JP2001326403A - Orthogonal excitation-type laser oscillator - Google Patents
Orthogonal excitation-type laser oscillatorInfo
- Publication number
- JP2001326403A JP2001326403A JP2000144801A JP2000144801A JP2001326403A JP 2001326403 A JP2001326403 A JP 2001326403A JP 2000144801 A JP2000144801 A JP 2000144801A JP 2000144801 A JP2000144801 A JP 2000144801A JP 2001326403 A JP2001326403 A JP 2001326403A
- Authority
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- Prior art keywords
- oscillator
- optical base
- oscillator housing
- support
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】この発明は、直交励起型レー
ザ発振器に関し、特に、直交励起型レーザ発振器の光共
振器を構成する光学基部の支持構造に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quadrature pump laser oscillator, and more particularly to a support structure of an optical base constituting an optical resonator of the quadrature pump laser oscillator.
【0002】[0002]
【従来の技術】図11乃至図13に、例えば特開昭60
−81883号公報及び特開平7―307506号公報
などに示される、従来の直交励起型レーザ発振器の一例
を示す。この直交励起型レーザ発振器はCO2ガス等の
レーザ媒体ガスを封入された密閉構造の発振器筺体1を
有しており、この発振器筺体1内に、レーザビーム発生
用の放電電極2a,2bとレーザ媒体ガスを冷却する熱
交換器3と、レーザ媒体ガスを循環させる送風器4と、
放電電極2a,2b間を通過したレーザ媒体ガスを熱交
換器3に戻すダクト5とが設けられている。2. Description of the Related Art FIGS.
An example of a conventional quadrature excitation laser oscillator disclosed in Japanese Patent Application Laid-Open No. 8-18883 and Japanese Patent Application Laid-Open No. 7-307506 will be described. This orthogonal excitation type laser oscillator has an oscillator housing 1 having a hermetically sealed structure in which a laser medium gas such as CO 2 gas is sealed. In the oscillator housing 1, discharge electrodes 2a and 2b for generating a laser beam and a laser are provided. A heat exchanger 3 for cooling the medium gas, a blower 4 for circulating the laser medium gas,
A duct 5 is provided for returning the laser medium gas passing between the discharge electrodes 2a and 2b to the heat exchanger 3.
【0003】発振器筺体1の光軸方向の両側には、全反
射鏡6を保持した後部光学基台7と、全反射鏡6と同一
光軸上に部分反射鏡8を保持した前部光学基台9とが互
いに平行に配置されており、全反射鏡6と部分反射鏡8
とが光共振器を構成している。On both sides of the oscillator housing 1 in the optical axis direction, a rear optical base 7 holding a total reflection mirror 6 and a front optical base holding a partial reflection mirror 8 on the same optical axis as the total reflection mirror 6 are provided. The table 9 is arranged in parallel with each other, and the total reflection mirror 6 and the partial reflection mirror 8
Constitute an optical resonator.
【0004】発振器筺体1と後部光学基台7及び発振器
筺体1と前部光学基台9は、それぞれ、レーザビーム通
過部分をベローズ10,11によって接続されている。
後部光学基台7と前部光学基台9とは、上側2本,下側
1本の合計3本の支持棒12,13,14によって互い
に強固に接続されている。支持棒12,13,14は、
発振器筺体1の両側の端板15,16を貫通して光軸方
向に延在している。The oscillator housing 1 and the rear optical base 7 are connected to each other, and the oscillator housing 1 and the front optical base 9 are connected by a bellows 10 and 11 at a laser beam passing portion.
The rear optical base 7 and the front optical base 9 are firmly connected to each other by a total of three support rods 12, 13, and 14, two upper and one lower. The support rods 12, 13, 14
It extends through the end plates 15 and 16 on both sides of the oscillator housing 1 and extends in the optical axis direction.
【0005】この直交励起型レーザ発振器では、放電電
極2a,2bによるレーザ発生部の放電により高温とな
ったレーザ媒質ガスは、ダクト5を通って熱交換器3に
至り、熱交換器3を通過することで冷却されたレーザ媒
質ガスは送風器4に運ばれ、送風器4により再び放電電
極2a,2bによるレーザ発生部へ送られる。レーザ媒
質ガスの流れを図12及び図13に矢印Aで示す。In this orthogonally pumped laser oscillator, the laser medium gas, which has become hot due to the discharge of the laser generating portion by the discharge electrodes 2a and 2b, reaches the heat exchanger 3 through the duct 5 and passes through the heat exchanger 3. The cooled laser medium gas is conveyed to the blower 4 and is again sent to the laser generator by the discharge electrodes 2a and 2b. The flow of the laser medium gas is indicated by an arrow A in FIGS.
