JP2003324978A - Driving device of multiple degrees of freedom - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a driving device of multiple degrees of freedom wherein the tilting position of the output shaft of a rotor which rotates on a plurality of axes can be controlled through simple constitution. <P>SOLUTION: The driving device of multiple degrees of freedom comprises a stator 6 and a rotor 7. The stator 6 has a contact portion 8b and produces vibration at the contact portion 8b in a plurality of directions. The rotor 7 has a spherical portion 7a which is pressed and contacted by the contact portion 8b, and the output shaft 7b which is protruded on the side substantially opposite the contact portion 8b. In the rotor 7, the spherical portion 7a is rotated on a plurality of axes respectively based on vibration in a plurality of the directions produced at the stator 6. Further, the output shaft 7b is tilted. The driving device of multiple degrees of freedom is further comprises a slider 20 which is engaged with the output shaft 7b, and is moved on a plane expressed by an X1-axis and a Y1-axis orthogonal to each other, based on tilting of the output shaft 7b; bodies 16 and 18 of rotation for detecting the position to which the slider 20 is moved as an X1-axis component signal Sx1 and a Y1-axis component signal Sy1; X1-axis and Y1-axis first variable resistor portions 21 and 22; and X1-axis and Y1-axis position detection circuits 23 and 24. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-degree-of-freedom drive device for rotating a rotor about a plurality of axes.

[0002]

2. Description of the Related Art In recent years, a multi-degree-of-freedom drive device has been proposed which uses an ultrasonic motor for rotationally driving a rotor around a plurality of axes. The stator of this multi-degree-of-freedom drive device is provided with a piezoelectric element so that the contact portion can generate vibration in a plurality of directions. The rotor has a substantially spherical spherical surface portion that is pressed into contact with the contact portion and an output shaft that projects substantially opposite to the spherical surface portion. Then, in the rotor, the spherical portion rotates about the plurality of axes based on the vibrations in the plurality of directions generated in the stator, and the output shaft tilts. Then, the driven member fixed to the output shaft tilts (rotates) together with the output shaft.

[0003]

By the way, it is conceivable that the above-described multi-degree-of-freedom drive device is mounted on a work arm robot, an animal toy robot, or the like for implementation.
In such a case, it is necessary to accurately control the position of the driven member (output shaft). Therefore, in such a multi-degree-of-freedom drive device, an acceleration sensor is provided on the output shaft or the driven member, or a sensor that three-dimensionally detects the tilt position of the output shaft (for example, from the tip of the tilting output shaft in advance). A sensor for measuring the distance to the set position will be provided.

However, when an acceleration sensor or the like is used, a complicated calculation (calculation means) is required to recognize the tilt position of the output shaft from the detection result. Even when a sensor that three-dimensionally detects the tilt position of the output shaft is used, a complicated calculation (calculation means) is required to recognize the tilt position of the output shaft from the detection result. . Then, in these cases, even when the output shaft is operated, it becomes necessary for the operation means, the control operation circuit, and the like to perform complicated calculations.

An object of the present invention is to provide a multi-degree-of-freedom drive device having a simple structure and capable of controlling the tilt position of the output shaft of a rotor which rotates about a plurality of shaft centers.

[0006]

According to a first aspect of the present invention, there is provided a stator having a contact portion, which generates vibrations in a plurality of directions at the contact portion, and a substantially spherical shape pressed into contact with the contact portion. The output shaft has a spherical surface portion and an output shaft protruding substantially opposite to the contact portion, and the spherical surface portion rotates about a plurality of shafts based on vibrations in a plurality of directions generated in the stator. In a multi-degree-of-freedom drive including a rotor that tilts, a slider that is engaged with the output shaft and moves on a plane represented by an X1 axis and a Y1 axis that are orthogonal to each other based on the tilt of the output shaft. And a position detecting means for detecting the moved position of the slider as an X1 axis component and a Y1 axis component.

According to a second aspect of the present invention, in the multi-degree-of-freedom drive device according to the first aspect, a target X2 axis component corresponding to the X1 axis component and a target Y corresponding to the Y1 axis component.
Comparison of operation means capable of inputting a two-axis component, a comparison circuit for comparing the X1 axis component and the target X2 axis component and a comparison between the Y1 axis component and the target Y2 axis component, and a comparison circuit And an operating circuit for driving the stator based on the result.

The invention described in claim 3 is the invention according to claim 1 or 2.
In the multi-degree-of-freedom drive device described in (1), the stator includes a first piezoelectric element and a second piezoelectric element that are polarized at right angles so as to tilt the output shaft to an arbitrary position, and the X1 axis of the position detecting means. The component is arranged so as to be parallel to the polarization changing direction of the first piezoelectric element, and the Y1 axis component of the position detecting means is arranged to be parallel to the polarization changing direction of the second piezoelectric element.

The invention according to claim 4 is the invention according to claim 2 or 3.
In the multi-degree-of-freedom drive device described in (1),
An inclinable operation lever, engaged with the operation lever,
An operation side slider that moves on a plane represented by an X2 axis and a Y2 axis that are orthogonal to each other based on the tilt of the operation lever, and a moved position of the operation side slider as a target X2 axis component and a target Y2 axis component. And a target position output means for outputting.

According to a fifth aspect of the present invention, in the multi-degree-of-freedom drive device according to the fourth aspect, the position detecting means changes the electric resistance based on the moved position of the slider. A resistance part and a Y1 axis first variable resistance part are provided, and the X1 axis component and the Y1 axis component are detected based on the electric resistance, and the target position output means electrically operates based on the moved position of the operation side slider. It has an X2-axis second variable resistance part and a Y2-axis second variable resistance part whose resistance changes, and outputs a target X2-axis component and a target Y2-axis component based on the electric resistance.

According to a sixth aspect of the present invention, in the multi-degree-of-freedom drive device according to the fifth aspect, the comparison circuit includes the X-axis.
The ratio of the electric resistance of the uniaxial first variable resistance portion and the X2-axis second
The ratio of the electric resistance of the variable resistance part is compared, the ratio of the electric resistance of the Y1-axis first variable resistance part is compared with the ratio of the electric resistance of the Y2-axis second variable resistance part, and the operating circuit is The electric resistance ratio of the X1-axis first variable resistance portion matches the electric resistance ratio of the X2-axis second variable resistance portion, and the electric resistance ratio of the Y1-axis first variable resistance portion is the same. The stator is driven so as to match the electric resistance ratio of the Y2-axis second variable resistance portion.

