JP2003323971A - Ultra high temperature and ultra high speed uniformly heating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ultra high temperature and ultra high speed uniformly heating device for giving high speed temperature rise to a whole heated object up to a ultra high temperature region in a short time and holding the heated object at a uniform temperature. <P>SOLUTION: The heated object 8 provided in a vacuum chamber 7 is irradiated with an infrared ray by using two infrared radiation heaters A, B provided in the opposite direction for giving temperature rise to the heated object 8 up to a higher temperature than room temperature. A high frequency induction heating coil 18 is provided on the outer periphery of the heated object 8 for supplying a high frequency to the heated object 8 which attains a high temperature at a ultra high speed with the infrared radiation heat. Thus, ultra high speed temperature rise up to a ultra high temperature region and uniform temperature distribution are achieved. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to silicon (Si).
This is a heating device for ultra-high-speed heating of materials such as silicon carbide (Sic) in a gas atmosphere in vacuum to ultra-high temperatures, clean heating, and uniform heating. The heating source makes use of the features of the infrared radiation heating method and the high frequency induction heating method,
It is a complex heating device for raising the temperature.

[0002]

2. Description of the Related Art One of the conventional heating methods is to set a resistance heater in a vacuum chamber to raise the temperature of a heated object. Next, in the high-frequency induction heating method, a coil-shaped high-frequency generation source was set in a vacuum chamber, and the heating object was heated by high-frequency induction heating. Also, there is a heating system which is a combination of the resistance heater and the high frequency induction heating system. Further, the surface heating type infrared radiation heating apparatus of Japanese Patent Application Laid-Open No. 10-82589 filed by the applicant of the present invention is one for setting a heating object in a vacuum chamber and radiating infrared rays from the atmosphere side to raise the temperature. there were. Furthermore, the applicant of the present invention previously filed Japanese Patent Application Laid-Open No. 2001-15248.
In the infrared radiant heating device, a heating object is set in a vacuum chamber, and infrared rays are introduced from both the upper and lower sides of the atmosphere side to raise the temperature.

[0003]

The resistance heater of the prior art causes the generation of gas from the heating element to contaminate the heating object and lower the degree of vacuum, so that clean heating in a high vacuum and rapid rising. Warm was difficult. Next, in the conventional high-frequency induction heating method, the heating object is limited to an electrically good conductor, and it is difficult to rapidly heat and heat a material such as silicon or silicon carbide having a large electric resistance in a low temperature range from room temperature. It was Further, in the method using the combination of the resistance heating heater and the high frequency induction heating method, as described above, there is contamination by the gas generated from the heating element, so that high-speed temperature rising and clean heating are difficult. Further, the conventional surface heating type infrared radiant heating device has many weak points such as a large amount of infrared ray attenuation in the soaking and heating mechanism part, which lowers the heating efficiency, making it difficult to raise the temperature of the heated object to the ultra-high temperature region. Met. The infrared radiant heating device of the conventional technology is capable of heating and heating a heated object at an extremely high temperature and a very high speed.
The size of the heated material that can be uniformly heated was small, and it was difficult to uniformly heat and heat the larger area.

[0004]

SUMMARY OF THE INVENTION In order to solve the above problems, the present invention provides a heating object provided in a vacuum chamber with infrared rays by two infrared radiation heaters provided in opposite directions. Irradiated to heat the heated material to a temperature higher than room temperature, and further equipped with a high-frequency induction heating coil on the outer peripheral portion of the heated object, which reaches a high temperature at an ultra-high speed by the infrared radiation heating. A high frequency was supplied to the device to raise the temperature at an extremely high temperature up to an ultra-high temperature range and to obtain a uniform temperature distribution. That is, a composite heating method is adopted by taking advantage of the characteristics of the infrared radiation heating method and the high frequency induction heating method. The main role of the infrared radiant heating method is to raise the temperature of the heated object to a high temperature region from room temperature. The role of the high frequency induction heating method is to raise the temperature from a high temperature region to an ultra-high temperature region, and at the same time maintain the temperature uniformity of the heated object. In addition, both heating methods enable clean heating and heating.