【0006】下側の支持棒12は、端板15,16を貫
通するだけで、発振器筺体1に固定されてはいないが、
発振器筺体1上側におけるガス流上流(放電電極2a,
2bを通過する手前)側の支持棒13は、端板16の部
分、すなわち発振器筺体1のビーム出射側端面部におい
て球面継手式の接続部材18により、全方向に傾斜可能
に接続され、端板15の部分、すなわち発振器筺体1の
ビーム全反射側端面部において支持棒13の軸方向すな
わち図中のX軸方向にスライド可能な接続部材19上に
固定された球面継手式の接続部材18により、全方向に
傾斜可能かつX軸方向に移動可能に接続されている。ま
た、発振器筺体1上側におけるガス流下流(放電電極2
a,2bを通過した後)側の支持棒14は、端板16の
部分において接続部材17によってX軸方向の移動を拘
束された状態で、支持棒14の軸方向と直角方向すなわ
ち図中のY軸方向にスライド可能に接続され、端板15
の部分において接続部材17がX軸及びY軸方向にスラ
イド可能な接続部材19の上に設置されており、X,Y
軸方向に移動可能で且つXY平面上で回転可能な状態で
接続されている。Although the lower support rod 12 only penetrates the end plates 15 and 16 and is not fixed to the oscillator housing 1,
Gas flow upstream (discharge electrodes 2a,
The support rod 13 on the side before passing through 2 b) is connected to the end plate 16, that is, the end face of the beam exit side of the oscillator housing 1 by a spherical joint type connecting member 18 so as to be tiltable in all directions. 15, that is, a spherical joint type connecting member 18 fixed on a connecting member 19 slidable in the axial direction of the support rod 13, that is, in the X-axis direction in the drawing at the end surface of the oscillator housing 1 on the beam total reflection side. They are connected so as to be tiltable in all directions and movable in the X-axis direction. Further, the gas flow downstream (discharge electrode 2
The support rod 14 on the side after passing through the end plates 16 is restrained from moving in the X-axis direction by the connecting member 17 at the end plate 16, in a direction perpendicular to the axial direction of the support rod 14, that is, in the drawing. The end plate 15 is slidably connected in the Y-axis direction.
The connection member 17 is installed on the connection member 19 slidable in the X-axis and Y-axis directions.
They are connected so as to be movable in the axial direction and rotatable on the XY plane.
【0007】また、後部光学基台と前部光学基台とを連
結する支持棒が、発振器筺体の両側端部分に加えて発振
器筺体の光軸方向中央部でも発振器筺体に固定接続され
た光学基部支持構造のものが、特開昭53−12568
3号公報に示されている。[0007] Further, a supporting rod for connecting the rear optical base and the front optical base is fixedly connected to the oscillator housing at the center in the optical axis direction of the oscillator housing in addition to both end portions of the oscillator housing. A supporting structure is disclosed in Japanese Patent Application Laid-Open No. 53-12568.
No. 3 discloses this.
【0008】[0008]
【発明が解決しようとする課題】この直交励起型レーザ
発振器の発振器筺体1内部におけるレーザ媒質ガスの流
れは上述のとおりであるが、このため、発振器筺体1内
の上部において、レーザ媒質ガスは、レーザ発生部通過
前後、すなわちガス流上流側とガス流下流側とで温度が
異なり、ガス流上流側のレーザ媒質ガス温度は低く、ガ
ス流下流側のレーザ媒質ガス温度は放電により高温とな
っている。この内部のレーザ媒質ガスの温度が発振器筺
体1自体に伝導することにより、発振器筺体1に温度分
布差が生じる。この温度分布差によって発振器筺体1
は、図14に示されているように、湾曲状に熱変形を起
こし、また、支持棒13,14は熱変形量の絶対値が大
きい発振器筺体1の長手方向側端部において発振器筺体
1と連結されているため、支持棒13,14及び光学基
台7,9は、図14に示すように変形する。図14にお
いて、点線で示されたものが初期すなわち熱変形する前
の状態を、実線で示されたものが熱変形後の状態を示
す。熱変形した後においても、後部光学基台7と前部光
学基台9とは平行関係を維持しており、全反射鏡6(図
示せず)と部分反射鏡8(図示せず)とによる光共振器
の構成は維持されるが、その光軸、すなわちレーザビー
ムの進行方向は初期設定の方向とずれている。The flow of the laser medium gas inside the oscillator housing 1 of this orthogonally pumped laser oscillator is as described above. Therefore, the laser medium gas in the upper part of the oscillator housing 1 Before and after passing through the laser generating section, that is, the temperature differs between the gas flow upstream side and the gas flow downstream side, the laser medium gas temperature on the gas flow upstream side is low, and the laser medium gas temperature on the gas flow downstream side becomes high due to discharge. I have. When the temperature of the laser medium gas inside is transmitted to the oscillator housing 1 itself, a temperature distribution difference occurs in the oscillator housing 1. Oscillator housing 1
As shown in FIG. 14, thermal deformation occurs in a curved shape, and the support rods 13 and 14 are connected to the oscillator housing 1 at the longitudinal end of the oscillator housing 1 having a large absolute value of the amount of thermal deformation. Since they are connected, the support rods 13 and 14 and the optical bases 7 and 9 are deformed as shown in FIG. In FIG. 14, the dotted line shows the initial state, that is, the state before thermal deformation, and the solid line shows the state after thermal deformation. Even after the thermal deformation, the rear optical base 7 and the front optical base 9 maintain the parallel relationship, and are formed by the total reflection mirror 6 (not shown) and the partial reflection mirror 8 (not shown). Although the configuration of the optical resonator is maintained, its optical axis, that is, the traveling direction of the laser beam is shifted from the initially set direction.
