, and is guided to the adjustment sensor 23.

【0021】このときの調整用センサ23の受光面の受
光位置に基づいて、プロセッサーが非球面r2の中央部
の曲率中心Ooの中心軸A1に対する位置を演算する。
光が受光面の基準位置で受光されていれば、曲率中心O
oが中心軸A1上に位置していることがテレビモニタに
表示され、光が基準位置以外で受光されていれば、中心
軸A1から曲率中心Ooまでの距離が数値で表示され
る。曲率中心Ooが中心軸A1上に位置していれば、非
球面レンズL1をその状態に保持し、中心軸A1上に位
置していなければ、テレビモニタを見ながら非球面レン
ズL1をレンズホルダ11に対して動かし、曲率中心O
oを中心軸A1上に位置させる。
Based on the light receiving position of the light receiving surface of the adjusting sensor 23 at this time, the processor calculates the position of the center of curvature Oo of the central portion of the aspherical surface r2 with respect to the central axis A1.
If the light is received at the reference position on the light receiving surface, the center of curvature O
The fact that o is located on the central axis A1 is displayed on the television monitor, and if light is received at a position other than the reference position, the distance from the central axis A1 to the center of curvature Oo is displayed numerically. If the center of curvature Oo is located on the central axis A1, the aspherical lens L1 is held in that state. If it is not located on the central axis A1, the aspherical lens L1 is placed on the lens holder 11 while watching the television monitor. Move with respect to the center of curvature O
Position o on the central axis A1.

【0022】このように曲率中心Ooを中心軸A1上に
位置させると、非球面レンズL1は、図示を省略した鏡
枠内に位置させられた後、非球面レンズL1の外周面と
鏡枠の内周面の間の僅かなクリアランスを利用して鏡枠
に対して動かされて、曲率中心Ooが鏡枠の中心軸上に
位置し、その状態を保持したまま鏡枠に接着されたのと
同じ状態になる。
When the center of curvature Oo is positioned on the central axis A1 in this way, the aspherical lens L1 is positioned in a lens frame (not shown), and then the outer peripheral surface of the aspherical lens L1 and the lens frame are separated from each other. Since the center of curvature Oo is located on the central axis of the lens frame by being moved with respect to the lens frame by utilizing a slight clearance between the inner peripheral surfaces, and the state is maintained while being adhered to the lens frame. It will be the same.

【0023】第1接触式センサS1の接触子S1aは常
に非球面レンズL1の外周面L1aに接触しており、非
球面レンズL1の外径中心が中心軸A1上に位置してい
ないと、接触子S1aが横方向に揺れて、プロセッサー
がこの揺動量を演算し、演算した揺動量(外径振れ量)
がテレビモニタに表示される。
The contactor S1a of the first contact type sensor S1 is always in contact with the outer peripheral surface L1a of the aspherical lens L1. If the center of the outer diameter of the aspherical lens L1 is not located on the central axis A1, the contact is made. The child S1a sways in the lateral direction, the processor calculates this swing amount, and the calculated swing amount (outer diameter swing amount)
Is displayed on the TV monitor.

【0024】また、第2接触式センサS2の接触子S2
aは常に非球面レンズL1の非球面r2の周辺部に接触
しており、この周辺部が中心軸A1に対して回転対称形
状をなしていないと、接触子S2aが上下方向に揺動
し、プロセッサーがこの揺動量を演算し、演算した揺動
量(面振れ量)がテレビモニタに表示される。
The contact S2 of the second contact type sensor S2
a is always in contact with the peripheral portion of the aspherical surface r2 of the aspherical lens L1, and unless this peripheral portion has a rotationally symmetrical shape with respect to the central axis A1, the contactor S2a swings in the vertical direction, The processor calculates this swing amount, and the calculated swing amount (surface wobbling amount) is displayed on the television monitor.

【0025】このような要領により多数の非球面レンズ
の外径振れ量と面振れ量を測定し、これらの非球面レン
ズのレンズ性能をを図示を省略したマスターレンズを用
いて調べ、外径振れ量および面振れ量とレンズ性能の相
関関係を調べれば、非球面レンズを鏡枠内に位置させた
後、非球面レンズの外周面と鏡枠の内周面の間の僅かな
クリアランスを利用して非球面レンズを鏡枠に対して動
かし、非球面レンズの一方の面の曲率中心を鏡枠の中心
軸上に位置させて、その状態を保持したまま非球面レン
ズを鏡枠に接着したのと同じ状態下で、外径振れ量と面
振れ量が非球面レンズのレンズ性能にどのような影響を
与えているかを知ることができる。
The outer diameter runout and surface runout of a large number of aspherical lenses were measured by the above procedure, and the lens performance of these aspherical lenses was examined using a master lens (not shown), and the outer diameter runout was measured. The amount of surface runout and the lens performance are investigated, and after positioning the aspherical lens inside the lens frame, use the slight clearance between the outer peripheral surface of the aspherical lens and the inner peripheral surface of the lens frame. Move the aspherical lens with respect to the lens frame, position the center of curvature of one surface of the aspherical lens on the center axis of the lens frame, and bond the aspherical lens to the lens frame while maintaining that state. Under the same condition as above, it is possible to know how the outer diameter runout amount and the surface runout amount affect the lens performance of the aspherical lens.

【0026】また、非球面の周辺部の面振れ量を基に非
球面レンズのディセンター量をプロセッサーに演算さ
せ、このディセンター量をテレビモニタに表示するよう
にしてもよい。この場合は、曲率中心振れ量とディセン
ター量がレンズ性能にどのような影響を与えているかを
知ることができる。ここでディセンター量とは、図2に
示すように、中心軸A1と非球面r2の交点Qと非球面
r2の頂点P(非球面r2の各位置の曲率中心を全て通
る直線と非球面r2との交点)の非球面レンズL1の径
方向距離のことである。
The decenter amount of the aspherical lens may be calculated by the processor based on the surface runout amount of the peripheral portion of the aspherical surface, and the decenter amount may be displayed on the television monitor. In this case, it is possible to know how the curvature center shake amount and the decenter amount affect the lens performance. Here, the decenter amount means, as shown in FIG. 2, an intersection point Q of the central axis A1 and the aspherical surface r2 and a vertex P of the aspherical surface r2 (a straight line passing through all the centers of curvature at each position of the aspherical surface r2 and the aspherical surface r2). (Intersection point) with the radial distance of the aspherical lens L1.