The infrared radiant heater is equipped with an infrared ray generating part having an infrared ray lamp and a composite type reflection mirror, and a vacuum chamber having a transparent quartz disk for transmitting infrared rays. The infrared ray generated by the infrared ray lamp is vacuum or various gases. Irradiate the heating object provided in the vacuum chamber under the atmosphere,
One infrared radiation heater for heating one surface side of the heating object provided in the vacuum chamber, and the other infrared ray for heating the other surface side of the heating object on the side opposite to the one infrared radiation heater. It consists of a radiant heater. 00
9. The induction coil for high frequency induction heating
It is installed in the outer peripheral part near the heated object provided in the vacuum chamber having the infrared transmitting quartz disk, and its excitation power source is guided by the vacuum flange into the vacuum chamber having the infrared transmitting quartz disk. Is characterized by.

The heating object setting section is provided with a crucible made of metal and a quartz support table for supporting the crucible in a vacuum chamber having the quartz disk for transmitting infrared rays and a vacuum flange for introducing high frequency, and the heating object is placed therein. However, a heat insulating cylinder is provided on the outer peripheral portion thereof. Further, an induction coil for high frequency generation is installed and configured on the outer peripheral portion thereof.

The temperature of the heated object is raised by radiating infrared rays to the heated object by means of infrared radiant heaters installed facing each other while measuring the temperature of the heated object using an ultrahigh temperature thermocouple. Be seen. Also, the temperature rise by high frequency induction heating is
High frequency is supplied to the heating object while measuring the temperature of the side surface of the metal crucible. In either case, the temperature measurement is characterized in that the temperature is measured using an ultrafine ultrahigh temperature thermocouple in which the temperature rise of the thermocouple itself does not occur due to high frequency induction.

The composite reflection mirror of the above infrared radiation heater comprises a conical reflection mirror and a cylindrical reflection mirror. The reflection mirror surface is gold-plated so that infrared rays are most reflected, and the infrared radiation is emitted from the infrared lamp. The infrared rays radiated and moved almost in parallel by the compound reflection mirror, transmitted through the transparent quartz disk on the upper part of the vacuum chamber, and irradiated on the heating object in the vacuum chamber, and the compound mirror surface was raised by the infrared irradiation from the infrared lamp. In order to prevent temperature, its outer periphery forms a water tank structure, and when the infrared lamp is turned on, cooling water always flows out from the lower part to the upper part of the water tank.

The vacuum chamber is made of a metal material and has two quartz disks for transmitting infrared rays, one vacuum flange for inputting high frequency induction power, a vacuum exhaust flange for various gas outlets, and a vacuum. Includes multiple vacuum flanges for metering. Furthermore, in order to prevent the temperature of the vacuum chamber itself from rising, it is characterized in that it has a water cooling groove in its outer peripheral portion, and that the cooling water always flows out from the lower part to the upper part during the temperature rise of the heating object.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described based on examples with reference to FIGS. The infrared radiant heater of the ultra-high temperature / ultra-high speed / uniform heating device of the present invention is composed of a pair of infrared radiant heaters A and B, which are respectively located on opposite sides, forming a pair. Since A and B are generally positioned above and below in the vertical direction, a description will be given based on the preferred embodiment positioned above and below, but the pair of infrared radiant heaters A and B are May be located at. FIG. 1 is a front view showing a preferred embodiment of an infrared radiant heater A of an ultra-high temperature / ultra-high speed / uniform heating device of the present invention, and FIG. 2 is an upper infrared radiant heater A and a lower infrared radiant heater. FIG. 3 is a sectional front view showing an ultra-high temperature / ultra-high speed / uniform heating device including a heater B, a high-frequency induction coil, a heating material mounting portion, and a vacuum chamber. FIG. 3 is an explanatory diagram of the heating material placing portion and the heating action.

