JP2003337425A - Exposure device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure device by which costs for the replacement and the maintenance of a light source unit are reduced because the cycles of the replacement and the maintenance of the light source unit are extended by eliminating the variation of the residual life of the light source unit due to the deviation of the cumulative use time or the deterioration ratio with time of the output efficiency of the light source unit. <P>SOLUTION: The cumulative use time or the deterioration ratio with time of the output efficiency of each light source unit is measured, and connection between each light source unit and each exposure unit is switched by a switching means based on a measured result. Thus, the cumulative use time or the deterioration ratio with time of the output efficiency of each light source unit are averaged, and the cycles of the replacement and the maintenance of the light source unit are extended, so that the costs are reduced. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus in which an exposure unit modulates a light beam emitted from a light source unit according to image data, and the modulated light beam directly exposes an exposure object. is there.

[0002]

2. Description of the Related Art In an exposure apparatus in which a light beam emitted from a light source unit is modulated by an exposure head according to image data, and an object to be exposed is directly exposed by the modulated light beam, a plurality of light source units and exposure heads are provided. When a line head that is used individually and is capable of exposing an image of one line at a time is configured, and when there are a plurality of widths in the line direction of the exposure target, a specific light source unit and exposure head Only the usage rate of the combination is high.

For example, as shown in FIG.
The object to be exposed 20 is placed and conveyed on the line 4, and the line head 78
In the case of the exposure apparatus that exposes the exposure target object 20 with, the width of the exposure target object 20 in the line direction is shorter than the total width of the line head 78, and for example, the exposure is frequently performed with left alignment ((A) in the figure). ), The usage rate of the light source unit and the exposure unit in the left part of the drawing, which corresponds to the width of the exposure target 20, increases in the line head 78.

On the other hand, when exposure is frequently performed by centering ((B) in the figure), the light source unit in the central portion of the line head 78 corresponding to the width of the exposure object 20 and the exposure are shown. Higher unit utilization.

Generally, in the case of a drawing pattern in which the width of the exposure object 20 is shorter than the entire width of the line head 78 and the exposure is performed without using the entire width of the line head 78, the life and power consumption of the light source unit are taken into consideration. , A measure is taken to stop the light source unit that is not used.

In this case, there is a difference in the cumulative use time or the deterioration rate of the output efficiency over time for each light source unit. The replacement or maintenance cycle of the light source unit is
It is defined by the light source unit having the longest cumulative use time or the worst deterioration rate of output efficiency among the plurality of mounted light source units, in other words, the light source unit having the shortest life. For this reason, the conventional exposure apparatus requires replacement and maintenance in a short cycle, which causes a cost increase.

[0007]

SUMMARY OF THE INVENTION The object of the present invention is to solve the problems based on the above-mentioned prior art, and to disperse the remaining life of the light source units due to the deviation of the cumulative use time of each light source unit or the deterioration rate of the output efficiency over time. Therefore, it is an object of the present invention to provide an exposure apparatus that can eliminate the above problem and can extend the replacement and maintenance cycle of the light source unit and can reduce the cost accordingly.

[0008]

In order to achieve the above object, the present invention provides a plurality of light source units for emitting a light beam and a plurality of light beams for emitting the light beam according to image data. An exposure apparatus comprising an exposure unit of, and using a part or all of the light source unit and the exposure unit corresponding to the size of an exposure object, the exposure apparatus including an exposure head that directly exposes the exposure object, The light source unit includes a unit for measuring a cumulative use time or a deterioration rate of output efficiency over time, and a switching unit capable of arbitrarily switching a connection between each of the light source units and each of the exposure units. And an exposure apparatus characterized by the above.

Here, it is preferable that the exposure head is a line head capable of simultaneously exposing an image of one line.

Further, the switching means is preferably an optical fiber and an optical connector provided between each of the light source units and each of the exposure units.

The means for measuring the deterioration rate with time is
For each of the light source units, the driving current value before and after the aging is set to the same value, and the output of each of the light source units is based on the difference in the light output before and after the aging of each of the light source units. The efficiency deterioration rate with time is measured, or, for each of the light source units, the light output before and after the passage of time is set to the same value, and the difference in the drive current value between before and after the passage of each of the light source units is set. Based on this, it is preferable to measure the deterioration rate with time of the output efficiency of each of the light source units.

