JP2007221973A5 - - Google Patents

Download PDF

Info

Publication number
JP2007221973A5
JP2007221973A5 JP2006042841A JP2006042841A JP2007221973A5 JP 2007221973 A5 JP2007221973 A5 JP 2007221973A5 JP 2006042841 A JP2006042841 A JP 2006042841A JP 2006042841 A JP2006042841 A JP 2006042841A JP 2007221973 A5 JP2007221973 A5 JP 2007221973A5
Authority
JP
Japan
Prior art keywords
relative movement
rotating body
movement speed
vibration
type actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006042841A
Other languages
Japanese (ja)
Other versions
JP4865354B2 (en
JP2007221973A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2006042841A priority Critical patent/JP4865354B2/en
Priority claimed from JP2006042841A external-priority patent/JP4865354B2/en
Publication of JP2007221973A publication Critical patent/JP2007221973A/en
Publication of JP2007221973A5 publication Critical patent/JP2007221973A5/ja
Application granted granted Critical
Publication of JP4865354B2 publication Critical patent/JP4865354B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (13)

回転体が少なくとも2自由度の回転運動を行う振動型アクチュエータにおいて、
前記回転体に設けられ、前記回転体の1つの回転方向に延伸した摩擦部材と、
円弧部を備え、該円弧部の内側の端が前記回転体に対向するとともに、該内側の端の一部が前記摩擦部材に接触する振動体と、
前記振動体に振動変位の方向が異なる複数の進行波を発生させ、前記回転体の回転方向を変更するために、前記複数の進行波の位相差を制御する振動制御手段と
を有することを特徴とする振動型アクチュエータ。
In a vibration type actuator in which a rotating body performs a rotational motion of at least two degrees of freedom
A friction member provided on the rotating body and extending in one rotation direction of the rotating body;
An oscillating body comprising an arc portion, an inner end of the arc portion facing the rotating body, and a part of the inner end contacting the friction member;
Vibration control means for controlling a phase difference between the plurality of traveling waves in order to generate a plurality of traveling waves having different vibration displacement directions on the vibrating body and to change the rotation direction of the rotating body. Vibration type actuator.
前記振動制御手段は、前記回転体が前記2自由度の回転運動のうちの一方の回転運動を行う際には、前記振動体と前記摩擦部材との間に生じる前記一方の回転運動のための駆動力の分布が前記振動体上を移動するように制御し、前記回転体が前記2自由度の回転運動のうちの他方の回転運動を行う際には、前記振動体と前記摩擦部材との間に生じる前記他方の回転運動のための駆動力の分布が前記振動体上を移動しないように制御することを特徴とする請求項1記載の振動型アクチュエータ。   When the rotating body performs one of the two-degree-of-freedom rotating motions, the vibration control means is configured to perform the one rotating motion generated between the vibrating body and the friction member. When the distribution of the driving force is controlled to move on the vibrating body, and the rotating body performs the other rotational movement of the two degrees of freedom, the vibration body and the friction member 2. The vibration type actuator according to claim 1, wherein a distribution of the driving force for the other rotational motion generated therebetween is controlled so as not to move on the vibrating body. 前記振動制御手段は、前記振動体に面内振動および面外振動を発生させることを特徴とする請求項1記載の振動型アクチュエータ。   The vibration type actuator according to claim 1, wherein the vibration control unit generates in-plane vibration and out-of-plane vibration in the vibrating body. 前記面内振動および面外振動は、前記振動体上を周方向に進行する進行波であることを特徴とする請求項3記載の振動型アクチュエータ。   4. The vibration type actuator according to claim 3, wherein the in-plane vibration and the out-of-plane vibration are traveling waves traveling in a circumferential direction on the vibrating body. 前記摩擦部材は、前記回転体の回転時に前記摩擦部材と前記回転体との間の面圧が一定となるように、前記延伸方向に沿って幅が変化していることを特徴とする請求項1記載の振動型アクチュエータ。 Claim wherein the friction member is, as the contact pressure between the friction member and the rotating member during rotation of the rotating body is constant, characterized that you have a width along the stretching direction is changed 1. The vibration type actuator according to 1. 前記摩擦部材は、前記回転体の回転時に前記摩擦部材と前記回転体との間の面圧が一定となるように、前記延伸方向に沿って厚さが変化していることを特徴とする請求項1記載の振動型アクチュエータ。 It said friction member, wherein said as the surface pressure between the friction member during rotation of the rotating body and the rotating body is constant, characterized that you have a thickness along the stretching direction is changed Item 2. The vibration type actuator according to Item 1. 前記回転体が前記回転運動を行うことで、前記振動体の前記摩擦部材との接触位置が変化することを特徴とする請求項1乃至6のいずれかに記載の振動型アクチュエータ。   The vibration type actuator according to claim 1, wherein a position of contact of the vibrating body with the friction member is changed by the rotational movement of the rotating body. 前記振動制御手段は、