The infrared radiant heater A comprises an infrared lamp 2,
It is composed of a conical reflection mirror 3 which reflects infrared rays, a cylindrical reflection mirror 4 and a cooling water tank 5. The infrared lamp 2 generates infrared rays by supplying an appropriate amount of commercial power from the power supply section. The infrared rays are generated in a three-dimensional direction, but the straight traveling light I ₁ travels straight in the atmosphere, passes through the transparent quartz disk 6, and then enters the vacuum chamber 7, travels straight in the vacuum, and heats the object 8. Is irradiated to the center of the. The infrared rays generated in the circumferential direction of the infrared lamp 2 are reflected by the conical reflection mirror 3 and then go straight in the atmosphere toward the heating object 8. The infrared ray I ₂ is transmitted through the transparent quartz disk 6 and the vacuum chamber 7
The light is incident on the inside, goes straight through the vacuum, and is irradiated to the outer peripheral portion of the heating object 8. The heating object 8 receives the infrared rays I ₁ and I ₂ and absorbs the infrared rays I ₁ and I ₂ , and the temperature thereof rises.

Conical reflection mirror 3 and cylindrical reflection mirror 4
The material of is a stainless steel material, and these reflection mirror surfaces are plated with gold, which has a high infrared reflection efficiency. In the cooling water tank 5, cooling water is constantly made to flow from the cooling water inlet 23 to the cooling water outlet 24 to suppress the temperature rise of each reflection mirror surface and prevent burning. The air-cooling mechanism 9 has a role of preventing the temperature of the outer peripheral portion of the infrared lamp 2 from rising, and a function of ventilating the air that has accumulated inside the conical reflecting mirror 3 and the cylindrical reflecting mirror 4 and is heated by the heat of the infrared lamp to the outside. ing. Further, the infrared radiator A can be fixed to the vacuum chamber by the metal bolt 10. Further, a water cooling groove 25 is provided on the outer peripheral portion of the vacuum chamber 7 so that the cooling water always flows from the lower part to the upper part during the temperature rise of the superheated material to prevent the temperature rise of the vacuum chamber itself.

The shape of the lower infrared radiant heater B is almost the same as that of the upper infrared radiant heater A, but the mounting position on the vacuum chamber 7 is opposite, and the outflow direction of the cooling water is also opposite. There is. Also, the upper infrared radiation heater A
Is attached to the vacuum chamber upper lid 14 together with the transparent quartz disk 6, vacuum-sealed by the O-ring 13, and attached to the upper opening of the vacuum chamber 7. The infrared radiation heater A has a function of allowing the upper lid 14 of the infrared radiation heater A to be lifted up and inserting the heating object 8 into and out of the vacuum chamber 7 through its opening, but the lower infrared radiation heating device section B has Does not have those functions.

Since the transparent quartz disk 6 is vacuum-sealed by the O-ring 12 and attached to the upper part of the vacuum chamber 7, infrared rays generated by the infrared radiation heater A on the atmosphere side are transmitted through the transparent quartz disk 6. It has a function of irradiating the heating object 8 installed in the vacuum chamber 7 which is transparent and in a vacuum state. The radiation wavelength band of the infrared lamp 2 with which the heated article 8 is irradiated is 700 nm to 3000 nm.
Is. When the wavelength of the infrared lamp 2 is near 900 nm in the radiant wavelength band, the maximum radiant intensity is obtained. Further, infrared rays in this wavelength band have the physical properties of radiating, transmitting, reflecting and refracting in the same manner as light.
When it illuminates a transparent object, it penetrates the object,
When irradiated to other objects, it is absorbed by that object,
It has the property of raising the temperature of the object.

The heating object 8 is a metal (molybdenum) crucible 1.
The metal crucible 15 is held in the vacuum chamber 7 at a substantially central portion thereof by a cylindrical quartz support 16. A heat shield cylinder 17 is also supported by the quartz support 16 on the outer peripheral portions thereof, and a cylindrical high frequency induction coil 18 is held on the outer periphery by a vacuum flange 20. This vacuum flange is vacuum-sealed by an O-ring 21.