The light source unit is preferably composed of a semiconductor laser. Further, it is preferable that the light source unit is one that multiplexes light beams emitted from a plurality of semiconductor lasers and optically couples them to an optical fiber.

Further, in the exposure apparatus according to any one of the above, further, which of the light source units is based on a cumulative use time of each of the light source units or a deterioration rate of output efficiency of each of the light source units with time. It is preferable to provide means for instructing to which of the exposure units the light beam emitted from is connected.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION The exposure apparatus of the present invention will be described below in detail with reference to the preferred embodiments shown in the accompanying drawings.

FIG. 1 is a schematic view showing the arrangement of an embodiment of an exposure apparatus to which the present invention is applied. The exposure apparatus 10 shown in FIG.
The object 20 to be exposed is directly exposed by a high-power light beam. The base 12 and the flat bed type stage 14 on which the object 20 to be exposed is placed and conveyed, and image data (digital data) are used. Object 2 placed on stage 14 and conveyed by the modulated and modulated light beam
And an exposure head 16 for directly exposing 0.

Here, the base 12 has a U-shaped support member 1 at the center in the direction of the arrow X in the drawing so as to straddle its upper surface.
2a is provided. Two guides 12b on which the stage 14 is mounted are provided along the arrow X direction near both ends of the upper surface of the base 12 in the arrow Y direction (direction substantially orthogonal to the arrow X direction) in the figure. Has been.

The stage 14 has the two guides 12b.
In the present embodiment, it is configured to be movable (sub-scanning) in the arrow X direction along the guide 12b by a drive device such as a linear motor (not shown).

In the case of the present embodiment, the exposure head 16 is a line head capable of exposing an image for one line (total length in the direction of arrow Y in the figure) at a time, and the light beam emitted from the exposure head 16 is It is fixed to a U-shaped support member 12a provided in the central portion of the base 12 so as to face the upper surface of the stage 14 (that is, the exposure target 20).

A reference numeral 18 in the drawing denotes a CCD for detecting the arrangement (position, inclination, etc.) of the exposure object 20.
(Solid-state image pickup device) A position detection sensor for a camera or the like, which is fixed to a U-shaped support member 12a so as to face the upper surface of the stage 14 like the exposure head 16.

The exposure apparatus 10 shown in FIG. 1 merely shows an example of the exposure apparatus to which the present invention is applied, and each part thereof can be easily formed by other conventionally known constituent elements having the same function. Is feasible. The present invention is not limited to this exposure apparatus 10 and can be applied to various conventionally known exposure apparatuses.

For example, as the exposure head 16, one capable of exposing only a part of one line is used. This is scanned in the direction of arrow Y (main scanning) to expose an image of one line, and then the stage 14 is moved. The image is exposed by moving (sub-scanning) line by line in the direction of the arrow X, or one of the stage 14 and the exposure head 16 is fixed and the other exposure head 16 or the stage 14 is subjected to main scanning and sub-scanning. You may Also, the stage is not limited to the flat bed type, and any conventionally known type such as a vertical type or a drum type can be used.

Next, the exposure head 16 will be described.

The exposure head 16 comprises a plurality of light source units 40 for emitting light beams and a plurality of exposure units 22 for modulating the light beams emitted from the respective light source units 40 according to image data. . As described above, in the case of the present embodiment, the plurality of light source units 40 and the plurality of exposure units 22 form a line head.

The exposure unit 22, as shown in FIG.
Lenses 26 and 28 for converging the light beam incident from the light source unit 40 on each reflecting surface of the spatial light modulator 30,
A spatial modulation element 30 that optically modulates a light beam incident through the lenses 26 and 28 for each pixel according to image data.
And a zoom lens 3 for forming an image of the light beam modulated by the spatial modulation element 30 on the surface of the exposure object 20 while changing the magnification.
2, 34 and.

In the case of the present embodiment, each member constituting the exposure unit 22 is arranged at a predetermined position inside the casing 38. However, the present invention is not limited to this, and if possible, all members including the light source unit 40 may be housed in the casing 38.