【0027】この場合のディセンター量Dは、以下のよ
うにして近似的に求められる。QとOoを結ぶ線とPと
Ooを結ぶ線がなす角度をεとすると、 ε≒d/φ となる。なお、dは接触子S2aが測定した非球面r2
の周辺部の面振れ量であり、φは非球面レンズL1の外
径中心から非球面r2と接触子S2aの接点までの距離
を2倍したものである。そして、PからOoまでの距離
Lにεを掛ければ、ディセンター量Dが近似的に求めら
れる。即ち、 D≒ε×L となる。
The decenter amount D in this case is approximately obtained as follows. If the angle formed by the line connecting Q and Oo and the line connecting P and Oo is ε, then ε≈d / φ. In addition, d is the aspherical surface r2 measured by the contactor S2a.
Is the amount of surface runout of the peripheral portion of, and φ is a value obtained by doubling the distance from the outer diameter center of the aspherical lens L1 to the contact point of the aspherical surface r2 and the contactor S2a. Then, by multiplying the distance L from P to Oo by ε, the decenter amount D is approximately obtained. That is, D≈ε × L.

【0028】次に、本発明の第2の実施形態について図
3を参照しながら説明する。なお、第1の実施形態と同
じ部材には同じ符号を付すに止めて、その詳細な説明は
省略する。
Next, a second embodiment of the present invention will be described with reference to FIG. The same members as those in the first embodiment are given the same reference numerals and detailed description thereof will be omitted.

【0029】本実施形態は、一方の面が球面r1をな
し、他方の面が非球面r2をなす非球面レンズL1を図
示を省略した鏡枠に入れたのと同じ状態にして、その外
径振れ量と、非球面r2の周辺部の面振れ量を測定する
ものである。
In the present embodiment, the aspherical lens L1 having one surface which is a spherical surface r1 and the other surface which is an aspherical surface r2 is put in the same state as a lens frame (not shown), and its outer diameter is set. The shake amount and the surface shake amount of the peripheral portion of the aspherical surface r2 are measured.

【0030】まず、本実施形態の非球面レンズL1の測
定装置の、第1の実施形態にはない構成要素について説
明する。基台1Bの上面には、取付孔1aの他に採光孔
1bが穿設されている。基台1Bの内部の底面には、取
付孔1aと採光孔1bの直下にそれぞれ位置する左右一
対の全反射プリズム25、27が設置されている。
First, the components of the measuring device for the aspherical lens L1 according to the present embodiment, which are not included in the first embodiment, will be described. In addition to the mounting hole 1a, a lighting hole 1b is formed on the upper surface of the base 1B. On the inner bottom surface of the base 1B, a pair of left and right total reflection prisms 25 and 27 located directly below the mounting hole 1a and the lighting hole 1b are installed.

【0031】採光孔1bの上方には確認用送光装置(確
認用送光手段)29が配設されている。この確認用送光
装置29は、下面と側面とに孔31a、31bが穿設さ
れたケース31と、ケース31の内部に配設された光源
33と、2つのプリズムP2、P3と、3枚のレンズL
7、L8、L9と、確認用センサ(確認用受光手段)3
5とからなるものである。確認用センサ35は上記プロ
セッサー(確認用判別手段)、(調整用判別手段)に接
続されている。
A confirmation light transmitting device (confirmation light transmitting means) 29 is disposed above the light collecting hole 1b. The confirmation light transmitting device 29 includes a case 31 in which holes 31a and 31b are formed on the lower surface and the side surface, a light source 33 disposed inside the case 31, two prisms P2 and P3, and three sheets. Lens L
7, L8, L9 and confirmation sensor (confirmation light receiving means) 3
5 and. The confirmation sensor 35 is connected to the processor (confirmation discrimination means) and (adjustment discrimination means).

【0032】レンズホルダ11の上方には調整用送光装
置(調整用送光手段)37が配設されている。この調整
用送光装置37は、側面と下面に孔39a、39bが穿
設されたケース39と、ケース39の内部に配設された
反射鏡Mと、プリズムP4と、3枚のレンズL10、L
11、L12と、調整用センサ(調整用受光手段)41
とからなるものである。調整用センサ41は上記プロセ
ッサーに接続されている。
An adjusting light transmitting device (adjusting light transmitting means) 37 is disposed above the lens holder 11. The adjusting light-transmitting device 37 includes a case 39 having holes 39a and 39b formed on the side surface and the lower surface thereof, a reflecting mirror M provided inside the case 39, a prism P4, and three lenses L10. L
11, L12 and adjustment sensor (adjustment light receiving means) 41
It consists of and. The adjustment sensor 41 is connected to the processor.

【0033】次に、非球面レンズL1を図示を省略した
鏡枠に入れたのと同じ状態にして、非球面レンズL1の
外径振れ量と、非球面r2の面振れ量を測定する要領に
ついて説明する。
Next, the aspherical lens L1 is placed in the same state as that of a lens frame (not shown), and the procedure for measuring the outer diameter deflection of the aspherical lens L1 and the surface deflection of the aspherical surface r2 is measured. explain.

【0034】まず、レンズホルダ11の上面に非球面レ
ンズL1の球面r1を載せて吸着させた後に、モータを
作動させたら、光源33から光を発射する。発射された
光の一部は、確認用送光装置29のプリズムP2、レン
ズL7、プリズムP3、レンズL8、レンズL9を通っ
て、全反射プリズム27、25で反射され、球面r1に
照射される。すると、球面r1によって反射された光
が、全反射プリズム25、27によって確認用送光装置
29の内部に導かれ、レンズL9、L8を透過して、プ
リズムP3によって方向を変えられ確認用センサ35に
導かれる。光が確認用センサ35の基準位置で受光され
たか否かをプロセッサーが判断する。
First, the spherical surface r1 of the aspherical lens L1 is placed on the upper surface of the lens holder 11 to be adsorbed, and when the motor is operated, the light source 33 emits light. Part of the emitted light passes through the prism P2, the lens L7, the prism P3, the lens L8, and the lens L9 of the confirmation light transmitting device 29, is reflected by the total reflection prisms 27 and 25, and is irradiated on the spherical surface r1. . Then, the light reflected by the spherical surface r1 is guided inside the confirmation light transmitting device 29 by the total reflection prisms 25 and 27, transmitted through the lenses L9 and L8, and is changed in direction by the prism P3, and the confirmation sensor 35. Be led to. The processor determines whether light is received at the reference position of the confirmation sensor 35.

【0035】光が基準位置で受光されていれば、球面r
1の曲率中心Osが中心軸A1上に位置している旨がテ
レビモニタに表示され、光が基準位置以外の箇所で受光
されていれば、曲率中心Osが中心軸A1上に位置して
いない旨が表示される。
If the light is received at the reference position, the spherical surface r
The fact that the center of curvature Os of 1 is located on the central axis A1 is displayed on the television monitor, and if the light is received at a position other than the reference position, the center of curvature Os is not located on the central axis A1. Is displayed.

