JP2003325526A5 - - Google Patents

Claims (3)

A piezoelectric vibrator having a ground electrode and a transmission / reception signal input / output electrode formed on substantially the entire surface of at least one of the main surfaces;
The transmission / reception signal input / output electrode joined with the transmission / reception signal input / output electrode and extended in a state of being in contact with the main surface,
An external electrode provided at each end of the ground electrode and the transmission / reception signal input / output electrode, and provided in a direction substantially perpendicular to the electrodes;
Grounding means connected to an external electrode of the ground electrode;
Ultrasonic input / output means connected to external electrodes of the transmission / reception signal input / output electrodes;
An ultrasonic transducer comprising: Said plurality of piezoelectric vibrators, and a pair of transmission piezoelectric transducer elements for generating transmit the fundamental wave ultrasound, substantially in the same plane and the pair of piezoelectric transducer elements, one 且, the paired piezoelectric transducer element disposed claim 1 ultrasonic transformer de Yusa according to, comprising the receiving piezoelectric transducer element for receiving a harmonic ultrasound was so as to be sandwiched. Acoustic lens molding process in which an acoustic lens resin material is cast-cured on a lens molding die on which an acoustic lens mold base having a cylindrical convex surface portion is placed, and the surface of the cured acoustic lens is smoothed When,
A common electrode film forming step of forming a common electrode film on the surface of the acoustic lens molded and smoothed in the acoustic lens molding step;
A fundamental wave transmitting piezoelectric vibrator having a pair of strip-like electrodes formed on the common electrode film surface formed in the common electrode film forming step, and the fundamental wave transmitting piezoelectric vibrator. A piezoelectric vibrator joining step of joining a harmonic receiving piezoelectric vibrator having electrodes formed on both main surfaces in a strip-like shape disposed in a single piece;
An input electrode film on the surface of the fundamental wave transmitting piezoelectric vibrator bonded in the piezoelectric vibrator joining step, and an input / output electrode film forming step of forming an output electrode film on the surface of the harmonic wave receiving piezoelectric vibrator;
Adhesive injection coating for injecting and applying an adhesive for embedding and correcting gaps and dimensional errors between the fundamental wave transmitting piezoelectric vibrator and the harmonic receiving piezoelectric vibrator bonded to the electrode film surface in the piezoelectric vibrator joining step. Process,
A damping layer sheet joining step for joining a damping layer sheet to the surfaces of the fundamental wave transmitting piezoelectric vibrator and the harmonic receiving piezoelectric vibrator with the adhesive injected and applied in the adhesive injection coating process;
After joining and solidifying the damping layer sheet in the damping layer sheet joining step, releasing from the lens forming mold, and a cutting step for cutting into a predetermined shape dimension;
The common electrode film generated in the common electrode film forming process exposed on the cut surface cut in the cutting process, and an external electrode respectively on a part of the end of the input / output electrode film generated in the input / output electrode film forming process Forming an external electrode; and
The shield electrode and signal line of the coaxial cable that drives the transmitting piezoelectric vibrator and the receiving piezoelectric vibrator are connected to the external electrode of the common electrode film formed in the external electrode forming step and the external electrode of the input / output electrode film. A cable connection process,
After connecting the shielded wire and the signal wire of the coaxial cable in the cable connecting step to the external electrode, the acoustic lens mold base is removed and housed in the housing, and the housing loading step for sealing and fixing with a resin agent,
Ultrasonic transformer de Yusa manufacturing method characterized by comprising.