(Operation) According to the invention described in claim 1,
When the output shaft tilts, the slider moves on one plane represented by the X1 axis and the Y1 axis which are orthogonal to each other based on the tilt. The moved position of the slider is detected by the position detecting means as the X1 axis component and the Y1 axis component. With this arrangement, the position of the slider that moves on one plane represented by the X1 axis and the Y1 axis that are orthogonal to each other is defined as the X1 axis component and the Y axis.
The rotational position of the spherical portion that rotates about the plurality of axes (the tilting position of the output shaft) can be recognized only by detecting it as one axis component.

According to the second aspect of the present invention, the target X2 axis component corresponding to the X1 axis component and the Y
When the 1-axis component and the corresponding target Y2-axis component are input,
The comparison circuit compares the X1 axis component with the target X2 axis component, and compares the Y1 axis component with the target Y2 axis component. Then, the stator is driven by the operating circuit based on the comparison result of the comparison circuit.

According to the third aspect of the present invention, the stator has the first piezoelectric element polarized so as to tilt the output shaft to an arbitrary position, and the output shaft tilted in a direction perpendicular to the certain direction. Thus, the second piezoelectric element polarized perpendicularly to the polarization direction of the first piezoelectric element is provided. The X1 axis component is parallel to the polarization changing direction of the first piezoelectric element, and the Y1 axis component is parallel to the polarization changing direction of the second piezoelectric element. Therefore,
For example, based on the comparison result of comparing the X1 axis component and the target X2 axis component, the output axis is tilted by the first piezoelectric element, and Y
If the output shaft is tilted by the second piezoelectric element based on the comparison result obtained by comparing the 1-axis component and the target Y2-axis component, the tilting position of the output shaft is controlled with a simple configuration without performing complicated calculation. be able to. For example, when the X1 axis component and the target X2 axis component are deviated from each other, the first
Since it is sufficient to tilt the output shaft with the piezoelectric element, complicated calculation and control are unnecessary. Further, the first piezoelectric element that tilts the output shaft in the direction corresponding to the X1 axis and the second piezoelectric element that tilts the output shaft in the direction corresponding to the Y1 axis can have a simple polarization structure.

According to the fourth aspect of the invention, when the operation lever is tilted, the operation-side slider moves on one plane represented by the X2 axis and the Y2 axis which are orthogonal to each other based on the tilt. Then, the moved position of the operation side slider is output by the target position output means as a target X2 axis component and a target Y2 axis component. With this configuration, for example, the tilting positions of the operation lever of the operation means and the output shaft can be matched with each other without performing complicated calculation.

According to the fifth aspect of the present invention, the electric resistances of the X2-axis second variable resistance portion and the Y2-axis second variable resistance portion change based on the moved position of the operating-side slider, and the electric resistance changes. Based on this, the target X2-axis component and the target Y2-axis component are detected. Also, based on the position where the slider has moved, X1
The electric resistances of the first axis variable resistance section and the first variable resistance section of the Y1 axis change, and the X1 axis component and the Y1 axis component are detected based on the electric resistance. By doing so, it is possible to easily compare the target X2-axis component and the X1-axis component and the target Y2-axis component and the Y1-axis component.

According to the sixth aspect of the invention, the comparison circuit compares the ratio of the electric resistance of the X1 axis first variable resistance portion with the ratio of the electric resistance of the X2 axis second variable resistance portion, and the Y1 axis. The ratio of the electric resistance of the first variable resistance portion and the ratio of the electric resistance of the Y2-axis second variable resistance portion are compared. Then, in the operating circuit, the electric resistance ratio of the X1-axis first variable resistance portion matches the electric resistance ratio of the X2-axis second variable resistance portion, and the electric resistance ratio of the Y1-axis first variable resistance portion is changed. The stator is driven so that the ratio matches the ratio of the electric resistance of the Y2-axis second variable resistance portion.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIGS. As shown in FIG. 1, the multi-degree-of-freedom drive device includes an actuator 1 and a joystick 2 as an operating means.

The actuator 1 comprises a case 5, a stator 6 and a rotor 7. The case 5 includes a square tubular portion 5a formed in a substantially square tubular shape, and a bottom portion 5b that closes a base end portion (lower end portion in FIG. 1) of the square tubular portion 5a. The stator 6 is fixed to the bottom portion 5b.

More specifically, the stator 6 includes upper and middle blocks 8 and 9 and first to third piezoelectric elements 10 to 12. The upper and middle blocks 8 and 9 are made of a conductive metal and are made of an aluminum alloy in this embodiment. The upper and middle blocks 8 and 9 are substantially columnar bodies, and a through hole that penetrates in the axial direction is formed in the central axis portion thereof. In addition, a recess 8 is formed in the upper center of the upper block 8.
a is recessed from above. The opening of the concave portion 8a is formed with a curved contact portion 8b which is set so as to come into contact with the spherical surface provided above at an annular surface.

As shown in FIG. 2, each of the first to third piezoelectric elements 10 to 12 is a combination of two piezoelectric elements 10a, 10b to 12a, 12b formed in a disk shape, and the central axis thereof. A through hole is formed in the portion.

The polarization direction of one piezoelectric element 10a constituting the first piezoelectric element 10 is perpendicular to the plane (thickness direction).
In addition, as indicated by the broken line in FIG. 2, the planes are inverted by half. The polarization direction of the other piezoelectric element 10b forming the first piezoelectric element 10 is the same as that of the other piezoelectric element 10b.
The opposite of a, that is, one piezoelectric element 10 centered on an electrode (not shown) provided on the mating surface (combining surface)
It is supposed to be symmetrical with a.

The polarization direction of one piezoelectric element 11a constituting the second piezoelectric element 11 is perpendicular to the plane (thickness direction).
In addition, as indicated by the broken line in FIG. 2, the planes are inverted by half. The polarization direction of the other piezoelectric element 11b forming the second piezoelectric element 11 is the same as that of the other piezoelectric element 11b.
The opposite of a, that is, it is symmetrical with one piezoelectric element 11a about an electrode (not shown) provided on the mating surface.

The polarization direction of the one piezoelectric element 12a constituting the third piezoelectric element 12 is one direction perpendicular to the plane. The polarization direction of the other piezoelectric element 12b forming the third piezoelectric element 12 is opposite to that of the one piezoelectric element 12a.
That is, the piezoelectric element 12a is symmetrical with respect to the electrode (not shown) provided on the mating surface. still,
On the upper and lower surfaces of the first to third piezoelectric elements 10 to 12,
Electrodes (not shown) are provided respectively.