Here, the spatial modulation element 30 is, for example, a digital micromirror device (DMD, manufactured by Texatsu Instruments Co., Ltd.) in which a plurality of movable micromirrors are arranged, or a reflection diffraction grating type grating light.
In addition to the valve element (GLV element, manufactured by Silicon Light Machine Co., Ltd.), any conventionally known spatial modulation element can be used. The details of the GLV element are described in US Pat. No. 5,311,360. Details of the spatial light modulator 30 will be described later.

The zoom lens 34 is supported by a drive motor 36 so as to be movable in the optical axis direction along a guide (not shown), whereby the exposure magnification is adjusted. The light beam emitted from the zoom lens 34 passes through an opening (not shown) provided in the casing 38 and is applied to the surface of the exposure target 20. Note that the zoom lens is usually composed of a combination lens, but in the figure, only one lens is shown by simplifying the structure.

Each of the exposure units 22 exposes a part of the image of one line, and all the exposure units 22 constituting the line head are set to one exposure unit.
An image of a line can be exposed at one time. The number of exposure units 22 that form the line head may be appropriately determined as necessary, and any number of exposure units 22 may be used. The exposure head 16 includes a plurality of exposure units 22.
The arrangement method in the case of the above will be described later.

On the other hand, in the case of this embodiment, the light source unit 40 is equipped with a plurality of semiconductor laser (LD) chips, and all the optical outputs thereof are combined and optically combined into one optical fiber 42. A plurality of modules, in the illustrated example, nine multiplexing modules are provided. The nine optical fibers 42 optically coupled to each of these nine multiplexing modules are 3 × 3.
The laser modules 24 are arranged in an array and are bundled, and the laser light source 24 is configured by the multiplexing module and the optical fiber 42.

The ends of the optical fibers 42 bundled in an array are introduced into the casing 38 through an opening (not shown) provided in the side wall of the casing 38 of the exposure unit 22. Further, as shown in FIG. 8, an optical connector 76 is provided in the opening. Optical fiber 42
Is detachably connected to the exposure unit 22 at the optical connector 76, and the connection between each light source unit 40 (that is, its light output) and each exposure unit 22 can be arbitrarily switched. Has been done.

Each of the spatial modulation element 30 and the light source unit 40 of the exposure unit 22 is connected to a controller (not shown) that controls them via a driver (not shown).

The light source of the light source unit 40 is not limited to the LD, and various conventionally known light sources can be used. Further, the configuration of the light source unit 40 is not limited at all. The means for switching the connection between the light source unit 40 and the exposure unit 22 is not limited to the optical fiber 42 and the optical connector 76, and may be any one having a configuration that performs the same function. The position of the optical connector 76 is not limited at all and may be arranged at any position on the light source unit side or on the optical fiber 42.
Further, the number of light source units 40 may be appropriately determined according to the number of exposure units 22.

Next, the laser light source 2 used in this embodiment
4 will be described in detail.

As shown in FIG. 3, the laser light source 24 used in the present embodiment is a plurality of laser light sources 24 which combine light beams emitted from a large number of LD chips into one optical fiber 42. Multiple (only a part is shown) multiplexing module 46
And one end thereof is optically coupled to each of the optical outputs of the nine multiplexing modules 46, and the other end is 3 ×.
3 of the optical fibers 42 arranged in an array.

As shown in detail in FIG. 4, each of the multiplexing modules 46 has a plurality of, for example, seven lateral multimode gallium nitride-based materials arranged and fixed on a heat sink block 54 made of copper, for example. Semiconductor laser (hereinafter referred to as gallium nitride LD) 56 and gallium nitride LD
Collimator lens 58 provided to face each of 56
And a condenser lens 60, the optical output of which is optically coupled to one optical fiber 42.

The heat sink block 54, the LD 56, the collimator lens 58, and the condenser lens 60 are housed in a box-shaped package 62 whose upper side is open, and the opening of the package 62 is closed by a package lid 64, so that the package 62 is closed. Further, the package lid 64 is hermetically held in a closed space formed by the package lid 64.

A base plate 66 is fixed to the bottom surface of the package 62, the heat sink block 54 is attached to the upper surface of the base plate 66, and a collimator lens holder 68 holding a collimator lens 58 is fixed to the heat sink block 54. ing. Further, a condenser lens holder 70 holding the condenser lens 60 and a fiber holder 72 holding the incident end portion of the optical fiber 42 are fixed to the upper surface of the base plate 66. Further, the wiring 74 for supplying a drive current to the gallium nitride LD 56 is drawn out of the package 62 through an opening formed in the lateral wall surface of the package 62 and sealed with an airtight sealing material (not shown).