【0009】すなわち、発振器筺体1が熱変形を起こす
と、支持棒13,14と発振器筺体1との合計4箇所の
接続位置が変位し、これに応じて後部光学基台7と前部
光学基台9とが初期状態の設定から傾き、レーザビーム
の光軸がずれ、レーザビームの進行方向がずれることと
なる。That is, when the oscillator housing 1 undergoes thermal deformation, a total of four connection positions between the support rods 13 and 14 and the oscillator housing 1 are displaced, and accordingly, the rear optical base 7 and the front optical base are changed. The table 9 is tilted from the initial setting, the optical axis of the laser beam is shifted, and the traveling direction of the laser beam is shifted.
【0010】この発明は上述の課題を解決するためにな
されたもので、光学基台が、発振器筺体の熱などによる
変形の影響を受け難く、レーザビームの出射方向の経時
安定性を向上できる直交励起型レーザ発振器を得るもの
である。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an optical base is hardly affected by deformation of an oscillator housing due to heat or the like, and a quadrature capable of improving the temporal stability of a laser beam emitting direction. This is to obtain an excitation type laser oscillator.
【0011】[0011]
【課題を解決するための手段】この発明に係る直交励起
型レーザ発振器は、発振器筺体と、この発振器筺体の外
側に設けられ第一の反射鏡を有する第一の光学基台と、
この第一の光学基台と前記発振器筺体を介して対向し前
記第一の反射鏡と共振器を構成する第二の反射鏡を有す
る第二の光学基台と、前記発振器筺体の外表面上に架設
され前記第一の光学基台と前記第二の光学基台とを接続
する第一の接続部材及び第二の接続部材と、前記外表面
の前記架設方向の中央部に設けられ前記第一の接続部材
を保持固定する第一の支持部材と、前記外表面の前記架
設方向の中央部に固定される取り付け部とこの取り付け
部と係合し前記第二の接続部材を保持する移動保持部と
を有し、前記架設方向と垂直方向の前記外表面の変位に
対し前記取り付け部と前記移動保持部とが相対移動する
第二の支持部材とを備えたものである。According to the present invention, there is provided a quadrature excitation laser oscillator comprising: an oscillator housing; a first optical base provided outside the oscillator housing and having a first reflecting mirror;
A second optical base having the first optical base and a second reflecting mirror that is opposed to each other via the oscillator housing and constitutes the first reflecting mirror and the resonator; and on an outer surface of the oscillator housing. A first connecting member and a second connecting member that connect the first optical base and the second optical base and are provided at a central portion of the outer surface in the mounting direction, and A first support member for holding and fixing one connecting member, a mounting portion fixed to a center portion of the outer surface in the erection direction, and a movement holding for engaging the mounting portion and holding the second connecting member And a second support member with which the mounting portion and the movement holding portion relatively move with respect to the displacement of the outer surface in the direction perpendicular to the erection direction.
【0012】[0012]
【発明の実施の形態】実施の形態1.この発明の第一の
実施の形態による直交励起型レーザ発振器を、図1乃至
図7を用いて説明する。図1乃至図7において、上述の
従来例の図に示すものと同一または相当のものは、上述
の従来例の図に付した符号と同一の符号を付し、詳細な
説明を省略する。また、図1乃至図4において、発振器
筺体1の上方を経由して光軸方向に延在する接続部材と
しての支持棒13,14は、それぞれ軸線方向(長手方
向)の略中央部をブラケット20,21によって発振器
筺体1上面の光軸方向略中央部に接続されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 A quadrature pump laser oscillator according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 7, the same or corresponding elements as those shown in the above-described conventional example are denoted by the same reference numerals as those in the above-described conventional example, and detailed description thereof will be omitted. In FIGS. 1 to 4, support rods 13 and 14 as connection members extending in the optical axis direction via the upper part of the oscillator housing 1 each have a bracket 20 at a substantially central portion in the axial direction (longitudinal direction). , 21 are connected to a substantially central portion of the upper surface of the oscillator housing 1 in the optical axis direction.