To insert the heating object 8 into the vacuum chamber, first, the infrared radiation heater A and the vacuum chamber upper lid 14 are inserted.
At the same time, it is pulled up to the upper part and placed on the upper part of the metal crucible 15 which is held in the substantially central part of the vacuum chamber 7 through the upper opening part of the vacuum chamber 7. Vacuum chamber 7
The inside can be evacuated by connecting a vacuum exhaust device to the vacuum exhaust port.

As described above, infrared rays are transmitted through a transparent object, but other objects absorb infrared rays when they are irradiated with the infrared rays, and the object has a property of rapidly increasing in temperature. As a method of raising the temperature of the heated object 8, first, the vacuum chamber 7 is attached to the upper and lower surfaces in the atmosphere. Electric power is supplied to the infrared radiant heaters A and B from the power supply unit to turn on the infrared lamp 2. The infrared rays I ₁ and I ₂ generated by the infrared lamp 2 pass through the transparent quartz disk 6, enter the vacuum chamber 7, and are irradiated onto the heating object 8 from both upper and lower surfaces. The heating object 8 absorbs the infrared rays and rapidly rises to a high temperature. At this time, the temperature of the heating object 8 can be measured by the thermocouple 22 in contact with it. Further, the reached temperature of the heated material 8 is, for example, when the infrared lamps of the upper and lower infrared radiation heaters A and B each output 2 kW and 4 kW in total are used.
It depends on the infrared absorption rate of the
Can reach 200 ℃.

In the high frequency induction heating method, a good conductive material such as a metal having a small electric resistance has a high heating efficiency and can quickly raise the temperature of the heated object to an ultra-high temperature region, but the insulator does not raise the temperature. Almost never. Silicon and silicon carbide have a high electric resistance from room temperature to around 800 ° C, and it is difficult to raise the temperature by high frequency induction heating, but at higher temperatures, the electric resistance decreases and heating by the high frequency induction heating method is performed. It is possible to raise the temperature of the object. Here, after the temperature of the heating object 8 reaches around 1000 ° C. by the infrared heating method, a high frequency is supplied to the high frequency coil placed on the outer peripheral portion thereof. The high frequency induction coil 18 is made of a copper pipe, has a structure in which cooling water can flow, is located on the outer peripheral portion of the heat shield cylinder, and is supported by a vacuum flange 20. The high frequency output and the cooling water are supplied from the high frequency oscillator and tap water on the atmosphere side through the vacuum flange 20. The heating object 8 and the metal crucible 15 can be heated at an ultrahigh speed to an ultrahigh temperature region by high frequency induction heating. For example, a high-frequency output of 20KH is applied to a silicon carbide disk φ50x0.3t that is heated to around 1000 ° C by the infrared heating method described above.
When Z is supplied at 5 kW, the temperature of the heated product 8 can be raised to 1800 ° C. within about 1 minute.

The heat shield cylinder 17 installed in the high frequency coil 18 and the metal crucible 15 has a radiant energy generated from the heat shield 8 and the metal crucible 15 when they reach an extremely high temperature. It has a role of blocking the components radiating to the inside and increasing the heating efficiency of the heating object 8. The material used here is boron nitrite (BN) that has heat resistance up to an ultrahigh temperature, does not heat up due to induction, and generates little gas.