In the collimator lens 58, the aperture diameter in the direction in which the light emitting points of the gallium nitride LD 56 are arranged is smaller than the aperture diameter in the direction perpendicular to the direction (vertical direction in FIG. 4B) (that is, in the elongated shape). ) Are formed and are closely arranged in the arrangement direction of the light emitting points. Gallium Nitride LD5
6 is, for example, the emission width is 2 μm and the divergence angles in the direction parallel to the active layer and the direction perpendicular to the active layer are 10 ° and 30, respectively.
One that emits a light beam in the state of ° is used. These gallium nitride LDs 56 are arranged such that the light emitting points are arranged in a line in a direction parallel to the active layer.

Therefore, the light beam emitted from each light emitting point is directed to each collimator lens 58 having an elongated shape as described above so that the direction of the maximum divergence coincides with the direction of the large aperture diameter, and the divergence angle. The light is incident in a state in which the minimum direction coincides with the direction in which the aperture diameter is small. That is, each collimator lens 58 having an elongated shape is used with the ineffective component reduced as much as possible in accordance with the elliptical cross-sectional shape of the incident light beam.

For example, in the present embodiment, the horizontal and vertical aperture diameters of the collimator lens 58 are 1.1 mm,
4.6 mm, focal length 3 mm, NA 0.6, horizontal and vertical beam diameters of the light beam incident on the collimator lens 58 of 0.9 mm and 2.6 mm can be used. The collimator lenses 58 are arranged with a pitch of 1.25 mm.

The condenser lens 60 is formed by cutting an area including the optical axis of the aspherical circular lens into a long and thin shape, and collimating lens 5
The shape is long in the direction of arrangement of eight, that is, in the horizontal direction, and short in the direction perpendicular thereto. As the condenser lens 60, for example, one having a focal length of 12.5 mm and NA of 0.3 can be used. The collimator lens 58 and the condenser lens 60 are formed by molding resin or optical glass, for example.

On the other hand, the optical fiber 42 is based on, for example, a graded index type manufactured by Mitsubishi Electric, and has a core with a graded index type and a perimeter with a step index type. A fiber having a transmittance of 99.5% or more can be used. That is, the value of core diameter × NA is 7.5 μm.

When the coupling efficiency of the light beam to the optical fiber 42 is 0.9, the output of the gallium nitride LD 56 is 100 mW, and the number of the gallium nitride LD 56 is 7, the output is 630 mW.
A combined light beam of (= 100 mW × 0.9 × 7) is obtained.

The gallium nitride LD 56 has an oscillation wavelength of 4
05 ± 10 nm, and the maximum output is 100 mW.
The light beams emitted from these gallium nitride LDs 56 in a divergent light state are collimated by the collimator lenses 58 facing each other. The collimated light beam is condensed by the condenser lens 60 and converges on the incident end face of the core of the optical fiber 42.

Collimator lens 58 and condenser lens 6
0 forms a condensing optical system, and the optical fiber 4
A multiplexing optical system is constituted by 2 and. That is,
The light beam condensed as described above by the condenser lens 60 enters the core of the optical fiber 42, propagates there, is combined into one light beam, and is emitted from the optical fiber 42. As the optical fiber 42, for example, when a step index type fiber or a fiber having a small core and a high NA is used, a grade index type fiber or a composite type fiber thereof can be applied.

As an alternative to the individual collimator lens 58 corresponding to each gallium nitride LD 56, a collimator lens array having a number of lens elements corresponding to the number of gallium nitride LDs 56 may be used.
Even when individual collimator lenses are used, they can be arranged closely to each other to reduce the arrangement pitch of the gallium nitride LDs 56 and improve space utilization efficiency. However, by using a collimator lens array, the effect can be further improved. It is possible to raise it further. Further, if the space utilization efficiency is improved in this way, the number of multiplexed waves can be increased, and further, the gallium nitride LD 56, the condensing optical system, and the optical fiber 42 can be provided with a relatively large margin in assembly position accuracy. The effect that it can be obtained is also obtained.