【0036】このようにして中心軸A1上に曲率中心O
sが位置していることが確認できたら、次の要領によ
り、非球面r2の中央部の曲率中心Ooを中心軸A1上
に位置させる。
In this way, the center of curvature O on the central axis A1
When it is confirmed that s is located, the center of curvature Oo of the central portion of the aspherical surface r2 is located on the central axis A1 by the following procedure.

【0037】光源33から発射された光の一部は、プリ
ズムP2を透過して、孔31b、39aを通って調整用
送光装置37の内部に導かれる。この光は反射鏡Mによ
り反射され、レンズL10、プリズムP4、レンズL1
1、レンズL12、ケース39の孔39aを通って非球
面r2の中央部に照射される。非球面r2の中央部に照
射された光は、非球面r2によって反射され、レンズL
12、レンズL11を通ってプリズムP4により方向を
変えられ、調整用センサ41に導かれる。光が調整用セ
ンサ41の受光面のどの位置で受光されたかに応じて、
プロセッサーが非球面r2の中央部の曲率中心Ooの中
心軸A1に対する位置を演算し、その結果をテレビモニ
タに表示する。曲率中心Ooが中心軸A1上に位置して
いれば、非球面レンズL1をその状態に保持し、中心軸
A1上に位置していなければ、テレビモニタを見ながら
非球面レンズL1をレンズホルダ11に対して動かし、
曲率中心Ooを中心軸A1上に位置させる。
A part of the light emitted from the light source 33 passes through the prism P2 and is guided to the inside of the adjusting light transmitting device 37 through the holes 31b and 39a. This light is reflected by the reflecting mirror M, and the lens L10, the prism P4, and the lens L1.
1, the lens L12, the hole 39a of the case 39, and the central portion of the aspherical surface r2. The light emitted to the central portion of the aspherical surface r2 is reflected by the aspherical surface r2 and the lens L
After passing through the lens 12 and the lens L11, the direction is changed by the prism P4 and is guided to the adjustment sensor 41. Depending on where on the light receiving surface of the adjustment sensor 41 the light is received,
The processor calculates the position of the center of curvature Oo at the center of the aspherical surface r2 with respect to the central axis A1, and displays the result on the television monitor. If the center of curvature Oo is located on the central axis A1, the aspherical lens L1 is held in that state. If it is not located on the central axis A1, the aspherical lens L1 is placed on the lens holder 11 while watching the television monitor. Move against,
The center of curvature Oo is located on the central axis A1.

【0038】このようにして非球面レンズL1を図示を
省略した鏡枠に入れたのと同じ状態にしたら、第1の実
施形態と同様に、第1接触式センサS1と第2接触式セ
ンサS2を用いて、非球面レンズL1の外径振れ量と非
球面r2の周辺部の面振れ量を測定する。
In this way, when the aspherical lens L1 is put in the same state as when it is put in a lens frame (not shown), the first contact type sensor S1 and the second contact type sensor S2 are the same as in the first embodiment. Using, the outer-diameter deviation of the aspherical lens L1 and the surface deviation of the peripheral portion of the aspherical surface r2 are measured.

【0039】このように本実施形態によれば、第1の実
施形態と同様の作用効果を奏することができるだけでな
く、球面r1の曲率中心Osが中心軸A1上に位置して
いるか否かをテレビモニタで視覚的に確認できるので、
非球面レンズL1の測定をより正確に行うことができ
る。
As described above, according to this embodiment, not only can the same effects as those of the first embodiment be obtained, but it is possible to determine whether or not the center of curvature Os of the spherical surface r1 is located on the central axis A1. Since it can be visually confirmed on the TV monitor,
The aspherical lens L1 can be measured more accurately.

【0040】次に、本発明の第3の実施形態について図
4を参照しながら説明する。なお、第2の実施形態と同
じ部材には同じ符号を付すに止めて、その詳細な説明は
省略する。この実施形態は、片面が球面r4をなす非球
面レンズL2を、第1の実施形態とは逆向きに鏡枠に入
れたのと同じ状態にして、非球面レンズL2の外径振れ
量と、中心軸A1に対する非球面r3の中央部の曲率中
心振れ量を測定するものである。ここで、中心軸A1に
対する非球面r3の曲率中心振れ量を、中心軸A1と非
球面r3の中央部の曲率中心Osの、非球面レンズL1
の径方向の距離と定義する。
Next, a third embodiment of the present invention will be described with reference to FIG. The same members as those in the second embodiment are given the same reference numerals and detailed description thereof will be omitted. In this embodiment, the aspherical lens L2, one surface of which is a spherical surface r4, is placed in the same state as that in the lens frame in the opposite direction to the first embodiment, and the outer diameter deflection amount of the aspherical lens L2 and The amount of deflection of the center of curvature of the central portion of the aspherical surface r3 with respect to the central axis A1 is measured. Here, the amount of deflection of the center of curvature of the aspherical surface r3 with respect to the central axis A1 is defined by the aspherical lens L1 of the central axis A1 and the center of curvature Os of the central portion of the aspherical surface r3.
Is defined as the radial distance of.

【0041】まず、本実施形態の測定装置の、第2の実
施形態とは異なる構成要素について説明する。確認用送
光装置29とほぼ同様の構成要素を備える測定用送光装
置(測定用送光手段)40の内部には、第2の実施形態
の確認用センサ35の代わりに測定用センサ(測定用受
光手段)43が設けられており、この測定用センサ43
は上記プロセッサー(曲率中心振れ量演算手段)に接続
されている。また、第2接触式センサS2は設けられて
いない。
First, the components of the measuring apparatus of this embodiment different from those of the second embodiment will be described. Inside the measuring light-transmitting device (measuring light-transmitting means) 40 having substantially the same components as the confirming light-transmitting device 29, instead of the confirming sensor 35 of the second embodiment, a measuring sensor (measurement Light receiving means) 43 is provided, and this measuring sensor 43
Is connected to the processor (curvature center shake amount calculation means). Further, the second contact sensor S2 is not provided.

【0042】次に、非球面レンズL2の外径振れ量と曲
率中心振れ量を測定する要領について説明する。
Next, the procedure for measuring the outer diameter shake amount and the curvature center shake amount of the aspherical lens L2 will be described.