Then, as shown in FIG. 1, the third piezoelectric element 12, the middle block 9, the second piezoelectric element 11, the first piezoelectric element 10, and the upper block 8 are laminated in this order, and the bottom portion 5 is formed.
The nut 14 is fastened by being screwed to the tip of the bolt member 13 that is erected from b and inserted into each through hole, and is fixed to the bottom 5b.

Here, at this time, the first piezoelectric element 10 and
The second piezoelectric element 11 is arranged so that the polarization boundaries indicated by broken lines in FIG. 2 are displaced by 90 ° (that is, polarized at right angles to each other). Specifically, in the present embodiment, the polarization changing direction of the first piezoelectric element 10 (the direction orthogonal to the polarization boundary line) is the X1 axis of this embodiment (the direction indicated by the arrow in the figure).
Is set in the direction parallel to. In addition, in the present embodiment, the second
Direction of polarization change of piezoelectric element 11 (direction orthogonal to polarization boundary line)
Is set in a direction parallel to the Y1 axis (the direction indicated by the arrow in the figure) of the present embodiment. The X1 axis and the Y1 axis are
The axes are orthogonal to each other for representing a plane orthogonal to the bolt member 13.

A bearing 15 is fixed to the tip end side (upper end side in FIG. 1) of the square tubular portion 5a of the case 5. The outer edge of the bearing 15 is held by the rectangular tubular portion 5a, and a curved spherical support surface 15a, which is set so as to come into contact with a spherical surface provided below at an annular surface, is provided below the central hole. Has been formed.

The rotor 7 is made of a rigid body such as stainless steel. The rotor 7 is pressed into contact with the contact portion 8b by sandwiching the substantially spherical spherical surface portion 7a between the contact portion 8b of the stator 6 and the spherical support surface 15a of the bearing 15. It is rotatably supported around a plurality of axes. The rotor 7 has an output shaft 7b that is substantially opposite to the contact portion 8b and projects upward (upward in FIG. 1) from the central hole of the bearing 15. The output shaft 7
b will tilt when the spherical surface portion 7a rotates about a plurality of axes. A driven member (not shown) is connected to the tip of the output shaft 7b.

As shown in FIGS. 1 and 3A, rotators 16 to 19 are rotatably supported at the tip (upper end in FIG. 1) of the rectangular tubular portion 5a of the case 5. There is. The rotating bodies 16 to 19 are gears having teeth on the outer edges thereof, and are provided at the centers of the walls 5c to 5f forming the rectangular tubular portion 5a. Specifically, the two rotating bodies 16 and 17 are shown in FIG.
As shown in (a), the pair of walls 5c and 5d arranged side by side in the X1 axis direction is rotatably supported at the center of the Y1 axis (center parallel to the Y1 axis). The other two rotating bodies 18 and 19 are rotatably supported at the center of the X1 axis (center parallel to the X1 axis) at the center of the pair of walls 5e and 5f arranged side by side in the Y1 axis direction. There is. Also, the rotating body 16
Nos. 19 to 19 are provided so that a part thereof protrudes upward from the tip end portion (upper end portion in FIG. 1) of the square tubular portion 5a.

The output shaft 7b is engaged with a slider 20 that moves on a plane represented by the X1 axis and the Y1 axis based on its tilting. Specifically, the slider 20 is formed in a substantially square plate shape, and a center hole 20a into which the output shaft 7b is fitted is formed in the center of the slider 20. The lower surface (lower surface in FIG. 1) of the slider 20 is shown in FIG.
As shown in, teeth 20b are formed. Tooth 20b
Are defined by diagonal lines of the slider 20, and each is formed in a groove shape such that irregularities are repeated in a direction orthogonal to its side (side of the slider 20). And the slider 2
0 means that each of the divided teeth 20b is the rotating body 16
~ 19 and the X1 axis and the Y
It is supported by a support structure (not shown) so as to be movable on one plane represented by one axis.

One rotating body 16 rotatable about the Y1 axis center (center parallel to the Y1 axis) is connected to the X1 axis first variable resistance portion 21 via a gear or the like not shown. or,
One of the rotating bodies 18 rotatable about the X1 axis center (center parallel to the X1 axis) is connected to the Y1 axis first variable resistance section 22 via a gear or the like not shown.

X1 axis and Y1 axis first variable resistance portions 21, 2
Reference numeral 2 is a variable resistor whose electric resistance changes based on the rotation (rotation angle) of the rotating bodies 16 and 18 connected to each other. The X1 axis first variable resistance section 21 is electrically connected to the X1 axis position detection circuit 23, and the Y1 axis first variable resistance section 22.
Are electrically connected to the Y1 axis position detection circuit 24.
Further, the X1 axis and Y1 axis position detection circuits 23 and 24 are electrically connected to the comparison circuit 25. Then, the X1-axis position detection circuit 23 changes the X1-axis first variable resistance portion 21 that changes.
The X1 axis component signal Sx1 as the X1 axis component based on the electrical resistance of the Y1 axis based on the electrical resistance of the Y1 axis first variable resistance unit 22 that changes is output to the comparison circuit 25. The Y1-axis component signal Sy1 as a component is output to the comparison circuit 25. In the present embodiment, the rotating bodies 16 and 18, the X1 axis and Y1 axis first variable resistance portions 21,
22, X1 axis and Y1 axis position detection circuits 23 and 24 constitute position detection means.

As shown in FIG. 1, the joystick 2 has an operating lever 31 which can be tilted in the same range as the output shaft 7b by an external force (operation by the user), an X2-axis second variable resistance portion 32, and a Y2. Axis second variable resistance unit 33 and target X2
An axis position output circuit 34 and a target Y2 axis position output circuit 35 are provided.

The operating lever 31 is formed in the same manner as the slider 20.
An operation side slider 36 that moves on one plane represented by the two axes and the Y2 axis is engaged. The X2 axis and the Y axis
The two axes are mutually orthogonal axes for representing a plane corresponding to the X1 axis and the Y1 axis. The case 37 of the operating lever 31 is provided with rotating bodies 38 to 41 similar to the rotating bodies 16 to 19. Since the relationship between the operating lever 31, the operation side slider 36, and the rotating bodies 38 to 41 is the same as the relationship between the output shaft 7b, the slider 20, and the rotating bodies 16 to 19, detailed description thereof will be omitted. To do.

One rotating body 38 rotatable about the Y2-axis center (center parallel to the Y2-axis) is connected to the X2-axis second variable resistance portion 32 via a gear or the like not shown. or,
One rotating body 40 rotatable about the X2 axis center (a center parallel to the X2 axis) is connected to the Y2 axis second variable resistance section 33 via a gear or the like not shown.

