JP2003317580A - 両面液体金属マイクロスイッチ - Google Patents

両面液体金属マイクロスイッチ

Info

Publication number
JP2003317580A
JP2003317580A JP2003071655A JP2003071655A JP2003317580A JP 2003317580 A JP2003317580 A JP 2003317580A JP 2003071655 A JP2003071655 A JP 2003071655A JP 2003071655 A JP2003071655 A JP 2003071655A JP 2003317580 A JP2003317580 A JP 2003317580A
Authority
JP
Japan
Prior art keywords
liquid metal
substrate
limms
pattern
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003071655A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003317580A5 (enExample
Inventor
Lewis R Dove
ルイス・アール・ドーブ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2003317580A publication Critical patent/JP2003317580A/ja
Publication of JP2003317580A5 publication Critical patent/JP2003317580A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure

Landscapes

  • Micromachines (AREA)
  • Contacts (AREA)
  • Push-Button Switches (AREA)
JP2003071655A 2002-04-24 2003-03-17 両面液体金属マイクロスイッチ Pending JP2003317580A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US128849 2002-04-24
US10/128,849 US6633213B1 (en) 2002-04-24 2002-04-24 Double sided liquid metal micro switch

Publications (2)

Publication Number Publication Date
JP2003317580A true JP2003317580A (ja) 2003-11-07
JP2003317580A5 JP2003317580A5 (enExample) 2006-04-27

Family

ID=22437284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003071655A Pending JP2003317580A (ja) 2002-04-24 2003-03-17 両面液体金属マイクロスイッチ

Country Status (5)

Country Link
US (1) US6633213B1 (enExample)
JP (1) JP2003317580A (enExample)
DE (1) DE10305355A1 (enExample)
GB (1) GB2387973A (enExample)
TW (1) TW200305903A (enExample)

