JP2003318469A - Gas laser oscillator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a gas laser oscillator capable of preventing an optical resonator consisting of two optical bases arranged in parallel from receiving deformation force even when an oscillator casing is thermally deformed. <P>SOLUTION: In the gas laser oscillator provided with the oscillator casing 1, a pair of optical bases 7, 9 arranged on both the ends of the casing 1 to support optical components constituting the optical resonator and a pair of bellows 10, 11 connecting between the optical bases 7, 9 and the casing 1 so that the optical components supported by the optical bases 7, 9 are located in the bellows 10, 11, thin parts 22 extending in the optical direction are formed in the vicinity of the bellows fixing positions of respective optical bases 7, 9. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention maintains a constant positional relationship such as parallelism and axis deviation between a pair of optical resonators even when an oscillator housing is deformed by heat, so that laser beam output and The present invention relates to a gas laser oscillator having a structure capable of stably maintaining quality such as a beam mode.

[0002]

8 to 10 are views showing a conventional example of a quadrature excitation type laser oscillator as a gas laser oscillator, FIG. 8 is a front view of the quadrature excitation type laser oscillator, and FIG. 9 is a plan view thereof. And FIG. 10 shows its internal structure. The orthogonal excitation type laser oscillator has an oscillator housing 1 having a hermetically sealed structure in which a laser medium gas such as CO ₂ gas is sealed. Inside the oscillator housing 1, discharge electrodes 2a and 2b for generating a laser beam and a laser are provided. A heat exchanger 3 for cooling the medium gas and a blower 4 for circulating the laser medium gas in the oscillator housing 1 are installed.

A duct 5 for returning the laser medium gas passing between the discharge electrodes 2a and 2b to the heat exchanger 3 in the oscillator housing 1.
Is provided. A rear optical base 7 holding a total reflection mirror 6 and a front optical base 9 holding a partial reflection mirror 8 on the same optical axis as the total reflection mirror 6 are provided on both sides of the oscillator housing 1 in the optical axis direction. Are arranged in parallel with each other, and the total reflection mirror 6 and the partial reflection mirror 8 form an optical resonator.

Laser beam passing portions between the oscillator housing 1 and the rear optical base 7 and between the oscillator housing 1 and the front optical base 9 are connected by bellows 10 and 11, respectively. The rear optical base 7 and the front optical base 9 are rigidly connected to each other by a total of three support rods 12 to 14 including one lower part and two upper parts. The support rods 12 to 14 are
It penetrates the end plates 15 and 16 on both sides of the oscillator housing 1 and extends in the laser beam traveling direction (optical axis direction).

In the gas laser oscillator having such a structure, in order to suppress a change in the parallel positional relationship between the optical bases 9 and 7 constituting the optical resonator due to thermal deformation of the oscillator housing 1 during laser oscillation, support is provided. Various coupling mechanisms between the rods 12-14 and the oscillator housing 1 have been proposed.

For example, in Japanese Unexamined Patent Publication (Kokai) No. 60-81883 and Japanese Unexamined Patent Publication (Kokai) No. 7-307506, in the orthogonal excitation laser oscillator having the above-mentioned structure, the lower support rod 1
2 only penetrates the end plates 15 and 16, and the oscillator housing 1
The upper support rod 13 located on the upstream side of the gas flow, though not connected with the, is restrained from moving in the axial direction by the connecting members 17 at the end plates 15 and 16, that is, at both end portions of the oscillator housing 1. Is rotatably connected about the central axis, and the upper support rod 14 on the downstream side of the gas flow is
There is disclosed a structure in which the end plates 15 and 16, that is, both end portions of the oscillator housing 1, are connected to each other by a spherical joint type connecting member 18 so as to be tiltable in all directions.