X2-axis and Y2-axis second variable resistance portions 32, 3
Reference numeral 3 is a variable resistor whose electric resistance changes based on the rotation (rotation angle) of the rotating bodies 38 and 40 connected to each other. The X2-axis second variable resistance section 32 is electrically connected to the target X2-axis position output circuit 34, and the Y2-axis second variable resistance section 33 is electrically connected to the target Y2-axis position output circuit 35. Further, the target X2 axis and target Y2 axis position output circuit 3
4, 35 are electrically connected to the comparison circuit 25. Then, the target X2-axis position output circuit 34 determines the target X-axis based on the changing electric resistance of the X2-axis second variable resistance section 32.
The target X2-axis component signal Sx2 as the 2-axis component is output to the comparison circuit 25. Further, the target Y2 axis position output circuit 35
The target Y2-axis component signal Sy2 as the target Y2-axis component based on the changing electric resistance of the Y2-axis second variable resistance section 33 is output to the comparison circuit 25. In the present embodiment,
Rotating bodies 38, 40, X2-axis and Y2-axis second variable resistance part 3
2, 33, target X2 axis and target Y2 axis position output circuit 3
Reference numerals 4 and 35 constitute target position output means.

The comparison circuit 25 is electrically connected to the operating circuit 42. The comparison circuit 25 compares the X1 axis component signal Sx1 with the target X2 axis component signal Sx2, compares the Y1 axis component signal Sy1 with the target Y2 axis component signal Sy2, and outputs the comparison result signals. Output to the operating circuit 42.

It should be noted that the comparison circuit 25 of the present embodiment is the same as X1.
The ratio of electric resistance based on the shaft component signal Sx1 and the target X
The electric resistance ratio based on the biaxial component signal Sx2 is compared. Specifically, the comparison circuit 25 calculates (electrical resistance of the X1-axis first variable resistance section 21 based on the rotational position of the rotating body 16) / (total electric resistance of the X1-axis first variable resistance section 21),
(Electrical resistance of the X2-axis second variable resistance section 32 based on the rotational position of the rotating body 38) / (Total electrical resistance of the X2-axis second variable resistance section 32) is compared.

Further, the comparison circuit 25 of the present embodiment is
The ratio of the electric resistance based on the axis component signal Sy1 and the target Y
The electric resistance ratio based on the biaxial component signal Sy2 is compared. Specifically, the comparison circuit 25 calculates (electrical resistance of the Y1-axis first variable resistance portion 22 based on the rotational position of the rotating body 18) / (total electric resistance of the Y1-axis first variable resistance portion 22),
(Electrical resistance of the Y2-axis second variable resistance portion 33 based on the rotational position of the rotating body 40) / (Total electrical resistance of the Y2-axis second variable resistance portion 33) is compared.

The operating circuit 42 is the comparison circuit 2
The stator 6 is driven based on the signal of each comparison result of No. 5. Specifically, in the operation circuit 42 of the present embodiment, the ratio of the electric resistance based on the X1-axis component signal Sx1 is the target X2.
The stator 6 is driven so as to match the electric resistance ratio based on the shaft component signal Sx2. Further, the operating circuit 42 of the present embodiment drives the stator 6 so that the ratio of the electric resistance based on the Y1-axis component signal Sy1 matches the ratio of the electric resistance based on the target Y2-axis component signal Sy2.

At this time, the operating circuit 42 is operated by X1 and X2.
Based on the signal of the comparison result about the axis (when the ratio of the electrical resistance based on the X1 axis component signal Sx1 does not match the ratio of the electrical resistance based on the target X2 axis component signal Sx2), the first and the first 3 Piezoelectric elements 10, 12 (electrodes)
Apply a high frequency voltage to. Further, the operating circuit 42 determines that the ratio of the electric resistance based on the Y1 axis component signal Sy1 is the target Y2 based on the signal of the comparison result for the Y1 and Y2 axes.
A high frequency voltage is applied to (the electrodes of) the second and third piezoelectric elements 11 and 12 (when they do not match the ratio of the electric resistance based on the axial component signal Sy2).

The actuation circuit 42 supplies the same high-frequency voltage between the electrode on the upper surface of the first piezoelectric element 10 and the electrode on the mating surface, and between the electrode on the lower surface of the first piezoelectric element 10 and the electrode on the mating surface. Then, a vertically symmetrical symmetrical high-frequency voltage is supplied to the first piezoelectric element 10 with the electrode on the mating surface common, and the polarization directions of the one piezoelectric element 10a and the other piezoelectric element 10b are symmetrical about the electrode on the mating surface. Therefore, the first piezoelectric element 10 is large (the piezoelectric elements 10a, 10
Vibration is generated by adding the vibration of b). This vibration
Since the polarization directions of the piezoelectric elements 10a and 10b are opposite in each half of the plane, when the divided one (one in the X1 axis direction) extends in the thickness direction, the other (the other in the X1 axis direction) extends in the thickness direction. When one contracts, on the contrary, when the other contracts, the other expands, resulting in bending vibration in the X1 axis direction as a whole.

The actuation circuit 42 supplies the same high-frequency voltage between the electrode on the upper surface of the second piezoelectric element 11 and the electrode on the mating surface, and between the electrode on the lower surface of the second piezoelectric element 11 and the electrode on the mating surface. Then, a vertically symmetrical symmetrical high-frequency voltage is supplied to the second piezoelectric element 11 with the electrode on the mating surface common, and the polarization directions of the one piezoelectric element 11a and the other piezoelectric element 11b are symmetrical about the electrode on the mating surface. Therefore, the second piezoelectric element 11 is large (the piezoelectric elements 11a, 11
Vibration is generated by adding the vibration of b). This vibration
Since the polarization directions of the piezoelectric elements 11a and 11b are opposite in each half of the plane, when the divided one (one in the Y1 axis direction) extends in the thickness direction, the other (the other in the Y1 axis direction) extends in the thickness direction. When one contracts, on the contrary, when the other contracts, the other expands, resulting in bending vibration in the Y1-axis direction as a whole.