【0013】2本の支持棒13,14のうち、発振器筺
体1上面の熱変形の量が小さい側に位置する支持棒13
の発振器筺体1に対する中央部接続は完全な固定接続と
される。他方、すなわち高温となったレーザ媒質ガスに
より発振器筺体1上面の熱変形の量が大きい側の支持棒
14の発振器筺体1に対する中央部接続は、その軸線方
向の動きのみを拘束した可動接続とされている。Of the two support rods 13, 14, the support rod 13 located on the side of the upper surface of the oscillator housing 1 where the amount of thermal deformation is small.
The central connection to the oscillator housing 1 is a completely fixed connection. On the other hand, the central connection of the support rod 14 on the side of the upper surface of the oscillator housing 1 where the amount of thermal deformation is large due to the high temperature of the laser medium gas to the oscillator housing 1 is a movable connection in which only the movement in the axial direction is restricted. ing.
【0014】具体的な構成としては、支持棒13のブラ
ケット20は支持棒13と固定された状態で発振器筺体
1上面に図示されていないボルト等により締結固定され
ている。支持棒14のブラケット21は、移動保持部と
しての保持ブラケット部21aと取り付け部としてのス
ライド台21bとからなり、保持ブラケット部21aが
支持棒14と固定された状態で、発振器筺体1上面に固
定されたスライド台21bに対してスライド可能に係合
している。このブラケット21のスライド方向は、発振
器筺体1上面に平行な面において光軸方向と直交する方
向、すなわち図1の矢印Bの方向である。As a specific configuration, the bracket 20 of the support rod 13 is fastened and fixed to the upper surface of the oscillator housing 1 by a bolt or the like (not shown) while being fixed to the support rod 13. The bracket 21 of the support rod 14 includes a holding bracket part 21a as a moving holding part and a slide base 21b as an attachment part, and is fixed to the upper surface of the oscillator housing 1 in a state where the holding bracket part 21a is fixed to the support rod 14. Is slidably engaged with the slide table 21b. The sliding direction of the bracket 21 is a direction orthogonal to the optical axis direction on a plane parallel to the upper surface of the oscillator housing 1, that is, the direction of the arrow B in FIG.
【0015】なお、ブラケット21のスライド構造は、
リニアボールベアリング等により、スライドが低摩擦抵
抗で行われるような構造が取られていることが好まし
い。The sliding structure of the bracket 21 is as follows.
It is preferable to adopt a structure in which sliding is performed with low frictional resistance by a linear ball bearing or the like.
【0016】上述の構成によれば、支持棒13のブラケ
ット20の位置が発振器筺体1の変形量の比較的少ない
位置に設定されるから、支持棒13の変位量が、従来の
ものより減少する。図4において、点線で示されたもの
が初期すなわち熱変形する前の状態を、実線で示された
ものが熱変形後の状態を示す。図4に示すとおり、支持
棒13のブラケット20の位置は、熱変形の前後におい
て、ほとんど位置が変わらない。また、発振器筺体1上
面の熱変形の量が大きい側に設けられた支持棒14のブ
ラケット21は、その保持ブラケット部21aとスライ
ド台21bとが発振器筺体1上面に平行な面において光
軸方向と直交する方向にスライドすることにより相対移
動可能である。このため、図4に示されているように、
発振器筺体1の熱変形に支持棒14が追随することがな
く、支持棒14の形状は、発振器筺体1の熱変形前の形
状を維持し易いので、支持棒14の変形量は従来のもの
に比べ減少する。According to the above configuration, the position of the bracket 20 of the support bar 13 is set at a position where the amount of deformation of the oscillator housing 1 is relatively small, so that the amount of displacement of the support bar 13 is smaller than that of the related art. . In FIG. 4, the one shown by the dotted line shows the initial state, that is, the state before the thermal deformation, and the one shown by the solid line shows the state after the thermal deformation. As shown in FIG. 4, the position of the bracket 20 of the support rod 13 hardly changes before and after thermal deformation. The bracket 21 of the support rod 14 provided on the side of the upper surface of the oscillator housing 1 where the amount of thermal deformation is large is such that the holding bracket portion 21a and the slide base 21b are parallel to the optical axis direction in a plane parallel to the upper surface of the oscillator housing 1. It is possible to move relatively by sliding in an orthogonal direction. Therefore, as shown in FIG.
Since the support rod 14 does not follow the thermal deformation of the oscillator housing 1 and the shape of the support rod 14 is easy to maintain the shape before the thermal deformation of the oscillator housing 1, the deformation amount of the support rod 14 is reduced to the conventional amount. Compared to decrease.