[0007]

FIG. 11 shows the rear optical base 7 and the oscillator housing 1 of the conventional gas laser oscillator described above.
It is sectional drawing in the connection part with. Rear optical base 7
The peripheral portion of the total reflection mirror 6 (partial reflection mirror 8) of the (front optical base 9) faces the high temperature laser gas during laser oscillation. Further, since a part of the oscillating laser is absorbed by the total reflection mirror 6 (partial reflection mirror 8), the total reflection mirror 6 (partial reflection mirror 8) of the rear optical base 7 (front optical base 9). The temperature is higher in the peripheral portion than in other portions facing the atmosphere. As a result, a difference in thermal expansion occurs between the peripheral portion of the total reflection mirror 6 (partial reflection mirror 8) and other portions, and a large reaction force is generated at the boundary. By this reaction force, as shown in FIG. 13, the peripheral portion of the total reflection mirror 6 (partial reflection mirror 8) having a large thermal expansion is deformed into a protruding shape, and the rear optical base 7 (front optical base) is deformed. The flatness of the table 9) deteriorates. Then, the direction of the total reflection mirror 6 on the rear optical base 7 and the direction of the partial reflection mirror 8 on the front optical base 9 change, and a problem arises that a laser beam with poor axial symmetry is generated. there were. In particular, as the shapes of the optical bases 7 and 9 have poorer symmetry with respect to the optical axis, the angle changes of the total reflection mirror 6 and the partial reflection mirror 8 also increase. However, in the case of a quadrature pump laser oscillator, it is difficult to form the optical bases 7 and 9 as a configuration that is completely symmetrical with respect to the optical axis.

FIG. 12 is a diagram showing another conventional example of the gas laser oscillator. The optical base 7 to which the total reflection mirror 6 (partial reflection mirror 8) is attached in order to make the total reflection mirror 6 (partial reflection mirror 8) detachable from the optical base 7 (9) of FIG.
A reflection mirror insertion hole 30 having a diameter smaller than that of the bellows 10 is provided in the portion (9). Further, an optical substrate 19 having a size in which the total reflection mirror 6 (partial reflection mirror 8) is fixed and the reflection mirror insertion hole 30 of the optical base 7 (9) can be closed is prepared as a separate component. And this optical substrate 1
9 is fixed to the optical base 7 (9) by a fixing member 21 such as a bolt, and can be detached from the optical base 7 (9) by removing the fixing member 21.
In the case of the gas laser oscillator having the structure shown in FIG. 12, since the thermal resistance at the contact surface between the optical substrate 19 and the optical base 7 (9) is large, the temperature difference becomes large compared to the case of FIG. , The difference in thermal expansion and the reaction force become even larger. Therefore, the deformation of the optical base 7 (9) and the optical substrate 19 becomes large, and the mirror alignment between the total reflection mirror 6 and the partial reflection mirror 8 becomes worse than in the case of FIG. There was a problem. Further, when the optical base 7 (9) and the optical substrate 19 are fastened together by the fixing member 21, the reaction force becomes larger than the frictional force at the contact surface, and slippage occurs, There is also a problem that the orientations of the total reflection mirror 6 and the partial reflection mirror 8 do not return to their original positions even if the temperature difference after the laser oscillation is stopped disappears.

The present invention has been made in view of the above, and prevents an optical resonator formed of two optical bases arranged in parallel from being subjected to a deforming force even when the oscillator housing is thermally deformed. It is an object to obtain a gas laser oscillator that can be used.

[0010]

In order to achieve the above object, a gas laser oscillator according to the present invention supports an oscillator housing and optical parts which are installed at both ends of the oscillator housing and which constitute an optical resonator. A pair of optical bases, and a pair of bellows connecting between the pair of optical bases and the oscillator housing so that the optical components supported by the optical bases are located inside the bellows. In the gas laser oscillator, a thin portion extending in the optical axis direction is formed in the vicinity of the bellows mounting position of each optical base.

According to this invention, a thin portion extending in the optical axis direction is formed in the vicinity of the bellows mounting position of each optical base.

A gas laser oscillator according to the next invention is
An oscillator housing, a pair of optical bases that are installed at both ends of the oscillator housing and support optical components that form an optical resonator,
A gas laser oscillator comprising: a pair of bellows connecting between the pair of optical bases and the oscillator housing, wherein each optical base is mounted on one surface on which the optical component is mounted. A first groove formed so as to surround the portion, and a second groove formed on the other surface so that a thin portion is formed between the first groove and the second groove. .

According to the present invention, each optical base includes a first groove formed on one surface on which the optical component is mounted so as to surround the mounting portion of the optical component, and the first groove. Second formed on the other surface so that a thin portion is formed therebetween
And the groove.