【0043】まず、第2の実施形態と同様に、調整用送
光装置(調整用送光手段)37を利用して、球面r4の
曲率中心Ooを中心軸A1上に位置させる。光源33か
ら発射された光の一部は、調整用送光装置37を通って
球面r4に照射され、球面r4によって反射された光は
調整用センサ(調整用受光手段)41に導かれる。光が
調整用センサ41の受光面のどの位置で受光されたかに
応じて、プロセッサーが球面r4の曲率中心Ooの中心
軸A1に対する位置を演算し、その結果をテレビモニタ
に表示する。曲率中心Ooが中心軸A1上に位置してい
れば非球面レンズL2をその状態に保持し、中心軸A1
上に位置してなければ、テレビモニタを見ながら非球面
レンズL2をレンズホルダ11に対して動かし、曲率中
心Ooを中心軸A1上に位置させる。
First, similarly to the second embodiment, the center of curvature Oo of the spherical surface r4 is positioned on the central axis A1 by using the adjusting light sending device (adjusting light sending means) 37. Part of the light emitted from the light source 33 passes through the adjusting light transmitting device 37 and is applied to the spherical surface r4, and the light reflected by the spherical surface r4 is guided to the adjusting sensor (adjusting light receiving means) 41. The processor calculates the position of the center of curvature Oo of the spherical surface r4 with respect to the central axis A1 in accordance with the position of the light receiving surface of the adjustment sensor 41, and displays the result on the television monitor. If the center of curvature Oo is located on the central axis A1, the aspherical lens L2 is held in that state, and the central axis A1
If it is not located on the upper side, the aspherical lens L2 is moved with respect to the lens holder 11 while watching the TV monitor, and the center of curvature Oo is located on the central axis A1.

【0044】このようにして曲率中心Ooを中心軸A1
上に位置させれば、非球面レンズL2は鏡枠に入れたの
と同じ状態になるので、この後、第1の実施形態と同様
に、第1接触式センサ(外径振れ検出手段)S1を用い
て非球面レンズL2の外径振れ量を測定する。
In this way, the center of curvature Oo is set to the central axis A1.
If it is positioned above, the aspherical lens L2 will be in the same state as when it is put in the lens frame, and thereafter, as in the first embodiment, the first contact sensor (outer diameter shake detection means) S1. The outer diameter shake amount of the aspherical lens L2 is measured using.

【0045】また、光源33から発射された光の一部
は、測定用送光装置40のプリズムP2、レンズL7、
プリズムP3、レンズL8、レンズL9を通って、全反
射プリズム27、25で反射され、非球面r3の中央部
に照射される。すると、非球面r3によって反射された
光が、全反射プリズム25、27によって測定用送光装
置40の内部に導かれ、レンズL9、L8を通って、プ
リズムP3によって方向を変えられ測定用センサ43に
導かれる。
A part of the light emitted from the light source 33 is part of the prism P2, the lens L7, and the prism P2 of the measuring light transmitting device 40.
The light passes through the prism P3, the lens L8, and the lens L9, is reflected by the total reflection prisms 27 and 25, and is irradiated onto the central portion of the aspherical surface r3. Then, the light reflected by the aspherical surface r3 is guided to the inside of the measurement light transmitting device 40 by the total reflection prisms 25 and 27, passes through the lenses L9 and L8, is changed in direction by the prism P3, and is measured by the measurement sensor 43. Be led to.

【0046】すると、測定用センサ43の受光位置に基
づいて、プロセッサーが、中心軸A1に対する非球面r
3の中央部の曲率中心振れ量を演算し、演算結果をテレ
ビモニタに表示する。
Then, based on the light receiving position of the measuring sensor 43, the processor causes the aspherical surface r with respect to the central axis A1.
The curvature center shake amount of the central portion of 3 is calculated, and the calculation result is displayed on the television monitor.

【0047】このようにして多数の非球面レンズの外径
振れ量と曲率中心振れ量を測定し、これらの非球面レン
ズのレンズ性能を図示を省略したマスターレンズを用い
て調べ、外径振れ量および曲率中心振れ量とレンズ性能
の相関関係を調べれば、非球面レンズを鏡枠内に位置さ
せた後、非球面レンズの外周面と鏡枠の内周面の間の僅
かなクリアランスを利用して非球面レンズを鏡枠に対し
て動かし、非球面レンズの一方の面の曲率中心を鏡枠の
中心軸上に位置させて、その状態を保持したまま非球面
レンズを鏡枠に接着したのと同じ状態下で、外径振れ量
と曲率中心振れ量が非球面レンズのレンズ性能にどのよ
うな影響を与えているかを知ることが出来る。
In this way, the outer diameter runout and the curvature center runout of a large number of aspherical lenses are measured, and the lens performance of these aspherical lenses is investigated using a master lens (not shown), and the outer diameter runout is determined. By investigating the correlation between the curvature center shake amount and the lens performance, after positioning the aspherical lens in the lens frame, the slight clearance between the outer peripheral surface of the aspherical lens and the inner peripheral surface of the lens frame is used. Move the aspherical lens with respect to the lens frame, position the center of curvature of one surface of the aspherical lens on the center axis of the lens frame, and bond the aspherical lens to the lens frame while maintaining that state. Under the same condition as above, it is possible to know how the outer diameter shake amount and the curvature center shake amount affect the lens performance of the aspherical lens.

【0048】最後に、本発明の第4の実施形態について
図5を参照しながら説明する。なお、第3の実施形態と
同じ部材には同じ符号を付すに止めて、その詳細な説明
は省略する。本実施形態は、両面r5、r6が非球面を
なす非球面レンズL3の外径振れ量と、非球面r6の周
辺部の面振れ量と、中心軸A1に対する非球面r5の中
央部の曲率中心振れ量を測定するものである。
Finally, a fourth embodiment of the present invention will be described with reference to FIG. The same members as those in the third embodiment are designated by the same reference numerals, and detailed description thereof will be omitted. In the present embodiment, the outer diameter runout of the aspherical lens L3 whose both surfaces r5 and r6 are aspherical surfaces, the runout of the peripheral part of the aspherical surface r6, and the center of curvature of the central part of the aspherical surface r5 with respect to the central axis A1. The amount of shake is measured.

【0049】本実施形態の測定装置は、第3の実施形態
の測定装置に第2接触式センサ(面振れ検出手段)S2
を付加したものであり、第2接触式センサS2は上記プ
ロセッサーに接続されている。
The measuring apparatus of this embodiment is the same as the measuring apparatus of the third embodiment except that the second contact type sensor (surface shake detecting means) S2 is used.
The second contact sensor S2 is connected to the processor.

【0050】次に、非球面レンズL3の外径振れ量と、
非球面r6の周辺部の面振れ量と、中心軸A1に対する
非球面r5の中央部の曲率中心振れ量を測定する要領に
ついて説明する。まず、第2の実施形態と同様に、調整
用送光装置37を利用して非球面r6の中央部の曲率中
心Ooを中心軸A1上に位置させて、非球面レンズL3
を鏡枠に入れたのと同じ状態にする。
Next, the outer diameter deviation of the aspherical lens L3,
A description will be given of how to measure the surface wobbling amount of the peripheral portion of the aspherical surface r6 and the curvature center wobbling amount of the central portion of the aspherical surface r5 with respect to the central axis A1. First, similarly to the second embodiment, the center of curvature Oo of the central portion of the aspherical surface r6 is positioned on the central axis A1 by using the adjusting light transmitting device 37, and the aspherical lens L3.
Put it in the same state as it was put in the lens frame.