前記2自由度の回転運動における各角度座標をX−Y座標平面に置き換えた座標系を指令座標系とし、前記回転体上の所定部分が前記指令座標系を単位時間に移動すべき距離を相対移動速度とし、該相対移動速度を指令する相対移動速度指令手段と、
前記回転体上の前記所定部分が移動すべき方向が、前記指令座標系におけるX軸に対してなす角度を相対移動方向とし、該相対移動方向を指令する相対移動方向指令手段と、
前記回転体上の前記所定部分の実際の相対移動速度を検出する実相対移動速度検出手段と、
前記回転体上の前記所定部分の実際の相対移動方向を検出する実相対移動方向検出手段と、
前記相対移動速度指令手段によって指令された相対移動速度と前記実相対移動速度検出手段によって検出された相対移動速度との差と、前記相対移動方向指令手段によって指令された相対移動方向と前記実相対移動方向検出手段によって検出された相対移動方向との差とに基づいて、前記振動体に印加すべき複数の交流電圧の振幅、周波数、および位相のうちの少なくとも1つを制御する交流電圧制御手段と
を含むことを特徴とする請求項1乃至7のいずれかに記載の振動型アクチュエータ。
The vibration control means includes
A coordinate system obtained by replacing each angular coordinate in the two-degree-of-freedom rotational motion with an XY coordinate plane is used as a command coordinate system, and a predetermined portion on the rotator relative to the distance that the command coordinate system should move in a unit time. A relative movement speed command means for commanding the relative movement speed as a movement speed;
A direction in which the predetermined portion on the rotating body should move is an angle formed with respect to the X axis in the command coordinate system as a relative movement direction, and a relative movement direction command means for commanding the relative movement direction;
An actual relative movement speed detecting means for detecting an actual relative movement speed of the predetermined portion on the rotating body;
An actual relative movement direction detecting means for detecting an actual relative movement direction of the predetermined portion on the rotating body;
The difference between the relative movement speed commanded by the relative movement speed command means and the relative movement speed detected by the actual relative movement speed detection means, the relative movement direction commanded by the relative movement direction command means and the actual relative speed AC voltage control means for controlling at least one of the amplitude, frequency, and phase of a plurality of AC voltages to be applied to the vibrator based on the difference from the relative movement direction detected by the movement direction detection means. The vibration type actuator according to claim 1, comprising:
前記回転体の2自由度の回転運動における回転中心に焦点を有し、前記回転体と一体となって回転運動する結像光学系と、
前記焦点位置に設けられ、前記結像光学系によって結像された画像を電気信号に変換する画像検出手段と、
前記画像検出手段によって得られた電気信号を基に、前記回転体上の所定部分の位置を検出する位置検出手段とを更に有し、
前記実相対移動速度検出手段および前記実相対移動方向検出手段は、前記位置検出手段によって時系列的に検出された前記回転体上の前記所定部分の各位置に基づき、前記実際の相対移動速度および相対移動方向をそれぞれ検出することを特徴とする請求項8記載の振動型アクチュエータ。
An imaging optical system that has a focal point at the center of rotation in the two-degree-of-freedom rotational motion of the rotating body and that rotates together with the rotating body;
An image detecting means provided at the focal position and for converting an image formed by the imaging optical system into an electrical signal;
Based on the electrical signal obtained by the image detection means, further comprising a position detection means for detecting the position of a predetermined portion on the rotating body,
The actual relative movement speed detection means and the actual relative movement direction detection means are configured to detect the actual relative movement speed and the actual relative movement speed based on the positions of the predetermined portion on the rotating body detected in time series by the position detection means. 9. The vibration type actuator according to claim 8, wherein each of the relative movement directions is detected.
