JP2003324091A5 - - Google Patents
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- Publication number
- JP2003324091A5 JP2003324091A5 JP2002126400A JP2002126400A JP2003324091A5 JP 2003324091 A5 JP2003324091 A5 JP 2003324091A5 JP 2002126400 A JP2002126400 A JP 2002126400A JP 2002126400 A JP2002126400 A JP 2002126400A JP 2003324091 A5 JP2003324091 A5 JP 2003324091A5
- Authority
- JP
- Japan
- Prior art keywords
- ruthenium film
- electrode
- processing
- substrate
- electrolytic processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 10
- 229910052707 ruthenium Inorganic materials 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 6
- 239000003792 electrolyte Substances 0.000 claims 3
- 150000004820 halides Chemical class 0.000 claims 3
- 238000003672 processing method Methods 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims 1
- 229910052794 bromium Inorganic materials 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- 229910052740 iodine Inorganic materials 0.000 claims 1
- 239000011630 iodine Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910021642 ultra pure water Inorganic materials 0.000 claims 1
- 239000012498 ultrapure water Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002126400A JP3833139B2 (ja) | 2002-04-26 | 2002-04-26 | 電解加工装置 |
| US10/337,357 US7101465B2 (en) | 2001-06-18 | 2003-01-07 | Electrolytic processing device and substrate processing apparatus |
| US10/669,468 US7638030B2 (en) | 2001-06-18 | 2003-09-25 | Electrolytic processing apparatus and electrolytic processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002126400A JP3833139B2 (ja) | 2002-04-26 | 2002-04-26 | 電解加工装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003324091A JP2003324091A (ja) | 2003-11-14 |
| JP2003324091A5 true JP2003324091A5 (https=) | 2005-09-15 |
| JP3833139B2 JP3833139B2 (ja) | 2006-10-11 |
Family
ID=29540826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002126400A Expired - Fee Related JP3833139B2 (ja) | 2001-06-18 | 2002-04-26 | 電解加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3833139B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4978292B2 (ja) * | 2007-04-19 | 2012-07-18 | 東ソー株式会社 | ルテニウムのエッチング用組成物の除害方法 |
| KR102820838B1 (ko) | 2019-02-13 | 2025-06-13 | 가부시끼가이샤 도꾸야마 | 오늄염을 포함하는 반도체 웨이퍼의 처리액 |
| JP2024033198A (ja) * | 2022-08-30 | 2024-03-13 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
-
2002
- 2002-04-26 JP JP2002126400A patent/JP3833139B2/ja not_active Expired - Fee Related
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