Further, the operating circuit 42 includes the third piezoelectric element 1
2 between the electrode on the upper surface and the electrode on the mating surface, the third piezoelectric element 12
The same high-frequency voltage is supplied between the electrode on the lower surface and the electrode on the mating surface. Then, a vertically symmetrical symmetrical high-frequency voltage is supplied to the third piezoelectric element 12 with the electrode on the mating surface common, and the polarization directions of the one piezoelectric element 12a and the other piezoelectric element 12b are symmetrical about the electrode on the mating surface. Therefore, the third piezoelectric element 12 is large (piezoelectric elements 12a, 1
Vibration is generated (adding the vibration of 2b). This vibration is a longitudinal vibration in which the piezoelectric elements 12a and 12b are polarized in one direction over the entire plane, so that the piezoelectric elements 12a and 12b uniformly expand and contract from the upper surface to the lower surface.

Therefore, the first and third piezoelectric elements 10, 12
When a high frequency voltage is applied to (the electrode of), the spherical portion 7a of the rotor 7 rotates in the direction corresponding to the X1 axis due to the expansion and contraction of the first piezoelectric element 10 whose polarization change direction is set in the direction parallel to the X1 axis. At the same time, the output shaft 7b is tilted in the direction corresponding to the X1 axis.

When a high frequency voltage is applied to (the electrodes of) the second and third piezoelectric elements 11 and 12, the rotor changes due to expansion and contraction of the second piezoelectric element 11 whose polarization change direction is set in the direction parallel to the Y1 axis. The spherical portion 7a of 7 is rotated in the direction corresponding to the Y1 axis, and the output shaft 7b is tilted in the direction corresponding to the Y1 axis.

In the multi-degree-of-freedom drive device configured as described above, when the operation lever 31 is tilted by the user's operation (external force), the operation side is moved based on the tilt (angle position in the tilted direction). The slider 36 moves (horizontal movement) on one plane represented by the X2 axis and the Y2 axis. Then, the rotating bodies 38 to 41 rotate based on the movement (moved position) of the operation side slider 36. Then, the electric resistances of the X2 axis and Y2 axis second variable resistance portions 32 and 33 change based on the rotation of the rotating bodies 38 and 40, respectively. Then, from the target X2 axis position output circuit 34 to the comparison circuit 25
, The target X2-axis component signal Sx2 based on the electric resistance of the X2-axis second variable resistance section 32 is output, and the target Y2-axis position output circuit 35 informs the comparison circuit 25 of the electric resistance of the Y2-axis second variable resistance section 33. A target Y2-axis component signal Sy2 based on the above is output.

On the other hand, the slider 20 has the X1 axis and the Y axis based on the tilt of the output shaft 7b (the angular position in the tilting direction).
It is located on one plane represented by one axis. The rotating bodies 16 and 18 have a rotation angle based on the position of the slider 20. And the X1 axis and Y1
The first axial variable resistance portions 21 and 22 have electric resistances based on the rotation angles of the rotating bodies 16 and 18 that are respectively connected. Then, from the X1 axis position detection circuit 23 to the comparison circuit 2
5, the X1-axis component signal Sx1 based on the electric resistance of the X1-axis first variable resistance section 21 is output. In addition, the Y1 axis position detection circuit 24 to the comparison circuit 25 sends the Y1 axis component signal Sy1 based on the electric resistance of the Y1 axis first variable resistance section 22.
Is being output.

Then, the comparison circuit 25 compares the X1-axis component signal Sx1 with the target X2-axis component signal Sx2, and Y
The 1-axis component signal Sy1 is compared with the target Y2-axis component signal Sy2, and the comparison circuit 25 outputs signals of the comparison results to the actuation circuit 42. In the present embodiment, the comparison circuit 25 compares the electric resistance ratio based on the X1-axis component signal Sx1 with the electric resistance ratio based on the target X2-axis component signal Sx2. Further, in the present embodiment, the comparison circuit 25 compares the ratio of the electrical resistance based on the Y1-axis component signal Sy1 with the ratio of the electrical resistance based on the target Y2-axis component signal Sy2.

Then, in the operating circuit 42, the comparison circuit 25
The stator 6 is driven based on the signals of the respective comparison results. In the present embodiment, in the actuation circuit 42, the ratio of the electric resistance based on the X1-axis component signal Sx1 is the target X2.
The stator 6 (first and third piezoelectric elements 10 and 12) so as to match the ratio of electric resistance based on the shaft component signal Sx2
Is driven. Further, in the present embodiment, in the operating circuit 42, the stator 6 (the first resistance value) is adjusted so that the ratio of the electric resistance based on the Y1 axis component signal Sy1 matches the ratio of the electric resistance based on the target Y2 axis component signal Sy2. The second and third piezoelectric elements 11, 12) are driven.

When the stator 6 is driven, the spherical surface portion 7a of the rotor 7 is rotated and the output shaft 7b is tilted. Then, the slider 20 moves (horizontally moves) on one plane represented by the X1 axis and the Y1 axis based on the tilt (the angular position in the tilted direction). Then, the rotating bodies 16 to 19 rotate based on the movement (moved position) of the slider 20. Then, X1 axis and Y1 axis first
The variable resistors 21 and 22 are connected to the rotating body 1 respectively.
The electric resistance changes based on the rotations of 6 and 18. Then, from the X1 axis position detection circuit 23 to the comparison circuit 25, X1
The X1-axis component signal Sx1 based on the electric resistance of the first axis variable resistance section 21 is output, and the Y1-axis position detection circuit 24 sends the signal to the comparison circuit 25 to the Y1-axis based on the electric resistance of the Y1-axis first variable resistance section 22. The component signal Sy1 is output.

In the above operation, the electric resistance ratio based on the X1-axis component signal Sx1 matches the electric resistance ratio based on the target X2-axis component signal Sx2, and
The process is performed until the ratio of the electric resistance based on the Y1-axis component signal Sy1 matches the ratio of the electric resistance based on the target Y2-axis component signal Sy2. As a result, the tilt angle of the output shaft 7b (the angular position in the tilted direction) is controlled to the tilt angle of the operation lever 31 (the angular position in the tilted direction). Therefore, the position of a driven member (not shown) connected to the tip of the output shaft 7b is controlled.

Next, the characteristic effects of the above embodiment will be described below. (1) The position of the slider 20 that moves on one plane represented by the X1 axis and the Y1 axis that are orthogonal to each other is set to the X1 axis component signal Sx.
It is possible to recognize the rotation position of the spherical surface portion 7a that rotates about a plurality of axes, that is, the tilt angle (tilt position) of the output shaft 7b, simply by detecting the 1 and Y1 axis component signals Sy1.
As a result, the tilt angle (tilt position) of the output shaft 7b can be controlled with a simple configuration (without requiring complicated calculation means).