A gas laser oscillator according to the next invention is
In the above invention, the bellows is connected to a position where the thin portion is formed.

According to the present invention, the bellows is connected to the position where the thin portion is formed.

A gas laser oscillator according to the next invention is
An oscillator housing, a pair of optical bases having holes, which are installed at both ends of the oscillator housing, and an optical component forming an optical resonator are supported, and the pair of optical bases covers the holes. In a gas laser oscillator comprising a pair of optical substrates attached to a table, and a pair of bellows connecting between the pair of optical bases and the oscillator housing, the optical substrate has a diameter substantially the same as the hole. A main body for supporting the optical component, and a flange having a thickness smaller than that of the main body, and the outer circumference of the main body having a diameter substantially the same as the hole of the optical base on one surface of the main body. It is characterized in that a groove is formed between the wall and the wall to form a thin portion.

According to the present invention, the optical substrate is provided with a main body portion having a diameter substantially the same as the hole on the optical base and supporting the optical component, and a flange portion thinner than the main body portion. The thin portion has a groove having a diameter substantially the same as that of the hole of the optical base and forming a thin portion with the outer peripheral wall of the main body, and the thin portion is the peripheral portion of the hole of the optical base. The optical substrate is attached to the optical base so that it is located at.

A gas laser oscillator according to the next invention is
An oscillator housing, a pair of optical bases having holes, which are installed at both ends of the oscillator housing, and an optical component forming an optical resonator are supported, and the pair of optical bases covers the holes. A gas laser oscillator comprising a pair of optical substrates attached to a table, and a pair of bellows connecting between the pair of optical bases and the oscillator housing. An optical substrate having a substantially uniform thickness throughout. A first groove having substantially the same diameter as the hole of the optical base is formed on one surface on which the optical component is attached, and the first groove is formed on the other surface.
The second groove is formed so that a thin portion is formed between the optical substrate and the optical base so that the thin portion is located at the peripheral portion of the hole of the optical base. It is characterized by being attached.

According to the present invention, the first groove having substantially the same diameter as the hole of the optical base is formed on one surface of the optical substrate on which the optical component having a substantially uniform thickness is attached. The second groove is formed on the other surface so that a thin portion is formed between the thin film portion and the first groove, and the optical substrate is optically moved so that the thin portion is located at the peripheral portion of the hole of the optical base. It is attached to the base.

A gas laser oscillator according to the next invention is
In the above invention, the pair of optical bases are connected in parallel to each other by at least three support rods extending in the optical axis direction.

According to the present invention, the pair of optical bases are connected in parallel to each other by at least three support rods extending in the optical axis direction.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a gas laser oscillator according to the present invention will be described in detail below with reference to the accompanying drawings. The same components as those of the above-described conventional technique in the embodiments of the present invention described below are designated by the same symbols as those of the above-described conventional technique.

Embodiment 1. 1 to 3 are views showing a first embodiment of a gas laser oscillator according to the present invention,
1 is a front sectional view partially showing a connecting portion between the oscillator housing 1 and the optical base 7, FIG. 2 is a left side view of FIG. 1, and FIG. 3 is a view of the optical base 7 of FIG. It is a figure which shows the state which received the deformation | transformation by the heat of a part. Although the rear optical base 7 is shown as an example in these drawings, the front optical base 9 can also be configured in the same manner as these drawings.

The rear optical base 7 is parallel to a front optical base 9 (not shown) holding a partial reflection mirror 8 (not shown) having the same optical axis as the total reflection mirror 6 held by the rear optical base 7, and the support rods 12 to It is arranged through 14. The optical base 7 and the oscillator housing 1 are connected by a bellows 10, and a support rod 13 (14) is connected by a connecting member 17 provided on the oscillator housing 1.

On the optical base 7, a thin portion 22 having a thin section in a direction perpendicular to the optical axis is formed so as to surround the reflecting mirror 6.
Is provided. For example, in FIG. 2, two circular grooves 23a having different diameters (shown by solid lines in FIG. 2),
By processing 23b (shown by a dotted line in FIG. 2) concentrically from both sides of the optical base 7, a thin portion 22 having a cross section that is long in the optical axis direction and thin in the direction perpendicular to the optical axis is formed. There is. Thin portion 22 formed in this way
Has a property of high rigidity in the longitudinal direction, that is, the optical axis direction, and small in the thickness direction, that is, the direction perpendicular to the optical axis.