Families Citing this family (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1254474B1 (en) * 2000-02-02 2004-03-24 Raytheon Company Microelectromechanical micro-relay with liquid metal contacts
US6689976B1 (en) * 2002-10-08 2004-02-10 Agilent Technologies, Inc. Electrically isolated liquid metal micro-switches for integrally shielded microcircuits
US7078849B2 (en) * 2001-10-31 2006-07-18 Agilent Technologies, Inc. Longitudinal piezoelectric optical latching relay
JP2005139901A (ja) * 2001-11-19 2005-06-02 Ngk Insulators Ltd 回路切換えスイッチ
US6741767B2 (en) * 2002-03-28 2004-05-25 Agilent Technologies, Inc. Piezoelectric optical relay
US20030194170A1 (en) * 2002-04-10 2003-10-16 Wong Marvin Glenn Piezoelectric optical demultiplexing switch
US6750594B2 (en) * 2002-05-02 2004-06-15 Agilent Technologies, Inc. Piezoelectrically actuated liquid metal switch
US6927529B2 (en) 2002-05-02 2005-08-09 Agilent Technologies, Inc. Solid slug longitudinal piezoelectric latching relay
US6756551B2 (en) 2002-05-09 2004-06-29 Agilent Technologies, Inc. Piezoelectrically actuated liquid metal switch
US7022926B2 (en) * 2002-12-12 2006-04-04 Agilent Technologies, Inc. Ultrasonically milled channel plate for a switch
US6855898B2 (en) * 2002-12-12 2005-02-15 Agilent Technologies, Inc. Ceramic channel plate for a switch
US6774324B2 (en) 2002-12-12 2004-08-10 Agilent Technologies, Inc. Switch and production thereof
US20040112727A1 (en) * 2002-12-12 2004-06-17 Wong Marvin Glenn Laser cut channel plate for a switch
US6743990B1 (en) * 2002-12-12 2004-06-01 Agilent Technologies, Inc. Volume adjustment apparatus and method for use
US7019235B2 (en) * 2003-01-13 2006-03-28 Agilent Technologies, Inc. Photoimaged channel plate for a switch
US6809277B2 (en) * 2003-01-22 2004-10-26 Agilent Technologies, Inc. Method for registering a deposited material with channel plate channels, and switch produced using same
US6747222B1 (en) 2003-02-04 2004-06-08 Agilent Technologies, Inc. Feature formation in a nonphotoimagable material and switch incorporating same
US6825429B2 (en) * 2003-03-31 2004-11-30 Agilent Technologies, Inc. Hermetic seal and controlled impedance RF connections for a liquid metal micro switch
US6920259B2 (en) * 2003-04-14 2005-07-19 Agilent Technologies, Inc. Longitudinal electromagnetic latching optical relay
US6891315B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Shear mode liquid metal switch
US20040201447A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Thin-film resistor device
US6924443B2 (en) * 2003-04-14 2005-08-02 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6894424B2 (en) * 2003-04-14 2005-05-17 Agilent Technologies, Inc. High frequency push-mode latching relay
US6876133B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Latching relay with switch bar
US6818844B2 (en) * 2003-04-14 2004-11-16 Agilent Technologies, Inc. Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6900578B2 (en) * 2003-04-14 2005-05-31 Agilent Technologies, Inc. High frequency latching relay with bending switch bar
US6946775B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch
US6879089B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Damped longitudinal mode optical latching relay
US6831532B2 (en) * 2003-04-14 2004-12-14 Agilent Technologies, Inc. Push-mode latching relay
US7070908B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Feature formation in thick-film inks
US6740829B1 (en) 2003-04-14 2004-05-25 Agilent Technologies, Inc. Insertion-type liquid metal latching relay
US6876130B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Damped longitudinal mode latching relay
US6903490B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Longitudinal mode optical latching relay
US6925223B2 (en) * 2003-04-14 2005-08-02 Agilent Technologies, Inc. Pressure actuated optical latching relay
US6816641B2 (en) * 2003-04-14 2004-11-09 Agilent Technologies, Inc. Method and structure for a solid slug caterpillar piezoelectric optical relay
US6762378B1 (en) 2003-04-14 2004-07-13 Agilent Technologies, Inc. Liquid metal, latching relay with face contact
US6956990B2 (en) * 2003-04-14 2005-10-18 Agilent Technologies, Inc. Reflecting wedge optical wavelength multiplexer/demultiplexer
US6903492B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Wetting finger latching piezoelectric relay
US6774325B1 (en) 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6879088B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Insertion-type liquid metal latching relay array
US6885133B2 (en) * 2003-04-14 2005-04-26 Agilent Technologies, Inc. High frequency bending-mode latching relay
US6961487B2 (en) * 2003-04-14 2005-11-01 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch
US7012354B2 (en) * 2003-04-14 2006-03-14 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch
US6894237B2 (en) * 2003-04-14 2005-05-17 Agilent Technologies, Inc. Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch
US6891116B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Substrate with liquid electrode
US6798937B1 (en) 2003-04-14 2004-09-28 Agilent Technologies, Inc. Pressure actuated solid slug optical latching relay
US6882088B2 (en) * 2003-04-14 2005-04-19 Agilent Technologies, Inc. Bending-mode latching relay
US6803842B1 (en) 2003-04-14 2004-10-12 Agilent Technologies, Inc. Longitudinal mode solid slug optical latching relay
US6838959B2 (en) * 2003-04-14 2005-01-04 Agilent Technologies, Inc. Longitudinal electromagnetic latching relay
US6841746B2 (en) * 2003-04-14 2005-01-11 Agilent Technologies, Inc. Bent switching fluid cavity
US6876131B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay with face contact
US6794591B1 (en) 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US6730866B1 (en) 2003-04-14 2004-05-04 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay array
US6876132B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Method and structure for a solid slug caterpillar piezoelectric relay
US6870111B2 (en) * 2003-04-14 2005-03-22 Agilent Technologies, Inc. Bending mode liquid metal switch
US6888977B2 (en) * 2003-04-14 2005-05-03 Agilent Technologies, Inc. Polymeric liquid metal optical switch
US6906271B2 (en) * 2003-04-14 2005-06-14 Agilent Technologies, Inc. Fluid-based switch
US6770827B1 (en) 2003-04-14 2004-08-03 Agilent Technologies, Inc. Electrical isolation of fluid-based switches
US7048519B2 (en) * 2003-04-14 2006-05-23 Agilent Technologies, Inc. Closed-loop piezoelectric pump
US6903287B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Liquid metal optical relay
US6946776B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition
US6903493B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Inserting-finger liquid metal relay
US7071432B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Reduction of oxides in a fluid-based switch
US6768068B1 (en) 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US6765161B1 (en) 2003-04-14 2004-07-20 Agilent Technologies, Inc. Method and structure for a slug caterpillar piezoelectric latching reflective optical relay
US6750413B1 (en) 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6777630B1 (en) 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US6759610B1 (en) 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6833520B1 (en) * 2003-06-16 2004-12-21 Agilent Technologies, Inc. Suspended thin-film resistor
US6759611B1 (en) 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6781074B1 (en) 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
GB0323043D0 (en) * 2003-09-24 2003-11-05 Lux Biotechnology Ltd Biochip
US20060017532A1 (en) * 2004-07-23 2006-01-26 Trutna William R Jr Metallic contact electrical switch incorporating lorentz actuator
US8830016B2 (en) * 2012-09-10 2014-09-09 Broadcom Corporation Liquid MEMS magnetic component

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5841686A (en) * 1996-11-22 1998-11-24 Ma Laboratories, Inc. Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate
US6021048A (en) * 1998-02-17 2000-02-01 Smith; Gary W. High speed memory module
US6326447B1 (en) * 1998-06-19 2001-12-04 E. I. Du Pont De Nemours And Company Polymeric compositions for soil release on fabrics
US5912606A (en) * 1998-08-18 1999-06-15 Northrop Grumman Corporation Mercury wetted switch
US6304450B1 (en) * 1999-07-15 2001-10-16 Incep Technologies, Inc. Inter-circuit encapsulated packaging
EP1254474B1 (en) * 2000-02-02 2004-03-24 Raytheon Company Microelectromechanical micro-relay with liquid metal contacts

Also Published As

Publication number Publication date
DE10305355A1 (de) 2003-11-13
US20030201855A1 (en) 2003-10-30
GB0306764D0 (en) 2003-04-30
TW200305903A (en) 2003-11-01
US6633213B1 (en) 2003-10-14
GB2387973A (en) 2003-10-29

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