【0017】上述のように、支持棒13,14のいずれ
もが、従来のものと比較して、その変位量が減少するた
め、結果的に、これらの支持棒13,14と接続されて
いる光学基台7,9の変位量も従来のものより減少し、
レーザビームの光軸のずれ、すなわちレーザビーム位置
の変動量が減少し、レーザビームの出射方向の経時安定
性が向上する。As described above, the displacement of each of the support rods 13 and 14 is smaller than that of the conventional support rod, and as a result, they are connected to these support rods 13 and 14. The displacement amount of the optical bases 7 and 9 is also reduced as compared with the conventional one,
The deviation of the optical axis of the laser beam, that is, the amount of change in the laser beam position is reduced, and the temporal stability of the laser beam emission direction is improved.
【0018】また、上側2本の支持棒13,14はそれ
ぞれ発振器筺体1の略中央部での接続支持に加えて、他
の1箇所以上の位置、この実施の形態のものでは、発振
器筺体1の側面に固定した支持台27の上に発振器筺体
1上面の面内方向の自由度を有する状態で接続されてい
る。The upper two support rods 13 and 14 are connected and supported at substantially the center of the oscillator housing 1 and at one or more other positions, in this embodiment, the oscillator housing 1 Is connected to a support 27 fixed to the side surface of the oscillator housing 1 with a degree of freedom in the in-plane direction of the upper surface of the oscillator housing 1.
【0019】図5は、支持棒13,14の発振器筺体1
側面での支持部の断面図である。この支持棒13,14
の両側端位置での支持は、球面継手23と二重のスライ
ド台24,25による直交2方向に変位可能な直交可動
台により行われている。この支持構造では、発振器筺体
1と支持棒13,14との接続支持強度が強く、上下方
向すなわち発振器筺体1の上面と離接する方向以外の直
交2方向への変位及び回転が可能であり、発振器筺体1
上面の面内方向すなわち面と平行な方向の変位を支持棒
13,14に伝えることがない。FIG. 5 shows the oscillator housing 1 of the support rods 13 and 14.
It is sectional drawing of the support part in a side surface. These support rods 13 and 14
Is supported by an orthogonal movable base that can be displaced in two orthogonal directions by a spherical joint 23 and double slide bases 24 and 25. In this support structure, the connection support strength between the oscillator housing 1 and the support rods 13 and 14 is strong, and the oscillator can be displaced and rotated in two orthogonal directions other than the vertical direction, that is, the direction away from and away from the upper surface of the oscillator housing 1. Housing 1
The displacement in the in-plane direction of the upper surface, that is, the direction parallel to the surface is not transmitted to the support rods 13 and 14.
【0020】また図6に示すように、この支持棒13,
14の両側端位置での支持は、支持棒13,14に取り
付けた転がり軸受26を軸線方向に移動可能なスライド
台25の上に設置するといった構造でもよく、この支持
構造では、少ないスペースでの支持が可能となり、また
シンプルな構造であるため低コスト化を図れる。この支
持構造においても転がり軸受26とスライド台25とに
より、直交2方向に変位可能であり、また転がり軸受2
6はスライド台25上に乗っているだけで固定されてい
ないため、自由に回転することができ、発振器筺体1上
面の面内方向の変位を支持棒13,14に伝えることが
ない。Further, as shown in FIG.
The support at the both end positions of the roller 14 may be a structure in which the rolling bearing 26 attached to the support rods 13 and 14 is installed on a slide table 25 which can move in the axial direction. Support is possible, and the cost is reduced due to the simple structure. Also in this support structure, the rolling bearing 26 and the slide table 25 can be displaced in two orthogonal directions.
6 is merely fixed on the slide table 25 and is not fixed, so that it can rotate freely and does not transmit the in-plane displacement of the upper surface of the oscillator housing 1 to the support bars 13 and 14.
【0021】また、この発振器筺体1の側面に固定され
た支持台を、図7に示すようなV字型支持台28として
もよく、この様な構造にすることにより、発振器筺体1
の側面のうち、温度変化が少なく、発振器筺体1の熱変
形の影響も受け難い、送風器4側に取り付けることも可
能であり、この場合、V字型支持台28の発振器筺体1
に対する上下方向の変位量は少なく、発振器筺体1の変
形を支持棒13,14へ、より伝え難くする。The support fixed to the side surface of the oscillator housing 1 may be a V-shaped support 28 as shown in FIG. 7, and by adopting such a structure, the oscillator housing 1
Of the side surfaces, the temperature change is small, the influence of the thermal deformation of the oscillator housing 1 is hardly affected, and the oscillator housing 1 can be attached to the blower 4 side.
, The amount of displacement in the vertical direction is small, and it is more difficult to transmit the deformation of the oscillator housing 1 to the support rods 13 and 14.