前記交流電圧制御手段は、前記振動体に印加すべき複数の交流電圧の振幅および周波数を調整することによって、前記回転体の相対移動速度を制御するとともに、前記複数の交流電圧の位相を調整することによって、前記回転体の相対移動方向を制御することを特徴とする請求項8記載の振動型アクチュエータ。   The AC voltage control means controls the relative movement speed of the rotating body and adjusts the phase of the plurality of AC voltages by adjusting the amplitude and frequency of the plurality of AC voltages to be applied to the vibrating body. The vibration type actuator according to claim 8, wherein a relative movement direction of the rotating body is controlled by the control. 前記回転体の外側に前記振動体と一体に設けられた基準被写体と、
前記回転体の回転中心に焦点を有し、前記回転体と一体となって回転運動する結像光学系と、
前記焦点位置に設けられ、前記結像光学系によって結像された画像を電気信号に変換する画像検出手段と、
前記画像検出手段によって得られた電気信号を基に、前記基準被写体の位置を検出する位置検出手段とを更に有し、
前記振動制御手段は、
前記2自由度の回転運動における各角度座標をX−Y座標平面に置き換えた座標系を指令座標系とし、前記基準被写体が前記指令座標系を単位時間に移動すべき距離を相対移動速度とし、該相対移動速度を指令する相対移動速度指令手段と、
記基準被写体が移動すべき方向が、前記指令座標系におけるX軸に対してなす角度を相対移動方向とし、該相対移動方向を指令する相対移動方向指令手段と、
記基準被写体の実際の相対移動速度を検出する実相対移動速度検出手段と、
記基準被写体の実際の相対移動方向を検出する実相対移動方向検出手段と、
前記相対移動速度指令手段によって指令された相対移動速度と前記実相対移動速度検出手段によって検出された相対移動速度との差と、前記相対移動方向指令手段によって指令された相対移動方向と前記実相対移動方向検出手段によって検出された相対移動方向との差とに基づいて、前記振動体に印加すべき複数の交流電圧の振幅、周波数、および位相のうちの少なくとも1つを制御する交流電圧制御手段と
を含むことを特徴とする請求項1乃至7のいずれかに記載の振動型アクチュエータ。
A criteria object provided on the vibrator integrally on the outside of the rotating body,
An imaging optical system having a focal point at the rotation center of the rotating body and rotating in unison with the rotating body;
An image detecting means provided at the focal position and for converting an image formed by the imaging optical system into an electrical signal;
Based on the electric signals obtained by said image detection means further includes a position detecting means for detecting the position of the front Kimoto quasi object,
The vibration control means includes
The two degrees of freedom each angular coordinate a coordinate system is replaced onto the X-Y coordinate plane by the command coordinate system, relative movement speed distance to be moved in front Kimoto quasi subject the command coordinate system in unit time in rotational movement of And relative movement speed command means for commanding the relative movement speed;
Before Kimoto quasi object direction to be moved, the angle a relative movement direction makes with the X axis in the command coordinate system, and the relative movement direction command means for commanding said relative movement direction,
The actual relative movement speed detection means for detecting an actual relative movement speed before Kimoto quasi object,
The actual relative movement direction detection means for detecting an actual relative movement direction before Kimoto quasi object,
The difference between the relative movement speed commanded by the relative movement speed command means and the relative movement speed detected by the actual relative movement speed detection means, the relative movement direction commanded by the relative movement direction command means and the actual relative speed AC voltage control means for controlling at least one of the amplitude, frequency, and phase of a plurality of AC voltages to be applied to the vibrator based on the difference from the relative movement direction detected by the movement direction detection means. The vibration type actuator according to claim 1, comprising:
記基準被写体は、前記回転体の経度方向および緯度方向に延びた複数の線状体であり、
前記画像検出手段によって検出される画像は、前記X−Y座標平面に展開される格子状の画像であることを特徴とする請求項11記載の振動型アクチュエータ。
Before Kimoto quasi object is a plurality of linear body extending in the longitudinal direction and the latitudinal direction of the rotating body,
Image vibration-type actuator according to claim 11, characterized in that the image-shaped expanded Ru rated child in the X-Y coordinate plane detected by the image detection means.
記基準被写体は、複数の絶対位置検出用パターンであることを特徴とする請求項11記載の振動型アクチュエータ。 Before Kimoto quasi subject, the vibration type actuator according to claim 11 which is a multiple of the absolute position detecting pattern.
JP2006042841A 2006-02-20 2006-02-20 Vibration type actuator Expired - Fee Related JP4865354B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006042841A JP4865354B2 (en) 2006-02-20 2006-02-20 Vibration type actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006042841A JP4865354B2 (en) 2006-02-20 2006-02-20 Vibration type actuator