(2) On the stator 6, the first piezoelectric element 10 is polarized so as to tilt the output shaft 7b in the direction corresponding to the X1 axis, and the output shaft 7b is tilted in the direction corresponding to the Y1 axis. And a second piezoelectric element 11 that is polarized. Therefore, in the X1 and X2 axis directions, the output shaft 7b is tilted by the first piezoelectric element 10 (third piezoelectric element 12) based on the comparison result obtained by comparing the X1 axis component signal Sx1 and the target X2 axis component signal Sx2. Can be made. or,
Regarding the Y1 and Y2 axis directions, the Y1 axis component signal Sy1
The output shaft 7b can be tilted by the second piezoelectric element 11 (third piezoelectric element 12) based on the comparison result of the comparison between the target Y2 axis component signal Sy2. As a result, the tilt angle of the output shaft 7b can be controlled with a simple configuration without performing complicated calculations. For example, the X1 axis component signal Sx
1 and the target X2 axis component signal Sx2 are deviated,
Based on the comparison result, the output shaft 7b may be tilted by the first piezoelectric element 10 (third piezoelectric element 12) (the voltage supply to the second piezoelectric element 11 does not have to be performed), and therefore complicated calculation is performed. And control (supply of complicated voltage) are not required.

(3) With a simple polarization structure in which the polarization changing direction (direction orthogonal to the polarization boundary line) is set parallel to the X1 axis, the first structure for tilting the output shaft 7b in the direction corresponding to the X1 axis. The piezoelectric element 10 can be obtained. To obtain a second piezoelectric element 11 for tilting the output shaft 7b in a direction corresponding to the Y1 axis with a simple polarization structure in which the polarization changing direction (direction orthogonal to the polarization boundary line) is set in the direction parallel to the Y1 axis. You can

(4) When the operating lever 31 is tilted, the operating side slider 36 moves on one plane represented by the X2 axis and the Y2 axis which are orthogonal to each other based on the tilt. Then, the target X based on the moved position of the operation side slider 36
The 2-axis component signal Sx2 and the target Y2-axis component signal Sy2 are output to the comparison circuit 25. By doing this, the target X2
The axis component signal Sx2 corresponds to the X1 axis component signal Sx1,
Since the target Y2-axis component signal Sy2 and the Y1-axis component signal Sy1 correspond to each other, a simple comparison can be made (for the X1 and X2 axes and the Y1 and Y2 axes, respectively). Therefore, the tilt angles of the operation lever 31 and the output shaft 7b can be matched with each other without performing a complicated calculation.

(5) The X1-axis component signal Sx1 is obtained based on the electric resistance of the X1-axis first variable resistance portion 21 which changes according to the position where the slider 20 has moved. Further, the Y1-axis component signal Sy1 is obtained based on the electric resistance of the Y1-axis first variable resistance portion 22 which changes based on the position where the slider 20 has moved. Further, the target X2 axis component signal Sx2 changes based on the moved position of the operation side slider 36.
It is obtained based on the electric resistance of the biaxial second variable resistance portion 32. In addition, the target Y2-axis component signal Sy2 is obtained based on the electric resistance of the Y2-axis second variable resistance portion 33 that changes based on the moved position of the operation-side slider 36. By doing so, the X1 axis and Y1 axis component signals Sx1, Sy1 and the target X2 axis and target Y2 axis component signals Sx2, Sy2 can be easily obtained. Further, it is possible to easily compare the target X2 axis component signal Sx2 and the X1 axis component signal Sx1 and the target Y2 axis component signal Sy2 and the Y1 axis component signal Sy1.

(6) The comparison circuit 25 uses the X1-axis component signal S
The electrical resistance ratio based on x1 and the electrical resistance ratio based on the target X2 axis component signal Sx2 are compared, and the electrical resistance ratio based on the Y1 axis component signal Sy1 and the target Y2 axis component signal Sy2 are compared. The electrical resistance ratio is compared. Since the ratios are compared in this way, for example, even when the total electrical resistance of the X1-axis first variable resistance portion 21 and the total electrical resistance of the X2-axis second variable resistance portion 32 are different, etc., simply By comparison, a signal of the comparison result can be generated.

The above embodiment may be modified as follows. In the above embodiment, the X1 axis and Y1 axis component signals Sx
1 and Sy1 are detected based on the electric resistances of the X1 axis and Y1 axis first variable resistance portions 21 and 22 that change based on the position where the slider 20 has moved, but are detected by another configuration (method). You may do it.

For example, as shown in FIGS. 4 and 5, detection may be performed based on the voltage generated by the X1 axis and Y1 axis piezoelectric element sensors 52 and 53 based on the position where the slider 51 has moved. Specifically, the actuator 54
In the case 55 of FIG.
An extended portion 55b extending outward is formed at the middle and upper end portion, and a large square tubular portion 55c having sides longer than the square tubular portion 55a is provided upright on the outer edge of the extended portion 55b. Then, the four walls 55d to 55 forming the large square tubular portion 55c.
g (see FIG. 5), one wall 55 extending in the Y1 axis direction
An X1 axis piezoelectric element sensor 52 is embedded from the inside in d, and a Y1 axis piezoelectric element sensor 53 is embedded from the inside in one wall 55f extending in the X1 axis direction.

The output shaft 7b is moved to X1 based on its tilting.
Slider 5 that moves on one plane represented by the Y axis and the Y1 axis
1 is engaged. The slider 51 is formed in a substantially rectangular plate shape, a center hole 51a into which the output shaft 7b is inserted is formed in the center thereof, and four support walls 51b extending downward so as to substantially surround the center hole 51a are formed on the lower surface. Are formed. Then, the outside (X1
One end of a spring 59 is fixed so as to extend in the axial direction and the Y1-axis direction, and at the other end of the spring 59, walls 55d to 55g (X1-axis and Y1-axis piezoelectric element sensor 52, which form a large square tubular portion 55c). 53) and slidable sliding portions 60 are fixed.

The X1 axis and Y1 axis piezoelectric element sensor 5
2, 53 generate a voltage based on the pressing force from the sliding portion 60 based on the compression or extension of the spring 59. This X
The uniaxial piezoelectric element sensor 52 is electrically connected to the X1 axis position detecting circuit 61, and the Y1 axis piezoelectric element sensor 53 is electrically connected to the Y1 axis position detecting circuit 62. Also, X1
The axis and Y1 axis position detection circuits 61 and 62 are electrically connected to the comparison circuit 25. Then, the X1-axis position detection circuit 61 outputs the X1-axis component signal as the X1-axis component based on the voltage generated by the X1-axis piezoelectric element sensor 52 to the comparison circuit 25, and the Y1-axis position detection circuit 62 outputs the Y1-axis position. The Y1 axis component signal as the Y1 axis component based on the voltage generated by the piezoelectric element sensor 53 is output to the comparison circuit 25. still,
In this case, the spring 59, the X1 axis and Y1 axis piezoelectric element sensors 52 and 53, the X1 axis and Y1 axis position detection circuits 61 and 62.
Constitutes the position detecting means.