When irradiating the disk-shaped heating object 8 with infrared rays from both the upper and lower surfaces, it is very difficult to raise the temperature of the disk-shaped heating object 8 while maintaining the uniform temperature. The infrared ray I ₁ radiated from the infrared lamp 2 goes straight, passes through the transparent quartz disk 6 and is irradiated near the center of the heating object 8 in the vacuum chamber 7, and contributes to the temperature rise of that part. Further, the infrared ray I ₂ radiated in the horizontal direction from the infrared lamp 2 and reflected by the conical reflection mirror passes through the transparent quartz disk 6 like the infrared ray I _{1 of the} straight traveling component, and the heating object 8 in the vacuum chamber 7
It is irradiated near the outer circumference of and contributes to the temperature rise of that part. However, the infrared ray I ₂ radiated horizontally from the infrared lamp ₂
Is slightly attenuated when reflected by the conical reflecting mirror.
Further, the flight distance to reach the heated article 8 in the vacuum chamber 7 is longer than the infrared ray I ₁ , and the infrared radiation intensity is also lower than I ₁ . Therefore, even with the infrared rays generated from the same infrared lamp 2, the infrared intensity that contributes to the temperature rise of the heating object 8 is large in the central part of the heating object 8 and small in the outer peripheral part.

Further, when the heated object 8 reaches a high temperature, the radiant heat radiated from the heated object 8 to the outside is small in the vicinity of the center of the heated object 8 and is large in the outer peripheral portion. It is high and the temperature of the outer peripheral portion is lower than that. Therefore, it is difficult to maintain the temperature of the heating object 8 at a uniform temperature only by infrared radiation heating.

Another role of the high frequency induction heating is that the heating object 8 and the metal crucible 15 which have a non-uniform temperature distribution by the heating of the infrared radiation heating method alone as described above, have a high frequency coil from the outer peripheral portion thereof. The high frequency energy 18 is applied by 18 to provide a function of keeping the heating object 8 at a uniform temperature in the ultrahigh temperature region. The heat generation effect of high frequency induction heating is determined by the shape of the heating object and the shape and installation state of the induction coil. For example, as shown in (a of FIG. 3), the disk-shaped heating object 8 is a metal crucible (a cylinder is attached to the outer circumference of the disk).
When it is placed on the upper part of 15 and the high frequency coil is installed on the outer peripheral part thereof, the following heat generating action occurs. First, the heat generation effect of infrared rays rapidly rises upon irradiation of the infrared rays, but for the reasons described above, the temperature of the heating object 8 and the metal crucible 15 tends to be high in the center and low in the outer peripheral portion (Fig. 3b). The heating effect by the high frequency induction heating causes the heating object 8 and the metal crucible to rapidly rise in temperature due to the high frequency induction. The central part has the property of becoming less. Therefore, the temperature part distribution also has the property that the outer peripheral part temperature is high and the central part is low, which is a distribution state opposite to the temperature distribution due to infrared heating (c in FIG. 3). The temperature of the heating object 8 and the metal crucible 15 is able to obtain a substantially flat temperature distribution as shown in (d of FIG. 3) due to the heat generation effect of both the infrared heating and the high frequency induction heating.

Therefore, even if the heating object 8 is a material having a high resistance in a low temperature region such as silicon or silicon carbide, when it reaches a high temperature region of 800 ° C. or higher by infrared heating, high frequency induction heating works effectively, and A metal crucible 1 on which a heating object 8 is placed and which has already reached a high temperature by high frequency induction heating.
It is possible to reach the ultra-high temperature while maintaining good temperature distribution by receiving heat from No. 5. For example, the infrared radiation heating system alone has a temperature distribution of about ± 70 to 8 at around 1000 ° C.
Although it becomes 0 ° C., in the combined heating method of the infrared radiation heating method and the induction heating method, it is possible to keep at about 1800 ° C. ± 10 ° C. In the above description, the role of infrared radiant heating is mainly described in the low temperature region, and the role of high frequency heating is mainly in the super high temperature region. However, it is not always clearly distinguished and the high frequency heating method is Even in the low temperature region, it plays a role of generating a little heat. Metal crucible 18 for placing heated material
In the low temperature region, the temperature rises due to the heat generation effect of the high frequency induction heating, and the heat is supplied from the lower portion of the heating material 8 to the bottom portion of the heating material 8 by heat conduction, thereby contributing to the temperature increase. In addition, infrared rays also contribute to an increase in the temperature distribution in the central portion of the heating object 8 in the ultrahigh temperature region.