【0051】このようにして非球面レンズL3を鏡枠に
入れたのと同じ状態にしたら、第1の実施形態と同様
に、第1接触式センサS1と第2接触式センサS2を用
いて、非球面レンズL3の外径振れ量と非球面r6の周
辺部の面振れ量を測定する。
When the aspherical lens L3 is put in the same state as the lens frame in this way, the first contact type sensor S1 and the second contact type sensor S2 are used as in the first embodiment. The outer-diameter shake amount of the aspherical lens L3 and the surface shake amount of the peripheral portion of the aspherical surface r6 are measured.

【0052】また、第3の実施形態と同様に、光源33
から発射された光の一部は、測定用送光装置40のプリ
ズムP2、レンズL7、プリズムP3、レンズL8、レ
ンズL9を通って、全反射プリズム27、25で反射さ
れ、非球面r5の中央部に照射される。非球面r5によ
って反射された光は、全反射プリズム25、27によっ
て測定用送光装置40の内部に導かれ、レンズL9、L
8を通って、プリズムP3によって方向を変えられ測定
用センサ43に導かれる。すると、測定用センサ43の
受光位置に基づいて、プロセッサーが、中心軸A1に対
する非球面r5の中央部の曲率中心振れ量を演算し、演
算結果をテレビモニタに表示する。
Further, similarly to the third embodiment, the light source 33
A part of the light emitted from the measurement light transmitting device 40 passes through the prism P2, the lens L7, the prism P3, the lens L8, and the lens L9, and is reflected by the total reflection prisms 27 and 25, and the center of the aspheric surface r5. The area is irradiated. The light reflected by the aspherical surface r5 is guided to the inside of the measurement light transmitting device 40 by the total reflection prisms 25 and 27, and the lenses L9 and L9.
After passing through 8, the direction is changed by the prism P3 and is guided to the measuring sensor 43. Then, based on the light receiving position of the measuring sensor 43, the processor calculates the curvature center shake amount of the central portion of the aspherical surface r5 with respect to the center axis A1, and displays the calculation result on the television monitor.

【0053】このようにして多数の非球面レンズの外径
振れ量と面振れ量と曲率中心振れ量を測定し、これらの
非球面レンズのレンズ性能を図示を省略したマスターレ
ンズを用いて調べ、外径振れ量と面振れ量と曲率中心振
れ量とレンズ性能の相関関係を調べることにより、非球
面レンズを鏡枠(図示略)内に位置させた後、非球面レ
ンズの外周面と鏡枠の内周面の間の僅かなクリアランス
を利用して非球面レンズを鏡枠に対して動かし、非球面
レンズの一方の面の曲率中心を鏡枠の中心軸上に位置さ
せて、その状態を保持したまま非球面レンズを鏡枠に接
着したのと同じ状態下で、外径振れ量と面振れ量と曲率
中心振れ量が非球面レンズのレンズ性能にどのような影
響を与えているかを知ることが出来る。
In this way, the outer diameter runout, surface runout, and curvature center runout of many aspherical lenses were measured, and the lens performance of these aspherical lenses was investigated using a master lens (not shown). After the aspheric lens is positioned inside the lens frame (not shown) by investigating the correlation among the outer diameter shake amount, the surface shake amount, the curvature center shake amount, and the lens performance, the outer peripheral surface of the aspheric lens and the lens frame Using the slight clearance between the inner peripheral surfaces of the aspherical lens, move the aspherical lens with respect to the lens frame, position the center of curvature of one surface of the aspherical lens on the central axis of the lens frame, and change the state. Under the same conditions as when the aspherical lens is bonded to the lens frame while holding it, you can see how the outer diameter runout, surface runout, and curvature center runout affect the lens performance of the aspherical lens. You can

【0054】[0054]

【発明の効果】本発明によれば、非球面レンズを鏡枠内
に位置させた後、非球面レンズの外周面と鏡枠の内周面
の間の僅かなクリアランスを利用して非球面レンズを鏡
枠に対して動かし、非球面レンズの一方の面の曲率中心
を鏡枠の中心軸上に位置させて、その状態を保持したま
ま非球面レンズを鏡枠に接着したのと同じ状態下で、非
球面レンズの外径振れ量、非球面の周辺部の面振れ量、
曲率中心振れ量を測定することができる。
According to the present invention, after the aspherical lens is positioned in the lens frame, the aspherical lens is utilized by utilizing a slight clearance between the outer peripheral surface of the aspherical lens and the inner peripheral surface of the lens frame. Under the same conditions as when the aspherical lens was bonded to the lens frame while maintaining that state by positioning the center of curvature of one surface of the aspherical lens on the center axis of the lens frame by moving the Where, the outer diameter runout of the aspherical lens, the surface runout of the peripheral part of the aspherical surface,
It is possible to measure the amount of deflection of the center of curvature.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施形態の測定装置の全体図で
ある。
FIG. 1 is an overall view of a measuring device according to a first embodiment of the present invention.

【図2】面振れ量に基づいてディセンター量を求める場
合の簡易説明図である。
FIG. 2 is a simplified explanatory diagram in a case of obtaining a decenter amount based on a surface wobbling amount.

【図3】本発明の第2の実施形態の測定装置の全体図で
ある。
FIG. 3 is an overall view of a measuring device according to a second embodiment of the present invention.

【図4】本発明の第3の実施形態の測定装置の全体図で
ある。
FIG. 4 is an overall view of a measuring device according to a third embodiment of the present invention.