As described above, the light beams emitted from the gallium nitride LD 56 are collimated by the corresponding collimator lenses 58, and then enter the optical fiber 42 through the condenser lens 60. 7 for each multiplexing module 46
7 if each gallium nitride LD 56 is provided
The collimated light beam of the book is optically coupled to the optical fiber 42 by the aspherical glass mold lens (condensing lens) 60. If 100 optical fibers 42 having a core diameter of 25 μm, NA = 0.3, and an output of 0.5 W are provided, the optical fibers 42 arranged in an array form 50 W (=
An array-shaped ultra-high output light beam of 0.5 W × 100) is emitted.

Although an example of the laser light source 24 of the present embodiment has been described with specific numerical values, the laser light source 24 of the exposure apparatus 10 to which the present invention is applied is not limited to this specific example. Absent.

Next, the spatial modulator 30 will be described.

As the spatial modulation element 30, as shown in FIG. 5, a one-dimensional spatial modulation element in which reflecting surfaces for optically modulating a light beam are arranged in a line (FIG. 5A), and an array shape. Both of the two-dimensional spatial light modulators (FIG. 2B) arranged in the position can be used. Spatial modulator 30
The number of reflective surfaces of is not limited at all. Further, the two-dimensional spatial modulation element is not limited to the aspect ratio of the number of reflecting surfaces being 1: 1, and an arbitrary ratio can be used.

In the exposure apparatus 10 of the present embodiment, as shown in FIG. 5, in actual exposure, the spatial modulation element 30 is tilted by a predetermined angle in order to increase the number of resolution points of the modulated light beam. Used.

For example, in the case of a one-dimensional spatial light modulator, FIG.
As shown in (A), assuming that six reflecting surfaces are arranged in a line at a pitch (scanning line pitch) of 20 μm, and the total scanning width (line direction) when not tilted is 100 μm, Can be exposed at a predetermined scanning angle of, for example, a scanning line pitch of 5 μm and a total scanning width of 25 μm.

In the case of the two-dimensional spatial light modulator, as shown in FIG. 7B, 6 × 4 reflecting surfaces are arranged in an array at a pitch (scanning line pitch) of 20 μm and are inclined. If the total scan width is 100 μm when there is no such pattern, it can be exposed by inclining it by a predetermined angle, for example, with a scan line pitch of 5 μm and a total scan width of 115 μm.

The total scanning width of the two-dimensional spatial modulation element is not narrowed even if the two-dimensional spatial modulation element is tilted to increase the number of resolution points, and the number of parts of the spatial modulation element 30 when forming a line head is one-dimensional spatial modulation. This is preferable because it has the advantage of requiring a smaller number of devices.

When the spatial light modulator 30 is tilted and used, when reflected light beams overlap and interfere with each other, as shown in an example in FIG. 6, components of the zoom lenses 32 and 34. As one of the above, a microlens array 76 and an aperture array 78 are provided. The microlens array 76 narrows the beam diameter of each light beam reflected by each reflection surface of the spatial modulation element 30, and further through the aperture array 78. It is preferable to output it.

As described above, the exposure head 16 of the present embodiment.
Is provided with a plurality of exposure units 22 that form a line head. The respective exposure units 22 may be arranged in a line if possible, but in reality, it is difficult to arrange them in a line due to a physical size problem. Therefore, as shown in FIG. 7, it is preferable to arrange them in two or more rows. In this case, the respective exposure units 22 are arranged so as to be displaced from each other so that different portions in one line can be exposed.

As shown in FIG. 7A, the spatial modulator 3
When a two-dimensional spatial modulation element such as DMD is used as 0, as described above, one exposure unit 22
Since the number of resolution points per hit is large and the number of parts of the exposure unit 22 is small, the line head can be easily constructed. In this case, like the exposure apparatus 10 shown in FIG. 1, the exposure head 16 is fixed and the stage 14 is transported (sub-scanning).
By doing so, the exposure target 20
The entire surface of can be exposed.

On the other hand, as shown in FIG. 7B, when a one-dimensional spatial modulation element such as a GLV element is used as the spatial modulation element 30, the number of resolution points per exposure unit 22 is small, Since the number of components of the exposure unit 22 increases, it is preferable to expose only a part of one line. In this case, the entire surface of the exposure target 20 can be exposed by, for example, carrying the stage 14 a plurality of times at high speed (main scanning) and further exposing the exposure head 16 a plurality of times at high speed (sub scanning).