The temperatures of the side surface of the heating object 8 and the metal crucible 15 are controlled by using metal thermocouples 22 and 19, respectively. Generally, in a good conductor such as metal, the temperature rises due to its own heat generation effect due to high frequency induction. However, even a metallic material receives a derivative on its inner surface and generates heat, but a limited depth portion near the surface is not affected by induction heating and does not generate heat. In particular, an extremely fine metal wire does not heat up due to induction heating. By utilizing the property of the present invention, the temperature can be measured by using an extremely fine thermocouple.

The temperature sensor 22 mainly supplies the appropriate amount of infrared rays from the infrared radiation heaters A and B while measuring the temperature of the heating object 8. The power supply unit also has an automatic temperature control function, and the temperature of the heating object 8 can be automatically controlled by a feedback method while measuring with the temperature sensor 22 of the heating object 8.

The temperature sensor 19 mainly supplies the high frequency induction output while measuring the temperature of the outer peripheral portion of the metal crucible.
The high-frequency oscillator section also has a function of controlling the temperature by automatically changing the output while measuring the temperature of the metal crucible 15 with the temperature sensor 19.

FIG. 4 shows an embodiment in which the induction coil 18 for high frequency generation is provided outside the vacuum chamber 7.
In this embodiment, a vertically moving mechanism 26 is provided to vertically move the infrared radiation heater A on the upper side and the upper lid 14 of the vacuum chamber. In this embodiment, the vacuum chamber is made of a material (transparent quartz) that does not generate heat due to high frequency, and the vacuum seal is made by interposing an O ring on the upper lid and an O ring on the lower flange. Be seen.

[0028]

EFFECT OF THE INVENTION In the infrared radiant heating method, the heating material can be heated at a very high speed and can be cleaned cleanly, but it is difficult to maintain the temperature uniformity in a large heating material. The high-frequency induction heating method can easily raise the temperature at an extremely high speed, but it is required that the heated object be an electrically good conductor such as metal. In the ultra-high temperature / ultra high speed / uniform heating apparatus of the present invention, the heating effect of the heating object is mainly carried out by the infrared radiation heating method from room temperature to the high temperature area, and by the high frequency induction heating method from the high temperature to the ultra high temperature area. By adopting this composite heating system, not only good electrical conductors such as metals, but also semiconductor materials such as silicon and silicon carbide, which have high resistance even at room temperature, have effects of ultra-high temperature heating up to ultra-high temperature, clean heating, and uniform heating. .

The ultra-high temperature / ultra-high speed / uniform heating apparatus of the present invention comprises an infrared ray generating section having an infrared ray lamp, a conical reflecting mirror and a cylindrical reflecting mirror, a vacuum chamber and a high frequency induction coil, and the infrared ray generated by the infrared ray lamp. Is an infrared radiation heater for irradiating a heating object provided in the vacuum chamber under a vacuum or gas atmosphere, and one infrared radiation heating one surface side of the heating object provided in the vacuum chamber Since the heater and the other infrared radiation heater for heating the other surface of the heating object are provided on the side opposite to the one infrared radiation heater, there is an effect that the upper and lower surface temperatures of the heating object can be heated equally. The heating object is placed in a metal crucible, and an induction coil for high frequency induction heating is provided on the outer peripheral portion of the heating object. The object to be heated and the metal crucible are subjected to high-frequency induction and generate heat from the circumferential side, and the object can be heated at an extremely high temperature to an ultra-high temperature range. Moreover, the heating of the object to be heated from above and below by the infrared radiation heater ( It has an effect of keeping the entire heated object at a uniform temperature by a synergistic effect with infrared radiation heating).