【0022】支持棒13,14の端部近傍での発振器筺
体1との接続は、発振器筺体1の熱変形による支持棒1
3,14の変形に影響を及すが、この接続は、発振器筺
体1上面に面内方向の自由度を有する形態で、すなわ
ち、球面継手23による球面継手運動により支持棒1
3,14が発振器筺体1上面に対して面内の全方向に傾
斜変位可能で、2重のスライド台24,25による直交
2方向に変位可能な直交可動台によるスライド運動によ
って発振器筺体1上面に対して直交2方向に変位可能に
取り付けられているから、発振器筺体1の熱変形に支持
棒13,14が追随する度合が極めて少なく、支持棒1
3,14は発振器筺体1の熱変形前の位置関係を維持し
易いので、変形量は従来のものに比べ減少する。The connection of the supporting rods 13 and 14 to the oscillator housing 1 in the vicinity of the ends is made by the thermal deformation of the oscillator housing 1.
This connection influences the deformation of the support rod 1, 14 in a form having a degree of freedom in the in-plane direction on the upper surface of the oscillator housing 1, that is, by the spherical joint movement by the spherical joint 23.
3 and 14 can be tilted and displaced in all directions in the plane with respect to the upper surface of the oscillator housing 1, and can be displaced in two orthogonal directions by the double slides 24 and 25, and slide on the upper surface of the oscillator housing 1 by sliding motion. On the other hand, the support rods 13 and 14 follow the thermal deformation of the oscillator housing 1 very little because they are attached so as to be displaceable in two orthogonal directions.
In Nos. 3 and 14, since the positional relationship between the oscillator housing 1 before the thermal deformation is easily maintained, the deformation amount is reduced as compared with the conventional one.
【0023】このため、支持棒13,14によって互い
の位置関係が決められている全反射鏡6を保持した後部
光学基台7と部分反射鏡8を保持した前部光学基台9と
の位置関係も初期設定時、すなわち発振器筺体1の熱変
形前の位置関係を維持し易く、発振器筺体1の熱変形に
伴なうレーザビームの光軸のズレが減少する。さらに上
述の構成により、レーザビームの光軸のズレの減少と、
発振器筺体1と支持棒13,14との接続支持強度の向
上とが、折衷的に両立する。For this reason, the positions of the rear optical base 7 holding the total reflection mirror 6 and the front optical base 9 holding the partial reflection mirror 8 whose positional relationship is determined by the support rods 13 and 14. The relationship is also easy to maintain at the time of initial setting, that is, the positional relationship before the thermal deformation of the oscillator housing 1, and the deviation of the optical axis of the laser beam accompanying the thermal deformation of the oscillator housing 1 is reduced. Further, with the above-described configuration, the deviation of the optical axis of the laser beam is reduced,
Improving the connection support strength between the oscillator housing 1 and the support rods 13 and 14 is compromised.
【0024】また、支持台27或いはV字型支持台28
を、温度変化の少ない発振器筺体1の側面に取り付ける
ため、支持棒13,14の変形量が少なくなり、レーザ
ビームの経時安定性が向上する。The support 27 or the V-shaped support 28
Is attached to the side surface of the oscillator housing 1 with little temperature change, the amount of deformation of the support rods 13 and 14 is reduced, and the temporal stability of the laser beam is improved.
【0025】実施の形態2.この発明の第二の実施の形
態による直交励起型レーザ発振器の光学基部支持構造を
図8乃至図10を用いて説明する。なお、図8乃至図1
0において、図1乃至図7に示されているものと同一ま
たは相当のものは、図1乃至図7において付した符号と
同一の符号を付し、詳細な説明を省略する。Embodiment 2 An optical base support structure of a quadrature excitation laser oscillator according to a second embodiment of the present invention will be described with reference to FIGS. 8 to 1
At 0, the same or corresponding components as those shown in FIGS. 1 to 7 are denoted by the same reference numerals as those in FIGS. 1 to 7, and detailed description thereof will be omitted.
【0026】この実施の形態では、発振器筺体1上側の
2本の支持棒13,14はそれぞれ、発振器筺体1上面
略中央部での接続支持において上下方向すなわち発振器
筺体1の上面と離接する方向についても自由度を有する
状態で接続されている。In this embodiment, the two support rods 13 and 14 on the upper side of the oscillator housing 1 are respectively connected to the upper and lower sides of the oscillator housing 1 at a substantially central portion in a vertical direction, that is, in a direction in which the upper and lower surfaces of the oscillator housing 1 are separated from and contacted with each other. Are connected with a degree of freedom.
【0027】支持棒13のブラケット30は、支持棒1
3と固定された状態でリニアボールベアリングなどの軸
受等の上下方向に移動可能な上下スライド機構32を介
して発振器筺体1上面に固定され、このブラケット30
は発振器筺体1上面に対して上下方向にスライドが可能
である。支持棒14のブラケット31は、保持ブラケッ
ト部31aが支持棒14と固定された状態で、発振器筺
体1上面に固定されたスライド台31bにスライド可能
に係合している。このとき、保持ブラケット部31aと
スライド台31bとは上述の上下スライド機構32を介
して係合されており、このブラケット31のスライド方
向は、発振器筺体1上面に平行な面において光軸方向と
直交する方向及び上下方向である。The bracket 30 of the support rod 13 is
The bracket 30 is fixed to the upper surface of the oscillator housing 1 via a vertical slide mechanism 32 that can move in the vertical direction such as a bearing such as a linear ball bearing while being fixed to the bracket 3.