Next, the operation of the exposure apparatus 10 of this embodiment will be described.

The light beam emitted from the laser light source 24 of the exposure head 16 is applied to the spatial modulation element 30 via the lenses 26 and 28, and is simultaneously modulated by the spatial modulation element 30. With the driving of the drive motor 36, the zoom lens 34 is moved along the optical axis, and the exposure magnification by the zoom lens 34 is adjusted. The light beam modulated by the spatial modulator 30 is imaged at a predetermined magnification on the surface of the exposure target 20 via the zoom lenses 32 and 34.

At the start of exposure, the stage 14 is moved to the exposure start position (front side in the direction of arrow X in FIG. 1). An exposure object 20 is placed on the stage 14, and its position is detected by the position detection sensor 18.

Subsequently, one line of image data is read from a frame memory (not shown), and the read 1
ON / OFF of the reflection surface of the spatial modulation element 46 is controlled according to the image data of the line. As a result, the light beam emitted from the exposure head 16 is simultaneously modulated according to the image data for one line and turned on and off respectively, and this light beam causes one line to be exposed on the exposure target 20 (direction Y in FIG. 1). ) Minutes image is exposed.

Then, the stage 14 is moved by one line to the depth side in the arrow X direction by a driving device such as a linear motor (not shown) (sub scanning). After that, the above steps are repeated, and finally the entire surface of the exposure object 10 is exposed with an image corresponding to the image data.

Since the exposure apparatus 10 of this embodiment uses the high-power laser light source 24, an exposure object having sensitivity in a predetermined wavelength region including ultraviolet can be directly scanned and exposed based on digital data. it can. As a result, there are advantages shown in (1) to (6) below, as compared with an exposure apparatus that uses mask exposure such as a proximity exposure apparatus.

(1) Since a mask is not required, the cost can be reduced and the manufacturing time can be shortened. This improves the productivity and is also suitable for the production of a large number of small-lot products. (2) Since direct scanning exposure is performed based on digital data, the data can be appropriately corrected, and a highly accurate holding mechanism,
Alignment mechanism and temperature stabilization mechanism are unnecessary,
The cost of the device can be reduced, and high speed and high definition can be achieved. (3) The laser light source is cheaper and more durable than the ultra-high pressure mercury lamp, and the running cost can be reduced. (4) Further, the laser light source has a low driving voltage and can reduce power consumption. (5) It is possible to record not only on a material having sensitivity in the ultraviolet region but also on a heat mode material. (6) In particular, when a GaN-based LD is used, a predetermined reaction can be completed before the material is affected by heat by the short pulse exposure, and higher definition drawing (so-called sharp image drawing) can be performed. ) Is possible.

When the exposure apparatus 10 of the present invention is used, the cumulative use time of each light source unit 40 or the output efficiency of each light source unit 40 (for example, in the case of LD, its light output / driving current). The deterioration rate with time is measured.

Here, the cumulative use time of the light source units 40 is calculated by integrating the time when each light source unit 40 is on. The method for accumulating the on-time may be calculated by counting the time during which the light source unit 40 is on with software by a control means such as a control CPU (central processing unit) or a controller, or each light source unit 40. In addition, a timer or the like for counting the time when the light source unit 40 is on by hardware may be provided.

The deterioration rate of the output efficiency of the light source unit 40 with time is such that, for example, by using an ACC (Auto Current Control) circuit, the drive current of the light source is always constant in each light source unit 40, that is, before the aging and It is possible to set the drive current value after aging to the same value and measure the deterioration rate of the output efficiency of each light source unit 40 over time based on the difference in light output of each light source unit 40 before and after aging. It is possible.

Alternatively, the deterioration rate of the output efficiency of the light source unit 40 over time is determined by, for example, APC (AutoPower Controller).
The light output of the light source is always constant in each light source unit 40 by using a circuit, that is, the light output before and after the elapse of time is set to the same value.
It is possible to measure the deterioration rate of the output efficiency of each light source unit 40 with time, based on the difference between the driving current values before and after 0.

The accumulated use time of each light source unit 40 or the measurement result of the deterioration rate of the output efficiency of each light source unit 40 with time is displayed on a display means such as a display or output from a printer by automatic or manual control. It is possible to output to the means.