When the temperature rises due to laser oscillation, the periphery of the mounting portion of the reflecting mirror 6 expands in the direction of the arrow shown in FIG. However, such deformation due to the expansion near the mounting portion of the reflecting mirror 6 is absorbed by the soft deformation of the thin portion 22 as shown in FIG. 3, and the reaction force due to the expansion can be reduced. As a result, the deformation of the entire optical base 7 is reduced, and it is possible to maintain the parallel positional relationship with the other optical base 9 (not shown). Further, since the reaction force due to the expansion is absorbed by the thin portion 22, the change in the orientation of the reflecting mirror 6 can be suppressed to be small, and the deviation of the optical axis from the other reflecting mirror 8 (not shown) can be suppressed. .

Further, as described above, since the thin portion 22 has a high rigidity in the longitudinal direction, the angle support rigidity of the reflecting mirror 6 is high and stable mirror alignment can be obtained even against external force such as external vibration. It also has an effect.

Further, since the optical base 7 is provided with the thin portion 22 for absorbing the deformation due to the expansion as described above, no gap is generated, and therefore the oscillator housing 1, the bellows 10 and the optical base 7 are provided. The airtightness of the laser gas between and does not deteriorate.

In FIG. 1, the thin portion 22 having a diameter smaller than the diameter of the bellows 10, that is, inside the diameter of the bellows 10 as viewed from the optical axis direction is provided.
As shown in FIG. 5, the thin portion 22 may be provided outside the diameter of the bellows 10, and the same effect as the above case can be obtained.

Further, since the high temperature laser medium gas and the ambient temperature atmosphere are in contact with each other with the bellows 10 as a boundary, the temperature difference on the optical base 7 also becomes a boundary near the connecting portion of the bellows 10. Therefore, as shown in FIG.
The thin portion 22 provided above may be provided in the vicinity of this boundary, that is, at a position substantially the same as the diameter of the bellows 10.
With this configuration, the difference in thermal expansion due to the temperature difference between the laser medium gas and the atmosphere can be effectively absorbed, and the deformation of the optical base 7 can be suppressed.

Further, in FIGS. 1 to 5, the thin portion 22 provided on the optical base 7 as viewed from the optical axis direction will be described by exemplifying a case where the thin film portion 22 surrounds the mounting portion of the reflecting mirror 6 in a circular shape. However, the shape is not limited to the circular shape, and may be a polygonal shape such as a quadrangular shape or a hexagonal shape. However, when the thin portion 22 has a polygonal shape, the rigidity increases at the corners as compared with the case where the thin portion 22 has a circular shape, so the reaction force due to thermal deformation and the deformation are somewhat greater than when circular. It needs to be taken into consideration that it will grow.

Embodiment 2. FIG. 6 is a diagram showing the configuration of the second embodiment of the laser oscillator according to the present invention, and is a front sectional view partially showing a connecting portion between the oscillator housing 1 and the optical base 7. In addition, in the example of FIG. 6, the rear optical base 7 is taken as an example, but the front optical base 9 can also be configured in the same manner as in FIG. 6.

In the second embodiment, the optical base 7 is provided with the reflecting mirror insertion hole 30 having a diameter slightly smaller than the diameter of the bellows 10 in the direction perpendicular to the optical axis. The shape of the reflecting mirror insertion hole 30 is not particularly limited, and may be circular, polygonal, or any other shape.
An optical substrate 19 having a reflecting mirror 6 is attached to the optical base 7.
However, the reflection mirror 6 is inserted into the reflection mirror insertion hole 30 and is attached by a fixing member 21 such as a screw or a bolt. The optical substrate 19 has a size slightly larger than the size of the reflection mirror insertion hole 30, and has a main body portion 19a for supporting the reflection mirror 6 on the surface on the oscillator housing 1 side, and a thickness of the main body portion 19a. And a flange portion 19b on which a fixing member 21 such as a screw or a bolt for attaching to the optical base 7 is arranged. Also, in the main body portion 19a,
The surface of the oscillator housing 1 side has almost the same diameter as the reflecting mirror insertion hole 30 provided in the optical base 7, and the optical axis is formed so as to form a thin portion 22 with the outer peripheral wall of the main body portion 19a. A groove 23b having a depth in the direction is formed. And this thin portion 2
The optical substrate 19 is attached to the optical base 7 so that 2 is located at the peripheral edge of the reflecting mirror insertion hole 30 of the optical base 7.