【図5】本発明の第4の実施形態の測定装置の全体図で
ある。
FIG. 5 is an overall view of a measuring device according to a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1A 1B 基台 1a 取付孔 1b 採光孔 3 固定部材 3a 中心孔 5 第1回転部材 5a 中心孔 7 第2回転部材 7a 中心孔 9 固定部材 11 レンズホルダ(吸着回転手段) 11a 中心孔 13 吸引パイプ 15 真空装置 17 調整用送光装置(調整用送光手段) 19 ケース 19a 19b 孔 21 光源 23 調整用センサ(調整用受光手段) 25 27 全反射プリズム 29 確認用送光装置(確認用送光手段) 31 ケース 31a 31b 孔 33 光源 35 確認用センサ(確認用受光手段) 37 調整用送光装置(調整用送光手段) 39 ケース 39a 39b 孔 40 測定用送光装置(測定用送光手段) 41 調整用センサ(調整用受光手段) 43 測定用センサ(測定用受光手段) A1 中心軸(回転軸) G ガラス板 L1 L2 L3 非球面レンズ L1a L2a L3a 外周面 L4 L5 L6 L7 L8 L9 L10 L11
L12 レンズ M 反射鏡 Oo Os 曲率中心 P1 P2 P3 P4 プリズム r1 r4 球面 r2 r3 r5 r6 非球面 S1 第1接触式センサ(外径振れ検出手段) S1a 接触子 S2 第2接触式センサ(面振れ検出手段) S2a 接触子
1A 1B Base 1a Mounting hole 1b Lighting hole 3 Fixing member 3a Central hole 5 First rotating member 5a Central hole 7 Second rotating member 7a Central hole 9 Fixing member 11 Lens holder (suction rotating means) 11a Central hole 13 Suction pipe 15 Vacuum device 17 Light transmitting device for adjustment (light transmitting device for adjustment) 19 Case 19a 19b Hole 21 Light source 23 Sensor for adjustment (light receiving device for adjustment) 25 27 Total reflection prism 29 Light transmitting device for confirmation (light transmitting device for confirmation) 31 case 31a 31b hole 33 light source 35 confirmation sensor (confirmation light receiving means) 37 adjustment light transmitter (adjustment light transmitter) 39 case 39a 39b hole 40 measurement light transmitter (measurement light transmitter) 41 adjustment Sensor (adjustment light receiving means) 43 measurement sensor (measurement light receiving means) A1 central axis (rotation axis) G glass plate L1 L2 L3 aspherical lens L1a L 2a L3a Outer peripheral surface L4 L5 L6 L7 L8 L9 L10 L11
L12 lens M reflecting mirror Oo Os center of curvature P1 P2 P3 P4 prism r1 r4 spherical surface r2 r3 r5 r6 aspherical surface S1 first contact sensor (outer diameter shake detecting means) S1a contactor S2 second contact sensor (surface shake detecting means) ) S2a contactor