In the multi-degree-of-freedom drive configured as described above, when the output shaft 7b is tilted, the slider 51 is moved to X1 based on the tilt (angle position in the tilted direction).
It moves (horizontal movement) on one plane represented by the axis and the Y1 axis. Then, the spring 59 is compressed or expanded based on the movement (moved position) of the slider 51. Then, the X1 axis and Y1 axis piezoelectric element sensors 52, 53 generate a voltage based on the pressing force from the sliding portion 60 due to the compression or expansion of the spring 59. Then, the X1 axis position detection circuit 61
The X1 axis component signal based on the voltage generated by the X1 axis piezoelectric element sensor 52 is output from the Y1 axis piezoelectric element sensor 53 to the comparison circuit 25 and the voltage generated by the Y1 axis piezoelectric element sensor 53 is output from the Y1 axis position detection circuit 62 to the comparison circuit 25. Based on this, the Y1-axis component signal is output.

Even in this case, the same effects as the effects (1) to (4) of the above embodiment can be obtained. or,
The X1 axis and Y1 axis component signals can be easily obtained.
Further, it is possible to easily compare the target X2 axis component signal Sx2 and the X1 axis component signal and the target Y2 axis component signal Sy2 and the Y1 axis component signal.

Further, for example, as shown in FIG. 6 and FIG.
The detection may be performed based on the capacitances of the X1 axis and Y1 axis capacitance sensors 71 and 72 that change based on the moved position of the slider 51. This example is different mainly in that the X1 axis and Y1 axis piezoelectric element sensors 52 and 53 are replaced with X1 axis and Y1 axis capacitance sensors 71 and 72. The X1 axis and Y1 axis capacitance sensors 71, 72
Has a capacitance that changes based on the pressing force from the sliding portion 60. The X1 axis capacitance sensor 71 is electrically connected to the X1 axis position detection circuit 73, and the Y1 axis capacitance sensor 72 is electrically connected to the Y1 axis position detection circuit 74. Further, X1 axis and Y1 axis position detection circuits 73, 74
Are electrically connected to the comparison circuit 25. And
The X1-axis position detection circuit 73 includes an X1-axis capacitance sensor 71.
The X1 axis component signal as the X1 axis component based on the electrostatic capacitance of the Y1 axis position detection circuit 74 is output to the comparison circuit 25.
Is Y based on the capacitance of the Y1-axis capacitance sensor 72.
The Y1-axis component signal as the 1-axis component is output to the comparison circuit 25. In this case, the spring 59, the X1 axis and Y1 axis capacitance sensors 71 and 72, and the X1 axis and Y1 axis position detection circuits 73 and 74 constitute position detection means.

Even in this case, the same effects as the effects (1) to (4) of the above embodiment can be obtained. or,
The X1 axis and Y1 axis component signals can be easily obtained.
Further, it is possible to easily compare the target X2 axis component signal Sx2 and the X1 axis component signal and the target Y2 axis component signal Sy2 and the Y1 axis component signal.

In the above embodiment, the first piezoelectric element 10
Although the polarization direction of (1) is reversed by half of the plane and the polarization changing direction (direction orthogonal to the polarization boundary line) is set parallel to the X1 axis, the output shaft 7b can be tilted in a direction corresponding to the X1 axis. If possible, the polarization structure may be changed to another polarization structure.
In addition, the polarization directions of the second piezoelectric element 11 are reversed by half of the plane, and the polarization change direction (direction orthogonal to the polarization boundary line) is Y.
Although it is set in the direction parallel to the one axis, another polarization structure may be used as long as the output shaft 7b can be tilted in the direction corresponding to the Y1 axis. Even in this case, the same effects as the effects (1), (2), (4) to (6) of the above-described embodiment can be obtained.

The joystick 2 of the above embodiment
Is another operating means (for example, target X2) capable of inputting and outputting the target X2-axis component signal corresponding to the X1-axis component signal Sx1 and the target Y2-axis component signal corresponding to the Y1-axis component signal Sy1.
The axis component and the target Y2-axis component may be changed to those that can be input numerically). Even in this case, the same effects as the effects (1) to (3) of the above embodiment can be obtained.

The technical ideas that can be understood from the above-described embodiments and other examples will be described below along with their effects. (A) In the multi-degree-of-freedom drive device according to any one of claims 1 to 4, the position detection means has an X1-axis first variable resistance portion whose electric resistance changes based on a position where the slider has moved. And a Y1-axis first variable resistance part, and detects the X1-axis component and the Y1-axis component based on the electric resistance. By doing so, the electric resistances of the X1-axis first variable resistance portion and the Y1-axis first variable resistance portion change based on the position where the slider has moved,
The X1-axis component and the Y1-axis component are detected based on the electric resistance.

(B) In the multi-degree-of-freedom drive device according to any one of claims 1 to 4, the position detecting means includes:
It has an X1-axis piezoelectric element sensor and a Y1-axis piezoelectric element sensor in which a voltage generated based on a position where the slider is moved changes, and detects an X1-axis component and a Y1-axis component based on the voltage. Multi-degree-of-freedom drive. In this way, X
The voltage generated by the 1-axis piezoelectric element sensor and the Y1-axis piezoelectric element sensor changes, and the X1-axis component and the Y1-axis component are detected based on the voltage.

(C) In the multi-degree-of-freedom drive device according to any one of claims 1 to 4, the position detecting means is
An X1-axis capacitance sensor and a Y1-axis capacitance sensor whose capacitance changes based on the position of movement of the slider, and detecting the X1-axis component and the Y1-axis component based on the capacitance. A multi-degree-of-freedom drive device. By doing this, X1 is calculated based on the position where the slider is moved.
The capacitances of the axial capacitance sensor and the Y1-axis capacitance sensor change, and the X1-axis component and the Y1-axis component are detected based on the capacitances.

[0072]

As described in detail above, according to the present invention,
It is possible to provide a multi-degree-of-freedom drive device capable of controlling the tilt position of the output shaft of a rotor that rotates about a plurality of shafts with a simple configuration.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a multi-degree-of-freedom drive device according to the present embodiment.