Since the oscillator housing 1 and the bellows 10 have a hermetically sealed structure so as to hold the laser medium gas, the optical base 7 and the optical substrate 19 are firmly fixed so that no leak occurs. Connected with. The optical substrate 19 described above may have a circular plate shape or a polygonal plate shape. Further, in the above description, the fixing member 21 such as a screw or a bolt for fixing the optical substrate 19 to the optical base 7 is arranged on the flange portion 19b.

Similar to the first embodiment, the thin portion 2
No. 2 has a property that the rigidity is high in the longitudinal direction, that is, the optical axis direction, and is small in the thickness direction, that is, the cross-sectional direction perpendicular to the optical axis. Therefore, the deformation due to the thermal expansion near the mounting portion of the reflecting mirror 6 is absorbed by the soft deformation of the thin portion 22, and the reaction force due to the expansion can be reduced. Further, since the deformation of the entire optical base 7 is small,
The parallel positional relationship with the other optical base 9 (not shown) can be maintained. Further, the reaction force due to the expansion is
By being absorbed by 2, the change in the direction of the reflecting mirror 6 is suppressed to a small level, and the other reflecting mirror 8 (not shown) is shown.
The deviation of the optical axis between and can be suppressed.

Further, as described above, since the thin portion 22 has high rigidity in the longitudinal direction, the angle support rigidity of the reflecting mirror 6 is high and stable mirror alignment can be obtained even against external force such as external vibration. It also has an effect.

Furthermore, since contact thermal resistance exists on the contact surface between the optical substrate 19 and the optical base 7, this contact surface serves as the boundary between the high temperature portion and the low temperature portion. Since the thin portion 22 is provided near the contact surface, the thin portion 22 effectively absorbs the deformation caused by the difference in thermal expansion between the optical base 7 and the optical substrate 19. As a result, good mirror alignment can be obtained.

Embodiment 3. FIG. 7 is a diagram showing the configuration of the third embodiment of the laser oscillator according to the present invention, and is a front sectional view partially showing a connecting portion between the oscillator housing 1 and the optical base 7. Although the rear optical base 7 is taken as an example in the example of FIG. 7, the front optical base 9 can also be configured in the same manner as in FIG. 7.

In the third embodiment, only the structure of the optical substrate 19 shown in FIG. 6 of the second embodiment is different.
Other configurations are the same. Therefore, in the following, description of the same parts as those in the second embodiment will be omitted, and only different parts will be described. On the oscillator housing 1 side of the optical substrate 19, the optical base 7 is provided so as to surround the periphery of the reflecting mirror 6.
A groove 23b having a diameter substantially the same as that of the reflecting mirror insertion hole 30 is formed, and a groove 23a having a diameter smaller than that of the groove 23b is formed on the surface opposite to the oscillator housing 1. Then, a thin portion 22 that is long in the optical axis direction and has a small thickness in a cross-sectional direction perpendicular to the optical axis direction is formed in a portion sandwiched by the grooves 23a and 23b having different diameters. The thin-walled portion 22 formed in this manner has a property that the rigidity is high in the longitudinal direction, that is, the optical axis direction, and is small in the thickness direction, that is, the direction perpendicular to the optical axis. Further, unlike the case of the second embodiment, the optical substrate 19 has a substantially uniform thickness throughout.

In the third embodiment, the area (groove 23b) outside the portion surrounded by the thin portion 22 is connected to the laser medium gas side, and the area inside the thin portion 22 (groove 23a) is the atmospheric side. It is configured to be connected. Since the gas pressure of the laser medium inside the oscillator housing 1 is set to be lower than the atmospheric pressure, the region inside the thin portion 22 of the cross section of the optical substrate 19 is located on the laser medium gas side, that is, in the oscillator housing 1. Pressure acts in the direction. Due to this pressure, a force extending in the longitudinal direction acts on the thin portion 22. Therefore, it is possible to prevent the thin portion 22 from buckling due to the pressure difference between the inside and the outside of the oscillator housing 1.