Can slide vertically with respect to the upper surface of the oscillator housing 1. The bracket 31 of the support rod 14 is slidably engaged with a slide table 31b fixed to the upper surface of the oscillator housing 1 with the holding bracket portion 31a fixed to the support rod 14. At this time, the holding bracket portion 31a and the slide table 31b are engaged via the above-described vertical slide mechanism 32, and the sliding direction of the bracket 31 is orthogonal to the optical axis direction on a plane parallel to the upper surface of the oscillator housing 1. Direction and vertical direction.
【0028】上述の構成によれば、支持棒13,14
は、その発振器筺体1略中央部における固定点が上下方
向に移動することができ、一方、その両端位置において
上下方向に関して固定されているため、発振器筺体1中
央部が熱変形により図10に示すように上下に変形した
場合でも、支持棒13,14は発振器筺体1の熱変形に
追随することがなく、支持棒13,14は発振器筺体1
の熱変形前の位置関係を維持し易いので、変形量は従来
のものに比べて減少する。According to the above configuration, the support rods 13, 14
The fixed point in the substantially central portion of the oscillator housing 1 can move in the vertical direction, while the center of the oscillator housing 1 is thermally deformed as shown in FIG. Even when the oscillators are deformed vertically as described above, the support bars 13 and 14 do not follow the thermal deformation of the oscillator housing 1, and the support bars 13 and 14
Since the positional relationship before thermal deformation is easily maintained, the amount of deformation is reduced as compared with the conventional one.
【0029】[0029]
【発明の効果】以上のように、この発明によれば、光共
振器を構成する反射鏡を備えた光学基台が、発振器筺体
の熱などによる変形の影響を受け難く、レーザビームの
出射方向の経時安定性を向上でき、ひいては精度の高い
レーザ照射を維持することができる、といった効果を奏
する。As described above, according to the present invention, the optical base having the reflecting mirror constituting the optical resonator is hardly affected by deformation of the oscillator housing due to heat or the like, and the emission direction of the laser beam. Of the present invention, it is possible to improve the stability over time, and to maintain laser irradiation with high accuracy.
【図1】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造を示す斜視図。FIG. 1 is a perspective view showing an optical base support structure of a quadrature excitation laser oscillator according to a first embodiment of the present invention.
【図2】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造を示す平面図。FIG. 2 is a plan view showing an optical base support structure of the quadrature excitation laser oscillator according to the first embodiment of the present invention.
【図3】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造を示す側面図。FIG. 3 is a side view showing the optical base support structure of the quadrature excitation laser oscillator according to the first embodiment of the present invention.
【図4】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造における熱変形状態
を示す平面図。FIG. 4 is a plan view showing a thermal deformation state of the optical base support structure of the orthogonally pumped laser oscillator according to the first embodiment of the present invention.
【図5】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造で使用される支持棒
接続構造を示す断面図。FIG. 5 is a sectional view showing a support rod connection structure used in the optical base support structure of the quadrature excitation laser oscillator according to the first embodiment of the present invention.
【図6】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造で使用される支持棒
接続構造を示す断面図。FIG. 6 is a sectional view showing a support rod connection structure used in the optical base support structure of the quadrature excitation laser oscillator according to the first embodiment of the present invention.
【図7】 この発明の第一の実施の形態による直交励起
型レーザ発振器の光学基部支持構造で使用される支持棒
接続構造を示す側面図。FIG. 7 is a side view showing a support rod connection structure used in the optical base support structure of the quadrature excitation laser oscillator according to the first embodiment of the present invention.
【図8】 この発明の第二の実施の形態による直交励起
型レーザ発振器の光学基部支持構造を示す側面図。FIG. 8 is a side view showing an optical base support structure of a quadrature excitation laser oscillator according to a second embodiment of the present invention.
【図9】 この発明の第二の実施の形態による光学基部
支持構造で使用される支持棒接続構造を示す側面図。FIG. 9 is a side view showing a support rod connection structure used in an optical base support structure according to a second embodiment of the present invention.
【図10】 この発明の第二の実施の形態による光学基
部支持構造における熱変形状態を示す側面図。FIG. 10 is a side view showing a thermally deformed state of the optical base support structure according to the second embodiment of the present invention.
【図11】 従来の直交励起型レーザ発振器の光学基部
支持構造を示す側面図。FIG. 11 is a side view showing an optical base support structure of a conventional orthogonally pumped laser oscillator.