FIG. 2 is an explanatory diagram for explaining first to third piezoelectric elements of the present embodiment.

FIG. 3A is a plan view of the actuator according to the present embodiment. (B) The bottom view of the slider of this embodiment.

FIG. 4 is a schematic diagram of another example of a multi-degree-of-freedom drive device.

FIG. 5 is a plan view of an actuator of another example.

FIG. 6 is a schematic diagram of another example of a multi-degree-of-freedom drive device.

FIG. 7 is a plan view of an actuator of another example.

[Explanation of symbols]

2 ... Joystick as operating means, 6 ... Stator, 7 ... Rotor, 10 ... First piezoelectric element, 11 ... Second piezoelectric element, 16, 18 ... Rotating body forming part of position detecting means, 20, 51 ... Slider, 21 ... X1 axis first variable resistance section, 22 ... Y1 axis first variable resistance section, 23, 61, 73.
X1 axis position detecting circuit which constitutes a part of the position detecting means, 2
4, 62, 74 ... Y1 axis position detection circuit forming part of the position detection means, 25 ... Comparison circuit, 31 ... Operation lever, 3
2 ... X2-axis second variable resistance part, 33 ... Y2-axis second variable resistance part, 34 ... Target X2 forming part of target position output means
Axis position output circuit, 35 ... Target Y2 axis position output circuit forming part of target position output means, 36 ... Operation side slider,
38, 40 ... Rotating body forming part of target position output means, 42 ... Actuating circuit, 52 ... X1 axis piezoelectric element sensor forming part of position detecting means, 53 ... Part of position detecting means Y1 axis piezoelectric element sensor, 59 ... Spring forming a part of position detecting means, 71 ... X1 axis capacitance sensor forming a part of position detecting means, 72 ... Y1 axis forming a part of position detecting means Capacitance sensor, 7a ... Spherical part, 7
b ... Output shaft, 8b ... Contact portion, Sx1 ... X1 axis component signal (X1 axis component), Sy1 ... Y1 axis component signal (Y1 axis component), Sx2 ... Target X2 axis component signal (target X2 axis component), Sy2 ... Target Y2-axis component signal (target Y2-axis component).

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 5B087 BC02 BC12 BC19 BC26 BC34                       DD03                 5H680 AA06 AA19 BB04 BB15 BB20                       BC10 CC03 CC06 DD01 DD14                       DD23 DD24 DD27 DD35 DD53                       DD55 DD65 DD66 DD73 DD88                       EE02 EE22 FF24 FF30 GG25

Claims (6)

[Claims] 1. A contact portion (8b) having a contact portion (8b).
(b) a stator (6) that generates vibrations in a plurality of directions, and a substantially spherical spherical portion (7a) that is pressed into contact with the contact portion (8b) and protrudes substantially opposite to the contact portion (8b). An output shaft (7b), and the spherical portion (7) based on vibrations in a plurality of directions generated by the stator (6).
a) rotates about a plurality of shafts and the output shaft (7)
In a multi-degree-of-freedom drive including a rotor (7) in which b) tilts, an X1 axis and a Y1 axis that are engaged with the output shaft (7b) and are orthogonal to each other based on the tilt of the output shaft (7b). The slider (20, 51) moving on one plane and the position moved by the slider (20, 51) are represented by the X1 axis component (Sx
1) and position detecting means (16, 18, 21 to 24, 52, 53, 5) for detecting the Y1 axis component (Sy1).
9, 61, 62, 71-74). 2. The multi-degree-of-freedom drive device according to claim 1, wherein a target X2 axis component (Sx2) corresponding to the X1 axis component (Sx1) and a target Y2 axis corresponding to the Y1 axis component (Sy1). Operation means (2) capable of inputting the component (Sy2)
, The X1 axis component (Sx1) and the target X2 axis component (Sx
2) and a comparison circuit (25) for comparing the Y1 axis component (Sy1) with the target Y2 axis component (Sy2).
And a drive circuit (42) for driving the stator (6) based on the comparison result of the comparison circuit (25). 3. The multi-degree-of-freedom drive device according to claim 1, wherein the stator (6) is polarized at right angles to each other so as to tilt the output shaft (7b) to an arbitrary position. (10) and a second piezoelectric element (11), wherein the X1 axis component (Sx1) of the position detecting means is the first piezoelectric element (1
0) is parallel to the polarization changing direction, and the Y1 axis component (Sy1) of the position detecting means is arranged to be parallel to the polarization changing direction of the second piezoelectric element (11). Degree drive. 4. The multi-degree-of-freedom drive device according to claim 2 or 3, wherein the operating means (2) is engaged with a tiltable operation lever (31) and the operation lever (31), Operating lever (3
1) An operation side slider (36) that moves on a plane represented by the X2 axis and the Y2 axis that are orthogonal to each other based on the tilting of 1), and the moved position of the operation side slider (36) is the target X2.
A multi-degree-of-freedom drive device comprising a shaft position (Sx2) and target position output means (32 to 35, 38, 40) for outputting as a target Y2 shaft component (Sy2). 5. The multi-degree-of-freedom drive device according to claim 4, wherein the position detection means (16, 18, 21 to 24, 52, 5).
3, 59, 61, 62, 71 to 74) are an X1-axis first variable resistance part (21) and an Y1-axis first variable resistance part (21) whose electric resistance changes based on the position of the slider (20) moved. 22), and detects the X1 axis component (Sx1) and the Y1 axis component (Sy1) based on the electric resistance, and the target position output means (32 to 35, 38, 40) includes the operation side slider ( 36) has an X2-axis second variable resistance portion (32) and an Y2-axis second variable resistance portion (33) whose electric resistance changes based on the moved position of the target X2-axis component (32) based on the electric resistance. A multi-degree-of-freedom drive device which outputs Sx2) and a target Y2-axis component (Sy2). 6. The multi-degree-of-freedom drive device according to claim 5, wherein the comparison circuit (25) has a ratio of an electric resistance of the X1 axis first variable resistance section (21) to the X2 axis second variable resistance. The ratio of the electric resistance of the part (32) is compared, and the Y1-axis first
The ratio of the electric resistance of the variable resistance part (22) and the Y2-axis second
The operating circuit (42) compares the electric resistance ratio of the variable resistance part (33) with the electric resistance ratio of the X1 axis first variable resistance part (21). 32) and the ratio of the electric resistance of the Y1-axis first variable resistance part (22) matches the ratio of the electric resistance of the Y2-axis second variable resistance part (33). A multi-degree-of-freedom drive device, characterized in that the stator (6) is driven as described above.