Further, by making the thin portion 22 thinner, the reaction force at the time of thermal expansion of the optical substrate 19 can be further reduced, and the degree of deformation of the optical base 7 and the optical substrate 19 can be reduced. it can. As a result, the reflector 6
And the deviation of the optical axis between the other reflecting mirror 8 (not shown) can be suppressed.

Further, since contact thermal resistance exists on the contact surface between the optical substrate 19 and the optical base 7, this contact surface serves as the boundary between the high temperature portion and the low temperature portion. Since the thin portion 22 is provided near the contact surface, the deformation due to the difference in thermal expansion between the optical base 7 and the optical substrate 19 can be effectively absorbed. As a result, good mirror alignment can be obtained.

The thin portion 22 and the grooves 23a and 23b are
It may have a circular shape or a polygonal shape such as a quadrangle or a hexagon.

In the above-described first to third embodiments, the case of thermal expansion has been mainly described as an example, but the thin portion 22 is softly deformed in the opposite direction even in the case of thermal contraction due to cooling water piping or the like. Thus, it is possible to suppress the generation of reaction force and suppress the deformation of the optical base 7 and the optical substrate 19. In addition, in the above-described first to third embodiments, the case where the number of the support rods 12 to 14 that support the pair of optical bases 7 and 9 that configure the optical resonator in parallel is three has been described, but the number is limited to three. However, it may be four or more.

[0045]

As described above, according to the present invention, since the thin portion extending in the optical axis direction is formed in the vicinity of the bellows mounting position of each optical base, the portion where the optical component is mounted is formed. The thin-walled portion deforms and absorbs the difference in thermal expansion between the above and its surroundings, so that the generation of a reaction force caused by the difference in thermal expansion can be suppressed. As a result, deformation of the optical base can be suppressed, and stable mirror alignment can be obtained.

According to the next invention, since the thin portion is provided around the reflecting mirror of the optical base, the difference in thermal expansion between the area surrounded by the thin portion and the outside thereof is softened by the thin portion. By deforming and absorbing, the generation of reaction force is suppressed, deformation of the base is prevented, and as a result, stable mirror alignment is obtained.

According to the next invention, since the bellows is configured to be connected to the position where the thin portion of the optical base is formed, the base of the base due to thermal expansion caused by the temperature rise of the internal gas of the oscillator housing is formed. This has the effect that the deformation can be effectively reduced.

According to the next invention, the optical substrate has a main body portion having a diameter substantially the same as that of the reflecting mirror insertion hole of the optical base and supporting the optical component, and a flange portion thinner than the main body portion. A groove having a diameter substantially the same as the hole of the optical base and forming a thin wall portion with the outer peripheral wall of the main body portion, the thin wall portion being a peripheral edge of the hole of the optical base. Since the optical substrate is configured to be attached to the optical base so that it is located in the area, the boundary between the optical substrate in the high temperature part and the optical base in the low temperature part becomes a thin part, and the deformation due to the heat of the optical substrate depends on the thin part. It has the effect that it is absorbed and stable mirror alignment is obtained.

According to the next invention, the first groove having substantially the same diameter as that of the hole of the optical base is formed on one surface of the optical substrate on which the optical components having substantially uniform thickness are attached. , The second groove is formed on the other surface so that the thin portion is formed between the first surface and the first groove, and the optical substrate is optically moved so that the thin portion is located at the peripheral portion of the hole of the optical base. Since it is configured to be attached to the base, the force due to the difference between the atmospheric pressure and the laser gas pressure acts on the thin portion in the pulling direction, and it is possible to prevent buckling of the thin portion. In addition, the thin portion can be made thinner, and the reaction force can be further reduced.

According to the next invention, the pair of optical bases comprises:
Since they are connected in parallel to each other by at least three support rods extending in the optical axis direction, even if the oscillator housing or the optical substrate is thermally deformed during laser oscillation, the precise position of the pair of optical bases can be improved. The effect is that the relationship can be maintained more accurately.

[Brief description of drawings]

FIG. 1 is a front sectional view of a gas laser oscillator showing a first embodiment of the present invention.

FIG. 2 is a left side view of the gas laser oscillator showing the first embodiment of the present invention.