【図12】 従来の直交励起型レーザ発振器の光学基部
支持構造を示す平面図。FIG. 12 is a plan view showing an optical base support structure of a conventional orthogonally pumped laser oscillator.
【図13】 一般的な直交励起型レーザ発振器の内部構
造を示す斜視図。FIG. 13 is a perspective view showing the internal structure of a general quadrature excitation laser oscillator.
【図14】 従来例の光学基部支持構造における熱変形
状態を示す平面図。FIG. 14 is a plan view showing a thermally deformed state of the conventional optical base support structure.
1 発振器筺体 6 全反射鏡 7 後部光学基台 8 部分反射鏡 9 前部光学基台 13,14 支持棒 20,21 ブラケット 21a 保持ブラケット部 21b スライド台 DESCRIPTION OF SYMBOLS 1 Oscillator housing 6 Total reflection mirror 7 Rear optical base 8 Partial reflection mirror 9 Front optical base 13, 14 Support rod 20, 21 Bracket 21a Holding bracket part 21b Slide table
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山田 恭子 東京都千代田区丸の内二丁目2番3号 三 菱電機株式会社内 Fターム(参考) 5F071 AA05 DD01 DD08 EE04 JJ06 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Kyoko Yamada 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term in Mitsubishi Electric Corporation (reference) 5F071 AA05 DD01 DD08 EE04 JJ06
Claims (1)
設けられ第一の反射鏡を有する第一の光学基台と、この
第一の光学基台と前記発振器筺体を介して対向し前記第
一の反射鏡と共振器を構成する第二の反射鏡を有する第
二の光学基台と、前記発振器筺体の外表面上に架設され
前記第一の光学基台と前記第二の光学基台とを接続する
第一の接続部材及び第二の接続部材と、前記外表面の前
記架設方向の中央部に設けられ前記第一の接続部材を保
持固定する第一の支持部材と、前記外表面の前記架設方
向の中央部に固定される取り付け部とこの取り付け部と
係合し前記第二の接続部材を保持する移動保持部とを有
し、前記架設方向と垂直方向の前記外表面の変位に対し
前記取り付け部と前記移動保持部とが相対移動する第二
の支持部材とを備えたことを特徴とする直交励起型レー
ザ発振器。An oscillator housing, a first optical base provided outside the oscillator housing and having a first reflecting mirror, and a first optical base opposed to the first optical base via the oscillator housing, A second optical base having one reflecting mirror and a second reflecting mirror forming a resonator; and the first optical base and the second optical base provided on an outer surface of the oscillator housing. A first connecting member and a second connecting member, the first supporting member being provided at the center of the outer surface in the erection direction and holding and fixing the first connecting member; and the outer surface A mounting portion fixed to a central portion of the mounting direction and a movable holding portion that engages with the mounting portion and holds the second connection member, and the displacement of the outer surface in a direction perpendicular to the mounting direction. And a second support member with which the mounting portion and the moving holding portion move relative to each other. A quadrature-pumped laser oscillator characterized in that:
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JP2000144801A JP3835116B2 (en) | 2000-05-17 | 2000-05-17 | Laser oscillator |
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JP2000144801A JP3835116B2 (en) | 2000-05-17 | 2000-05-17 | Laser oscillator |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010045336A (en) * | 2008-07-17 | 2010-02-25 | Fanuc Ltd | Gas laser resonator |
CN102780147A (en) * | 2011-05-09 | 2012-11-14 | 深圳市光大激光科技股份有限公司 | Resonant cavity structure for side-pumped solid-state laser |
CN111712974A (en) * | 2018-03-30 | 2020-09-25 | 松下神视株式会社 | Laser oscillator unit and laser processing apparatus |
CN113889826A (en) * | 2020-07-03 | 2022-01-04 | 住友重机械工业株式会社 | Laser oscillator |
-
2000
- 2000-05-17 JP JP2000144801A patent/JP3835116B2/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010045336A (en) * | 2008-07-17 | 2010-02-25 | Fanuc Ltd | Gas laser resonator |
JP4565045B2 (en) * | 2008-07-17 | 2010-10-20 | ファナック株式会社 | Gas laser resonator |
US8135051B2 (en) | 2008-07-17 | 2012-03-13 | Fanuc Ltd | Gas laser oscillator |
CN102780147A (en) * | 2011-05-09 | 2012-11-14 | 深圳市光大激光科技股份有限公司 | Resonant cavity structure for side-pumped solid-state laser |
CN111712974A (en) * | 2018-03-30 | 2020-09-25 | 松下神视株式会社 | Laser oscillator unit and laser processing apparatus |
CN111712974B (en) * | 2018-03-30 | 2022-12-02 | 松下神视株式会社 | Laser oscillator unit and laser processing apparatus |
CN113889826A (en) * | 2020-07-03 | 2022-01-04 | 住友重机械工业株式会社 | Laser oscillator |
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