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 外形が円形であり片面が球面をなす被検
非球面レンズを、上記球面を吸着した状態で回転させる
吸着回転手段と、 上記球面の曲率中心を上記吸着回転手段の回転軸上に位
置させた状態で、上記非球面レンズの非球面の中央部に
向けて光を照射する調整用送光手段と、 該調整用送光手段から発せられ上記非球面によって反射
された光を受光する、受光位置を認識可能な調整用受光
手段と、 該調整用受光手段による反射光の受光位置に基づいて、
上記非球面の中央部の曲率中心が上記吸着回転手段の回
転軸上に位置しているか否かを判別する調整用判別手段
と、 該調整用判別手段が、上記非球面の中央部の曲率中心が
上記回転軸上に位置していると判別している状態で、上
記非球面レンズの外周面に当接して、該外周面の外径振
れ量を検出する外径振れ検出手段と、 上記調整用判別手段が、上記非球面の中央部の曲率中心
が上記回転軸上に位置していると判別している状態で、
上記非球面の周辺部に当接して、該周辺部の面振れ量を
検出する面振れ検出手段と、 を備えることを特徴とする非球面レンズの測定装置。
1. A suction rotation means for rotating an aspherical lens under test having a circular outer shape and a spherical surface on one side in a state where the spherical surface is suctioned, and a center of curvature of the spherical surface on a rotation axis of the suction rotation means. The adjusting light sending means for irradiating light toward the central portion of the aspherical surface of the aspherical lens, and the light emitted from the adjusting light sending means and reflected by the aspherical surface. Based on the light receiving position for adjustment capable of recognizing the light receiving position and the light receiving position of the reflected light by the light receiving position for adjustment,
An adjusting discriminating means for discriminating whether or not the center of curvature of the central portion of the aspherical surface is located on the rotation axis of the suction rotating means, and the adjusting discriminating means comprises a center of curvature of the central portion of the aspherical surface. The outer diameter deviation detecting means for contacting the outer peripheral surface of the aspherical lens to detect the outer diameter deviation amount of the outer peripheral surface in a state where it is determined that the position is on the rotation axis, In the state in which the usage determining means determines that the center of curvature of the central portion of the aspherical surface is located on the rotation axis,
An apparatus for measuring an aspherical lens, comprising: a surface wobbling detecting means that is in contact with a peripheral part of the aspherical surface and detects a surface wobbling amount of the peripheral part.
【請求項2】 請求項1記載の非球面レンズの測定装置
において、 上記吸着回転手段の上記球面との接触部の形状を、平面
視において円形をなすとともに、側面視において上記回
転軸と直交するものとし、さらに、 上記非球面レンズの球面に向けて光を照射する確認用送
光手段と、 該確認用送光手段から発せられ上記球面によって反射さ
れた光を受光し、その受光位置から、上記球面の曲率中
心が上記吸着回転手段の回転軸上にあるか否かを判別す
る確認用判別手段と、 を備える非球面レンズの測定装置。
2. The aspherical lens measuring device according to claim 1, wherein a shape of a contact portion of the suction rotation means with the spherical surface is circular in a plan view and orthogonal to the rotation axis in a side view. In addition, the confirmation light-transmitting means for irradiating light toward the spherical surface of the aspherical lens, and the light emitted from the confirmation light-transmitting means and reflected by the spherical surface are received, and from the light receiving position, An aspherical lens measuring device comprising: a confirmation determining unit that determines whether or not the center of curvature of the spherical surface is on the rotation axis of the suction rotating unit.
【請求項3】 外形が円形であり片面が球面をなす被検
非球面レンズを、その非球面を吸着した状態で回転させ
る吸着回転手段と、 上記球面に向けて光を照射する調整用送光手段と、 該調整用送光手段から発せられ上記球面によって反射さ
れた光を受光する、受光位置を認識可能な調整用受光手
段と、 該調整用受光手段による反射光の受光位置に基づいて、
上記球面の曲率中心が上記吸着回転手段の回転軸上に位
置しているか否かを判別する調整用判別手段と、 該調整用判別手段が、上記球面の曲率中心が上記回転軸
上に位置していると判別している状態で、上記非球面レ
ンズの外周面に当接して、該外周面の外径振れ量を検出
する外径振れ検出手段と、 上記調整用判別手段が、上記球面の曲率中心が上記回転
軸上に位置していると判別している状態で、上記非球面
の中央部に向けて光を照射する測定用送光手段と、 該測定用送光手段から発せられ上記非球面によって反射
された光を受光する、受光位置を認識可能な測定用受光
手段と、 該測定用受光手段による反射光の受光位置に基づいて、
上記回転軸に対する上記非球面の中央部の曲率中心振れ
量を演算する曲率中心振れ量演算手段と、 を備えることを特徴とする非球面レンズの測定装置。
3. A suction rotation means for rotating an aspherical lens under test having a circular outer shape and a spherical surface on one side in a state in which the aspherical surface is suctioned, and an adjusting light sending device for irradiating light to the spherical surface. A light receiving position for recognizing the light receiving position, which receives the light emitted from the adjusting light transmitting unit and reflected by the spherical surface, and the light receiving position of the reflected light by the adjusting light receiving unit.
The adjusting discriminating means for discriminating whether or not the center of curvature of the spherical surface is located on the rotation axis of the suction rotating means, and the adjusting discriminating means is such that the center of curvature of the spherical surface is located on the rotating shaft. In the state in which it is determined that the spherical surface is in contact with the outer peripheral surface of the aspherical lens, the outer diameter deflection detecting means for detecting the outer diameter deflection amount of the outer peripheral surface, and the adjustment determining means are In a state where it is determined that the center of curvature is located on the rotation axis, a light-transmitting means for measurement that irradiates light toward the central portion of the aspherical surface, and a light-emitting means for measurement that emits light. Based on the measurement light receiving means for receiving the light reflected by the aspherical surface and recognizing the light receiving position, and the light receiving position of the reflected light by the measurement light receiving means,
A curvature center shake amount calculating means for calculating a curvature center shake amount of the central portion of the aspherical surface with respect to the rotation axis, and an aspherical lens measuring device.
【請求項4】 外形が円形であり両面がともに非球面を
なす被検非球面レンズを、その一方の非球面を吸着した
状態で回転させる吸着回転手段と、 他方の非球面の中央部に向けて光を照射する調整用送光
手段と、 該調整用送光手段から発せられ上記他方の非球面によっ
て反射された光を受光する、受光位置を認識可能な調整
用受光手段と、 該調整用受光手段による反射光の受光位置に基づいて、
上記他方の非球面の中央部の曲率中心が上記吸着回転手
段の回転軸上に位置しているか否かを判別する調整用判
別手段と、 該調整用判別手段が、上記他方の非球面の中央部の曲率
中心が上記回転軸上に位置していると判別している状態
で、上記非球面レンズの外周面に当接して、該外周面の
外径振れ量を検出する外径振れ検出手段と、 上記調整用判別手段が、上記他方の非球面の中央部の曲
率中心が上記回転軸上に位置していると判別している状
態で、上記他方の非球面の周辺部に当接して、該周辺部
の面振れ量を検出する面振れ検出手段と、 上記調整用判別手段が、上記他方の非球面の中央部の曲
率中心が上記回転軸上に位置していると判別している状
態で、上記一方の非球面の中央部に向けて光を照射する
測定用送光手段と、 該測定用送光手段から発せられ上記一方の非球面によっ
て反射された光を受光する、受光位置を認識可能な測定
用受光手段と、 該測定用受光手段による反射光の受光位置に基づいて、
上記回転軸に対する上記一方の非球面の中央部の曲率中
心振れ量を演算する曲率中心振れ量演算手段と、 を備えることを特徴とする非球面レンズの測定装置。
4. A suction rotation means for rotating an aspherical lens under test, the outer shape of which is circular and both surfaces of which are aspherical surfaces, in the state in which one of the aspherical surfaces is attracted, and the centering portion of the other aspherical surface. Adjusting light transmitting means for irradiating light, and an adjusting light receiving means for receiving light emitted from the adjusting light transmitting means and reflected by the other aspherical surface, the light receiving position being recognizable, and the adjusting light transmitting means. Based on the light receiving position of the reflected light by the light receiving means,
An adjusting discriminating means for discriminating whether or not the center of curvature of the central portion of the other aspherical surface is located on the rotation axis of the suction rotating means; Outer diameter deviation detecting means for detecting the outer diameter deviation of the outer peripheral surface by contacting the outer peripheral surface of the aspherical lens in a state where it is determined that the center of curvature of the portion is located on the rotation axis. When the adjustment determining means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotational axis, the adjustment determining means contacts the peripheral portion of the other aspherical surface. The surface wobbling detecting means for detecting the amount of surface wobbling in the peripheral portion and the adjusting discriminating means determine that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis. In this state, a measuring light-transmitting means for irradiating light toward the central portion of the one aspherical surface, and the measuring light-transmitting means. On the basis of the measurement light-receiving means capable of recognizing the light-receiving position, which receives the light emitted from the light-transmitting means and reflected by the one aspherical surface, and the light-receiving position of the reflected light by the measurement light-receiving means,