In order to raise the temperature of the heating object provided in the vacuum chamber, infrared rays generated by the two infrared ray generating portions on the atmosphere side are transmitted through the transparent quartz disk, and are contactlessly placed in a vacuum or gas atmosphere. Irradiation of infrared rays to a certain heated object does not contaminate the heated object, resulting in a clean heating effect. When power is supplied to the infrared lamp, infrared rays are generated within a few seconds, and the infrared rays are irradiated to the heating object in vacuum, and the heating object absorbs the infrared rays and the temperature of the heating object can be rapidly raised. And even objects such as silicon and silicon carbide that do not have electrical conductivity in the low temperature range from room temperature can be heated to a temperature range that has electrical conductivity in a short time by rapid heating with infrared rays, and by induction heating action by high frequency output there. It has an ultra-high-speed heating effect. 1
The temperature of 800 ° C can be reached within 1 minute.

The main exothermic action (effect) of the heated object is due to the heating action from the upper and lower sides by infrared rays and the exothermic action from the circumference of the heated item by high frequency induction, but the heated item is usually placed in a metal crucible. There is. This metal crucible also heats up due to the heat generation effect of infrared rays and high frequency induction, and heat is supplied to the heating object, so that the temperature uniformity of the entire heating object is favorably affected. Furthermore, the heat insulating cylinder installed on the outer periphery of the
Radiation and heat radiation from the heating object or metal crucible in an ultrahigh temperature state is blocked in the outer peripheral direction, increasing the heating effect of the heating object and maintaining a uniform temperature distribution. The metal crucible shown here may be of various types depending on the shape, size, material, etc. of the heating object, but here it is φ50 × 1.
This is a typical example of placing a heated product of about t.

By adopting a dual heating method for heating a heated object in a vacuum or in a gas atmosphere from both the upper and lower sides and high frequency induction heating from the circumferential direction of the object, a comparison which was difficult in the past was made. Ultra-high speed heating is possible up to the ultra-high temperature range even for heated objects with extremely large areas. Until now, the size of the heated material was about 10 mmφ, but in the present invention,
It is possible to rapidly raise the temperature of a disk-shaped heated product having a size of mmφ to an ultrahigh temperature region of 1800 ° C. or more, and it is possible to obtain an extremely good temperature distribution of ± 10 ° C. in terms of temperature uniformity.

An extremely fine thermocouple is used for temperature measurement, so that accurate temperature measurement can be performed without being affected by heat generation due to high frequency induction, and a power supply unit (temperature control It has the effect of raising or holding the temperature of the heated material at a desired rate.

[Brief description of drawings]

FIG. 1 is a front view showing a preferred embodiment of the device of the present invention.

FIG. 2 is a sectional front view of the same.

FIG. 3 is an explanatory view of a heating material placing portion and a heating action.

FIG. 4 is a front view of an embodiment in which a high frequency induction coil is provided outside a vacuum chamber.

[Explanation of symbols]

2 infrared lamp 3 conical reflection mirror 4 Cylindrical reflection mirror 5 cooling water tank 6 Transparent quartz disk 7 vacuum chamber 8 heated items 9 Air cooling mechanism 10 metal bolts 12 O-ring 13 O-ring 14 Vacuum chamber top lid 15 Metal crucible 16 Cylindrical quartz support 17 Heat shield cylinder 18 Cylindrical high frequency induction coil 19 thermocouple 20 vacuum flange 21 O-ring 22 thermocouple 23 Cooling water inlet 24 Cooling water outlet 25 Water cooling groove 26 Vertical movement mechanism

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01L 21/26 H05B 3/00 345 H05B 3/00 345 11/00 Z 11/00 H01L 21/26 G J (72) Inventor Teruyuki Yashima 10213−26 Tana, Sagamihara-shi, Kanagawa Japan F-Term inside Thermonics Co., Ltd. (Reference) 3K058 AA02 BA19 CA12 CA28 CA69 EA11 EA23 3K059 AB09 AB15 AD02 3K086 AA10 BA01 BB02 CA02 CB04 4K063 AA06 AA12 AA12 A12 AA19 BA04 CA01 CA06 DA19 FA13 FA36 FA43

Claims (8)