FIG. 3 is a diagram showing a state of thermal deformation of an optical base of the gas laser oscillator.

FIG. 4 is a front sectional view showing another example of the gas laser oscillator according to the first embodiment of the present invention.

FIG. 5 is a front sectional view showing another example of the gas laser oscillator according to the first embodiment of the present invention.

FIG. 6 is a front sectional view of a gas laser oscillator showing a second embodiment of the present invention.

FIG. 7 is a front sectional view of a gas laser oscillator according to a third embodiment of the present invention.

FIG. 8 is a front view showing a conventional example of a gas laser oscillator.

FIG. 9 is a plan view showing a conventional example of a gas laser oscillator.

FIG. 10 is an internal perspective view showing a conventional example of a gas laser oscillator.

FIG. 11 is a front sectional view showing a conventional example of a gas laser oscillator.

FIG. 12 is a front sectional view showing a conventional example of a gas laser oscillator.

FIG. 13 is a diagram showing a state of thermal deformation of the optical base of the gas laser oscillator.

[Explanation of symbols]

1 oscillator housing, 2a, 2b discharge electrode, 3 heat exchanger, 4 blower, 5 duct, 6 total reflection mirror, 7 rear optical base, 8 partial reflection mirror, 9 front optical base 10,
11 Bellows, 12, 13, 14 Support Rods, 17 Connection Member, 18 Spherical Joint Type Connection Member, 19, 20 Optical Substrate, 19a Body Part, 19b Flange Part, 21
Fixing member, 22 thin portion, 23a, 23b groove.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takao Ohara             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd. (72) Inventor Satoshi Nishida             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd. F-term (reference) 5F071 DD05 EE04 JJ05                 5F072 JJ06 KK22 KK24 MM16

Claims (6)

[Claims] 1. An oscillator housing, a pair of optical bases installed at both ends of the oscillator housing and supporting optical parts constituting an optical resonator, and the optical parts supported by the optical bases. A gas laser oscillator comprising: a pair of bellows that connect between the pair of optical bases and the oscillator housing so as to be located inside the bellows; A gas laser oscillator, characterized in that a thin portion extending to the inside is formed. 2. An oscillator housing, a pair of optical bases that are installed at both ends of the oscillator housing and support optical components that form an optical resonator, the pair of optical bases, and the oscillator housing. A pair of bellows connecting between the two, and a gas laser oscillator comprising: a first groove formed on one surface to which the optical component is attached so as to surround a mounting portion of the optical component. And a second groove formed on the other surface so that a thin portion is formed between the first groove and the first groove. 3. The gas laser oscillator according to claim 2, wherein the bellows is connected to a position where the thin portion is formed. 4. An oscillator housing, a pair of optical bases having holes, which are installed at both ends of the oscillator housing, and an optical component forming an optical resonator are supported and cover the holes. A gas laser oscillator comprising: a pair of optical substrates attached to the pair of optical bases; and a pair of bellows connecting between the pair of optical bases and the oscillator housing, wherein the optical substrate is the hole. And a flange portion having a diameter substantially the same as that for supporting the optical component and a flange portion having a thickness smaller than that of the main body portion, and having a diameter substantially the same as the hole of the optical base on one surface of the body portion. A groove for forming a thin portion between the outer peripheral wall of the main body portion and the optical substrate is attached to the optical base so that the thin portion is located at a peripheral portion of the hole of the optical base. And a gas laser oscillator. 5. An oscillator housing, a pair of optical bases having holes, which are installed at both ends of the oscillator housing, and an optical component forming an optical resonator are supported and cover the holes. A gas laser oscillator comprising: a pair of optical substrates attached to the pair of optical bases; and a pair of bellows connecting between the pair of optical bases and the oscillator housing. A first groove having substantially the same diameter as the hole of the optical base is formed on one surface of the optical substrate having the thickness to which the optical component is attached, and a thin wall is formed on the other surface between the first groove and the first groove. Gas laser, wherein the second groove is formed so that a portion is formed, and the optical substrate is attached to the optical base so that the thin portion is located at a peripheral portion of the hole of the optical base. Oscillator. 6. The pair of optical bases are connected in parallel to each other by at least three support rods extending in the optical axis direction, according to any one of claims 1 to 5. Gas laser oscillator.