A curvature center shake amount calculating means for calculating a curvature center shake amount of a central portion of the one aspherical surface with respect to the rotation axis, and an aspherical lens measuring device.
【請求項5】 外形が円形であり片面が球面をなす被検
非球面レンズの上記球面を吸着回転手段に吸着させて回
転させるステップ、 上記球面の曲率中心を上記吸着回転手段の回転軸上に位
置させた状態で、上記非球面レンズの非球面の中央部に
向けて光を照射するステップ、 上記非球面によって反射された光を、受光位置に基づい
て、上記非球面の中央部の曲率中心が上記吸着回転手段
の回転軸上に位置しているか否かを判別する調整用判別
手段に受光させるステップ、 該調整用判別手段が、上記非球面の中央部の曲率中心が
上記回転軸上に位置していると判別している状態で、上
記非球面レンズの外周面の外径振れ量を検出するステッ
プ、及び上記調整用判別手段が、上記非球面の中央部の
曲率中心が上記回転軸上に位置していると判別している
状態で、上記非球面の周辺部の面振れ量を検出するステ
ップを有することを特徴とする非球面レンズの測定方
法。
5. A step of adsorbing and rotating the spherical surface of an aspherical lens to be tested, which has a circular outer shape and one surface of which is a spherical surface, wherein the center of curvature of the spherical surface is on the rotation axis of the adsorbing and rotating means. Irradiating light toward the central portion of the aspherical surface of the aspherical lens in a state of being positioned, the light reflected by the aspherical surface, based on the light receiving position, the center of curvature of the central portion of the aspherical surface. The step of causing the adjustment determining means to determine whether or not is located on the rotation axis of the suction rotation means, the adjustment determination means is such that the center of curvature of the central portion of the aspherical surface is on the rotation axis. In a state where it is determined that the aspherical lens is positioned, a step of detecting an outer diameter deflection amount of the outer peripheral surface of the aspherical lens, and the adjusting determination means is such that the center of curvature of the central portion of the aspherical surface is the rotation axis Is determined to be located above The method for measuring an aspherical lens, comprising the step of detecting the amount of surface runout of the peripheral portion of the aspherical surface in the state of being in the open state.
【請求項6】 請求項5記載の非球面レンズの測定方法
において、 上記吸着回転手段の上記球面との接触部の形状を、平面
視において円形をなすとともに、側面視において上記回
転軸と直交するものとし、さらに、 上記球面の曲率中心が上記吸着回転手段の回転軸上に位
置させた後に、上記非球面レンズの球面に向けて光を照
射するステップ、 該球面によって反射された光を、受光位置に基づいて、
上記球面の曲率中心が上記吸着回転手段の回転軸上にあ
るか否かを判別する確認用判別手段に受光させるステッ
プを有する非球面レンズの測定方法。
6. The method for measuring an aspherical lens according to claim 5, wherein a shape of a contact portion of the suction rotation means with the spherical surface is circular in a plan view and orthogonal to the rotation axis in a side view. Further, after the center of curvature of the spherical surface is positioned on the rotation axis of the suction rotation means, the step of irradiating light toward the spherical surface of the aspherical lens, the light reflected by the spherical surface is received. Based on position
A method for measuring an aspherical lens, which has a step of causing a confirmation discriminating means for discriminating whether or not the center of curvature of the spherical surface is on the rotation axis of the suction rotating means.
【請求項7】 外形が円形であり片面が球面をなす被検
非球面レンズの非球面を吸着回転手段に吸着させて回転
させるステップ、 上記球面に向けて光を照射するステップ、 該球面によって反射された光を、受光位置に基づいて、
上記球面の曲率中心が上記吸着回転手段の回転軸上に位
置しているか否かを判別する調整用判別手段に受光させ
るステップ、 該調整用判別手段が、上記球面の曲率中心が上記回転軸
上に位置していると判別している状態で、上記非球面レ
ンズの外周面の外径振れ量を検出するステップ、 上記調整用判別手段が、上記球面の曲率中心が上記回転
軸上に位置していると判別している状態で、上記非球面
の中央部に向けて光を照射するステップ、 該非球面によって反射された光を、受光位置を認識可能
な測定用受光手段に受光させるステップ、及び該測定用
受光手段による反射光の受光位置に基づいて、上記回転
軸に対する上記非球面の中央部の曲率中心振れ量を演算
するステップを有することを特徴とする非球面レンズの
測定方法。
7. A step of adsorbing an aspherical surface of an aspherical lens to be inspected having a circular outer shape and a spherical surface on one side to an adsorbing and rotating means, rotating the aspherical surface, irradiating light toward the spherical surface, and reflecting by the spherical surface. Based on the received light position,
A step of causing an adjustment determination means for determining whether or not the curvature center of the spherical surface is located on the rotation axis of the suction rotation means, wherein the adjustment determination means is such that the curvature center of the spherical surface is on the rotation axis The step of detecting the outer diameter deviation of the outer peripheral surface of the aspherical lens in the state where it is determined that the spherical surface is located at the center of curvature of the spherical surface on the rotation axis. Irradiating light toward the central portion of the aspherical surface in a state where it is determined that the light is reflected, the step of causing the measurement light receiving means that can recognize the light receiving position to receive the light reflected by the aspherical surface, and A method of measuring an aspherical lens, comprising a step of calculating a curvature center shake amount of a central portion of the aspherical surface with respect to the rotation axis based on a light receiving position of reflected light by the measuring light receiving means.
【請求項8】 外形が円形であり両面が非球面をなす被
検非球面レンズの一方の非球面を吸着回転手段に吸着さ
せて回転させるステップ、 他方の非球面の中央部に向けて光を照射するステップ、 該他方の非球面によって反射された光を、受光位置に基
づいて、上記他方の非球面の中央部の曲率中心が上記吸
着回転手段の回転軸上に位置しているか否かを判別する
調整用判別手段に受光させるステップ、 該調整用判別手段が、上記他方の非球面の中央部の曲率
中心が上記回転軸上に位置していると判別している状態
で、上記非球面レンズの外周面の外径振れ量を検出する
ステップ、 上記調整用判別手段が、上記他方の非球面の中央部の曲
率中心が上記回転軸上に位置していると判別している状
態で、上記他方の非球面の周辺部の面振れ量を検出する
ステップ、 上記調整用判別手段が、上記他方の非球面の中央部の曲
率中心が上記回転軸上に位置していると判別している状
態で、上記一方の非球面の中央部に向けて光を照射する
ステップ、 該一方の非球面によって反射された光を、受光位置を認
識可能な測定用受光手段に受光させるステップ、及び該
測定用受光手段による反射光の受光位置に基づいて、上
記回転軸に対する上記一方の非球面の中央部の曲率中心
振れ量を演算するステップを有することを特徴とする非
球面レンズの測定方法。
8. A step of adsorbing and rotating one aspherical surface of an aspherical lens to be inspected, which has an outer shape of a circle and whose both surfaces are aspherical surfaces, by adsorbing and rotating the one aspherical surface on the other aspherical surface. The step of irradiating, the light reflected by the other aspherical surface is checked based on the light receiving position to determine whether the center of curvature of the other aspherical surface is located on the rotation axis of the suction rotation means. A step of causing the adjusting discriminating means for discriminating to receive light, in a state where the adjusting discriminating means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis, A step of detecting an outer diameter deflection amount of the outer peripheral surface of the lens, in a state where the adjustment determining means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis, The amount of surface runout around the other aspherical surface is detected. In the state where the adjustment determining means determines that the center of curvature of the central portion of the other aspherical surface is located on the rotation axis, the adjustment determining means is directed toward the central portion of the one aspherical surface. Based on the step of irradiating light, the step of causing the measurement light receiving means capable of recognizing the light reception position to receive the light reflected by the one aspherical surface, and the light reception position of the reflected light by the measurement light receiving means, A method of measuring an aspherical lens, comprising a step of calculating a center-of-curvature deflection amount of a central portion of the one aspherical surface with respect to a rotation axis.
JP2002155050A 2002-05-29 2002-05-29 Apparatus and method for measuring aspheric lens Expired - Lifetime JP3857954B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006003112A (en) * 2004-06-15 2006-01-05 Fuji Photo Film Co Ltd Apparatus and method for measuring eccentricity, metal mold for lens, and imaging module
CN103453855A (en) * 2013-09-11 2013-12-18 南京东利来光电实业有限责任公司 Decentration detection device and detection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006003112A (en) * 2004-06-15 2006-01-05 Fuji Photo Film Co Ltd Apparatus and method for measuring eccentricity, metal mold for lens, and imaging module
JP4699714B2 (en) * 2004-06-15 2011-06-15 富士フイルム株式会社 Eccentricity measuring apparatus and eccentricity measuring method
CN103453855A (en) * 2013-09-11 2013-12-18 南京东利来光电实业有限责任公司 Decentration detection device and detection method

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