For example, serial numbers are assigned to each light source unit 40 and each exposure unit 22, which light source unit 40 is connected to which exposure unit 22, and which light source unit 40 has a long or short cumulative use time. Alternatively, information such as which of the light source units 40 has the good or bad output efficiency deterioration with time is displayed or output, for example, in order from the light source unit 40 having the longest cumulative use time or in the order of poor output efficiency deterioration with time.

As a result, the user or administrator of the exposure apparatus 10 can determine the cumulative use time of each light source unit 40 or the deterioration rate of the output efficiency of each light source unit 40 over time, and the current light source unit 40 and each exposure unit. The connection status with 22 can be easily known.

In this case, the user or the administrator of the exposure apparatus 10 looks at the cumulative use time of each light source unit 40 or the measurement result of the deterioration rate of the output efficiency of each light source unit 40 over time, and checks all the light source units 40. In order to average the accumulated use time, the optical fiber 42 is removed at the optical connector 76, and the light source unit 40 having a long accumulated use time and the light source unit 40 having a short accumulated use time are reconnected at their own discretion. Alternatively, the light source unit 40 having a poor output efficiency deterioration rate and the good light source unit 40 are reconnected.

The control means is based on the cumulative use time of each light source unit 40 or the deterioration rate of the output efficiency over time.
It is also possible to display information indicating which light source unit 40 the light beam emitted from which light source unit 40 is connected to which exposure unit 22 on the display unit or output the information to the output unit.

For example, as shown in FIG. 9, each light source unit 40 and each exposure unit 22 are serially numbered, and based on the statistical results of the cumulative use time or output efficiency deterioration rate of each light source unit 40. Then, the numbers of all the light source units 40 are displayed on the display device in the order of the longest cumulative usage time or in the order of the deterioration rate of the output efficiency with time. In addition to this, information on which exposure unit 22 is connected to which light source unit 40 is also displayed.

Then, for example, the connection order is reversed to instruct to change the connection between each light source unit 40 and each exposure unit 22 in the order of shorter cumulative usage time or in order of better deterioration rate over time.

FIG. 9 shows seven light source units 40 of 1-7.
And the exposure unit 22 are provided. In the left column in the figure, the light source units 40 are numbered 1, 2, 3, 4, in the order of long cumulative use time or in the order of poor output efficiency deterioration over time.
5, 6, and 7 are displayed. Further, in the center column, the exposure unit 22 number 6, 4, 1, 3, which is the current connection destination is shown.
2, 5, and 7 are displayed. In the same right column, the exposure unit 22 number 7, 5, which is the connection destination after changing the connection order is changed.
2, 3, 1, 4, 6 are displayed.

As a result, the user or the administrator of the exposure apparatus 10 simply reconnects the light source units 40 and the exposure units 22 according to the information instructed by the control means, and the light source units 40. It is possible to average the cumulative use time or the deterioration rate of the output efficiency over time, and it is possible to extend the remaining life of the light source unit 40. As a result, the replacement or maintenance cycle of the light source unit 40 can be lengthened, and the cost can be reduced accordingly.

The method of measuring the cumulative use time of each light source unit 40 and the deterioration rate of the output efficiency of each light source unit 40 over time is not limited in any way, and it may be measured by a method other than the above. Further, the method of changing the connection between each light source unit 40 and each exposure unit 22 for averaging the cumulative use time of each light source unit 40 and the deterioration rate of the output efficiency over time is not limited to the above example, and may be changed as necessary. Various connection changing methods can be used accordingly.

The present invention is also applicable to various types of exposure apparatuses, for example, PWB (printed circuit board) exposure apparatus, FPD (flat panel display) exposure apparatus, stereolithography apparatus, powder sintering modeling apparatus, and other illumination for spatial modulation elements. It can be suitably used as a light source for use.

The exposure apparatus of the present invention is basically as described above. Although the exposure apparatus of the present invention has been described in detail above, the present invention is not limited to the above-described embodiments, and it goes without saying that various improvements and modifications may be made without departing from the spirit of the present invention. .