Publications (3)

Publication Number Publication Date
JP2007221973A JP2007221973A (en) 2007-08-30
JP2007221973A5 true JP2007221973A5 (en) 2010-07-08
JP4865354B2 JP4865354B2 (en) 2012-02-01

Family

ID=38498597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006042841A Expired - Fee Related JP4865354B2 (en) 2006-02-20 2006-02-20 Vibration type actuator

Country Status (1)

Country Link
JP (1) JP4865354B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4398990B2 (en) * 2007-03-28 2010-01-13 株式会社東芝 Drive mechanism
KR102449870B1 (en) * 2015-05-15 2022-10-04 삼성전자주식회사 Piezoelectric ultrasonic motor and operation method of the piezoelectric ultrasonic motor
CN110434897B (en) * 2019-06-12 2021-01-01 北京航空航天大学 Compact bionic eye device based on two-degree-of-freedom electromagnetic drive rotating mechanism
DE102021100732A1 (en) 2021-01-15 2022-07-21 Physik Instrumente (PI) GmbH & Co KG angle adjustment device

Similar Documents

Publication Publication Date Title
KR100912104B1 (en) Device for generating stiffness and method for controling stiffness and joint of robot manipulator comprising the same
EP2584435A2 (en) Input Device
JP5304788B2 (en) Vibration actuator
JP5264225B2 (en) Multi-degree-of-freedom drive device and imaging device including the same
JP6837002B2 (en) Methods and equipment for controlling piezoelectric motors
ITMI20090210A1 (en) HEAD FOR CONTINUOUS PRECISION MACHINING ON THREE-DIMENSIONAL BODIES AND MACHINING MACHINE INCLUDING THIS HEAD
JP2007221973A5 (en)
EP2364822A1 (en) Industrial robot comprising a pendulum stopper on the base
JP2008253078A5 (en)
KR101677955B1 (en) Electromechanic microsensor
JP2017146603A5 (en)
JP6391252B2 (en) Robot equipment
US11290030B2 (en) Drive device and method for linear or rotary positioning
JP4865354B2 (en) Vibration type actuator
JP5036669B2 (en) Position detection device for moving parts, 2-DOF actuator
JP6075984B2 (en) Actuator and control method of actuator
JP7134810B2 (en) Control method and drive control device for vibration type actuator, vibration type drive device and device
JP2011104733A (en) Robot
JP5627655B2 (en) Multi-degree-of-freedom drive
JP2011129064A (en) Controller
JP6448406B2 (en) Vibrating actuator, control method therefor, and optical instrument
JP2015001496A (en) Parallel mechanism with flat three degrees of freedom
JP2000009492A5 (en) 2D absolute position sensor, robot and robot controller
JP2012145493A5 (en)
JP6369357B2 (en) Scanning device