[Claims] 1. A heating object provided in a vacuum chamber is irradiated with infrared rays by two infrared radiation heaters provided in opposite directions to heat the heating object to a temperature higher than room temperature, Further, a coil for high frequency induction heating is provided on the outer peripheral part of the heated object, and high frequency is supplied to the heated object which has reached a high temperature at an ultra high speed by the above infrared radiation heating, and an ultra high temperature rise to an ultra high temperature region is possible. A super high temperature, super high speed, uniform heating device that is capable of achieving uniform temperature distribution. 2. The two infrared radiant heaters are equipped with an infrared ray generating part having an infrared ray lamp and a composite reflection mirror, and a vacuum chamber having a transparent quartz disk for transmitting infrared rays. Infrared rays irradiate a heating object provided in a vacuum chamber under vacuum or various gas atmospheres, and one infrared radiation heater for heating one side of the heating object provided in the vacuum chamber, and one of these The ultra-high temperature / ultra-high speed / uniform heating device according to claim 1, comprising another infrared radiation heater for heating the other surface side of the heating object on the side opposite to the infrared radiation heater. 3. A high frequency induction heating type induction coil of a high frequency induction heating system is installed in an outer peripheral portion in the vicinity of a heated object provided in a vacuum chamber having the infrared transmitting quartz disk,
The excitation power source is guided by a vacuum flange into a vacuum chamber having the infrared transmitting quartz disk.
Uniform heating device. 4. The ultra-high temperature / ultra-high speed / uniform heating apparatus according to claim 1, wherein the induction coil for high frequency induction heating type high frequency generation is provided outside the vacuum chamber. 5. The heating object installation section is provided with a metal crucible and a quartz support table for supporting the same in a vacuum chamber having the infrared transmitting quartz disk and the high frequency introducing vacuum flange, and the heating object is placed in the crucible. The ultrahigh temperature / high speed according to any one of claims 1 to 3, characterized in that a heat insulating cylinder is provided on an outer peripheral portion of the device, and an induction coil for high frequency generation is installed on the outer peripheral portion thereof.・ Uniform heating device. 6. The heating of the heated object is performed by irradiating infrared rays to the heated object with an infrared radiation heater installed in a face-to-face state while measuring the temperature of the heated object using a thermocouple for ultra-high temperature. The temperature is raised by high frequency induction heating while supplying the high frequency to the heating object while measuring the temperature of the side surface of the metal crucible, and in any case, the temperature measurement is extremely fine because the temperature of the thermocouple itself does not rise due to the high frequency induction. The temperature measurement is performed by using a thermocouple for ultrahigh temperature.
Ultra-high temperature, ultra-high speed, uniform heating device according to any one of 1. 7. A composite reflection mirror of the infrared radiant heater comprises a conical reflection mirror and a cylindrical reflection mirror, the reflection mirror surface of which is plated with gold to best reflect infrared rays. The infrared rays radiated from the infrared rays are radiated and moved almost in parallel by the compound reflection mirror, transmitted through the transparent quartz disk in the upper part of the vacuum chamber, and radiated to the heating object in the vacuum chamber, and the compound mirror surface irradiates infrared rays from the infrared lamp. In order to prevent a temperature rise due to, the outer circumference forms a water tank structure, and when the infrared lamp is turned on, the cooling water always flows out from the lower part to the upper part of the water tank. Ultra high temperature, ultra high speed, uniform heating device. 8. The vacuum chamber is made of a metal material and has two quartz disks for transmitting infrared rays, one vacuum flange for inputting high frequency induction power, and a vacuum exhaust flange for various gas outlets. , With multiple vacuum flanges for vacuum gauges, etc. Furthermore, to prevent the temperature of the vacuum chamber itself from rising, it has a water cooling groove on its outer periphery, and cooling water is constantly maintained during heating of the heated object. The ultra-high temperature according to any one of claims 1 to 7, characterized in that it flows from the lower part to the upper part.
Ultra high speed and uniform heating device.