[0082]

As described in detail above, the exposure apparatus of the present invention measures the cumulative use time of each light source unit or the deterioration rate of output efficiency over time, and based on the measurement results,
The switching means switches the connection between each light source unit and each exposure unit. As a result, according to the exposure apparatus of the present invention, it is possible to average the cumulative use time of each light source unit or the deterioration rate of the output efficiency over time, extend the light source unit replacement and maintenance cycles, and reduce the cost. Can be reduced.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an embodiment of an exposure apparatus to which the present invention is applied.

FIG. 2 is a schematic configuration diagram of an embodiment of an exposure unit.

FIG. 3 is a schematic configuration diagram of an embodiment of a laser light source.

FIG. 4A and FIG. 4B are a top view and a cross-sectional view of an example showing a configuration of a multiplexing module.

5A and 5B are schematic configuration diagrams of one embodiment showing a method of using a one-dimensional spatial modulation element and a two-dimensional spatial modulation element, respectively.

FIG. 6 is a schematic diagram of a configuration of an example of a zoom lens.

FIG. 7A and FIG. 7B are schematic configuration diagrams of an example showing an arrangement of an exposure head and an exposure method using a two-dimensional light modulation element and a one-dimensional light modulation element, respectively.

FIG. 8 is a schematic configuration diagram of an example of an exposure head.

FIG. 9 is a schematic view showing an example of a method for changing the connection between the light source unit and the exposure unit.

FIG. 10A and FIG. 10B are schematic diagrams of an example in which exposure is performed by left alignment and center alignment, respectively.

[Explanation of symbols]

10 Exposure equipment 12 bases 12a support member 12b guide 14 stages 16 exposure head 18 Position detection sensor 20 Object to be exposed 22 Exposure unit 24 laser light source 26,28 lens 30 spatial modulator 32, 34 zoom lens 38 casing 40 light source unit 42 optical fiber 44 Semiconductor laser 46 Multiplexing module 48 Semiconductor laser chip 50,54 Heat sink block 52 Light emission point 56 Gallium Nitride Semiconductor Laser 58 Collimator lens 60 condenser lens 62 packages 64 package lid 68 Collimator lens holder 70 Condenser lens holder 72 Fiber holder 74 wiring 76 Optical connector 78 line head

Continued front page    (72) Inventor Kouji Wada             798 Miyadai, Kaisei-cho, Ashigarakami-gun, Kanagawa Prefecture             Shishi Film Co., Ltd. F-term (reference) 2H097 AA03 CA17 LA09 LA10

Claims (8)

[Claims] 1. A light source unit which emits a light beam, and a plurality of exposure units which modulate the light beam emitted from the light source unit according to image data, the light source unit corresponding to a size of an object to be exposed. An exposure apparatus comprising an exposure head that directly exposes the exposure target using all or all of the light source units and the exposure unit, wherein the cumulative use time of each of the light source units or the deterioration rate of output efficiency over time. An exposure apparatus comprising: a means for measuring the light source; and a switching means capable of arbitrarily switching a connection between each of the light source units and each of the exposure units. 2. The exposure apparatus according to claim 1, wherein the exposure head is a line head capable of simultaneously exposing an image of one line. 3. The exposure apparatus according to claim 1, wherein the switching means is an optical fiber and an optical connector provided between each of the light source units and each of the exposure units. 4. The means for measuring the deterioration rate with time sets, for each of the light source units, a drive current value before and after the passage of time to the same value, and The exposure apparatus according to claim 1, wherein the deterioration rate of the output efficiency of each of the light source units with time is measured based on the difference in light output. 5. The means for measuring the deterioration rate with time sets, for each of the light source units, the same light output before and after the aging, and drives each of the light source units before and after the aging. The exposure apparatus according to claim 1, wherein the deterioration rate of the output efficiency of each of the light source units with time is measured based on the difference in current value. 6. The exposure apparatus according to claim 1, wherein the light source unit is composed of a semiconductor laser. 7. The exposure apparatus according to claim 6, wherein the light source unit is one that multiplexes light beams emitted from a plurality of semiconductor lasers and optically couples them to an optical fiber. 8. The exposure apparatus according to any one of claims 1 to 7, further comprising: a cumulative deterioration time of each light source unit or a deterioration rate of output efficiency of each light source unit with time, An exposure apparatus comprising means for instructing which exposure unit a light beam emitted from which light source unit is connected.